JP2015162523A - Sheet adhering device and adhering method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet adhering device by which, even if a plurality of tapered portions are formed in a length direction of an adhesive face in a band-shaped adhesive sheet, the sheet can be adhered while surely positioning the tapered portions relatively to an adherend.SOLUTION: An adhesive sheet AS is band-shaped while including a first adhesive face FA1 and a plurality of first tapered portions TK1 including a first apex TT1 capable of point-contact or line-contact with a first adherend WF1 are provided in a length direction of the first adhesive face FA1. A sheet adhering device 10 includes: supply means 20 for supplying the adhesive sheet AS; pressing means 40 which abuts the first apex TT1 of the adhesive sheet AS supplied by the supply means 20 to the first adherend WF1, applying a pressure in a direction of the first adherend WF1 by means of a pressing surface 42 and adhering the adhesive sheet AS to the first adherend WF1; and detection means 60 capable of detecting the first apex TT1. The supply means 20 is provided so as to locate the first apex TT1 detected by the detection means 60 at a predetermined position in the first adherend WF1.

Description

  The present invention relates to a sheet sticking apparatus and a sticking method.

2. Description of the Related Art Conventionally, a sheet pasting apparatus for pasting an adhesive sheet on a semiconductor wafer (hereinafter sometimes simply referred to as a wafer) in a semiconductor manufacturing process is known (see, for example, Patent Document 1).
The sheet sticking device described in Patent Document 1 supplies a belt-like adhesive sheet by a sheet supply device (supply means), and presses the pressure difference between the first space on the lower case side and the second space on the upper case side. The deformable portion is deformed to the wafer (adhered body) side, and the adhesive sheet is attached to the adherend from the center toward the outer periphery.

JP 2008-66597 A

However, in the conventional apparatus described in Patent Document 1, it is necessary to provide a mechanism for creating a vacuum atmosphere and a mechanism for supplying and discharging air to and from the second space sandwiching the pressing means. And there is a disadvantage that the control becomes complicated.
Therefore, in order to eliminate such inconvenience, a band-shaped adhesive sheet in which a plurality of tapered portions having a top portion capable of point contact or line contact with the adherend are formed along the longitudinal direction of the adhesive surface is adopted. It is conceivable that the adhesive sheet is pressed and stuck to the adherend as it is from the state in which the top of the taper portion 1 is in contact with the adherend.
However, the belt-like adhesive sheet provided with such a taper portion has a disadvantage that the taper portion cannot be positioned and attached to a predetermined position of the adherend.

  An object of the present invention is to reliably position and attach one taper portion to an adherend even if it is a belt-like adhesive sheet in which a plurality of taper portions are formed along the longitudinal direction of an adhesive surface. It is in providing the sheet sticking apparatus and sticking method which can be performed.

  In order to achieve the above object, a sheet sticking apparatus of the present invention has a first taper having a first apex which is formed in a belt shape with a first adhesive surface and can be point-contacted or line-contacted to a first adherend. A supply means for supplying a plurality of adhesive sheets provided along the longitudinal direction of the first adhesive surface, and a first top of the adhesive sheet supplied by the supply means abutting against the first adherend. A pressing means for applying a pressing force in the direction of the first adherend by the pressing surface to stick the adhesive sheet to the first adherend, and a detecting means capable of detecting the first top, The supply means employs a configuration in which the first top portion detected by the detection means is provided so as to be positioned at a predetermined position of the first adherend.

In this case, in the sheet sticking device of the present invention, the second adhesive surface on the opposite side of the first adhesive surface of the adhesive sheet has a second top portion that can make point contact or line contact with the second adherend. A plurality of second tapered portions are provided along the longitudinal direction of the adhesive sheet, and a tapered shape maintaining means capable of maintaining the shape of the second tapered portion is provided on the pressing surface of the pressing means. Is preferred.
In the sheet sticking device of the present invention, the second adhesive surface of the adhesive sheet opposite to the first adhesive surface can be deformed on the pressing surface of the pressing means to make point contact with the second adherend. Or it is preferable that the taper shape formation means which can form the 2nd taper part which has the 2nd top part which can be line-contacted is provided.
Furthermore, in the sheet sticking device of the present invention, it is preferable that a decompression unit capable of decompressing an area formed by the second tapered portion and the pressing surface on the second adhesive surface is provided.

  On the other hand, in the sheet sticking method of the present invention, a first taper portion having a first apex portion which has a first adhesive surface and is formed in a belt shape and has a first top portion which can be point-contacted or line-contacted to the first adherend is provided. Supplying a plurality of adhesive sheets provided along the longitudinal direction of the surface, detecting the first top, and positioning the detected first top at a predetermined position of the first adherend. And a step of applying a pressing force in the direction of the first adherend by the pressing surface to stick the adhesive sheet to the first adherend.

  According to the present invention as described above, even if the (first) taper portion is a strip-shaped adhesive sheet formed in plural along the longitudinal direction of the (first) adhesive surface, one (first) taper is provided. The portion can be reliably positioned and attached to the (first) adherend.

At this time, if the taper shape maintaining means or the taper shape forming means is provided on the pressing surface of the pressing means, the adhesive sheet is applied to the adherend while protecting the second taper portion or forming the second taper portion. can do.
Further, if a decompression unit capable of decompressing the region formed by the second tapered portion and the pressing surface is provided, the adhesive on the second adhesive surface can be drawn into the tapered shape maintaining unit or the tapered shape forming unit.

The side view of the sheet sticking apparatus which concerns on 1st Embodiment of this invention. The side view of the principal part of the sheet sticking apparatus which concerns on 2nd Embodiment of this invention. Operation | movement explanatory drawing of the sheet sticking apparatus which concerns on 3rd Embodiment of this invention.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
Detailed description of the same configuration and operation in each embodiment will be omitted.
In addition, in the following, when a direction such as up, down, left, right, near side, or back side is indicated without giving a reference figure, all of FIG. The top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction perpendicular to the page. To do.

In FIG. 1, the sheet sticking device 10 includes a first taper portion TK1 having a first adhesive surface FA1, which is formed in a belt shape, and has a first top portion TT1 that can be point-contacted or line-contacted with the first adherend WF1. A supply means 20 for supplying a plurality of adhesive sheets AS provided along the longitudinal direction of the first adhesive surface FA1, and a first top portion TT1 of the adhesive sheet AS supplied by the supply means 20 is attached to the first adherend WF1. The pressing means 40 that abuts the contact surface WA1 and applies a pressing force in the direction of the first adherend WF1 by the pressing surface 42 to attach the adhesive sheet AS to the first adherend WF1, and the adhesive sheet AS are predetermined. A cutting means 50 that forms a sticking sheet AS1 (see FIG. 3C) by cutting into a shape, contact with a non-contact type sensor such as an optical sensor, an ultrasonic sensor, a magnetic force sensor, an infrared sensor, a limit switch, etc. Type And a detection means 60 that can detect the first top portion TT1 and supports the first adherend WF1 by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Arranged above a support means 70 having a table 71 having a support surface 72.
In addition, the surface on the opposite side of the adhesive agent AD layer that forms the first adhesive surface FA1 is a second adhesive surface FA2, and the base material BS that becomes a base material sheet or a release sheet is formed on the second adhesive surface FA2. Temporarily worn. The first taper portion TK1 has a circular shape in a bottom view, and a first flat portion TF1 is formed between the first taper portions TK1.

The supply means 20 includes a support roller 21 that supports the original fabric RS in which the first adhesive surface FA1 of the adhesive sheet AS is temporarily attached onto the strip-shaped release sheet RL, and a plurality of guide rollers 22 that guide the original fabric RS. A pinch roller that folds the release sheet RL and sandwiches the release sheet RL between a release plate 23 as a release means for releasing the adhesive sheet AS from the release sheet RL and a driving roller 25 driven by a rotation motor 24 as a drive device. 26, a first collection roller 27 that is driven by a drive device (not shown) and collects the release sheet RL, and is rotated by a rotation motor 29 as a drive device supported by a slider 28A of a linear motor 28 as a drive device. A driving roller 30, a pinch roller 31 that sandwiches the adhesive sheet AS between the driving roller 30, a guide roller 32, A second collection roller 34 that is rotated by a rotation motor 33 as a moving device and collects the unnecessary adhesive sheet US generated by the formation of the sticking sheet AS1, and the first top portion TT1 detected by the detection means 60 is It is provided so that it can be positioned at a predetermined position of one adherend WF1.
Here, the release sheet RL is provided with a recess RR corresponding to the shape of the first taper portion TK1, as indicated by reference numeral AA in FIG.

The base material BS, the adhesive AD layer, and the release sheet RL are not limited in any way. Examples of the base material BS include paper, resin, rubber, wood, metal, ceramics, glass, and stone. Examples thereof include acrylic, rubber and silicone adhesives.
The release sheet RL may be formed in a strip shape or a sheet-like shape. Examples of the release material RL include those exemplified for the base material BS and those exemplified for the base material BS. Silicone release agents, alkyl pendant release agents, condensed waxes Examples include those obtained by laminating release agents such as a series release agent, a fluorine release agent, and a polyester release agent, and those made of a silicone resin, an alkyl pendant resin, a condensed wax resin, a fluorine resin, a polyester resin, and the like.
The base material BS, the adhesive AD layer, and the release sheet RL may have any thickness in light of technical common sense. Further, the height difference from the first top portion TT1 to the first flat portion TF1 of the first taper portion TK1 and the depth of the concave portion RR can be exemplified by those of 1 μm to 5 mm, but considering the thickness of the release sheet RL It may be more or less.
The adhesive AD layer preferably has fluidity when pressed against the first adherend WF1 or the second adherend, and the taper shape of the adhesive AD layer is smoothed when pressed. The thickness should be substantially uniform (substantially uniform). The adhesive AD layer may be one that exhibits fluidity or improves fluidity by applying an external force such as heating or cooling. Further, when the adherend side is deformable, the adhesive AD layer may have low fluidity or no fluidity when pressed against the adherend.

  The pressing means 40 includes a pressing plate 41 that is supported by an output shaft 43A of a direct acting motor 43 as a driving device and has a pressing surface 42 that is connected to a decompression means (not shown) such as a decompression pump or a vacuum ejector.

  The cutting means 50 includes a slider 52 that moves on a rail 51 provided along the side surface of the pressing plate 41 by a driving device (not shown), and a cutting blade that is provided on the slider 52 and can be moved up and down by a driving device (not shown). 53.

In the above sheet sticking apparatus 10, the procedure for sticking the adhesive sheet AS to the first adherend WF1 will be described.
First, as shown in FIG. 1, after the operator sets the original fabric RS as shown in the figure in a state where the slider 28A is in the initial position indicated by the two-dot chain line on the right side, an operation panel or personal computer (not shown) When an operation start signal is input via an input means such as a computer, the sheet sticking device 10 is in a standby state.

Next, when a transport means (not shown) such as a manual or multi-joint robot or a belt conveyor places the first adherend WF1 on the support surface 72 of the support means 70, the support means 70 drives a decompression means (not shown), 1 After adsorbing and holding the adherend WF1, the supply means 20 drives the rotation motor 24 and a driving device (not shown) to feed out the raw fabric RS, and the rotation motor 29 is locked in synchronization therewith. The motor 28 and the rotation motor 33 are driven to move the slider 28A to the left. Thereby, the adhesive sheet AS is peeled from the release sheet RL and pulled out while the unnecessary adhesive sheet US is wound up by the second collection roller 34. When the first top portion TT1 of the first adhesive surface FA1 of the adhesive sheet AS is detected by the detection means 60, the supply means 20 is based on the detection result, the supply means 20 is the rotation motor 24, a driving device (not shown), the linear motor 28 And the drive time and movement distance of the rotation motor 33 are counted, and when the predetermined count is completed, the drive is stopped. Accordingly, the first top portion TT1 stops at a predetermined position above the center of the first adherend WF1.
Next, the pressing means 40 drives the linear motion motor 43 to lower the pressing plate 41 at the initial position indicated by the solid line in FIG. 1, and presses the adhesive sheet AS against the first adherend WF1 with the pressing plate 41. Affix. At this time, the first adhesive surface FA1 and the first adherend are brought about by one operation of bringing the first top portion TT1 into contact with the first adherend WF1 and pressing the adhesive sheet AS against the first adherend WF1 as it is. Affixing the WF1 area gradually from the first top TT1 to the outer edge side and extruding air so that air bubbles are not formed at the adhesion interface between the first adhesion surface FA1 and the first adherend WF1. Can do.

  Thereafter, the cutting means 50 drives a driving device (not shown), and, as indicated by reference numeral BB in FIG. 1, the cutting blade 53 is lowered, then the driving device (not shown) is driven, and the slider 52 moves along the rail 51. By doing so, the adhesive sheet AS is cut along the outer edge of the first adherend WF1 to form the sticking sheet AS1. Next, the cutting means 50 drives a drive device (not shown) to raise the cutting blade 53, and the pressing means 40 drives the linear motion motor 43 to return the pressing plate 41 to the initial position.

  Next, the supply means 20 drives the rotation motor 29 and the linear motor 28, and moves the slider 28A to the initial position while rotating the driving roller 30, whereby the unnecessary adhesive sheet US is peeled from the support surface 72. Thereafter, the support means 70 stops driving the decompression means (not shown), and the manual or conveying means (not shown) removes the first adherend WF1 to which the sticking sheet AS1 is attached from the support surface 72 of the support means 70, and thereafter The same operation as above is repeated.

  According to the embodiment as described above, even if the first taper portion TK1 is a strip-like adhesive sheet AS formed in plural along the longitudinal direction of the first adhesive surface FA1, the first taper portion TK1 of one is formed. The first adherend WF1 can be surely positioned and pasted.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.
In FIG. 2, the sheet sticking apparatus 10 </ b> A is provided with a point for sticking the adhesive sheet ASA instead of the adhesive sheet AS and a pressing means 80 instead of the pressing means 40 to the sheet sticking apparatus 10 of the first embodiment. And the point that the decompression means 90 is newly provided is different.

  The adhesive sheet ASA is provided with a first adhesive surface FA1 and a second adhesive surface FA12, and is formed in a strip shape. The first adhesive surface FA1 is temporarily attached onto the strip-shaped release sheet RL as in the first embodiment. In addition, the second adhesive surface FA12 has a second top portion that can be point-contacted or line-contacted with a second adherend (not shown) at positions corresponding to the first top portion TT1 and the first taper portion TK1 in the front-back positional relationship. A plurality of second taper portions TK2 having TT2 are provided along the longitudinal direction of the adhesive sheet ASA. The second taper portion TK2 has a circular shape when viewed from above, a second flat portion TF2 is formed between the second taper portions TK2, and a cover sheet CS is temporarily attached to the upper surface.

The pressing unit 80 includes a tapered shape maintaining unit 85 that can maintain the shape of the second tapered portion TK2 on the pressing surface 42 with respect to the pressing unit 40 of the first embodiment.
The tapered shape maintaining means 85 includes a top maintaining portion 85A and a taper maintaining portion 85B that correspond to the shape of the second tapered portion TK2 and maintain the shapes of the second top portion TT2 and the second tapered portion TK2. The height difference of the taper shape maintaining means 85 can be exemplified by 1 μm to 5 mm, but may be more or less. Further, the taper shape maintaining means 85 only needs to be able to maintain the shape of the second taper portion TK2, and therefore may have a shape corresponding to the shape of the second taper portion TK2 (the same shape) or a shape that does not correspond (different). Shape). When the taper shape maintaining means 85 has a shape that does not correspond to the shape of the second taper portion TK2, a region formed by the second taper portion TK2 and the pressing surface 42 when the adhesive sheet ASA is pressed against the first adherend WF1. A pressurizing means such as a pressurizing pump or a turbine for pressurizing the pressure may be provided.
The decompression means 90 may be configured to be able to decompress the area formed by the second taper portion TK2 and the pressing surface 42, and may be composed only of the hole 90A provided in the top portion maintenance portion 85A of the taper shape maintaining means 85. In addition, a pressure reducing device 90B such as a pressure reducing pump or a vacuum ejector forcibly reducing the pressure through the hole 90A may be included. In addition, when the decompression means 90 is comprised only by the hole 90A, the said hole may have a bottom or a bottom.

In the above-described sheet sticking apparatus 10A, the procedure for sticking the adhesive sheet ASA to the first adherend WF1 is the same as in the first embodiment, and the first top TT1 is stopped above the center of the first adherend WF1. Then, the pressing unit 80 drives the pressure reducing unit 90 and the linear motion motor 43 to lower the pressing plate 41 and forcibly pull the second tapered portion TK2 into the tapered shape maintaining unit 85. After that, the pressing means 80 drives the linear motion motor 43, the adhesive sheet ASA is pasted on the first adherend WF1 by the same operation as in the first embodiment, and the first adherend to which the sticking sheet AS1 is pasted. WF1 is removed, and thereafter the same operation as described above is repeated. When the pressure reducing means 90 is not provided, the second taper portion TK2 follows the lowering of the pressing plate 41 without forcibly pulling the second taper portion TK2 into the taper shape maintaining means 85, and the taper shape maintaining means. 85, and sticking similar to the above is performed. Accordingly, the sticking sheet AS1 can be stuck to the first adherend WF1 while protecting the second taper portion TK2. In addition, after peeling cover sheet CS, 2nd taper part TK2 makes 2nd top part TT2 contact | abut to the 2nd to-be-adhered body which is not shown in figure, and adhesive sheet ASA or sticking sheet AS1 is made into a 2nd to-be-adhered body as it is. By the first operation of pressing, the sticking area between the second adhesive surface FA12 and the second adherend is gradually expanded from the second top portion TT2 to the outer edge side, and the air is pushed out so as to push out the air. It can stick so that a bubble may not be formed in the adhesion interface with a to-be-adhered body.
Even in the second embodiment as described above, the same effects as in the first embodiment can be obtained.

[Third Embodiment]
Next, a third embodiment of the present invention will be described.
In FIG. 3A, the sheet sticking apparatus 10B includes a point for sticking the adhesive sheet AS instead of the adhesive sheet ASA and a pressing means 100 instead of the pressing means 80 to the sheet sticking apparatus 10A of the second embodiment. It differs from the provided point.
The pressing unit 100 deforms the second adhesive surface FA2 of the adhesive sheet AS in place of the tapered shape maintaining unit 85 of the second embodiment, and is capable of making point contact or line contact with a second adherend (not shown). The point which provided the taper shape formation means 105 which can form 2nd taper part TK12 which has the top part TT2, and the deformation | transformation acceleration | stimulation means 106 which is provided inside the press plate 41 and accelerates | stimulates deformation | transformation of adhesive agent AD layer of the adhesive sheet AS. It is different from the newly provided point. The second taper portion TK12 has a circular shape when viewed from above.

The tapered shape forming means 105 is basically equivalent to the tapered shape maintaining means 85.
As the deformation promoting means 106, a heating means such as a coil heater or a heat pipe heating side, a cooling means such as a Peltier element or a cooling side of a heat pipe, a light irradiation means, a microwave irradiation means, an ultraviolet irradiation means, an infrared irradiation means, It can be selected appropriately according to the characteristics of the adhesive AD layer, such as microwave irradiation means, X-ray irradiation means, vibration applying devices such as ultrasonic vibration devices and eccentric motors, etc., and softening or gathering the adhesive AD Thus, the adhesive AD is promoted to be deformed into a predetermined shape, and in this embodiment, a heating means is employed. The deformation promoting means 106 may be provided outside the pressing plate 41.

In the above-described sheet sticking apparatus 10B, the procedure for sticking the adhesive sheet AS to the first adherend WF1 is basically performed in the same manner as in the second embodiment, and the adhesive sheet AS is forcibly provided in the tapered shape forming unit 105. Or when the adhesive sheet AS is pressed against the first adherend WF1, the pressing means 100 drives the deformation promoting means 106 to promote the deformation of the adhesive AD layer of the adhesive sheet AS, and the second. A second tapered portion TK2 having a second top portion TT2 is formed on the adhesive surface FA2. Accordingly, the sticking sheet AS1 can be attached to the first adherend WF1 while forming the second taper portion TK2.
Even in the third embodiment as described above, the same effects as those in the first and second embodiments can be obtained.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such restrictions is included in this invention.

For example, the detection means 60 may be configured to detect the first top portion TT1 from the lower, side, upper, or oblique directions of the adhesive sheet AS, ASA, or may be configured to detect the first top portion TT1 from the plurality of directions. It may be configured to detect the first top portion TT1 by appropriately combining the sensors exemplified above and the imaging means.
In addition, the detection means can detect the second top portion TT2 in the second embodiment, and the supply means 20 is provided so that the second top portion TT2 detected by the detection means can be positioned at a predetermined position of the first adherend WF1. May be.
Furthermore, in the first to third embodiments, the pressing surface 42 of the pressing plate 41 may be provided with a holding unit that holds the adhesive sheets AS and ASA by suction or mechanically holds them.
Further, the detection means indirectly detects the first markings, holes, engraving marks, and the like provided on the adhesive sheets AS and ASA corresponding to the first top portion TT1 and the second top portion TT2, thereby indirectly providing the first. You may comprise so that top part TT1 and 2nd top part TT2 may be detected.
Further, the cutting means 50 may be other cutting means such as a laser cutter, compressed air cutting, compressed water cutting, etc., and can be freely independent of the pressing plate 41 without rotating along the side surface of the pressing plate 41. For example, a cutting member such as a cutting blade 53 or a laser cutter may be moved by an articulated robot as a driving device.
In the first and second embodiments, the deformation promoting means 106 may be provided, and in the second and third embodiments, the decompression means 90 may not be provided.
Moreover, in 1st-3rd embodiment, when sticking adhesive sheet AS and ASA to the 1st to-be-adhered body WF1, you may raise the table 71 via the drive device which is not shown in figure, and the press plate 41 and the table You may comprise so that both 71 may be moved and affixed.
Further, the first and second taper portions TK1, TK2, or TK12 may have any shape such as a polygon or an ellipse instead of a circular shape in a bottom view or a top view, or a first adherend. A shape along the outer shape of WF1 or the second adherend may be used, or a shape not along the outer shape may be used.
Further, the first and second flat portions TF1 and TF2 may not be formed on the adhesive sheets AS and ASA.
Furthermore, although the height difference of 2nd taper part TK2 and TK12 can illustrate a thing of 1 micrometer-5 mm, it may be more or less.
Further, the shape of the first top portion TT1 and the shape of the second top portion TT2 may be the same or different, and in such a configuration, a top portion capable of point contact is provided on one surface, You may provide the top part which can be line-contacted on the other surface.
In addition, the positions of the first and second apexes capable of point contact or line contact in the present invention may be the centers of the first and second taper portions, or may be shifted from the centers.
Furthermore, in each embodiment, the peeling means may be constituted by a round bar, a roller, or the like.
Further, when the adhesive sheet AS attached to the first adherend WF1 is cut into a predetermined shape by another cutting apparatus or manually, the cutting means 50 may not be provided.
Further, the support means 70 may be configured to hold the first adherend WF1 by sandwiching the first adherend WF1 with a mechanical chuck or the like.
Further, the position at which the first top portion TT1 is stopped may be the center of the first adherend WF1 or a position off the center.
Further, the second top portion TT2 of the second taper portion TK2 may be one or plural for one second adherend.
Furthermore, the positions of the first top portion TT1 and the first taper portion TK1 may be shifted from the positions of the second top portion TT2 and the second taper portion TK2 in the front-back positional relationship.
Further, the positions of the first and second top portions TT1 and TT2 may be in contact with the first and second adherends at any position.
Furthermore, the sticking sheet AS1 is not shaped along the outer edge of the first adherend WF1, but may be cut inside or outside the outer edge of the first adherend WF1, for example, circular, Any shape such as a square or an ellipse may be used.
Further, the first, second taper portions TK1, TK2, or TK12 are formed by connecting the two surfaces at a predetermined angle and forming the first top portion TT1 that can be in line contact with the first adherend WF1 by the connection portion. The two surfaces may be curved or bent in a side view, and the first apex TT1 that can make point contact with the first adherend WF1 is formed by the apex of a conical shape or a pyramid shape. The conical surfaces may be curved or bent in a side view.
Furthermore, the taper shape maintaining means and the taper shape forming means may be formed by connecting two surfaces at a predetermined angle and forming the top maintaining portion 85A by the connecting portion, and these two surfaces are curved in a side view, A bent shape may be used, or the apex maintaining portion 85A may be formed by apexes such as a conical shape or a pyramid shape, and the conical surfaces may be curved or bent in a side view.

  Further, the material, type, shape, etc. of the adhesive sheet and adherend in the present invention are not particularly limited. For example, the sticking sheet AS1 may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, or other shapes, or may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive sheet is employed, it may be bonded by an appropriate method such as providing a heating means such as an appropriate coil heater or heat pipe for heating the adhesive sheet. Such an adhesive sheet is, for example, a single layer having only an adhesive layer, having an intermediate layer between the substrate and the adhesive layer, and having a cover layer on the upper surface of the substrate. Or a so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer, and the double-sided adhesive sheet has a single-layer or multiple-layer intermediate layer, It may be a single layer or multiple layers without an intermediate layer. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. It should be noted that the adhesive sheet is replaced with functional and intended readings, for example, any shape such as information description label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet Any sheet, film, tape or the like can be attached to any adherend as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the supply means has a first adhesive surface and is formed in a belt shape, and a first taper portion having a first apex that can be point-contacted or line-contacted with the first adherend is a longitudinal direction of the first adhesive surface. As long as it supplies a plurality of adhesive sheets along the line, there is no limitation as long as it is within the technical scope in light of the technical common sense at the time of filing (for other means and processes). (Description is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10, 10A, 10B ... Sheet sticking apparatus 20 ... Supply means 40, 80, 100 ... Pressing means 42 ... Pressing surface 60 ... Detection means 85 ... Tapered shape maintaining means 90 ... Decompression means 105 ... Tapered shape forming means AS, ASA ... Adhesion Sheet FA1... First adhesive surface FA2, FA12. Second adhesive surface TK1, TK2, TK12... First, second and second taper portions TT1, TT2... First and second top portions WA1. Adherend

Claims (5)

A plurality of first taper portions having a first apex portion which is formed in a belt shape with a first adhesive surface and has a first apex that can be point-contacted or line-contacted with the first adherend are provided along the longitudinal direction of the first adhesive surface. Supply means for supplying the adhesive sheet,
The first top portion of the adhesive sheet supplied by the supply means is brought into contact with the first adherend, and a pressing force is applied in the direction of the first adherend by the pressing surface to attach the adhesive sheet to the first adherend. A pressing means to be applied to the body;
Detecting means capable of detecting the first top,
The sheet feeding apparatus, wherein the supply means is provided so that the first top portion detected by the detection means can be positioned at a predetermined position of the first adherend. On the second adhesive surface opposite to the first adhesive surface of the adhesive sheet, a second taper portion having a second apex that can be point-contacted or line-contacted with the second adherend is provided in the longitudinal direction of the adhesive sheet. Are provided along with
The sheet sticking device according to claim 1, wherein the pressing surface of the pressing means is provided with a tapered shape maintaining means capable of maintaining the shape of the second tapered portion.   The pressing surface of the pressing means has a second apex that deforms the second adhesive surface of the adhesive sheet opposite to the first adhesive surface and can be point-contacted or line-contacted to the second adherend. The sheet sticking device according to claim 1, further comprising a taper shape forming unit capable of forming the second taper portion.   4. The sheet sticking device according to claim 2, further comprising a decompression unit capable of decompressing a region formed by the second tapered portion and the pressing surface on the second adhesive surface. 5. A plurality of first taper portions having a first apex portion which is formed in a belt shape with a first adhesive surface and has a first apex that can be point-contacted or line-contacted with the first adherend are provided along the longitudinal direction of the first adhesive surface. Supplying an adhesive sheet,
Detecting the first top;
The detected first top portion is positioned at a predetermined position of the first adherend, and a pressing force is applied to the first adherend by the pressing surface to attach the adhesive sheet to the first adherend. And a step of sticking to the sheet.

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