JP3217260U - Edge inspection device for irregular shaped substrate - Google Patents

Abstract

An edge inspection apparatus capable of inspecting an edge of a deformed substrate is provided. A first traveling body C that travels back and forth in the left-right direction by numerically controlled advancing / retreating means, and a first traveling body that travels back and forth in the front-rear direction by numerically controlled advancing / retreating means E on one side of the traveling path of the first traveling body C. Two traveling bodies F, a table G that receives the supplied deformed substrate X on the second traveling body F, and a turning support member 11 fixed to the lower end of the turning shaft 10 that is supported to freely rotate on the first traveling body C. The 2D laser displacement meter 12 attached to the lower surface of the swivel support member 11 and focused on the edge of the deformed substrate X on the table G, and the focus on the edge of the deformed substrate X on the table G at one end of the swivel support member 11 The combined line sensor 13, the 2D laser displacement meter 12 on the other end side of the swivel support member 11, the illumination device 14 that illuminates the focus of the line sensor 13, and the focus of the line sensor 13 are directed in the normal direction. The pivot 10 consists of a drive means H for reversible drive. [Selection] Figure 2

Description

  The present invention relates to an apparatus for inspecting the edge of a deformed substrate after splitting and cutting off the end material.

  As is well known, after deforming a deformed substrate by scribing a deformed cutting line (also a half-cut line for cutting off the end material) on the substrate, the deformed substrate is broken (divided) to obtain a deformed substrate (for example, Patent Documents) 1).

Utility Model Registration No. 3216017

  By the way, the edge of the deformed substrate obtained by Patent Document 1 may have chipping (crack-like defects) or cracks in the substrate direction from the edge due to the division, and the terminal scratches or cracks of the end material may occur. (Splitting) A split residue piece may be present at the split edge.

  Inspection of these chippings, cracks, terminal scratches and residue pieces was inefficient due to visual inspection by the operator.

  Further, since it cannot be completely detected because of visual observation, there is a problem that defective products are mixed into non-defective products due to omission of sorting.

  Therefore, the present invention is to provide an inspection apparatus that solves the above-described problems.

  In order to solve the above-described problems, the present invention provides a first traveling body that is configured to travel in the left-right direction by the traveling guide means and to advance and retreat by numerically controlled advancing / retreating means, and the first traveling body. A second traveling body provided to travel in the front-rear direction by the traveling guide means on one side of the traveling path, and to advance and retreat by numerically controlled advancing / retreating means, and to receive the deformed substrate on the upper surface of the second traveling body And a table provided so as to have a suction holding function for holding the load receiving and the deformed substrate, and a pivot shaft whose axis is supported so as to freely rotate on a support member provided on the first traveling body, A horizontal swivel support member in which the center between both ends is fixed to the lower end of the swivel shaft, and the bottom surface of the swivel support member is attached to the axial center position of the swivel shaft and the edge of the deformed substrate on the table A 2D laser displacement meter provided in focus, a line sensor provided in focus on the edge of the deformed substrate on the table at one end of the swivel support member, and the 2D on the other end side of the swivel support member An illumination device provided so as to illuminate the focal point of the laser displacement meter and the line sensor; drive means provided so as to reversibly drive the turning shaft so that the focal point of the line sensor is in a normal direction; and the first traveling. The camera is provided on the body side so as to read the mark on the plate surface of the odd-shaped substrate, and the inspection by the 2D laser displacement meter and the line sensor is incorporated into the image to determine whether the irregular substrate is good or defective. Adopt the configuration.

  Further, the vehicle travels in the left-right direction by the travel guide means, and travels in the front-rear direction by the travel guide means on the third travel body, and is provided so as to travel forward and backward by the numerically controlled advance / retreat travel means. A fourth traveling body provided to advance and retreat by numerically controlled advancing / retreating means, and a suction holding function for receiving the supplied deformed substrate on the upper surface of the fourth traveling body and holding the deformed substrate on the upper surface. A table provided so as to have, a swinging shaft whose axis line is perpendicular to the stationary support member provided directly above the traveling path of the third traveling body, and a lower end of the swinging shaft between both ends. A horizontal swivel support member with a fixed center, and a lower surface of the swivel support member attached to the axis position of the swivel shaft and focused on the edge of the deformed substrate on the table. A displacement sensor, a line sensor provided at one end of the swivel support member so as to focus on the edge of the deformed substrate on the table, and a 2D laser displacement meter and a line sensor disposed at the other end of the swivel support member. An illuminating device provided to illuminate a focal point; driving means provided to reversibly drive the swivel axis so that a focal point of the line sensor is in a normal direction; and a plate surface of the deformed substrate on the support member side The camera is provided so as to read the mark, and a configuration is adopted in which the inspection by the 2D laser displacement meter and the line sensor is incorporated into the image to determine whether the deformed substrate is non-defective or defective.

  As described above, according to the deformed substrate edge inspection apparatus of the present invention, the deformed substrate to be inspected is placed and held on the table, and then the table is moved (along the edge of the deformed substrate). Then, the passing edge is captured in an image with a 2D laser displacement meter and a line sensor, and the captured image is used to know the presence of edge chipping and cracks, and the presence of fragmentation residues resulting from fragmentation of the end material. The discrimination can be performed very easily, and the inconvenience that a defective product is mixed with a non-defective product can be eliminated.

  Further, fine chipping and cracks can be clearly incorporated into the image by the lighting device, and the discrimination can be performed more accurately.

  Further, since the focus direction of the line sensor is always directed to the normal direction intersecting at right angles to the edge of the irregular substrate by the reversible drive device, the edge can be accurately inspected.

It is a top view which shows 1st Embodiment of this invention. It is a partially cutaway front view same as the above. It is an enlarged plan view which shows the principal part same as the above. It is a partially notched enlarged front view same as the above. It is an enlarged plan view of the state which turned 90 degrees same as the above. It is a top view which shows the test | inspection state of an edge. It is a top view which shows the inspection state of the edge. It is a top view which shows the inspection state of the edge. It is a top view which shows 2nd Embodiment. It is a partially cutaway front view same as the above.

Next, an embodiment of the invention will be described with reference to the accompanying drawings.
In the first embodiment, as shown in FIGS. 1 to 4, a first traveling body C is provided that travels in the left-right direction by the traveling guide means A and that travels forward and backward by numerically controlled advance / retreat means B. .

  As shown in FIGS. 1 and 2, the traveling guide means A includes two parallel rails 1 and sliders provided at the four corners of the lower surface of the first traveling body C so as to be slidably engaged with the rails 1. However, it may be caused to travel in the left-right direction by other methods.

  As shown in FIGS. 1 and 2, the advancing / retreating means B includes a male screw 3 that is supported in parallel with the rail 1, the male screw 3 screwed into the reversible drive motor 4, and the male screw 3. The first traveling body C travels forward and backward with the female screw 5 supported on the lower surface of the traveling body C. However, the present invention is not limited, and traveling may be performed by other methods.

  Further, on one side of the travel path of the first traveling body C, a second traveling body F that is travel-guided in the front-rear direction by the travel guide means D and travels back and forth by the numerically controlled advance / retreat travel means E is provided.

  The travel guide means D is the same as the travel guide means A, and the forward / backward travel means E is the same as the forward / backward travel means B, and detailed description thereof is omitted.

  The travel guide means A is provided on a stationary base 6 and the travel guide means D is provided on a base 7 provided on the base 6 (as shown in FIGS. 1 and 2). To).

  Further, on the second traveling body F, a table G having a number of suction holes 8 as a suction holding function for holding the supply deformed substrate X on the upper surface and holding the load receiving deformed substrate X is provided.

  The odd-shaped substrate X is divided and scribed so as to subdivide a large-sized panel, as is well known (see, for example, Utility Model Registration No. 3216017), and cutting for the irregular substrate is performed for each divided panel. The line is scribed, and the outer end material of the cutting line is split to obtain a deformed substrate.

  As the table G having the suction holes 8 described above, a large number of small holes are provided on the top wall of a flat hollow box, and the hollow substrate is sucked so that the deformed substrate X is sucked onto the table G. It has become.

  Further, a support member 9 is provided on the first traveling body C, and the support member 9 is provided with a turning shaft 10 that rotates freely with an axis line being vertical.

  Furthermore, the center between both ends of the horizontal turning support member 11 is fixed to the lower end of the turning shaft 10, and protrudes downward from the axial center position of the lower turning shaft 10 of the turning support member 11. A 2D laser displacement meter 12 focused on the edge of X is provided, a line sensor 13 focused on the edge is provided on one edge side of the deformed substrate X of the turning support member 11, and 2D is provided on the other end of the turning support member 11. An illumination device 14 for illuminating the laser displacement meter 12 and the line sensor 13 is provided.

The 2D laser displacement meter 12 is used for inspecting the shape of the terminal of the edge of the irregular substrate X, the shape inspection of the non-defective product, and the outer shape. The line sensor 13 is used for chipping or cutting the edge of the irregular substrate X. A line scan camera is used to inspect whether there is a crack on the edge and whether there is a residue on the fold edge resulting from the cutting of the end material.
And the above-mentioned inspection is taken in to an image, and a good article and a defective article of irregular substrate X are judged.

  Further, the turning shaft 10 is turned by the reversible driving means H so that the focus of the line sensor 13 is directed in the normal direction.

  As the reversible driving means H, as shown in FIGS. 1 to 4, a worm wheel 15 provided on the turning shaft 10, a worm gear 16 meshed with the worm wheel 15, and the worm gear 16 are reversibly driven. Although it comprised with the motor 18 with the reduction gear 17 to which it does, it is not limited, The objective may be achieved by another structure.

  Further, the first traveling body C is provided with a camera 19 that reads a mark on the odd-shaped substrate X.

  The numerical control of the advancing / retreating means B, E described above takes the X-axis and Y-axis encoder pulses when scribing the cutting line for obtaining the irregular substrate X from the panel as an input, and deforms the composite vector. The first traveling body C and the second traveling body F are caused to travel in the X-axis and Y-axis directions along the outer shape of the substrate X.

  When configured as described above, the short-side straight portion shown in FIG. 6 of the odd-shaped substrate X, the portion close to the long straight line in FIG. 7 of the odd-shaped substrate X, and the short side shown in FIG. Since the line sensor 13 always adjusts in the normal direction (right angle) by the reversible driving means H even in the rounded portion of the corner between the long side, the processing cross section most necessary for the inspection in any portion is constantly on the image. It is possible to accurately determine whether the product is non-defective or defective by capturing the image as data passing through a specific point (for example, the center).

That is, defect inspection is performed as three-dimensional image data in order to capture the image data at the same time.
In the figure, reference numeral 20 denotes a support fitting for the line sensor 13 and the 2D laser displacement meter 12.

  The reason why the camera 19 reads the mark on the X-face of the feat board is that after the position calculation accompanying the reading of the mark, the line sensor 13 and the 2D laser displacement meter 12 are moved to the center position, and then the deformed board inputted to the calculation device. Based on the X data, the normal direction adjustment is performed along the edge of the deformed substrate X, and the outer shape of the deformed substrate X is read and inspected at positions on the X and Y axis data lines.

  The main point of the above inspection is to capture the data by generating a trigger with a certain accuracy for the outer shape of the irregular substrate X, and capturing the three-dimensional data with a certain accuracy using a 2D laser displacement meter for the outer shape of the irregular substrate X. It is to perform a stereoscopic image inspection by capturing an image simultaneously with the 2D laser displacement meter with respect to the outer shape of the deformed substrate X.

  Note that when the edge is inspected by the line sensor 13 and the 2D laser displacement meter 12, a clear image can be captured by the light source of the illumination device 14.

  In the second embodiment, as shown in FIGS. 9 and 10, a third traveling body L that is travel-guided in the left-right direction by the travel guide means J and travels back and forth by the numerically controlled advance / retreat travel means K is provided.

  The travel guide means J is the same as the travel guide means A of the first embodiment, and the advance / retreat travel means K is the same as the travel guide means B of the first embodiment, and a detailed description thereof is omitted. .

  Further, on the third traveling body L, a fourth traveling body O that travels in the front-rear direction by the traveling guide means M and travels in the front-rear direction by the numerically controlled advance / retreat means N is provided.

  The travel guide means M is the same as the travel guide means D of the first embodiment, and the advance / retreat travel means K is the same as the travel guide means E of the first embodiment, and a detailed description thereof is omitted. .

Further, on the fourth traveling body O, a table G with a suction holding function is provided while receiving the supply deformed substrate X on the upper surface.
The suction holding function is the same as in the first embodiment, and detailed description thereof is omitted.

  In addition, a stationary support member 9 is provided immediately above the running path of the table G. The support member 9 has a turning shaft 10 similar to that of the first embodiment, and a turning support member at the lower end of the turning shaft 10. 11. The turning support member 11 is provided with the same 2D laser displacement meter 12, line sensor 13, and illumination device 14 as in the first embodiment, and the turning shaft 10 is driven reversibly so that the focus of the line sensor 13 is normal. A reversible drive means H directed in the direction is provided.

  The 2D laser displacement meter 12, the line sensor 13, the illuminating device 14, and the reversible driving means H are the same as those in the first embodiment, and the detailed traveling of the traveling means K and N is controlled by the numerical control. Detailed description is omitted because it is the same as that of the first embodiment. And the camera 19 similar to 1st Embodiment is installed in the supporting member 9 side, The use purpose of this camera 19 is the same as 1st Embodiment, and description is abbreviate | omitted.

  Then, as in the first embodiment, various defects on the edge of the odd-shaped substrate X can be inspected, and non-defective products and defective products of the odd-shaped substrate X can be taken into an image and selected.

  The irregularly shaped substrate X after the inspection is picked up from the table G by the suction cup R ′ of the dispenser R as shown in FIG.

  Note that the edge inspection method, operation, and effect of the odd-shaped substrate X are the same as in the first embodiment, and detailed description thereof is omitted.

  The drive of the reversible drive means H of the first embodiment and the second embodiment operates by controlling the three axes with the irregular cutting scribe data as described above. However, the drive is linear by the two-axis control other than the three-axis control. Line (edge) inspection is also possible.

  With the adjustment of the line sensor 13 in the normal direction, a beautiful (non-disturbed) image can be taken in and a good inspection can be performed for the presence of edge residue pieces, cracks, chipping, and terminal flaws.

A travel guide means B advance / retreat means C first travel body D travel guide means E advance / retreat travel means F second travel body G table H reversible drive means J travel guide means K advance / retreat travel means L third travel body M travel guide means N Advancement / retraction means O Fourth traveling body R Dispenser R ′ Suction cup X Modified substrate 1 Rail 2 Slider 3 Male screw 4 Motor 5 Female screw 6 Base 7 Base 8 Suction hole 9 Support member 10 Rotating shaft 11 Rotating support member 12 2D laser displacement Total 13 Line sensor 14 Lighting device 15 Worm wheel 16 Worm gear 17 Reducer 18 Motor 19 Camera 20 Support bracket

Claims (2)

  The first traveling body is provided to travel in the left-right direction by the traveling guide means, and is advanced / retreated by the numerically controlled advance / retreat means, and the traveling guide means travels in the front-rear direction on one side of the traveling path of the first traveling body. In addition, a second traveling body provided so as to travel forward and backward by numerically controlled advancing / retreating means, and the supply deformed substrate is received on the upper surface of the second traveling body, and the suction holding for holding the deformed substrate on the load receiving portion A table provided to have a function, a turning shaft whose axis is vertically supported to rotate freely on the support member provided on the first traveling body, and the center between both ends is fixed to the lower end of the turning shaft. And a 2D laser displacement meter mounted on the lower surface of the swivel support member at the axial center position of the swivel shaft so as to focus on the edge of the deformed substrate on the table. A line sensor provided at one end of the swivel support member so as to focus on the edge of the deformed substrate on the table; and a focus of the 2D laser displacement meter and line sensor is illuminated on the other end of the swivel support member. An illuminating device provided on the first traveling body, a driving means provided so as to reversibly drive the turning shaft so that a focal point of the line sensor is in a normal direction, and a mark on the plate surface of the deformed substrate on the first traveling body side. An edge inspection apparatus for deformed substrates comprising a camera provided for reading, wherein the inspection by the 2D laser displacement meter and the line sensor is incorporated into an image to determine whether the deformed substrate is good or defective. .   A third traveling body that travels in the left-right direction by the traveling guide means and that travels back and forth by the numerically controlled advance / retreat means, and travels in the front-rear direction by the traveling guide means on the third traveling body, A fourth traveling body provided so as to travel forward and backward by the control traveling / retreating means, and the supply deformed substrate is received on the upper surface of the fourth traveling body, and a suction holding function for retaining the deformed substrate is received. And a pivot shaft whose axis line is perpendicular to the stationary support member provided directly above the travel path of the third traveling body, and a center between both ends at the lower end of the pivot shaft. A horizontal swivel support member with a fixed surface, and a lower surface of the swivel support member attached to the axis position of the swivel axis and provided in focus on the edge of the deformed substrate on the table A position sensor, a line sensor provided at one end of the swivel support member so as to focus on the edge of the deformed substrate on the table, and a focus of the 2D laser displacement meter and line sensor on the other end of the swivel support member An illuminating device provided so as to illuminate, a driving means provided so as to reversibly drive the swivel axis so that the focus of the line sensor is in a normal direction, and a plate surface of the deformed substrate on the support member side. An edge of a deformed substrate comprising a camera provided so as to read a mark, and taking the inspection by the 2D laser displacement meter and the line sensor into an image to determine whether the deformed substrate is good or defective Inspection device.

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