JP3237772B2 - Stacked resistor precursor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to, for example, a temperature sensor,
The present invention relates to a multilayer resistor used for a sensor that detects a change in a resistance value, such as a flow sensor and a level sensor.

[0002]

2. Description of the Related Art Japanese Unexamined Patent Publication (Kokai) No. 64-65427 discloses a platinum temperature sensor in which a platinum resistance pattern is provided between a plurality of plate-like ceramic sheets. It is described that cutting is performed by cutting an exposed resistance adjusting line (trimming pattern) applied and fired on a ceramic sheet.

[0003]

As in the platinum temperature sensor described in the above publication, a trimming pattern electrically connected to a resistor pattern and finely adjusting the resistance value of the entire resistor by cutting is provided on the surface of the multilayer resistor. In this case, oxidation is likely to occur from the cut portion after cutting the trimming pattern.
Therefore, W or the like cannot be used as the trimming pattern, and only a noble metal having good oxidation resistance (for example, Pt or the like) can be used.

Further, since the ceramic sheet on which the trimming pattern of the platinum temperature sensor described in the above publication is formed has many through holes, cracks are easily generated in the patterns of the through holes. Therefore, it is difficult to use the device under a severe temperature cycle or at a high temperature. further,
Mass production is not easy either.

An object of the present invention is to provide a multilayer resistor which solves the above-mentioned problems of the conventional technology.

[0006]

According to the present invention, the above object can be achieved by the following multilayer resistor precursor and a method of manufacturing a multilayer resistor.

[0007] A laminated ceramic sheet obtained by simultaneously and integrally firing a laminated green sheet having a conductor pattern and a trimming pattern connected in parallel between layers.
A type resistor precursor, the conductive pattern and trimming pattern connected in parallel in the interlayer of the laminated ceramic sheet, the end faces the trimming pattern than the conductive pattern, the lamination interface of the previous SL laminated ceramic sheet is exposed stacked resistor precursors are embedded in the region close to.

[0008] A method of manufacturing a multilayer resistor for removing a trimming pattern of the multilayer resistor precursor together with ceramic.

The conductor pattern and the trimming pattern connected in parallel to the conductor pattern are embedded in the ceramic and have a small pattern area exposed by cutting, and have high durability. Further, by providing the trimming pattern extending to a region near the end face, the trimming pattern can be easily cut.

[0010] Preferably, providing the trimming pattern shortest distance from the same end face <br/> Ru different name 2 or more. As a result, the resistance value can be changed stepwise according to the polishing distance from the end face, so that the resistance region that can be trimmed is widened. or,
These trimming patterns need not necessarily be provided between the common ceramic sheets.

Preferably, three or more ceramic sheets on which a conductor pattern is formed are laminated. With this structure, the resistance value can be increased, and heat generation of the conductor pattern portion that occurs when converting a change in the resistance value into an output such as a voltage can be prevented.

Preferably, a method of laminating the green sheets on which the above-described patterns are formed and simultaneously firing them to obtain a laminated resistor precursor is rich in mass productivity.

As a means for trimming, a ceramic portion having a trimming pattern is cut or polished. According to this method, the area of the trimming pattern exposed by cutting or the like is very small, and the durability is excellent.

As a method of further reducing the exposure of the pattern, it is sufficient to mold the cut portion with a mold, for example, a sealing mold with glass. Usually, it is convenient to provide a trimming pattern on the output take-out side to be molded as a sensor. good.

Further, the conductor pattern and the trimming pattern may be those containing metal as a main component, and W, Pt or the like can be used. However, Pt is particularly excellent as a material that can withstand high temperatures and the like.

[0016]

(Example 1) An example of a multilayer resistor precursor according to the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of an example of the multilayer resistor precursor of the present invention, and FIG. 2 is a plan view showing the precursor of FIG. 1 exploded for each ceramic sheet.

The resistor precursor of FIG. 1 includes a coat layer C, a ceramic sheet 10 provided with a conductor pattern 11, and a ceramic sheet 20 provided with a conductor pattern 21 and trimming patterns T1 and T2 connected in parallel with the conductor pattern. And a ceramic sheet 30 provided with a conductor pattern 31. The conductor patterns 11, 21 and 31 are electrically connected in series via through holes in the ceramic sheet. A terminal pattern 02 is formed on the surface of the coat layer C and is connected to a conductor pattern via a through hole. A terminal pattern 32 is formed on the opposite surface (exposed surface) of the ceramic sheet 30 and a through hole is formed. Connected to the conductor pattern 31.

In the multilayer resistor, the end face A of the resistor precursor of FIG. 1 is polished by a predetermined length L and a trimming pattern T1 is formed.
Further, by cutting T2, it can be obtained by finely adjusting the resistance value to a desired value. This will be described with reference to FIG.

FIG. 3 shows a conductor pattern 21 provided on a ceramic sheet 20 (not shown) and trimming patterns T1 and T2 connected in parallel to the conductor pattern 21. By setting the polishing distance L from the end face A in FIG. 1 to a, only the trimming pattern T1 can be cut, and by setting the polishing distance L to b, both the trimming patterns T1 and T2 can be cut. . Therefore, a multilayer resistor having a changed resistance value can be obtained by polishing the resistor precursor.

Since the trimming pattern cut portion of the obtained multilayer resistor can be sufficiently separated from the conductor pattern, the oxidation resistance can be improved.

(Embodiment 2) FIG. 4 is a plan view showing a ceramic sheet 40 which can be used in place of the ceramic sheet 20 having the conductor pattern 21 and the trimming patterns T1 and T2 of FIG.

The ceramic sheet 40 includes the conductive pattern 4
1 and a trimming pattern T3. The trimming pattern T3 is connected in parallel with the conductor pattern 41, and reaches near the end face B on the lead extraction portion side. When the ceramic sheet 40 is used, the end surface on the lead take-out portion side can be polished by the length L 'to cut the trimming pattern T3 and change the resistance value of the resistor.

The lead extraction portion side of the resistor precursor is molded (glass sealed) at the time of assembly, so that the cut end surface of the trimming pattern T3 is not exposed to the surface, so that the oxidation resistance can be further improved. .

(Embodiment 3) FIG. 5 is a view showing an end face of another embodiment of the multilayer resistor precursor of the present invention.

B, C, D, E and F are conductor patterns to which trimming patterns are connected in parallel.
Is a conductor pattern having no trimming pattern. These patterns exist between the ceramic sheet S and the coat layers C1 and C2, and are electrically connected through through holes.

As described above, when the thickness of the layer is increased by forming a multilayer,
More accurate and easy trimming.

The shape of the stacked trimming patterns does not need to be constant, and the length, the number of trimming patterns, the distance between the trimming pattern and the end face, and the like can be changed.

[0029]

Stacked resistor precursor of the present invention according to the present invention is to obtain a laminated green sheets having the conductor pattern and trimming pattern connected in parallel to the layers by co-integrating firing a laminated ceramic sheet stacked resistor a precursor, the conductive pattern and trimming pattern connected in parallel in the interlayer of the laminated ceramic sheet, than the trimming pattern the conductive pattern, the area near the end face lamination interface before Symbol laminated ceramic sheet is exposed , The distance between the cut portion of the trimming pattern and the conductor pattern can be sufficiently increased, and the oxidation resistance can be improved. When coating the trimming pattern cut portion, the amount of the coating agent (for example, glass) can be reduced.

The method for manufacturing a multilayer resistor according to the present invention is a multilayer resistor sheet which is a multilayer ceramic sheet obtained by simultaneously and integrally firing a multilayer green sheet having a conductor pattern and a trimming pattern connected in parallel between layers. a body, conductor pattern and trimming pattern connected in parallel in the interlayer of the laminated ceramic sheet, than the trimming pattern the conductive pattern, the region close to the end face of the laminated interface prior Symbol laminated ceramic sheet is exposed Since the embedded trimming pattern of the multilayer resistor precursor of the present invention is cut together with the ceramic, the multilayer resistor can be manufactured easily and in large quantities, for example, by shaving off the end face of the multilayer body.

When a precursor having the same resistance value is trimmed to a target resistance value, the precursor can be stacked several times and the end face can be cut off, so that mass productivity is high.

[Brief description of the drawings]

FIG. 1 is a perspective view of an example of a multilayer resistor precursor according to the present invention.

FIG. 2 is a plan view showing the precursor of FIG. 1 disassembled for each ceramic sheet.

FIG. 3 is a diagram illustrating cutting of a trimming pattern;

FIG. 4 is a plan view showing a ceramic sheet having a conductor pattern and a trimming pattern.

FIG. 5 is a diagram showing an end face of another embodiment of the multilayer resistor precursor of the present invention.

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Satoshi Sugaya 14-18 Takatsuji-cho, Mizuho-ku, Nagoya Japan Special Ceramics Co., Ltd. (56) References JP-A-64-65427 (JP, A) JP-A Sho 64-65426 (JP, A) JP-A-64-13702 (JP, A)

Claims (4)

(57) [Claims] 1. A multilayer is laminated ceramic sheet obtained by laminating green sheets having conductor patterns and trimming pattern connected in parallel to the layers by co-integrating firing
A resistor precursor, the conductive pattern and trimming pattern connected in parallel in the interlayer of the laminated ceramic sheet, than the trimming pattern the conductive pattern, the end face of the laminated interface prior Symbol laminated ceramic sheet is exposed A multilayer resistor precursor buried in a near region. 2. The multilayer resistor precursor according to claim 1, wherein the multilayer resistor precursor has two or more trimming patterns having different shortest distances from the same end face. 3. A process according to claim 1 the method of fabricating the multilayer resistor, characterized in that cutting the trimming pattern of the multilayer resistor precursors described with ceramic in one 2. 4. A method of manufacturing a multilayer resistor according to claim 3, wherein said trimming pattern is cut together with ceramic by polishing and removing a laminated end face of said precursor.