JP3221896B2 - Joining structure and joining method of graphite and metal member - Google Patents
Joining structure and joining method of graphite and metal memberInfo
- Publication number
- JP3221896B2 JP3221896B2 JP29376891A JP29376891A JP3221896B2 JP 3221896 B2 JP3221896 B2 JP 3221896B2 JP 29376891 A JP29376891 A JP 29376891A JP 29376891 A JP29376891 A JP 29376891A JP 3221896 B2 JP3221896 B2 JP 3221896B2
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- metal member
- insert material
- joining
- reaction layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Ceramic Products (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、黒鉛と金属部材とを備
えた複合材において適用される黒鉛と金属部材の接合構
造と接合方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a joining structure and a joining method of graphite and a metal member applied to a composite material having graphite and a metal member.
【０００２】[0002]
【従来の技術】黒鉛を利用する機器において、例えばメ
カニカルシールのように耐摩耗性を要求される機械部品
や水冷炉壁のような耐熱性が要求される構造材、あるい
はスパッタリングターゲットやＸ線ターゲットのように
黒鉛を使いかつ冷却することが要求される部材におい
て、黒鉛にＣｕ系あるいはＮｉ系などの金属部材を積層
した複合材が用いられることがある。2. Description of the Related Art In equipment utilizing graphite, for example, mechanical parts such as mechanical seals which require abrasion resistance, structural materials requiring heat resistance such as water-cooled furnace walls, or sputtering targets or X-ray targets As described above, in a member requiring use of graphite and cooling, a composite material obtained by laminating a metal member such as a Cu-based or Ni-based material on graphite may be used.
【０００３】このような複合材においては、黒鉛と金属
部材との接合部の良否が複合材の品質を左右する要因と
なる。一般に黒鉛と金属部材を接合するには、ろう付け
および液相拡散接合が適していると言われているが、い
ずれにしても接合部の品質が問題になる。[0003] In such a composite material, the quality of the joint between the graphite and the metal member is a factor influencing the quality of the composite material. In general, it is said that brazing and liquid phase diffusion bonding are suitable for bonding graphite and a metal member, but in any case, the quality of the bonded portion is problematic.
【０００４】例えば図５に示される複合材１は、黒鉛２
とＣｕ製のバッキングプレート３がインサート材４を介
して接合されている。この複合材１は、例えばスパッタ
リングターゲットとして使用され、スパッタリング中に
発生する熱を冷却するためにバッキングプレート３側が
水冷される。For example, a composite material 1 shown in FIG.
And a Cu backing plate 3 are joined via an insert material 4. This composite material 1 is used, for example, as a sputtering target, and the backing plate 3 side is water-cooled in order to cool heat generated during sputtering.
【０００５】また、図６に示される複合材５は、Ｃｕ製
のカップ状金属部材６の外側に、インサート材７を介し
て円筒状の黒鉛８を取付けたものであり、この黒鉛８は
Ｃの特性Ｘ線を発生させるためのＸ線ターゲットとして
使用される。この複合材５の場合、真空中で黒鉛８に電
子ビームを照射する際に高温となるため、カップ状金属
部材６の内側が水冷される。The composite material 5 shown in FIG. 6 is obtained by attaching a cylindrical graphite 8 to the outside of a cup-shaped metal member 6 made of Cu via an insert material 7. Is used as an X-ray target for generating the characteristic X-rays. In the case of the composite material 5, when the graphite 8 is irradiated with an electron beam in a vacuum, the temperature becomes high, so that the inside of the cup-shaped metal member 6 is water-cooled.
【０００６】上述した複合材１，５を始めとして、黒鉛
と金属部材を接合する場合に接合界面に介在されるろう
材あるいは接合用のインサート層（この明細書では両者
を合わせてインサート材と呼ぶ）として、黒鉛と反応す
る金属（例えばＴｉ，Ｚｒ，Ｃｒ，Ｓｉ，Ｍｏ，Ｗ，
Ｖ，Ｔａ等）を含む箔を用いることが知られている。特
に、Ｔｉ，Ｚｒを含む活性金属ろうが多用される。In addition to the composite materials 1 and 5 described above, a brazing material or a bonding insert layer interposed at a bonding interface when graphite and a metal member are bonded (in this specification, both are referred to as an insert material). ) As a metal that reacts with graphite (for example, Ti, Zr, Cr, Si, Mo, W,
V, Ta, etc.). In particular, active metal brazing containing Ti and Zr is frequently used.
【０００７】[0007]
【発明が解決しようとする課題】しかしＴｉ，Ｚｒは黒
鉛との反応が激し過ぎて、Ｃへの侵食性が強く、そのた
め黒鉛にクラックを生じやすいなど、接合部の品質に問
題がある。一方、Ｍｏ，Ｗ，Ｖ，Ｔａは、実用的な反応
速度が得られる温度が一般には１３００℃以上必要であ
ることから、利用しにくく、接合に要するコストが高く
つくといった問題がある。However, Ti and Zr have a problem in the quality of the joint such that the reaction with graphite is so intense that they have a strong erosion property to carbon and that cracks easily occur in graphite. On the other hand, Mo, W, V, and Ta require a temperature at which a practical reaction rate can be generally obtained at 1300 ° C. or higher, so that they have a problem that they are difficult to use and the cost required for bonding is high.
【０００８】従って本発明の目的は、強度が高くかつ品
質の優れた接合部が得られるとともに、比較的低い温度
でも実用的な反応速度が得られるような黒鉛と金属部材
の接合構造と接合方法を提供することにある。Accordingly, an object of the present invention is to provide a joining structure and a joining method of graphite and a metal member which can obtain a joint having high strength and excellent quality and a practical reaction rate even at a relatively low temperature. Is to provide.
【０００９】[0009]
【課題を解決するための手段】上記目的を果たすために
開発された本発明の接合構造は、黒鉛と金属部材との間
にＣｒを含むインサート材を有し、かつ上記インサート
材と上記黒鉛との界面に、厚さ０．５μｍから２０μｍ
のクロム炭化物反応層が存在しかつ上記インサート材と
金属部材との界面が互いに接合されていることを特徴と
する。上記金属部材として、例えばＣｕまたはＣｕ合
金、あるいはＮｉまたはＮｉ合金などが使われる。A joint structure according to the present invention developed to achieve the above object has an insert material containing Cr between graphite and a metal member. Between 0.5μm and 20μm
Characterized in that the chromium carbide reaction layer exists and the interface between the insert material and the metal member is joined to each other. As the metal member, for example, Cu or Cu alloy, Ni or Ni alloy is used.
【００１０】また本発明による接合方法は、黒鉛と金属
部材との間にＣｒを含有する合金からなるインサート材
を配置し、上記黒鉛と金属部材とを互いに加圧した状態
で上記金属部材とインサート材が互いに接合する温度ま
で加熱するとともに、この加熱処理に伴って上記インサ
ート材と黒鉛との界面に厚さが０．５μｍから２０μｍ
のクロム炭化物反応層を生成させることを特徴とする。Further, in the joining method according to the present invention, an insert material made of an alloy containing Cr is arranged between graphite and a metal member, and the graphite member and the metal member are pressed against each other while the metal member and the metal member are pressed against each other. The material is heated to a temperature at which the materials are joined to each other, and a thickness of 0.5 μm to 20 μm is formed at the interface between the insert material and graphite due to the heat treatment.
Wherein a chromium carbide reaction layer is formed.
【００１１】上記インサート材は、Ｃｒを含む合金の箔
を使用したり黒鉛との接合面にＰ．Ｖ．Ｄ（蒸着，スパ
ッタリング）などによるコーティングで供給する。この
状態で、相手側の金属部材とろう付けや拡散接合を行
い、この接合時の加熱により、ＣｒとＣが反応して、接
合に適当なクロム炭化物反応層が生成される。The insert material may be made of an alloy foil containing Cr or may be made of P.I. V. It is supplied by coating such as D (evaporation, sputtering). In this state, brazing or diffusion bonding is performed with the counterpart metal member, and Cr and C react by heating during this bonding to form a chromium carbide reaction layer suitable for bonding.
【００１２】上記のように黒鉛とＣｒとを接触させた状
態で、７００℃以上に加熱すると、黒鉛とＣｒの界面に
おいて反応が自発的に進む。従って上記反応層を生成さ
せるためには、Ｃｒを何らかの手段でインサート材に適
当量含有させること、および黒鉛と相手金属部材とに良
好に接触させることが必要である。When the graphite and Cr are heated to 700 ° C. or more in a state where they are in contact with each other, the reaction proceeds spontaneously at the interface between the graphite and Cr. Therefore, in order to form the above-mentioned reaction layer, it is necessary that Cr be contained in the insert material by an appropriate amount by some means and that the graphite and the mating metal member be brought into good contact.
【００１３】これを実現するために、本発明では、イン
サート材としてＣｒを適当量含んだ合金、例えばＮｉ−
Ｃｒ系あるいはＣｕ−Ｃｒ系合金などを使用したり、
Ｐ．Ｖ．Ｄで必要量をコーティングする。但し、安定し
た反応層を得るには、Ｃｒの含有量を０．５％から３０
％程度にすると良い。In order to realize this, in the present invention, an alloy containing an appropriate amount of Cr, for example, Ni-
Use Cr-based or Cu-Cr-based alloys,
P. V. Coat required amount with D. However, in order to obtain a stable reaction layer, the content of Cr should be 0.5% to 30%.
%.
【００１４】接合時の条件としては、ＣｒとＣを反応さ
せるために７００℃から１２００℃程度の温度に加熱す
る必要がある。更には、接触界面の密着性を良くするた
めに０．０１kgｆ／mm2 ないし５kgｆ／mm2 程度の荷重
を負荷しておくとよい。ＣｒとＣは１２００℃以下の温
度で反応し、所定の反応層が得られる。この反応層が黒
鉛と金属部材の仲介層として存在する。As a condition for joining, it is necessary to heat to a temperature of about 700 ° C. to 1200 ° C. in order to cause Cr and C to react. Furthermore, to no 0.01 kgf / mm 2 in order to improve the adhesion of the contact surface you may want to load a load of about 5 kgf / mm 2. Cr and C react at a temperature of 1200 ° C. or less, and a predetermined reaction layer is obtained. This reaction layer exists as an intermediate layer between the graphite and the metal member.
【００１５】[0015]
【作用】黒鉛と反応する金属は数多く知られているが、
Ｃｒは反応の進み方が適当で、しかも反応層の強度が高
い。ＣｒとＣの反応をインサート材の種類および厚さや
接合時の負荷荷重あるいは接合温度等によって制御し、
インサート材と黒鉛との界面に厚さ０．５μｍから２０
μｍ、より望ましくは５μｍから１０μｍのクロム炭化
物反応層を生成させることにより、安定した接合状態
と、実用上十分な接合強度が得られる。[Action] Many metals that react with graphite are known,
Cr is suitable for the progress of the reaction, and the strength of the reaction layer is high. The reaction between Cr and C is controlled by the type and thickness of the insert material, the applied load during joining, the joining temperature, etc.
0.5μm to 20m thick at the interface between insert material and graphite
μm, more preferably 5-10 μm chromium carbon
By generating the object reaction layer, and stable bonding state, practically sufficient bonding strength can be obtained.
【００１６】上述したように本発明による接合構造は、
黒鉛とインサート材との接合界面にクロム炭化物反応層
（Ｃｒ3 Ｃ2 ，Ｃｒ7Ｃ3 ，Ｃｒ23Ｃ6 等）をもってい
る。すなわち（Ｃ−Ｃｒ）間は反応により接合され、こ
の反応層はインサート材の合金に対して拡散と複雑形状
によるアンカー効果により強固に接合された状態とな
る。インサート材と金属部材同志は原子の相互拡散など
により接合される。As described above, the bonding structure according to the present invention
It has the chromium carbide reaction layer at the bonding interface between the graphite and the insert material a (Cr 3 C 2, Cr 7 C 3, Cr 23 C 6 , etc.). That is, (C-Cr) is bonded by a reaction, and the reaction layer is firmly bonded to the alloy of the insert material by diffusion and an anchor effect due to a complicated shape. The insert material and the metal members are joined by mutual diffusion of atoms.
【００１７】[0017]
【実施例】以下に本発明の一実施例について、図１ない
し図４を参照して説明する。図１に示すように、黒鉛１
１と、ＣｕまたはＣｕ合金からなる金属部材１２との間
に、（Ｎｉ−Ｃｒ−Ｓｉ）の合金箔からなるインサート
材１３を配置し、荷重を負荷するとともに、真空中で９
００℃以上、１２００℃以下に加熱する。真空度は１０
-4Torr〜１０-5Torr程度である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. As shown in FIG.
1 and a metal member 12 made of Cu or a Cu alloy, an insert material 13 made of an (Ni-Cr-Si) alloy foil is arranged, a load is applied, and 9
Heat to not less than 00 ° C and not more than 1200 ° C. The degree of vacuum is 10
About -4 Torr to 10 -5 Torr.
【００１８】上記熱処理を行うことによって、図２に模
式的に示すような複合材１５が得られる。この複合材１
５の接合構造においては、黒鉛１１と金属部材１２との
間の接合部１６に、仲介層としての反応層２０が存在し
ている。すなわち母材である黒鉛とインサート材１３の
Ｃｒとが反応により接合され、その界面にＣとＣｒの化
合物であるクロム炭化物（Ｃｒ3 Ｃ2 ，Ｃｒ7 Ｃ3 ，Ｃ
ｒ23Ｃ6 等）の反応層２０をもっている。By performing the above heat treatment, a composite material 15 as schematically shown in FIG. 2 is obtained. This composite material 1
In the bonding structure of No. 5, a reaction layer 20 as a mediation layer exists at a bonding portion 16 between the graphite 11 and the metal member 12. That is, graphite as the base material and Cr of the insert material 13 are joined by a reaction, and chromium carbide (Cr 3 C 2 , Cr 7 C 3 , C 7 ) which is a compound of C and Cr is bonded at the interface.
r 23 C 6 ).
【００１９】上記反応層２０は、インサート材１３のＮ
ｉ−Ｃｒ系合金に対し、拡散と複雑形状によるアンカー
効果により、強固に接合がなされた状態となる。インサ
ート材１３に含まれているＮｉと金属部材１２のＣｕと
の界面は、原子の相互拡散による拡散層２１を介して接
合されている。The reaction layer 20 is made of N
The i-Cr alloy is firmly joined to the i-Cr alloy by the diffusion and the anchor effect due to the complicated shape. The interface between Ni contained in the insert material 13 and Cu of the metal member 12 is joined via a diffusion layer 21 by mutual diffusion of atoms.
【００２０】上記接合部１６を得る場合、反応層２０の
厚さを０．５μｍないし１０μｍに制御するために、以
下の条件で接合を行った。 インサート材１３の厚さ ５０μｍ 接合荷重 ０．５kgｆ／mm2 （５．１Ｍ
ｐａ） 接合温度 ９５０℃〜１０５０℃ 以上の条件で接合された接合部１６の接合強度は、３点
曲げ抗折試験において抗折強度が８kgｆ／mm2 であっ
た。３点曲げ抗折試験は、図３に示されるように複合材
１５の両端側を２か所の支持部２５，２６で支持した状
態で、複合材１５の長手方向中央部に押圧子２７によっ
て荷重を負荷して行われる。In order to obtain the above-mentioned bonding portion 16, bonding was performed under the following conditions in order to control the thickness of the reaction layer 20 to 0.5 μm to 10 μm. Insert material 13 thickness 50 μm Joining load 0.5 kgf / mm 2 (5.1M
pa) Joining temperature The joining strength of the joining portion 16 joined under the condition of 950 ° C. to 1050 ° C. or more was 8 kgf / mm 2 in the three-point bending test. In the three-point bending test, as shown in FIG. 3, the composite material 15 is supported by two support portions 25 and 26 at both ends, and a pressing member 27 is provided at the center in the longitudinal direction of the composite material 15. This is performed by applying a load.
【００２１】上記実施例の複合材１５の曲げ破断強度は
８〜９kgｆ／mm2 であり、破断は接合部１６近傍の黒鉛
１１側に生じた。ちなみに、高強度黒鉛の曲げ強度は８
ないし１０kgｆ／mm2 であるから、本実施例の接合部１
６は母材（黒鉛）に匹敵する強度を有している。耐熱性
に関しては、Ｎ2 中または真空中で、室温→８００℃→
炉冷（室温）の熱サイクルを１０回繰返しても、接合部
１６に異常が認められなかった。The flexural rupture strength of the composite material 15 of the above embodiment was 8 to 9 kgf / mm 2 , and the rupture occurred on the graphite 11 side near the joint 16. By the way, the bending strength of high strength graphite is 8
To 10 kgf / mm 2 , the joint 1 of this embodiment
6 has a strength comparable to that of the base material (graphite). Regarding heat resistance, in N 2 or in vacuum, room temperature → 800 ° C →
No abnormalities were found in the joint 16 even after the furnace cooling (room temperature) heat cycle was repeated 10 times.
【００２２】図４は、上記実施例によって得られた黒鉛
とインサート材との接合界面を示す電子顕微鏡写真であ
る。図中の右側が黒鉛、左側がＣｒを含むＮｉ合金から
なるインサート材であり、インサート材と黒鉛との界面
に、Ｃｒ−Ｃ反応層としてのＣｒ3 Ｃ2 が厚さ約１μｍ
ないし５μｍの範囲で生成されている。FIG. 4 is an electron micrograph showing a bonding interface between the graphite and the insert material obtained in the above embodiment. In the drawing, the right side is graphite, and the left side is an insert material made of a Ni alloy containing Cr. At the interface between the insert material and the graphite, Cr 3 C 2 as a Cr—C reaction layer is about 1 μm in thickness.
To 5 μm.
【００２３】下記表１は、インサート材１３の厚さと接
合条件を下記のように変化させることにより、種々の厚
さのクロム炭化物反応層２０を生成させ、それぞれの接
合界面を走査型電子顕微鏡で観察しかつ接合強度を３点
曲げ抗折試験で求めた結果である。Table 1 below shows that, by changing the thickness of the insert material 13 and the joining conditions as described below, chromium carbide reaction layers 20 of various thicknesses were formed, and the respective joining interfaces were observed with a scanning electron microscope. It is the result of observing and determining the joining strength by a three-point bending test.
【００２４】接合条件として、インサート材１３の厚さ
は２０μｍ，５０μｍ，１００μｍの３種類であり、い
ずれも（Ｎｉ−Ｃｒ−Ｓｉ）合金箔を用いた。加熱温度
は、９００℃，１０００℃，１１００℃で、３０分また
は６０分間加熱を行い、加圧条件は０．５kgf ／mm
2 （５．１Ｍｐａ）、真空雰囲気１０-4Torr〜１０-5To
rrとした。As the joining conditions, there are three kinds of thicknesses of the insert material 13, that is, 20 μm, 50 μm, and 100 μm, and (Ni—Cr—Si) alloy foil is used in each case. Heating is performed at 900 ° C., 1000 ° C., and 1100 ° C. for 30 minutes or 60 minutes, and the pressing condition is 0.5 kgf / mm.
2 (5.1 Mpa), vacuum atmosphere 10 -4 Torr to 10 -5 To
rr.
【００２５】[0025]
【表１】 上記表１において、Ｎｏ．４からＮｏ．９まで、すなわ
ちクロム炭化物反応層の厚さが０．５μｍから２０μｍ
の範囲の時に、接合界面の状態および接合強度が共に良
好であることが確認された。特に、反応層の厚さが５〜
１０μｍの範囲が最も安定している。なお、０．１μｍ
未満では未接合の部分を生じるため、使用不可である。
また反応層の厚さが４０μｍ以上になると、反応層が脆
くなり接合強度が低下するため好ましくない。[Table 1] In Table 1 above, No. 4 to No. 4. 9, that is, the thickness of the chromium carbide reaction layer is 0.5 μm to 20 μm.
It was confirmed that both the state of the bonding interface and the bonding strength were good in the range of. In particular, the thickness of the reaction layer is 5
The range of 10 μm is most stable. In addition, 0.1 μm
If it is less than 1, an unjoined portion is generated, so that it cannot be used.
On the other hand, if the thickness of the reaction layer is 40 μm or more, the reaction layer becomes brittle and the bonding strength is reduced, which is not preferable.
【００２６】[0026]
【発明の効果】本発明によれば、黒鉛と金属部材との接
合界面において安定した強度の高品質の接合部が得ら
れ、かつ接合時の反応の進み方が適当で加熱温度も比較
的低くてすむ。According to the present invention, a high-quality joint having stable strength can be obtained at the joint interface between graphite and a metal member, and the reaction proceeds properly during joining and the heating temperature is relatively low. Help me.
【図１】本発明方法に使用する部材の概略を示す断面
図。FIG. 1 is a sectional view schematically showing a member used in the method of the present invention.
【図２】本発明方法によって接合された接合部を拡大し
て模式的に示す断面図。FIG. 2 is an enlarged cross-sectional view schematically showing a joined portion joined by the method of the present invention.
【図３】３点曲げ抗折試験を実施する装置を模式的に示
す側面図。FIG. 3 is a side view schematically showing an apparatus for performing a three-point bending test.
【図４】本発明の一実施例方法によって接合された接合
部の金属組織を５０００倍に拡大して示す顕微鏡写真。FIG. 4 is a photomicrograph showing the metal structure of a joint joined by the method of one embodiment of the present invention at a magnification of 5000 times.
【図５】黒鉛と金属部材とからなる複合材の一例を示す
断面図。FIG. 5 is a sectional view showing an example of a composite material including graphite and a metal member.
【図６】黒鉛と金属部材とからなる複合材の他の例を示
す断面図。FIG. 6 is a sectional view showing another example of a composite material including graphite and a metal member.
１１…黒鉛、１２…金属部材、１３…インサート材、１
５…複合材、１６…接合部、２０…反応層、２１…拡散
層。11: graphite, 12: metal member, 13: insert material, 1
5 Composite material, 16 Joint, 20 Reaction layer, 21 Diffusion layer.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C04B 37/02 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) C04B 37/02
Claims (6)
ート材を有し、かつ上記インサート材と上記黒鉛との界
面に、厚さ０．５μｍから２０μｍのクロム炭化物反応
層が存在しかつ上記インサート材と金属部材との界面が
互いに接合されていることを特徴とする黒鉛と金属部材
の接合構造。An insert material containing Cr is provided between graphite and a metal member, and a chromium carbide reaction layer having a thickness of 0.5 μm to 20 μm is present at an interface between the insert material and the graphite; A joining structure between graphite and a metal member, wherein an interface between the insert material and the metal member is joined to each other.
ら１０μｍである請求項１記載の黒鉛と金属部材の接合
構造。2. A method according to claim 1, wherein said chromium carbide reaction layer has a thickness of 5 μm.
The joint structure of graphite and a metal member according to claim 1, which has a thickness of 10 µm .
用いた請求項１記載の黒鉛と金属部材の接合構造。3. The joining structure of graphite and a metal member according to claim 1, wherein a Ni—Cr alloy is used for said insert material.
成分とする反応層であることを特徴とする請求項３記載
の黒鉛と金属部材の接合構造。4. The chromium carbide reaction layer is mainly composed of Cr 3 C 2 .
The joint structure of graphite and a metal member according to claim 3, which is a reaction layer as a component .
用いた請求項１記載の黒鉛と金属部材の接合構造。5. The joint structure of graphite and a metal member according to claim 1, wherein a Cu—Cr alloy is used as said insert material.
金からなるインサート材を配置し、上記黒鉛と金属部材
とを互いに加圧した状態で上記金属部材とインサート材
が互いに接合する温度まで加熱するとともに、この加熱
処理に伴って上記インサート材と黒鉛との界面に、厚さ
０．５μｍから２０μｍのクロム炭化物反応層を生成さ
せることを特徴とする黒鉛と金属部材の接合方法。6. A temperature at which an insert material made of an alloy containing Cr is disposed between graphite and a metal member, and the metal member and the insert material are joined to each other while the graphite and the metal member are pressed against each other. with heating to the interface between the insert material and the graphite with the heat treatment, the thickness
A method for joining graphite and a metal member, wherein a chromium carbide reaction layer of 0.5 μm to 20 μm is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29376891A JP3221896B2 (en) | 1991-10-15 | 1991-10-15 | Joining structure and joining method of graphite and metal member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29376891A JP3221896B2 (en) | 1991-10-15 | 1991-10-15 | Joining structure and joining method of graphite and metal member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05105537A JPH05105537A (en) | 1993-04-27 |
| JP3221896B2 true JP3221896B2 (en) | 2001-10-22 |
Family
ID=17798962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29376891A Expired - Fee Related JP3221896B2 (en) | 1991-10-15 | 1991-10-15 | Joining structure and joining method of graphite and metal member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3221896B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1797300A4 (en) * | 2004-10-07 | 2012-09-26 | Gyroton Inc | Multilobe rotary motion asymetric compression/expansion engine |
| DE102009014407A1 (en) * | 2009-03-28 | 2010-10-21 | Sgl Technologies Gmbh | Adhesive-free, temperature- and reaction-stable bonding between metals and graphite |
-
1991
- 1991-10-15 JP JP29376891A patent/JP3221896B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05105537A (en) | 1993-04-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4961529A (en) | Method and components for bonding a silicon carbide molded part to another such part or to a metallic part | |
| JPS6134107A (en) | Corrosion resistant layer on base body of gas turbine blade and method for providing the same | |
| JPH04362147A (en) | Method of forming metal matrix composite by transition liquid phase strengthening | |
| JPH03215378A (en) | Composite consisting of graphite and metal of high melting point | |
| JP3364402B2 (en) | Al metal joint | |
| WO2012086490A1 (en) | Rotary tool | |
| GB2134832A (en) | Method of etablishing a bond between titanium and an iron-nickel alloy | |
| JP3221896B2 (en) | Joining structure and joining method of graphite and metal member | |
| JPS60174805A (en) | Manufacture of metal composite matter | |
| Kundu et al. | Diffusion Welding of Ti6Al4V and 17-4 Stainless Steel Using Cu/Ni Microlayers | |
| JPH0729859B2 (en) | Ceramics-Metal bonding material | |
| US5350107A (en) | Iron aluminide alloy coatings and joints, and methods of forming | |
| JPH0520392B2 (en) | ||
| JP2592778B2 (en) | Copper alloy lining method | |
| JP3629578B2 (en) | Ti-based material and Cu-based bonding method | |
| JP4252161B2 (en) | Method for producing metal-based composite material using liquid phase sintering | |
| JPS59212189A (en) | Brazing filler metal and composite target for x-ray tube | |
| JPH0360414A (en) | Method for joining carbon material, joined body by this method and material using the same | |
| JPH01270574A (en) | Ceramics-joining component and joining method thereof | |
| JP3298235B2 (en) | Joining method of ceramics and nickel | |
| JP3376038B2 (en) | Vacuum brazing method | |
| JPH0662342B2 (en) | Method for joining silicon nitride ceramics and metal | |
| JPS60230986A (en) | Method for highly alloying metal of metallic surface | |
| JP3930566B2 (en) | Titanium member joining method using superplastic intermediate layer | |
| JPS59212188A (en) | Brazing filler metal and use thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080817 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080817 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090817 Year of fee payment: 8 |
|
| LAPS | Cancellation because of no payment of annual fees | ||
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |