JP3232772B2 - Color EL display panel - Google Patents
Color EL display panelInfo
- Publication number
- JP3232772B2 JP3232772B2 JP10862093A JP10862093A JP3232772B2 JP 3232772 B2 JP3232772 B2 JP 3232772B2 JP 10862093 A JP10862093 A JP 10862093A JP 10862093 A JP10862093 A JP 10862093A JP 3232772 B2 JP3232772 B2 JP 3232772B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- display panel
- color
- upper electrode
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明はエレクトロルミネッセン
ス(本明細書ではELと略称する)発光形の表示パネル
であって、カラーフィルタと組み合わせてカラー表示を
行なうカラーEL表示パネルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display panel of an electroluminescence (abbreviated as EL in this specification) light emitting type, and to a color EL display panel which performs color display in combination with a color filter.
【0002】[0002]
【従来の技術】EL表示パネルは薄形のフラットパネル
の利点のほか自己発光性である特長を有するが、現在ま
で実用化されているのは発光色が黄橙色のものに限られ
ているのでその多色表示化が望まれている。このために
は、EL発光膜を種々の発光色部分を配列した複合膜と
する手段もあるが、EL発光膜をほぼ白色で発光させて
カラーフィルタと組み合わせる手段の方がより簡単であ
る。図3はかかるカラーEL表示パネルの代表的な従来
例を示すものである。2. Description of the Related Art An EL display panel has the advantage of being self-luminous in addition to the advantages of a thin flat panel, but it has been practically used up to now because the emission color is limited to yellow-orange. Multicolor display is desired. For this purpose, there is a means for forming the EL light-emitting film as a composite film in which various light-emitting color portions are arranged, but a means for causing the EL light-emitting film to emit almost white light and combining with a color filter is simpler. FIG. 3 shows a typical conventional example of such a color EL display panel.
【0003】周知のように、EL表示パネルは絶縁膜11
と発光膜12の薄膜積層体10を互いに交差する細い条のパ
ターンに形成した多数の下部電極20と上部電極30により
挟み込んだ構造体を基板1に担持し、単色発光の場合に
は基板1を透明板にしてEL発光をそれを通して図の下
方に取り出すのが通例であるが、カラーフィルタ40と組
み合わせる場合にはそれを基板1の下面側に設けると画
像表示上のごく小さな画素とそれに対応する色フィルタ
部分の相互間に基板1の厚みに相当する間隔が明いて各
画素の表示上の混色が発生してしまうため、発光膜12か
らの表示光Ldを図示のように上方に取り出すようにして
カラーフィルタ40を薄膜積層体10の上部電極30側にでき
るだけ近接させて配置する。As is well known, an EL display panel has an insulating film 11.
And a thin film stack 10 of light emitting films 12 and a plurality of lower electrodes 20 and upper electrodes 30 formed in a pattern of thin stripes intersecting each other. The structure is carried on the substrate 1. It is customary to use a transparent plate to take out the EL light emission through the lower part of the figure. However, when combined with the color filter 40, if it is provided on the lower surface side of the substrate 1, a very small pixel on the image display and the corresponding pixel Since the distance corresponding to the thickness of the substrate 1 is large between the color filter portions and color mixture occurs on the display of each pixel, the display light Ld from the light emitting film 12 is taken out upward as shown in the figure. Thus, the color filter 40 is arranged as close as possible to the upper electrode 30 side of the thin film laminate 10.
【0004】発光膜12には例えば微量のCeおよびEuを含
むSrSを用いて 450〜650nm のほぼ白色の波長範囲でE
L発光させ、絶縁膜11によりこの発光膜12のふつうは両
側を被覆して薄膜積層体10とし、その上に配設する上部
電極30は表示光Ldを取り出すために例えばITO (イン
ジウム錫酸化物) の透明な導電性膜とする。色表示のた
めのカラーフィルタ40はアクリル樹脂等の赤, 緑, 青の
染料により着色された3色のフィルタ部分40r,40g,40b
からなり、これを下面に担持した透明基板2をスペーサ
3を介して接着等の手段で基板1と一体化する。このE
L表示パネルの駆動回路等との接続は下部電極20と上部
電極30のスペーサ3の外側への食み出し部分に多数のリ
ードを接合して行なう。The light emitting film 12 is made of, for example, SrS containing trace amounts of Ce and Eu, and emits light in a substantially white wavelength range of 450 to 650 nm.
The light emitting film 12 is caused to emit light, and the light emitting film 12 is usually covered on both sides with an insulating film 11 to form a thin film laminate 10. An upper electrode 30 disposed thereon is formed of, for example, ITO (indium tin oxide) for extracting display light Ld. ). The color filter 40 for color display is a filter portion 40r, 40g, 40b of three colors colored with red, green, and blue dyes such as acrylic resin.
The transparent substrate 2 having the transparent substrate 2 supported on the lower surface is integrated with the substrate 1 through a spacer 3 by means such as adhesion. This E
The connection to the drive circuit and the like of the L display panel is made by joining a large number of leads to the protruding portions of the lower electrode 20 and the upper electrode 30 outside the spacer 3.
【0005】[0005]
【発明が解決しようとする課題】しかし、上述のような
図3のカラーEL表示パネルではその駆動回路等の外部
回路との接続の信頼性が不充分な問題がある。これは下
部電極20や上部電極30にふつう上述のITOが用いら
れ、それと外部接続リードとの良好な接合が得られにく
いためである。もちろん、下部電極20の方は透明にする
必要はなく、これに通例のニッケル被覆のアルミを用い
ればリードとのはんだ付け接合により良好な接続が得ら
れるが、発光膜12を成膜した後に発光輝度を上げるため
600℃付近で熱処理を施す必要があるためその際にアル
ミが溶解してしまう問題があり、かつアルミの基板との
密着性も良好でない。下部電極20を耐熱性の高い純ニッ
ケルとしても基板との密着性が充分でない。また、上部
電極30に不透明な金属を用いることはもちろん許されな
い。However, the above-described color EL display panel shown in FIG. 3 has a problem that the reliability of connection with an external circuit such as a drive circuit is insufficient. This is because the above-mentioned ITO is generally used for the lower electrode 20 and the upper electrode 30, and it is difficult to obtain good bonding between the ITO and the external connection lead. Of course, it is not necessary to make the lower electrode 20 transparent, and a good connection can be obtained by soldering and joining with a lead if usual nickel-coated aluminum is used. To increase brightness
Since heat treatment needs to be performed at around 600 ° C., there is a problem that aluminum is dissolved at that time, and the adhesion of the aluminum to the substrate is not good. Even if the lower electrode 20 is made of pure nickel having high heat resistance, the adhesion to the substrate is not sufficient. It is of course not allowed to use an opaque metal for the upper electrode 30.
【0006】このような事情から本発明の目的はカラー
フィルタを用いるEL表示パネルの下部電極および上部
電極の外部回路との接続作業を容易にしかつ接続の信頼
性を高めることにある。[0006] In view of such circumstances, an object of the present invention is to facilitate the work of connecting the lower electrode and the upper electrode of an EL display panel using a color filter to an external circuit and improve the reliability of the connection.
【0007】[0007]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明によれば、EL発光膜とその絶縁膜との薄
膜積層体を上下から電極により挟み込みかつカラーフィ
ルタを組み合わせてなる表示パネルにおいて、下部電極
とその端子膜を、薄膜積層体を担持する絶縁基板に密着
する下地膜とその表面を覆う金属膜とが組み合わされる
複合膜として形成し、上部電極を透明導電性膜から形成
し、発光膜から発生する表示光を上部電極側からカラー
フィルタを介してパネル外に取り出し、かつ下部電極を
端子膜を介して外部回路と接続するようにしたカラーE
L表示パネルであって、下地膜として、インジウム錫酸
化物もしくはクロム、タングステン、モリブデン、タン
タルから選ばれる金属を用いるとともに、金属膜とし
て、ニッケルもしくはニッケル合金、銅、金から選ばれ
る金属を用いることとする。According to the present invention, there is provided a display comprising a thin film stack of an EL light emitting film and an insulating film sandwiched between electrodes from above and below and a combination of color filters. In the panel, the lower electrode and its terminal film are formed as a composite film combining a base film that adheres to the insulating substrate carrying the thin film laminate and a metal film that covers the surface, and the upper electrode is formed from a transparent conductive film Then, the display light generated from the light emitting film is taken out of the panel from the upper electrode side via a color filter, and the lower electrode is connected to an external circuit via a terminal film.
In an L display panel, indium tin oxide or a metal selected from chromium, tungsten, molybdenum, and tantalum is used as a base film, and a metal selected from nickel or a nickel alloy, copper, and gold is used as a metal film. And
【0008】上記の構成で、複合膜の下地膜にはITO
を、金属膜にはニッケルを用いることが特に有利であ
る。下地膜としてのITOもしくはクロム、タングステ
ン、モリブデン、タンタルは、絶縁基板に対して密着性
が良好である。また、金属膜としてのニッケルもしくは
ニッケル合金、銅、金は、600℃以上の融点を有しか
つはんだ付け接合が容易である。尚、上部電極を下部電
極とは別個に設けられた複合膜からなる端子膜と接続
し、かつ上部電極を該端子膜を介して外部回路と接続す
ると良い。また、係る下地膜と金属膜とを複合化するに
は、金属膜をめっき法、特に無電解めっき法により所定
パターンに形成された下地膜の上に選択的に被覆するこ
とが実用上有利である。[0008] In the above structure, the base film of the composite film is made of ITO.
It is particularly advantageous to use nickel for the metal film. ITO or chromium, tungsten, molybdenum, or tantalum as a base film has good adhesion to an insulating substrate. Nickel or a nickel alloy, copper, or gold as a metal film has a melting point of 600 ° C. or higher and is easily soldered and joined. Note that the upper electrode is preferably connected to a terminal film made of a composite film provided separately from the lower electrode, and the upper electrode is preferably connected to an external circuit via the terminal film. In addition, in order to composite such an underlayer and a metal film, it is practically advantageous to selectively coat the metal film on the underlayer formed in a predetermined pattern by a plating method, particularly an electroless plating method. is there.
【0009】[0009]
【作用】本発明は、カラーフィルタを用いる表示パネル
の場合に透明とする必要のない下部電極側を下地膜と金
属膜とからなる複合膜として、下地膜には絶縁基板と密
着性が良好な材料を、金属膜には接続に際してリード等
との接合性が良好な材料をそれぞれ用いることにより、
下部電極の絶縁基板との良好な密着性と外部接続の高い
信頼性を両立させることを可能とし、表示光を通すため
に透明膜とする必要がある上部電極にはITO等の透明
な導電性膜を用いる。上部電極用の端子膜として下部電
極用と同じであるがそれとは別個に複合膜を設けて、こ
れに上部電極を接続することにより、上部電極側でも外
部接続の信頼性を高めることができる。According to the present invention, in the case of a display panel using a color filter, the lower electrode, which does not need to be transparent, is a composite film composed of a base film and a metal film, and the base film has good adhesion to an insulating substrate. By using a material and a material that has good bondability with the lead etc. when connecting to the metal film,
It is possible to achieve both good adhesion of the lower electrode to the insulating substrate and high reliability of external connection, and it is necessary to use a transparent film for transmitting display light. Use a membrane. As a terminal film for the upper electrode, which is the same as that for the lower electrode, a composite film is separately provided, and the upper electrode is connected to the composite film, whereby the reliability of the external connection can be improved on the upper electrode side.
【0010】[0010]
【実施例】以下、図面を参照して本発明の実施例を説明
する。図1に本発明によるカラーEL表示パネルの実施
例を断面図と絶縁基板側の上面図により示し、図2にそ
の異なる実施例を要部の断面図により示す。これらの図
の図3との対応部分に同じ符号が付けられているので、
従来と同じである重複部分に対する説明は適宜省略する
こととする。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of a color EL display panel according to the present invention by a sectional view and a top view on the insulating substrate side, and FIG. 2 shows a different embodiment by a sectional view of a main part. Since the same reference numerals are given to the corresponding portions of FIG. 3 and FIG.
The description of the same overlapping portions as in the related art will be omitted as appropriate.
【0011】図1(a) の断面図では絶縁基板1側と透明
基板2側を相互に若干離した状態で示す。絶縁基板1は
例えばガラス板であって、その上面に下地膜21と金属膜
22の複合膜である下部電極20が図1(b) に示すように横
方向に細長い条のパターンで多数並べて設けられる。下
地膜21には絶縁基板1に対して密着性が良好な例えばI
TOを用い、スパッタ法や真空蒸着法により 0.2μm程
度の薄い膜厚にこれを成膜した後、フォトレジスト膜を
マスクとして塩酸と硝酸の10%の混合液によりエッチン
グを施して上述のパターンとする。金属膜22にははんだ
付け性が良好なNiを用い、この実施例ではこれを選択的
な無電解めっき法により下地膜21の上に被覆する。この
ため、塩化錫系の増感液と塩化パラジュウム系の活性化
液に順次浸漬した後、80℃の無電解めっき液に数分間浸
漬することによりNiを下地膜21の上に例えば 0.6μmの
膜厚で被覆して金属膜22とする。In the sectional view of FIG. 1A, the insulating substrate 1 side and the transparent substrate 2 side are shown in a state where they are slightly separated from each other. The insulating substrate 1 is, for example, a glass plate, and a base film 21 and a metal film
As shown in FIG. 1B, a large number of lower electrodes 20, which are 22 composite films, are provided side by side in an elongated strip pattern. The base film 21 has good adhesion to the insulating substrate 1 such as I
After forming a thin film having a thickness of about 0.2 μm using a sputtering method or a vacuum evaporation method using TO, and using a photoresist film as a mask, the film is etched with a mixed solution of 10% hydrochloric acid and nitric acid to form the pattern described above. I do. Ni having good solderability is used for the metal film 22, and in this embodiment, the Ni is coated on the base film 21 by a selective electroless plating method. Therefore, after sequentially immersing in a tin chloride-based sensitizing solution and a palladium chloride-based activating solution, and then immersing in an electroless plating solution at 80 ° C. for several minutes, Ni is placed on the underlying film 21 to a thickness of, for example, 0.6 μm. The metal film 22 is formed by coating with a film thickness.
【0012】このように複合膜の下部電極20を形成する
際、この実施例では図1(b) に示すようにそれらの端部
を左右交互に絶縁基板1の周縁まで延ばして下部電極20
用のやや広幅の端子膜23とする。またこれと同時に、本
発明では上部電極30用に同じ複合膜からなる端子膜31を
下部電極20用とは別個にこの実施例では絶縁基板1の上
下の周縁部に図1(b) に示すように並べて作り込んでお
く。In forming the lower electrode 20 of the composite film in this manner, in this embodiment, as shown in FIG. 1 (b), the ends thereof are alternately extended right and left to the periphery of the insulating substrate 1, and the lower electrode 20 is formed.
A slightly wider terminal film 23 for use. At the same time, in the present invention, a terminal film 31 made of the same composite film for the upper electrode 30 is separately provided on the upper and lower peripheral portions of the insulating substrate 1 in this embodiment, as shown in FIG. Side by side.
【0013】発光体としての薄膜積層体10はこの実施例
では絶縁膜11で発光膜12を両側から挟み込む構造とされ
る。絶縁膜11としては通例の窒化シリコン等をスパッタ
法等により 0.2μm程度の膜厚に成膜し、発光膜12には
白色で発光させるため例えば各 0.1%のCeとEuを含むSr
Sを電子ビーム蒸着法により 300℃程度の基板温度で0.
8μm程度の膜厚に成膜した上で、その結晶性を上げて
発光輝度を上げるため550℃, 1hr の熱処理を施す。こ
れにより 450〜650nm の波長範囲内で高輝度で白色発光
する発光膜12が得られる。In this embodiment, the thin film laminate 10 as a light emitting body has a structure in which a light emitting film 12 is sandwiched between insulating films 11 from both sides. As the insulating film 11, a usual silicon nitride or the like is formed to a thickness of about 0.2 μm by a sputtering method or the like, and the light emitting film 12 is made of, for example, Sr containing 0.1% of Ce and Eu to emit white light.
S was evaporated by electron beam evaporation at a substrate temperature of about 300 ° C.
After forming a film having a thickness of about 8 μm, a heat treatment is performed at 550 ° C. for 1 hour to increase the crystallinity and the emission luminance. As a result, a light emitting film 12 that emits white light with high luminance in the wavelength range of 450 to 650 nm is obtained.
【0014】上部電極30には透明導電性材料であるIT
Oを 0.2μm程度の膜厚に成膜した上で、前述の下地膜
11の場合と同じ要領で図1(b) に示すように縦方向に細
長い条を多数並べたパターンに形成するが、本発明では
この際に上部電極30を図示のように交互に上下に接続部
30aが突出するパターンに形成し、この接続部30aを介
して上部電極30を前述の複合膜の端子膜31と接続する。
これで絶縁基板1側が図1(a) の状態になる。この実施
例では、モザイク状に配列された赤, 緑, 青のフィルタ
部分40r,40g,40b からなるカラーフィルタ40は透明基板
2の下面に担持されており、透明基板2がスペーサ3を
介し接着等の手段で絶縁基板1側と結合される完成状態
では上部電極30にごく近接して配置される。The upper electrode 30 is made of IT which is a transparent conductive material.
O was deposited to a thickness of about 0.2 μm,
As shown in FIG. 1B, in the same manner as in the case of FIG. 11, a pattern is formed in which a number of elongated strips are arranged in the vertical direction. In this invention, however, the upper electrodes 30 are alternately connected up and down as shown in FIG. Department
The upper electrode 30 is connected to the above-described terminal film 31 of the composite film through the connecting portion 30a.
Thus, the insulating substrate 1 is in the state shown in FIG. In this embodiment, a color filter 40 composed of mosaic-arranged red, green, and blue filter portions 40r, 40g, and 40b is carried on the lower surface of the transparent substrate 2, and the transparent substrate 2 is bonded via a spacer 3. In the completed state in which it is joined to the insulating substrate 1 by such means as above, it is arranged very close to the upper electrode 30.
【0015】この完成状態のカラーEL表示パネル50の
表示駆動回路等との接続はリードを図1(b) の下部電極
20用の端子膜23と上部電極30用の端子膜31にはんだ付け
して行なうのがよい。両端子膜23と31の複合膜表面がこ
の実施例ではNiの金属膜22で覆われているのではんだ付
けが容易で確実な接続が得られる。また、下地膜21のI
TOに対し無電解めっき法で付けたNiの金属膜22の密着
性が非常に良好なので長期の使用期間に亘り高い接続信
頼性を保証できる。なお、本発明の実施面では下地膜21
にITOのほかCr, W, Mo, Ta等の絶縁基板1と密着性
のよい金属を,金属膜22にNiのほかNi合金, Cu, Au等の
融点が 600℃以上ではんだ付け等による接合が容易な金
属をそれぞれ必要に応じ適宜用いることができる。A lead is connected to the display drive circuit and the like of the color EL display panel 50 in the completed state by connecting the lead to the lower electrode shown in FIG.
It is preferable to perform soldering on the terminal film 23 for 20 and the terminal film 31 for the upper electrode 30. Since the composite film surface of the terminal films 23 and 31 is covered with the Ni metal film 22 in this embodiment, soldering is easy and reliable connection is obtained. The I of the underlayer 21 is
Since the adhesion of the Ni metal film 22 applied to the TO by the electroless plating method is very good, high connection reliability can be guaranteed over a long use period. Incidentally, in the embodiment of the present invention, the base film 21 is formed.
In addition to ITO, a metal with good adhesion to the insulating substrate 1 such as Cr, W, Mo, Ta, etc., is joined to the metal film 22 by soldering when the melting point of Ni, Ni alloy, Cu, Au, etc. is 600 ° C or more. Can be appropriately used as necessary.
【0016】図2に本発明の異なる実施例を図1(a) の
左側部分に相当する一部の断面図により示す。この実施
例の下部電極20は下地膜21と金属膜22の複合膜であるこ
とは前実施例と同じであるが、この複合膜を絶縁基板1
の全面に成膜した上でフォトエッチングにより細長い条
の下部電極20にパターンニングする。Niの金属膜22のエ
ッチングには硝酸水溶液を,ITOの下地膜21のエッチ
ングには前述の塩酸と硝酸の混合水溶液をそれぞれ用い
る。この実施例でも下地膜21のITO等に対し金属膜22
のNi等を無電解めっき法で被覆するのが密着性を高める
上で望ましい。さらに、この実施例では薄膜積層体10内
の発光膜13用にMnを発光中心として含むSrSをスパッタ
法等により前述と同様に基板温度300 ℃で 0.8μm程度
の厚みに成膜し、 550℃,1hrの熱処理を施すことにより
赤色領域から緑色領域に至る波長範囲内で高輝度発光さ
せる。FIG. 2 shows a different embodiment of the present invention by a partial sectional view corresponding to the left part of FIG. 1 (a). The lower electrode 20 of this embodiment is a composite film of a base film 21 and a metal film 22 as in the previous embodiment.
Is formed on the entire surface of the lower electrode 20, and patterning is performed on the elongated lower electrode 20 by photoetching. A nitric acid aqueous solution is used for etching the Ni metal film 22, and a mixed aqueous solution of hydrochloric acid and nitric acid is used for etching the ITO base film 21, respectively. Also in this embodiment, the metal film 22
It is desirable to coat Ni or the like by an electroless plating method in order to enhance adhesion. Further, in this embodiment, for the light emitting film 13 in the thin film laminate 10, SrS containing Mn as a light emission center is formed to a thickness of about 0.8 μm at a substrate temperature of 300 ° C. in the same manner as described above by a sputtering method or the like. By performing the heat treatment for 1 hour, high-luminance emission is performed in the wavelength range from the red region to the green region.
【0017】従って、この場合のカラーフィルタ41には
赤と緑のフィルタ部分41r, 41gからなるものを用いる
が、この実施例ではスペーサ3を接着剤4により絶縁基
板1の方にまず取り付けた上でカラーフィルタ41用の液
状材料をスペーサ3で囲まれた範囲に充填し、その半乾
燥ないしは半硬化の状態で赤と緑の染料によりフィルタ
部分41r, 41gを着色した後に完全乾燥ないし硬化させ
る。この後、スペーサ3に透明基板2を溝内の接着剤5
により固定して、カラーEL表示パネル50の図示の完成
状態とする。この図2の実施例では表示色が赤と緑の2
色である点等が若干異なるが、前実施例と同様に下部電
極20の端子膜23等に対する外部回路の接続をはんだ付け
等により容易かつ確実に行なうことができる。Therefore, in this case, the color filter 41 is composed of red and green filter portions 41r and 41g. In this embodiment, the spacer 3 is first attached to the insulating substrate 1 with the adhesive 4 and Then, the liquid material for the color filter 41 is filled in an area surrounded by the spacer 3, and the filter portions 41r and 41g are colored with red and green dyes in a semi-dried or semi-cured state, and then completely dried or cured. Thereafter, the transparent substrate 2 is attached to the spacer 3 with the adhesive 5 in the groove.
To complete the color EL display panel 50 as shown. In the embodiment of FIG. 2, the display colors are red and green.
Although the color is slightly different, the connection of the external circuit to the terminal film 23 and the like of the lower electrode 20 can be easily and reliably performed by soldering or the like as in the previous embodiment.
【0018】[0018]
【発明の効果】本発明では、カラーフィルタを利用する
表示パネルでは下部電極側を透明とする必要がない点に
着目して、下部電極とそれ用の端子膜を、絶縁基板に密
着性のよい下地膜と接続相手方との接合性がよい金属膜
とを組み合わせた複合膜とすることにより、その絶縁基
板との良好な密着性と外部との接続の高い信頼性を両立
させ、表示光を通す必要がある上部電極は透明な導電性
膜とした。また、本発明では、発光膜に必要な熱処理温
度で下部電極が劣化するおそれもない。さらに、上部電
極を下部電極用とは別個に設けた複合膜からなる端子膜
と接続することで、上部電極側でも外部接続の高い信頼
性が確保できる。本発明は、工程数の増加、特殊工程の
採用を必要とせずに容易に実施できる。本発明によれ
ば、カラーフィルタと組み合わせる表示パネルの利点を
生かして、コストが低く実用性の高いカラーEL表示パ
ネルを実現できる。According to the present invention, attention is paid to the fact that it is not necessary to make the lower electrode side transparent in a display panel using a color filter, and the lower electrode and the terminal film therefor have good adhesion to the insulating substrate. By forming a composite film that combines a base film and a metal film with good bonding properties to the connection partner, it achieves both good adhesion to the insulating substrate and high reliability of connection to the outside, and allows display light to pass through. The required upper electrode was a transparent conductive film. Further, in the present invention, there is no possibility that the lower electrode is deteriorated at a heat treatment temperature required for the light emitting film. Further, by connecting the upper electrode to a terminal film made of a composite film provided separately from that for the lower electrode, high reliability of external connection can be ensured even on the upper electrode side. The present invention can be easily implemented without requiring an increase in the number of steps and adoption of special steps. According to the present invention, a color EL display panel with low cost and high practicability can be realized by taking advantage of a display panel combined with a color filter.
【図1】本発明によるカラーEL表示パネルの実施例を
示し、同図(a) はその断面図、同図(b) は絶縁基板側の
上面図である。FIGS. 1A and 1B show an embodiment of a color EL display panel according to the present invention, wherein FIG. 1A is a cross-sectional view thereof, and FIG. 1B is a top view of an insulating substrate side.
【図2】本発明の異なる実施例を示すカラーEL表示パ
ネルの要部断面図である。FIG. 2 is a sectional view of a main part of a color EL display panel showing a different embodiment of the present invention.
【図3】従来のカラーEL表示パネルの断面図である。FIG. 3 is a cross-sectional view of a conventional color EL display panel.
1 絶縁基板 2 透明基板 3 スペーサ 10 薄膜積層体 11 絶縁膜 12 白色発光の発光膜 13 赤色および緑色発光の発光膜 20 下部電極 21 下地膜 22 金属膜 23 下部電極用の端子膜 30 上部電極 31 上部電極用の端子膜 40 カラーフィルタ 50 カラーEL表示パネル Ld 表示光 DESCRIPTION OF SYMBOLS 1 Insulating substrate 2 Transparent substrate 3 Spacer 10 Thin film laminated body 11 Insulating film 12 White light emitting film 13 Red and green light emitting film 20 Lower electrode 21 Underlayer 22 Metal film 23 Terminal film for lower electrode 30 Upper electrode 31 Upper Terminal film for electrode 40 Color filter 50 Color EL display panel Ld Display light
───────────────────────────────────────────────────── フロントページの続き (72)発明者 谷口 春隆 神奈川県川崎市川崎区田辺新田1番1号 富士電機株式会社内 (72)発明者 柴田 一喜 神奈川県川崎市川崎区田辺新田1番1号 富士電機株式会社内 (56)参考文献 特開 平2−162686(JP,A) 特開 平3−210789(JP,A) 特開 平2−94387(JP,A) 特開 昭59−48788(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05B 33/00 - 33/28 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Harutaka Taniguchi 1-1, Tanabe-Nitta, Kawasaki-ku, Kawasaki, Kanagawa Prefecture Inside Fuji Electric Co., Ltd. (72) Inventor Kazuki Shibata, Tanabe-Nitta, Kawasaki-ku, Kawasaki-ku, Kanagawa Prefecture No. 1 Fuji Electric Co., Ltd. (56) References JP-A-2-162686 (JP, A) JP-A-3-210789 (JP, A) JP-A-2-94387 (JP, A) JP-A Sho 59-48788 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H05B 33/00-33/28
Claims (3)
上下から電極により挟み込みかつカラーフィルタを組み
合わせてなる表示パネルにおいて、下部電極とその端子
膜を、薄膜積層体を担持する絶縁基板に密着する下地膜
とその表面を覆う金属膜とが組み合わされる複合膜とし
て形成し、上部電極を透明導電性膜から形成し、発光膜
から発生する表示光を上部電極側からカラーフィルタを
介してパネル外に取り出し、かつ下部電極を端子膜を介
して外部回路と接続するようにしたカラーEL表示パネ
ルであって、 下地膜として、インジウム錫酸化物もしくはクロム、タ
ングステン、モリブデン、タンタルから選ばれる金属を
用いるとともに、 金属膜として、ニッケルもしくはニッケル合金、銅、金
から選ばれる金属を用いることを特徴とするカラーEL
表示パネル 。 1. A EL luminescent film and the display panel thereof comprising a combination of entrapment and a color filter by the electrode thin film laminate of the insulating film from above and below, the terminal membrane and the lower electrode, carrying the thin film stack insulating substrate Underlayer that adheres to
And forming a composite film and the metal film are combined to cover the surface, forms the shape of the upper electrode of a transparent conductive film, a display light generated from the light emitting layer is taken out from the upper electrode side outer panel through a color filter and a color EL display panel to be connected to an external circuit via the pin layer of the lower electrodes, as a base film, an indium tin oxide or chromium, data
Metal selected from Ngustene, molybdenum and tantalum
Use and metal film such as nickel or nickel alloy, copper, gold
EL using a metal selected from the group consisting of:
Display panel .
おいて、上部電極を下部電極とは別個に設けられた複合
膜からなる端子膜と接続し、かつ上部電極を該端子膜を
介して外部回路と接続するようにしたカラーEL表示パ
ネル。 2. The color EL display panel according to claim 1,
The upper electrode is provided separately from the lower electrode.
Connected to a terminal film made of a film, and the upper electrode is connected to the terminal film.
Color EL display panel connected to an external circuit through
Flannel.
パネルにおいて、下地膜に対し金属膜を選択性めっき法
により被覆して複合膜とするようにしたことを特徴とす
るカラーEL表示パネル。3. An apparatus according to claim 1 or 2 color EL display panel according to a color EL display panel of the metal film to a base film coated with selective plating is characterized in that as a composite film .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10862093A JP3232772B2 (en) | 1993-05-11 | 1993-05-11 | Color EL display panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10862093A JP3232772B2 (en) | 1993-05-11 | 1993-05-11 | Color EL display panel |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06325870A JPH06325870A (en) | 1994-11-25 |
JP3232772B2 true JP3232772B2 (en) | 2001-11-26 |
Family
ID=14489418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10862093A Expired - Lifetime JP3232772B2 (en) | 1993-05-11 | 1993-05-11 | Color EL display panel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3232772B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002129345A (en) * | 2000-10-19 | 2002-05-09 | Sumitomo Osaka Cement Co Ltd | Liquid for light-sensitive coating for forming undercoat of selective plating |
JP4876274B2 (en) * | 2000-10-19 | 2012-02-15 | シャープ株式会社 | Manufacturing method of substrate with fine metal wiring |
JP4102776B2 (en) | 2004-05-31 | 2008-06-18 | シャープ株式会社 | Display device |
-
1993
- 1993-05-11 JP JP10862093A patent/JP3232772B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH06325870A (en) | 1994-11-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5804918A (en) | Electroluminescent device having a light reflecting film only at locations corresponding to light emitting regions | |
US20070066178A1 (en) | Organic light emitting device, manufacturing method thereof, and display unit | |
US4954746A (en) | Thin film electroluminescence displaying apparatus | |
JP2001148292A (en) | Organic electroluminescent device | |
JP2006339028A (en) | Manufacturing method of display device, and the display device | |
US5133036A (en) | Thin-film matrix structure for an electroluminescent display in particular | |
JPS63224190A (en) | El device and method of emitting light | |
JP3232772B2 (en) | Color EL display panel | |
JP2009064608A (en) | Evaporation mask, method for manufacturing same, and method for manufacturing display device | |
JP2001043981A (en) | Display device and manufacture of the same | |
JP2002343560A (en) | Organic electroluminescence device, electronic equipment | |
JP2003142259A (en) | Organic thin film light emitting display and manufacturing method of the same | |
JPH07130472A (en) | Electroluminescent element | |
JPH07320870A (en) | Thin film electroluminescent display device and manufacture thereof | |
JP4134757B2 (en) | EL display device | |
JP2000133450A (en) | Organic el panel | |
JP2001223079A (en) | Organic el display element | |
JPS60124393A (en) | Method of producing polycolor light emitting thin film el panel | |
JP2003045647A (en) | Electroluminescent lamp and its manufacturing method | |
JPS61260224A (en) | Electrode plate for color displaying device | |
JP2005183208A (en) | Display device and method of manufacturing the same | |
JPH0982475A (en) | Thin-film color el panel and its manufacture | |
JP2005274776A (en) | Display panel substrate, and method of forming leader wiring | |
JP2002083692A (en) | Organic electroluminescence device | |
JPH03112088A (en) | Thin film el element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20070921 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080921 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080921 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090921 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090921 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100921 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110921 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120921 Year of fee payment: 11 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120921 Year of fee payment: 11 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130921 Year of fee payment: 12 |
|
EXPY | Cancellation because of completion of term |