JP3256658B2 - Flow velocity detector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the use of a flow rate sensor comprising a heater element and a temperature-measuring resistance element for changing a resistance value by heat transfer caused by a fluid moving on the heater element. The present invention relates to a flow velocity detecting device that detects a flow velocity, and more particularly to a flow velocity detecting device that can constantly detect whether or not a flow velocity sensor has failed during measurement of a flow velocity.

[0002] A flow rate sensor for measuring the flow rate of a fluid requires extremely high reliability when used in a combustion control system or the like. From now on, while measuring the flow velocity,
The construction of a configuration that can always detect whether or not the flow rate sensor has failed has been called for.

[0003]

2. Description of the Related Art The present applicant discloses in Japanese Patent Application No. 3-106528 a heater element and a temperature-measuring resistance element whose resistance value is changed by heat transfer caused by a fluid moving on the heater element. As a flow rate sensor to be performed, a flow rate sensor having a microfabricated diaphragm configuration realizing high accuracy and high speed response has been disclosed.

FIG. 10 (a) is a perspective view of an example of a flow sensor having the microfabricated diaphragm, and FIG.
FIG. In this drawing, reference numeral 1 denotes a semiconductor substrate made of, for example, single-crystal silicon and having a thickness of about 1.7 mm square and a thickness of about 0.7 mm. Is formed, and the upper portion of the gap 2 is spatially isolated from the semiconductor substrate 1, and as a result, a diaphragm 3 thermally insulated from the semiconductor substrate 1 is formed. A thin-film heater element 4 and a pair of thin-film temperature measuring resistance elements 5 and 6 sandwiching the heater element 4 are formed on the surface of the diaphragm portion 3. Is formed with a thin-film ambient temperature measuring resistance element 7 on the surface thereof.

The diaphragm 3 is made of an insulating material such as silicon nitride, silicon oxide, polyimide or the like and is formed to a thickness of, for example, about 1 μm. The loss due to heat conduction from the end is extremely small. Insulation has been achieved. The heater element 4, the resistance temperature measurement elements 5, 6 and the ambient temperature resistance resistance element 7 are made of a thin film of platinum, nickel, iron / nickel alloy, thermistor material, etc. The temperature-measuring resistance element 7 has a characteristic that a resistance value changes according to a temperature change.

FIG. 11 shows a temperature distribution of the flow rate sensor having the microfabricated diaphragm. The control circuit that controls the heat generation of the heater element 4 heats the heater element 4 so as to have a certain temperature difference th from the ambient temperature detected by the ambient temperature resistance measuring element 7. At this time, if the fluid does not flow, the temperatures t1, t2 of the temperature measuring resistance elements 5, 6 become substantially equal as shown in this figure.

For example, when the fluid moves from the temperature measuring resistance element 5 to the direction in which the temperature measuring resistance element 6 is disposed, the temperature measuring resistance element 5 on the upstream side is cooled to Δt1
Only the temperature drops, and the temperature measuring resistance element 6 on the downstream side
Heated by the heat transfer, the temperature rises by Δt2. As a result, a temperature difference occurs between the temperature measuring resistance element 5 and the temperature measuring resistance element 6, and in response thereto, a Wheatstone bridge circuit or the like incorporating the temperature measuring resistance elements 5, 6 is generated due to the temperature difference. By converting the resistance change into a voltage, a voltage corresponding to the flow velocity of the fluid is output.

[0008] The flow rate sensor having the micro-fabricated diaphragm configured as described above detects the flow rate using the very thin diaphragm section 3 which is thermally insulated, and therefore has high sensitivity, high response speed, and low power consumption. It has the characteristic that the flow velocity can be measured with electric power.

[0009]

In the prior art, when such a flow rate sensor having a microfabricated diaphragm is used, it does not have a function of detecting a failure.

However, the diaphragm portion 3 of the flow sensor having the microfabricated diaphragm structure is very thin, and may be damaged by incorrect handling or exposure to an excessive wind speed. Further, the heater element 4, the temperature-measuring resistance elements 5, 6 and the ambient temperature-measuring resistance element 7 are made of a thin film having a fine pattern, and may be burned out when an excessive current or excessive voltage is applied. .
In addition, since the electrode portion is exposed for electrical wiring, a short circuit occurs between the electrodes due to the adhesion and deposition of conductive foreign matter, and the heater element 4, the temperature measuring resistance elements 5, 6 and the There is a risk that the temperature measurement resistance element 7 will not function.

From now on, in order to put a flow sensor having a microfabricated diaphragm structure into practical use, it is necessary to construct a structure that can always detect whether or not the flow sensor is normal.

In particular, when used in industrial combustion control applications requiring high safety, the flow rate sensor must be provided with a diagnosis function to prevent erroneous combustion control due to erroneous detection signals. Becomes indispensable. However, in the prior art, since there is no such technical means, the normal / abnormal diagnosis of the flow rate sensor cannot be performed, and this has a disadvantage that the reliability of the entire combustion control is reduced. .

The present invention has been made in view of such circumstances, and includes a heater element and a temperature measuring resistance element that changes a resistance value by heat transfer caused by a fluid moving on the heater element. When adopting a configuration that detects the flow velocity of a fluid using a flow velocity sensor, a new flow velocity detection device that can always detect whether or not the flow velocity sensor has failed while measuring the flow velocity is provided. Aim.

[0014]

[MEANS FOR SOLVING THE PROBLEMS] To achieve this object
In the flow velocity detecting device of the present invention, Formed on the substrate
A heater element formed on a thin diaphragm member
And The heater element is formed on the diaphragm member.
On both sides of the heater element to move on the heater element
Change in resistance due to heat transfer caused by fluid
Two resistance temperature elements to be Diaf on board
Formed on parts other than the ram member, and resists depending on the ambient temperature.
An ambient temperature resistance element for changing the value, He
TaelemenGAmbient temperature resistance elementSeries connection with
Continued, two fixedConstantConnect in parallel with the series connection of the resistor
It can beIt consists of a bridge circuit
Heating the element to a specified temperature value higher than the ambient temperature.
Data heating circuit,TwoResistance temperature elementSeries connection
Continued, two fixedConstantConnect in parallel with the series connection of the resistor
It can beIt consists of a bridge circuit
Generates a voltage corresponding to the flow velocity of the fluid moving on the element
When adopting a configuration that includes a sensor detection circuit
Bridge circuit that constitutes the heater heating circuitHeater
Connection point between element and ambient temperature resistance elementof
By comparing the potential with a specified reference value, the heater element
Resistance elementAt least one of
Comparator circuit to detect whether or not a fault has occurred
And the bridge circuit that constitutes the sensor detection circuit
Set the potential at the connection point of the two resistance temperature elements to the specified reference value.
By comparing with the two
To detect whether a failure has occurred in either
Window comparator circuitTake the configuration to prepare.

[0015]

In the flow rate detecting device of the present invention thus configured, when the heater element or the ambient temperature resistance element is disconnected or short-circuited, the heater element of the bridge circuit constituting the heater heating circuit and the ambient temperature
The potential at the connection point between the resistance thermometer element, than is excluded from the range of values that can be taken when the normal state, con
Comparator circuitry, by comparing the reference value of establishing the potential of that of the connection point, whether at least a failure in any of the heater elementary bets and ambient temperature temperature measuring resistance et <br/> Remen bets occurs not Or to detect.

Further, when the resistance temperature element is disconnected or short-circuited, the potential at the connection point of the two resistance temperature elements of the bridge circuit constituting the sensor detection circuit becomes:
Than it is excluded from the range of values that can be taken when the normal state, the window comparator circuitry, by comparing the reference value of establishing the potential of that of the connection point, the two temperature measuring resistors
It is detected whether or not a failure has occurred in at least one of the elements .

As described above, according to the flow velocity detecting device of the present invention, it is possible to always detect whether or not the flow velocity sensor has failed during the measurement of the flow velocity. It can be applied where sex is required.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail according to embodiments. FIG. 1 illustrates a device configuration of a flow velocity detecting device 10 having the present invention.

As shown in this figure, the flow velocity detecting device 10 of the present invention has a heater element 4 / temperature measuring resistance element 5,6 / ambient temperature resistance measuring element which is constituted by the microfabricated diaphragm structure shown in FIG. , A heat generation control circuit 30 having a heater element 4 and an ambient temperature resistance element 7 of the flow sensor 20 as circuit elements, and controlling a heating process of the heater element 4; Having the temperature-measuring resistance elements 5, 6 as circuit elements.
Temperature difference amplifying circuit 40 for generating a voltage corresponding to the resistance value of
And an abnormal state detection circuit 50 for detecting a disconnection / short circuit failure of the heater element 4 / temperature resistance element 5,6 / ambient temperature resistance element 7.

As described above, the flow velocity detecting device 10 of the present invention is characterized in that the abnormal state detecting circuit 50 is newly provided. In FIGS. 2, view the technology related to the present onset Akira. This
In a technique related to the present invention, an abnormal state detection circuit 50 is added to the heat generation control circuit 30 .

The heat control circuit 30 is formed by connecting a heater element 4 and a fixed resistor R1 in series and an ambient temperature measuring resistor element 7 and a fixed resistor R2 in series. A circuit, an operational amplifier U1 for amplifying a voltage difference between two series-connected intermediate points of the Wheatstone bridge circuit, and a transistor Q1 for controlling an amount of current supplied to the Wheatstone bridge circuit in accordance with an output of the operational amplifier U1. A fixed resistor R3,4 for generating a bias voltage for the transistor Q1. Here, the Wheatstone bridge circuit employs a configuration in which one ends of the heater element 4 and the ambient temperature measuring resistance element 7 are grounded, and a DC voltage is applied to one ends of the fixed resistors R1 and R2.

According to this configuration, a current is supplied to the Wheatstone bridge circuit via the transistor Q1, and the heater element 4, which is thermally insulated from the semiconductor substrate 1, increases the resistance value RH by increasing the temperature. . On the other hand, the temperature of the semiconductor substrate 1 which is thermally insulated from the heater element 4 does not rise, and the resistance value RR of the ambient temperature resistance element 7 in contact with the semiconductor substrate 1 does not change. . Therefore, the heat generation control circuit 30 is stabilized where “RH × R2 = RR × R1”.

As described above, the heat generation control circuit 30 determines that the ratio “RH / RR” of the resistance value RH of the heater element 4 and the resistance value RR of the ambient temperature measuring resistance element 7 is constant.
That is, the heat generation of the heater element 4 is controlled so that the temperature rise of the heater element 4 with respect to the ambient temperature becomes constant.

At the time of this operation, the voltage at the midpoint of the Wheatstone bridge circuit indicates a value within a specified range. More specifically, when the DC voltage supplied to the Wheatstone bridge circuit is 5 V, this voltage indicates 1 V to 2 V. That is, during normal operation, a voltage of 1 V to 2 V is input to the operational amplifier U1.

In such a configuration, when the heater element 4 is disconnected, the voltage at the + input terminal of the operational amplifier U1 becomes higher than the voltage at the-input terminal, and the output of the operational amplifier U1 receives the positive voltage. And the transistor Q1 is turned off. From this, the voltage at the + input terminal and the-input terminal of the operational amplifier U1 drops to 0.1 V or less. When the heater element 4 is short-circuited, the operational amplifier U1
The voltage of the + input terminal becomes 0V.

When the ambient temperature resistance element 7 is disconnected, the voltage at the negative input terminal of the operational amplifier U1 becomes higher than the voltage at the positive input terminal, and the output of the operational amplifier U1 decreases to the negative side. As a result, the transistor Q1 becomes saturated. From this, the voltage of the minus input terminal of the operational amplifier U1 becomes 4.9V to 5V. When the ambient temperature resistance element 7 is short-circuited, the voltage at the negative input terminal of the operational amplifier U1 becomes 0V.

That is, the voltage input to the + input terminal and the − input terminal of the operational amplifier U1 indicates “1.5 ± 0.5 V” during normal operation, whereas the voltage input to the heater element 4 and the ambient temperature If the resistance element 7 is disconnected or short-circuited, a value outside this range will be indicated.

The abnormal state detecting circuit 50 detects a disconnection / short-circuit failure of the heater element 4 or the ambient temperature resistance element 7 by monitoring the voltage input to the operational amplifier U1. Disconnection
An operational amplifier U1 is provided for detecting a short-circuit fault.
A first window comparator 51 which receives the voltage of the + input terminal of the first input terminal and an open-circuit / short-circuit failure of the ambient temperature resistance element 7 are provided.
A second window comparator 52 receiving the voltage of the negative input terminal of the first window comparator 52 and a first window comparator 51
And an OR circuit 53 for outputting an abnormality to the outside when the second window comparator 52 outputs an abnormality and when the second window comparator 52 outputs an abnormality.

As shown in FIG. 3, the first window comparator 51 and the second window comparator 52 are provided with a reference value "VN + Vth" generated by resistance division of fixed resistors R5 to R7 connected in series. A comparator U3 that receives a voltage Vin at the intermediate point of the Wheatstone bridge circuit input from the heat generation control circuit 30 and outputs a high level when “Vin> VN + Vth”, and fixed resistors R5 to R7 connected in series The reference value “VN−Vth” generated by the resistance division of the resistance value and the voltage Vin at the intermediate point of the Wheatstone bridge circuit input from the heat generation control circuit 30
And a comparator U4 that outputs a high level when “Vin <VN−Vth” and an OR that calculates and outputs the logical sum of the output values of the two comparators U3 and U4
And a circuit U5.

According to this configuration, the first window comparator 51 and the second window comparator 52
As shown in FIG. 4, the voltage Vin at the intermediate point of the Wheatstone bridge circuit input from the heat generation control circuit 30 is “VN
It operates to output a low level when it is within the range of -Vth ≦ Vin ≦ VN + Vth, and to output a high level otherwise.

From now on, the present invention will be described with reference to FIG.
According to the technology, during normal operation, “1.5 ± 0.5 V” is input to the + input terminal of the operational amplifier U1 of the heat control circuit 30, and when the heater element 4 is disconnected or short-circuited, other voltages are input. The first window comparator 51 sets “VN” to 1.5 V and sets “Vth” to 0.5 V in consideration of the characteristic that the heater element 4 is disconnected. A high level is output when a short-circuit fault occurs, and a low level is output during normal operation. Then, in response to this, the abnormal state detection circuit 50 performs processing to notify the outside whether or not the heater element 4 has a failure.

During normal operation, the heat generation control circuit 30
In consideration of the characteristic that "1.5 ± 0.5 V" is input to the-input terminal of the operational amplifier U1 and other voltages are input when the ambient temperature resistance element 7 is disconnected or short-circuited. , The second window comparator 52 outputs “V
By setting "N" to 1.5 V and "Vth" to 0.5 V, when the ambient temperature resistance element 7 is disconnected or short-circuited, it outputs a high level and operates normally. And outputs a low level signal, and in response to this, the abnormal state detection circuit 50
Processing is performed so as to notify whether or not a failure has occurred in the ambient temperature resistance element 7.

In this manner, the present invention shown in FIG.
In the related technology, if the heater element 4 breaks or short-circuits or the ambient temperature resistance element 7 breaks or short-circuits, it can be output to the outside.

As described above, when the heater element 4 is disconnected, the voltage at the + input terminal of the operational amplifier U1 drops to 0.1 V or less.
The voltage at the + input terminal of the operational amplifier U1 becomes 0V. Therefore, the first window comparator 52 does not need to have a window function, but only has to have a mere comparator function.

In the technique related to the present invention shown in FIG.
The Wheatstone bridge circuit of the heat generation control circuit 30 employs a configuration in which one end of the heater element 4 and one end of the ambient temperature measuring resistor element 7 are grounded, and a DC voltage is applied to one end of the fixed resistors R1 and R2. It is also possible to adopt a configuration in which one ends of the resistor R1 and the fixed resistor R2 are grounded, and a DC voltage is applied to one end of the heater element 4 and one end of the ambient temperature measuring resistor element 7.

With this configuration, when the heater element 4 is disconnected, the voltage at the + input terminal of the operational amplifier U1 becomes 0 V. When the heater element 4 is short-circuited, the transistor Q1 is turned off, so that the + of the operational amplifier U1 is turned off. The voltage at the input terminal will be less than 0.1V. And
When the ambient temperature resistance element 7 is disconnected, the voltage at the-input terminal of the operational amplifier U1 becomes 0 V. When the ambient temperature resistance element 7 is short-circuited, the transistor Q1 is saturated, and thus the operational amplifier U1 is disconnected. −
The voltage at the input terminal is between 4.9V and 5V. Therefore, the failure of the heater element 4 and the ambient temperature resistance element 7 can be output using the abnormal state detection circuit 50 shown in FIG.

FIG . 5 shows an embodiment of the present invention. Figure
In the technique related to the present invention shown in FIG.
0 Wheatstone bridge circuit, heater element 4
And the series connection of the fixed resistor R1, but employs a configuration for connecting the series connection of the fixed resistor and the ambient temperature the resistance thermometer element 7 R2 in parallel, in one embodiment of the present invention are shown in FIG. 5, human and <br/> over motor element 4 connected in series with the ambient temperature the resistance thermometer element 7, Ru adopted a parallel connection constitute a series connection of the fixed resistor R1 and the fixed resistor R2. With this configuration, the abnormal state detection circuit 50 need only include one comparator 54 that receives the voltage VRH at the connection point between the heater element 4 and the ambient temperature resistance measuring element 7 as an input.

[0039] If Explain with the embodiment of FIG. 5, the voltage VRH the + input terminal of operational amplifier U1 is that the during normal operation is "1.5 ± 0.5V", the heater element 4 When a disconnection occurs, the voltage drops to 0.1 V or less by turning off the transistor Q1, and to 0V when the heater element 4 is short-circuited. When the ambient temperature resistance element 7 is broken, the voltage becomes 0 V. When the ambient temperature resistance element 7 is short-circuited, the transistor Q1 is turned off and the voltage becomes 0.1 V or less. Is determined, the processing is performed to notify the outside whether or not the heater element 4 and the ambient temperature measurement resistance element 7 have a failure. Thus, in FIG.
According to one embodiment of the invention shown, one comparator 5
4 and heater element 4 and ambient temperature measurement
Failure has occurred in at least one of the thermal resistance elements 7
It is possible to detect whether or not it has been done.

[0040] FIGS. 6 and view the technology related to the present onset Akira. Technology related to this invention, the temperature difference amplifier circuit 40
, An abnormal state detection circuit 50 is added . The temperature difference amplifying circuit 40 includes a series connection of a resistance temperature measuring element 5 and a fixed resistance R11, and a resistance measurement element 6 and a fixed resistance R
It comprises a Wheatstone bridge circuit configured by connecting 12 series connections in parallel, and a measurement amplifier 41 that amplifies the voltage difference between the two series-connected points of the Wheatstone bridge circuit. Here, the Wheatstone bridge circuit has a configuration in which one ends of the temperature measuring resistance elements 5 and 6 are grounded, and a DC voltage is applied to one ends of the fixed resistances R11 and R12.

According to this configuration, the temperature difference amplifying circuit 40
Are temperature-measuring resistance elements 5, 6 that vary with the flow velocity of the fluid.
Generates a voltage corresponding to the resistance value of. During this operation,
The voltage at the midpoint of the Wheatstone bridge circuit indicates a value within a specified range. More specifically, when the DC voltage supplied to the Wheatstone bridge circuit is 2 V, this voltage indicates 0.5 V to 1.5 V.

In such a configuration, when the temperature measuring resistance element 5 is disconnected, the voltage Vu at the connection point between the temperature measuring resistance element 5 and the fixed resistance R11 becomes 2V. When the resistance element 5 is short-circuited, the voltage Vu becomes 0V.
become.

When the resistance element 6 is disconnected, the voltage Vd at the connection point between the resistance element 6 and the fixed resistor R12 becomes 2V. When the resistance element 6 is short-circuited, the voltage Vd becomes 0V.

That is, the voltage Vu at the connection point between the temperature measuring resistance element 5 and the fixed resistance R11 is "1.0 ± 0.5 V" during normal operation, while the temperature measuring resistance element 5 is disconnected. Or short circuit, the value will be out of this range. Further, the voltage Vd at the connection point between the temperature measuring resistance element 6 and the fixed resistance R12 is "1.0 ± 0.5 V" in a normal operation, whereas when the temperature measuring resistance element 6 is disconnected or short-circuited. Is out of this range.

The abnormal state detection circuit 50 detects the voltage Vu,
By monitoring Vd, a disconnection / short-circuit failure of the resistance thermometer elements 5 and 6 is detected, and is prepared to detect a disconnection / short-circuit failure of the resistance temperature element 5. A first window comparator 55 having a circuit configuration shown in FIG. 3 which receives a voltage Vu at a connection point with the fixed resistor R11 as an input, and a disconnection of the temperature measuring resistance element 6
A second window comparator 56 which is provided for detecting a short-circuit fault and has a circuit configuration shown in FIG. 3 which receives a voltage Vd at a connection point between the temperature measuring resistance element 6 and the fixed resistance R12 and has a first configuration; When the window comparator 55 outputs an abnormality, and when the second window comparator 56
Is provided with an OR circuit 57 that outputs an abnormality to the outside when the abnormality is output.

As described with reference to FIG. 3, the first window comparator 55 and the second window comparator 56
As shown in FIG. 4, the voltage Vin at the intermediate point of the Wheatstone bridge circuit input from the temperature difference amplifying circuit 40 is
It operates to output a low level when it is in the range of “VN−Vth ≦ Vin ≦ VN + Vth”, and to output a high level otherwise.

From now on, the present invention will be described with reference to FIG.
According to the technology, the voltage Vu at the connection point between the resistance temperature measuring element 5 and the fixed resistance R11 indicates "1.0 ± 0.5 V" during normal operation.
Considering the characteristic that the voltage indicates other voltages, the first window comparator 55 sets the temperature of the first window comparator 55 by setting “VN” to 1.0 V and “Vth” to 0.5 V. It outputs a high level when the resistance element 5 has a disconnection / short-circuit fault, and outputs a low level when it is operating normally. Then, in response to this, the abnormal state detection circuit 50 performs a process to notify the outside whether or not the temperature measuring resistance element 5 has a failure.

Further, the temperature measuring resistance element 6 and the fixed resistance R
In normal operation, the voltage Vd at the connection point with the terminal 12 is “1.0 ±
The second window comparator 55 sets "VN" to 1.0 V in consideration of the characteristic that when the disconnection / short circuit failure of the resistance temperature element 6 indicates other voltages, the second window comparator 55 indicates "0.5 V". At the same time, by setting “Vth” to 0.5 V, a high level is output when the temperature-measuring resistance element 6 breaks or short-circuits, and a low level is output during normal operation. In response to this, the abnormal state detection circuit 50 performs processing to notify the outside whether or not a failure has occurred in the temperature measuring resistance element 6.

Thus, the present invention shown in FIG.
In the related technology, when the temperature measuring resistance elements 5 and 6 are disconnected or short-circuited, the fact can be output to the outside. Figure
In the technique related to the present invention shown in FIG. 6, the Wheatstone bridge circuit of the temperature difference amplifying circuit 40 grounds one ends of the temperature measuring resistance elements 5 and 6 and applies a DC voltage to one ends of fixed resistors R11 and R12. The fixed resistors R11, R12
May be grounded, and a DC voltage may be applied to one end of each of the resistance temperature measuring elements 5 and 6.

When this configuration is adopted, the temperature measuring resistance element 5
Is broken, the voltage Vu at the connection point between the temperature-measuring resistance element 5 and the fixed resistor R11 is 0 V, and when the temperature-measuring resistance element 5 is short-circuited, this voltage Vu is 2 V. When the resistance element 6 is disconnected, the voltage Vd at the connection point between the resistance element 6 and the fixed resistor R12 is 0 V. When the resistance element 6 is short-circuited, the voltage Vd is 2 V. Therefore, FIG.
By using the abnormal state detection circuit 50 shown in FIG.

FIG . 7 shows an embodiment of the present invention. Figure
In the technique related to the present invention shown in FIG. 6, the Wheatstone bridge circuit of the temperature difference amplifying circuit 40 includes a series connection of the temperature measuring resistor element 5 and the fixed resistor R11 and a series connection of the temperature measuring resistor element 6 and the fixed resistor R12. Although employs a configuration for connecting the connection in parallel, in one embodiment of the present invention are shown in FIG. 7, a series connection of temperature measuring resistance element 5 and the resistance thermometer element 6,
Ru adopted a structure that connects the fixed resistor R11 and the series connection of the fixed resistor R12 in parallel. With this configuration, the abnormal state detection circuit 50 only needs to include one window comparator 58 that receives the voltage Vud at the connection point between the temperature measuring resistance element 5 and the temperature measuring resistance element 6 as an input.

[0052] If Explain with the embodiment of FIG. 7, the voltage Vud the connection point between the resistance thermometer element 5 and the resistance thermometer element 6 becomes "1.0 ± 0.5V" during normal operation On the other hand, when the resistance element 5 is disconnected, the voltage is 2 V, and when the resistance element 5 is short-circuited, the voltage is 0 V. When the resistance element 6 is disconnected, the voltage is 0 V. When the resistance element 6 is short-circuited, the voltage is 2 V.
Is to determine whether or not a failure has occurred in the resistance temperature measuring elements 5 and 6 by judging the voltage value of the voltage Vud. This
Thus, according to one embodiment of the present invention shown in FIG.
Just prepare the window comparator 58 of
Of the resistance element 5 and the resistance element 6
At least one of them can detect whether a failure has occurred
Become like

The window comparator used in the abnormal state detection circuit 50 is not limited to the circuit configuration shown in FIG. 3, but can be realized by another analog circuit or digitally.

FIG. 8A shows another example of a window comparator realized by an analog circuit. This FIG.
After the impedance of the input voltage Vin is lowered by the voltage follower U2, the window comparator shown in FIG. 8A has two constant voltage circuits Vth realized by the circuit configuration shown in FIG. Vin−Vth ”, and the comparator U3 compares the voltage VN generated by resistance division with the“ Vin + Vth ”,
A high level is output when “VN> Vin + Vth”, and the comparator U4 compares the voltage VN generated by resistance division with this “Vin−Vth”,
By outputting high levels when “Vin−Vth> VN” and outputting these high level outputs via the OR circuit U5, the window comparator characteristic shown in FIG. 4 is obtained.

FIG. 9 shows another example of the abnormal state detection circuit 50 which is realized digitally. Shown in Figure this
To abnormal state detecting circuit 50, the microcomputer MP
U, a multiplexer MPX, and an A / D converter.
Adopts a configuration in which n reference voltages VNi and n threshold voltages Vth-i are stored, and controls the multiplexer MPX to select n input voltages Vin-i to be detected, It is converted into a digital value using an A / D converter and read, and the absolute value of "Vin-i-VNi" is
It is configured to output an error message when it is determined whether it is larger than th-i and it is determined that at least one is larger than th-i. Here, the reason why the configuration for reading the known voltage Vp is adopted is that the configuration for obtaining the correct voltage value of the read input voltage Vin-i by using this is adopted.

[0056] The abnormal state detection circuit 50 in FIG. 9 above the onset
In the case of applying to the technology related to the above, the voltage VH at the connection point between the heater element 4 and the fixed resistor R1 shown in FIG.
Is input as Vin-1, and the voltage VR at the connection point between the ambient temperature resistance measuring element 7 and the fixed resistance R2 shown in FIG.
input as in-2 and shown in FIG.
The voltage Vu at the connection point between the resistor R11 and the fixed resistor R11 is input as Vin-3, and the temperature measuring resistor element 6 and the fixed resistor R shown in FIG.
The voltage Vd at the connection point with the terminal 12 is input as Vin-4.

Then, the reference voltage VN1 with respect to the voltage VH
Is set to 1.5 V, and the reference voltage VN with respect to the voltage VR is set.
2 is set to 1.5 V, and the reference voltage V with respect to the voltage Vu is set.
N3 is set to 1.0 V, reference voltage VN4 to voltage Vd is set to 1.0 V, threshold voltage Vth-1 to voltage VH is set to 0.5 V, and threshold voltage Vth-2 to voltage VR is set to 0. .5V and set the voltage Vu
0.5V is set as the threshold voltage Vth-3 for
0.5 V is set as the threshold voltage Vth-4 for d.

In response to this, the microcomputer MP
U has a voltage VH of 1.5 ± 0.5 V, a voltage VR of 1.5 ± 0.5 V, a voltage Vu of 1.0 ± 0.5 V, or a voltage Vd of 1.0 ± 0.5 V. By outputting an error message when the voltage falls outside 0 ± 0.5V, the heater element 4 /
The fact that a failure has occurred in the temperature measuring resistance elements 5, 6 / ambient temperature temperature measuring resistance element 7 is output to the outside.

[0059]

As described above, according to the present invention,
When adopting a configuration in which a flow rate of a fluid is detected using a flow rate sensor composed of a heater element and a temperature measuring resistance element that changes a resistance value by heat transfer caused by a fluid moving on the heater element. ,
During the measurement of the flow velocity, it is possible to always detect whether or not the flow velocity sensor is out of order.

The flow velocity sensor can be used to control the flow velocity of a fluid even in a system requiring high reliability despite being used in a poor environment such as a combustion control system. Measurement can be performed with high accuracy and high speed response.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an apparatus of the present invention.

FIG. 2 is an explanatory diagram of the technology related to the present onset Akira.

FIG. 3 is an example of a window comparator.

FIG. 4 is an explanatory diagram of characteristics of a window comparator.

5 is an embodiment of the present invention.

FIG. 6 is an explanatory view of art, which may be related to the onset Akira.

7 is an embodiment of the present invention.

FIG. 8 is another example of the window comparator.

FIG. 9 is another example of the abnormal state detection circuit.

FIG. 10 is an explanatory diagram of a flow rate sensor having a microfabricated diaphragm.

FIG. 11 is an explanatory diagram of a flow rate sensor having a microfabricated diaphragm.

[Explanation of symbols]

 Reference Signs List 4 heater element 5 temperature measuring resistance element 6 temperature measuring resistance element 7 ambient temperature temperature measuring resistance element 10 flow velocity detection device 20 flow velocity sensor 30 heat generation control circuit 40 temperature difference amplification circuit 50 abnormal state detection circuit

Claims (2)

(57) [Claims] A heater element formed on a thin-walled diaphragm member formed on a substrate; and a fluid formed on the diaphragm member and provided on both sides of the heater element to move on the heater element. Two temperature-measuring resistance elements for changing a resistance value by induced heat transfer; an ambient temperature-measuring resistance element formed on a portion of the substrate other than the diaphragm member to change a resistance value depending on an ambient temperature; element and a series connection between the ambient temperature the resistance thermometer element, two solid-constant resistance of the series connected in parallel
Is composed of a bridge circuit consists by connecting, and in the heater element and heater circuit for heating to a high temperature value of specified above ambient temperature, and the resistance thermometer element and the fixed resistance A sensor detection circuit configured by a bridge circuit for generating a voltage corresponding to the flow velocity of the fluid moving on the heater element, the heater element and the ambient temperature resistance element
By comparing the potential of the connection point with the specified reference value,
Further comprising a comparator circuitry and that gives test <br/> whether or not a failure that has occurred in at least one of the heater elements and the ambient temperature the resistance thermometer element, a flow rate detecting device according to claim. 2. A heater element formed on a thin diaphragm member formed on a substrate, and a fluid formed on the diaphragm member and provided on both sides of the heater element to move on the heater element. Two temperature-measuring resistance elements for changing a resistance value by induced heat transfer; an ambient temperature-measuring resistance element formed on a portion of the substrate other than the diaphragm member to change a resistance value according to an ambient temperature; is composed of a bridge circuit composed of the elements and the ambient temperature the resistance thermometer element and the fixed resistor, and a heater circuit for heating the heater element to a temperature value of specified above ambient temperature, the two temperature measurement resistors and element in the series connection, the two solid <br/> constant resistance of structure by a series connection connected in parallel A sensor detection circuit configured to generate a voltage corresponding to the flow velocity of the fluid moving on the heater element, and a potential at a connection point of the two resistance temperature elements to a predetermined reference value. by comparison, further comprising a window comparator circuits that produce test <br/> whether or not a failure that has occurred in at least one of the two resistance thermometer element, a flow rate detecting device according to claim.