TWM461042U - Image measuring device capable of automatically controlling the nose-wheel in double rotation and moving in three dimension - Google Patents

Description

Image measuring device with automatic control of nose rotation zoom and 3D movement

This creation is related to image measuring devices, especially a fully automated measuring and expanding image measuring device.

The conventional image measuring device has a measuring stage which is displaceable in the horizontal direction of the X-axis and the Y-axis, and a measuring lens which is displaceable in the vertical direction of the Z-axis, whereby the three axial displacements are mutually Match and adjust to the position that best suits the sample.

However, the displacement adjustment structure of the stage and the lens of the conventional device is to manually rotate the rotary knob, and the displacement of the stage and the lens is controlled by the mechanical transmission mechanism. The accuracy of the control method is insufficient, and the displacement fine adjustment of the extremely small distance cannot be performed. Observing extremely small size samples can be difficult to adjust to the best viewing position.

In addition, the measuring lens of the conventional device is suspended above the stage by a column for measurement, but is limited by the fixed shape and size of the column, so that the measuring lens is fixed at the position above the stage, and the size of the opposite stage is also Restricted, as a result, different sizes of the stage cannot be applied to the same machine, and the expandability is very insufficient.

In view of this, how to solve the above problems is the primary problem that the creative office wants to solve. Therefore, the creators of this case finally have the creation of this creation after continuous hard work and trials.

The main purpose of this creation is to provide an image measuring device with automatic control of the rotation of the nose wheel and 3D movement, which uses a control device to control the automatic movement and control of the X, Y and Z axes of the stage and the measuring mirror group. The measuring mirror group automatically selects the required lens and light source, and then adopts the measuring software to achieve fully automated measurement, which makes the measuring operation faster and simpler, and can improve the precision of measurement.

Another purpose of the creation is that the measuring mirror group can change the distance from the column depending on the size of the stage, so that the same machine can be applied to a plurality of different sizes of the stage, which can increase the expandability and reduce the cost. .

For the purpose of the foregoing, the present invention provides an image measuring device with automatic control of the rotation of the nose wheel and 3D movement, which comprises a base, a stage for placing the measuring object, a column, and a measuring a mirror set and a control device, wherein:
The loading platform is disposed on the base, and the loading platform is provided with a first moving member and a second moving member. The two moving members are configured to control the loading platform on the base respectively along two defined perpendicular to each other. Moving in the X-axis and Y-axis directions;
The column is disposed on the base and located on a side of the stage, the column is provided with a third moving member, which is movable along a height direction defined by the column as a Z axis;
The measuring mirror is disposed on the third moving member and extends above the loading table and is displaceable with the third moving member. The measuring mirror group includes a rotatable nose wheel and a light source, wherein the measuring wheel There are several microscopes with different magnifications, and the light source can provide the luminosity required for the measurement of the microscope;
The control device is electrically connected to the first, second, third moving parts and the nose wheel respectively, and the control device has a control software for controlling displacement of the first and second moving parts to change a position of the stage, and a position for controlling the displacement of the third moving member to change the position of the measuring mirror group, and a microscope for controlling the rotation of the nose wheel to switch different magnifications, and for controlling the light source Provide light of different intensities.

Further, the control device is a computer, and the computer is further provided with a measuring software body, and is matched with the control software to achieve fully automated measurement.

Further, the measuring mirror set further comprises an image capturing device.

Further, at least one selectively detachable connecting member is further disposed between the third moving member and the measuring mirror group.

Further, at least one optional dismountable extension is further disposed between the column and the third moving member.

The above objects and advantages of the present invention are not to be understood in detail from the detailed description and the accompanying drawings. Of course, this creation is tolerated in some arrangements of parts or parts, but the selected embodiments are described in detail in this specification.

1‧‧‧Terminal 11‧‧‧Base

12‧‧‧Working table 13‧‧‧First moving parts

14‧‧‧Second moving parts 2‧‧‧ columns

21‧‧‧Extensions 22‧‧‧ Third moving parts

3‧‧‧Measurement mirror group 31‧‧‧ nose wheel

311‧‧‧Material microscope 32‧‧‧Light source

33‧‧‧Connector 34‧‧‧Image capture device

The first picture is a three-dimensional diagram of the creation

Figure 2 is a schematic plan view of the creation

Figure 3 is a schematic plan view of another use state of the creation.

Please refer to FIGS. 1 and 2 , which are image measuring devices provided by the present invention, which include a loading platform 1 for placing the measuring object, a column 2, a measuring mirror group 3 and a control device ( Not shown in the drawings, wherein the stage 1 is mounted on a base 11, the base is fixed on a landing work table 12, and three vertical axes are defined relative to the base 11. The direction is the X-axis and the Y-axis at the same horizontal plane, and the Z-axis perpendicular to the two axial directions at the same time; accordingly, the stage 1 is provided with a first moving member 13 and a second moving member 14, the second The moving members 13 and 14 are used to drive the stage 1 to move along the X-axis and the Y-axis direction on the base 11.

On the side of the stage 1, a column 2 is disposed on the base 11, and the column 2 extends upward in the Z-axis direction. The column 2 is provided with a third moving member 22, which is movable up and down along the height direction of the column 2 in the Z-axis direction, and the measuring mirror group 3 is disposed on the third moving member, thereby The measuring mirror group 3 can be driven by the third moving member to form a top and bottom displacement relative to the loading table 1. The measuring mirror group 3 includes a rotatable nose wheel 31 and a light source 32, wherein the nose wheel 31 A plurality of microscopes 311 of different magnifications are provided, and the rotation of the nose wheel 31 can be used to switch between different microscopes 311, and the light source 32 can provide the luminosity required for the measurement of the microscope 311. For the purpose of measuring operations. In addition, in the embodiment, the measuring mirror group 3 further includes an image capturing device 34 for capturing the desired image through the microscope 311.

The first, second, and third moving members 13, 14, 22 and the nose wheel 31 and the light source 32 are electrically connected to the control device (not shown), respectively, in the embodiment. The control device is a computer. The computer has a control software. After receiving the coordinate information to be accessed, the computer controls the displacement of the first and second moving parts 13, 14 through the control software so that the stage 1 is along the X-axis and the Y-axis, respectively. Displacement relative to the base 11; and controlling displacement of the third moving member 22 to displace the measuring mirror group 3 relative to the stage 1 in the Z-axis direction; and controlling the rotation of the nose wheel 31 to switch between different The magnification of the microscope 311; and the power to control the illumination of the source 32 provide different intensities of light depending on various measurement requirements. In addition, in the embodiment, the computer further includes a measuring software for measuring the operation, so as to match the control software, thereby achieving fully automated measurement, without manually operating the stage and The movement of the measuring mirror group and the selection of the lens make the measuring operation faster and easier, and the automatic control can improve the accuracy of the measurement.

In addition, in order to measure the size of the object, the stage 1 also has a size difference, and the larger measuring object needs a larger stage to carry the load. If different sizes of the stage 1 are to be placed on the same base 11, The distance between the measuring mirror group 3 and the column 2 must be changeable, so that there is space for the loading table 1 to move. In the present embodiment, as shown in Figures 1 and 2, At least one selectively detachable connecting member 33 is further disposed between the third moving member 22 and the measuring mirror group 3, and at least one optional disassembly is also provided between the column 2 and the third moving member. The extension member 21, the connecting member 33 and the extension member 21 can have a longer distance H1 between the measuring mirror group 3 and the column 2, and can be applied to the larger size of the stage 1.

If a smaller size of the stage 1A is to be provided on the same base 11, as shown in FIG. 3, the use state after the attachment member 33 and the extension member 21 are disassembled is shown, and the measurement can be seen from the figure. The distance H2 between the mirror group 3 and the column 2 is relatively shortened, and the stage 1A of a smaller size can be applied.

Since the connecting member 33 and the extension member 21 of the present invention are designed to be detachable or assembled, when the loading platform of different sizes is adopted, the connecting member 33 and the extension member 21 can be additionally added or reduced to make the same machine The station can be used with a variety of different sizes of the stage to increase its expandability and reduce costs.

However, the above description of the embodiments is intended to illustrate the present invention and is not intended to limit the present invention, so the replacement of equivalent elements should still be within the scope of the present invention.

In summary, this creation has been quite progressive and practical, and after detailed description above, it can be made clear to the skilled person that the creation can achieve the above objectives, and it has already met the requirements of the Patent Law. The creator makes an application in accordance with the law.

1‧‧‧ stage

11‧‧‧Base

12‧‧‧Working table

13‧‧‧First moving parts

14‧‧‧Second moving parts

2‧‧‧ column

21‧‧‧Extensions

22‧‧‧ Third moving parts

3‧‧‧Measurement mirror set

31‧‧‧nose

311‧‧‧Contact microscope

32‧‧‧Light source

33‧‧‧Connecting parts

34‧‧‧Image capture device

Claims (5)

An image measuring device with automatic control of the rotation of the nose wheel and 3D movement, comprising a stage for placing the measuring object, a column, a measuring mirror group and a control device, wherein:
The gantry is disposed on a pedestal, the pedestal is disposed on a landing work table, and the gantry is provided with a first moving member and a second moving member, and the two moving members are used to drive the loading platform The pedestal moves along two mutually defined X-axis and Y-axis directions;
The column is disposed on the base and located on a side of the stage, the column is provided with a third moving member, which is movable along a height direction defined by the column as a Z axis;
The measuring mirror is disposed on the third moving member and extends above the loading table and is displaceable with the third moving member. The measuring mirror group includes a rotatable nose wheel and a light source, wherein the measuring wheel There are several microscopes with different magnifications, and the light source can provide the luminosity required for the measurement of the microscope;
The control device is electrically connected to the first, second, third moving parts and the nose wheel respectively, and the control device has a control software for automatically controlling the displacement of the first and second moving parts to Changing the position of the stage, and automatically controlling the displacement of the third moving member to change the position of the measuring mirror group, and a microscope for automatically controlling the rotation of the nose wheel to switch different magnifications, and The light source is automatically controlled to provide light of different intensities. According to the first aspect of the patent application, the image measuring device with automatic control of the nose rotation zoom and 3D movement, wherein the control device is a computer, and the computer is further provided with a measuring software, and the control The software is matched to fully automated measurement. According to the first aspect of the patent application, the image measuring device with automatic control of the nose rotation zoom and 3D movement is further provided with an image capturing device. The image measuring device with automatic control of the nose rotation zooming and 3D movement according to the first aspect of the patent application, wherein the third moving member and the measuring mirror group are further provided with at least one optional disassembly. Connector. The image measuring device with automatic control of the nose rotation zoom and 3D movement according to the first aspect of the patent application, wherein at least one optional dismountable extension is further disposed between the column and the third moving member.