JP3310118B2 - Humidification method and air conditioning system - Google Patents
Humidification method and air conditioning systemInfo
- Publication number
- JP3310118B2 JP3310118B2 JP24329694A JP24329694A JP3310118B2 JP 3310118 B2 JP3310118 B2 JP 3310118B2 JP 24329694 A JP24329694 A JP 24329694A JP 24329694 A JP24329694 A JP 24329694A JP 3310118 B2 JP3310118 B2 JP 3310118B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- humidity
- outside air
- amount
- introduced outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、工業用クリーンルーム
等、恒温恒湿室に特に適した加湿方法及び空気調和シス
テムに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a humidifying method and an air conditioning system particularly suitable for a constant temperature and humidity chamber such as an industrial clean room.
【０００２】[0002]
【従来の技術】工業用クリーンルーム等の温湿度制御に
おいては、湿度制御は外気を処理する空調機（以下、
「外調機」という）で空気中の絶対湿度を制御する露点
制御方式が採られている。このような外調機での露点制
御は、外気の絶対湿度を室内の設定湿度（絶対湿度）に
まで調湿した空気（以下、「調湿外気」という）を室内
に送風するものであり、これは室内で発生する湿分が外
気導入量に比べてきわめて少ない場合、室内の絶対湿度
は定常状態において調湿外気の絶対湿度と等しくなるこ
とを利用した制御方式である。2. Description of the Related Art In temperature and humidity control of an industrial clean room or the like, humidity control is performed by an air conditioner (hereinafter, referred to as an air conditioner) that processes outside air.
A dew point control method of controlling the absolute humidity in the air with an “outside control device” is employed. The dew point control in such an outside air conditioner is to blow air (hereinafter, referred to as “humidified outside air”) conditioned to the absolute humidity of the outside air up to a set humidity (absolute humidity) in the room, This is a control method utilizing that the absolute humidity in the room becomes equal to the absolute humidity of the conditioned outside air in a steady state when the amount of moisture generated in the room is extremely smaller than the amount of outside air introduced.
【０００３】この点に関し、循環空気の湿度を直接セン
サで検出して制御する方法も考えられるが、工業用クリ
ーンルーム等では循環空気量がきわめて多いので、変化
の小さい循環空気の湿度を直接的にセンサで検出して加
湿器で制御すると、センサや加湿器に一定の応答速度が
あるため、いわゆるハンチング現象を生じ安定的な運転
が難しい。これに対し外気の露点制御方式では、設定湿
度との差が大きい外気を調湿し、さらにその調湿外気
を、外気の十数倍もある多量の循環空気と混合するた
め、センサ及び加湿器の応答速度が循環空気系で用いる
場合より遅くても、安定な制御が可能である。このた
め、大型の工業用クリーンルーム等では露点制御方式が
用いられているのである。[0003] In this regard, a method of directly detecting and controlling the humidity of the circulating air by a sensor is conceivable. However, in an industrial clean room or the like, the amount of the circulating air is extremely large. If the detection is performed by the sensor and the control is performed by the humidifier, the sensor or the humidifier has a constant response speed, so that a so-called hunting phenomenon occurs, and stable operation is difficult. In contrast, the outside air dew point control method controls the humidity of the outside air, which has a large difference from the set humidity, and mixes the conditioned outside air with a large amount of circulating air that is ten and several times the outside air. Even if the response speed is slower than when used in a circulating air system, stable control is possible. For this reason, the dew point control system is used in large industrial clean rooms and the like.
【０００４】前記した外調機での露点制御方式によれ
ば、夏期の除湿時においては、外調機の中で外調機出口
空気の露点を検出しながら、必要最小限の湿分を外調機
内の冷却コイルで除去するため、省エネルギーである
が、冬期においては、同様に外調機内の蒸気加湿器等を
用いて所定の露点温度まで加湿しているため、外気の温
度が低すぎると、加湿しても低い露点温度で飽和してし
まうので、所定の露点温度に制御できない。そのため従
来は、外気をヒータによって予め加熱する、即ち再熱後
に加湿する方法を採っている。[0004] According to the dew point control method in the external control device, during dehumidification in summer, the minimum necessary moisture is removed while detecting the dew point of the air at the external control device outlet in the external control device. It is energy saving because it is removed by the cooling coil in the controller, but in winter, it is similarly humidified to a predetermined dew point using a steam humidifier in the external controller, so if the temperature of the outside air is too low However, even if it is humidified, it is saturated at a low dew point temperature, so that it cannot be controlled to a predetermined dew point temperature. Therefore, conventionally, a method of preheating the outside air by a heater, that is, humidifying after reheating is adopted.
【０００５】これを図２に基づいて説明すれば、従来一
般のクリーンルームの空調システムは、目的空間となる
クリーンルーム１０１への給気は、外調機１０２を経た
導入外気（ＯＡ）と、クリーンルーム１０１からの還気
（ＲＡ）を、例えば床下チャンバ１０３内で混合させて
いた。そして外調機１０２の出口付近に露点温度センサ
１０４を設置して、導入外気（ＯＡ）の絶対湿度を検出
し、それによって夏期の除湿時においては、外調機１０
２内の冷温水コイル１０５を制御し、冬期の加湿時にお
いては、外調機１０２内の加湿器１０６を、湿度コント
ローラ１０７で制御するようにしていた。なお一般的に
温度制御については、天井チャンバ１０８に設置した給
気（ＳＡ）の温度を検出する温度センサ１０９の検出結
果に基づいて温度コントローラ１１０がドライコイル１
１１を制御するようになっている。そして冬期の加湿時
においては、外気の温度が低いため、外調機１０２内に
再熱ヒータ１１２を設置して、外気を予め加熱していた
のである。[0005] Referring to FIG. 2, according to a conventional general clean room air conditioning system, air supply to a clean room 101 serving as a target space is performed by introducing outside air (OA) through an external air conditioner 102 and clean room 101. For example, was mixed in the underfloor chamber 103. Then, a dew point temperature sensor 104 is installed near the outlet of the outside air conditioner 102 to detect the absolute humidity of the introduced outside air (OA).
The humidifier 106 in the external air conditioner 102 is controlled by the humidity controller 107 during the humidification in the winter by controlling the chilled and heated water coil 105 in the inside 2. In general, temperature control is performed by the temperature controller 110 based on the detection result of the temperature sensor 109 that detects the temperature of the supply air (SA) installed in the ceiling chamber 108.
11 is controlled. During the humidification period in winter, since the temperature of the outside air is low, the reheat heater 112 is installed in the outside air conditioner 102 to heat the outside air in advance.
【０００６】[0006]
【発明が解決しようとする課題】ところが工業用クリー
ンルーム等では、内部の熱負荷が大きいため、冬期にお
いても冷房を行っている。そのため従来の外調機での露
点制御方式採用に伴う加湿方法では、再熱ヒータ１１２
による加熱に起因したエネルギーロスが大きい。以上の
点で従来の加湿方法は好ましくなかったのである。However, in an industrial clean room or the like, cooling is performed even in winter due to a large internal heat load. Therefore, in the humidification method accompanying the adoption of the dew point control method in the conventional external controller, the reheat heater 112
Large energy loss due to heating by In view of the above, the conventional humidification method was not preferable.
【０００７】本発明はかかる点に鑑みてなされたもので
あり、循環空気系で加湿を行う方式を採用しつつもハン
チング現象が生じず、しかもエネルギーロスのない加湿
方法、並びに当該加湿方法及び既述の露点制御方式の長
所を採り入れた空気調和システムを提供して、前記問題
の解決を図ることを目的とするものである。The present invention has been made in view of the above points, and a humidifying method which does not cause a hunting phenomenon and has no energy loss while adopting a method of humidifying in a circulating air system. It is an object of the present invention to provide an air conditioning system incorporating the advantages of the dew point control method described above to solve the above problem.
【０００８】[0008]
【課題を解決するための手段】前記目的を達成するた
め、請求項１によれば、目的空間からの還気と、空調機
によって処理された導入外気とを混合させ、これを再び
目的空間への給気とする循環空気系を有した空気調和シ
ステムにおける、前記目的空間内を加湿手段によって加
湿する方法であって、導入外気の絶対湿度と導入量を検
出し、設定湿度における絶対湿度と導入外気との絶対湿
度の差に、導入外気量を乗じた量を所要加湿量として、
前記加湿手段によって前記循環空気系の循環空気に付加
させることを特徴とする、加湿方法が提供される。In order to achieve the above object, according to the present invention, the return air from the target space is mixed with the outside air processed by the air conditioner, and the mixed air is returned to the target space. In an air conditioning system having a circulating air system for supplying air, a method of humidifying the inside of the target space by humidifying means, wherein the absolute humidity and the amount of introduced outside air are detected, and the absolute humidity and the introduced humidity at a set humidity are detected. The required humidification amount is the amount obtained by multiplying the difference in absolute humidity from the outside air by the amount of introduced outside air,
A humidifying method is provided, wherein the humidifying means adds the air to the circulating air of the circulating air system.
【０００９】また請求項２によれば、さらに精密な確度
の高い制御が行えるための加湿方法として、導入外気の
絶対湿度と導入量を検出し、設定湿度における絶対湿度
と導入外気との絶対湿度の差に導入外気量を乗じた量を
所要加湿量とし、さらに給気の湿度を検出してこの検出
結果と設定湿度の差に基づいて前記所要加湿量を調整
し、これに基づいて加湿手段で循環空気系の循環空気に
付加させることを特徴とする、加湿方法が提供される。According to a second aspect of the present invention, as a humidifying method for performing more precise and highly accurate control, the absolute humidity and the amount of the introduced outside air are detected, and the absolute humidity at the set humidity and the absolute humidity between the introduced outside air are determined. The required humidification amount is obtained by multiplying the difference by the introduced outside air amount, and the required humidification amount is further adjusted based on the difference between the detection result and the set humidity by detecting the supply air humidity. The humidification method is characterized in that it is added to circulating air of a circulating air system.
【００１０】前記した各加湿方法における加湿手段は、
蒸気方式を始めとする既存の種々の加湿手段を用いるこ
とが可能であるが、中でも請求項３に記載したように、
水噴霧方式及び／又は気化方式の加湿手段を採用すれ
ば、気化熱を奪い、給気の温度を下げる作用をするた
め、例えばドライコイルの負荷が小さくなるというさら
に好ましい結果が得られる。The humidifying means in each of the above humidifying methods includes:
It is possible to use various existing humidification means such as a steam method, but among them, as described in claim 3,
If the humidifying means of the water spray method and / or the vaporization method is adopted, the heat of vaporization is taken and the temperature of the supply air is reduced, so that a more preferable result that, for example, the load on the dry coil is reduced is obtained.
【００１１】また請求項４によれば、外気を処理する空
調機を経た導入外気と、目的空間からの還気とを混合さ
せ、これを再び目的空間への給気とする循環空気系を有
した空気調和システムにおいて、導入外気の絶対湿度を
検出する湿度センサと、導入外気の量を検出する導入外
気量検出センサと、前記循環空気系に設置された加湿手
段と、湿度コントローラとを有し、さらに前記空調機は
少なくとも冷却コイルを有し、導入外気の絶対湿度が目
的空間の設定湿度の絶対湿度よりも低い場合には、目的
空間内の設定湿度における絶対湿度と、前記湿度センサ
によって得た導入外気の絶対湿度の差に、前記導入外気
量検出センサによって得た導入外気量を乗じた量が所要
加湿量として前記湿度コントローラによって演算される
と共に、この演算結果に基づいて前記加湿手段が制御さ
れ、導入外気の絶対湿度が目的空間の設定湿度の絶対湿
度よりも高い場合には、前記湿度コントローラによって
前記空調機の冷却コイルが制御される如く構成されたこ
とを特徴とする、空気調和システムが提供される。According to a fourth aspect of the present invention, there is provided a circulating air system that mixes the outside air introduced through the air conditioner for processing outside air with the return air from the target space and supplies the mixed air to the target space again. In the air conditioning system that has, a humidity sensor that detects the absolute humidity of the introduced outside air, an introduced outside air amount detection sensor that detects the amount of the introduced outside air, humidifying means installed in the circulating air system, and a humidity controller Further, the air conditioner has at least a cooling coil, and when the absolute humidity of the introduced outside air is lower than the absolute humidity of the set humidity of the target space, the absolute humidity at the set humidity in the target space is obtained by the humidity sensor. The difference between the absolute humidity of the introduced outside air and the introduced outside air amount obtained by the introduced outside air amount detection sensor is calculated by the humidity controller as a required humidification amount. The humidifying unit is controlled based on the result, and when the absolute humidity of the introduced outside air is higher than the absolute humidity of the set humidity of the target space, the humidity controller controls the cooling coil of the air conditioner. An air conditioning system is provided.
【００１２】この場合、請求項５に記載したように、さ
らに給気の湿度を検出する給気湿度センサを有し、この
給気湿度センサによって得た給気湿度と目的空間におけ
る設定湿度の差に基づいて、前記所要加湿量を調整する
ように構成したり、また請求項６に記載したように、前
記所要加湿量の調整のみならず、冷却コイルの制御の調
整を行うように構成してもよい。In this case, as described in claim 5, an air supply humidity sensor for detecting the air supply humidity is further provided, and the difference between the air supply humidity obtained by the air supply humidity sensor and the set humidity in the target space is provided. Based on the above, the required humidification amount is configured to be adjusted, and as described in claim 6, not only the required humidification amount is adjusted, but also the control of the cooling coil is adjusted. Is also good.
【００１３】以上に挙げた各空気調和システムにおける
加湿手段についても、請求項７に記載したように、水噴
霧方式及び／又は気化方式の加湿手段を採用すれば、な
お好ましい結果が得られる。[0013] As for the humidifying means in each of the above-mentioned air conditioning systems, if a humidifying means of a water spray system and / or a vaporizing system is adopted, more preferable results can be obtained.
【００１４】[0014]
【作用】請求項１に記載の加湿方法によれば、目的空間
の湿度を直接検出する方式ではなく、導入外気の絶対湿
度と導入量を検出し、設定湿度（絶対湿度）と導入外気
との絶対湿度の差に、導入外気量を乗じた量を所要加湿
量として加湿するので、まずハンチングの問題は生じな
い。また例えば目的空間がクリーンルームである場合、
年間を通じて冷房運転を行っている関係上、循環空気の
温度は冬期でも２３゜Ｃ〜２５゜Ｃ程度である。したが
って循環空気に直接加湿する本発明によれば、加湿のた
めの再熱は不要である。According to the humidifying method of the present invention, the absolute humidity of the introduced outside air and the amount of the introduced outside air are detected instead of the method of directly detecting the humidity of the target space, and the difference between the set humidity (absolute humidity) and the introduced outside air is determined. Since the required humidification amount is humidified by multiplying the difference in absolute humidity by the amount of outside air introduced, hunting does not occur. For example, if the target space is a clean room,
Due to the cooling operation throughout the year, the temperature of the circulating air is about 23 ° C. to 25 ° C. even in winter. Therefore, according to the present invention in which humidification is performed directly on circulating air, reheating for humidification is unnecessary.
【００１５】請求項２に記載の加湿方法では、さらに給
気の湿度を検出してこの検出結果と設定湿度の差に基づ
いて前記請求項１における所要加湿量を調整しているの
で、確度を高め、より精密な加湿を実施することができ
る。なお具体的な調整に関しては、検出結果と設定湿度
の差に基づいて割だした定数を、前記所要加湿量に乗ず
る手法をその一例として挙げることができる。In the humidifying method according to the second aspect, since the humidity of the supply air is further detected and the required humidifying amount in the first aspect is adjusted based on a difference between the detection result and the set humidity. Increased and more precise humidification can be implemented. As for the specific adjustment, a method of multiplying the required humidification amount by a constant divided based on the difference between the detection result and the set humidity can be cited as an example.
【００１６】前記した各加湿方法において、請求項３に
記載したように、加湿手段に水噴霧方式又は気化方式、
あるいはその双方の方式を有する加湿手段を採用すれ
ば、加湿時に循環空気の温度を上昇させず、逆に温度を
下げることができる。従って、冬期でも冷房運転を行っ
ているクリーンルーム等に適しており、省エネルギーも
図れる。In each of the humidifying methods described above, the humidifying means may be provided with a water spray method or a vaporizing method.
Alternatively, if humidifying means having both types is adopted, the temperature of the circulating air can be decreased without increasing the temperature of the circulating air during humidification. Therefore, it is suitable for a clean room or the like in which the cooling operation is performed even in the winter season, and energy can be saved.
【００１７】また請求項４によれば、例えば冬期など外
気が乾燥して目的空間を加湿する必要がある場合、湿度
コントローラによって加湿手段が制御され、請求項１の
加湿が循環空気になされる。従って、ハンチング現象が
ない安定した加湿制御が可能であり、再熱の必要もな
い。そして例えば夏期など外気の湿度が高い場合には、
湿度コントローラによって空調機の冷却コイルが制御さ
れるので、従前の露点制御方式の湿度制御をそのまま実
施することができ、安定した制御で省エネ効果の高い湿
度制御が可能である。Further, according to the present invention, when it is necessary to humidify the target space by drying the outside air in winter, for example, the humidifying means is controlled by the humidity controller, and the humidifying of the first aspect is performed to the circulating air. Therefore, stable humidification control without hunting phenomenon is possible, and there is no need for reheating. And when the humidity of the outside air is high, for example in summer,
Since the cooling coil of the air conditioner is controlled by the humidity controller, the humidity control of the conventional dew point control method can be performed as it is, and the humidity control with stable control and high energy saving effect can be performed.
【００１８】請求項５、６によれば、さらに給気の湿度
をも勘案して加湿手段や冷却コイルを制御するので、請
求項４の場合よりもさらに確度の高い精密な湿度コント
ロールが可能になっている。According to the fifth and sixth aspects, the humidifying means and the cooling coil are controlled in consideration of the humidity of the air supply, so that more accurate and precise humidity control can be performed than in the case of the fourth aspect. Has become.
【００１９】そして請求項７に記載したように、水噴霧
方式及び／又は気化方式の加湿手段を採用した場合に
は、請求項３の場合と同様、加湿時の循環空気の温度を
下げる効果があるので、さらなる省エネルギーを図るこ
とが可能である。When the humidifying means of the water spray type and / or the vaporizing type is employed, the effect of lowering the temperature of the circulating air at the time of humidification is obtained as in the case of the third aspect. Therefore, it is possible to further save energy.
【００２０】[0020]
【実施例】以下、本発明の一実施例を図面に基づき説明
すれば、図１は実施例にかかる空気調和システムの主要
な構成を示しており、本実施例では、目的空間を工業用
のクリーンルーム１としている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a main configuration of an air conditioning system according to the embodiment. Clean room 1
【００２１】このクリーンルーム１は、天井裏空間に天
井チャンバ２、床下空間に床下チャンバ３を有してお
り、クリーンルーム１外部に設けた循環ファン４によっ
て、給気（ＳＡ）は、天井部に設けたＨＥＰＡフィルタ
などによって構成されるフィルタユニット５を通じて天
井チャンバ２からクリーンルーム１内へと供給され、格
子板やパンチング板によって構成される床板６を通じ
て、床下チャンバ３へと流れて還気（ＲＡ）となる。そ
してこの還気（ＲＡ）は後述の空調機１１を経た処理済
みの導入外気（ＯＡ）と床下チャンバ３内で混合され、
ドライコイル７を介して循環ファン４によって再び天井
チャンバ２へと供給される。本実施例における循環空気
系は、以上のような経路を有している。This clean room 1 has a ceiling chamber 2 in the space above the ceiling and a floor chamber 3 in the space below the floor, and a circulation fan 4 provided outside the clean room 1 supplies air (SA) to the ceiling. The air is supplied from the ceiling chamber 2 into the clean room 1 through a filter unit 5 constituted by a HEPA filter or the like, flows into the underfloor chamber 3 through the floor plate 6 constituted by a lattice plate or a punching plate, and returns to the return air (RA). Become. This return air (RA) is mixed with the treated outside air (OA) that has passed through the air conditioner 11 described below in the underfloor chamber 3,
The air is again supplied to the ceiling chamber 2 by the circulation fan 4 via the dry coil 7. The circulating air system in the present embodiment has the above-described routes.
【００２２】一方外気を処理して導入外気とする空調機
１１は、ガラリ１２を介してファン１３で吸い込んだ外
気をろ過する中間フィルタ１４と、中間フィルタ１４を
通過した空気を処理する冷温水コイル１５と、この冷温
水コイル１５を通過した空気を導入外気とするため、Ｈ
ＥＰＡフィルタなどで構成される最終フィルタ１６を有
している。そしてこの空調機１１における導入外気（Ｏ
Ａ）の出口付近には、導入外気（ＯＡ）の露点温度を検
出してその絶対湿度を測定するための露点温度センサ２
１と、導入外気（ＯＡ）の導入量を検出するための風量
計２２が設置されている。これら各露点温度センサ２１
と風量計２２の検出信号は、湿度コントローラ２３へと
入力される。On the other hand, the air conditioner 11 which processes the outside air to introduce the outside air includes an intermediate filter 14 for filtering the outside air sucked by the fan 13 through the gallery 12, and a cold / hot water coil for processing the air passing through the intermediate filter 14. 15 and the air that has passed through the cold / hot water coil 15
It has a final filter 16 composed of an EPA filter or the like. Then, the outside air (O
A dew point temperature sensor 2 for detecting the dew point temperature of the introduced outside air (OA) and measuring the absolute humidity near the outlet of A)
1 and an air flow meter 22 for detecting the amount of introduced outside air (OA). Each of these dew point temperature sensors 21
And the detection signal of the anemometer 22 are input to the humidity controller 23.
【００２３】湿度コントローラ２３は、前記した露点温
度センサ２１からの検出信号に基づいて、クリーンルー
ム１の設定湿度（絶対湿度）と導入外気の絶対湿度の差
を算出し、加湿が必要な場合には、当該差に風量計２２
からの検出信号に基づいて割だした導入外気量を乗じた
量を演算して、これを第１の所要加湿量として、加湿手
段３１にその指示を出力する機能を有している。The humidity controller 23 calculates the difference between the set humidity (absolute humidity) of the clean room 1 and the absolute humidity of the introduced outside air based on the detection signal from the dew point temperature sensor 21 described above. , The airflow meter 22
Has a function of calculating an amount obtained by multiplying the amount of the introduced outside air divided on the basis of the detection signal from the humidifier, and using the calculated amount as a first required humidification amount, and outputting the instruction to the humidification means 31.
【００２４】より詳述すれば、前記床下チャンバ３にお
ける循環空気流路の下流側、即ち還気（ＲＡ）と導入外
気（ＯＡ）が混合された後の流路には、循環空気を加湿
するための水噴霧方式の加湿手段２４が設置されてお
り、湿度コントローラ２３によって演算された前記第１
の所要加湿量に基づく制御信号は、加湿手段２４の調節
弁２５へと入力され、それによって加湿量の調節が行わ
れるのである。なお流量の検出は流量計２６によって行
われ、そのの検出信号は常時湿度コントローラ２３へと
入力されている。More specifically, the circulating air is humidified on the downstream side of the circulating air flow path in the underfloor chamber 3, that is, on the flow path after the return air (RA) and the introduced outside air (OA) are mixed. Humidifying means 24 of the water spray type for
The control signal based on the required humidification amount is input to the control valve 25 of the humidification means 24, whereby the humidification amount is adjusted. The flow rate is detected by the flow meter 26, and the detection signal is constantly input to the humidity controller 23.
【００２５】一方逆に減湿が必要な場合には、湿度コン
トローラ２３は、空調機１１の冷温水コイル１５の調節
弁１５ａに対して必要な指示を出力するようになってい
る。On the other hand, when dehumidification is required, the humidity controller 23 outputs necessary instructions to the control valve 15a of the cold / hot water coil 15 of the air conditioner 11.
【００２６】さらに前記湿度コントローラ２３には、天
井チャンバ２内に設置されている給気（ＳＡ）の湿度を
測定する湿度センサ３１と、給気（ＳＡ）の温度を測定
する温度センサ３２からの各信号も入力され、最終的な
到達湿度（絶対湿度）と設定湿度（絶対湿度）に差が生
じた場合には、前記第１の所要加湿量に、当該差に基づ
いて算出された定数を乗じて演算し、その結果を第２の
所要加湿量として、加湿手段２４の調節弁２５に指示を
出力する機能も有している。もちろんそのようないわば
確度の高い指示出力は、減湿が必要な場合、空調機１１
の冷温水コイル１５の調節弁１５ａに対しても出力可能
である。The humidity controller 23 has a humidity sensor 31 for measuring the humidity of the air supply (SA) installed in the ceiling chamber 2 and a temperature sensor 32 for measuring the temperature of the air supply (SA). Each signal is also input, and when a difference occurs between the final reached humidity (absolute humidity) and the set humidity (absolute humidity), a constant calculated based on the difference is added to the first required humidification amount. It also has a function of multiplying and calculating and outputting the result to the control valve 25 of the humidifying means 24 as the second required humidification amount. Of course, such a high-precision instruction output is used when the dehumidification is required.
Can also be output to the control valve 15a of the cold / hot water coil 15.
【００２７】本実施例にかかる空気調和システムは以上
のように構成されており、例えば冬期において、外気が
極めて乾燥しており、その結果クリーンルーム１内の設
定湿度（絶対湿度）が外気の絶対湿度よりも高い場合、
湿度コントローラ２３はその差に、導入外気量を乗じた
量を第１の所要加湿量として、加湿手段２４の調節弁２
５を制御して、循環空気に当該第１の所要加湿量を付加
することが可能である。この場合、クリーンルーム１が
より精密な湿度設定を要求している場合には、湿度セン
サ３１と、温度センサ３２からの各信号からのデータも
取り入れて演算して求めた第２の所要加湿量に基づいて
湿分を付加させることも可能である。いずれの場合であ
っても、基本的には空調機１１の出口に設置した露点温
度センサ２１のデータを基にしているので、ハンチング
が生ぜず、制御性が良好で安定した湿度コントロールが
可能である。The air-conditioning system according to the present embodiment is configured as described above. For example, in winter, the outside air is extremely dry, and as a result, the set humidity (absolute humidity) in the clean room 1 becomes the absolute humidity of the outside air. Higher than
The humidity controller 23 sets the amount obtained by multiplying the difference by the introduced outside air amount as the first required humidification amount,
5 can be added to the circulating air to add the first required humidification amount. In this case, when the clean room 1 requires a more precise humidity setting, the second required humidification amount calculated by taking in data from each signal from the humidity sensor 31 and the temperature sensor 32 and calculating the data is also used. It is also possible to add moisture based on this. In any case, since the data is basically based on the data of the dew point temperature sensor 21 installed at the outlet of the air conditioner 11, hunting does not occur, and good controllability and stable humidity control are possible. is there.
【００２８】しかも加湿にあたっては、加湿手段２４に
よって循環空気に直接加湿する方式を採っているので、
クリーンルーム１の室温が常時２３゜Ｃ〜２５゜Ｃであ
ることを鑑みると、冬期においても加湿のための再熱は
必要がない。従って、従来よりもその分、省エネルギー
が図れ、また再熱用のヒータを空調機１１に設置する必
要もない。さらに加湿手段２４自体は水噴霧方式を採用
しているから、加湿の際に循環空気の温度を下げる効果
があるので、この点でも、省エネ効果は大きいものとな
っている。In addition, in humidification, a method of directly humidifying the circulating air by the humidifying means 24 is adopted.
Considering that the room temperature of the clean room 1 is always 23 ° C. to 25 ° C., it is not necessary to reheat for humidification even in winter. Therefore, energy can be saved more than before, and it is not necessary to install a heater for reheating in the air conditioner 11. Furthermore, since the humidifying means 24 itself employs the water spray method, it has an effect of lowering the temperature of the circulating air during humidification, so that the energy saving effect is also large in this respect.
【００２９】一方、例えば夏期などにおいて外気の湿度
が高く、クリーンルーム１の設定湿度（絶対湿度）より
も外気の絶対湿度の方が高い場合には、湿度コントロー
ラ２３によって、空調機１１の冷温水コイル１５が制御
され、減湿運転がなされる。この場合は、いわゆる既述
の外気露点制御方式であり、露点温度センサ２１で導入
外気（ＯＡ）の露点を検出しながら、必要最小限の湿分
を冷温水コイル１５で除去するため、省エネルギー効果
がある。またそのようにして調湿した導入外気は、より
多量の循環空気と床下チャンバ３内で混合されるため、
安定な制御が可能となっている。On the other hand, for example, when the humidity of the outside air is high in summer or the like and the absolute humidity of the outside air is higher than the set humidity (absolute humidity) of the clean room 1, the humidity controller 23 controls the cold / hot water coil of the air conditioner 11. 15 is controlled, and the dehumidifying operation is performed. In this case, the so-called outside air dew point control method described above is employed. While the dew point temperature sensor 21 detects the dew point of the introduced outside air (OA), the minimum necessary moisture is removed by the cold / hot water coil 15, so that the energy saving effect is obtained. There is. Further, since the introduced outside air conditioned in such a manner is mixed with a larger amount of circulating air in the underfloor chamber 3,
Stable control is possible.
【００３０】[0030]
【発明の効果】請求項１に記載の加湿方法によれば、ハ
ンチング現象が生じないので、安定した加湿制御が可能
であり、しかもクリーンルームなど目的空間が常時冷房
運転を行っている場合には、高い省エネ効果が得られ、
再熱ヒータも不要である。請求項２の加湿方法では、さ
らに確度の高い精密な加湿制御を実施することができ
る。そして請求項３に記載の加湿方法によれば、より一
層高い省エネ効果を得ることが可能である。According to the humidification method of the first aspect, since no hunting phenomenon occurs, stable humidification control is possible, and when the target space such as a clean room is constantly performing the cooling operation, High energy saving effect is obtained,
No reheat heater is required. According to the humidification method of the second aspect, more accurate and precise humidification control can be performed. According to the humidifying method of the third aspect, it is possible to obtain a higher energy saving effect.
【００３１】また請求項４に記載の空気調和システムに
よれば、目的空間の加湿時には、前記した請求項１の加
湿方法を実施でき、その作用効果を享有することができ
る。一方減湿時には、従前の外気を処理する空調機での
露点制御方式を採用することができ、高い省エネ効果と
安定した制御が可能である。従って、状況に応じて常に
エネルギー効率の良好な湿度コントロールが可能であ
る。請求項５、６に記載の空気調和システムによれば、
かかる作用効果に加えて、より一層確度の高い精密な湿
度コントロールを実現することができる。そして請求項
７に記載した空気調和システムによれば、加湿時の循環
空気の温度を下げる効果があるので、その分、さらなる
省エネルギーを図ることが可能である。According to the air conditioning system of the fourth aspect, when the target space is humidified, the humidification method of the first aspect can be implemented, and the operation and effect can be enjoyed. On the other hand, at the time of dehumidification, a conventional dew point control method in an air conditioner that processes outside air can be adopted, and a high energy saving effect and stable control can be achieved. Accordingly, humidity control with good energy efficiency can always be performed according to the situation. According to the air conditioning system of claims 5 and 6,
In addition to such an effect, more accurate and precise humidity control can be realized. According to the air conditioning system of the seventh aspect, the temperature of the circulating air at the time of humidification is reduced, and accordingly, further energy saving can be achieved.
【図１】本発明の実施例にかかる空気調和システムの主
要な構成を示す説明図である。FIG. 1 is an explanatory diagram illustrating a main configuration of an air conditioning system according to an embodiment of the present invention.
【図２】従来技術にかかる空気調和システムの主要な構
成を示す説明図である。FIG. 2 is an explanatory diagram illustrating a main configuration of an air conditioning system according to a conventional technique.
１ クリーンルーム ２ 天井チャンバ ３ 床下チャンバ ４ 循環ファン ７ ドライコイル １１ 空調機 １５ 冷温水コイル ２１ 露点温度センサ ２２ 風量計 ２３ 湿度コントローラ ２４ 加湿手段 ２５ 調節弁 ３１ 湿度センサ ３２ 温度センサ ３３ 温度コントローラ DESCRIPTION OF SYMBOLS 1 Clean room 2 Ceiling chamber 3 Underfloor chamber 4 Circulation fan 7 Dry coil 11 Air conditioner 15 Cold and hot water coil 21 Dew point temperature sensor 22 Air flow meter 23 Humidity controller 24 Humidifying means 25 Control valve 31 Humidity sensor 32 Temperature sensor 33 Temperature controller
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平４−106354（ＪＰ，Ａ) 特開 平８−28935（ＪＰ，Ａ) 特開 昭49−121346（ＪＰ，Ａ) 特開 平６−337151（ＪＰ，Ａ) 特開 昭63−61832（ＪＰ，Ａ) 特開 昭59−161634（ＪＰ，Ａ) 特開 平３−148541（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) F24F 11/02 102 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-106354 (JP, A) JP-A-8-28935 (JP, A) JP-A-49-121346 (JP, A) JP-A-6-129346 337151 (JP, A) JP-A-63-61832 (JP, A) JP-A-59-161634 (JP, A) JP-A-3-148541 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) F24F 11/02 102
Claims (7)
させ、これを再び目的空間への給気とする循環空気系を
有した空気調和システムにおける、前記目的空間内を加
湿手段によって加湿する方法であって、 導入外気の絶対湿度と導入量を検出し、設定湿度におけ
る絶対湿度と導入外気との絶対湿度の差に、導入外気量
を乗じた量を所要加湿量として、加湿手段によって前記
循環空気系の循環空気に付加させることを特徴とする、
加湿方法。1. An air conditioning system having a circulating air system in which return air from a target space and introduced outside air are mixed and supplied to the target space again, the inside of the target space is humidified by humidifying means. The absolute humidity of the introduced outside air and the amount of introduced air are detected, and the difference between the absolute humidity at the set humidity and the absolute humidity of the introduced outside air is multiplied by the amount of introduced outside air as the required humidifying amount. Characterized by being added to the circulating air of the circulating air system,
Humidification method.
させ、これを再び目的空間への給気とする循環空気系を
有した空気調和システムにおける、前記目的空間内を加
湿手段によって加湿する方法であって、 導入外気の絶対湿度と導入量を検出し、設定湿度におけ
る絶対湿度と導入外気との絶対湿度の差に導入外気量を
乗じた量を所要加湿量とし、さらに給気の湿度を検出し
てこの検出結果と設定湿度の差に基づいて前記所要加湿
量を調整して、加湿手段によって前記循環空気系の循環
空気に付加させることを特徴とする、加湿方法。2. An air conditioning system having a circulating air system that mixes return air from a target space and introduced outside air and supplies the mixed air to the target space again, and humidifies the inside of the target space by humidifying means. Detecting the absolute humidity of the introduced outside air and the introduced amount, and multiplying the difference between the absolute humidity at the set humidity and the absolute humidity of the introduced outside air by the introduced outside air amount as the required humidification amount, A humidification method comprising detecting humidity, adjusting the required humidification amount based on a difference between the detection result and the set humidity, and adding the required humidification amount to circulating air of the circulating air system by humidification means.
気化方式の加湿手段であることを特徴とする、請求項１
又は２に記載の加湿方法。3. The humidifying unit according to claim 1, wherein the humidifying unit is a humidifying unit of a water spray type and / or a vaporizing type.
Or the humidification method according to 2.
と、目的空間からの還気とを混合させ、これを再び目的
空間への給気とする循環空気系を有した空気調和システ
ムにおいて、導入外気の絶対湿度を検出する湿度センサ
と、導入外気の量を検出する導入外気量検出センサと、
前記循環空気系に設置された加湿手段と、湿度コントロ
ーラとを有し、さらに前記空調機は少なくとも冷却コイ
ルを有し、導入外気の絶対湿度が目的空間の設定湿度に
おける絶対湿度よりも低い場合には、目的空間内の設定
湿度における絶対湿度と前記湿度センサによって得た導
入外気の絶対湿度の差に、前記導入外気量検出センサに
よって得た導入外気量を乗じた量が、所要加湿量として
前記湿度コントローラによって演算されると共に、この
演算結果に基づいて前記加湿手段が制御され、導入外気
の絶対湿度が目的空間の設定湿度における絶対湿度より
も高い場合には、前記湿度コントローラによって前記空
調機の冷却コイルが制御される如く構成されたことを特
徴とする、空気調和システム。4. An air conditioning system having a circulating air system that mixes introduced outside air that has passed through an air conditioner that processes outside air with return air from a target space and supplies the mixed air to the target space again. A humidity sensor that detects the absolute humidity of the introduced outside air, an introduced outside air amount detection sensor that detects the amount of the introduced outside air,
Humidifying means installed in the circulating air system, and a humidity controller, the air conditioner further has at least a cooling coil, and when the absolute humidity of the introduced outside air is lower than the absolute humidity at the set humidity of the target space. The amount obtained by multiplying the difference between the absolute humidity at the set humidity in the target space and the absolute humidity of the introduced outside air obtained by the humidity sensor by the introduced outside air amount obtained by the introduced outside air amount detection sensor is the required humidification amount. The humidity controller is operated and the humidifying unit is controlled based on the operation result.If the absolute humidity of the introduced outside air is higher than the absolute humidity at the set humidity of the target space, the humidity controller controls the air conditioner. An air conditioning system, wherein the cooling coil is configured to be controlled.
ンサを有し、この給気湿度センサによって得た給気湿度
と目的空間における設定湿度の差に基づいて、前記所要
加湿量が調整される如く構成されたことを特徴とする、
請求項４に記載の空気調和システム。5. An air supply humidity sensor for detecting an air supply humidity, wherein the required humidification amount is adjusted based on a difference between the air supply humidity obtained by the air supply humidity sensor and a set humidity in a target space. Characterized by being configured as
The air conditioning system according to claim 4.
ンサを有し、この給気湿度センサによって得た給気湿度
と目的空間における設定湿度の差に基づいて、前記所要
加湿量の調整並びに冷却コイルの制御調整がされる如く
構成されたことを特徴とする、請求項４に記載の空気調
和システム。6. An air supply humidity sensor for detecting an air supply humidity, and adjusting the required humidification amount based on a difference between the air supply humidity obtained by the air supply humidity sensor and a set humidity in a target space. The air conditioning system according to claim 4, wherein the cooling coil is controlled and adjusted.
気化方式の加湿手段であることを特徴とする、請求項
４、５又は６に記載の空気調和システム。7. The air conditioning system according to claim 4, wherein the humidifying unit is a humidifying unit of a water spray type and / or a vaporizing type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24329694A JP3310118B2 (en) | 1994-09-12 | 1994-09-12 | Humidification method and air conditioning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24329694A JP3310118B2 (en) | 1994-09-12 | 1994-09-12 | Humidification method and air conditioning system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0882432A JPH0882432A (en) | 1996-03-26 |
| JP3310118B2 true JP3310118B2 (en) | 2002-07-29 |
Family
ID=17101734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24329694A Expired - Lifetime JP3310118B2 (en) | 1994-09-12 | 1994-09-12 | Humidification method and air conditioning system |
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| JP (1) | JP3310118B2 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101632270B1 (en) * | 2016-01-25 | 2016-06-21 | (주)휴텍 | Method and apparatus for controling humidifying apparatus |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2240812C (en) * | 1997-06-17 | 2004-06-01 | Fisher & Paykel Limited | Respiratory humidification system |
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