JP3224633U - Sheet pasting device - Google Patents

Abstract

An object of the present invention is to provide a sheet sticking apparatus capable of preventing a second adhesive sheet from obstructing even when a frame member is reused. Kind Code: A1 A sheet bonding apparatus EA for bonding a second adhesive sheet AS2 to an integrated product UP supported on a frame member RF by a semiconductor wafer WF via a first adhesive sheet AS1 supplies the second adhesive sheet AS2. A printing unit 20 for printing on the second adhesive sheet AS2 supplied by the supply unit 10; and a sticking unit 30 for sticking the second adhesive sheet AS2 printed by the printing unit 20 to the integrated object UP. The printing means 20 includes, on the second adhesive sheet AS2, an input means 21 for inputting predetermined information IF1, and semi-font type information IF2 in which the predetermined information IF1 input to the input means 21 is composed of a semi-font typeface. A printing device 22 for printing, and the attaching means 30 is configured to attach the second adhesive sheet AS2 on which the semi-font typeface information IF2 is printed to the integrated material UP. Affixed to the first adhesive sheet AS1. [Selection diagram] Fig. 1

Description

  The present invention relates to a sheet sticking device.

  2. Description of the Related Art Conventionally, there has been known an apparatus that reads information provided on a semiconductor wafer (hereinafter, also simply referred to as “wafer”), prints the read information on a label, and affixes the printed label to a frame (for example, Patent Document 1). 1).

JP-A-2019-21674

  However, in the ID sticking unit 700 (sheet sticking device) described in Patent Literature 1, a label 17 (second adhesive sheet) on which identification information 16 (information) is printed is stuck to a frame 19 (frame member). Therefore, when the adhesive tape 18 (first adhesive sheet) is removed from the frame member and the frame member is reused, there is a disadvantage that the second adhesive sheet stuck to the frame member remains and becomes an obstacle. .

  SUMMARY OF THE INVENTION It is an object of the present invention to provide a sheet sticking apparatus capable of preventing a second adhesive sheet from remaining and obstructing a case where the first adhesive sheet is removed from a frame member and the frame member is reused. Is to do.

  The present invention employs the configuration described in the claims.

  According to the present invention, since the second adhesive sheet is attached to the first adhesive sheet in an integrated body, the second adhesive sheet remains when the first adhesive sheet is removed from the frame member and the frame member is reused. Can be prevented from getting in the way.

Explanatory drawing of the sheet sticking apparatus which concerns on embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. I do. Furthermore, in the present embodiment, when the direction is indicated without specifying the figure, “up” is “down” in the direction of the arrow of the Z axis, based on the case of viewing from the near side in FIG. 1 parallel to the Y axis. 1 is the opposite direction, “left” is the direction of the arrow on the X axis, “right” is the opposite direction, “front” is the near side in FIG. 1 parallel to the Y axis, and “rear” is the opposite direction.

The sheet sticking apparatus EA of the present invention is an apparatus for sticking a second adhesive sheet AS2 to an integral body UP supported by a wafer WF via a first adhesive sheet AS1 on a ring frame RF as a frame member. Supply means 10 for supplying the adhesive sheet AS2, printing means 20 for printing on the second adhesive sheet AS2 supplied by the supply means 10, and attaching the second adhesive sheet AS2 printed by the printing means 20 to the integrated material UP Attaching means 30, a predetermined information IF1, a verification means 40 for verifying the consistency between the semi-font type information IF2 printed on the second adhesive sheet AS2, and a third adhesive sheet AS3 at a stage preceding the input means 21. The apparatus includes a sheet peeling unit 50 that peels off the wafer WF and an integrated object transport unit 60 that transports a single support table 62 that supports the integrated object UP.
Note that the wafer WF of the present embodiment is provided with predetermined information IF1 on the wafer WF on a surface opposite to the surface on which the first adhesive sheet AS1 is attached, and is provided with a predetermined information IF1 on the opposite surface. 3 adhesive sheet AS3 is stuck.

  The supply means 10 includes a support roller 11 for supporting the raw sheet RS in which the second adhesive sheet AS2 is temporarily attached to the strip-shaped release sheet RL, a guide roller 12 for guiding the raw sheet RS, and a release sheet RL at the release edge 13A. Is turned back, and the release sheet RL is supported by a release plate 13 as a release means for releasing the second adhesive sheet AS2 from the release sheet RL and an output shaft (not shown) of a rotary motor 14A as a driving device, and a pinch roller 14B. A predetermined tension is always applied to the peeling sheet RL between the pinch roller 14B and the driving roller 14 that sandwiches the sheet RL and the pinch roller 14B, which is supported by the output shaft of a driving device (not shown) and is automatically operated by the sheet sticking device EA. And a collecting roller 15 as collecting means for collecting the applied release sheet RL.

The printing means 20 prints, on the second adhesive sheet AS2, input means 21 for inputting predetermined information IF1, and semi-font type information IF2 in which the predetermined information IF1 input to the input means 21 is composed of a semi-font typeface. And a printing device 22 to be used.
The input unit 21 includes an imaging unit such as a camera and a projector, and a detection device 21A including various sensors such as an optical sensor and an ultrasonic sensor.
The printing device 22 includes a thermal head 22A.
The semi-font (SEMIFont) is also known as a semi-OCR font (SEMI OCR Font), and is a font (font) used for marking a wafer WF in the semiconductor industry. ).

  The sticking means 30 includes a linear motion motor 31 as a driving device and a holding member 32 which is supported by an output shaft 31A and has a support surface 32A which can be suction-held by a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector. The second adhesive sheet AS2 on which the semi-font type information IF2 is printed is attached to the first adhesive sheet AS1 of the integrated object UP.

  The verification unit 40 is configured to be shared by the input unit 21.

  The sheet peeling means 50 rotates around a support roller 51 for supporting a strip-shaped peeling tape PT as a holding means, a guide roller 52 for guiding the peeling tape PT, and an output shaft 53A of a linear motor 53 as a driving device. A peeling roller 54 that is supported so as to be supported, a driving roller 55 that is supported by an output shaft (not shown) of a rotation motor 55A as a driving device and sandwiches the peeling tape PT with a pinch roller 55B, and an output shaft of the driving device that is not shown. Collecting means for applying a predetermined tension to the peeling tape PT existing between the pinch roller 55B and the peeling tape PT while the automatic operation of the sheet sticking apparatus EA is performed. And a collection roller 56 as a recycle roller.

  The integrated object transfer means 60 includes a linear motor 61 as a driving device and a support table 62 which is supported by a slider 61A and has a support surface 62A which can be suction-held by a decompression device (not shown) such as a decompression pump or a vacuum ejector. Have.

The operation of the above-described sheet sticking apparatus EA will be described.
First, the user of the sheet sticking apparatus EA (hereinafter, simply referred to as “user”) receives the raw sheet as shown in FIG. 1 with respect to the sheet sticking apparatus EA in which each member is arranged at an initial position indicated by a solid line in FIG. After the RS is set, a signal for starting automatic operation is input via operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 10 drives the rotation motor 14A to feed out the raw material RS, and as shown in FIG. 1A, the leading end of the leading second adhesive sheet AS2 in the feeding direction is the printing position PP of the thermal head 22A. When a predetermined position to the right is reached, the driving of the rotary motor 14A is stopped.

  Next, when a user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the integrated object UP on the support table 62, the integrated object conveying means 60 drives a pressure reducing means (not shown) and the supporting surface 62A. Of the integrated material UP is started. Thereafter, the integrated object conveying means 60 drives the linear motor 61 to move the support table 62 to the left. As shown by the solid line in FIG. 1B, the left end of the third adhesive sheet AS3 is When the linear motor 61 reaches just below the lowermost position, the driving of the linear motor 61 is stopped. Next, the sheet peeling means 50 drives the linear motion motor 53, and lowers the peeling roller 54 as shown by the two-dot chain line in FIG. 1 (B), and removes the peeling tape PT from the left end of the third adhesive sheet AS3. Affix to. Then, the sheet peeling means 50 and the integrated object transporting means 60 drive the rotation motor 55A and the linear motor 61 to move the support table 62 to the left and to feed out the peeling tape PT in accordance with the moving speed. Thereby, as shown by a two-dot chain line in FIG. 1B, the third adhesive sheet AS3 is peeled from the wafer WF, and the peeled third adhesive sheet AS3 is sent to the collection roller 56 together with the peeling tape PT. Can be Next, when the entire third adhesive sheet AS3 is peeled from the wafer WF, the sheet peeling means 50 drives the linear motor 53 to return the peeling roller 54 to the initial position, and then stops driving the rotary motor 55A. I do.

  Thereafter, when the predetermined information IF1 provided on the wafer WF reaches the detection position of the detection device 21A, the printing unit 20 drives the detection device 21A, reads the predetermined information IF1, and reads the read predetermined information IF1. Output to the printing device 22. When the predetermined information IF1 is input to the printing device 22, the supply unit 10, the printing unit 20, and the attaching unit 30 drive the rotary motor 14A, the thermal head 22A, and the unillustrated decompression unit, and shown in FIG. In such a manner, the raw RS is extended. At this time, the thermal head 22A prints the predetermined information IF1 input to the printing device 22 on the second adhesive sheet AS2 at the head which passes the printing position PP by printing the semi-font type information IF2 composed of a semi-font type. I do. Next, when the leading end of the next second adhesive sheet AS2 following the leading second adhesive sheet AS2 in the feeding direction reaches a predetermined position to the right of the printing position PP of the thermal head 22A, the driving of the rotary motor 14A is stopped. I do. Thereby, as shown in FIG. 1D, the second adhesive sheet AS2 on which the semi-font typeface information IF2 is printed (hereinafter, also referred to as “printed second adhesive sheet AS2”) is suction-held by the holding member 32. You.

  Then, as shown in FIG. 1 (D), when the exposed portion of the first adhesive sheet AS1 in the integrated object UP is located immediately below the holding member 32, the integrated object transfer means 60 stops driving the linear motor 61. Next, the attaching means 30 drives the linear motor 31 to lower the holding member 32, and presses the printed second adhesive sheet AS2 against the first adhesive sheet AS1 as shown by a two-dot chain line in FIG. After that, the driving of the pressure reducing means (not shown) is stopped to return the holding member 32 to the initial position, and the printed second adhesive sheet AS2 is attached to the first adhesive sheet AS1. Thereafter, the integrated object transporting means 60 drives the linear motor 61 to move the support table 62 rightward, and as shown in FIG. 1E, the printed second adhesive sheet AS2 is moved to the detection position of the detection device 21A. Upon arrival, the verification means 40 drives the detection device 21A to read the semi-font type information IF2 printed on the printed second adhesive sheet AS2. When the detecting device 21A reads the semi-font type information IF2, the verification unit 40 verifies the consistency between the semi-font type information IF2 and the predetermined information IF1, and checks the verification result as to whether or not they are consistent with each other. Output to the device.

  Next, the integrated object transfer means 60 drives the linear motor 61 to move the support table 62 to the left, and when the support table 62 reaches a predetermined position to the left of the attaching means 30, the drive of the linear motor 61 is stopped. Thereafter, the drive of the pressure reducing means (not shown) is stopped, and the suction holding of the integrated object UP on the support surface 62A is released. Thereafter, when the user or a transporting means (not shown) transports the integrated material UP on which the printed second adhesive sheet AS2 is affixed to the next step, the integrated material transporting device 60 drives the linear motor 61 to initialize the support table 62. Position, and the same operation is repeated thereafter. In addition, the user or the transporting unit (not shown) transports only the integrated product that has passed the verification to the regular next process based on the verification result output by the verification unit 40, and the integrated product that has failed the verification is: Transfer to the verification failure process. For the pass / fail of the verification, for example, a notifying means (not shown) for displaying on a monitor, notifying the user by emitting a sound such as a buzzer or a bell, or sending a signal to a conveying means (not shown) by an electric signal is employed. May be.

  According to the above-described embodiment, since the second adhesive sheet AS2 is attached to the first adhesive sheet AS1 in the integrated body UP, the first adhesive sheet AS1 is removed from the ring frame RF, and the ring frame RF is reused. Even in such a case, it is possible to prevent the second adhesive sheet AS2 from being in the way.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for the means and steps, much less the constituents of only one embodiment shown in the above embodiment and There is no limitation to the process at all. For example, the supply means is not limited as long as it can supply the second adhesive sheet, in light of the common technical knowledge at the beginning of the application, and is not limited as long as it is within the technical range (other means and steps). The same).

  The supply unit 10 is configured such that a predetermined cut-off area is formed by forming a cut in a closed loop shape or a short width direction entirely in a band-shaped adhesive sheet base material temporarily attached to the release sheet RL. (2) The original sheet as the adhesive sheet AS2 may be unwound, or the original sheet in which a strip-shaped adhesive sheet base material is temporarily attached to the release sheet RL may be used, and the adhesive sheet base material may be entirely closed loop or in the short width direction. Is formed by the cutting means, and a predetermined area partitioned by the cut may be used as the second adhesive sheet AS2, or a configuration in which a band-shaped adhesive sheet base material is attached to the wafer WF may be used. When peeling the adhesive sheet AS2 from the peeling sheet RL, torque control of the rotation motor 14A may be performed so that a predetermined tension is applied to the raw sheet RS, or each roller such as the support roller 11 and the guide roller 12 may be controlled. Instead of plate-like members The raw material RS or the release sheet RL may be supported or guided by a raft member or the like, and without being wound, for example, the raw material RS may be folded from a fanfold-folded raw material RS. The sheet may be supported so as to be pulled out, or the release sheet RL may be collected without being wound, for example, by fanfold folding, or cut and shredded with a shredder, or may be wound or fanfold folded. Instead, the release sheet RL may be simply collected and collected, the release sheet RL may not be collected, or the second adhesive sheet AS2 to which the release sheet RL is not temporarily attached may be fed.

The printing unit 20 may print an arbitrary figure on the second adhesive sheet AS2 in addition to the one-dimensional code and the two-dimensional code together with the semi-font type information IF2, or may apply coloring together with the semi-font type information IF2. Then, the printing apparatus 22 may be moved to print the semi-font type information IF2 on the second adhesive sheet AS2 without moving the second adhesive sheet AS2 or while moving the second adhesive sheet AS2. The semi-font type information IF2 may be printed on the second adhesive sheet AS2 without moving both of the devices 22.
The input unit 21 may be a unit for inputting predetermined information IF1 output from another output unit such as a host computer or another control device, or a predetermined information provided on the wafer WF through the third adhesive sheet AS3. May be read, or a predetermined information IF1 provided at a position where the third adhesive sheet AS3 is not attached may be read.
The printing device 22 may be a monochrome printer or a color printer, for example, a thermal printer, an ink jet printer, a dot impact printer, a transfer printer, a laser printer, a relief printer, an intaglio printer, a gravure printer, screen printing. Any device such as a container or the like, or a device to be engraved may be used.

  The attaching unit 30 may attach the printed second adhesive sheet AS2 to the first adhesive sheet AS1 by moving the integrated object UP without moving or moving the printed second adhesive sheet AS2, A configuration may be adopted in which the printed second adhesive sheet AS2 is attached to the wafer WF in any of the front, rear, left and right directions, a configuration in which the printed second adhesive sheet AS2 is attached to the entire periphery of the wafer WF, or a first adhesive sheet. The printed second adhesive sheet AS2 may be attached to a surface of the AS1 opposite to the surface to which the wafer WF is attached, or one or a plurality of printed second adhesives may be attached to one integrated body UP. A configuration in which the sheet AS2 is attached may be employed, or a pressing roller as pressing means may be employed instead of the linear motor 31 and the holding member 32, and a mark may be formed in accordance with the moving integral object UP. The second adhesive sheet AS2 may be supplied, and the printed second adhesive sheet AS2 may be pressed and adhered to the first adhesive sheet AS1 with a pressing roller. In this case, the integrated material UP may be moved or moved without moving. The printed second adhesive sheet AS2 may be adhered to the first adhesive sheet AS1 by moving the attaching means 30 and the like while performing.

  For example, as shown by a two-dot chain line in FIG. 1 (A), the verification unit 40 may include an imaging unit such as a camera or a projector, an optical sensor, A verification device 41 including various sensors such as an ultrasonic sensor may be provided, and when verifying the consistency between the predetermined information IF1 and the semi-font type information IF2, the semi-font type information IF2 to be verified is determined. In order to print, the verification may be performed using the predetermined information IF1 previously read, the predetermined information IF1 read again at the verification stage may be used, or the detection device 21A may use a semi-font typeface. The information IF2 and the predetermined information IF1 may be read at the same time to verify their consistency, for example, a monitor that displays the success or failure of the verification, a speaker that notifies the success or failure of the verification by sound, or A pass / fail notification unit such as a signal output device that outputs the pass / fail of the certificate to a conveying unit or another device (not shown) by an electric signal may be adopted, or the sheet sticking apparatus EA of the present invention may be provided or provided. It does not have to be.

  The sheet peeling means 50 holds the peeling tape PT affixed to the third adhesive sheet AS3 or the third adhesive sheet AS3 by a driving device such as a chuck cylinder, and moves the third adhesive sheet AS3 relative to the wafer WF. It may be configured to be peeled off, may be provided in the sheet sticking apparatus EA of the present invention, or may not be provided.

  When the predetermined information IF1 is read by the input unit 21, when the peeling tape PT is attached to the third adhesive sheet AS3, the integrated article transport means 60 attaches the printed second adhesive sheet AS2 to the first adhesive sheet AS1. At this time, or when the semi-font type information IF2 is read by the verification means 40, the movement of the integrated object UP may or may not be stopped, and the sheet UP is provided in the sheet sticking apparatus EA of the present invention. May or may not be provided.

The predetermined information IF1 may be directly printed or stamped on at least one of the wafer WF, the first adhesive sheet AS1 and the ring frame RF, or may be printed on another adhesive sheet or plate. It may be provided indirectly through what is printed or stamped on the body, may be composed of semi-fonts, may be composed of fonts such as Mincho or Gothic fonts It may be a one-dimensional code, a two-dimensional code, an arbitrary figure, or the like. For example, it may be provided on the surface of the wafer WF to which the first adhesive sheet AS1 is attached or on the side surface thereof. May be provided on the surface of the first adhesive sheet AS1 to which the wafer WF is attached or on the opposite surface thereof, or may be provided on the first adhesive sheet of the ring frame RF. AS1 is a surface of the patch has been surface and the opposite side or may be provided on the side surface or the like, may be provided in any position.
The predetermined information IF1 and the semi-font type information IF2 may be not only information on the wafer WF but also, for example, information on at least one of the wafer WF, the first adhesive sheet AS1 and the ring frame RF, or the wafer WF and the first Information other than the adhesive sheet AS1 or the ring frame RF may be included, and the content may include at least one of a manufacturing date, a manufacturing location, a lot number, a use condition, a handling condition, and use of at least one of the wafer WF, the first adhesive sheet AS1 and the ring frame RF. Any information, such as a time limit, may be used.
The third adhesive sheet AS3 may not be attached to the wafer WF.
The frame member may or may not be annular.

  The materials, types, shapes, and the like of the first, second, and third adhesive sheets AS1, AS2, AS3, the wafer WF, and the frame member in the present invention are not particularly limited. For example, the first, second, and third adhesive sheets AS1, AS2, AS3, the wafer WF, and the frame member may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. , The second and third adhesive sheets AS1, AS2, and AS3 may be of an adhesive form such as pressure-sensitive adhesive property or heat-sensitive adhesive property. The sheet may be bonded by an appropriate method such as providing an appropriate coil heater for heating the sheet or a heating means such as a heating side of the heat pipe. Further, such first, second, and third adhesive sheets AS1, AS2, and AS3 are, for example, those having a single layer of only an adhesive layer, those having an intermediate layer between a base material and an adhesive layer, Three or more layers such as having a cover layer on the upper surface of the base material, and further, a so-called double-sided adhesive sheet capable of peeling the substrate from the adhesive layer may be used. It may have a single-layer or multiple-layer intermediate layer, or may have a single-layer or multiple-layer without an intermediate layer. Further, the wafer WF may be, for example, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer. Note that the first, second, and third adhesive sheets AS1, AS2, and AS3 may be replaced with functional and intended reading methods. For example, information writing labels, decorative labels, protective sheets, dicing tapes, die attach films, Any sheet such as a die bonding tape or a recording layer forming resin sheet, a film, a tape, or the like may be used.

Driving devices in the above embodiment include electric devices such as a rotary motor, a linear motor, a linear motor, a single-axis robot, a multi-joint robot having two or three or more joints, an air cylinder, a hydraulic cylinder, and a rodless. Actuators and the like such as cylinders and rotary cylinders can be employed, and those obtained by directly or indirectly combining them can be employed.
In the embodiment, when a rotating member such as a roller is employed, a driving device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be deformable such as rubber or resin. It may be constituted by a member, may be constituted by a member that does not deform the surface of the rotating member or the rotating member itself, or adopts another member such as a shaft or a blade that rotates or does not rotate instead of the roller Alternatively, when a device that presses a pressed object such as a pressing unit or a pressing member such as a pressing roller or a pressing head is used, instead of or in combination with the above examples, a roller, a round bar, or a blade A member such as a material, rubber, resin, sponge, or the like, or a configuration in which the material is pressed by blowing a gas such as air or gas, or a deformable portion such as rubber or resin may be used. It may be constituted by a member that does not deform, or may be constituted by a member that does not deform, or a member that separates an object to be separated such as a separating unit or a separating member such as a separating plate or a separating roller is exemplified above. Instead of or in combination with a member, a member such as a plate member, a round bar, a roller, or the like, or a member to be peeled may be formed of a deformable member such as rubber or resin, When a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is employed, a mechanical chuck or a chuck cylinder may be used. The supporting member is supported (held) by gripping means such as, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, driving equipment, etc. May be adopted or cut When cutting a member to be cut such as a step or a cutting member, or a member that forms a cut or a cutting line in the member to be cut is employed, instead of or in combination with the above examples, a cutter blade, a laser Use a cutter that cuts with a cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying gas or liquid, etc., or move and cut with a combination of appropriate driving equipment. Or you may be.

EA sheet adhering device 10 supply means 20 printing means 21 input means 22 printing equipment 30 adhering means 40 verification means 50 sheet peeling means 60 integrated article conveying means 62 support table AS1 first adhesive sheet AS2 second adhesive sheet AS3 third adhesive sheet IF1 Predetermined information IF2 Semi-font type information RF Ring frame (frame member)
UP Integrated WF Semiconductor Wafer

Claims (5)

In a sheet sticking apparatus for sticking a second adhesive sheet to an integrated body in which a semiconductor wafer is supported by a frame member via a first adhesive sheet,
Supply means for supplying the second adhesive sheet;
Printing means for printing on the second adhesive sheet supplied by the supply means,
Attaching means for attaching the second adhesive sheet printed by the printing means to the integrated object,
An input unit for inputting predetermined information, and a printing device for printing, on the second adhesive sheet, semi-font type information in which the predetermined information input to the input unit is configured as a semi-font typeface. With
The sheet sticking apparatus, wherein the sticking means sticks the second adhesive sheet on which the semifont typeface information is printed to the first adhesive sheet in the integrated body.   2. The sheet sticking apparatus according to claim 1, further comprising a verification unit configured to verify consistency between the predetermined information and the semi-font type information printed on the second adhesive sheet. 3.   The sheet sticking apparatus according to claim 2, wherein the verification unit is shared by the input unit. On the semiconductor wafer, a third adhesive sheet is attached on a surface opposite to a surface on which the first adhesive sheet is attached,
4. The sheet sticking apparatus according to claim 1, further comprising a sheet peeling unit that peels the third adhesive sheet from the semiconductor wafer at a stage preceding the input unit. 5.   The sheet sticking apparatus according to any one of claims 1 to 4, further comprising an integrated article transport unit configured to transport a single support table that supports the integrated article.