JP3298630B2 - Pressurizing method and pressurizing apparatus, and inspection method and apparatus using them - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressurizing method and a pressurizing device for pressurizing a pressurized object such as a semiconductor element. The present invention also relates to a method and an apparatus for inspecting an object to be inspected, such as a semiconductor device, using the above-described method and apparatus.

[0002]

2. Description of the Related Art It is a well-known method of pressurizing an object to be pressurized by putting the object to be pressurized in a bag-shaped pressurizing jig and depressurizing the inside of the bag. Due to the constraints of the pressure outside the, it was rarely actively used.
However, this pressurizing method has an advantage that a uniform pressure can be applied to the entire pressurized surface of the object to be pressurized. Utilizing this, it has come to be used for pressurizing an object to be pressurized, which is easily broken due to one-sided contact or the like. For example, inspection of a CSP formed on a silicon wafer as shown in FIG. 16 or inspection of a wafer for the purpose of KGD is performed.

A wafer batch inspection apparatus 10 shown in FIG. 16 (JP-A-10-223704) has an arm 11 for sucking and holding a wafer W and transporting the wafer W, and a loading / unloading port for loading / unloading the wafer W. A possible chamber 12, a ring-shaped position adjusting mechanism 13, a contactor 14 having on its inner surface a protruding terminal that electrically contacts all the electrodes of the wafer W at once, and a wafer W along the outer periphery of the contactor 14 , An exhaust means for reducing the pressure in a sealed space 16 surrounded by the contactor 14, and a test head 18 electrically connected to a connection terminal on the outer surface of the contactor 14.

[0004]

However, the above-described pressurizing method has not been used in cases requiring higher pressurization because of the above-mentioned disadvantage (maximum pressure reaches a plateau). is there. For example, the inspection jig of the semiconductor device is a DRAM, an SDRAM, a Ram,
It is only used for CSPs and wafers with a small number of test terminals, such as memories such as bus DRAMs. Also,
In order to apply a higher pressure, it is necessary to increase the degree of vacuum at the time of depressurization, which has the disadvantage of increasing the capital investment and time. When the number of pins of the chip to be inspected increases for these reasons, there are disadvantages in that the pressure required for the inspection cannot be applied, it takes time, and the resistance value is not stable.

The present invention has been made in view of the above circumstances, and is a means for pressurizing an object to be pressurized by putting the object to be pressurized inside the pressing jig and depressurizing the inside of the pressing jig. It is another object of the present invention to provide a pressurizing means capable of pressurizing an object to be pressurized at a higher pressure than a method of merely reducing the pressure in a pressurizing jig.

[0006]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a method and apparatus for pressurizing an object to be pressurized, a method for inspecting an object to be inspected, and a method for inspecting an object to be inspected as described in the following (1) to (8). An inspection device is provided.

(1) An object to be pressurized is placed inside a pressurizing jig having an opening part that can be partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to reduce the pressure. The pressurized object is pressurized, and the pressurizing jig is pressurized by one or both of means for pressurizing the fluid outside the pressurizing jig and means for filling the fluid outside the pressurizing jig. A method for pressurizing an object to be pressurized.

(2) An object to be pressurized is put into a first pressurizing jig having an opening part which is partially or entirely deformable and capable of sucking and discharging, and is partially or entirely deformable and sucking and discharging. The first pressurizing jig is placed inside a second pressurizing jig having a possible opening, and the object to be pressurized is pressurized by reducing the pressure inside the first pressurizing jig. Means for pressurizing the fluid between the first pressing jig and the second pressing jig and the first pressing jig and the second pressing jig; A method for pressurizing an object to be pressurized, characterized in that pressure is applied by one or both of means for filling a fluid with a pressure jig.

(3) An object to be pressurized is placed inside a pressurizing jig having an opening part capable of being partially or entirely deformable and capable of sucking and exhausting air, and the inside of the pressurizing jig is depressurized to reduce the pressure. The pressurized object is pressurized, and the pressurizing jig is pressurized by one or both of means for pressurizing the fluid outside the pressurizing jig and means for filling the fluid outside the pressurizing jig. A pressurizing device for an object to be pressurized.

(4) An object to be pressurized is put into a first pressurizing jig having an opening part which can be partially or entirely deformable and capable of sucking and discharging, and a part or all of which is deformable and sucking and discharging. The first pressurizing jig is placed inside a second pressurizing jig having a possible opening, and the object to be pressurized is pressurized by reducing the pressure inside the first pressurizing jig. Means for pressurizing the fluid between the first pressing jig and the second pressing jig and the first pressing jig and the second pressing jig; A pressurizing device for an object to be pressurized, wherein pressurization is performed by one or both of means for filling a fluid with a pressure jig.

(5) An object to be inspected is placed inside a pressurizing jig having an opening part which can be partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to thereby perform the test. By pressurizing the object, the pressurizing jig is pressurized by one or both of means for pressurizing the fluid outside the pressurizing jig and means for filling the fluid outside the pressurizing jig. An inspection method for an object to be inspected, comprising inspecting the object to be inspected.

(6) The inspection object is placed inside the first pressurizing jig having an opening part which is partially or entirely deformable and capable of sucking and discharging, and partly or entirely deformable and capable of sucking and discharging. The first pressing jig is placed inside a second pressing jig having an appropriate opening, and the inside of the first pressing jig is depressurized to pressurize the inspection object. Means for pressurizing a fluid between the first pressing jig and the second pressing jig, and a first pressing jig and a second pressing jig; A method for inspecting an object to be inspected, wherein the inspection of the object to be inspected is performed by applying pressure by one or both of means for filling a fluid with the tool.

(7) An object to be inspected is placed in a pressurizing jig having an opening which is partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to thereby perform the test. By pressurizing the object, the pressurizing jig is pressurized by one or both of means for pressurizing the fluid outside the pressurizing jig and means for filling the fluid outside the pressurizing jig. An inspection device for inspecting an inspection object, wherein the inspection device inspects the inspection object.

(8) An object to be inspected is placed inside a first pressurizing jig having an opening part which is partially or entirely deformable and capable of sucking and discharging, and is partially or entirely deformable and capable of sucking and discharging. The first pressing jig is placed inside a second pressing jig having an appropriate opening, and the inside of the first pressing jig is depressurized to pressurize the inspection object. Means for pressurizing a fluid between the first pressing jig and the second pressing jig, and a first pressing jig and a second pressing jig; An inspection device for an object to be inspected, wherein the inspection of the object to be inspected is performed by applying a pressure by one or both of means for filling a fluid with the tool.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below, but the present invention is not limited to these embodiments.
FIG. 1 is an example of an embodiment of the present invention. The object to be pressurized 1 is inside a pressurizing jig 2 (first pressurizing jig) having an opening capable of being deformed and capable of sucking and discharging. Further, the pressing jig 2
Is placed in a pressing jig 3 (second pressing jig) having an opening through which air can be sucked and exhausted so that pressure can be applied from the outside (FIG. 1 left). A state in which the inside of the pressing jig 2 is depressurized and the inside of the pressing jig 3 is pressurized is shown in FIG. The pressurizing jig 2 whose inside is decompressed and pressurized from the outside contacts the pressurizing surface 4 of the object 1 to be pressurized and serves as a pressurizing jig.

In FIG. 1, the entire pressing jig 2 is deformed, but it is not necessary that the entire pressing jig be deformed. An example is shown in FIGS. FIG. 2 shows a pressing jig 2 in which a deformable substance 6 is adhered to both bottom surfaces of a rigid hollow tube 5 shown in FIG. Pressure is applied.

FIG. 4 shows an example in which a rigid body 7 is sealed with a deformable substance 6 leaving an opening for intake and exhaust, as shown in FIG. As described above, the rigid body may press the pressing surface 4 of the object 1 to be pressed.

A substance other than the object to be pressurized may be put in the pressurizing jig 2. An example is shown in FIG. In FIG. 6, a rigid body 8 parallel to the pressing surface 4 is enclosed inside the pressing jig 2 together with the object to be pressed. When the inside of the pressing jig 2 is depressurized, the rigid body 8 is pressed by the contracting pressing jig 2 to press the pressing surface 4 of the object 1 as shown in the right side of FIG. Of course, this does not specify the enclosed substance as rigid.

In FIGS. 1, 2, 4 and 6, which are an example of the embodiment, the supply / exhaust port of the pressurizing jig 2 and the hollow tube connected to the outside are integrated, but this is not always necessary. It suffices if there is an opening for air supply and exhaust as shown in FIG. In FIG. 7, there is a hole opened in a part of the pressurizing jig 2, and this is the above-mentioned opening 9 for supplying and discharging air. In FIG. 7, the opening 9
Evacuation is performed by contacting or connecting a hollow tube 10 that is separated and connected to the outside. At this time, it is desirable that an elastic body 17 such as a silicone resin or rubber be sandwiched between the hollow tube 10 and the opening 9 to prevent leakage.

FIGS. 1, 2, 4 and 5 show an example of the embodiment.
In 6, the hollow pipe 10 is provided in the intake / exhaust pipe 11 of the pressurizing jig 3, but this does not limit the location of the intake / exhaust pipes 10,11. For example, as shown in FIG. 7, two intake and exhaust pipes 10 and 11 may be provided at different places.

Further, FIGS.
In 4, 6, and 7, the pressing jig 3 surrounding the pressing jig 2 surrounding the object 1 to be pressed has the same shape as the pressing jig 2, but is not limited thereto. Not something. As one example, as shown in FIG. 8, a structure 19 in which a rigid hollow tube 30 is pressurized by pistons 18 from both bottom surfaces is also conceivable.

In addition, in FIGS. 1 to 8 described above, the space between the pressing jig 2 and its surroundings (for example, the bag-like substance 3 or the structure 19 in FIG. 8 in the above description) is filled. Although the substance 12 has been described on the assumption that it is a gas, it may be a liquid or a gel-like substance 20 as shown in FIGS. However,
The atmosphere is easy to handle.

As a method and a structure for pressurizing the pressing jig 2, in addition to pressurizing the filling between the pressing jig 2 and the surroundings thereof with, for example, a piston or a pump, FIG. It is also possible to use water pressure as in 10. After the pressure jig 2 is depressurized as shown in FIG.
Pressurization can be performed by filling 0. In this case, FIG.
The pressure can be controlled by changing the height of the material to be filled as in the above. Of course, the method using the hydraulic pressure and the method using the piston or the pump for pressurization may be combined.

In FIGS. 1 to 9, the pressing jig 2 has a bag shape, but the structure shown in FIG. 11 is also possible, and the pressing jig 2 is not limited to a bag shape. In FIG. 11, the pressing jig 2 and the pressing jig 3 are integrated. In FIG. 11, FIG.
Although the bag-shaped pressing jig 2 and the pressing jig 3 are integrated,
The pressing jig 2 and the pressing jig 3 shown in FIGS. 3 and 5 may be integrated.

Next, an example in which the present invention is applied to the inspection of a semiconductor device will be described. FIG. 12 shows an example applied to a CSP. CS
P13 is connected to an inspection jig 14 connected to an external inspection device.
After the BGA 23 of the SP and the electrode pad 24 of the inspection jig 14 are positioned and mounted so as to be in contact with each other, they are put into the pressing jig 2 of FIG. 12 (left of FIG. 12). Thereafter, the pressure of the pressing jig 2 is reduced, and the pressure of the pressing jig 3 is increased.
Can be stably contacted with the inspection jig 14 by receiving pressure from the pressing jig 2 (FIG. 12, right). FIG. 12 shows an example in which a CSP is selected as a semiconductor element, but a molded element such as QFP (illustration omitted) may be used.

It is also possible to inspect the semiconductor elements formed on the wafer 25 as shown in FIGS. FIG. 14 shows the positioning of the pins 2 so that the terminals on the wafer come into contact with the electrode bumps 25 formed on the inspection jig 14.
This is an example using No. 1. In the structure of FIG. 14, the positioning jig 22 is pressed by the pressing jig 2, and the pressed jig 22 presses the object 1. For this reason, it is desirable to provide the gap 26 so that the pin 21 does not stick to the end at the time of pressurization and the pressurization does not stop. Bare chips can be inspected similarly to FIG. 12 (the figure is omitted). In addition, as shown in FIG.
(Inspection function unit) may be inserted to eliminate the drawing of the wiring to the outside. In this case, the device 15 having the inspection function is placed in a case such as metal which is hardly deformed in order to avoid being pressed together at the time of pressing, or a portion where the pressing jig 2 does not hit. Or need to be installed in

In FIGS. 11 to 15, the pressurizing mechanism is the same as the pressurizing mechanism shown in FIG. 1, but all the above-mentioned pressurizing mechanisms can be applied. .

[0028]

First, the effect of the present invention is that the pressure can be increased to a higher level than the method of merely reducing the pressure in the bag. Since the pressure is applied also from the outside of the bag, it is possible to make the pressure higher than before. For this reason, it is possible to cope with those that required high pressurization. For example, in the inspection of a semiconductor device having a large number of terminals such as a logic LSI, the resistance is not stable due to low pressure in the conventional method. However, according to the present invention, the contact pressure of the inspection terminal is increased and the inspection quality is reduced. improves. Second, the inspection time is shortened. This is because a predetermined pressure is reached in a shorter time by simultaneously increasing the surrounding pressure when the pressure inside the conventional bag is reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example of an embodiment of the present invention.

FIG. 2 is a diagram showing an example of an embodiment of the present invention.

FIG. 3 is a diagram illustrating an example of a pressing jig.

FIG. 4 is a diagram showing an example of an embodiment of the present invention.

FIG. 5 is a diagram illustrating an example of a pressing jig.

FIG. 6 is a diagram showing an example of an embodiment of the present invention.

FIG. 7 is a diagram showing an example of an embodiment of the present invention.

FIG. 8 is a diagram showing an example of an embodiment of the present invention.

FIG. 9 is a diagram showing an example of an embodiment of the present invention.

FIG. 10 is a diagram showing an example of an embodiment of the present invention.

FIG. 11 is a diagram showing an example of an embodiment of the present invention.

FIG. 12 is a diagram showing an example of an embodiment of the present invention.

FIG. 13 is a diagram showing an example of an embodiment of the present invention.

FIG. 14 is a diagram showing an example of an embodiment of the present invention.

FIG. 15 is a diagram showing an example of an embodiment of the present invention.

FIG. 16 is a view showing an example of a conventional wafer inspection jig.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pressed object 2 Pressing jig 3 Pressing jig 4 Pressing surface 5 Rigid hollow tube 6 Deformable substance 7 Rigid body 8 Rigid body 9 Opening 10 Hollow tube 11 Intake / exhaust tube

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Claims (8)

(57) [Claims] An object to be pressurized is placed inside a pressurizing jig having an opening part which can be partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to reduce the pressure. Pressurizing the pressurized object and pressurizing the pressurizing jig by one or both of means for pressurizing the fluid outside the pressurizing jig and means for filling the fluid outside the pressurizing jig. A method for pressurizing an object to be pressurized. 2. A pressurized object is placed inside a first pressurizing jig having an opening part capable of being partially or entirely deformable and capable of sucking and discharging, and partly or entirely deformable and capable of sucking and discharging. The first pressing jig is placed inside a second pressing jig having an appropriate opening, and the object to be pressed is pressed by reducing the pressure inside the first pressing jig. Means for pressurizing a fluid between the first pressurizing jig and the second pressurizing jig, and a first pressurizing jig and a second pressurizing jig. A method of pressurizing an object to be pressurized, characterized in that the object is pressurized by one or both of means for filling a fluid with a jig. 3. An object to be pressurized is placed inside a pressurizing jig having an opening part which is partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to reduce the pressure. Pressurizing the pressurized object and pressurizing the pressurizing jig by one or both of means for pressurizing the fluid outside the pressurizing jig and means for filling the fluid outside the pressurizing jig. A pressurizing device for an object to be pressurized. 4. An object to be pressurized is inserted into a first pressurizing jig having an opening part capable of being partially or entirely deformable and capable of sucking and discharging, and partly or entirely deformable and capable of sucking and discharging. The first pressing jig is placed inside a second pressing jig having an appropriate opening, and the object to be pressed is pressed by reducing the pressure inside the first pressing jig. Means for pressurizing a fluid between the first pressurizing jig and the second pressurizing jig, and a first pressurizing jig and a second pressurizing jig. A pressurizing device for a pressurized object, wherein pressurization is performed by one or both of means for filling a fluid with a jig. 5. An object to be inspected is placed in a pressurizing jig having an opening part which can be partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to thereby reduce the amount of the object to be inspected. And pressurizing the pressurizing jig by one or both of a means for pressurizing the fluid outside the pressurizing jig and a means for filling the fluid outside the pressurizing jig. An inspection method for an object to be inspected, wherein the inspection of the object is performed. 6. An object to be inspected is inserted into a first pressing jig having an opening part capable of being partially or entirely deformable and capable of sucking and discharging, and partly or entirely deformable and capable of sucking and discharging. The first pressurizing jig is placed inside a second pressurizing jig having an opening, and the inside of the first pressurizing jig is depressurized to pressurize the inspection object. Means for pressurizing a fluid between the first pressing jig and the second pressing jig, and a first pressing jig and a second pressing jig A test object is inspected by applying pressure by one or both of means for filling a fluid between the test object and the test object. 7. An object to be inspected is placed inside a pressurizing jig having an opening part which can be partially or entirely deformable and capable of sucking and discharging, and the inside of the pressurizing jig is depressurized to thereby form the object to be inspected. And pressurizing the pressurizing jig by one or both of a means for pressurizing the fluid outside the pressurizing jig and a means for filling the fluid outside the pressurizing jig. An inspection device for inspecting an inspection object, which inspects the inspection object. 8. An object to be inspected is placed inside a first pressing jig having an opening part which is partially or entirely deformable and capable of sucking and discharging, and is partially or entirely deformable and capable of sucking and discharging. The first pressurizing jig is placed inside a second pressurizing jig having an opening, and the inside of the first pressurizing jig is depressurized to pressurize the inspection object. Means for pressurizing a fluid between the first pressing jig and the second pressing jig, and a first pressing jig and a second pressing jig An inspection apparatus for inspecting an inspection object by applying pressure by one or both of means for filling a fluid between the inspection apparatus and the inspection apparatus.