JP3232568U - Vacuum sintering furnace capable of heating body and multi-region temperature control - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heating body and a vacuum sintering furnace capable of controlling a multi-region temperature. A vacuum sintering furnace includes a closed box, a heating device and a heat insulating cylinder, the heating device includes a plurality of heating bodies evenly distributed outside the closed box, and the heating bodies are the same. It contains two heating bodies that have a structure and surround the sides of the sealed box, the heating bodies include a first heating structure and a second heating structure, and the tips of the first heating structure and the second heating structure are single-phase transformers. It is connected to the output terminal of the vessel, the ends of the first heating structure and the second heating structure are connected via a long connecting member, and the single-phase transformer, the first heating structure and the second heating structure form a current loop. Will be done. By heating the corresponding region with each heating body, the heating temperature of the heating body can be automatically adjusted, and a heating device composed of a plurality of heating bodies heats a plurality of regions of the vacuum sintering furnace. Thereby, the temperature uniformity in the vacuum sintering furnace can be controlled. [Selection diagram] Fig. 1

Description

This application claims the priority of Patent Document 1, the entire contents of which are incorporated herein by reference.

The present invention relates to the field of temperature control, particularly to a heater and a vacuum sintering furnace capable of multi-region temperature control.

In a vacuum sintering furnace, it is necessary to increase the space inside the furnace in order to improve productivity, but due to the increase in the space inside the furnace, the temperature in different regions inside the furnace usually has a large difference of> ± 10 ° C. As the resulting and increasing space in the furnace, in different regions during heating, the temperature difference becomes larger due to factors such as heat capacity, heating, adiabatic, usually> ± 20 ° C. On the other hand, the heat transfer of the heating element of the vacuum furnace is mainly due to radiation, but since the heat transfer efficiency of radiation at different temperatures (light intensity) is different, the temperature difference between the furnace regions at low temperature is high. As a result, the uniformity of the low temperature region of the vacuum furnace having a degreasing function directly affects the degreasing effect of the product, causing a deviation in the carbon content of the final product. At low temperatures, the degreasing process is performed and the temperature is generally ≤600 ° C. At high temperatures, the sintering process is performed and the temperature is generally ≥1000 ° C. , There is a big difference in product size before and after, and even high temperature sintering where the temperatures before and after are close cannot eliminate the influence of the previous degreasing process. Since the uniformity in the low temperature region and the uniformity in the high temperature region do not match, it cannot be compatible with actual production. Therefore, the uniformity of the temperature distribution is one of the very important indicators for testing the performance of the vacuum sintering furnace, and in the furnace, the temperature in each region such as front, middle, rear, top and bottom. The smaller the deviation, the better the controllability of the size and performance of the workpiece after sintering, the higher the yield, and the lower the production cost.

In a conventional vacuum sintering furnace, it is common to heat a closed box with an integrated heating device, but if the temperature difference between the front and back or the top and bottom is large, the resistance value is adjusted by adjusting the size of the heating element. In addition, it is insulated with imported insulation to thus reduce the value of the temperature difference in each region of the vacuum sintering furnace. Therefore, it is difficult and costly to adjust the temperature by the temperature control method of the conventional vacuum sintering furnace.

Filed April 02, 2018, Chinese patent application 201810283615.8, title of invention "heater and vacuum sintering furnace capable of multi-region temperature control"

An object of the present invention is to solve the problems that the temperature deviation between the upper and lower sides and the front and back of the conventional integrated heating device is large, the size and performance of the product are large, and the temperature controllability of the device is deteriorated. It is an object of the present invention to provide a heating body and a vacuum sintering furnace capable of multi-region temperature control in order to reduce the production cost of the knot and the production cost of the product.

In order to achieve the above object, the technical proposal of the present invention is as follows. A heating body, the heating body constitutes three adjacent side surfaces of a prismatic body, includes a first heating structure and a second heating structure, and the first heating structure includes a first electrode rod and a plurality of first heating bodies. The two adjacent first heating members, including the member and the plurality of first corner connecting members, are connected via one first corner connecting member, and the first corner connecting member is the prismatic body. The first heating member is located at the side ridge position, the first heating member is located at the side surface position of the square column, and the current output terminal of the first electrode rod is connected to the first heating member at the tip of the first heating structure. The current input terminal of the first electrode rod is connected to the first end of the output terminal of the single-phase transformer, and the second heating structure includes a second electrode rod, a plurality of second heating members, and a plurality of second corner connections. Two adjacent second heating members including the member are connected via one second corner connecting member, and the second corner connecting member is located at a side ridge position of the square column, and the first 2 The heating member is located at a side surface position of the square column, the current input terminal of the second electrode rod is connected to the second heating member at the tip of the second heating structure, and the current output terminal of the second electrode rod is connected. The first heating member at the end of the first heating structure and the second heating member at the end of the second heating structure are connected to the second end of the output terminal of the single-phase transformer via a long connecting member. Connected, the single-phase transformer, the first heating structure and the second heating structure form a current loop.

Preferably, the input terminal of the single-phase transformer is connected to the output terminal of the power controller, the control input terminal of the power controller is connected to the control output terminal of the PID controller, and the PV input terminal of the PID is a heated object. Connected to a thermocouple installed in the region, the thermocouple transmits a temperature measurement value of the object to be heated corresponding to the heating body to the PID controller, and the PID controller controls the output power of the power controller. By controlling the output power of the single-phase transformer, the heating temperature of the heating body is adjusted.

The current output terminal of the first electrode rod is provided with a screw and is connected to the first heating member at the tip of the first heating structure by a nut, and the current input terminal of the second electrode rod is provided with a screw. It may be connected to the second heating member at the tip of the second heating structure by a nut.

Both the first heating member and the second heating member may have a plate-like structure in which the inside is hollow and the edge is curved.

Both the first heating member and the second heating member may have a rectangular plate-like structure having a hollow inside.

The present invention is further a vacuum sintering furnace capable of multi-region temperature control, which includes a closed box, a heating device and a heat insulating cylinder, the closed box having a prismatic shape, and the heat insulating cylinder having a cylindrical or square pillar shape. The heating device includes a plurality of heating bodies that are installed between the heat insulating cylinder and the sealing box and are evenly distributed outside the sealing box to heat a plurality of regions of the sealing box. The heating body group includes two heating bodies each having the same structure and vertically surrounding the side surface of the closed box, and the heating bodies are distributed on three adjacent side surfaces of the closed box. The tip of the first heating structure is connected to the first end of the output terminal of the single-phase transformer, and the tip of the second heating structure is the output terminal of the single-phase transformer. The end of the first heating structure and the end of the second heating structure are connected to the second end of the single-phase transformer, the first heating structure and the second. Provided is a vacuum sintering furnace in which a current loop is formed by a heating structure.

The first heating structure includes a first electrode rod, a plurality of first heating members, and a plurality of first corner connecting members, and two adjacent first heating members have one first corner connecting member. The first corner connecting member is located at the side ridge position of the prismatic sealing box, the first heating member is located at the side surface position of the prismatic sealing box, and the first electrode is connected. The current output terminal of the rod is connected to the first heating member at the tip of the first heating structure, the current input terminal of the first electrode rod is connected to the first end of the output terminal of the single-phase transformer, and the second The heating structure includes a second electrode rod, a plurality of second heating members, and a plurality of second corner connecting members, and two adjacent second heating members are connected via one second corner connecting member. The second corner connecting member is located at the side ridge position of the prismatic sealing box, the second heating member is located at the side surface position of the prismatic sealing box, and the current of the second electrode rod is The input terminal may be connected to the second heating member at the tip of the second heating structure, and the current output terminal of the second electrode rod may be connected to the second end of the output terminal of the single-phase transformer. ..

The vacuum sintering furnace further includes a plurality of thermocouples, a plurality of PID controllers and a plurality of power controllers, and for the k-th heating body, the thermocouple is connected to the PV input terminal of the PID controller. , The temperature measurement value of the kth heated region of the sealed box corresponding to the kth heating body is transmitted to the PID controller, and the control output terminal of the PID controller is connected to the control input terminal of the power controller. The output terminal of the power controller is connected to the input terminal of the single-phase transformer corresponding to the k-th heating body, and the output power of the single-phase transformer is adjusted to obtain the k-th heating body. The heating temperature to the k-th heated region may be adjusted.

In order to heat a plurality of regions of the vacuum sintering furnace, the number of the heating bodies may be larger than 1.

The vacuum sintering furnace may further include an insulating material for separating the heating device from other parts in the vacuum sintering furnace.

Compared with the prior art, the present invention has the advantage that the heating temperature of each heating region is automatically adjusted by the PID in order to achieve uniform temperature control of the vacuum sintering furnace. The multi-region temperature control method has the effect that the temperature difference between the regions of the vacuum sintering furnace is small, the dynamic temperature response is good, and the temperature difference between the low temperature region and the high temperature region can be adjusted consistently. .. Temperature uniformity can be automatically achieved even in a large volume furnace type, and compared to the conventional heating method, in a vacuum sintering furnace of the same volume, the value of the temperature difference between different regions is significantly reduced, and the heat insulating material The demand for itself is also reduced, and the cost is further reduced. Heating a vacuum sintering furnace using the heating device of the present invention improves the yield of the whole furnace, increases the production volume, and the temperature deviation in some areas results in product size, carbon content, appearance and density. The traditional problem of non-standards is solved, the heating rate is increased, the heating process time is shortened, and the cost is saved.

Schematic diagram of the structure of the heating body of the present invention Developmental schematic diagram of the heating body of the present invention Schematic cross-sectional view of the vacuum sintering furnace of the present invention Schematic diagram of the structure of the heating device in the vacuum sintering furnace of the present invention Schematic diagram of a plurality of heating bodies of a heating device in the vacuum sintering furnace of the present invention Schematic diagram of distribution of temperature measurement points in the furnace according to the embodiment of the present invention

The purpose of the present invention is to solve the problems that the temperature deviation between the upper and lower sides and the front and back of the conventional integrated heating device is large, the deviation in the size and performance of the product is large, and the temperature controllability of the device is deteriorated. It is an object of the present invention to provide a heating body and a vacuum sintering furnace capable of multi-region temperature control in order to reduce the production cost of the knot and the production cost of the product.

Hereinafter, the present invention will be further described with reference to the drawings.
The present invention will be described in more detail with reference to specific examples.

FIG. 1 is a schematic structural diagram of the heated body of the present invention. As shown in FIG. 1, the heated body constitutes three adjacent side surfaces of the prismatic body and has a convex shape. The heating body includes a first heating structure 1 and a second heating structure 2, and the first heating structure 1 includes a first electrode rod 1-1, a plurality of first heating members 1-2, and a plurality of first corners. The two adjacent first heating members 1-2 including the part connecting member 1-3 are connected via one first corner connecting member 1-3, and the first corner connecting member 1-3 is connected. The first heating member 1-2 is located at the side ridge position of the square pillar body, the first heating member 1-2 is located at the side surface position of the square pillar body, and the current output terminal of the first electrode rod 1-1 is the first heating structure 1. The current input terminal of the first electrode rod 1-1 is connected to the first end of the output terminal of the single-phase transformer, and the current output terminal of the first electrode rod 1-1 is connected to the first heating member at the tip. , Screws are provided, and are fixed and connected to the first heating member 1-2 by the nuts 1-4. The first heating member 1-2 and the first corner connecting member 1-3 are also connected by bolts and nuts.

Similarly, the second heating structure 2 has the same structure as the first heating structure 1, and has a second electrode rod 2-1 and a plurality of second heating members 2-2 and a plurality of second corner connecting members 2-. The two adjacent second heating members 2-2 including 3 are connected via the second corner connecting member 2-3, and the second corner connecting member 2-3 is located at the side ridge of the square column. The second heating member 2-2 is located at a side surface position of the square column body, and the current input terminal of the second electrode rod 2-1 is attached to the second heating member at the tip of the second heating structure 2. It is connected, and the current output terminal of the second electrode rod 2-1 is connected to the second end of the output terminal of the single-phase transformer.

The first heating member at the end of the first heating structure 1 and the second heating member at the end of the second heating structure 2 are connected via a long connecting member 3, and the single-phase transformer (not shown). A current loop is formed by the first heating structure 1, the elongated connecting member 3, and the second heating structure 2.

The structures of the first heating member and the second heating member may be a plate-like structure having a hollow inside and a curved edge, a rectangular plate-like structure having a hollow inside, and the thickness of the heating member. And by reducing the width, the resistance is increased and the space is made compact. Also, by arranging in a curved line, the radiant area is greatly increased, and the object to be heated is heated more quickly and uniformly.

When the heating body is used, the heating temperature of the heating body can be adjusted by controlling the output power of the single-phase transformer with the PID controller. Specifically, the input terminal of the single-phase transformer is connected to the output terminal of the power controller, the control input terminal of the power controller is connected to the control output terminal of the PID controller, and the PV input terminal of the PID is the object to be heated. The thermocouple is connected to a thermocouple installed in the area of the above, and the thermocouple transmits the temperature measurement value of the object to be heated corresponding to the heating body to the PID controller, and the PID controller uses the output power of the power controller. By controlling the above, the output power of the single-phase transformer is controlled to adjust the heating temperature of the heated body to the area to be heated.

FIG. 2 is a developed schematic view of the heating body of the present invention. As shown in FIG. 2, the heating body constitutes a single-phase circuit, and current is taken out from the first end of the output terminal of the single-phase transformer, and the first electrode rod 1-1 and the first heating member 1- 2. It flows through the long connecting member 3, the second heating member 2-2, and the second electrode rod 2-1 and enters the second end of the single-phase transformer output terminal.

FIG. 3 is a schematic cross-sectional view of the vacuum sintering furnace of the present invention. As shown in FIG. 3, the vacuum sintering furnace includes a closed box 4, a heating device 5, and a heat insulating cylinder 6 arranged inside the furnace body 7.

The airtight box 4 has a prismatic shape, the heating device 5 is installed between the heat insulating cylinder 6 and the airtight box 4, and the airtight box guide rail 8 is attached to the bottom surface of the airtight box 4. Support 4. The heating device 5 includes a plurality of heating bodies that are uniformly distributed outside the closed box 4 and uniformly surround the closed box 4.

The heating body group includes two heating bodies each having the same structure and vertically surrounding the side surface of the closed box 4, and the heating body has the heating body structure shown in FIG. The heating body is distributed on three adjacent side surfaces of the closed box 4, includes a first heating structure and a second heating structure, and the tip of the first heating structure is the first output terminal of the single-phase transformer. It is connected to one end, the tip of the second heating structure is connected to the second end of the output terminal of the single-phase transformer, and the end of the first heating structure and the end of the second heating structure are elongated. Connected via a connecting member 3, the single-phase transformer, the first heating structure, and the second heating structure form a current loop. The first heating structure includes a first electrode rod, a plurality of first heating members, and a plurality of first corner connecting members, and two adjacent first heating members have one first corner connecting member. The first corner connecting member is located at the side ridge position of the prismatic sealing box, the first heating member is located at the side surface position of the prismatic sealing box, and the first electrode is connected. The current output terminal of the rod is connected to the first heating member at the tip of the first heating structure, and the current input terminal of the first electrode rod is connected to the first end of the output terminal of the single-phase transformer. The two heating structure includes a second electrode rod, a plurality of second heating members, and a plurality of second corner connecting members, and two adjacent second heating members are interposed via one second corner connecting member. Connected, the second corner connecting member is located at the side ridge position of the prismatic sealing box, the second heating member is located at the side surface position of the prismatic sealing box, and the second electrode rod is connected. The current input terminal is connected to the second heating member at the tip of the second heating structure, and the current output terminal of the second electrode rod is connected to the second end of the output terminal of the single-phase transformer. When the heated bodies have the same structure and the heated bodies have the same structure, it means that they have the same components and the same structure composition. Normally, the overall shape may be exactly the same, but for special positions other parameters such as the width or curved shape of the heating member can be adjusted as needed. In FIG. 3, 5-1 is one electrode rod of one heating body in the heating body group.

The vacuum sintering furnace further includes a plurality of Thc thermocouples 9, a plurality of PID controllers and a plurality of power controllers, in which case the number of thermocouples, PID controllers, power controllers, single-phase transformers and heating elements corresponds. doing. For the k-th heating body, the thermocouple is connected to the PV input terminal of the PID controller, and the temperature measurement value of the k-th heated region of the sealed box corresponding to the k-th heating body is measured. It is transmitted to the PID controller, the control output terminal of the PID controller is connected to the control input terminal of the power controller, and the output terminal of the power controller becomes the input terminal of the single-phase transformer corresponding to the kth heating body. By adjusting the output power of the single-phase transformer corresponding to the k-th heating body, the heating temperature of the k-th heating body to the k-th heated region is adjusted. The k-th heating body is any heating body in the heating device.

Specifically, the structure of the heating device 5 is shown in FIG. 4, and FIG. 4 is a schematic view of the structure of the heating device in the vacuum sintering furnace of the present invention. Since the temperature deviation generated in the conventional furnace type is large in the six regions of front, middle, rear, upper, and lower, the vacuum sintering furnace can be divided into six regions for heating control. In FIG. 4, three sets of heating bodies are taken as an example, A1 is the first electrode rod of the first heating body in the first heating body group, and B1 is the first heating body in the first heating body group. The second electrode rod of the body, A4 is the first electrode rod of the second heater in the first heater group, and B4 is the second electrode rod of the second heater in the first heater group. , A2 is the first electrode rod of the first heating body in the second heating body group, B2 is the second electrode rod of the first heating body in the second heating body group, and A5 is the second heating body group. Is the first electrode rod of the second heating body in the above, B5 is the second electrode rod of the second heating body in the second heating body group, and A3 is the first electrode rod of the first heating body in the third heating body group. 1 electrode rod, B3 is the second electrode rod of the first heating body in the third heating body group, A6 is the first electrode rod of the second heating body in the third heating body group, and B6 is. It is the second electrode rod of the second heating body in the third heating body group. In the above heating body group, the closed box in the furnace is divided into six regions to control the heating temperature, and the first heating body of the first heating body group heats and controls the temperature of the upper part of the closed box, and the first The second heating body of the heating body group heats and controls the temperature of the lower part of the closed box. Similarly, the second and third heating body groups perform heating and temperature control for the corresponding area of the closed box, and in this way, the temperature is controlled separately by dividing into six areas of front, middle, rear, upper, and lower. By performing the above, temperature uniformity in the furnace is realized.

Of course, the larger the furnace type, the more designs the area will have, and the correspondingly more heating groups. Also, for example, there are problems such as large heat loss at the degreasing port and the tendency of the airflow to swirl, which increases the size of the product at the degreasing port and causes defects such as a gray appearance. In this case, an independent heating body can be designed to heat the region. On the other hand, when the furnace type is small, the area can be appropriately reduced to perform heating and temperature control.

FIG. 5 is a schematic circuit diagram of a plurality of heating elements of the heating device in the vacuum sintering furnace of the present invention. As shown in FIG. 5, a thermocouple that supplies power from six single-phase transformers, controls the heating power with a corresponding power controller, and feeds back the actual temperature (PV value) to the PID for each heated region. Thc is provided, the MV value is calculated according to the currently set temperature (SV value) by PID and output to the power controller, thereby the output power of the power controller so that the PV value approaches the currently set SV value as much as possible. To adjust.

One embodiment according to the present invention is as follows.

It is necessary to debug the furnace body before shipping, and among them, the temperature distribution is a required test item.

For example, when the set temperature in the furnace is 800 ° C., as shown in FIG. 6, the temperature is detected by a sensor at the positions of six different points in the furnace, and FIG. 6 shows the temperature in the furnace according to the embodiment of the present invention. It is a schematic distribution diagram of detection points, black dots indicate detection points, and the temperature detected at each detection point is as follows.
Point 1 is 800 ° C., point 2 is 810 ° C., point 3 is 795 ° C., point 4 is 800 ° C., point 5 is 805 ° C., and point 6 is 790 ° C.

In this case, point 1 is 800 ° C. and point 6 is 790 ° C.

At this time, when a temperature control design divided into two upper and lower regions is adopted, that is, when heating with two heating elements, points 1 and 6 are both in the lower region, so the temperature control is adjusted separately. Can not do it.

At this time, when the temperature control design divided into 6 regions is adopted, that is, when heating is performed by 6 heating bodies, the thermocouple in each region feeds back the detected actual temperature (PV value) to the PID. PID compares it with the set temperature (SV value). When it is detected that the temperature of the region where points 3 and 6 are located is lower than 800 ° C., the heating power is increased only in that region to raise the temperature (PV value) in this region to the SV value, and points 2 and 5 are located. When it is detected that the temperature in a certain region exceeds 800 ° C., the heating power is reduced only in that region, and the temperature (PV value) in this region is lowered to the SV value. The temperature of different regions in the furnace is controlled independently by monitoring the temperature of different regions in the furnace separately. As a result, temperature uniformity has the optimum effect.

As described above, when the volume of the furnace body is the same, the more regions where the temperature is controlled independently, the better the temperature uniformity in the furnace.

Hereinafter, the beneficial effects of the present invention will be described while comparing the differences with the prior art.
In the prior art, single region heating is common. The factors that affect the uniformity of the temperature distribution are as follows.
1. 1. Design: For example, the size of the volume of the furnace body: The larger the volume, the worse the temperature uniformity. Position of the connection port in the furnace body: For example, the heat loss at the pump port is large, or the heat loss is large because the cooler is installed somewhere.
2. Difference in insulation uniformity of the insulation itself.
3. 3. Heating uniformity: There is also a difference in uniformity in the resistance of the heating element itself. For example, graphite members do not always have the same resistance value even if they are made of the same material.
4. The effect of airflow in each region and the direction of airflow flow: For example, the temperature of the upper part is generally higher than the temperature of the lower part because hot gas flows upward.

In the prior art, temperature uniformity is maintained by:
1. 1. Imported high-grade materials are used as heat insulating materials to improve heat insulating performance.
2. Adjust the resistance of the exothermic material, for example, if the temperature difference between the front and back is large, adjust the resistance value before and after. (Adjustment is more difficult because it needs to be adjusted according to the shape of the designed exothermic material)
3. 3. Miniaturize the furnace type. That is, the temperature uniformity is improved by reducing the heating range.

Conclusion:
By the above method, the temperature uniformity of the conventional small furnace type can be controlled to <± 5 ° C., and the temperature uniformity of the large vacuum furnace can be controlled to <± 10 ° C. However, since the above method is expensive and difficult to adjust, a new temperature control method is expected to ensure temperature uniformity.

The present invention is as follows.
1. 1. Achieve temperature uniformity in each region through multi-region temperature control.
2. Different SV values are set, and the temperature uniformity of each region is adjusted and controlled separately by PID.
3. 3. Since the structure is simple, regions can be easily added. For example, the furnace type of the main reactor has two regions, but when the furnace mold is long, it can be designed into four regions.
4. The area of the heating element is large, for example, by being designed in an S shape, the area of heat generation is increased, the heating rate of the closed box is accelerated, and the temperature is uniform.
5. Since the heating element has a small cross-sectional area, is thin, and is designed to be compact, the effective utilization space is large.

effect:
1. 1. By compensating for the temperature deviation defect in each region by using a general heat insulating material, the temperature deviation defect existing in the heat insulating material itself can be compensated. (Reduced demand for insulation)
2. If the temperature difference is adjusted by adjusting the resistance as in the conventional case, it is difficult to adjust. And since the temperature difference of each furnace is different, it is inconvenient to adjust. (It is not necessary to adjust the temperature difference by adjusting the temperature difference)
3. 3. Temperature uniformity can be achieved even with a large volume furnace type, and the temperature uniformity can be controlled to <± 5 ° C.
4. Even in furnaces of the same volume, the temperature difference between different regions is significantly reduced. (In a furnace of the same volume, the more areas where the temperature is controlled independently, the more uniform the temperature in the space inside the furnace becomes.)
5. Good dynamic temperature response.
6. The difference between the low temperature region and the high temperature region can be adjusted consistently.
7. The yield of all furnaces increases, that is, the production volume increases. It solves the traditional problem of product size, carbon content, appearance, and density not reaching standards due to temperature deviations in some areas.
8. Due to the large area of the heating element, the temperature radiation is more uniform.
9. The heating rate is increased, the time required for the heating process is shortened, and the cost is reduced.
10. In the furnace type of the pressurizing furnace, the gas inside has a clear convection, which causes a significant temperature difference between the regions.

The above embodiments are provided solely for the purpose of illustrating the present invention and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the claims. Various equivalent substitutions and modifications made without departing from the spirit and scope of the invention are all covered by the scope of the invention.

Claims (10)

It ’s a heating body,
The heating body constitutes three adjacent side surfaces of a prismatic body, and includes a first heating structure and a second heating structure, and the first heating structure includes a first electrode rod, a plurality of first heating members, and a plurality of first corners. Two adjacent first heating members including the part connecting member are connected via one first corner connecting member, and the first corner connecting member is located at a side ridge position of the square column. The first heating member is located at a side surface position of the square column, the current output terminal of the first electrode rod is connected to the first heating member at the tip of the first heating structure, and the current input of the first electrode rod. The terminal is connected to the first end of the output terminal of the single-phase transformer,
The second heating structure includes a second electrode rod, a plurality of second heating members, and a plurality of second corner connecting members, and two adjacent second heating members have one second corner connecting member. The second corner connecting member is located at the side ridge position of the square pillar body, the second heating member is located at the side surface position of the square pillar body, and the current input terminal of the second electrode rod is located. It is connected to the second heating member at the tip of the second heating structure, and the current output terminal of the second electrode rod is connected to the second end of the output terminal of the single-phase transformer.
The first heating member at the end of the first heating structure and the second heating member at the end of the second heating structure are connected via a long connecting member, and the single-phase transformer, the first heating structure, and the said. A heating body characterized in that a current loop is formed by a second heating structure. The input terminal of the single-phase transformer is connected to the output terminal of the power controller, the control input terminal of the power controller is connected to the control output terminal of the PID controller, and the PV input terminal of the PID is in the area of the object to be heated. Connected to the installed thermocouple, the thermocouple transmits the temperature measurement value of the object to be heated corresponding to the heating body to the PID controller, and the PID controller controls the output power of the power controller. The heater according to claim 1, wherein the output power of the single-phase transformer is controlled to adjust the heating temperature of the heater. The current output terminal of the first electrode rod is provided with a screw and is connected to the first heating member at the tip of the first heating structure by a nut, and the current input terminal of the second electrode rod is provided with a screw. The heating body according to claim 1, wherein the heating body is connected to a second heating member at the tip of the second heating structure by a nut. The heating body according to claim 1, wherein both the first heating member and the second heating member have a plate-like structure in which the inside is hollow and the edge is curved. The heating body according to claim 1, wherein both the first heating member and the second heating member have a rectangular plate-like structure having a hollow inside. A vacuum sintering furnace capable of multi-region temperature control,
The sealing box includes a sealing box, a heating device and a heat insulating cylinder, the sealing box is prismatic, the heat insulating cylinder is cylindrical or prismatic, and the heating device is installed between the heat insulating cylinder and the sealing box. , A plurality of heating bodies that are evenly distributed outside the sealed box and heat a plurality of regions of the sealed box.
The heating body group includes two heating bodies each having the same structure and vertically surrounding the side surface of the closed box, and the heating bodies are distributed on three adjacent side surfaces of the closed box. The tip of the first heating structure is connected to the first end of the output terminal of the single-phase transformer, and the tip of the second heating structure is the output terminal of the single-phase transformer. The end of the first heating structure and the end of the second heating structure are connected to the second end of the single-phase transformer, the first heating structure and the second. A vacuum sintering furnace capable of multi-region temperature control, characterized in that a current loop is formed by a heating structure. The first heating structure includes a first electrode rod, a plurality of first heating members, and a plurality of first corner connecting members, and two adjacent first heating members have one first corner connecting member. The first corner connecting member is located at the side ridge position of the prismatic sealing box, the first heating member is located at the side surface position of the prismatic sealing box, and the first electrode is connected. The current output terminal of the rod is connected to the first heating member at the tip of the first heating structure, and the current input terminal of the first electrode rod is connected to the first end of the output terminal of the single-phase transformer.
The second heating structure includes a second electrode rod, a plurality of second heating members, and a plurality of second corner connecting members, and two adjacent second heating members have one second corner connecting member. The second corner connecting member is located at the side ridge position of the prismatic sealing box, the second heating member is located at the side surface position of the prismatic sealing box, and the second electrode is connected. Claim that the current input terminal of the rod is connected to the second heating member at the tip of the second heating structure, and the current output terminal of the second electrode rod is connected to the second end of the output terminal of the single-phase transformer. 6. The vacuum sintering furnace according to 6. The vacuum sintering furnace further includes a plurality of thermocouples, a plurality of PID controllers and a plurality of power controllers, and for the k-th heating body, the thermocouple is connected to the PV input terminal of the PID controller. , The temperature measurement value of the kth heated region of the sealed box corresponding to the kth heating body is transmitted to the PID controller, and the control output terminal of the PID controller is connected to the control input terminal of the power controller. The output terminal of the power controller is connected to the input terminal of the single-phase transformer corresponding to the k-th heating body, and the output power of the single-phase transformer is adjusted to adjust the output power of the k-th heating body. The vacuum sintering furnace according to claim 6, wherein the heating temperature to the k-th heated region is adjusted according to the above. The vacuum sintering furnace according to claim 6, wherein the number of heating bodies is larger than 1 in order to heat a plurality of regions of the vacuum sintering furnace. The vacuum sintering furnace according to claim 6, wherein the vacuum sintering furnace further includes an insulating material for separating the heating device and other parts in the vacuum sintering furnace.

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