JP7477159B2 - Optical deflection device, optical scanning device, and optical scanning distance measuring device - Google Patents

Description

The present invention relates to an optical deflection device, an optical scanning device, and an optical scanning distance measuring device.

As optical deflectors that use mirrors to deflect light, polygon mirrors and galvanometer mirrors driven by electric motors have been put to practical use.
In recent years, a resonant optical deflector that does not use a motor, called a MEMS (Micro Electro Mechanical Systems) mirror, has been developed using microfabrication technology. This resonant optical deflector has the advantages of a high scanning frequency, small size, and low power consumption compared to those that use a motor.

Resonant type optical deflectors can be roughly divided into three types according to the driving method: those that use electrostatic force, those that use the piezoelectric effect or magnetostrictive effect, and those that use electromagnetic force.
In devices that use electrostatic force, the electrostatic force acting between a pair of electrodes is used, and therefore the electrodes must be formed with high precision. Since the electrostatic force is inversely proportional to the square of the distance between the electrodes and proportional to the area and applied voltage, it is considered ideal to place as large electrodes as possible as close as possible to each other and apply a high voltage between the electrodes.

However, there is a risk of discharge if the electrodes are brought too close together or if too much voltage is applied, so there is a limit to the mirror's oscillation angle, and it has not become widespread except in cases where ultra-small mirrors with small driving force and oscillation angle are arrayed.

Devices that use electromagnetic force have the advantage that a relatively large driving force can be obtained, allowing the mirror to be made large. However, because a coil or permanent magnet must be formed in the moving part including the mirror, the mass of the moving part becomes large, and the resonant frequency, which is inversely proportional to the mass of the moving part (moment of inertia), cannot be made very high. In addition, materials with a high specific gravity must be used for the permanent magnets and the yoke that prevents magnetic flux from escaping, which makes it difficult to miniaturize the device and makes it heavy.

Patent Document 1 proposes an optical scanning device in which a torsion beam is formed on a substrate and a mirror supported by the torsion beam is oscillated, in which a piezoelectric body, a magnetostrictive body, or a permanent magnet is fixed or formed between the torsion beam of the substrate and a support member, and a voltage or magnetic field is applied to the piezoelectric body, magnetostrictive body, or permanent magnet body to excite the mirror supported by the torsion beam using plate waves induced in the substrate.

In more detail, the optical scanning device includes a substrate, a piezoelectric body, a magnetostrictive body, or a permanent magnet body fixed to or formed on a part of the substrate to generate plate wave vibrations having vibration loops and vibration nodes on the substrate, a torsion beam section formed on the substrate at a position away from the piezoelectric body, magnetostrictive body, or permanent magnet body and supporting a mirror section, and a scanning beam source that irradiates a scanning beam onto the mirror section, and is configured to form a minimum amplitude point (node) of substrate vibration formed near the mirror section at a position slightly shifted from the connection point between the torsion beam section and the substrate, generate a torsional vibration in the mirror section by utilizing the plate waves induced in the substrate, and deflect the scanning beam reflected by the mirror section at a predetermined angle.

Furthermore, the deviation amount ΔL between the center of gravity of the mirror section and the connection point of the torsion beam section with the substrate is set to 0≦ΔL≦0.2 (ΔL=(L1-L2)/(L1+L2), (L1: distance from the center line of the torsion beam section to one end of the mirror section, L2: distance from the center line of the torsion beam section to the other end of the mirror section)).

JP 2006-293116 A

The optical scanning device described above needs to generate plate wave vibrations in the substrate. In order to efficiently generate plate wave vibrations at the resonant frequency, it is important to accurately position the fixing parts that support the substrate and the magnetostrictive body or permanent magnet that serves as the vibration source for the mirror part on the substrate. Therefore, there is a problem that it is difficult to obtain a stable resonant frequency because variations in the positions of the beam part, the vibration source, and the fixing parts of the substrate cause a shift between the resonant frequency of the mirror and the resonant frequency of the plate wave, and a shift in the positions of the loops and nodes of the plate wave vibration.

In addition, in the above-mentioned optical scanning device, the minimum amplitude point (node) of the substrate vibration is formed at a position slightly shifted from the connection point between the torsion beam section and the substrate, so the position of the torsion beam section fluctuates in the thickness direction of the substrate as the substrate vibrates due to plate waves, and since it was necessary to shift the position of the center of gravity of the mirror section from the connection point between the torsion beam section and the substrate, the incident position of the scanning beam on the mirror fluctuates, resulting in the problem that it was impossible to avoid the effects of fluctuations in the scanning speed and scanning angle of the scanning beam.

Furthermore, because standing waves are generated by distorting the substrate and both ends of the beam are designed to be located near the nodes, the piezoelectric element placed on the substrate cannot be fixed, and when distortion occurs in the substrate, the generated stress varies depending on the installation position of the piezoelectric element; or, the distortion stress is added to the stress required to originally deform the beam, making the total larger than the amplitude stress design value, which in principle reduces the design degree of the amplitude and affects the efficiency of the input power and the resonance frequency. Therefore, there is also the problem that if the piezoelectric element is formed into a thick layer to increase rigidity, it becomes impossible to achieve a small and lightweight design.

In view of the above-mentioned problems, the object of the present invention is to provide a small, lightweight, long-life optical deflection device, optical scanning device, and optical scanning distance measuring device that uses thin-layer piezoelectric elements while reducing vibration variations caused by substrate distortion and manufacturing variations.

In order to achieve the above-mentioned object, the first characteristic configuration of the optical deflection device according to the present invention is that it comprises an optical deflector having an optical deflection mirror supported from both sides via a pair of beams located in a straight line at an opening formed on one end side of a plate-like body, a vibrator that supports the other end side of the plate-like body in a cantilever structure in which one end side of the plate-like body is the free end, and in a position in which the extension direction from the other end side of the plate-like body to the one end side intersects with the extension direction of the beams, and a base that supports the vibrator, and the plate-like body is supported by the vibrator via an overlapping portion in which the main surface of the plate-like body overlaps the main surface of the vibrator.

The vibrator vibrates a cantilevered plate, the other end of which is supported so as to overlap the main surface of the vibrator, in the thickness direction of the plate, causing an opening formed on one end, which is the free end, of the plate to vibrate in phase. The optical deflection mirror is supported by a pair of beams arranged so that their orientation intersects with the direction of extension from the other end, which is the supported end of the cantilevered plate, toward the one end, which is the free end. Due to the difference in distance between the near side and the far side, different values of speed and acceleration act on the optical deflection mirror, which is supported by a pair of beams arranged so that their orientation intersects with the direction of extension from the other end, which is the supported end of the cantilevered plate, toward the one end, which is the free end, and therefore a swing moment acts on the beams as an axis due to the vibration.

As a result, the optical deflection mirror begins to rotate around the beam, rotates until the force and moment accumulated in the spring due to the torsion of the beam balances, stops, and then rotates in the opposite direction. This oscillation is repeated in the same period as the oscillator's vibration cycle, and the mirror oscillates with maximum amplitude at the resonance point determined by the spring constant of the beam and the inertial mass of the mirror. Even if there is a relative positional variation between the oscillator and the plate-shaped body that make up the overlapping part, the optical deflection mirror can be oscillated with a large amplitude and stable oscillation cycle by driving the oscillator with a vibration frequency close to the resonance frequency of the optical deflection mirror, which is determined by the cross-sectional area and length of the beam and the shape of the optical deflection mirror.

The second characteristic configuration has the same features as the first characteristic configuration described above, in that the center of gravity of the optical deflector is located on the straight line.

When a scanning beam is incident on the optical deflection mirror, the center of gravity of the optical deflection mirror is located on the oscillation axis, so there is no fluctuation in the incident position.

The third characteristic configuration is that, in addition to the first or second characteristic configuration described above, the area of the main surface of the vibrator is set to be equal to or larger than the area of the overlapping portion.

The area of the vibrator is set to be greater than or equal to the area of the overlapping portion between the other end of the plate and the vibrator, so the plate can be vibrated in a stable manner.

The fourth characteristic configuration is that, in addition to any one of the first to third characteristic configurations described above, the plate-like body is supported by the vibrator using an elastic member.

The elastic member absorbs distortions that occur in the vibrator due to disturbances such as the vibration of the plate, allowing the plate to vibrate in a stable vibration state, and also improves resistance to mechanical damage.

The fifth characteristic feature of the present invention is that, in addition to the fourth characteristic feature described above, the elastic member is an elastic adhesive that bonds the main surface of the plate-shaped body to the main surface of the vibrator, and at least a predetermined area of the overlapping portion is bonded.

Since elastic adhesives have the property of becoming a rubber-like elastic body after curing, they can be suitably used as elastic members. Examples include silicone resin adhesives, modified silicone resin adhesives, modified acrylic adhesives, and urethane resin adhesives composed of polyol and polyisocyanate hardener. By adhering a certain area or more of the overlapping portion on the main surface of the vibrator via an elastic member, a force can be applied to the main surface of the adhered plate-like body to vibrate it in the thickness direction.

The sixth characteristic feature of the present invention is that, in addition to the fourth characteristic feature described above, the elastic member is an elastic clip that clamps the vibrator and the plate-shaped body.

Even if the elastic member is an elastic clip that clamps the vibrator and the plate-shaped body, it can absorb distortion-causing factors caused by external disturbances.

The seventh characteristic feature of the present invention is that, in addition to the fourth characteristic feature described above, the vibrator is supported on the base using the elastic member.

By disposing the elastic member between the vibrator and the base, mechanical stresses that occur in the vibrator, such as thermal stresses caused by differences in linear expansion coefficients, can be suppressed.

The eighth characteristic configuration of the same is that, in addition to any one of the first to seventh characteristic configurations described above, the optical deflector is composed of an integrally formed body using cold-rolled material or single crystal semiconductor.

To extend the life of the components, it is preferable to construct the optical deflector from an integrally formed body using cold-rolled material or single crystal semiconductor.

The ninth characteristic configuration of the present invention is that, in addition to any one of the first to eighth characteristic configurations described above, the vibrator is composed of a piezoelectric element or a magnetostrictive element.

The first characteristic configuration of the optical scanning device according to the present invention is that it is equipped with an optical deflection device having any one of the first to ninth characteristic configurations described above, and a light source unit that irradiates a light beam onto the optical deflection mirror.

The first characteristic configuration of the optical scanning distance measuring device according to the present invention is that it is equipped with an optical deflection device having any one of the first to ninth characteristic configurations described above, a light source unit that irradiates a light beam onto the optical deflection mirror, and a light receiving unit that detects reflected light from the light beam scanned by the optical deflection device.

As described above, according to the present invention, it is possible to provide a small, lightweight, long-life optical deflection device, optical scanning device, and optical scanning distance measuring device that uses a thin piezoelectric element while reducing vibration variations caused by substrate distortion and manufacturing variations.

FIG. 1 is an explanatory diagram of an optical deflection device according to the present invention; An exploded perspective view of an optical deflection device including an optical deflector, an oscillator, and a base. 1A to 1D are diagrams for explaining the operation of a light deflection device. FIG. 1 is an explanatory diagram of an optical scanning device and an optical scanning distance measuring device. (a) and (b) are characteristic diagrams of the prototype.

The optical deflection device, optical scanning device, and optical scanning distance measuring device according to the present invention will be described below with reference to the drawings.

As shown in Figures 1 and 2, the optical deflection device 1 includes an optical deflector 10, an oscillator 20, and a base 30.

The optical deflector 10 has a rectangular optical deflection mirror 15 supported by a pair of beams 13, 14 so as to be positioned at the center of a rectangular opening 12 formed on one end of a plate-shaped body 11 made of a rectangular thin plate.

The pair of beams 13, 14 are arranged on a straight line connecting the midpoints of the opposing sides 12a, 12b to the midpoints of the opposing sides 15a, 15b of the optical deflection mirror 15, so as to support the optical deflection mirror 15, which is square in plan view and located in the center of the opening 12, and are arranged so that the center of gravity of the optical deflection mirror 15 is located on the straight line. In other words, the optical deflection mirror 15 is supported so that it can freely swing around the beams 13, 14 as the torsion axis.

The optical deflector 10 may be made of, for example, a spring material, a cold-rolled material such as SUS, i.e., a tension-annealed material such as stainless steel, carbon tool steel, or polished steel, or an elastic plate made of a single crystal semiconductor such as silicon. Regardless of the material used, it is integrally formed using a manufacturing method that does not cause mechanical damage, such as an etching method.

A thin plate-shaped piezoelectric element or magnetostrictive element is used as the vibrator 20. In this embodiment, a piezoelectric element 21 with a size of about 20 mm x 10 mm in plan view and a thickness of about 0.5 mm is used.

Although not shown in the figure, upper and lower electrode patterns are formed on both the front and back main surfaces of the piezoelectric element 21, and a lead wire substrate 22 for external electrode extraction is disposed on the lower side of the piezoelectric element 21 so as to extend outward from one side of the piezoelectric element 21. A wiring pattern for applying an alternating voltage to each of the upper and lower electrode patterns of the piezoelectric element 21 is formed on the lead wire substrate 22. Through holes are formed in the piezoelectric element 21, and the wiring formed on the lead wire substrate 22 is electrically connected to the upper electrode pattern of the piezoelectric element 21 via the through holes.

The piezoelectric element 21 only needs to have the property of generating vibration in the thickness direction, and is preferably a laminated piezoelectric element in the form of a thin plate that expands and contracts in the thickness direction. The piezoelectric element 21 may expand and contract in the extension direction of the thin plate (vertical or horizontal direction) as it expands and contracts in the thickness direction. The piezoelectric element 21 may also be a vibration element in which the thin plate deforms in a warping manner, causing the center of the main surface to vibrate up and down. The same applies to magnetostrictive elements.

The base 30 is made of a hard resin such as polycarbonate resin or acrylic resin, and has a recess 31 formed in the center to accommodate the lead wire substrate 22.

As shown in FIG. 2, the vibrator 20 is bonded to the surface of the base 30 via an elastic adhesive layer 51 that has properties that become a rubber-like elastic body after hardening, and the main surface of the plate-like body 11 constituting the optical deflector 10 is bonded to the upper surface (main surface) of the vibrator 20 via a similar elastic adhesive layer 52. It is preferable that a predetermined area or more of the overlapping portion where the main surface of the plate-like body 11 overlaps the main surface of the vibrator 20 is bonded via the elastic adhesive layer 52, so that the force from the vibrator 20 to vibrate the main surface of the plate-like body 11 in the thickness direction can be effectively applied. The predetermined area or more may be at least 50%, preferably 70% or more, and more preferably 100%.

As the elastic adhesive layers 51 and 52, for example, a silicone resin adhesive, a modified silicone resin adhesive, a modified acrylic adhesive, or a urethane resin adhesive composed of polyol and a polyisocyanate hardener, etc., can be suitably used. In addition, the elastic adhesive layers 51 and 52 can be made of a thin sheet-like, film-like, or tape-like adhesive or pressure-sensitive adhesive.

Elastic adhesives have the property of becoming rubber-like elastic bodies after curing, so they can be used favorably as elastic materials. Examples include silicone resin adhesives, modified silicone resin adhesives, modified acrylic adhesives, and urethane resin adhesives made of polyol and polyisocyanate hardeners.

As shown in FIG. 1, one end of the plate-like body 11 constituting the optical deflector 10 is a cantilever structure in which the free end is the one end, and the entire surface of the plate-like body 11, except for the opening 12, is glued and fixed to overlap with the vibrator 20 at the other end so that the extension direction from the other end of the plate-like body 11 to the one end is perpendicular to the extension direction of the beams 13 and 14. In other words, the pair of beams 13 and 14 and the optical deflector mirror 15 are supported by the vibrator 20.

The elastic adhesive layer 51 is arranged so that its area is equal to or greater than the area of the vibrator 20 excluding the lead wire substrate 22, and the adhesive layer 52 is arranged so that its area is equal to or greater than the area of the overlapping portion 53 between the plate-like body 11 and the vibrator 20. In other words, the adhesive layer 52 is arranged so that its length is longer than the width of the plate-like body 11.

The plate-like body 11 constituting the optical deflector 10 may be square or rectangular in shape, and the corners may be rounded. It may also be rectangular or triangular with a gradually narrower tip. The shape of the opening 12 is not limited to a rectangle, and may be square, elliptical, or circular, and may have one end open. It is sufficient that the opening 12 is formed symmetrically with respect to the extension direction of the plate-like body 11, with at least one end supported by a cantilever structure. The extension direction of the pair of beams 13, 14 and the optical deflection mirror 15 is arranged in a direction that intersects with the extension direction of the plate-like body 11 toward the free end, preferably in a direction perpendicular or nearly perpendicular.

As shown in Figures 3(a) to (d), the vibrator 20 vibrates the plate 11 in the thickness direction of the plate 11, which is arranged so as to overlap the main surface of the vibrator 20, and the other end of the plate 11, which is supported in a cantilever structure with one end as a free end, is vibrated in approximately the same phase. The vibration causes an oscillation moment to act on the optical deflection mirror 15, which is supported by a pair of beams 13, 14 (see Figure 1), with the beams 13, 14 as its axis.

At this time, a difference occurs in the moment applied to the optical deflection mirror 15 on the near side and far side of the beams 13, 14 from the support position of the vibrator 20. This is because, in the plate-like body 11 supported in a cantilevered manner, the speed and acceleration are different on the near side and far side of the beams 13, 14 of the optical deflection mirror 15, and as a result, a difference also occurs in the moment.

When this difference acts on both sides of the mirror with the beams 13, 14 supporting the mirror as the central axis, a rotational moment is generated around the beams 13, 14. This rotational moment rotates the light deflection mirror 15 and accumulates a torsional spring force in the beams 13, 14.

As a result, the twisting of the beams 13 and 14 causes the optical deflection mirror 15 to oscillate with the same period as the vibration period of the oscillator 20. If this is done continuously, the amplitude of the mirror will be maximized at the resonance point calculated by the spring constant of the beam and the inertial mass of the mirror.

The alternating voltage applied to the oscillator 20 is set to a frequency close to the resonant frequency of the beams 13, 14 and the optical deflection mirror 15, and as a result, the oscillation amplitude of the optical deflection mirror can be made large and stable. Even if the support position of the oscillator 20 is slightly shifted, the optical deflection mirror can be made to oscillate at the resonant frequency by setting the frequency of the alternating voltage applied to the oscillator 20 close to the resonant frequency, so that the optical deflection mirror can be oscillated at a stable frequency without being significantly affected by the assembly accuracy of the support position.

As described above, the optical deflection device 100 includes an optical deflector having an optical deflection mirror supported from both sides via a pair of beams positioned in a straight line in an opening formed on one end side of a plate-like body, a cantilever structure in which one end side of the plate-like body is the free end, a vibrator that supports the other end side of the plate-like body so that the extension direction from the other end side of the plate-like body to the one end side intersects with the extension direction of the beams, and a base that supports the vibrator, and the plate-like body is supported by the vibrator via an overlapping portion where the main surface of the plate-like body overlaps the main surface of the vibrator.

The optical deflection mirror is configured so that its center of gravity is located on the straight line connecting the beam sections, and the area and shape of the main surface of the vibrator can be any shape suitable for the overlapping section to vibrate in the vertical direction. In order for the overlapping section to obtain stable vertical vibration, it is preferable that the area of the main surface of the vibrator is set to be equal to or larger than the area of the overlapping section.

The plate-like body is preferably supported by the vibrator using an elastic member, and an elastic adhesive is preferably used as the elastic member to bond the main surface of the plate-like body to the main surface of the vibrator. It is preferable that at least a predetermined area of the overlapping portion is bonded with the elastic adhesive so that the main surface of the plate-like body vibrates up and down almost evenly. For example, the entire surface of the overlapping portion or an appropriate portion depending on the vibration mode may be bonded.

The elastic member 50 can also be configured as an elastic clip that clamps the vibrator and the plate-shaped body.

The optical deflector is preferably constructed as an integral body formed by a stress-free method such as etching using cold-rolled materials that have been tension-annealed, such as stainless steel, carbon tool steel, or polished steel, or elastically deformable thin plate materials such as single crystal semiconductors, and the vibrator is preferably constructed of a piezoelectric element or magnetostrictive element.

Figure 4 shows the basic configuration of the optical scanning distance measuring device 100. The optical scanning distance measuring device 100 includes the optical deflection device 1 described above, a light source unit 2 that irradiates an optical beam onto the optical deflection mirror 15, and a light receiving unit 3 that detects the reflected light of the optical beam scanned by the optical deflection device 2. The optical deflection device 1 and the light source unit 2 constitute an optical scanning device 4.

A laser diode or light-emitting diode with an emission wavelength region in the near-infrared region is preferably used as the light source unit 2, and an avalanche photodiode or SPAD (Single Photon Avalanche Diode) is preferably used as the light receiving unit 3.

The measurement light emitted from the light source unit 2 is incident on the optical deflection mirror 15 by the semi-transparent mirror 5, and the measurement light is scanned toward the measurement target space by the optical deflection mirror 15. The reflected light from the measurement target space is incident on the optical deflection mirror 15, passes through the semi-transparent mirror 5, and is then focused by the focusing lens 6 and detected by the light receiving unit 3. The reflected light from the measurement target space may be detected via a separate light receiving optical system without passing through the optical deflection mirror 15.

The optical deflection mirror 15 has a center of gravity located on the straight line between the pair of beams 13 and 14, and is not displaced from the connection point with the substrate, so there is an advantage that there is no variation that would optically affect the incident position of the scanning beam on the optical deflection mirror 15. As a result, there is an advantage that there is little variation in the scanning speed or scanning angle of the scanning beam.

The distance can be calculated based on the time difference between the emission of the measurement light from the light source unit 2 and the detection of the reflected light by the light receiving unit 3, which is the physical relationship between the measurement light and the reflected light. It is also possible to calculate the distance using the phase difference between the measurement light and the reflected light by treating the measurement light as AM-modulated continuous light.

As an example of cold-rolled material, a tension-annealed SUS304 material with a thickness of 0.1 mm±5 μm was used to prototype an optical deflector equipped with a 1 mm square optical deflection mirror using an etching method, and the results were compared with the simulation results.
The resonance frequency of the simulated light deflection mirror was 11,341 Hz, whereas the resonance frequency of the prototype was 11,276 Hz, with an amplitude optical angle of 10 degrees. It was confirmed that the deviation in the resonance frequency between the simulation and the actual prototype was only 0.6%.
The expected manufacturing variation in the thickness of SUS304 is 0.1 mm ± 5 μm. When a simulation was performed under these conditions, the resonant frequency was calculated to be 11,667 Hz for SUS304 with a thickness of 0.1 mm + 5 μm, and 10,922 Hz for SUS304 with a thickness of 0.1 mm - 5 μm, meaning that the manufacturing variation in the resonant frequency is in the range of +2.8% to -3.7%.

The simulation was performed assuming a silicon wafer with a thickness of 520±0.8μm as the single crystal semiconductor. The resonant frequency of the optical deflection mirror was 19.5KHz, and the optical amplitude was 40 degrees.

Figure 5(a) shows the voltage amplitude characteristics and Figure 5(b) shows the frequency amplitude characteristics for the prototype using SUS304 mentioned above. With this prototype, a large optical amplitude degree that is almost proportional to the input voltage to the vibrator can be obtained, and the resonance frequency at which the largest optical amplitude degree is obtained is about 11.9 kHz. In the case of this embodiment, since no distortion stress is added to the stress required for the original deformation of the beam, it is possible in principle to avoid a decrease in the design degree of optical amplitude degree and the resonance frequency, and input power can be used efficiently.

1: Optical deflection device 10: Optical deflector 11: Plate-like body 12: Opening 13, 14: Beam 15: Optical deflection mirror 20: Vibrator 21: Piezoelectric element 22: Lead wire substrate 30: Base 31: Recess 50: Elastic members 51, 52: Elastic adhesive layer

Claims (9)

an optical deflector including an optical deflection mirror supported on both sides of an opening formed on one end of a plate-like body via a pair of beams positioned on a straight line;
a vibrator that supports one end of the plate-like body in a cantilever structure in which one end is a free end, and in which an extension direction from the other end of the plate-like body toward the one end intersects with an extension direction of the beam portion;
A base for supporting the transducer;
Equipped with
the plate-shaped body is supported by the vibrator using an elastic member via an overlapping portion where a main surface of the plate-shaped body overlaps a main surface of the vibrator , and the elastic member is an elastic clip that holds the vibrator and the plate-shaped body together.
Optical deflection device. The optical deflection device according to claim 1, wherein the center of gravity of the optical deflection mirror is located on the straight line. The optical deflection device according to claim 1 or 2, wherein the area of the main surface of the oscillator is set to be equal to or larger than the area of the overlapping portion. 4. An optical deflection device as described in any one of claims 1 to 3, wherein the elastic member further comprises an elastic adhesive for adhering the main surface of the plate-shaped body to the main surface of the vibrator, and at least a predetermined area of the overlapping portion is adhered. 5. The optical deflection device according to claim 1 , wherein the vibrator is supported on the base by using the elastic member. 6. The optical deflection device according to claim 1, wherein the optical deflector is an integrally formed body made of a cold-rolled material or a single crystal semiconductor. 7. The optical deflection device according to claim 1, wherein the vibrator is made of a piezoelectric element or a magnetostrictive element. 8. An optical scanning device comprising: an optical deflection device according to claim 1 ; and a light source unit for irradiating the optical deflection mirror with a light beam. An optical scanning distance measuring device comprising: an optical deflection device as described in any one of claims 1 to 7 ; a light source unit that irradiates an optical beam onto the optical deflection mirror; and a light receiving unit that detects reflected light of the optical beam scanned by the optical deflection device.

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