JP3200698U - Sheet changing device - Google Patents

Abstract

An object of the present invention is to provide a sheet changing apparatus capable of applying a mark to a first adhesive sheet even when another adhesive sheet is attached to an adherend via the first adhesive sheet. A sheet changing apparatus 10 has an adherend WF attached to an adherend attachment surface AS11 of a first adhesive sheet AS1, and a second adhesive sheet attached to a sheet attachment surface AS12 of the first adhesive sheet AS1. A peeling means 20 for peeling the second adhesive sheet AS2 from the integrated object WK1 to which the AS2 is stuck, a mark applying means 30 for carrying out a predetermined printing on the sheet sticking surface AS12 from which the second adhesive sheet AS2 is peeled, and a predetermined mark And a sticking means 40 for sticking the third adhesive sheet AS3 to the sheet sticking surface AS12 to which is attached. [Selection] Figure 1

Description

  The present invention relates to a sheet changing apparatus.

  2. Description of the Related Art Conventionally, there has been known a sheet stretching apparatus that replaces a second adhesive sheet attached to an adherend via a first adhesive sheet with a third adhesive sheet (see, for example, Patent Document 1).

JP 2014-63945 A

  However, since the conventional sheet changing apparatus as described in Patent Document 1 does not have the mark applying unit, the mark is applied regardless of whether the object to be marked is the first adhesive sheet. There is a disadvantage that it cannot be granted. In addition, even if an attempt is made to give a mark to the first adhesive sheet with an apparatus other than the sheet changing apparatus, the second adhesive sheet is pasted on the first adhesive sheet before the sheet is changed, and the third adhesive sheet is attached after the sheet is changed. Since it is affixed to the 1st adhesive sheet, there exists a problem that a mark cannot be provided to a 1st adhesive sheet.

  An object of the present invention is to provide a sheet tensioning device that can give a mark to a first adhesive sheet even when another adhesive sheet is attached to an adherend via the first adhesive sheet. is there.

  The sheet replacing device of the present invention is an integrated body in which an adherend is attached to an adherend attaching surface of a first adhesive sheet and a second adhesive sheet is attached to the sheet attaching surface of the first adhesive sheet. A peeling means for peeling the second adhesive sheet; a mark giving means for giving a predetermined mark to the sheet sticking surface from which the second adhesive sheet has been peeled; and a sheet sticking face to which the predetermined mark is given. And a sticking means for sticking the third adhesive sheet.

  According to the present invention as described above, since the mark applying unit is provided in the sheet changing apparatus, the opportunity to expose the first adhesive sheet can be used when the second adhesive sheet is replaced with the third adhesive sheet. Even when another adhesive sheet is attached to the adherend via the first adhesive sheet, the first adhesive sheet can be marked.

1 is a side view of a sheet changing apparatus according to an embodiment of the present invention. Operation | movement explanatory drawing of a sheet replacement apparatus.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the front side in FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis and “down” is the opposite direction, “ The “left” is the arrow direction of the X axis, “right” is the opposite direction, “front” is the front direction in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

  In FIG. 1, a sheet changing apparatus 10 has a semiconductor wafer (hereinafter simply referred to as a wafer) WF as an adherend attached to an adherend attaching surface AS11 of the first adhesive sheet AS1, and the first A peeling means 20 for peeling the second adhesive sheet AS2 from the integrated body WK1 having the second adhesive sheet AS2 stuck on the sheet sticking surface AS12 of the first adhesive sheet AS1, and a sheet sticking surface AS12 from which the second adhesive sheet AS2 has been peeled off A holding means for holding the integrated object WK1 is provided with a mark applying means 30 for applying a print as a predetermined mark to the sheet and a sticking means 40 for sticking the third adhesive sheet AS3 to the sheet sticking surface AS12 to which the predetermined mark is given. Located above the means 50. The integrated object WK1 is supported by a ring frame RF as a support member via a second adhesive sheet AS2.

  The peeling means 20 includes a support roller 21A that supports the peeling tape PT, a driving roller 21C that is driven by a rotation motor 21B as a driving device, and a pinch roller 21D that sandwiches the peeling tape PT between the driving roller 21C. A guide roller 21E for guiding the peeling tape PT, a recess 22A recessed from the upper surface, a guide plate 22 for guiding the peeling tape PT, and the guide plate 22 supported by a shaft 23A. A bush 23 that is movably supported in the axial direction, a coil spring 24 as a biasing means that biases the guide plate 22 in a direction away from the bush 23, and an output shaft 25A of a direct acting motor 25 as a drive device. A supported cutting blade 26, a pressing head 28 supported by an output shaft 27A of a linear motion motor 27 as a drive device, It is supported on a linear motor slider (not shown) as a motive device, and a chuck cylinder 29 as a drive device having a pair of gripping claws 29A.

  The mark applying means 30 includes a linear motor 31 as a driving device and a laser printer 32 supported by a slider 31A of the linear motor 31.

  The affixing means 40 includes a support roller 41 that supports the original fabric RS with the third adhesive sheet AS3 temporarily attached to one surface of the strip-shaped release sheet RL, a plurality of guide rollers 42 that guide the original fabric RS, and an exfoliation device. The peeling plate 43 as a peeling member for bending the sheet RL and peeling the third adhesive sheet AS3 from the peeling sheet RL, and the peeled third adhesive sheet AS3 are pressed against the ring frame RF and the first adhesive sheet AS1 A pressing roller 44 as a pressing member, a driving roller 45 driven by a rotation motor 45A as a driving device, a pinch roller 46 that sandwiches the release sheet RL between the drive roller 45, and a release sheet RL. And a collection roller 47.

  The holding means 50 includes a table 52 having a support surface 52A that is supported by a slider 51A of a linear motor 51 serving as a driving device, and that can hold the integrated object WK1 by suction using pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector. .

In the above sheet changing apparatus 10, a procedure for replacing the second adhesive sheet AS2 with the third adhesive sheet AS3 will be described.
First, the operator sets the peeling tape PT and the raw fabric RS as shown in the same figure to the sheet changing apparatus 10 in the state indicated by the solid line in FIG. Thereafter, when an automatic operation start signal is input to the sheet changing apparatus 10 via an input means such as an operation panel or a personal computer (not shown), the sticking means 40 drives the rotation motor 45A to feed out the original fabric RS. When it is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor that the three adhesive sheet AS3 has reached a predetermined position, the sticking means 40 stops driving the rotation motor 45A and enters a standby state. .

  Then, the unitary object WK1 is placed on the support surface 52A of the table 52 so that the second adhesive sheet AS2 is on the peeling means 20 side by a conveying means (not shown) such as a human hand or an articulated robot or a belt conveyor. Then, after the holding means 50 drives the decompression means (not shown) and holds and holds the integrated object WK1 together with the ring frame RF, the linear motor 51 is driven to move the table 52 to the left, two points on the right side in FIG. As indicated by a chain line, when the detection unit (not shown) such as an optical sensor or an imaging unit detects that the second adhesive sheet AS2 has reached a predetermined position below the pressing head 28, the driving of the linear motor 51 is stopped. Thereafter, the peeling means 20 drives a linear motor (not shown) to move the chuck cylinder 29 in the right direction, and pushes and moves the guide plate 22 in the right direction with the chuck cylinder 29. Next, the peeling means 20 drives the chuck cylinder 29 and grips the leading end of the peeling tape PT in the feeding direction with the pair of gripping claws 29A. Thereafter, the peeling means 20 drives the rotation motor 21B and a linear motor (not shown) to move the chuck cylinder 29 leftward while drawing the peeling tape PT, and pull out the peeling tape PT.

  Next, the peeling means 20 drives the linear motion motor 27, lowers the pressing head 28, and presses and affixes the peeling tape PT to the outer edge region of the second adhesive sheet AS2 with the pressing head 28. Next, the peeling means 20 drives the linear motor 25 to lower the cutting blade 26 and cut the peeling tape PT. Thereafter, the peeling means 20 drives the linear motion motors 25 and 27 to return the cutting blade 26 and the pressing head 28 to the initial positions. Next, the holding means 50 drives the linear motor 51, moves the table 52 to the left as shown in FIG. 2A, and peels the second adhesive sheet AS2 from the ring frame RF and the first adhesive sheet AS1. To do. When the peeling of the second adhesive sheet AS2 is completed, the peeling means 20 drives the chuck cylinder 29 to release the peeling tape PT and deliver the second adhesive sheet AS2 to a collecting means (not shown).

  Then, a detection means (not shown) such as an optical sensor or an imaging means detects that the predetermined printing start position on the sheet sticking surface AS12 from which the second adhesive sheet AS2 has been peeled has reached a predetermined position below the laser printer 32. Then, the holding unit 50 stops driving the linear motor 51. Next, the mark applying means 30 drives the linear motor 31 and the laser printer 32, and moves the laser printer 32 in the front-rear direction to perform printing on the first adhesive sheet AS1. Thereafter, the holding means 50 drives the linear motor 51, moves the table 52 to the left by a predetermined distance, and then stops the drive. Then, the mark applying unit 30 and the holding unit 50 repeatedly perform the movement of the laser printer 32 and the table 52, so that the sheet application surface AS12 of the first adhesive sheet AS1 is predetermined as shown in FIG. Is printed. When the predetermined printing is completed, the holding unit 50 stops driving the linear motor 51. Further, the mark applying means 30 stops driving the laser printer 32 and drives the linear motor 31 to return the laser printer 32 to the initial position.

  Next, the holding means 50 drives the linear motor 51 to move the table 52 to the left, and the first adhesive sheet AS1 on which the printing is applied is applied to the sticking means 40 as shown by the two-dot chain line on the left side in FIG. When a detection means (not shown) such as an optical sensor or an imaging means detects that the predetermined position has been reached, the sticking means 40 drives the rotation motor 45A, and the original fabric RS is adjusted in accordance with the moving speed of the table 52. Pull out. As a result, as shown in FIG. 2C, the third adhesive sheet AS3 is pressed by the pressing roller 44 to the ring frame RF and the sheet application surface AS12 on which the predetermined printing is performed on the first adhesive sheet AS1. As a result, the integrated object WK2 is formed.

  When the application of the third adhesive sheet AS3 is completed, the holding unit 50 stops driving the linear motor 51 and the decompression unit (not shown), and then the conveyance unit (not shown) carries the integrated object WK2 to the next step. Then, the holding means 50 drives the linear motor 51 to return the table 52 to the initial position, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, since the sheet applying device 30 is provided in the sheet replacing device 10, the opportunity to expose the first adhesive sheet AS1 when the second adhesive sheet AS2 is replaced with the third adhesive sheet AS3. Even when another adhesive sheet is attached to the wafer WF via the first adhesive sheet AS1, a mark can be given to the first adhesive sheet AS1.

  As described above, the best configuration, method and the like for carrying out the present invention are disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been illustrated and described with particular reference to particular embodiments, it will be understood that the present invention is not limited to the above-described embodiments without departing from the scope of the technical idea and purpose of the present invention. Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such limitation is included in this invention.

For example, the peeling means 20 can employ a pressure-sensitive adhesive or heat-sensitive adhesive tape PT, and at least when a heat-sensitive adhesive tape PT is employed, the peeling means 20 is peeled into the pressure head 28. It is preferable to provide a heating means such as an appropriate coil heater or a heat pipe heating side for heating the tape PT.
The peeling means 20 may be configured to peel the second adhesive sheet AS2 with a suction pad, a blade material or the like without using the peeling tape PT.
The biasing means may be constituted by an elastic member such as a leaf spring, rubber, or resin.

The mark applying means 30 can adopt any configuration capable of applying a mark, such as an ink jet printer, a dot printer, a thermal printer, a relief printing, an intaglio printing, a screen printing, a laser printer, etc., instead of the laser printer 32. A combination of these may be used.
The mark applying means 30 may include a driving device that moves the laser printer 32 in the left-right direction, and may apply a predetermined mark to the sheet pasting surface AS12 without moving the table 52 to the left.
The mark imparting means 30 may collectively impart a mark to the sheet pasting surface AS12.
The mark imparting means 30 may impart the mark by imprinting the first adhesive sheet AS1 or by developing a color by chemical change.
The marks provided by the mark providing means 30 are not limited to characters, patterns, figures, paintings, and the like.

The affixing means 40 may feed out the original fabric RS temporarily attached to the release sheet RL at a predetermined interval from the third adhesive sheet AS3, or a closed-loop cut is formed in the belt-like adhesive sheet base material. Thus, the inner side may be the third adhesive sheet AS3 and the outer side may be an unnecessary sheet, and the plurality of third adhesive sheets AS3 may be unrolled to the strip-shaped release sheet RL at a predetermined interval. . In addition, when a raw material in which a belt-like adhesive sheet base material is temporarily attached to a belt-like release sheet RL is used, the adhesive sheet is cut by a cutting means such as a cutting blade, a laser cutter, a heat cutter, an air cutter, or a compressed water cutter. The base material may be cut into a predetermined shape, and an original fabric in which a plurality of third adhesive sheets AS3 are temporarily attached to the strip-shaped release sheet RL at a predetermined interval may be formed.
The sticking means 40 may employ a pressing member such as a round bar, blade material, rubber, resin, sponge, or the like, and may be configured to press the third adhesive sheet AS3 against the adherend by air spraying.
The peeling member may be composed of a round bar or a roller.

The holding means 50 may be configured to support the adherend by chuck means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, or the like.
The holding means 50 may fix the position of the table 52 and move the peeling means 20, the mark applying means 30 and the sticking means 40, or the table 52, the peeling means 20, the mark applying means 30 and the sticking means 40 may be moved. It may be moved.
When the one-piece WK1 or the like is transported by another apparatus, the holding unit 50 may not be provided.

The first to third adhesive sheets AS1 to AS3 may all be of the same material and type, or only two of the three may be the same, or may be all different. Good.
The shape of the adherend may be, for example, a circle, an ellipse, a polygon more than a triangle, or other shapes.
The support member may or may not have a non-annular frame (the outer periphery is not connected), a circle, an ellipse, a polygon more than a triangle, or other shapes.

  Moreover, the material, classification, shape, etc. of the first to third adhesive sheets AS1 to AS3 and the adherend in the present invention are not particularly limited. For example, the first to third adhesive sheets AS <b> 1 to AS <b> 3 may be circular, elliptical, polygonal, such as a triangle or a quadrangle, or other shapes, or may be adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When the heat-sensitive adhesive first to third adhesive sheets AS1 to AS3 are employed, an appropriate coil heater or heat pipe for heating the first to third adhesive sheets AS1 to AS3, etc. Bonding may be performed by an appropriate method such as providing a heating means on the heating side. Moreover, such 1st-3rd adhesive sheet AS1-AS3 is a thing of a single layer only of an adhesive bond layer, what has an intermediate | middle layer between a base material sheet and an adhesive bond layer, for example, There may be three or more layers such as a cover layer on the upper surface, or a so-called double-sided adhesive sheet that can peel the substrate sheet from the adhesive layer. Alternatively, it may have a multilayer intermediate layer, or may be a single layer or multilayer without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. Note that the first to third adhesive sheets AS1 to AS3 are replaced with functional and application readings, for example, information description labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, recording layers. Arbitrary sheets, films, tapes, etc. of arbitrary shapes, such as a formation resin sheet, can be stuck on arbitrary adherends as described above.

The means and steps in the present invention are not limited in any way as long as the operations, functions, or steps described for the means and steps can be performed. The process is not limited at all. For example, the peeling means may be configured such that the adherend is pasted on the adherend pasting surface of the first adhesive sheet and the second adhesive sheet is attached to the sheet pasting surface of the first adhesive sheet. As long as the adhesive sheet can be peeled off, there is no limitation as long as it is within the technical scope in light of the technical common sense at the beginning of the application (the description of other means and steps is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 Sheet changing apparatus 20 Peeling means 30 Mark giving means 40 Sticking means AS1 1st adhesive sheet AS11 Adhering body sticking surface AS12 Sheet sticking surface AS2 2nd adhesive sheet AS3 3rd adhesive sheet WK1 Integral WF Wafer (Substrate)

Claims (1)

Peeling to peel off the second adhesive sheet from an integrated body in which the adherend is stuck to the adherend sticking surface of the first adhesive sheet and the second adhesive sheet is stuck to the sheet sticking surface of the first adhesive sheet Means,
A mark applying means for applying a predetermined mark to the sheet application surface from which the second adhesive sheet has been peeled;
An apparatus for pasting sheets, comprising: pasting means for pasting a third adhesive sheet on the sheet pasting surface to which the predetermined mark is given.

Images