JP3186795U - Shape measuring device - Google Patents

Abstract

A shape measuring device that can be automatically measured and has excellent expandability is provided.
A base 11 is installed on a work table 12 placed on the ground. The mounting table 1 is provided on the base 11 and is moved in the X-axis and Y-axis directions on the base by the first moving body 13 and the second moving body 14. The support column 2 is provided on the base 11 and is positioned on one side of the mounting table. The support column 2 is provided with a third moving body 22 in which the measurement lens set 3 is installed while moving in the Z-axis direction, and moves in conjunction with the third moving body. The control device has control software, controls the movement of the first moving body and the second moving body, changes the position of the mounting table, and controls the movement of the third moving body to control the measurement lens set. Change the position of. The control device controls the measurement lens set to switch the objective lenses 311 having different magnifications, thereby achieving full automation of the measurement.
[Selection] Figure 1

Description

  The present invention relates to a shape measuring apparatus.

  The conventional shape measuring apparatus has a measurement mounting table that moves along the horizontal direction of the X axis and the Y axis, and a measurement lens that moves along the vertical direction of the Z axis, and combines these three members that move in the axial direction. Thus, the optimum position adjustment of the measurement object is performed.

  However, in the above-described conventional apparatus, in order to adjust the structure by moving the mounting table and the lens, it is necessary to manually rotate and control the movement of the mounting table and the lens by a mechanical transmission mechanism. This control method does not have sufficient accuracy and is difficult to finely adjust. When measuring an extremely small object, it is difficult to adjust the optimum measurement position.

  In addition, since the measurement lens using the conventional apparatus performs measurement in a state where the support column is suspended above the mounting table, the fixed shape and size of the support column are limited, and the measurement lens is fixed above the mounting table. It is necessary and the size of the mounting table is also limited. For this reason, mounting tables of different sizes cannot be applied to the same casing, and the expandability is low.

  Therefore, the present inventor considered that the above-described drawbacks can be improved, and as a result of intensive studies, the present inventor has come up with a proposal for the present invention that effectively improves the above-described problems by rational design.

  The present invention has been made in view of the above-described problems, and an object thereof is to provide a shape measuring apparatus that can be automatically measured and has excellent expandability.

  In order to achieve the above-described object, a shape measuring device according to the present invention includes a mounting table, a support column, a measuring lens set, and a control device. The mounting table is provided on a base installed on a work table placed on the ground, and places a measurement object, and includes a first moving body and a second moving body. In conjunction with the movable body and the second movable body, the movable body can move in two X-axis and Y-axis directions perpendicular to each other on the base. The support column is provided on the base and is located on one side of the mounting table, and a third moving body is provided that moves in the direction of the Z axis perpendicular to the X axis and the Y axis. The measurement lens set is provided on the third moving body and extends in the vertical direction of the mounting table, and can move following the third moving body, and includes a rotatable front wheel and a light source. A plurality of objective lenses having different magnifications are installed on the front wheel, and a light source supplies light necessary for the objective lens. The control device is electrically connected to the first moving body, the second moving body, the third moving body, the front wheel, and the light source, has control software, and moves the first moving body and the second moving body. To change the position of the mounting table, to change the position of the measurement lens set by controlling the movement of the third moving body, to switch the objective lens of different magnification by controlling the rotation of the front wheel, Light of different intensity is supplied by controlling the light source.

  According to the present invention, the control device controls the movement of the mounting table and the measurement lens set in the X-axis, Y-axis, and Z-axis directions, and also controls the measurement lens set to automatically select the lens and the light source. However, it is possible to achieve full automation of measurement by combining with the shape measurement software. Therefore, speeding up and simplification of the measurement work can be achieved, and measurement accuracy can be increased.

  In addition, in the present invention, the measurement lens set can be applied to many different sized mounting tables in the same housing by changing the distance between the supporting columns according to the difference in the mounting table size. Increase costs and reduce costs.

It is an inclination figure of the shape measuring device by a 1st embodiment of the present invention. 1 is a side view of a shape measuring apparatus according to a first embodiment of the present invention. It is a side view of the shape measuring apparatus by 2nd Embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiments described below.

(First embodiment)
First, the shape measuring apparatus according to the first embodiment of the present invention will be described.
The configuration of the shape measuring apparatus of this embodiment is shown in FIGS. The shape measuring device includes a mounting table 1 on which a measurement object is placed, a support column 2, a measuring lens set 3, and a control device (not shown). The mounting table 1 is provided on a base 11, and the base is fixed to a work table 12 placed on the ground. The three vertical axial directions with respect to the base 11 are an X-axis direction and a Y-axis direction that are located on the same horizontal plane, and a Z-axis direction that is perpendicular to the two axial directions. The first moving body 13 and the second moving body 14 installed on the mounting table 1 move in the X-axis direction and the Y-axis direction with respect to the base 11 in conjunction with the mounting table 1.

  One of the mounting tables 1 is provided with a support column 2 located on the base 11. The support column 2 extends in the Z-axis direction. A third moving body 22 is installed on the support pillar 2 and moves in the height direction of the support pillar 2 in the Z-axis direction. The measurement lens set 3 is provided on the third moving body. The measurement lens set 3 moves up and down relative to the mounting table 1 in conjunction with the third moving body. The measurement lens set 3 includes a rotatable front wheel 31 and a light source 32. The front wheel 31 is provided with a plurality of objective lenses 311 having enlargement functions with different magnifications, and the front wheels 31 are switched to different objective lenses 311 as they rotate. The light source 32 supplies light necessary for the measurement of the objective lens 311. In addition, according to the present embodiment, the measurement lens set 3 further includes an image capturing device 34, and after capturing a necessary image with the objective lens 311, capture of the image is performed.

  As described above, the first moving body 13, the second moving body 14, the third moving body 22, the front wheel 31, and the light source 32 are each electrically connected to a control device (not shown). In the present embodiment, the control device is a personal computer. Control software is installed on the PC. After acquiring the coordinate data of the movement destination, the personal computer controls the movement of the first moving body 13 and the second moving body 14 by the control software, so that it is loaded in the X axis direction and the Y axis direction with respect to the base 11. The measurement lens set 3 is moved in the Z-axis direction with respect to the mounting table 1 by moving the mounting table 1 and controlling the movement of the third moving body 22. The personal computer switches and switches the objective lens 311 having different magnifications by controlling and rotating the front wheel 31, and supplies light of different intensity according to the measurement demand by controlling the luminous intensity of the light source 32. In addition, according to the present embodiment, the shape measurement software used for the measurement work is installed in the personal computer. By combining with control software, the measurement can be fully automated, and the measurement work can be speeded up and simplified without manually moving the mounting table and measurement lens set and selecting the lens. Measurement accuracy can be improved by fully automatic control.

  In addition, the mounting table 1 also has a size classification according to the size of the measurement object. When a large measuring object is placed on a large mounting table and the mounting table 1 of a different size is installed on the same base 11, the distance between the measurement lens set 3 and the support column 2 is not changeable. The space for moving the mounting table 1 cannot be secured. In the present embodiment according to the present invention, as shown in FIGS. 1 and 2, at least one connecting member 33 that can be selectively disassembled is further provided between the third moving body 22 and the measurement lens set 3. is set up. In addition, at least one expansion member 21 that can be selectively disassembled is further installed between the support pillar 2 and the third moving body. By securing the long distance H <b> 1 between the measurement lens set 3 and the support column 2 by the connecting member 33 and the expansion member 21, the mounting member 1 can be applied to a large size mounting table 1.

(Second Embodiment)
A shape measuring device according to a second embodiment of the present invention is shown in FIG. When installing the mounting base 1A of a small size on the same base 11, as shown in FIG. 3, in the use state after disassembling the connecting member 33 and the expansion member 21 of this embodiment, as shown in FIG. Since the distance H2 between the lens set 3 and the support column 2 is shortened, it can be applied to the mounting table 1A having a small size.

  In the present embodiment, the connecting member 33 and the expansion member 21 are designed to be disassembled or to be assembled. Therefore, when applied to a mounting table of a different size, the connecting member 33 and the expansion member 21 are selectively added or removed, The same housing can be applied to many different sized mounting tables, and costs can be reduced by enhancing expandability.

  As mentioned above, although embodiment of this invention was explained in full detail with reference to drawings, the concrete structure is not restricted to this embodiment, The design change etc. of the range which does not deviate from the summary of this invention are included.

1 ... mounting table,
11 ... Base,
12 ... Workbench,
13 ... 1st moving body,
14 ... second moving body,
2 ... support pillar,
21 ... expansion member,
22 ... the third moving body,
3 ... Lens set for measurement,
31 ... front wheel,
311 ... objective lens,
32 ... light source,
33 ... articulated member,
34: Image capturing device.

Claims (1)

A first moving body and a second moving body are provided on a base installed on a workbench placed on the ground and on which a measurement object is placed, the first moving body and In conjunction with the second moving body, two mounting tables that are movable in the X-axis and Y-axis directions perpendicular to each other on the base;
A support column provided on the base and located on one of the mounting tables, and provided with a third moving body that moves in a Z-axis direction orthogonal to the X-axis and the Y-axis;
The third moving body is provided on the third moving body, extends in the vertical direction of the mounting table, is movable following the third moving body, and includes a rotatable front wheel and a light source. An objective lens having a plurality of magnification functions with different magnifications is installed on the measurement lens set for supplying light necessary for the objective lens by the light source;
The first moving body, the second moving body, the third moving body, the front wheel, and the light source are electrically connected and have control software, and the first moving body and the second moving body The position of the mounting table is changed by controlling the movement of the body, the position of the measurement lens set is changed by controlling the movement of the third moving body, and the rotation of the front wheel is controlled. A control device that supplies the light of different intensity by switching the objective lens of magnification and controlling the light source,
The control device is connected to a personal computer in which shape measurement software is installed, and realizes full automation of measurement by combining the control software and the shape measurement software,
The shape measuring apparatus further comprising an image capturing device installed in the measuring lens set.

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