JP3294014B2 - Throw-in type ultrasonic cleaning body, its manufacturing method and ultrasonic cleaning device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a throw-in type ultrasonic cleaning body for pouring a cleaning liquid into a cleaning tank for cleaning an object to be cleaned, a method for manufacturing the same, and an ultrasonic cleaning apparatus.

[0002]

2. Description of the Related Art In the manufacturing process of semiconductor devices and liquid crystal display devices, for example, before and after various kinds of fine processing, submicron-order particles adhered to semiconductor wafers or liquid crystal substrates as objects to be cleaned are removed. Ultrasonic cleaning for cleaning and removal is performed. This cleaning step is extremely important in improving the yield of semiconductor devices and liquid crystal display devices.

There are various methods for ultrasonically cleaning an object to be cleaned, one of which is to store a cleaning liquid and an object to be cleaned in a cleaning tank and apply ultrasonic vibration to the cleaning liquid. There is known a so-called batch method for cleaning the object to be cleaned.

In the case of the batch system, there are a system in which a vibrator is provided at the bottom of the cleaning tank to apply ultrasonic waves to the cleaning liquid, and a system in which an ultrasonic cleaning body is thrown into the cleaning tank to apply ultrasonic waves to the cleaning liquid. Throwing the ultrasonic cleaning body into the cleaning tank, in the case of the throw-in method, has the advantage that the body can be moved in the cleaning tank to exert a cleaning action on a wide range of parts. They tend to be heavily used.

[0005] In the conventional throw-in type ultrasonic cleaning body, a vibrator is adhered to one side of a quartz or Ta vibration plate, and the vibration plate is covered with a fluorine resin, and a packing is formed on the other side of the vibration plate. It has been practiced that the vibrator is formed into a liquid-tight structure by joining a quartz plate through the joint and screwing these joined bodies together.

[0006] Further, as a throw-in type ultrasonic cleaning body having another structure, a vibrator is adhered to the inner surface of a stainless steel diaphragm, and a peripheral wall is bent around the periphery of the diaphragm.
It has been practiced that the vibrator has a liquid-tight structure by screwing and fixing a quartz plate to an end portion of the peripheral wall via a packing.

[0007] However, in such a conventional throw-in type ultrasonic cleaning body, fine dust may be generated from packing and screws with use, and when a stainless steel diaphragm is used, the cleaning liquid may be used. In some cases, the metal is eluted at the same time, so that the cleaning effect is reduced by these factors.

Further, if the ultrasonic cleaning body is used for a predetermined period, the joint of the vibrator may be loosened or peeled off, or the polarization of the vibrator may be impaired. Therefore, if the ultrasonic cleaning body has been used for a predetermined period, it must be adjusted or replaced.

However, conventionally, if an abnormality has occurred during use, the ultrasonic cleaning body has to be replaced, so that it has been impossible to reliably manage the ultrasonic cleaning body.

[0010]

As described above, in the conventional throw-in type ultrasonic cleaning body, packing or screwing structure is used to obtain a liquid-tight structure of the vibrator. And dust from the screw part,
The cleaning effect may be reduced, and when metal is used, it may flow out into the cleaning solution.

Further, there has been a case where it is not possible to reliably manage damage caused by the use of the ultrasonic vibrator. The present invention has been made based on the above circumstances, and an object of the present invention is to provide a liquid-tight structure in which a vibrator can be made to have a liquid-tight structure without contacting a cleaning liquid without using packing or screws. An object of the present invention is to provide a sonic cleaning body and a method for producing the same. Another object of the present invention is to provide an ultrasonic cleaning apparatus capable of reliably and easily managing damage to an ultrasonic vibrator.

[0012]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to a throw-in type ultrasonic cleaning body to be charged into a cleaning tank containing a cleaning liquid, wherein a hollow portion opened at one end surface is formed. A container member made of quartz or low-alkali glass having a flange provided on the outer periphery of one end surface thereof and a vibrator provided in the hollow portion, and a peripheral portion joined to one end surface of the container member and having a periphery formed by the periphery of the flange. And a lid member made of quartz or low alkali glass welded to the portion.

According to the present invention, there is provided a method for manufacturing a throw-in type ultrasonic cleaning body to be charged into a cleaning tank containing a cleaning liquid, wherein a hollow portion having an opening at one end is formed and a flange is provided on the outer periphery of the one end. Joining a heat insulating sheet to an outer peripheral surface of a container member made of quartz or low alkali glass provided with a vibrator on the inner surface of the hollow portion,
A step of providing a cooling means for cooling the outer surface of the other end of the container member; a step of joining a lid member for closing an opening of the one end surface of the container member to the flange; Welding the outer edges of the flange and the lid member joined together while cooling the outer surface.

According to the present invention, there is provided an ultrasonic cleaning apparatus in which an ultrasonic generating power source is connected to an ultrasonic cleaning body and power is supplied from the power source to ultrasonically vibrate the ultrasonic cleaning body. An ultrasonic cleaning apparatus is provided with a display unit for integrating and displaying the time of ultrasonic oscillation.

[0015]

According to the throw-in type cleaning body of the above construction, the vibrator provided inside is maintained in a liquid-tight state with respect to the cleaning liquid by welding the container member made of quartz or low alkali glass and the lid member. In addition, since the container member and the lid member are made of quartz or low-alkali glass, there is almost no dust generation.

According to the method for manufacturing the throw-in type cleaning body having the above structure, when the container member and the lid member are welded, the portion of the container member provided with the vibrator is cooled by the cooling means, and the heat insulating sheath is provided. Since the influence of radiant heat during welding is reduced by the heat source, the container member and the lid member can be welded without affecting the vibrator, and the flange can reduce the thermal strain of the container member. it can. According to the ultrasonic cleaning apparatus having the above-described configuration, the adjustment and replacement can be performed reliably and easily based on the accumulated use time of the ultrasonic cleaning body.

[0017]

An embodiment of the present invention will be described below with reference to the drawings. A throw-in type ultrasonic cleaning body 1 shown in FIGS. 1A and 1B has a prismatic container member 2. The container member 2 has a hollow portion 3 open at one end surface thereof.
An ultrasonic vibrator 4 is fixed by an adhesive 5 to the inner surface of the hollow portion 3 on the other end surface side opposite to the one end surface.

A flange 6 is provided on the outer periphery of one end surface of the container member 2. A lid member 7 for closing the hollow portion 3 is joined to the flange 6. The lid member 7 is formed of quartz or low alkali glass, which is the same material as the container member 2, in a rectangular shape having the same size and the same size as the outer peripheral surface of the flange 6. Is a normal bar
The welded portion 8 is formed by welding over the entire circumference by a welding method.

One end of a pipe member 9 made of quartz or low alkali glass is liquid-tightly welded to both longitudinal end surfaces of the container member 2. The internal space of the pipe member 9 communicates with the inside of the hollow portion 3 of the container member 2. The vibrator 4 is passed through the pipe member 9.
A coaxial cable 10 connected to supply power to the power supply is led out.

The ultrasonic vibrator 1 having the above structure is thrown into a cleaning tank 11 containing a cleaning liquid L as shown in FIG. Next, when the vibrator 4 is energized and oscillated, the container member 2 to which the vibrator 4 is adhered and fixed vibrates as a vibrating plate to apply ultrasonic vibration to the cleaning liquid L. The object to be cleaned (not shown) accommodated in 11 is ultrasonically cleaned.

If the ultrasonic cleaning body 1 is appropriately moved in the cleaning tank 11, the range of the cleaning action can be expanded. Effective cleaning can be performed according to the conditions.

As shown in FIG. 3, the ultrasonic cleaning body 1
The ultrasonic vibrator 4 is connected to an ultrasonic power source 15 via a coaxial cable 10 derived from a pipe member 9. The ultrasonic generating power supply 15 is for supplying power to the ultrasonic vibrator 4 of the ultrasonic cleaning body 1, and integrates the time when the power supply 15 supplies power to the ultrasonic vibrator 4 on the front surface thereof. A display unit 16 for displaying is provided.

The display section 16 makes it possible to easily confirm the actual use time of the ultrasonic cleaning body 1 where the ultrasonic cleaning body 1 has ultrasonically oscillated. Therefore, when the actual use time reaches a predetermined time, adjustment or replacement of the ultrasonic cleaning body 1 may be performed. That is, adjustment and replacement when the ultrasonic cleaning body 1 has been used for a predetermined period can be easily and reliably performed by checking the actual use time on the display unit 16.

The display unit 16 may be provided on the outer surface of the cleaning tank 11 instead of the front surface of the ultrasonic generating power supply 15, so that the actual use time of the ultrasonic cleaning body 1 can be confirmed. It will be easier.

Since the portion of the ultrasonic cleaning member 1 that contacts the cleaning liquid L is made of quartz or low-alkali glass, the container member 2 that constitutes the ultrasonic cleaning member 1 with use.
And dust from the lid member 7 is hardly generated. Moreover, since the liquid-tight structure in the hollow portion 3 is maintained by welding the container member 2 and the lid member 7, the vibrator 4 provided therein does not contact the cleaning liquid L.

When the ultrasonic cleaning body 1 is formed into a liquid-tight structure by welding, it is considered that the vibrator 4 may be damaged by the influence of heat during welding. Therefore, the applicant has as follows:
A method in which the container member 2 and the lid member 7 can be welded without performing heat loss on the vibrator 4 by performing Experiments 1 to 5;
That is, the optimum manufacturing method of the ultrasonic cleaning body 1 was found.

First, in Experiment 1, as shown in FIG. 2A, a vibrator 4 was adhered to the inner surface of one end of the container member 2 having no flange formed thereon with an adhesive 5, and then the outer surface of one end was heated. After bonding the couple 21 with an epoxy resin adhesive having little heat shrinkage, the lid member 7 was joined to the opening surface of the container member 2 and these joints were welded by burner welding.

As a result, the maximum detected temperature of the thermocouple 21 reached 400 ° C. Therefore, if the lid member 7 is simply welded to the container member 2, not only the vibrator 4 is damaged by heat, but also the bonding state of the adhesive 5 to which the vibrator 4 is bonded and fixed is impaired. It was confirmed that the production method of Experiment 1 was not suitable for practical use.

Experiment 2 shown in FIG. 2B is the same as Experiment 1 except that the cooling plate 22 is provided on the outer surface of one end of the container member 2.
While maintaining the joint surface at 0 ° C.
And the lid member 7 were welded by burner welding.

As a result, the surface of one end of the container member 2 is 50
° C, but it was confirmed that the container member 2 was damaged by thermal strain due to the temperature difference between the cooled part and the welded part. Therefore, the production method of Experiment 2 is not suitable for practical use because the container member 2 provided with the vibrator 4 can be maintained at a low temperature, but the container member 2 is damaged.

The manufacturing method of Experiment 3 shown in FIG.
In the method (1), a flange 6 is provided around the opening surface of the container member 2, and the width A of the flange 6 is changed between 10 mm and 50 mm.

As a result, the temperature of the outer surface of the container member 2 is
350 ° C when the width dimension of 10 mm is 10 mm, 1 when the width dimension is 50 mm
60 ° C. If the temperature of the container member 2 is 160 ° C., the vibrator 4 will not be damaged by heat, but the adhesive 5 to which the vibrator 4 has been bonded will be deteriorated.

The manufacturing method of Experiment 4 shown in FIG.
In the same manufacturing method as described above, the cooling
The heat insulating sheet 23 was disposed on the flange 6 so as to surround the outer peripheral surface of the container member 2 and the peripheral edges of the container member 2 and the lid member 7 were welded.

As a result, when the width dimension A of the flange 6 is 10 mm, the detected temperature of the thermocouple 21 is 40 ° C., and when the width A is 50 mm, the detected temperature is 30 ° C. As a result, it was confirmed that slight distortion occurred in the portion of the flange 6, but no distortion occurred in the portion of the container member 2 to which the vibrator 4 was bonded.

Therefore, if the ultrasonic vibrator 1 is manufactured by the manufacturing method of Experiment 4, the container member 2 and the lid member 7 are covered with a bar.
Even when welding is performed by the welding method, the vibrator 4 and the adhesive 5 to which the vibrator 4 is bonded are not damaged by heat, and the container member 2 and the lid member 7 are not damaged by strain. It is a practically suitable manufacturing method.

An actual product has a structure in which pipe members 9 are attached to both ends of the container member 2 in the longitudinal direction.
Therefore, in this case, the pipe member 9 is welded to both end surfaces of the container member 2, and then the vibrator 4 is adhered inside the pipe member 9. Then, as in Experiment 4, the cooling plate 22 and the heat insulating sheet are provided. After providing 23, the lid member 7 may be welded.

The present invention is not limited to the above-described embodiment, but can be variously modified. For example, as shown in FIG. 4, the flange 6A to which the lid member 7 is joined may be formed in an L-shaped cross section, and the lid member 7 may be joined and welded so as to be fitted therein. With such a shape, the rigidity of the container member 2 is increased, so that heat distortion is more difficult to occur in the container member 2.

[0038]

As described above, the present invention is directed to a container member in which a flange is provided on one end surface where a hollow portion is opened and a vibrator is provided on an inner surface of the hollow portion, and a container member welded to the flange and provided in the container member. The lid member for closing the opening surface of the formed hollow portion was formed of quartz or low alkali glass.

Therefore, it is possible not only to prevent the cleaning liquid from penetrating into the interior where the vibrator is provided, but also to reduce the cleaning effect by dust generation because no packing or screws are used unlike the conventional case. Absent.

In the case where the container member and the lid member made of quartz or low-alkali glass have a closed structure without using packing or screws, it is required to weld these members. Since the sheet and the cooling means are provided for welding, the thermal effect on the vibrator can be minimized. In addition, since the flange is provided on the container member, the deformation due to the thermal strain of the container member can be reduced in combination with the provision of the heat insulating sheet and the cooling means for welding.

Further, a display unit for displaying the actual use time during which the vibrator oscillates ultrasonically is provided. Therefore, it is possible to surely recognize the timing of adjustment and replacement of the vibrator, so that the operation can be performed easily and quickly.

[Brief description of the drawings]

FIG. 1A is a perspective view showing an entire configuration of an embodiment of the present invention, and FIG.

FIGS. 2A to 2D are explanatory diagrams sequentially showing Experiments 1 to 4. FIG.

FIG. 3 is an explanatory diagram of a use state of a throw-in type ultrasonic vibrator.

FIG. 4 is a sectional view of an ultrasonic vibrator showing another embodiment of the present invention.

[Explanation of symbols]

4 vibrator, 6 brim, 7 lid member, 11 cleaning tank, 15
... Ultrasonic generation power supply, 16 ... Display part, L ... Cleaning liquid.

Claims (3)

(57) [Claims] 1. A throw-in type ultrasonic cleaning body to be charged into a cleaning tank containing a cleaning liquid, wherein a hollow portion opened at one end surface is formed, and a flange is provided on an outer peripheral surface of one end surface. A container member made of quartz or low alkali glass in which a vibrator is provided, and a lid member made of quartz or low alkali glass joined to one end surface of the container member and having a peripheral edge welded to the peripheral edge of the flange. A throw-in type ultrasonic cleaning body characterized by comprising: 2. A method for producing a throw-in type ultrasonic cleaning body to be charged into a cleaning tank containing a cleaning liquid, wherein a hollow portion having an opening at one end is formed, and a flange is provided around the outer periphery of the one end. Joining a heat insulating sheet to the outer peripheral surface of a container member made of quartz or low alkali glass having a vibrator provided on the inner surface of the hollow portion, and cooling means for cooling the outer surface to the outer surface on the other end side of the container member A step of providing a lid member that closes an opening at one end face of the container member to the flange; and a peripheral edge of the flange and the lid member that are joined while cooling the other end side outer surface of the container member. And a step of welding. 3. An ultrasonic cleaning apparatus in which an ultrasonic generating power source is connected to an ultrasonic cleaning body, and power is supplied from the power source to ultrasonically vibrate the ultrasonic cleaning body, wherein the ultrasonic cleaning body oscillates ultrasonically. An ultrasonic cleaning device, comprising: a display unit for integrating and displaying time.