JP3334450B2 - Piezoelectric actuator and pyroelectric infrared sensor using the same - Google Patents
Piezoelectric actuator and pyroelectric infrared sensor using the sameInfo
- Publication number
- JP3334450B2 JP3334450B2 JP26376595A JP26376595A JP3334450B2 JP 3334450 B2 JP3334450 B2 JP 3334450B2 JP 26376595 A JP26376595 A JP 26376595A JP 26376595 A JP26376595 A JP 26376595A JP 3334450 B2 JP3334450 B2 JP 3334450B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- resonance
- displacement
- frequency
- shim
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000010586 diagram Methods 0.000 description 14
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- 238000001514 detection method Methods 0.000 description 9
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は電気信号を機械的運
動に変換する圧電アクチュエータおよびそれを用いた焦
電型赤外線センサに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuator for converting an electric signal into a mechanical movement and a pyroelectric infrared sensor using the same.
【0002】[0002]
【従来の技術】近年、焦電型赤外線センサは、電子レン
ジにおける調理物の温度測定や、エアコンにおける人体
の位置検出などの幅広い分野で利用され、今後ますます
需要が大きくなると思われる。2. Description of the Related Art In recent years, pyroelectric infrared sensors have been used in a wide range of fields such as measuring the temperature of foods in a microwave oven and detecting the position of a human body in an air conditioner, and the demand is expected to increase in the future.
【0003】焦電型赤外線センサは、LiTaO3単結
晶等の焦電体による焦電効果を利用したものである。焦
電体は自発分極を有しており常に表面電荷が発生する
が、大気中における定常状態では大気中の電荷と結びつ
いて電気的に中性を保っている。この焦電体に赤外線が
入射すると焦電体の温度が変化し、これにともない表面
の電荷状態も中性状態が壊れて変化する。この表面に発
生する電荷を検知し、赤外線入射量を測定するのが焦電
型赤外線センサである。物体はその温度に応じた赤外線
を放射しており、この焦電型赤外線センサを用いること
により物体の位置や温度を検出できる。A pyroelectric infrared sensor utilizes the pyroelectric effect of a pyroelectric body such as a LiTaO 3 single crystal. The pyroelectric body has spontaneous polarization and always generates a surface charge. However, in a steady state in the atmosphere, the pyroelectric body is electrically neutral with the charge in the atmosphere. When infrared light is incident on the pyroelectric body, the temperature of the pyroelectric body changes, and accordingly, the charge state of the surface changes due to the neutral state being broken. A pyroelectric infrared sensor detects charges generated on the surface and measures the amount of incident infrared light. An object emits infrared rays according to its temperature, and the position and temperature of the object can be detected by using this pyroelectric infrared sensor.
【0004】焦電効果は赤外線の入射量の変化に起因す
るものであり、焦電型赤外線センサとして物体の温度を
検出する場合、赤外線入射量を断続あるいは開閉して強
制的に変化させる必要がある。この手段として用いられ
る機構をチョッパといい、入射する赤外線を強制的に断
続し検出物体の温度を検知する。従来のチョッパとして
は、電磁モータおよび圧電アクチュエータ等が用いられ
ていた。The pyroelectric effect is caused by a change in the amount of incident infrared light. When detecting the temperature of an object as a pyroelectric infrared sensor, it is necessary to forcibly change the amount of infrared light intermittently or by opening and closing. is there. A mechanism used as this means is called a chopper, and forcibly interrupts the incident infrared rays to detect the temperature of the detection object. As a conventional chopper, an electromagnetic motor, a piezoelectric actuator, and the like have been used.
【0005】図6は弾性体平板に圧電体を接着したアク
チュエータをチョッパとして用いた焦電型赤外線センサ
の従来例である。一般的に金属等の弾性体平板に圧電体
を接着して貼合わせ素子を構成して片端を固定し、圧電
体による歪を利用して全体を屈曲運動を発生させるアク
チュエータは、一般には弾性体平板の両面に圧電体を接
着したものはバイモルフ型、片面にのみ接着したものは
ユニモルフ型と呼ばれており、また弾性体平板はシムと
呼ばれており、以下各部材をそのように呼ぶ。FIG. 6 shows a conventional example of a pyroelectric infrared sensor using, as a chopper, an actuator obtained by bonding a piezoelectric body to an elastic flat plate. Generally, an actuator that forms a bonding element by bonding a piezoelectric body to an elastic flat plate of metal or the like, fixes one end, and generates a bending motion as a whole by using the distortion caused by the piezoelectric body is generally an elastic body. A plate in which a piezoelectric body is bonded to both sides of a flat plate is called a bimorph type, and a plate in which only one surface is bonded is called a unimorph type, and an elastic flat plate is called a shim. Hereinafter, each member is referred to as such.
【0006】図6はバイモルフ型素子を焦電型赤外線セ
ンサ用チョッパとして用いたものであり、61はシム、
62a,62bは圧電体、63は遮蔽板、64は台座、
65は固定具、66はシム用配線、67a,67bは圧
電体用配線、68は赤外線検出部、69は遮蔽板63に
設けたスリット、70は赤外線である。FIG. 6 shows a bimorph element used as a chopper for a pyroelectric infrared sensor.
62a and 62b are piezoelectric bodies, 63 is a shielding plate, 64 is a pedestal,
65 is a fixture, 66 is shim wiring, 67a and 67b are piezoelectric wiring, 68 is an infrared detector, 69 is a slit provided in the shielding plate 63, and 70 is infrared.
【0007】シム61の両面には圧電体62a,62b
がそれぞれ接着され、三者が一体となりバイモルフ型素
子が構成されている。圧電体62a,62bは表面に電
極が印刷され、また接着面に対し垂直方向に分極処理が
施されており、圧電体62a,62bそれぞれの分極の
方向は、シム61から取り出された配線66と圧電体6
2a,62bから取り出された配線67a,67bによ
りシム61と圧電体62a,62bそれぞれの間に加え
られる電界の向きにより異なるが、圧電体62a,62
bが常に互いに逆の方向に歪を発生するように決められ
る。On both sides of the shim 61, piezoelectric bodies 62a, 62b
Are bonded to each other to form a bimorph-type element. Electrodes are printed on the surfaces of the piezoelectric bodies 62a and 62b, and a polarization process is performed in a direction perpendicular to the bonding surface. The polarization directions of the piezoelectric bodies 62a and 62b are determined by the wiring 66 taken out from the shim 61 and the wiring 66. Piezoelectric body 6
Depending on the direction of the electric field applied between the shim 61 and the piezoelectric bodies 62a and 62b due to the wirings 67a and 67b taken out from the 2a and 62b, the piezoelectric bodies 62a and 62b are different.
b is determined so as to always generate distortion in directions opposite to each other.
【0008】すなわち、圧電体62a,62bの片方が
分極方向に伸びる方向で歪むとき、もう一方は分極方向
に縮むように印加電界の方向と分極方向は決められる。
バイモルフ型素子は台座64と固定具65とによりシム
61の部分と圧電体62a,62bの部分が同時に挟み
込まれることにより保持されている。シム61の圧電体
62a,62bが接着されていない部分にはシム用配線
66が取り付けられ、また圧電体62a,62bの表面
には圧電体用配線67a,67bが取り付けられてい
る。That is, when one of the piezoelectric bodies 62a and 62b is distorted in the direction of extension in the polarization direction, the other is contracted in the polarization direction, so that the direction of the applied electric field and the polarization direction are determined.
The bimorph-type element is held by the portion of the shim 61 and the portion of the piezoelectric bodies 62a and 62b being sandwiched by the pedestal 64 and the fixture 65 at the same time. A shim wiring 66 is attached to a portion of the shim 61 where the piezoelectric bodies 62a and 62b are not bonded, and piezoelectric wirings 67a and 67b are attached to the surfaces of the piezoelectric bodies 62a and 62b.
【0009】バイモルフ型素子の自由端の先端部分には
遮蔽板63が取り付けられ、遮蔽板63にはスリット6
9が設けられている。この遮蔽板63の近傍には赤外線
検出部68が遮蔽板63およびバイモルフ型素子に接触
しないように配置される。シム用配線66および圧電体
用配線67a,67bによりシム61と圧電体62a,
62bの間にそれぞれ電界が印加されると、バイモルフ
型素子は片端固定の屈曲運動を発生し、先端に取り付け
られた遮蔽板63およびスリット69は電界の印加方向
の変化に応じて往復運動を行う。このスリット69の往
復運動により赤外線検出部68に入射する赤外線70を
断続する。A shield plate 63 is attached to the tip of the free end of the bimorph-type element.
9 are provided. An infrared detector 68 is arranged near the shield plate 63 so as not to contact the shield plate 63 and the bimorph-type element. The shim 61 and the piezoelectric members 62a, 62b are formed by the shim wire 66 and the piezoelectric wires 67a, 67b.
When an electric field is applied during the period 62b, the bimorph-type element generates a bending motion fixed at one end, and the shield plate 63 and the slit 69 attached to the tip reciprocate according to a change in the direction of application of the electric field. . Due to the reciprocating motion of the slit 69, the infrared ray 70 incident on the infrared ray detector 68 is intermittently intermittent.
【0010】しかしながら、上記の構成のバイモルフ型
チョッパは、赤外線を断続するのに十分な移動距離を得
るために、固定部から先端の移動部までの寸法を大きく
する必要があり、また非常に高い駆動電圧が必要であ
る。However, the bimorph-type chopper having the above-described structure requires a large dimension from the fixed portion to the tip moving portion in order to obtain a moving distance sufficient to intermittently transmit infrared rays, and is very high. A drive voltage is required.
【0011】そこで、従来の改善方法として、バイモル
フ型素子あるいはユニモルフ型素子の先端移動部分に荷
重負荷を設けて共振周波数を低下させ、固定をシム部分
のみで行うことにより圧電体が脆性破壊することを防止
し、更に必要に応じて固定部近傍のシムに切り欠きを設
けるなどの手段により共振周波数をより低下させること
で、低電圧駆動で大きな変位を得ることができる。Therefore, as a conventional improvement method, a piezoelectric body is brittlely broken by applying a load to the tip moving portion of a bimorph-type element or a unimorph-type element to lower the resonance frequency and fixing only the shim. By further reducing the resonance frequency by, for example, providing a notch in the shim near the fixed portion as necessary, a large displacement can be obtained with low voltage driving.
【0012】以下に上記の特徴を持つチョッパの構造の
一例を示す。図7は従来の改善例における焦電型赤外線
センサ用チョッパとしてのユニモルフ型素子を、シム部
分の固定場所の幅が細くなるように成形した場合の一例
を示す斜視図である。図7において、71a,71bは
シム、72a,72bは圧電体、73a,73bは重
り、74はセンサ台座、75a,75bはユニモルフ型
素子固定具、76a,76bはシム用配線、77a,7
7bは圧電体用配線、78は赤外線検出部、79a,7
9b,79c,79dはユニモルフ型素子固定ネジ、8
0は赤外線である。The following is an example of the structure of a chopper having the above characteristics. FIG. 7 is a perspective view showing an example in which a unimorph-type element as a chopper for a pyroelectric infrared sensor in a conventional improved example is formed so that the width of a fixing place of a shim portion is reduced. In FIG. 7, 71a and 71b are shims, 72a and 72b are piezoelectric bodies, 73a and 73b are weights, 74 is a sensor pedestal, 75a and 75b are unimorph-type element fixtures, 76a and 76b are shim wirings, 77a and 7
7b is a wiring for a piezoelectric body, 78 is an infrared detector, 79a and 7
9b, 79c and 79d are unimorph type element fixing screws, 8
0 is an infrared ray.
【0013】また図8はシム71a,71bの詳細を示
す斜視図であり、81は遮蔽部、82は圧電体接着部、
83は切り欠き部、84は位置決め部、85a,85b
は固定用穴である。遮蔽部81と圧電体接着部82は折
曲げによって直角をなし、圧電体接着部82から位置決
め部84にいたる間に幅が圧電体接着部82よりも小さ
くなるように成形された切り欠き部83を設け、位置決
め部84の両端には固定用穴85a,85bが設けられ
ている。FIG. 8 is a perspective view showing details of the shims 71a and 71b, where 81 is a shielding portion, 82 is a piezoelectric bonding portion,
83 is a notch, 84 is a positioning part, 85a and 85b
Is a fixing hole. The shielding portion 81 and the piezoelectric bonding portion 82 form a right angle by bending, and a cutout portion 83 formed so that the width becomes smaller than the piezoelectric bonding portion 82 from the piezoelectric bonding portion 82 to the positioning portion 84. And fixing holes 85a and 85b are provided at both ends of the positioning portion 84.
【0014】シム71a,71bは図8に示すように幅
が細い切り欠き部83が設けられ、切り欠き部83にお
いて図7が示すようにセンサ台座74とユニモルフ型素
子固定具75a,75bによって挟まれ、更にユニモル
フ型素子固定ネジ79a,79b,79c,79dをそ
れぞれ固定用穴85a,85bに挿入して位置決めおよ
び片端固定され、互いに平行に向かい合うように配置さ
れている。またシム71a,71bのそれぞれ向かい合
う面すなわち圧電体接着部82には圧電体72a,72
bが、センサ台座74やユニモルフ型素子固定具75
a,75bおよびシム71a,71b先端の遮蔽部、加
えて切り欠き部83に接触しない位置で接着されてユニ
モルフ型圧電アクチュエータを構成している。As shown in FIG. 8, the shims 71a and 71b are provided with a notch 83 having a small width, and the notch 83 is sandwiched between the sensor pedestal 74 and the unimorph-type element fixtures 75a and 75b as shown in FIG. Furthermore, unimorph-type element fixing screws 79a, 79b, 79c, 79d are inserted into fixing holes 85a, 85b, respectively, and positioned and fixed at one end, and are arranged so as to face each other in parallel. Also, the piezoelectric bodies 72a, 72b are provided on opposing surfaces of the shims 71a, 71b, that is, on the piezoelectric body bonding portion 82.
b is the sensor pedestal 74 or the unimorph-type element fixture 75
a, 75b and the shielding portions at the tips of the shims 71a, 71b, and in addition, are adhered at positions not in contact with the notch portions 83 to constitute a unimorph type piezoelectric actuator.
【0015】赤外線検出部78はセンサ台座74上にて
ユニモルフ型素子の自由端近傍にて配され、赤外線80
の入射あるいは遮断を受ける。赤外線80を断続する遮
蔽部81はシム71a,71bの固定する側とは反対側
の端部を折り曲げて構成され、この部分の平面部分に重
り73a,73bがそれぞれ接着されている。シム71
a,71bの可動部以外の一箇所すなわち位置決め部8
4の一箇所にはシム用配線76a,76bが、圧電体7
2a,72bには圧電体用配線77a,77bがそれぞ
れユニモルフ型素子の固定部に近い位置で取り付けられ
ており、シム用配線76a,76bおよび圧電体用配線
77a,77bによりシム71aと圧電体72a、シム
71bと圧電体72bの間に電界を加えるとユニモルフ
型素子は曲げを起こし、先端の遮蔽部81が移動する。
2つのユニモルフ型素子を同一周波数にて反対方向に駆
動し、赤外線80を断続的に遮断する。An infrared detector 78 is disposed on the sensor pedestal 74 near the free end of the unimorph-type element.
Incident or blocked. The shielding portion 81 for intermitting the infrared light 80 is formed by bending the end of the shim 71a, 71b on the side opposite to the side to which the shim 71a, 71b is fixed, and the weights 73a, 73b are bonded to the plane portion of this portion. Shim 71
a, 71b other than the movable part, namely, the positioning part 8
4 are provided with shim wirings 76a and 76b,
Piezoelectric wires 77a and 77b are attached to the 2a and 72b at positions near the fixed portion of the unimorph type element, respectively. The shim 71a and the piezoelectric material 72a are provided by the shim wires 76a and 76b and the piezoelectric wires 77a and 77b. When an electric field is applied between the shim 71b and the piezoelectric body 72b, the unimorph-type element bends, and the shielding portion 81 at the tip moves.
The two unimorph elements are driven in the opposite direction at the same frequency to intermittently block infrared light 80.
【0016】圧電体とユニモルフ型素子の固定部の間の
シム部に切り欠き部83を設けることで、同一寸法で切
り欠き部を設けないユニモルフ型素子に比べてより共振
周波数を低下させることができるので、切り欠き部を設
けないものに比べてチョッパの小型化と低周波数駆動時
の変位量の増大が図れる。By providing the notch 83 in the shim between the piezoelectric body and the fixed portion of the unimorph element, the resonance frequency can be further reduced as compared with a unimorph element having the same dimensions and having no notch. Since the chopper is not provided, the chopper can be reduced in size and the displacement amount at the time of low-frequency driving can be increased as compared with the case where the notch is not provided.
【0017】以上のようにユニモルフ型素子を初めとす
る貼合わせ型素子の共振近傍での駆動により様々な利点
が得られるが、共振周波数近傍での駆動であるのでチョ
ッパの共振周波数が固体間でばらついた場合には大きな
変位量の差が発生し、一定に保つためには微細な調整や
高精度が要求される部品加工や組立が必要であった。ま
た、経時的に共振周波数が変化した場合変位が著しく変
化した。さらに、変位の安定化を図るために共振から駆
動周波数を離すと、変位量は低下し同様の変位を得るた
めには高い駆動電圧を必要とした。かつ、形状を小型化
して変位を得る場合、シムと圧電体との接着層への負担
が増大して剥がれの原因となる。このような課題は従来
例のチョッパに限らず、共振を利用した場合全てに等し
い課題である。As described above, various advantages can be obtained by driving a bonded type element such as a unimorph type element in the vicinity of resonance. However, since the driving is performed in the vicinity of the resonance frequency, the resonance frequency of the chopper varies between solids. If there is a variation, a large difference in the amount of displacement occurs, and in order to keep the displacement constant, it is necessary to perform component processing or assembly that requires fine adjustment and high precision. When the resonance frequency changed over time, the displacement changed significantly. Further, when the drive frequency is moved away from resonance to stabilize the displacement, the displacement amount decreases, and a high drive voltage is required to obtain the same displacement. In addition, when the displacement is obtained by reducing the size, the load on the adhesive layer between the shim and the piezoelectric body increases, which causes peeling. Such a problem is not limited to the chopper of the conventional example, but is a problem equivalent to all cases where resonance is used.
【0018】以上のような共振駆動の持つ問題を改善す
るため、以下の圧電アクチュエータを提案した。図9は
ユニモルフ型の圧電アクチュエータに変位拡大部を設け
た焦電型赤外線センサ用チョッパの一例を示す斜視図で
ある。The following piezoelectric actuators have been proposed in order to improve the problem of the resonance driving described above. FIG. 9 is a perspective view showing an example of a chopper for a pyroelectric infrared sensor in which a displacement expansion section is provided in a unimorph type piezoelectric actuator.
【0019】図9において、91はシム、92は圧電
体、93は変位拡大部、94はセンサ台座、95は固定
具、96a,96bは固定用ネジ、97はシム用配線、
98は圧電体用配線、99は赤外線検出部、100は赤
外線、101は折曲げ部である。In FIG. 9, 91 is a shim, 92 is a piezoelectric body, 93 is a displacement expanding portion, 94 is a sensor base, 95 is a fixture, 96a and 96b are fixing screws, 97 is a shim wiring,
Reference numeral 98 denotes a piezoelectric wiring, 99 denotes an infrared detection unit, 100 denotes an infrared ray, and 101 denotes a bent portion.
【0020】リン青銅やステンレス系合金等の弾性体平
板をコの字状に折曲げることによって、シム91と変位
拡大部93は一体的に、かつ結合部よりシム91および
変位拡大部93は互いに平行および同一方向に長手寸法
を有する構成となっている。さらに変位拡大部93にお
いて、結合部と反対の先端は直角に、かつシム91とは
反対側に折曲げ部101が形成されている。シム91の
表面において圧電体92が接着されて圧電体接着部(ユ
ニモルフ型素子)を形成してる。By bending an elastic plate made of phosphor bronze or stainless steel alloy into a U-shape, the shim 91 and the displacement enlarging portion 93 are integrally formed, and the shim 91 and the displacement enlarging portion 93 are mutually joined by the joint portion. It is configured to have longitudinal dimensions in parallel and in the same direction. Further, in the displacement enlarging portion 93, a bent portion 101 is formed at a right angle at a tip opposite to the joint portion and at a side opposite to the shim 91. A piezoelectric body 92 is bonded on the surface of the shim 91 to form a piezoelectric bonded portion (unimorph element).
【0021】シム91は変位拡大部93との結合部の反
対側の端部近傍においてセンサ台座94と固定具95に
よって挟まれ、さらにセンサ台座94にはめネジ加工
が、固定具95には孔加工が施され、固定用ネジ96
a,96bによって固定される。センサ台座94上に赤
外線検出部99が配され、前記の変位拡大部93の先端
の折曲げ部101の近傍に位置している。また、シム9
1の固定部近傍にはシム用配線97が、さらに圧電体9
2の接着側と反対の表面のシム91の固定部に近い位置
においては圧電体用配線98がそれぞれ取り付けられて
いる。The shim 91 is sandwiched between the sensor pedestal 94 and the fixture 95 near the end opposite to the joint with the displacement enlarging portion 93. The fixing screws 96
a, 96b. An infrared detecting section 99 is arranged on the sensor base 94 and is located near the bent section 101 at the tip of the displacement enlarging section 93. Sim 9
In the vicinity of the fixing portion of the first member 1, a shim wiring 97 is further provided.
At a position near the fixing portion of the shim 91 on the surface opposite to the bonding side of No. 2, piezoelectric wiring 98 is attached.
【0022】ここでシム用配線97と圧電体用配線98
より交流信号を印加するとシム91と圧電体92との間
に電位差が生じ、圧電体接着部の変位拡大部93との結
合部が変位し、これに応じて変位拡大部93の先端部の
折曲げ部101も変位し、この運動によって赤外線検出
部99に入射する赤外線100を断続し、チョッパとし
ての役割を果す。Here, the shim wiring 97 and the piezoelectric wiring 98
When an AC signal is further applied, a potential difference is generated between the shim 91 and the piezoelectric member 92, and the joint between the shim 91 and the displacement expanding portion 93 is displaced. Accordingly, the tip of the displacement expanding portion 93 is bent. The bent portion 101 is also displaced, and the movement intermittently interrupts the infrared light 100 incident on the infrared detection portion 99, thereby serving as a chopper.
【0023】ここで、前記構成の圧電アクチュエータ
(チョッパ)の共振特性を図10に示す。図10はコの
字状に折曲げられたシムと変位拡大部からなる圧電アク
チュエータの共振特性の一例であり、縦軸はアドミッタ
ンス、横軸は駆動周波数を示している。共振周波数
f1,f2のそれぞれにおいて共振現象を有していること
がわかり、これらはそれぞれ前記圧電アクチュエータの
主に圧電体接着部の振動に起因する共振と、主に変位拡
大部の振動に起因する共振のいずれかであり、圧電アク
チュエータの構成によりいずれかに相当し、また構成に
よって共振周波数f1とf2の差も変化する。FIG. 10 shows the resonance characteristics of the piezoelectric actuator (chopper) having the above configuration. FIG. 10 shows an example of the resonance characteristics of a piezoelectric actuator composed of a shim bent in a U-shape and a displacement enlarging portion. The vertical axis indicates admittance, and the horizontal axis indicates drive frequency. It can be seen that there are resonance phenomena at each of the resonance frequencies f 1 and f 2 , which are caused by the resonance mainly caused by the vibration of the piezoelectric bonding portion of the piezoelectric actuator and the vibration mainly by the displacement expanding portion. are either resonance caused by, and corresponds to either the configuration of the piezoelectric actuator, and also changes the difference between the resonance frequencies f 1 and f 2 by the configuration.
【0024】前記のようにシムと変位拡大部とを結合部
から同一方向に長手寸法を有する構成とすることによ
り、共振周波数f1とf2の相対位置の操作が容易なもの
となる。例えば変位拡大部材の長手寸法が一定で、圧電
体接着部の固定部から圧電体までの長さのみを変化させ
た場合、すなわち圧電体接着部の長手寸法のみを変化さ
せた場合において、当初圧電体接着部の長手寸法が短い
状態で圧電体接着部に起因する共振周波数がf2に相当
した場合、すなわち圧電体接着部に起因する共振周波数
が変位拡大部に起因する共振周波数よりも高い場合、圧
電体接着部の長手寸法を段々と長くしていくと、両者の
共振周波数は相対的に近づき、ある長さにおいて両者は
1つの共振として重なった状態となり、さらに圧電体接
着部の長手寸法を長くした場合には、両者の相対位置は
逆転し、変位拡大部に起因する共振周波数の方が圧電体
接着部に起因する共振周波数よりも高い値を有するよう
になる。[0024] With the structure having a longitudinal dimension in the same direction from the coupling portion and the shim and displacement amplifying section as described above, the operation of the relative positions of the resonance frequencies f 1 and f 2 becomes easy. For example, when the longitudinal dimension of the displacement enlarging member is constant and only the length from the fixed portion of the piezoelectric body bonding portion to the piezoelectric body is changed, that is, only the longitudinal dimension of the piezoelectric body bonding portion is changed, When the resonance frequency due to the piezoelectric bonding portion is equivalent to f 2 in a state where the longitudinal dimension of the body bonding portion is short, that is, when the resonance frequency due to the piezoelectric bonding portion is higher than the resonance frequency due to the displacement expanding portion As the longitudinal dimension of the piezoelectric bonding part is gradually increased, the resonance frequencies of the two become relatively closer, and at a certain length, the two are overlapped as one resonance, and the longitudinal dimension of the piezoelectric bonding part is further increased. When the length is increased, the relative positions of the two are reversed, and the resonance frequency caused by the displacement expanding portion has a higher value than the resonance frequency caused by the piezoelectric body bonding portion.
【0025】この時、共振周波数f1とf2の間を近接さ
せる構成とした場合の変位拡大部先端の変位と、駆動周
波数の関係を図11に示す。図11において、縦軸は変
位拡大部先端部変位、横軸は駆動周波数を示している。
共振周波数f1とf2の間の駆動周波数において両方の共
振の影響により変位が拡大され、かつ比較的変位量が安
定な周波数領域が存在することがわかる。よって、共振
周波数f1とf2を近接させ、両周波数の間の周波数にお
いて駆動することにより共振による変位拡大効果と安定
した変位とが得られる。FIG. 11 shows the relationship between the displacement of the distal end of the displacement enlarging portion and the driving frequency when the resonance frequencies f 1 and f 2 are made close to each other. In FIG. 11, the vertical axis indicates the displacement of the distal end of the displacement magnifying portion, and the horizontal axis indicates the driving frequency.
It can be seen that at the drive frequency between the resonance frequencies f 1 and f 2, the displacement is enlarged by the influence of both resonances, and there is a frequency region where the displacement amount is relatively stable. Therefore, by bringing the resonance frequencies f 1 and f 2 close to each other and driving at a frequency between the two frequencies, a displacement enlargement effect due to resonance and a stable displacement can be obtained.
【0026】また、f1を圧電体接着部に主に起因する
共振周波数、f2を変位拡大部に主に起因する共振周波
数とすること、すなわち圧電体接着部に主に起因する共
振周波数よりも変位拡大部に主に起因する共振周波数の
方が高い構成を有することにより、変位は拡大されて安
定で、かつ印加した交流信号と変位拡大部先端の時間差
が一定の周波数領域をさらに広く確保できる。Further, let f 1 be a resonance frequency mainly attributable to the piezoelectric bonding portion, and f 2 be a resonance frequency mainly attributable to the displacement magnifying portion, that is, from the resonance frequency mainly attributable to the piezoelectric bonding portion. Also has a configuration in which the resonance frequency mainly due to the displacement enlargement section is higher, so that the displacement is enlarged and stable, and the frequency range where the time difference between the applied AC signal and the tip of the displacement enlargement section is constant is wider. it can.
【0027】通常の共振を利用したユニモルフ型アクチ
ュエータは変位が駆動周波数により大幅な変化を示し、
これを安定にするため共振周波数より5%程度離れた周
波数において駆動した場合、同様の変位を得るためには
高い電圧を必要とした。これに対して、前記の構成を有
する圧電アクチュエータの場合、シムが約16mmの長手
方向の寸法を有し、変位拡大部に起因する共振周波数f
2が約100Hz、圧電体接着部に起因する共振周波数f1
が約85Hzとしたとき、共振周波数f1とf2の間で駆動
した場合±30Vの交流印加により、変位拡大部先端に
おいて1.1±0.05mmの変位を約6Hzの区間で得る
ことが可能である。In a unimorph type actuator using ordinary resonance, the displacement shows a large change depending on the driving frequency.
When driving at a frequency about 5% apart from the resonance frequency to stabilize this, a high voltage was required to obtain the same displacement. On the other hand, in the case of the piezoelectric actuator having the above configuration, the shim has a longitudinal dimension of about 16 mm, and the resonance frequency f
2 is about 100 Hz, and the resonance frequency f 1 caused by the piezoelectric bonding portion
Is about 85 Hz, when driving between the resonance frequencies f 1 and f 2 , it is possible to obtain a displacement of 1.1 ± 0.05 mm in the section of about 6 Hz at the tip of the displacement enlarging portion by applying an alternating current of ± 30 V. It is possible.
【0028】同様の効果は圧電体接着部の長手寸法が約
18mm以下の状態において、変位拡大部の長手寸法に応
じて共振周波数f2が120Hz以下の構成を有する圧電
アクチュエータの場合、共振周波数f2とf1の差がほぼ
共振周波数f2の5〜25%の間において最適に得られ
る。5%以内であっても同様の効果は得られるが、この
場合駆動を行える周波数領域が少なくなる場合や、一方
の共振が励振されなくなる場合がある。A similar effect is obtained when the piezoelectric actuator has a configuration in which the resonance frequency f 2 is 120 Hz or less in accordance with the longitudinal dimension of the displacement enlarging portion when the longitudinal dimension of the piezoelectric body bonding portion is about 18 mm or less. the difference between the 2 and f 1 is best obtained between approximately 5-25% of the resonance frequency f 2. The same effect can be obtained even if it is within 5%, but in this case, the frequency range in which driving can be performed may be reduced, or one of the resonances may not be excited.
【0029】以上のように前記の構成とすることによ
り、共振を利用しての駆動がより低電圧で安定して行
え、駆動および組立、部材の加工が容易になる。さらに
圧電体と接着した部分の振動量を低くできるので、圧電
体とシムとの剥離が起こりにくくなる。また折曲げた構
成により全体の長手寸法が小型化し、この構成を焦電型
赤外線センサのチョッパとして用いることにより、セン
サ全体の小型化が図れ、また赤外線検出部と同一の台座
への固定を行うことで、簡易に赤外線検出部との一体化
が図れ、加えて赤外線検出部の近傍を開閉することがで
きるので、開閉の面積を少なくできてチョッパの負担を
軽減できる。さらに、低電圧での駆動により圧電体から
のノイズの赤外線検出部への影響を低減できる。With the above-described configuration, the drive utilizing resonance can be stably performed at a lower voltage, and the drive, assembly, and machining of members are facilitated. Further, since the vibration amount of the portion bonded to the piezoelectric body can be reduced, peeling of the shim from the piezoelectric body hardly occurs. In addition, the bent configuration reduces the overall longitudinal dimension, and by using this configuration as a chopper of a pyroelectric infrared sensor, the entire sensor can be reduced in size and fixed to the same pedestal as the infrared detector. This facilitates integration with the infrared detection unit, and furthermore, the vicinity of the infrared detection unit can be opened and closed, so that the opening and closing area can be reduced and the load on the chopper can be reduced. Further, by driving at a low voltage, the influence of noise from the piezoelectric body on the infrared detection unit can be reduced.
【0030】以上の特徴を有するチョッパを簡易のため
に以下W共振型チョッパあるいはアクチュエータと呼
ぶ。The chopper having the above features is hereinafter referred to as a W resonance type chopper or actuator for simplicity.
【0031】[0031]
【発明が解決しようとする課題】上記のW共振型アクチ
ュエータを用いて駆動を行う場合、2つの共振を効率よ
く励振する必要があり、場合によっては一方の共振がも
う一方の共振の影響を受けてほとんど励振されずに十分
な変位量が得られず、このための各構成の最適化が必要
であった。In the case of driving using the above-described W resonance type actuator, it is necessary to efficiently excite two resonances, and in some cases, one resonance is affected by the other resonance. As a result, a sufficient amount of displacement could not be obtained because of little excitation, and each component had to be optimized for this purpose.
【0032】また従来のW共振型チョッパは、駆動に用
いる振動モード以外の不要振動もまた励振され、これに
よってチョッパが制御不能となり、焦電型赤外線センサ
のチョッパとして使用した場合温度測定が全くできなく
なる場合が見られた。かつ不要共振による変位の不安定
化はセンサとしての精度を著しく損なうものであった。Further, in the conventional W resonance type chopper, unnecessary vibrations other than the vibration mode used for driving are also excited, so that the chopper becomes uncontrollable, and the temperature can not be measured when used as a chopper of a pyroelectric infrared sensor. Some cases have disappeared. In addition, the instability of displacement due to unnecessary resonance significantly impairs the accuracy of the sensor.
【0033】本発明はより駆動の安定化が図られ、変位
量を十分に確保できるW共振型アクチュエータを提供す
ることを目的とする。An object of the present invention is to provide a W-resonant type actuator which can achieve a more stable drive and a sufficient displacement.
【0034】[0034]
【課題を解決するための手段】上記目的を達成するため
本発明のW共振型アクチュエータを、圧電体接着部と変
位拡大部が0度から10度の角度を有し、且つ少なくと
も一部にゴム材およびこれに類する機械的性質を有する
別部材を弾性部材に配する構成とし、低い側の共振であ
る共振周波数f1の共振レベルを増加させ、両共振を効
率よく励振することができるとともに、不要共振のレベ
ルを低下させることができる。 In order to achieve the above object, a W resonance type actuator according to the present invention is characterized in that a piezoelectric bonding portion and a displacement enlarging portion have an angle of 0 to 10 degrees , and at least,
Also have some rubber materials and similar mechanical properties
A structure for distributing a separate member to the elastic member, increasing the resonance level of the resonance frequency f 1 which is lower sides of the resonance, it is possible to excite both resonant efficiently, the unnecessary resonance level
Can be reduced.
【0035】[0035]
【発明の実施の形態】本発明の請求項1に記載の発明
は、分極処理がなされた平板状の圧電体を平板状の弾性
部材の片面あるいは両面に接着し一端を固定具により固
定された圧電体接着部と、前記圧電体接着部と結合した
結合部を介して連結され且つその自由端が前記結合部よ
りも前記圧電体接着部の固定具に近い距離に位置する変
位拡大部を有し、前記圧電体接着部に電界を印加して前
記圧電体接着部を屈曲運動させることで前記圧電体接着
部の自由端及び前記変位拡大部の自由端が変位する圧電
アクチュエータで、前記圧電体接着部の振動に起因して
発生する共振周波数f1と、前記変位拡大部の振動に起
因して発生する共振周波数f2の差を近接させ、前記共
振周波数f2が前記共振周波数f1よりも30%以内の高
い周波数となる構造を有し、前記共振周波数f1とf2の
間の周波数において交流電圧を印加して駆動する圧電ア
クチュエータにおいて、前記圧電体接着部の長手方向
と、前記変位拡大部の長手方向の成す角度が0度から1
0度の間であり、かつ前記変位拡大部の自由端が前記結
合部近傍よりも圧電体接着部との距離を大きくし、少な
くとも一部にゴム材およびこれに類する機械的性質を有
する別部材が弾性部材に配された圧電アクチュエータで
あり、これにより低い側の共振である共振周波数f1の
共振レベルを増加させ、両共振を効率よく励振すること
ができ駆動の安定化が図れ、変位量を十分に確保できる
とともに、特定のより高周波数での不要共振レベルを低
下させ、駆動の安定化が図れるという作用を有する。DESCRIPTION OF THE PREFERRED EMBODIMENTS According to the first aspect of the present invention, a plate-shaped piezoelectric body subjected to polarization treatment is adhered to one or both sides of a plate-shaped elastic member, and one end is fixed by a fixture . Piezoelectric bonding part, and bonded to the piezoelectric bonding part
Is connected via a coupling portion and than its free end the coupling part has a displacement amplifying section which is located at a distance closer to the fixture of the piezoelectric adhering part, said applying an electric field to said piezoelectric body adhesive portion A piezoelectric actuator in which a free end of the piezoelectric bonding portion and a free end of the displacement enlarging portion are displaced by bending the piezoelectric bonding portion, and a resonance frequency f 1 generated due to vibration of the piezoelectric bonding portion. When the is close to the difference between the resonance frequency f 2 generated due to vibration of the displacement amplifying section has a structure in which the resonance frequency f 2 is higher frequency within 30% over the resonance frequency f 1, in the piezoelectric actuator is driven by applying an AC voltage at a frequency between the resonance frequencies f 1 and f 2, the longitudinal direction of the piezoelectric adhering part, the angle is 0 degrees formed by the longitudinal direction of the displacement amplifying section 1
It is between 0 ° and the free end of the displacement amplifying section is to increase the distance between the piezoelectric bonded portion than near the coupling portion, small
At least a part of rubber material and similar mechanical properties
Another member is a piezoelectric actuator arranged on the elastic member, thereby a lower side of the resonance increases the resonance level of the resonance frequency f 1, stability in operation can be excited both resonant efficiently is Hakare to , While ensuring sufficient displacement, and reducing unnecessary resonance levels at specific higher frequencies.
And has the effect of stabilizing the drive .
【0036】請求項2に記載の発明は、弾性体平板を折
曲げることによって圧電体接着部、結合部および変位拡
大部が一体的に構成され、圧電体と前記結合部との間に
ある距離で圧電体を有しない未接着部を有し、かつ前記
未接着部においてゴム材あるいはこれに類する機械的性
質を有する別部材を貼付した請求項1に記載の圧電アク
チュエータであり、これにより不要共振のレベルを低下
させるという作用が得られる。 According to a second aspect of the present invention, the elastic flat plate is folded.
The bending, bending and displacement of the piezoelectric body
Most are integrally configured, between the piezoelectric body and the joint
Having an unbonded portion having no piezoelectric body at a certain distance, and
Rubber material or similar mechanical properties at unbonded parts
2. The piezoelectric actuator according to claim 1, wherein another member having quality is attached.
Tutor, which reduces unwanted resonance levels
The effect of making it work is obtained.
【0037】請求項3に記載の発明は、弾性体平板を折
曲げることによって圧電体接着部、接合部および変位拡
大部が一体的に構成され、前記固定部近傍においてゴム
材あるいはこれに類する機械的性質を有する別部材を貼
付した請求項1に記載の圧電アクチュエータであり、不
要共振のレベルを更に低下させるものである。 According to a third aspect of the present invention, the elastic flat plate is folded.
The bending, bending, and expansion of the piezoelectric
A large part is integrally formed, and rubber is
Material or another member with similar mechanical properties
2. The piezoelectric actuator according to claim 1, wherein
This is to further reduce the level of resonance required.
【0038】請求項4に記載の発明は、請求項1から3
に記載の圧電アクチュエータを入射赤外線の断続手段と
して用いた焦電型赤外線センサであり、測定精度の高い
ものとすることができる。 The invention according to claim 4 is the invention according to claims 1 to 3
The piezoelectric actuator described in the above with intermittent means of incident infrared
Pyroelectric infrared sensor with high measurement accuracy
Things.
【0039】請求項5に記載の発明は、請求項1〜4に
記載した圧電アクチュエータを入射赤外線の断続手段と
して用いた焦電型赤外線センサであり、測定精度の高い
ものとすることができる。According to a fifth aspect of the present invention, there is provided a pyroelectric infrared sensor using the piezoelectric actuator according to the first to fourth aspects as a means for interrupting incident infrared rays.
【0040】図1において、11は弾性部材よりなるシ
ム、12は圧電体、13は変位拡大部、14a,14b
は固定具、15は折曲げ部、16は結合部、17はゴム
材、18は赤外線検出部、19は赤外線である。シム1
1、変位拡大部13、折曲げ部15、結合部16は1枚
の板状の導電性金属体を折曲げることにより一体的に構
成される。シム11の片面には、厚み方向に分極処理さ
れかつ両表面に電極が形成された圧電体12が接着され
る圧電体接着部が構成されている。シム11の結合部1
6と反対の端部近傍において、固定具14a,14bに
よって挟み込まれて片端固定することにより、W共振型
アクチュエータが形成されている。In FIG. 1, 11 is a shim made of an elastic member , 12 is a piezoelectric body, 13 is a displacement enlarging portion, and 14a and 14b.
Is a fixture, 15 is a bent portion, 16 is a coupling portion, 17 is a rubber material, 18 is an infrared detecting portion, and 19 is an infrared ray. Sim 1
1. The displacement enlarging portion 13, the bent portion 15, and the connecting portion 16 are integrally formed by bending a single plate-shaped conductive metal body. One surface of the shim 11 is provided with a piezoelectric body bonding portion to which a piezoelectric body 12 that is polarized in the thickness direction and has electrodes formed on both surfaces is bonded. Joint 1 of shim 11
In the vicinity of the end opposite to 6, the W resonance type actuator is formed by being sandwiched by fixtures 14a and 14b and fixed at one end.
【0041】図1において、11はシム、12は圧電
体、13は変位拡大部、14a,14bは固定具、15
は折曲げ部、16は結合部、17はゴム材、18は赤外
線検出部、19は赤外線である。シム11、変位拡大部
13、折曲げ部15、結合部16は1枚の板状の導電性
金属体を折曲げることにより一体的に構成される。シム
11の片面には、厚み方向に分極処理されかつ両表面に
電極が形成された圧電体12が接着される圧電体接着部
が構成されている。シム11の結合部16と反対の端部
近傍において、固定具14a,14bによって挟み込ま
れて片端固定することにより、W共振型アクチュエータ
が形成されている。In FIG. 1, 11 is a shim, 12 is a piezoelectric body, 13 is a displacement enlarging portion, 14a and 14b are fixtures, 15
Is a bent portion, 16 is a coupling portion, 17 is a rubber material, 18 is an infrared detecting portion, and 19 is an infrared ray. The shim 11, the displacement enlarging portion 13, the bent portion 15, and the connecting portion 16 are integrally formed by bending a single plate-shaped conductive metal body. One surface of the shim 11 is provided with a piezoelectric body bonding portion to which a piezoelectric body 12 that is polarized in the thickness direction and has electrodes formed on both surfaces is bonded. In the vicinity of the end opposite to the joint 16 of the shim 11, the W-resonant actuator is formed by being sandwiched between the fixtures 14a and 14b and fixed at one end.
【0042】固定具14a,14bもシム11と同様に
導電性材料によって形成され、固定具14aと圧電体1
2の接着されていない表面の電極部の間で交流電界が加
えられる。圧電体12は結合部16に対してある距離を
もって接着され、圧電体接着後の曲げ加工を可能として
いる。この圧電体12の接着されていない部分において
シート状のゴム材17が貼付され、このゴム材17はダ
ンパー材等とよばれる。The fixtures 14a and 14b are also formed of a conductive material similarly to the shim 11, and the fixture 14a and the piezoelectric element 1
An alternating electric field is applied between the two non-bonded surface electrodes. The piezoelectric body 12 is bonded to the coupling portion 16 at a certain distance to enable bending after bonding the piezoelectric body. A sheet-like rubber material 17 is attached to a portion of the piezoelectric body 12 to which the piezoelectric material 12 is not bonded, and the rubber material 17 is called a damper material or the like.
【0043】図1(b)のように、圧電体接着部と変位
拡大部13の長手方向は互いにθの角度をなし、すなわ
ち変位拡大部13の根元の曲げ部が鈍角を成すと同時
に、折曲げ部15は曲げ部が直角の場合よりも圧電体接
着部に対して大きな距離を成す構成となっている。圧電
体12と固定具14a,14bに交流電界を加えること
で、折曲げ部15が赤外線検出部18の近傍を往復運動
し、赤外線19の入射を断続してチョッパとしての機能
を果す。As shown in FIG. 1B, the longitudinal directions of the piezoelectric body bonding portion and the displacement enlarging portion 13 form an angle θ with each other, that is, the bent portion at the base of the displacement enlarging portion 13 forms an obtuse angle, and The bent portion 15 is configured to have a larger distance from the piezoelectric body bonding portion than when the bent portion is a right angle. By applying an AC electric field to the piezoelectric body 12 and the fixtures 14a and 14b, the bent portion 15 reciprocates in the vicinity of the infrared detecting portion 18 to interrupt the incidence of the infrared light 19 to function as a chopper.
【0044】θの角度をもって変位拡大部13を構成す
ることにより、W共振型アクチュエータの駆動に用いる
2つの共振のうち、低い側の共振レベルを高めることが
できる。By forming the displacement enlarging unit 13 with an angle of θ, the resonance level on the lower side of the two resonances used for driving the W resonance type actuator can be increased.
【0045】図2(a)、図2(b)は変位拡大部と圧
電体接着部とが平行な場合および角度θを持たせた場合
の共振特性図の一例である。共振特性図は縦軸がW共振
型アクチュエータのアドミッタンス、横軸は駆動周波数
を示している。図2(a)は変位拡大部と圧電体接着部
とがほぼ平行な場合であり、f1は圧電体接着部の振動
に起因する共振周波数、f2は変位拡大部の振動に起因
する共振周波数を示す。FIGS. 2 (a) and 2 (b) are examples of resonance characteristics when the displacement enlarging portion and the piezoelectric body bonding portion are parallel to each other and when they have an angle θ. In the resonance characteristic diagram, the vertical axis indicates the admittance of the W resonance type actuator, and the horizontal axis indicates the drive frequency. FIG. 2A shows a case where the displacement magnifying portion and the piezoelectric body bonding portion are substantially parallel to each other. F 1 is a resonance frequency caused by vibration of the piezoelectric body bonding portion, and f 2 is a resonance frequency caused by vibration of the displacement magnifying portion. Indicates the frequency.
【0046】図2(b)は同様に、変位拡大部と圧電体
接着部とがθの角度をもった場合である。角度θをもた
せることにより、共振周波数f1における共振レベルが
増加し、逆に共振周波数f2における共振レベルは減少
する。すなわち角度θをもたせることにより、微小な共
振周波数f1の共振の励振を促進させて十分な変位量を
確保でき、かつ組立のばらつきや経時変化による共振レ
ベルの低下に対しても十分な余裕をもつことができる。
逆に共振周波数f2の共振レベルは低下するが、元のレ
ベルが共振周波数f1のものと比較して大きく、かつ最
も安定な変位が得られる駆動最適領域が共振周波数f1
に近く影響は小さい。しかしθが大きすぎるとセンサユ
ニットとして用いる場合の体積が大きくなり、また共振
周波数f 2のレベルが下がりすぎて変位量が低下するな
どの問題が発生するため、θの最適な範囲はほぼ0度よ
り大きく10度以下の間である。FIG. 2B similarly shows a displacement enlarging portion and a piezoelectric body.
This is the case where the angle with the bonding portion is θ. Angle θ
The resonance frequency f1The resonance level at
Increase, and conversely, the resonance frequency fTwoResonance level at
I do. That is, by giving the angle θ,
Vibration frequency f1Enhance the resonance excitation of
Resonance resonance due to assembly variations and aging.
It is possible to have a sufficient margin for the bell drop.
Conversely, the resonance frequency fTwoThe resonance level of the
Bell has resonance frequency f1Larger than the
The optimum driving region where stable displacement can be obtained is the resonance frequency f1
The effect is small. However, if θ is too large,
When used as a knit, the volume increases and resonance occurs.
Frequency f TwoThe displacement level is too low
The optimal range of θ is almost 0 degrees because any problem occurs.
Between 10 degrees and larger.
【0047】また90°で曲げるよりも、90°+θと
した方が曲げ加工も容易である。図3(a)、図3
(b)は結合部と圧電体との間にゴム材を貼付した場合
および貼付しない場合の共振特性図の一例である。共振
特性図は縦軸がW共振型アクチュエータのアドミッタン
ス、横軸は駆動周波数を示している。W共振型アクチュ
エータは駆動に用いる共振周波数f1,f2よりも高い周
波数において、より高いレベルを有する不要共振が存在
する。不要共振のレベルおよび周波数は構成によって異
なるが、一例を挙げれば全長16mm程度で共振周波数f
1が80Hz、共振周波数f2が95Hzとなる図1(a)の
構成のW共振型アクチュエータの場合、不要共振周波数
f3が約800Hz、不要共振周波数f4が約1200Hz
で、いずれも共振周波数f1,f2よりもはるかに高い共
振レベルを有する。Bending is easier when the angle is set to 90 ° + θ than when it is bent at 90 °. FIG. 3 (a), FIG.
(B) is an example of a resonance characteristic diagram in a case where a rubber material is stuck between the coupling portion and the piezoelectric body and in a case where a rubber material is not stuck. In the resonance characteristic diagram, the vertical axis indicates the admittance of the W resonance type actuator, and the horizontal axis indicates the drive frequency. The W resonance type actuator has an unnecessary resonance having a higher level at a frequency higher than the resonance frequencies f 1 and f 2 used for driving. The level and frequency of the unnecessary resonance vary depending on the configuration. For example, when the total length is about 16 mm and the resonance frequency f
In the case of the W resonance type actuator having the configuration of FIG. 1A where 1 is 80 Hz and the resonance frequency f 2 is 95 Hz, the unnecessary resonance frequency f 3 is about 800 Hz and the unnecessary resonance frequency f 4 is about 1200 Hz.
Both have resonance levels much higher than the resonance frequencies f 1 and f 2 .
【0048】W共振型アクチュエータを主に矩形波で駆
動する場合、これらの不要共振が同時に励振され、変位
波形に乱れが生じ場合によっては制御不能となる。図3
(a)はゴム材を貼付していない場合、図3(b)は結
合部と圧電体との間にゴム材を貼付した場合の共振特性
図である。ゴム材およびそのほかのダンパー材を貼付す
ることにより振動のエネルギーが損失され、全体的に共
振レベルが低下するが、貼付した部分の振動に起因する
共振のレベルが不要共振周波数f3のように特に大きく
減少する。When the W resonance type actuator is mainly driven by a rectangular wave, these unnecessary resonances are simultaneously excited, and the displacement waveform is disturbed, and in some cases, it becomes impossible to control. FIG.
FIG. 3A is a resonance characteristic diagram when a rubber material is not attached, and FIG. 3B is a resonance characteristic diagram when a rubber material is attached between a coupling portion and a piezoelectric body. It is loss energy of the vibration by attaching a rubber material and other damper material, but overall the resonance level decreases, the level of the resonance caused by vibration of the patch portion particularly as unwanted resonance frequency f 3 Greatly reduced.
【0049】このようにダンパー材を貼付することによ
り、不要共振の共振レベルを低下させ、駆動への影響を
抑えることができる。またダンパー材や貼付場所を選定
することにより、特定の周波数の共振に対して特に大き
な効果が得られる。図1(a)の構成のW共振型アクチ
ュエータにおいては結合部と圧電体の間にダンパー材を
貼付することにより、レベルが高く駆動周波数に最も近
く影響の大きい不要共振周波数f3のレベルを低下させ
ることができ、容易に駆動の安定化を図ることができ
る。By attaching the damper material in this manner, the resonance level of unnecessary resonance can be reduced, and the influence on driving can be suppressed. In addition, by selecting a damper material and a sticking place, a particularly large effect can be obtained for resonance at a specific frequency. By in W resonant actuator arrangement of FIGS. 1 (a) of affixing a damper member between the coupling portion and the piezoelectric body, reduce the large unwanted levels of the resonance frequency f 3 of the nearest impact on higher driving frequency level The driving can be easily stabilized.
【0050】焦電型赤外線センサの温度検知には、チョ
ッパの変位量および変位波形が検出精度に大きく影響
し、上記のW共振型アクチュエータをチョッパとして用
いることで、センサユニットの小型化および高精度化が
図れる。In detecting the temperature of the pyroelectric infrared sensor, the displacement amount and the displacement waveform of the chopper greatly affect the detection accuracy. By using the above-described W resonance type actuator as a chopper, the sensor unit can be reduced in size and highly accurate. Can be achieved.
【0051】(実施の形態2)図4は本発明の第2の実
施例における圧電体接着部と変位拡大部の間に角度をも
たせ、かつゴム状部材を固定部近傍に貼付した一例を示
す斜視図である。(Embodiment 2) FIG. 4 shows an example of the second embodiment of the present invention in which an angle is provided between the piezoelectric body bonding portion and the displacement enlarging portion, and a rubber-like member is attached near the fixing portion. It is a perspective view.
【0052】図4において、41はシム、42は圧電
体、43は変位拡大部、44a,44bは固定具、45
は折曲げ部、46は結合部、47a,47bはゴム材、
48は赤外線検出部、49は赤外線である。シム41の
固定部近傍において、ゴム材47a,47bが両面に貼
付されている。その他の構成は実施の形態1と同様であ
る。In FIG. 4, reference numeral 41 denotes a shim; 42, a piezoelectric body; 43, a displacement enlarging portion;
Is a bent portion, 46 is a joint portion, 47a and 47b are rubber materials,
48 is an infrared detector, and 49 is an infrared ray. In the vicinity of the fixing portion of the shim 41, rubber members 47a and 47b are attached to both surfaces. Other configurations are the same as those of the first embodiment.
【0053】ゴム材等のダンパー材を両面に貼付するこ
とにより、さらに不要共振のレベル低減への効果は増
す。実施の形態1と異なり固定部近傍にダンパー材を貼
付することにより、主に低減される不要共振が実施の形
態1と異なる。By attaching a damper material such as a rubber material to both surfaces, the effect of reducing the level of unnecessary resonance is further increased. Unlike the first embodiment, by attaching a damper material near the fixed portion, the unnecessary resonance mainly reduced is different from that of the first embodiment.
【0054】図5(a)、図5(b)は固定部近傍にダ
ンパー材を貼付した場合および貼付しない場合の共振特
性図の一例である。共振特性図は縦軸がW共振型アクチ
ュエータのアドミッタンス、横軸は駆動周波数を示して
いる。図5(a)は貼付しない場合、図5(b)は貼付
したものであるが、この場合は不要共振周波数f4の共
振について特にレベル低減の効果が大きい。不要共振周
波数f4もf3と同様に駆動への影響が大きく、よって駆
動に用いる周波数と励振される不要共振との関係から、
駆動に影響する共振についてその駆動箇所を概略特定
し、その部分にダンパー材を貼付することで容易に不要
共振の低減が図れる。FIGS. 5 (a) and 5 (b) are examples of resonance characteristics when a damper material is adhered near the fixed portion and when it is not attached. In the resonance characteristic diagram, the vertical axis indicates the admittance of the W resonance type actuator, and the horizontal axis indicates the drive frequency. If Figure 5 (a) is not attached, although FIG. 5 (b) is obtained by sticking, the effect in this case is particularly reduced levels the resonance of the unwanted resonance frequency f 4 is large. Unwanted resonance frequency f 4 is also greatly affected by the same drive as f 3, thus the relationship between the unwanted resonance to be excited with a frequency used in the driver,
Unnecessary resonance can be easily reduced by roughly specifying the driving location of the resonance affecting driving and attaching a damper material to that portion.
【0055】[0055]
【発明の効果】以上のように本発明は、W共振型アクチ
ュエータの圧電体接着部と変位拡大部に0度から10度
の間の角度をもたせることにより、駆動に使用する共振
のレベルを調整できる。小さいレベルの共振を増幅させ
ることで大きいレベルの共振に対して影響を受けにくく
なるので、より広範囲に駆動周波数の設定、調整が行
え、様々な駆動周波数に対応が可能となる。両共振をバ
ランスよく励振させることで、安定領域における変位量
の増加が図れ、より効率のよい駆動が行える。As described above, according to the present invention, the level of resonance used for driving is adjusted by giving an angle between 0 ° and 10 ° to the piezoelectric bonding portion and the displacement enlarging portion of the W resonance type actuator. it can. Amplifying the low-level resonance makes it less likely to be affected by the high-level resonance, so that the drive frequency can be set and adjusted over a wider range, and various drive frequencies can be handled. By exciting both resonances in a well-balanced manner, the amount of displacement in the stable region can be increased, and more efficient driving can be performed.
【0056】また、W共振型アクチュエータにゴム材を
はじめとするダンパー材を貼付することにより、不要共
振のレベルを低下させることができる。また構成により
ダンパー材の貼付場所を選定することにより、特に駆動
に影響のある特定の不要共振に対してレベル低減が図
れ、駆動に必要な共振に対する影響を最低限とすること
ができる。かつ貼付部材を最小限とできるので、駆動に
対する負荷を最小限として駆動効率を損なわない。加え
て不要共振による不要な振動がなくなるので、駆動によ
る機械的強度の劣化等が防止でき、長期的な信頼性が増
す。Further, by sticking a damper material such as a rubber material to the W resonance type actuator, the level of unnecessary resonance can be reduced. In addition, by selecting a place where the damper material is to be attached according to the configuration, the level can be reduced particularly for specific unnecessary resonance that has an effect on driving, and the effect on resonance required for driving can be minimized. In addition, since the number of sticking members can be minimized, the load on the drive is minimized and the drive efficiency is not impaired. In addition, since unnecessary vibration due to unnecessary resonance is eliminated, deterioration of mechanical strength due to driving can be prevented, and long-term reliability increases.
【0057】W共振型アクチュエータは小型でかつ大変
位が得られるので、センサ等のユニット全体の小型化に
寄与し、特に温度検知にチョッパが必要な焦電型赤外線
センサに対して、小型化、高精度化に寄与し汎用性が増
す。駆動に使用する共振を調整しかつ不要共振を低減さ
せることによって、より大変位で安定した開閉が行える
チョッパを実現でき、センサの検出精度の安定化と信頼
性の向上が図れる。Since the W resonance type actuator is small in size and can obtain a large displacement, it contributes to the miniaturization of the whole unit such as a sensor. In particular, it is possible to reduce the size of the pyroelectric infrared sensor which requires a chopper for temperature detection. Contributes to higher accuracy and increases versatility. By adjusting the resonance used for driving and reducing unnecessary resonance, a chopper that can perform stable opening and closing with a larger displacement can be realized, and the detection accuracy of the sensor can be stabilized and the reliability can be improved.
【図1】(a)本発明の圧電アクチュエータの第1の実
施の形態を示す斜視図 (b)同平面図FIG. 1A is a perspective view showing a first embodiment of a piezoelectric actuator according to the present invention. FIG.
【図2】(a)第1の実施の形態と比較するための従来
の共振特性図 (b)第1の実施の形態の共振特性図FIG. 2A is a conventional resonance characteristic diagram for comparison with the first embodiment; FIG. 2B is a resonance characteristic diagram of the first embodiment;
【図3】(a)第1の実施の形態と比較するための従来
の共振特性図 (b)第1の実施の形態の共振特性図FIG. 3A is a conventional resonance characteristic diagram for comparison with the first embodiment. FIG. 3B is a resonance characteristic diagram of the first embodiment.
【図4】本発明の第2の実施の形態を示す斜視図FIG. 4 is a perspective view showing a second embodiment of the present invention.
【図5】(a)第2の実施の形態と比較するための従来
の共振特性図 (b)第2の実施の形態の共振特性図FIG. 5A is a conventional resonance characteristic diagram for comparison with the second embodiment. FIG. 5B is a resonance characteristic diagram of the second embodiment.
【図6】従来の圧電バイモルフ型チョッパの構成を示す
斜視図FIG. 6 is a perspective view showing a configuration of a conventional piezoelectric bimorph chopper.
【図7】従来の共振型チョッパの構成を示す斜視図FIG. 7 is a perspective view showing a configuration of a conventional resonance type chopper.
【図8】従来の共振型チョッパの構造の詳細を示す斜視
図FIG. 8 is a perspective view showing details of the structure of a conventional resonance type chopper.
【図9】従来のW共振型アクチュエータの構成を示す斜
視図FIG. 9 is a perspective view showing a configuration of a conventional W resonance type actuator.
【図10】従来のW共振型アクチュエータのアドミッタ
ンス特性図FIG. 10 is an admittance characteristic diagram of a conventional W resonance type actuator.
【図11】従来のW共振型アクチュエータの変位特性図FIG. 11 is a displacement characteristic diagram of a conventional W resonance type actuator.
11,41 シム 12,42 圧電体 13,43 変位拡大部 15,45 折曲げ部 16,46 結合部 11, 41 Shim 12, 42 Piezoelectric body 13, 43 Displacement enlargement part 15, 45 Bend part 16, 46 Joining part
フロントページの続き (56)参考文献 国際公開96/14687(WO,A1) (58)調査した分野(Int.Cl.7,DB名) H02N 2/00 G01J 1/02 G01J 5/62 H01L 37/02 H01L 41/09 Continuation of the front page (56) References WO 96/14687 (WO, A1) (58) Fields investigated (Int. Cl. 7 , DB name) H02N 2/00 G01J 1/02 G01J 5/62 H01L 37 / 02 H01L 41/09
Claims (4)
板状の弾性部材の片面あるいは両面に接着し一端を固定
具により固定された圧電体接着部と、前記圧電体接着部
と結合した結合部を介して連結され且つその自由端が前
記結合部よりも前記圧電体接着部の固定具に近い距離に
位置する変位拡大部を有し、前記圧電体接着部に電界を
印加して前記圧電体接着部を屈曲運動させることで前記
圧電体接着部の自由端及び前記変位拡大部の自由端が変
位する圧電アクチュエータで、前記圧電体接着部の振動
に起因して発生する共振周波数f1と、前記変位拡大部
の振動に起因して発生する共振周波数f2の差を近接さ
せ、前記共振周波数f2が前記共振周波数f1よりも30
%以内の高い周波数となる構造を有し、前記共振周波数
f1とf2の間の周波数において交流電圧を印加して駆動
する圧電アクチュエータにおいて、前記圧電体接着部の
長手方向と、前記変位拡大部の長手方向の成す角度が0
度から10度の間であり、かつ前記変位拡大部の自由端
が前記結合部近傍よりも圧電体接着部との距離を大きく
し、少なくとも一部にゴム材およびこれに類する機械的
性質を有する別部材が弾性部材に配された圧電アクチュ
エータ。1. A plate-shaped piezoelectric body subjected to a polarization treatment is adhered to one or both sides of a plate-shaped elastic member and one end is fixed.
A piezoelectric adhesive portion fixed by immediately, the coupled via a coupling portion coupled to the piezoelectric member bonded portion and its free end is located at a distance closer to the fixture of the piezoelectric adhering part than the coupling portion A piezoelectric actuator having a displacement enlargement portion, wherein a free end of the piezoelectric adhesion portion and a free end of the displacement enlargement portion are displaced by applying an electric field to the piezoelectric adhesion portion to cause the piezoelectric adhesion portion to bend; in the resonance frequency f 1 caused by the vibration of the piezoelectric element adhering part, the due to the vibration of the displacement amplifying section is brought close to the difference between the resonance frequency f 2 generated, the resonance frequency f 2 is the 30 than the resonance frequency f 1
Has a high frequency and comprising structure within%, in the piezoelectric actuator to drive an AC voltage is applied at a frequency between the resonance frequencies f 1 and f 2, the longitudinal direction of the piezoelectric adhering part, the displacement enlargement The angle formed in the longitudinal direction of the part is 0
Between 10 degrees and 10 degrees, and the free end of the displacement enlarging portion has a greater distance from the piezoelectric bonding portion than near the coupling portion.
And at least in part, rubber and similar mechanical
A piezoelectric actuator in which another member having properties is arranged on an elastic member .
体接着部、結合部および変位拡大部が一体的に構成さ
れ、圧電体と前記結合部との間にある距離で圧電体を有
しない未接着部を有し、かつ前記未接着部においてゴム
材あるいはこれに類する機械的性質を有する別部材を貼
付した請求項1に記載の圧電アクチュエータ。 2. A piezoelectric device by bending an elastic flat plate.
The body bonding part, joining part and displacement enlargement part are integrally configured.
The piezoelectric body at a distance between the piezoelectric body and the coupling portion.
Not having an unbonded portion, and rubber at the unbonded portion
Material or another member with similar mechanical properties
The piezoelectric actuator according to claim 1 attached.
体接着部、接合部および変位拡大部が一体的に構成さ
れ、前記固定部近傍においてゴム材あるいはこれに類す
る機械的性質を有する別部材を貼付した請求項1に記載
の圧電アクチュエータ。 3. A piezoelectric device by bending an elastic flat plate.
The body bonding part, joint part and displacement enlargement part are integrally configured.
And a rubber material or the like near the fixing portion.
2. A separate member having a mechanical property which is attached to the substrate.
Piezoelectric actuator.
ータを入射赤外線の断続手段として用いた焦電型赤外線
センサ。 4. A piezoelectric actuator according to claim 1, wherein
Pyroelectric Infrared using the data as intermittent means of incident infrared
Sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26376595A JP3334450B2 (en) | 1995-10-12 | 1995-10-12 | Piezoelectric actuator and pyroelectric infrared sensor using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26376595A JP3334450B2 (en) | 1995-10-12 | 1995-10-12 | Piezoelectric actuator and pyroelectric infrared sensor using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09105676A JPH09105676A (en) | 1997-04-22 |
JP3334450B2 true JP3334450B2 (en) | 2002-10-15 |
Family
ID=17393977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26376595A Expired - Fee Related JP3334450B2 (en) | 1995-10-12 | 1995-10-12 | Piezoelectric actuator and pyroelectric infrared sensor using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3334450B2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4682589B2 (en) * | 2004-11-10 | 2011-05-11 | パナソニック株式会社 | Piezoelectric actuator and light sweep device using the same |
FR2911734B1 (en) * | 2007-01-24 | 2009-03-27 | Jean Frederic Martin | AUTONOMOUS PIEZOELECTRIC DEVICE FOR GENERATING AN ELECTRICAL VOLTAGE. |
DE102007041636A1 (en) * | 2007-09-03 | 2009-03-05 | Argillon Gmbh | Bending transducer element and bending transducer module |
CN106253742B (en) | 2015-06-12 | 2019-07-12 | 精工爱普生株式会社 | Motor Piexoelectric actuator, motor, robot and pump |
JP2017005925A (en) * | 2015-06-12 | 2017-01-05 | セイコーエプソン株式会社 | Piezoelectric driving device for motor, motor, robot and pump |
JP6617450B2 (en) * | 2015-07-02 | 2019-12-11 | セイコーエプソン株式会社 | Piezoelectric drive, motor and robot |
-
1995
- 1995-10-12 JP JP26376595A patent/JP3334450B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH09105676A (en) | 1997-04-22 |
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