JPH07205361A - Surface coating member excellent in wear resistance - Google Patents
Surface coating member excellent in wear resistanceInfo
- Publication number
- JPH07205361A JPH07205361A JP509994A JP509994A JPH07205361A JP H07205361 A JPH07205361 A JP H07205361A JP 509994 A JP509994 A JP 509994A JP 509994 A JP509994 A JP 509994A JP H07205361 A JPH07205361 A JP H07205361A
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- hard coating
- nitride
- carbide
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Cutting Tools, Boring Holders, And Turrets (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＷＣ基超硬合金、サー
メット、セラミックス等を母材とし、その母材の表面に
特定の硬質物質を被覆することにより、母材の耐欠損性
を維持しながら耐摩耗性を向上させた表面被覆部材に関
する。なお、この部材の代表的な用途としては切削工具
や耐摩工具が挙げられる。BACKGROUND OF THE INVENTION The present invention uses a WC-based cemented carbide, cermet, ceramics, etc. as a base material and coats the surface of the base material with a specific hard substance to maintain the fracture resistance of the base material. However, the present invention relates to a surface coating member having improved wear resistance. Note that typical applications of this member include cutting tools and wear resistant tools.
【０００２】[0002]
【従来の技術】切削工具、耐摩工具の耐摩耗性を向上さ
せるため、これ等の工具の母材表面にＰＶＤ法やＣＶＤ
法によりＴｉ、Ｈｆ、Ｚｒの炭化物、窒化物、炭窒化物
やＡｌの酸化物から成る単層又は複層の被覆膜を設ける
ことは既に一般化している。この硬質被膜をもつ表面被
覆部材の中でも特に、硬質被膜をＰＶＤ法で形成するも
のは、母材強度の劣化なしに耐摩耗性を向上できるとい
う特長があり、ドリル、エンドミル、フライス切削用ス
ローアウェイチップなど強度の要求される切削用途に適
応されている。2. Description of the Related Art In order to improve the wear resistance of cutting tools and wear resistant tools, the surface of the base materials of these tools is subjected to PVD or CVD.
It has already been generalized to provide a single-layer or multi-layer coating film made of oxides of Ti, Hf, Zr carbides, nitrides, carbonitrides and Al by the method. Among the surface-coated members having this hard coating, the one in which the hard coating is formed by the PVD method has the characteristic that the wear resistance can be improved without deterioration of the strength of the base metal, and it is a drill, end mill, or throwaway tool for milling. It is suitable for cutting applications that require strength such as chips.
【０００３】[0003]
【発明が解決しようとする課題】Ａｌの酸化物被膜は、
耐摩耗性に関して非常に好ましいものであるが、ＰＶＤ
法ではこのＡｌの酸化膜を安定して被覆するのが難し
く、母材強度の面からＰＶＤ法を用いる部材については
このＡｌの酸化被膜は実用化に至っていない。The oxide film of Al is
Highly preferred for abrasion resistance, but PVD
With this method, it is difficult to stably coat this Al oxide film, and from the viewpoint of the strength of the base material, this Al oxide film has not been put to practical use for members using the PVD method.
【０００４】現在実用化されているものは、Ｔｉ、Ｈ
ｆ、Ｚｒ等の窒化物の被膜である。ところが、この種の
被膜は、特に、高速切削用途での耐摩性が不足し、早期
に寿命に至っている。Ti and H are currently in practical use.
It is a film of nitride such as f and Zr. However, this type of coating has insufficient wear resistance, especially in high-speed cutting applications, and has reached the end of its service life early.
【０００５】そこで、本発明は、ＰＶＤ法での形成が可
能であり、しかも耐摩耗性が従来のＰＶＤ法による被膜
に比べて格段に優れている被膜をもった表面被覆部材を
提供しようとするものである。Therefore, the present invention intends to provide a surface coating member having a coating which can be formed by the PVD method and which is much more excellent in abrasion resistance than the coating formed by the conventional PVD method. It is a thing.
【０００６】[0006]
【課題を解決するための手段】上記の課題を解決するた
め、本発明においては、母材表面に設ける硬質被膜を、
IVａ、Ｖａ、VIａ族金属元素或いはＡｌ、Ｓｉの窒化
物、酸化物、炭化物、炭窒化物、ホウ化物の中から選ん
だ１つ以上の化合物と、IVａ、Ｖａ、VIａ族金属元素お
よびＡｌ、Ｓｉのうちの２種の金属元素の合金の窒化
物、酸化物、炭化物、炭窒化物及び／若しくはホウ化物
を積層周期０．４ｎｍ〜５０ｎｍで積層し、全体の膜厚
を０．５〜１０μｍとした構造の膜となしたのである。In order to solve the above-mentioned problems, in the present invention, a hard coating provided on the surface of the base material,
One or more compounds selected from the group consisting of IVa, Va, VIa group metal elements or Al, Si nitrides, oxides, carbides, carbonitrides, borides, and IVa, Va, VIa group metal elements and Al, Nitrides, oxides, carbides, carbonitrides and / or borides of alloys of two metal elements of Si are laminated with a lamination cycle of 0.4 nm to 50 nm, and the total film thickness is 0.5 to 10 μm. The film has the above structure.
【０００７】この表面被覆部材を切削工具や耐摩工具と
して利用する場合の母材材料は、ＷＣ基超硬合金、サー
メット、セラミックスなどが適している。WC-based cemented carbide, cermet, ceramics and the like are suitable as the base material when the surface-coated member is used as a cutting tool or an abrasion resistant tool.
【０００８】また、切削用途、耐摩用途では特に、母材
と硬質被膜との界面及び／若しくは硬質被膜の表面にIV
族金属元素の窒化物、炭化物、炭窒化物、酸化物の少な
くとも１種から成る中間層や表層膜を配することも有効
なことである。この中間層や表層膜は、Ｔｉの窒化物、
炭化物、炭窒化物、又はそれ等の積層物が特に好まし
い。[0008] In addition, especially in cutting applications and abrasion resistant applications, IV at the interface between the base material and the hard coating and / or the surface of the hard coating.
It is also effective to dispose an intermediate layer or surface layer film made of at least one kind of nitride, carbide, carbonitride, and oxide of a group metal element. The intermediate layer and surface layer are made of Ti nitride,
Carbides, carbonitrides, or laminates thereof are particularly preferred.
【０００９】以下、本発明の構成について更に詳細に述
べる。The structure of the present invention will be described in more detail below.
【００１０】IVａ、Ｖａ、VIａ族金属元素およびＡｌ、
Ｓｉの中から選ばれた２種類以上の金属からなる合金の
窒化物、酸化物、炭化物、炭窒化物及びホウ化物の被膜
を形成した表面被覆硬質部材は、優れた切削工具、耐摩
工具となり得ることがこれまでに良く知られているが、
発明者らはこれらの膜の特徴を研究していくうちに以下
のような知見を得るに至った。IVa, Va, VIa group metal elements and Al,
A surface-coated hard member on which a nitride, oxide, carbide, carbonitride, or boride coating of an alloy composed of two or more kinds of metals selected from Si is formed can be an excellent cutting tool or wear resistant tool. It is well known that
The inventors have obtained the following findings while studying the characteristics of these films.
【００１１】いままでに上記金属の窒化物、炭化物、炭
窒化物及びホウ化物のうち２つ以上の化合物を層厚０．
２〜１０ｎｍで積層すると良好な耐摩耗性を示す硬質膜
が得られることが知られている（特願平４−２７２９４
６）。しかし、このときIVａ、Ｖａ、VIａ族金属元素お
よびＡｌ、Ｓｉから選んだ金属の窒化物、炭化物、炭窒
化物及びホウ化物のうち２種類を交互に積層した場合、
各々の界面で剥離が起きることがあり、結果的に摩耗が
早くなり実際の使用にあたって問題となることがあっ
た。Up to now, two or more compounds selected from the above-mentioned metal nitrides, carbides, carbonitrides and borides have a layer thickness of 0.
It is known that a hard film having good wear resistance can be obtained by laminating 2 to 10 nm (Japanese Patent Application No. 4-27294).
6). However, at this time, when two kinds of nitrides, carbides, carbonitrides, and borides of the group IVa, Va, and VIa metal elements and metals selected from Al and Si are alternately laminated,
Peeling may occur at each interface, resulting in rapid wear and a problem in actual use.
【００１２】そこで片方の化合物を上記金属元素のうち
２つ以上からなる合金の窒化物、炭化物、炭窒化物或い
はホウ化物としたところ、界面の整合性が良くなり、結
果的に優れた耐摩耗性を示す硬質膜を得ることができ
た。Therefore, when one compound is a nitride, a carbide, a carbonitride or a boride of an alloy composed of two or more of the above metal elements, the interface consistency is improved, resulting in excellent wear resistance. It was possible to obtain a hard film exhibiting properties.
【００１３】この硬質膜はいままで知られていた積層膜
よりも高い硬度をもつこともわかった。この理由として
は以下のことがあげられる。It has also been found that this hard film has a higher hardness than previously known laminated films. The reason for this is as follows.
【００１４】IVａ、Ｖａ、VIａ族金属元素およびＡｌ、
Ｓｉから選んだ２つ以上の元素から成る合金の窒化物、
炭化物、炭窒化物又はホウ化物は、その硬度がIVａ、Ｖ
ａ、VIａ族金属元素およびＡｌ、Ｓｉの窒化物、炭化
物、炭窒化物或いはホウ化物よりも増すことが知られて
いる。この硬度の高い合金の窒化物、炭化物、炭窒化物
或いはホウ化物と、IVａ、Ｖａ、VIａ族金属元素および
Ａｌ、Ｓｉから選んだ金属の窒化物、炭化物、炭窒化物
もしくはホウ化物を層厚０．２〜１０ｎｍで積層すると
前者の化合物の特性が生かされ、非合金化合物どうしを
積層した場合よりも硬度が上がるのである。IVa, Va, VIa group metal elements and Al,
A nitride of an alloy composed of two or more elements selected from Si,
Carbides, carbonitrides or borides have hardnesses of IVa, V
It is known that the amount is higher than that of nitrides, carbides, carbonitrides, or borides of a, VIa group metal elements and Al, Si. The nitride, carbide, carbonitride or boride of this high hardness alloy and the nitride, carbide, carbonitride or boride of a metal selected from IVa, Va and VIa group metal elements and Al and Si are layered. When the layers are laminated at 0.2 to 10 nm, the characteristics of the former compound are utilized, and the hardness is higher than when the non-alloy compounds are laminated.
【００１５】さらにくわえてこの多層膜を形成する際、
硬質被膜と母材の界面または、硬質被膜の最表面にIV族
の金属元素の窒化物、炭窒化物、炭化物、酸化物を形成
しておくと、さらに良好な耐摩耗性を得ることができる
という知見をえた。In addition, when forming this multilayer film,
By forming nitrides, carbonitrides, carbides and oxides of group IV metal elements on the interface between the hard coating and the base material or on the outermost surface of the hard coating, better wear resistance can be obtained. I got the knowledge that.
【００１６】この硬質膜で被覆された切削工具はとくに
鋼の切削において優れた切削性能を示すが、鋳鉄切削で
も良好な性能を示す。また、この硬質被膜をもつ切削工
具はフライス切削において優れた性能を示すことが多い
が、旋削においても良い性能を示す。さらに、従来の硬
質膜が低送りおよび微小送りにおいて十分な性能を示せ
なかったのに対し、本発明の工具の硬質膜はこれらの膜
に大きな負担がかかる切削においても良好な耐摩耗性を
示す。The cutting tool coated with this hard film shows excellent cutting performance especially in cutting steel, but also in cast iron cutting. Further, cutting tools having this hard coating often show excellent performance in milling, but also show good performance in turning. Furthermore, while the conventional hard coatings did not show sufficient performance at low feeds and minute feeds, the hard coatings of the tool of the present invention exhibit good wear resistance even in cutting where a heavy load is placed on these coatings. .
【００１７】なお、本発明の表面被覆部材を切削工具や
耐摩工具として用いる場合の母材は、勿論、高速度鋼等
であってもよい。The base material used when the surface-coated member of the present invention is used as a cutting tool or an abrasion resistant tool may, of course, be high speed steel or the like.
【００１８】[0018]
【実施例】以下に、本発明の表面被覆部材の具体例とそ
の製造方法について述べる。EXAMPLES Specific examples of the surface coating member of the present invention and a method for producing the same will be described below.
【００１９】基板母材として、ＪＩＳ規格Ｐ３０の超硬
合金と、サーメットと、セラミックスを用意した。母材
の形状はＪＩＳ・ＳＮＧ４３２の切削チップである。こ
の切削チップを、公知の真空アーク蒸着法によりターゲ
ットとしてＴｉとＡｌ、ＺｒとＨｆ、およびＴｉとＨｆ
の３種の組合せを用いて被覆を行なった。As a substrate base material, a JIS P30 cemented carbide, cermet and ceramics were prepared. The shape of the base material is a cutting tip of JIS SNG432. This cutting tip was used as a target by a known vacuum arc vapor deposition method to form Ti and Al, Zr and Hf, and Ti and Hf.
Coating was carried out using a combination of the three.
【００２０】図１に示すように、蒸着装置１内の一方に
Ｔｉターゲット２を設置し、その向い側にＴｉＡｌター
ゲット３を設置し、その中央でターンテーブル４上の切
削チップＴＡが一分間に５０回転するように調節した
後、炉内をＡｒガス１×１０-2Ｔｏｒｒの真空度に保
ち、切削チップに−２０００Ｖの電圧をかけて洗浄を行
い、さらに、５００℃まで加熱した後、Ａｒを排気して
Ｎ2 ガスを３００ＣＣ／ｍｉｎの割合で導入した。ここ
で真空アーク放電によりＴｉターゲット、ＴｉＡｌター
ゲットを蒸発、イオン化させることにより、切削チップ
がＴｉとＴｉＡｌの蒸気の中を交互に通過することにな
る。このとき被覆対象の切削チップを回転させることで
表面にＴｉＡｌＮとＴｉＮを交互に積層した構成の硬質
被膜を形成することができた。全体の層厚は被覆時間に
よって制御した。As shown in FIG. 1, a Ti target 2 is installed on one side of a vapor deposition apparatus 1, and a TiAl target 3 is installed on the opposite side of the vapor deposition apparatus 1. After adjusting so as to rotate 50 times, the inside of the furnace was maintained at a vacuum degree of Ar gas of 1 × 10 -2 Torr, the cutting tip was cleaned by applying a voltage of -2000 V, and further heated to 500 ° C. Was evacuated and N 2 gas was introduced at a rate of 300 CC / min. By evaporating and ionizing the Ti target and the TiAl target by vacuum arc discharge, the cutting tip alternately passes through the vapors of Ti and TiAl. At this time, by rotating the cutting tip to be coated, it was possible to form a hard coating having a structure in which TiAlN and TiN were alternately laminated on the surface. The total layer thickness was controlled by the coating time.
【００２１】以上の方法にて表１に示される層構成の硬
質被膜層を形成することにより、本発明の表面被覆切削
チップを製造した（実施例Ｉ）。同様に、ターゲットと
してＺｒとＺｒＨｆ、反応ガスとしてＣＨ4 を用い、Ｚ
ｒＣとＺｒＨｆＣの積層膜を形成した（実施例II）。ま
たターゲットとしてＴｉとＴｉＨｆ、反応ガスとしてＣ
Ｈ4 を用い、ＴｉＣとＴｉＨｆＣの積層膜を形成した
（実施例III ）。By forming the hard coating layer having the layer constitution shown in Table 1 by the above method, a surface-coated cutting tip of the present invention was manufactured (Example I). Similarly, using Zr and ZrHf as targets and CH 4 as a reaction gas,
A laminated film of rC and ZrHfC was formed (Example II). Further, Ti and TiHf are used as targets, and C is used as a reaction gas.
A laminated film of TiC and TiHfC was formed using H 4 (Example III).
【００２２】所期の積層構造となっていることはＥＰＭ
Ａ、オージェ、ＴＥＭといった分析法によって確認でき
る。EPM has the expected laminated structure
It can be confirmed by analytical methods such as A, Auger, and TEM.
【００２３】また、比較のため、同じ切削チップを同じ
装置にて表面にＴｉおよびＡｌの窒化物、炭化物、炭窒
化物のうちの１種類の単層、もしくは２種類以上の複層
を形成した表面被覆切削チップＡ〜Ｃをそれぞれ製造
し、通常良く用いられているＣＶＤ法にてコーティング
した表面被覆切削チップＤ、Ｅも用意した。またＦとし
て、通常良く知られている合金の蒸発源を使用して作製
したＴｉＡｌＮ膜被覆の切削チップを用意した。さら
に、Ｇとして、ＴｉＮとＡｌＮ膜を形成した表面被覆切
削チップを用意した。また、ＺｒＨｆＣ、ＴｉＨｆＣに
ついても同様な層構成をもつ表面被覆切削チップを用意
した。これらをまとめて表１、表２、表３、表４に示
す。For comparison, the same cutting tip was used to form a single layer of one of Ti and Al nitrides, carbides, and carbonitrides, or two or more types of multiple layers, on the surface of the same device. Each of the surface-coated cutting chips A to C was manufactured, and the surface-coated cutting chips D and E coated by the commonly used CVD method were also prepared. Further, as F, a cutting tip coated with a TiAlN film prepared by using a well-known alloy evaporation source was prepared. Further, as G, a surface-coated cutting tip on which a TiN and AlN film was formed was prepared. Further, surface coated cutting chips having the same layer structure were prepared for ZrHfC and TiHfC. These are summarized in Table 1, Table 2, Table 3 and Table 4.
【００２４】次に、これらの試作表面被覆切削チップに
ついて、連続切削試験、および断続切削試験を表５に示
した条件にて行ない、切れ刃の逃げ面摩耗量を測定し
た。その結果を表１〜表４に併せて示す。Next, these trial surface-coated cutting tips were subjected to a continuous cutting test and an intermittent cutting test under the conditions shown in Table 5 to measure the flank wear amount of the cutting edge. The results are also shown in Tables 1 to 4.
【００２５】[0025]
【表１】 [Table 1]
【００２６】[0026]
【表２】 [Table 2]
【００２７】[0027]
【表３】 [Table 3]
【００２８】[0028]
【表４】 [Table 4]
【００２９】[0029]
【表５】 [Table 5]
【００３０】表１〜表４に示す切削実験結果から判るよ
うに、本発明の表面被覆切削チップは、いずれも従来の
被覆切削チップＡ〜Ｆと同様の材料で硬質被膜を形成し
たにも拘らず、従来チップに比べてはるかに優れた耐欠
損性と耐摩耗性を発揮する。As can be seen from the cutting experiment results shown in Tables 1 to 4, the surface-coated cutting tips of the present invention all have the same hard coating as the conventional coated cutting tips AF. In addition, it exhibits much better fracture resistance and wear resistance than conventional chips.
【００３１】[0031]
【発明の効果】以上述べたように、本発明の表面被覆部
材は、母材表面に、単元素の化合物と合金の化合物を積
層した構造の硬質被膜を有するため、優れた耐熱性、溶
着防止特性、耐酸化性、摺動特性、耐マイクロチッピン
グ性を有し、ＰＶＤ法で形成できるその硬質被膜が従来
の被膜と同等以上の硬さを持ちながら靱性も兼ね備えて
いるため、切削工具や耐摩工具として用いると、長期に
渡って良好な工具性能を維持し続けると言う効果が得ら
れる。As described above, the surface-coated member of the present invention has a hard coating having a structure in which a compound of a single element and a compound of an alloy are laminated on the surface of the base material, and therefore has excellent heat resistance and prevention of welding. It has characteristics, oxidation resistance, sliding characteristics, and micro-chipping resistance, and its hard coating that can be formed by the PVD method has hardness equal to or higher than that of conventional coatings, but also has toughness. When used as a tool, it has an effect of maintaining good tool performance for a long period of time.
【００３２】なお、本発明の部材は、切削工具、耐摩工
具はもとより、表面の摩滅防止が要求される摺動部品等
に利用しても寿命延長の効果がある。The member of the present invention is effective not only for cutting tools and abrasion resistant tools but also for extending the life of the sliding parts and the like which are required to prevent surface abrasion.
【図１】本発明の表面被覆部材の製造方法の一例を示す
線図FIG. 1 is a diagram showing an example of a method for manufacturing a surface-coated member of the present invention.
１ 真空アーク蒸着装置 ２、３ ターゲット ４ ターンテーブル ＴＡ 切削チップ 1 Vacuum arc deposition equipment 2, 3 Target 4 Turntable TA Cutting tip
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｃ２３Ｃ 14/06 Ｂ 9271−4Ｋ Ｃ 9271−4Ｋ Ｈ 9271−4Ｋ 14/08 Ｈ 9271−4Ｋ 14/18 9271−4Ｋ (72)発明者 瀬戸山 誠 伊丹市昆陽北一丁目１番１号 住友電気工 業株式会社伊丹製作所内 (72)発明者 中山 明 伊丹市昆陽北一丁目１番１号 住友電気工 業株式会社伊丹製作所内 (72)発明者 吉岡 剛 伊丹市昆陽北一丁目１番１号 住友電気工 業株式会社伊丹製作所内─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location C23C 14/06 B 9271-4K C 9271-4K H 9271-4K 14/08 H 9271-4K 14 / 18 9271-4K (72) Inventor Makoto Setoyama 1-1-1 Kunyo Kita, Itami-shi Sumitomo Electric Industries, Ltd. Itami Works (72) Inventor Akira Nakayama 1-1-1 Kunyo-kita, Itami-shi Sumitomo Electric (72) Inventor Tsuyoshi Yoshioka 1-1-1 Kunyokita, Itami City Sumitomo Electric Industries Itami Works Co., Ltd.
Claims (7)
ｌ、Ｓｉの窒化物、酸化物、炭化物、炭窒化物、ホウ化
物の中から選んだ１つ以上の化合物と、IVａ、Ｖａ、VI
ａ族金属元素およびＡｌ、Ｓｉのうちの２種の金属元素
の合金の窒化物、酸化物、炭化物、炭窒化物及び／若し
くはホウ化物を積層周期０．４ｎｍ〜５０ｎｍで積層
し、全体の膜厚を０．５〜１０μｍとした構成の硬質被
膜を母材表面にもつことを特徴とする耐摩耗性に優れた
表面被覆部材。1. A group IVa, Va or VIa metal element or A
l, one or more compounds selected from Si nitrides, oxides, carbides, carbonitrides, borides, and IVa, Va, VI
The entire film is formed by stacking nitrides, oxides, carbides, carbonitrides, and / or borides of group a metal elements and alloys of two kinds of metal elements of Al and Si at a stacking period of 0.4 nm to 50 nm. A surface-coated member having excellent wear resistance, which has a hard coating having a thickness of 0.5 to 10 μm on the surface of a base material.
ックスから成る母材の表面に請求項１記載の硬質被膜を
設けてある切削工具又は耐摩工具。2. A cutting tool or wear resistant tool, wherein the hard coating according to claim 1 is provided on the surface of a base material made of WC-based cemented carbide, cermet or ceramics.
元素の窒化物、炭化物、炭窒化物、酸化物の少なくとも
１種から成る中間層を配してある請求項２記載の切削工
具又は耐摩工具。3. The cutting according to claim 2, wherein an intermediate layer made of at least one of a nitride, a carbide, a carbonitride and an oxide of a group IV metal element is arranged at the interface between the base material and the hard coating. Tool or wear resistant tool.
窒化物、又はそれ等の積層物である請求項３記載の切削
工具又は耐摩工具。4. The cutting tool or wear resistant tool according to claim 3, wherein the intermediate layer is a nitride, a carbide, a carbonitride of Ti, or a laminate thereof.
炭化物、炭窒化物、もしくはそれ等の積層物から成る表
層膜を配した請求項２、３又は４記載の切削工具又は耐
摩工具。5. A Ti nitride on the surface of the hard coating,
The cutting tool or wear resistant tool according to claim 2, 3 or 4, wherein a surface layer film made of a carbide, a carbonitride, or a laminate thereof is provided.
Ｎを０．４〜５０ｎｍの周期で積層したものを備えてい
る請求項２記載の切削工具又は耐摩工具。6. The hard coating comprises TiN and TiAl
The cutting tool or the wear resistant tool according to claim 2, comprising N laminated in a cycle of 0.4 to 50 nm.
化物からなる中間層を有している請求項６記載の切削工
具又は耐摩工具。7. The cutting tool or wear resistant tool according to claim 6, further comprising an intermediate layer made of Ti nitride at an interface between the base material and the hard coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00509994A JP3460287B2 (en) | 1994-01-21 | 1994-01-21 | Surface coating member with excellent wear resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP00509994A JP3460287B2 (en) | 1994-01-21 | 1994-01-21 | Surface coating member with excellent wear resistance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07205361A true JPH07205361A (en) | 1995-08-08 |
| JP3460287B2 JP3460287B2 (en) | 2003-10-27 |
Family
ID=11601937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00509994A Expired - Lifetime JP3460287B2 (en) | 1994-01-21 | 1994-01-21 | Surface coating member with excellent wear resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3460287B2 (en) |
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| JP2008512262A (en) * | 2005-01-31 | 2008-04-24 | サンドビック インテレクチュアル プロパティー アクティエボラーグ | Cemented carbide insert for short hole drilling that requires toughness |
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| JP2002517615A (en) * | 1998-06-11 | 2002-06-18 | ユナキス・トレーディング・アクチェンゲゼルシャフト | Method for removing a hard material layer |
| JP2008512262A (en) * | 2005-01-31 | 2008-04-24 | サンドビック インテレクチュアル プロパティー アクティエボラーグ | Cemented carbide insert for short hole drilling that requires toughness |
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| DE112011104813T5 (en) | 2011-02-01 | 2013-10-31 | Osg Corporation | hard laminar |
| KR20140129009A (en) * | 2012-02-14 | 2014-11-06 | 산드빅 인터렉츄얼 프로퍼티 에이비 | Coated cutting tool and method of making the same |
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