JP3256925B2 - Optical waveguide device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide device used, for example, for optical communication and connected to a multi-core optical fiber connector or the like.

[0002]

2. Description of the Related Art An optical waveguide device (also referred to as an optical waveguide module) that forms an optical waveguide on a substrate and performs, for example, optical demultiplexing and multiplexing is widely known. When connecting the optical waveguide of this optical waveguide device to the optical fiber of an optical array formed by aligning and fixing a single-core optical fiber or a multi-core optical fiber, the work of aligning and bonding each other by bonding or welding is generally used. However, this work is extremely troublesome and poor in workability, and recently, a connection method for connecting the optical waveguide and the optical fiber in an unaligned state has been studied.

FIG. 4B shows an optical waveguide device (not yet disclosed) proposed by the present applicant, and FIG. 4A shows this optical waveguide device. The optical waveguide device is shown in an exploded state. As shown in these figures, the proposed device is embedded in a clad part 5 formed by, for example, a flame deposition method, on a substrate 4 formed of silicon (Si) or quartz glass. The waveguide chip 1 has a plurality of waveguide cores (cores functioning as optical waveguides) 6 formed therein. An end face of the core 6 of the waveguide chip 1 is connected to a connection end face 25 a of the waveguide chip 1. , 25b and are arranged at a predetermined pitch.

[0004] Connection end members 2 and 3 are provided on the connection end surfaces 25a and 25b of the waveguide chip 1, respectively. The connection end members 2 and 3 have connection end surfaces 25 of the waveguide chip 1 attached thereto.
With the a and 25b exposed, fitting recesses 16 having a substantially U-shaped cross section fit into both sides of the waveguide chip 1 and fit around the upper surface 10 of the waveguide core portion 6 on which the optical waveguide is formed. The waveguide chip 1 is fitted and mounted in the fitting concave portion 16, and is bonded and fixed with a thermosetting adhesive or the like.
Each of the connection end members 2 and 3 is, for example, an integrally molded product manufactured by using transfer molding of a filler-containing epoxy resin or the like, and a connection guide pin is inserted into both sides of the fitting recess 16. Through guide pin fitting hole 12,
13 are formed respectively. Guide pin fitting holes 12, 13
Are formed at, for example, a 4.6 mm pitch at a position where the pin hole and the axis of the multi-core optical fiber connector connected to the optical waveguide device coincide with each other.

[0005] On both sides of the upper surface 10 of the waveguide chip 1,
V-shaped grooves 8a and 8b as chip-side positioning guide grooves are formed at positions avoiding the waveguide core portion 6 so as to extend over the entire length of the waveguide chip 1 in the longitudinal direction, as shown in FIGS. On the opposing surface 11 side of the fitting recess 16 of the connection end members 2 and 3 opposing the upper surface 10 of the waveguide chip 1, V
Inverted V-shaped grooves 14, 15 as end member side positioning guide grooves extending in the extending direction of the V-shaped grooves 8a, 8b are formed at positions corresponding to the V-shaped grooves 8a, 8b, respectively. The V-shaped grooves 8a and 8b are formed by, for example, machining or etching.

As shown in FIG. 4A, each V-shaped groove 8
a and 8b respectively have a connection end face 25 of the waveguide chip 1;
A total of four optical fibers 9 are inserted and fixed on the sides a and 25b. The length of these optical fibers 9 is, for example, substantially the same as the length of the connection end members 2 and 3 or the length of one end of the optical fiber 9 slightly protruding from the connection end members 2 and 3. , These optical fibers 9
Are fitted in the inverted V-shaped grooves 14 and 15 of the connection end members 2 and 3, whereby the waveguide chip 1 and the connection end members 2 and 3 are positioned. Two, three
Are bonded and fixed to form an optical waveguide device.

In the above-described device, instead of providing the inverted V-shaped grooves 14 and 15 in the connection end members 2 and 3, the connection end members 2 and 3 are fitted into the V-shaped grooves 8a and 8b of the waveguide chip 1, for example, a mountain shape. A method of positioning the waveguide chip 1 and the connection end members 2 and 3 by directly fitting the mountain-shaped protrusions into the V-shaped grooves 8 a and 8 b without forming the optical fiber 9 and forming the projections of It is considered.

[0008]

However, in the device proposed above, two optical fibers 9 are provided two at each end of each of the V-shaped grooves 8a and 8b so that the optical fiber 9 is connected to the waveguide chip 1 at the connection end. The positioning with the members 2 and 3 is performed.
Prepare four very thin optical fibers 9 with a diameter of 0.125 mm,
The operation of arranging and positioning the waveguide chips 1 on the side of the connection end faces 25a and 25b, respectively, was very troublesome.

In an apparatus for fitting the V-shaped grooves 8a and 8b of the waveguide chip 1 with the mountain-shaped projections formed on the connection end members 2 and 3 without using the optical fiber 9, the mountain-shaped is used. Is easily damaged, the projection is damaged when fitted into the V-shaped grooves 8a, 8b, and the connection end member 2,
There is a problem that positioning of the waveguide chip 1 and the waveguide chip 1 cannot be performed.

In the optical waveguide device as described above, it is desired that the positional relationship between the core portion 6 and the V-shaped grooves 8a and 8b is grasped and the formation accuracy of the V-shaped grooves 8a and 8b is increased. . That is, when connecting the proposed optical waveguide device to a multi-core optical connector or the like, the connection end members 2, 3
A common guide pin is inserted into the guide pin fitting holes 12 and 13 formed in the optical fiber connector and the pin hole formed in the multi-fiber optical connector on the other end of the connection, and the optical waveguide device is connected to the optical waveguide device via the guide pin. V-shaped grooves 8a and 8b, which are grooves for positioning the connection end members 2 and 3 and the waveguide chip 1, and an inverted V-shaped groove 14 so that the optical connection with the optical fiber connector is performed without adjusting the core. , 15
This is because it is very important to improve the positional accuracy with respect to the core 6.

In order to grasp the positional relationship between the V-shaped grooves 8a and 8b and the core 6, for example, light is transmitted through each of the core 6 and the positions where the V-shaped grooves 8a and 8b are formed. By receiving and analyzing the light, the core 6
It is possible to grasp the positional relationship between the V-shaped grooves 8a and 8b with respect to the V-shaped grooves 8a and 8b.
a, 8b are connected to the connection end members 2, 3,
The optical fiber 9 cannot receive the light that has passed through the optical fiber 9 because of the division between the V-shaped grooves 8a. , 8b with respect to the core portion 6 could not be grasped.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to facilitate positioning of a waveguide chip and a connection end member and assembling of a device.
Provided is an optical waveguide device which can be accurately performed, and hopefully easily and reliably grasps the positioning accuracy of the positioning groove of the waveguide chip and the positioning groove of the connection end member with respect to the core portion. It is in.

[0013]

Means for Solving the Problems To achieve the above object, the present invention provides means for solving the problems by the following constitution. That is, the present invention has a waveguide chip in which a waveguide core portion and a clad portion for burying the waveguide core portion are formed on a substrate, and the waveguide chip is provided on both sides of a connection end face of the waveguide chip. A connection end member having a fitting concave portion fitted around at least both side surfaces of the waveguide chip and an upper surface formed by forming the waveguide core portion with the connection end surface exposed, is fitted and mounted, On both sides of the upper surface of the waveguide chip, chip-side positioning guide grooves are formed at positions avoiding the waveguide core portion so as to extend over the entire length in the longitudinal direction of the waveguide chip, and face the upper surface of the waveguide chip. An end member-side positioning guide groove extending in the extension direction of the chip-side positioning guide groove is formed at a position corresponding to the chip-side positioning guide groove on the opposite surface side of the fitting concave portion. The guide rod is sandwiched between both ends of the waveguide chip by the guide groove and the chip-side positioning guide groove, and a positioning bar is provided over the entire length in the longitudinal direction of the chip-side positioning guide groove. .

Further, the positioning rod is a glass member, the glass member is an optical fiber, the optical fiber is a carbon-coated fiber, and the arrangement pitch of the optical fibers is equal to that of the waveguide core. An integral multiple of the arrangement pitch is also a characteristic feature of the present invention.

In the present invention having the above-described structure, an optical fiber or the like is formed on both sides of the upper surface of the waveguide chip over the entire length of the chip-side positioning guide groove extending over the entire length in the longitudinal direction of the waveguide chip. A positioning rod is provided, and the waveguide chip and the connection end member are positioned by a total of two positioning rods, one for each chip-side positioning guide groove. Therefore, when positioning rods are provided only on the connection end face side of the waveguide chip, a total of four positioning rods are arranged two by two in a part of the chip-side positioning guide groove in the longitudinal direction. As compared with the above, the number of positioning rods can be reduced, the positioning between the waveguide chip and the connection end member is easily performed, and the assembly and fabrication of the waveguide chip and the connection end member are also easily performed.

When the positioning rod is formed of an optical fiber, light is transmitted through the optical fiber and the waveguide core of the waveguide chip, and the transmitted light is received and analyzed. The position of the optical fiber with respect to the waveguide core is grasped, and the positional accuracy of the chip-side positioning guide groove and the connection end member-side positioning guide groove with respect to the waveguide core is grasped. Therefore, the value of the positional accuracy is fed back to the forming condition when forming the chip-side positioning guide groove in the waveguide chip and the forming condition of the connection end member, and the optical waveguide in which each positioning guide groove is formed with extremely high accuracy. The device can be manufactured.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. In the description of the present embodiment, the same reference numerals are given to the same parts as those in the conventional example, and the overlapping description will be omitted. FIG. 1 shows the configuration of an embodiment of the optical waveguide device according to the present invention, and FIG.
(B) shows the assembled state. As shown in these drawings, the present embodiment is configured almost in the same way as the proposed device shown in FIG. 4, and the present embodiment is different from the device shown in FIG. An optical fiber 9 for positioning the waveguide chip 1 and the connection end members 2 and 3 is sandwiched between both ends of the waveguide chip 1 by V-shaped grooves 8a and 8b and an inverted V-shaped groove 14, thereby forming a V-shaped groove 8a. , 8b over the entire length in the longitudinal direction.

The optical fiber 9 is a carbon-coated fiber precisely manufactured to a diameter of 0.125 mm, is more brittle than a normal non-coated fiber not coated with carbon, and is very easy to handle.

In this embodiment, the waveguide chip 1 is formed to have a width of about 3.2 mm and a thickness of 1.05 mm.
Are arranged on the connection end face side of the waveguide chip 1 at, for example, 0.25 mm pitch and are exposed on the connection end face 25a, 25b side. The arrangement pitch of the V-shaped grooves 8a, 8b is 2.75 mm, which is an integral multiple of the arrangement pitch of the core portions 0.25 mm.
And formed by, for example, machining or etching. Each V-shaped groove 8a, 8b has a vertex angle of 90 ° and a depth of about 0.2 mm.

In this embodiment, the connection end members 2 and
Each of the fitting recesses 16 of No. 3 has a lateral dimension (width of the facing surface 11) of about 3.4.
mm, the vertical dimension (depth) is about 1.3 mm, the inverted V-shaped groove formed on the facing surface 11 has a vertical angle of 90 ° and a height of about 0.2 mm, and the arrangement pitch is V-shaped. 2.75mm, same as grooves 8a and 8b
It has become.

The present embodiment is configured as described above. As shown in FIGS. 1 and 5, the optical fiber disposed in the V-shaped grooves 8a and 8b of the waveguide chip 1 as in the conventional example. 9 is fitted to the inverted V-shaped grooves 14 and 15 of the connection end members 2 and 3, respectively, and positioning is performed, and the connection end members 2 and 3 are bonded and fixed to the waveguide chip 1; In the embodiment, since the optical fibers 9 are arranged over the entire length of the V-shaped grooves 8a and 8b in the longitudinal direction, the number of the optical fibers 9 may be two, and the two optical fibers 9 can be easily used. In addition, it is possible to accurately position the waveguide chip 1 and the connection end members 2 and 3. Therefore, the fabrication of the optical waveguide device can be performed easily, accurately, and in a short time.

Further, according to the present embodiment, the optical fiber 9 is a carbon-coated fiber, and is more brittle than a normal optical fiber. In this case, the optical fiber 9 is hardly damaged, and the yield of manufacturing the optical waveguide device can be improved.

Furthermore, according to this embodiment, since the optical fiber 9 is disposed over the entire length of the V-shaped grooves 8a and 8b in the longitudinal direction, light is transmitted to the optical fiber 9 and the waveguide core 6. By transmitting the light and receiving and analyzing the transmitted light, the positional relationship between the core 6 and the optical fiber 9 can be easily grasped, and the V-shaped groove 8 with respect to the core 6 can be obtained.
The position accuracy of a, 8b and the inverted V-shaped grooves 14, 15 can be easily and accurately detected. Therefore, based on this detection result, the V-shaped grooves 8a, 8b,
The positional accuracy of the inverted V-shaped grooves 14 and 15 can be fed back to the forming conditions of the V-shaped grooves 8a and 8b and the forming conditions of the connection end members 2 and 3, thereby adjusting the manufacturing conditions of the optical waveguide device. Thus, an optical waveguide device can be manufactured with extremely high accuracy.

Further, in this embodiment, the V-shaped grooves 8a,
Since the arrangement pitch of 8b is formed to be an integral multiple of the arrangement pitch of the core section 6, for example, a 12-fiber MT connector type generally used for optical communication, and an arrangement of each optical fiber A so-called master connector (the arrangement pitch of each optical fiber is 250 μm) whose pitch is accurately positioned is opposed to the connection end face 25a side of the optical waveguide device, and light is emitted from each optical fiber, and the optical fiber 9 And the core 6. Specifically, light emitted from the optical fibers at both ends (first and twelfth fibers) is made incident on each optical fiber 9, and M
Light emitted from the third to tenth optical fibers of the T connector is respectively incident on the eight core portions 6. Therefore, according to the present embodiment, it is possible to easily and accurately measure the positional accuracy of the V-shaped grooves 8a and 8b with respect to the core portion 6 using a generally used MT connector. Position accuracy can be grasped very easily.

Further, ferrules having an optical fiber embedded at the center of the shaft are inserted into the guide pin fitting holes 12 and 13 of the connection end members 2 and 3 and the guide pin fitting holes of the MT connector (master connector) described above. Thereafter, if the master connector and the ferrule of the optical waveguide device of the present invention are opposed to each other so that the optical axes of the optical fibers in the ferrule coincide with each other, light is transmitted to the optical fiber embedded in the ferrule, In the same procedure as described above, the guide pin fitting holes 12 and 13 of the connection end members 2 and 3, the core portion 6, and the V-shaped groove 8
The position accuracy of each of a and 8b can be easily and accurately measured.

Further, according to the present embodiment, since the connection end members 2 and 3 are formed of a plastic material such as an epoxy resin containing a filler, the connection end members 2 and 3 are formed.
3 and the waveguide chip 1 can be improved. For example, even when an external impact or the like is applied, the connection end members 2 and 3 and the waveguide chip 1 are not easily separated, and Reliability for environmental characteristics can also be improved.

FIG. 3 shows a method of connecting the optical waveguide device of this embodiment to the multi-core (eight-core) optical fiber connector 23. In addition, as shown in FIG. 2, the optical waveguide device is provided with a protection member 18 for protecting the clad portion 5 of the waveguide chip 1.
3 is provided in engagement with the step 27, and the protection member 18
It also functions as a means for positioning the connection end members 2 and 3 in the longitudinal direction.

As shown in FIGS. 2 and 3, when the optical waveguide device of this embodiment is connected to the optical fiber connector 23, the guide holes 12 and 13 of the connection end members 2 and 3 are used for connection. The guide pins 19, 20 are inserted and protruded from the end faces 28, 29 of the connection end members 2, 3. A multi-core optical fiber connector in which the optical fibers of the optical fiber tape 21 are arranged and fixed at equal intervals on the projecting sides of the guide pins 19 and 20.
The guide pins 19 and 20 are inserted into the through-holes 22 formed in the optical fiber connector 23 at a predetermined pitch of, for example, 4.6 mm. The end faces 28 and 29 are brought into contact with the connection end face 30 of the optical fiber connector 23 via a refractive index matching agent. And
Finally, the spring clamp 24 is fitted over the rear end side of the optical fiber connector 23 and the step 31 of the protective member 18 so as to fit, and the optical fiber connector 23 and the optical waveguide device are pressed against each other in the longitudinal direction and fixed. I do.

Then, the optical waveguide device and the optical fiber connector 23 are connected, and by this connection, the optical axis of the core portion 6 of the optical waveguide device of the present embodiment and the optical fiber of the optical fiber connector 23 coincide with each other. The optical waveguide device and the optical fiber connector 23 are optically connected without adjustment.

The present invention is not limited to the above-described embodiment, but can adopt various embodiments. For example,
In the above embodiment, the fitting recess 16 is a recess having a substantially U-shaped cross section with an opening on the lower side, but the fitting recess 16 may be a rectangular through hole.

In the above embodiment, the connection end faces 25a and 25b of the waveguide chip 1 and the end faces 28 and 29 of the connection end members 2 and 3 are formed substantially perpendicular to the optical axis of the core 6. However, the connection end faces 25a and 25b of the waveguide chip and the end faces 28 and 29 of the connection end member may be formed as oblique end faces inclined at, for example, about 8 ° from a plane perpendicular to the core portion 6. As described above, when the end faces 25a, 25b, 28, and 29 are formed obliquely and the connection end face of the optical waveguide device is an oblique end face, the optical waveguide device is connected to an optical component such as the optical fiber connector 23, and the optical fiber device 23 is connected. When the transmitted light is transmitted, even if the transmitted light is reflected at the end face of the core portion 6, the reflected light is reflected in a direction away from the core portion 6, so that the adverse effect of the reflected light returning to the transmission side is suppressed, Loss due to light can be suppressed.

Further, in the above embodiment, eight core portions 6 are arranged at a pitch of 0.25 mm on the waveguide chip 1.
The number, arrangement pitch, size, shape, and the like of the cores 6 are not particularly limited, and are appropriately set.

Further, in the above embodiment, the arrangement pitch of the V-shaped grooves 8a, 8b of the waveguide chip 1 and the inverted V-shaped grooves 14, 15 of the connection end members 2, 3 is 2.75 mm, and the top of each groove is set. Corner
Although 90 ° and the depth were set to about 0.2 mm, the pitch of each groove, the size of the apex angle, the depth, and the like are not particularly limited, and may be appropriately set. Also, these grooves are not necessarily V
It is not limited to a U-shaped groove or an inverted V-shaped groove. For example, a U-shaped groove is formed on the waveguide chip 1 side, and an inverted U-shaped groove is formed on the connection end members 2 and 3.
A U-shaped groove may be formed, and both ends of the optical fiber 9 may be fitted into circular holes formed by the U-shaped groove and the inverted U-shaped groove.

Further, in the above embodiment, the optical fiber 9 is a carbon coated fiber, but the optical fiber 9 may be a normal non-coated optical fiber. However,
If the optical fiber 9 is a carbon-coated fiber, the brittleness of the optical fiber 9 is excellent, so that the optical fiber 9 can be easily handled, and the yield when manufacturing the optical waveguide device can be improved.

Further, in the above-described embodiment, the optical fiber 9 is used as the positioning rod, but the positioning rod may be a glass member other than the optical fiber 9, and may be a ceramic rod other than the glass member. Is also good.

Further, in the above embodiment, the connection end members 2 and 3 are molded products made of epoxy resin or the like, but the connection end members 2 and 3 may be formed of quartz or Pyrex glass, for example. . Thus, the connection end members 2, 3
Is formed of quartz or Pyrex glass, the bonding between the connection end members 2 and 3 and the waveguide chip 1 is UV.
(Ultraviolet) The adhesive is fixed with a curing adhesive.

Further, the waveguide chip 1 and the connection end members 2,
The size of the core 3 is not particularly limited and may be set as appropriate. For example, the cores 6 are arranged at the same pitch as the optical fiber so as to correspond to the optical component on the mating side such as the MT connector. Guide pin fitting holes for connecting end members 2 and 3
12 and 13 are appropriately set so as to correspond to the pin holes 22 of the optical fiber connector 23.

[0038]

According to the present invention, a positioning rod is provided over the entire length in the longitudinal direction of the chip-side positioning guide groove extending and formed over the entire length in the longitudinal direction of the waveguide chip.
By sandwiching the positioning rod between the chip-side positioning guide groove and the end member-side positioning guide groove formed on the connection end member side at both ends of the waveguide chip, the waveguide chip and the connection end member are positioned and fixed. Therefore, the waveguide chip and the connection end member can be easily and accurately positioned using the two positioning rods. According to the present invention, for example, four positioning members having a partial length in the longitudinal direction of the chip-side positioning guide groove are prepared, and the positioning members are disposed on both ends of the waveguide chip, respectively. It is easier to handle the positioning member (positioning rod) than the positioning between the side positioning guide groove and the end member side positioning guide groove, and the positioning between the waveguide chip and the connection end member is also easy, and Accuracy can be achieved, and the device can be easily and accurately assembled and manufactured.

In addition, since the waveguide core and the clad are generally formed of a glass member, the positioning bar is made of a glass member so that when the positioning bar is formed of a metal material or the like. In comparison, the difference in linear expansion coefficient between the positioning rod and the waveguide chip can be made extremely small, and the deformation of the optical waveguide device due to stress or the like caused by the difference in linear expansion coefficient can be suppressed. And the connection end member can be accurately maintained in a fixed state.

Further, according to the present invention, in which the positioning glass member is an optical fiber, the diameter of the optical fiber is extremely high, although the diameter of the optical fiber is small. The positioning of the chip and the connection end member can be performed more accurately, and the cost of the optical fiber device is low, so that the cost of the optical waveguide device can be low.

Further, if the optical fiber is a carbon-coated fiber, this carbon-coated fiber is more brittle than a normal non-coated fiber,
The workability of the optical fiber can be improved, and the production yield of the optical waveguide device can be improved.

When the positioning rod is made of an optical fiber, light passes through the optical fiber and the waveguide core, respectively, and when the light is received and analyzed, the optical fiber with respect to the waveguide core is analyzed. It is possible to accurately determine the positional accuracy, whereby it is possible to detect the positional accuracy of the chip-side positioning guide groove and the end member-side positioning guide groove with respect to the waveguide core. Based on the detection results, the optical waveguide device can be manufactured very accurately by feeding back to the conditions for forming the chip-side positioning guide groove in the waveguide chip and the end member-side positioning guide groove in the connection end member. can do.

Further, according to the present invention, wherein the arrangement pitch of the optical fibers is an integral multiple of the arrangement pitch of the waveguide cores, for example, the arrangement pitch of the waveguide cores is generally used for optical communication. If the optical fiber is formed at the same pitch as the optical fiber arrangement pitch of the optical connector and light is emitted from the optical fiber, each emitted light can be respectively incident on the waveguide core portion of the optical waveguide device and the positioning optical fiber. It becomes possible. Therefore, it is possible to easily and accurately detect the position accuracy of the optical fiber of the optical waveguide device with respect to the waveguide core portion by using the optical connector. Easily and accurately determine the position accuracy with respect to the waveguide core,
By feeding back the conditions for manufacturing the optical waveguide device, a high-precision optical waveguide device can be manufactured very easily.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of an optical waveguide device according to the present invention.

FIG. 2 is an explanatory diagram showing a state in which a protection member 18 and connection guide pins 19 and 20 are provided in the optical waveguide device of the embodiment.

FIG. 3 is an explanatory diagram showing a connection method between the optical waveguide device of the embodiment and an optical connector.

FIG. 4 is an explanatory diagram showing a configuration of an optical waveguide device previously proposed by the present applicant.

FIG. 5 is an explanatory view showing a front view of the optical waveguide device shown in FIG. 4 in an exploded state.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Waveguide chip 2, 3 Connection end member 6 Core part 8a, 8b V-shaped groove 14, 15 Reverse V-shaped groove 16 Fitting recess

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takashi Shigematsu 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd. (72) Inventor Takeo Shimizu 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Furukawa Inside Electric Industry Co., Ltd. (72) Inventor Shiro Nakamura 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Inside Furukawa Electric Co., Ltd. (72) Inventor Shinji Nagasawa 1-1-6, Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Inside Telephone Co., Ltd. (72) Inventor Mitsuru Kihara 1-6, Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (56) References JP-A-5-264866 (JP, A) JP-A-4-287010 (JP, A) JP-A-5-257040 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G02B 6/30 G02B 6/36 G02B 6/12

Claims (5)

(57) [Claims] A waveguide chip having a waveguide core portion and a cladding portion for burying the waveguide core portion on a substrate;
At least two side surfaces of the waveguide chip are fitted on both sides of the connection end surface of the waveguide chip with the connection end surfaces of the waveguide chip exposed, and are fitted around the upper surface formed by forming the waveguide core portion. A connection end member having a mating recess is fitted and mounted. On both sides of the upper surface of the waveguide chip, a chip-side positioning guide groove is provided at a position avoiding the waveguide core portion, and a total length in a longitudinal direction of the waveguide chip. And an end extending in the extension direction of the chip-side positioning guide groove at a position corresponding to the chip-side positioning guide groove on an opposite surface side of the fitting concave portion facing the upper surface of the waveguide chip. A member-side positioning guide groove is formed, and the chip-side positioning guide groove is sandwiched between both ends of the waveguide chip by the end member-side positioning guide groove and the chip-side positioning guide groove. Optical waveguide device characterized by positioning bars are provided over the entire longitudinal length. 2. The optical waveguide device according to claim 1, wherein the positioning rod is a glass member. 3. The optical waveguide device according to claim 2, wherein the glass member is an optical fiber. 4. The optical waveguide device according to claim 3, wherein the optical fiber is a carbon coated fiber. 5. The arrangement pitch of the optical fibers is an integral multiple of the arrangement pitch of the waveguide core.
Or the optical waveguide device according to claim 4.