JP3168318B2 - Thin film thermoelectric converter - Google Patents
Thin film thermoelectric converterInfo
- Publication number
- JP3168318B2 JP3168318B2 JP22858596A JP22858596A JP3168318B2 JP 3168318 B2 JP3168318 B2 JP 3168318B2 JP 22858596 A JP22858596 A JP 22858596A JP 22858596 A JP22858596 A JP 22858596A JP 3168318 B2 JP3168318 B2 JP 3168318B2
- Authority
- JP
- Japan
- Prior art keywords
- thermoelectric conversion
- film
- thin
- electrode
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 59
- 238000006243 chemical reaction Methods 0.000 claims description 91
- 239000000463 material Substances 0.000 claims description 50
- 239000010408 film Substances 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 29
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、薄膜熱電変換装
置に関し、特に、薄膜に構成した熱電変換素子の電極間
の温度差を拡大する薄膜熱電変換装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film thermoelectric converter, and more particularly, to a thin-film thermoelectric converter for expanding a temperature difference between electrodes of a thermoelectric element formed in a thin film.
【０００２】[0002]
【従来の技術】従来例を図３を参照して説明する。図３
に示される熱電変換装置の従来例は、バルク型熱電変換
素子を使用している。５０は熱電変換材料を示す。６０
1 および６０ 2 は熱電変換材料５０の両端縁部に取り付
けられた電極である。以上によりバルク型熱電変換素子
１００’が構成される。８０は熱源に取り付ける熱源電
極であり、９０は冷却部に取り付ける冷却部電極であ
る。熱電変換素子１００’に熱源電極８０および冷却部
電極９０を取り付けることによりバルク型熱電変換装置
の組み立ては終了する。BACKGROUND ART will be described with reference to FIG. 3 a conventional example. Figure 3
The conventional example of the thermoelectric conversion device shown in (1) uses a bulk-type thermoelectric conversion element. 50 indicates a thermoelectric conversion material. 60
1 and 60 2 are electrodes attached to both end edge portions of the thermoelectric conversion material 50. Thus, the bulk-type thermoelectric conversion element 100 'is configured. Reference numeral 80 denotes a heat source electrode attached to the heat source, and reference numeral 90 denotes a cooling unit electrode attached to the cooling unit. By attaching the heat source electrode 80 and the cooling part electrode 90 to the thermoelectric conversion element 100 ', the assembly of the bulk thermoelectric conversion device is completed.
【０００３】ここで、熱電変換素子１００’の熱起電力
Ｗは、一般に、下記の通りに表現することができる。 Ｗ＝α（Ｔｈ−Ｔｃ）Ｉ 但し、α：ゼーベック係数、Ｔｈ：高温度部の温度、Ｔ
ｃ：低温度部の温度 Ｉ：素子を流通する電流 この式に従えば、物質のゼーベック係数αが定まれば、
熱起電力は温度差に比例することになり、良好な熱電変
換をするには、高温度部を構成する電極と低温度部を構
成する電極との間に大きな温度差を生成させる必要があ
る。[0003] Here, the thermoelectromotive force W of the thermoelectric conversion element 100 'can be generally expressed as follows. W = α (Th−Tc) I, where α: Seebeck coefficient, Th: temperature of high temperature portion, T
c: the temperature of the low temperature part I: the current flowing through the element According to this equation, if the Seebeck coefficient α of the substance is determined,
The thermoelectromotive force is proportional to the temperature difference, and in order to perform good thermoelectric conversion, it is necessary to generate a large temperature difference between the electrode forming the high temperature section and the electrode forming the low temperature section. .
【０００４】以上の熱電変換素子１００’の熱電変換材
料５０は、Ｓｉその他の半導体のバルク材により構成さ
れている。即ち、熱電変換材料５０は、具体的には角柱
状或は円柱状の半導体熱電変換材料の一方の端縁部に金
属の熱源電極８０を取り付けると共に、他方の端縁部に
金属の冷却部電極９０を取り付けている。そして、これ
ら熱源電極８０と冷却部電極９０との間に温度差を形成
して発電し、或は両電極間に電流を流通して両電極間に
温度差を生成する。[0004] The thermoelectric conversion material 50 of the thermoelectric conversion element 100 'is made of Si or another semiconductor bulk material. That is, the thermoelectric conversion material 50 is, specifically, a metal heat source electrode 80 attached to one edge portion of a prismatic or columnar semiconductor thermoelectric conversion material, and a metal cooling portion electrode attached to the other edge portion. 90 is attached. Then, a temperature difference is formed between the heat source electrode 80 and the cooling unit electrode 90 to generate power, or a current is passed between the two electrodes to generate a temperature difference between the two electrodes.
【０００５】熱電変換素子１００’の従来例は、上述し
た通り、熱電変換材料５０はバルク材を基本にして構成
されている。半導体に加工を施してこれを様々な形状の
熱電変換材料５０に構成するに際して、半導体のインゴ
ットを原材料としてこれから切り出し加工により構成さ
れる。この場合、原材料に多くのムダが発生する上に加
工工程は複雑であるところから、バルクの熱電変換材料
５０は、一部の特殊な分野を除いて、広く利用されるに
は到っていない。[0005] In the conventional example of the thermoelectric conversion element 100 ', as described above, the thermoelectric conversion material 50 is configured based on a bulk material. When a semiconductor is processed and formed into thermoelectric conversion materials 50 of various shapes, the semiconductor is cut out from an ingot as a raw material. In this case, the bulk thermoelectric conversion material 50 has not yet been widely used except for some special fields, since a lot of waste is generated in the raw material and the processing step is complicated. .
【０００６】熱電変換材料である半導体をバルクに加工
したものとは別に、半導体を薄膜状に加工した熱電変換
材料も使用されているが、この薄膜状熱電変換材料をそ
の厚さ方向に温度差を形成する場合、熱源と冷却部との
間の距離を充分に大きくとることができないところか
ら、熱源と冷却部との間に充分な温度差を保持すること
ができない。[0006] Apart from those processed thermoelectric conversion material der Ru semiconductors in bulk, but is also used processed thermoelectric conversion material in a thin film semiconductor, the thin film thermoelectric conversion material in the thickness direction thereof When the temperature difference is formed, a sufficient distance between the heat source and the cooling unit cannot be maintained because the distance between the heat source and the cooling unit cannot be made sufficiently large.
【０００７】[0007]
【発明が解決しようとする課題】この発明は、フィルム
の表面に熱電変換材料薄膜をコーティングし、温度差を
形成されるべき熱電変換材料の薄膜部分に電極を取り付
ける構成を採用することにより、様々な形状に加工し易
く、且つ熱電変換効率の良好な薄膜熱電変換装置を提供
するものである。SUMMARY OF THE INVENTION The present invention provides various structures by coating a thin film of a thermoelectric conversion material on the surface of a film and attaching electrodes to the thin film portion of the thermoelectric conversion material for which a temperature difference is to be formed. An object of the present invention is to provide a thin-film thermoelectric conversion device which can be easily processed into various shapes and has good thermoelectric conversion efficiency.
【０００８】[0008]
【課題を解決するための手段】薄板状支持体或はフィル
ム状支持体５の表面に熱電変換材料薄膜１、２を成膜し
て熱電変換素子１００を構成し、熱電変換材料薄膜１、
２の互に対向する端縁部３、４に熱源電極６或は冷却部
電極７を取り付けた薄膜熱電変換装置を構成した。Means for Solving the Problems A thermoelectric conversion element 100 is formed by forming thermoelectric conversion material thin films 1 and 2 on the surface of a thin plate-like support or a film-like support 5 to form a thermoelectric conversion element thin film 1.
A thin-film thermoelectric conversion device having a heat source electrode 6 or a cooling portion electrode 7 attached to two edge portions 3 and 4 facing each other was constructed.
【０００９】そして、薄板状支持体或はフィルム状支持
体５の一方の表面に一方の導電型の熱電変換材料薄膜１
を成膜すると共に他方の表面に他方の導電型の熱電変換
材料薄膜２を成膜して熱電変換素子１００を構成し、熱
電変換材料薄膜１、２の互に対向する端縁部３、４に熱
源電極６或は冷却部電極７を取り付け、ここで熱源電極
６或は冷却部電極７の内の一方は分割電極として各別に
熱電変換材料薄膜１、２に取り付けた薄膜熱電変換装置
を構成した。Then, one conductive type thermoelectric conversion material thin film 1 is formed on one surface of the thin plate-shaped support or the film-shaped support 5.
And a thermoelectric conversion material thin film 2 of the other conductivity type is formed on the other surface to form a thermoelectric conversion element 100. The thermoelectric conversion material thin films 1 and 2 have mutually opposing edges 3, 4 The heat source electrode 6 or the cooling unit electrode 7 is attached to the heat source electrode 6 or the cooling unit electrode 7. Here, one of the heat source electrode 6 or the cooling unit electrode 7 is formed as a split electrode to constitute a thin film thermoelectric conversion device which is separately attached to the thermoelectric conversion material thin films 1 and 2. did.
【００１０】また、薄板状支持体或はフィルム状支持体
５は絶縁材料により構成した薄膜熱電変換装置を構成し
た。更に、薄板状支持体或はフィルム状支持体５は導電
体フィルム表面に絶縁膜９をコーティングしたものより
成る薄膜熱電変換装置を構成した。そして、熱電変換素
子１００は長さ方向に蛇行屈曲せしめたものである薄膜
熱電変換装置を構成した。Further, the thin plate-like support or the film-like support 5 constitutes a thin-film thermoelectric converter made of an insulating material. Further, the thin plate-like support or the film-like support 5 constituted a thin-film thermoelectric conversion device comprising a conductive film surface coated with an insulating film 9. And the thermoelectric conversion element 100 comprised the thin-film thermoelectric conversion device which meandered and bent in the length direction.
【００１１】また、熱源電極６および冷却部電極７はメ
ッシュ状電極であることを特徴とする薄膜熱電変換装置
を構成した。The heat source electrode 6 and the cooling section electrode 7 are mesh electrodes, thus constituting a thin film thermoelectric conversion device.
【００１２】[0012]
【発明の実施の形態】この発明の実施の形態を図１およ
び図２の実施例を参照して説明する。図１はｎ型熱電変
換材料の薄膜をフィルムの一方の表面に、ｐ型熱電変換
材料の薄膜をフィルムの他方の表面にコーティングした
フィルム型熱電変換素子を含む薄膜熱電変換装置の分解
斜視図である。図２は図１の部品により構成されたフィ
ルム型熱電変換装置の断面を示す図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. 1 and 2. FIG. Fig. 1 shows a thin film of n-type thermoelectric conversion material on one surface of a film, and p-type thermoelectric conversion.
FIG. 2 is an exploded perspective view of a thin-film thermoelectric conversion device including a film-type thermoelectric conversion element in which a thin film of a material is coated on the other surface of the film. FIG. 2 is a diagram showing a cross section of a film-type thermoelectric conversion device constituted by the components of FIG.
【００１３】図１および図２において、５は支持体を構
成する薄板或はフィルムを示す。１および２は支持体で
ある絶縁体フィルム５の両面にコーティングされた熱電
変換材料薄膜である。３は熱電変換材料薄膜１および２
の上端縁部から集電する上端集電電極であり、４は熱電
変換材料薄膜１および２の下端縁部から集電する下端集
電電極である。６’、６”は熱源電極であり、７は冷却
部電極を示す。８は絶縁性接着剤であり、支持体を構成
するフィルム５の上端に適用されて熱源電極６’、６”
をフィルム５の上端に強固に結合するものである。In FIGS. 1 and 2, reference numeral 5 denotes a thin plate or film constituting a support. Reference numerals 1 and 2 denote thermoelectric conversion material thin films coated on both surfaces of an insulator film 5 as a support. 3 is a thermoelectric conversion material thin film 1 and 2
Is a top current collecting electrode that collects electricity from the top edge of the thermoelectric conversion material thin films 1 and 2, and 4 is a bottom current collecting electrode that collects electricity from the bottom edge of the thermoelectric conversion material thin films 1 and 2. 6 ′ and 6 ″ are heat source electrodes, 7 is a cooling unit electrode. 8 is an insulating adhesive, which is applied to the upper end of the film 5 constituting the support and is connected to the heat source electrodes 6 ′ and 6 ″.
Is firmly bonded to the upper end of the film 5.
【００１４】熱電変換材料薄膜１および熱電変換材料薄
膜２は、フィルム５に熱電変換材料をコーティングする
ことにより形成される。熱電変換材料のコーティングの
仕方としては、スパッタリング、イオンビームスパッタ
リング、レーザアプレーションその他の物理的薄膜形成
法を採用することができる。これ以外の熱電変換材料の
薄膜形成法として、これらの溶液或はペーストから化学
的に合成することができる。この様にしてフィルム５に
形成した熱電変換材料薄膜１および２に上端集電電極３
および下端集電電極４を形成する。これらの集電電極
は、通常、真空蒸着法或はスパッタリング法その他の薄
膜成膜方法により形成するが、これら以外の適宜の薄膜
成膜法も適用することができる。支持体であるフィルム
５が金属フィルムの如き導電体フィルムである場合は、
熱電変換材料薄膜１および２をコーティングするに先だ
って、９により示される絶縁膜を導電体フィルム表面に
予めコーティングしておいて、この絶縁膜９表面に熱電
変換材料薄膜１および２をコーティングする。絶縁膜９
はポリイミドその他の耐熱性合成樹脂を金属フィルム５
表面に塗布して乾燥することにより強固に形成すること
ができる。 The thermoelectric conversion material thin film 1 and the thermoelectric conversion material thin film 2 are formed by coating the film 5 with a thermoelectric conversion material. As a method of coating the thermoelectric conversion material, sputtering, ion beam sputtering, laser ablation, and other physical thin film forming methods can be employed. As another method of forming a thin film of a thermoelectric conversion material, it can be chemically synthesized from these solutions or pastes. The upper end current collecting electrode 3 is applied to the thermoelectric conversion material thin films 1 and 2 thus formed on the film 5.
And the lower end current collecting electrode 4 is formed. These collecting electrodes are usually formed by a vacuum evaporation method, a sputtering method, or another thin film forming method, but any other appropriate thin film forming method can be applied. When the film 5 as a support is a conductor film such as a metal film,
Prior to coating the thermoelectric conversion material thin films 1 and 2, an insulating film indicated by 9 is previously coated on the surface of the conductor film, and the surface of the insulating film 9 is coated with the thermoelectric conversion material thin films 1 and 2. Insulating film 9
Is a metal film 5 made of polyimide or other heat-resistant synthetic resin.
It can be formed firmly by applying it to the surface and drying it .
【００１５】図２はフィルム５が金属フィルムである場
合を示している。１０は熱源電極６’、６”とフィルム
５に取り付けた上端集電電極３とを接続するワイヤを示
す。熱源電極６’、６”は図示される通りのメッシュ状
熱源電極であり、冷却部電極７も図示される通りのメッ
シュ状冷却部電極である。以上の通りにして熱電変換素
子１００が構成され、この上端にメッシュ状熱源電極
６’、６”を設置すると共に下端にメッシュ状冷却部電
極７を設置することにより熱電変換装置の組み立ては終
了する。熱源電極６’、６”および冷却部電極７は熱電
変換素子１００が蛇行する幅にほぼ匹敵する幅および長
さを有するものとする。 FIG . 2 shows a case where the film 5 is a metal film.
Is shown. 10 is a heat source electrode 6 ', 6 "and a film
5 shows the wire connecting the upper end current collecting electrode 3 attached to
You. Heat source electrodes 6 'and 6 "are meshed as shown.
It is a heat source electrode, and the cooling unit electrode 7 is also a mesh as shown.
This is an electrode for a shuffling cooling unit. Thermoelectric conversion element
And a mesh-shaped heat source electrode
6 ', 6 "is installed and the mesh cooling unit
The installation of the thermoelectric conversion device is completed by installing the pole 7.
Complete. The heat source electrodes 6 ′ and 6 ″ and the cooling section electrode 7
The width and length are almost equal to the meandering width of the conversion element 100.
Shall have.
【００１６】電極６’、６”および７をこの様にメッシ
ュ状電極に構成し、熱電変換装置を例えば自動車のラジ
エータ前面に熱源電極６’、６”を介して取り付けた様
な場合、冷却用の大気の取り入れを阻害することなしに
スムーズに大気を流通せしめながら、メッシュ状熱源電
極６’、６”とメッシュ状冷却部電極７との間に良好な
温度勾配を形成することができる。そして、支持体であ
るフィルム５をエンジニアリングプラスチック等により
構成すると、熱電変換素子１００の熱伝導率が下がるこ
とにより熱電変換効率を上げることができる。 The electrodes 6 ', 6 "and 7 are thus meshed.
A thermoelectric converter, for example, in a car radio
As attached to the front of the eta via the heat source electrodes 6 'and 6 "
In this case, without interrupting the intake of cooling air
While allowing the air to flow smoothly, the mesh heat source
Between the poles 6 ′, 6 ″ and the mesh-shaped cooling section electrode 7
A temperature gradient can be formed. And on the support
Film 5 with engineering plastic
With this configuration, the thermal conductivity of the thermoelectric conversion element 100 may decrease.
Thus, the thermoelectric conversion efficiency can be increased.
【００１７】上端電極は分割電極６’および６''分割電
極に２分されており、互いに対向する分割端縁には絶縁
材料より成る取り付け部７０および７０’が構成されて
いる。これはフィルム５両面に形成される熱電変換材料
薄膜が互いに極性を異にしていることに対応している。
絶縁膜９はポリイミドその他の耐熱性合成樹脂をフィル
ム５が金属フィルムである場合に表面に塗布して乾燥す
ることにより強固に形成する。The upper end electrode is divided into split electrodes 6 'and 6''split electrodes, and mounting portions 70 and 70' made of an insulating material are formed at the split edges facing each other. This corresponds to the fact that the thermoelectric conversion material thin films formed on both surfaces of the film 5 have different polarities from each other.
The insulating film 9 is formed firmly by applying a polyimide or other heat-resistant synthetic resin to the surface when the film 5 is a metal film, followed by drying.
【００１８】[0018]
【発明の効果】以上の通りであって、熱電変換材料の電
気導伝率の良好なものは一般に熱伝導率も良好であると
いう傾向があるが、この発明の薄膜熱電変換装置は、熱
電変換材料薄膜の支持体を構成するフィルムとして熱伝
導率の悪い絶縁材料使用することにより特に熱の放散伝
導を少くし、結果的に熱電変換素子の熱電変換効率を向
上することができる。As described above, the thermoelectric conversion material having good electric conductivity generally has a good thermal conductivity. By using an insulating material having a low thermal conductivity as a film constituting the support of the material thin film, in particular, heat dissipation and conduction can be reduced, and as a result, the thermoelectric conversion efficiency of the thermoelectric conversion element can be improved.
【００１９】そして、この発明は、熱電変換材料を薄板
或はフィルムの表面にコーティングし、薄板またはフィ
ルムをひだ状に折りたたみ、その両端に電極を設け、そ
の一方の電極に熱源を構成し、他方の電極に冷却部を構
成することにより両電極の間隔を大きくとることができ
る上に、ひだ状に構成することにより大気の冷媒の流通
を良くし、冷却面積を広げ、良好な冷却効率を得ること
ができる。これは、大きな温度差を両電極間に生成する
ことに貢献する。According to the present invention, a thermoelectric conversion material is coated on the surface of a thin plate or a film, the thin plate or the film is folded in a pleated shape, electrodes are provided at both ends, one of the electrodes constitutes a heat source, and the other constitutes a heat source. By forming a cooling section on the electrode, the distance between the two electrodes can be increased, and by forming a pleated shape, the flow of air refrigerant is improved, the cooling area is increased, and good cooling efficiency is obtained. be able to. This contributes to creating a large temperature difference between the electrodes.
【００２０】また、一般に熱電変換材料の効率の指標と
して Ｚ＝α2 σ／Ｋ ここで、α：ゼーベック係数、σ：電気伝導率、Ｋ：熱
伝導率 が定義されている。Ｚを大きくするにはαが大きいこと
は当然であるが、σが大きく、Ｋが小さい材料であるこ
とが必要となる。ところが、一般に、σが大きい材料は
Ｋも大きい傾向にあり、バルク状の熱電変換素子はこの
条件を同時に満することは困難である。ところが、支持
体フィルム表面に熱電変換材を薄膜に形成した場合、熱
の大部分は支持体フィルムを伝導することとなり、熱伝
導率を著しく小さくすることができる。支持体フィルム
として、特に、合成樹脂熱絶縁体等を使用することによ
り、熱伝導率を更に小さくすることができる。その結
果、熱電変換素子としての熱電変換効率を著しく向上に
することができる。In general, Z = α2 σ / K, where α: Seebeck coefficient, σ: electric conductivity, and K: thermal conductivity are defined as indices of the efficiency of the thermoelectric conversion material. To increase Z, it is natural that α is large. However, a material having large σ and small K is required. However, generally, a material having a large σ tends to have a large K, and it is difficult for a bulk thermoelectric conversion element to simultaneously satisfy this condition. However, when the thermoelectric conversion material is formed in a thin film on the surface of the support film, most of the heat is conducted through the support film, and the thermal conductivity can be significantly reduced. In particular, by using a synthetic resin thermal insulator or the like as the support film, the thermal conductivity can be further reduced. As a result, the thermoelectric conversion efficiency as a thermoelectric conversion element can be significantly improved.
【００２１】また、支持体フィルムの表面に熱電変換材
料薄膜を形成し、素子の面に平行な方向に電極を設ける
ことにより、熱源と冷却部の距離を離して大きな温度勾
配を設定することができ、且つ、支持体フィルムの熱伝
導率を下げて熱電変換素子としての変換効率を上げ、全
体として効率の良い熱電変換装置を構成することができ
る。Further, by forming a thin film of thermoelectric conversion material on the surface of the support film and providing electrodes in a direction parallel to the surface of the element, it is possible to set a large temperature gradient by increasing the distance between the heat source and the cooling section. In addition, the conversion efficiency of the thermoelectric conversion element can be increased by lowering the thermal conductivity of the support film, and a highly efficient thermoelectric conversion device can be constituted as a whole.
【００２２】更に、極性を異にするｎ型およびｐ型の熱
電変換材料薄膜を支持体フィルムの両面にそれぞれ形成
し、低温部と高温部の極性を逆に構成して両薄膜を直列
接続したことにより、低温部、高温部に発生する電位が
正、負逆となり、２倍の電圧を得ることができる。ま
た、電極をメッシュ状電極に構成することにより、熱電
変換装置を自動車のラジエータ前面に熱源電極を介して
取り付けた様な場合、冷却用の大気の取り入れを阻害す
ることなしにスムーズに大気を流通せしめながら、メッ
シュ状熱源電極とメッシュ状冷却部電極との間に良好な
温度勾配を形成することができる。Further, n-type and p-type thermoelectric conversion material thin films having different polarities were formed on both surfaces of the support film, and the polarities of the low-temperature portion and the high-temperature portion were reversed to connect both thin films in series. As a result, the potentials generated in the low-temperature portion and the high-temperature portion become positive and negative, and a double voltage can be obtained. In addition, by configuring the electrodes as mesh electrodes, when the thermoelectric converter is mounted on the front of the radiator of a car via a heat source electrode, the air flows smoothly without obstructing the intake of cooling air. A good temperature gradient can be formed between the mesh-shaped heat source electrode and the mesh-shaped cooling portion electrode.
【００２３】この発明に依り、フィルムの表面に熱電変
換材料薄膜をコーティングし、温度差を形成されるべき
熱電変換材料の薄膜部分に電極を取り付ける構成を採用
して様々な形状に加工し易く、且つ熱電変換効率の良好
な薄膜熱電変換装置を提供することができる。According to the present invention, a thin film of the thermoelectric material is coated on the surface of the film, and an electrode is attached to the thin film portion of the thermoelectric material to be formed with a temperature difference. In addition, a thin-film thermoelectric conversion device having good thermoelectric conversion efficiency can be provided.
【図１】実施例を説明する図。FIG. 1 illustrates an embodiment.
【図２】図１の実施例の断面を示す図。FIG. 2 shows a cross section of the embodiment of FIG.
【図３】従来例を説明する図。FIG. 3 illustrates a conventional example.
１ 熱電変換材料薄膜 ２ 熱電変換材料薄膜 ３ 端縁部 ４ 端縁部 ５ 支持体フィルム ６ 熱源電極 ６’分割電極 ６''分割電極 ７ 冷却部電極 ８ 絶縁性接着剤 ９ 絶縁膜 １０ 接続ワイヤ ７０ 取り付け部 ７０’取り付け部 １００ 熱電変換素子 REFERENCE SIGNS LIST 1 thermoelectric conversion material thin film 2 thermoelectric conversion material thin film 3 edge 4 edge 5 support film 6 heat source electrode 6 ′ split electrode 6 ″ split electrode 7 cooling unit electrode 8 insulating adhesive 9 insulating film 10 connecting wire 70 Mounting part 70 'Mounting part 100 Thermoelectric conversion element
Claims (5)
方の表面に一方の導電型の熱電変換材料薄膜を成膜する
と共に他方の表面に他方の導電型の熱電変換材料薄膜を
成膜して熱電変換素子を構成し、熱電変換材料薄膜の互
に対向する端縁部に熱源電極或は冷却部電極を取り付
け、ここで熱源電極或は冷却部電極の内の一方は分割電
極として各別に熱電変換材料薄膜に取り付けたことを特
徴とする薄膜熱電変換装置。1. A thermoelectric conversion material thin film of one conductivity type is formed on one surface of a thin plate-shaped support or a film-shaped support, and a thermoelectric conversion material thin film of another conductivity type is formed on the other surface. A thermoelectric conversion element is formed, and a heat source electrode or a cooling unit electrode is attached to mutually facing edges of the thermoelectric conversion material thin film, where one of the heat source electrode or the cooling unit electrode is a split electrode. A thin-film thermoelectric converter separately attached to a thermoelectric conversion material thin film.
において、 薄板状支持体或はフィルム状支持体は絶縁材料により構
成したことを特徴とする薄膜熱電変換装置。2. The thin-film thermoelectric conversion device according to claim 1, wherein the thin plate-like support or the film-like support is made of an insulating material.
において、 薄板状支持体或はフィルム状支持体は導電体フィルム表
面に絶縁膜をコーティングしたものより成ることを特徴
とする薄膜熱電変換装置。3. The thin-film thermoelectric conversion device according to claim 1, wherein the thin plate-like support or the film-like support is formed by coating a conductive film surface with an insulating film. apparatus.
記載される薄膜熱電変換装置において、 熱電変換素子は長さ方向に蛇行屈曲せしめたものである
ことを特徴とする薄膜熱電変換装置。4. The thin film thermoelectric conversion device described in any of the claims 1 to 3, the thermoelectric conversion element is a thin film thermoelectric conversion, characterized in that in which was allowed meandering bent in the longitudinal direction apparatus.
記載される薄膜熱電変換装置において、 熱源電極および冷却部電極はメッシュ状電極であること
を特徴とする薄膜熱電変換装置。5. The thin film thermoelectric conversion device described in any of the claims 1 to 4, the thin film thermoelectric converter, wherein the heat source electrode and the cooling unit electrode is a mesh-like electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22858596A JP3168318B2 (en) | 1996-08-29 | 1996-08-29 | Thin film thermoelectric converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22858596A JP3168318B2 (en) | 1996-08-29 | 1996-08-29 | Thin film thermoelectric converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1074987A JPH1074987A (en) | 1998-03-17 |
| JP3168318B2 true JP3168318B2 (en) | 2001-05-21 |
Family
ID=16878678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22858596A Expired - Fee Related JP3168318B2 (en) | 1996-08-29 | 1996-08-29 | Thin film thermoelectric converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3168318B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101779328B1 (en) * | 2017-01-05 | 2017-09-19 | 아이세로미림화학주식회사 | Coupler for fluid discharge with improved matching structure |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523285C (en) | 2003-11-17 | 2009-08-05 | 松下电器产业株式会社 | Method of manufacturing crystalline film, method of manufacturing crystalline-film-layered substrate, method of manufacturing thermoelectric conversion element, and thermoelectric conversion element |
| CA2549826C (en) * | 2003-12-02 | 2014-04-08 | Battelle Memorial Institute | Thermoelectric devices and applications for the same |
| JP5243181B2 (en) | 2008-10-20 | 2013-07-24 | スリーエム イノベイティブ プロパティズ カンパニー | Thermoelectric element using conductive polymer composite and conductive polymer material |
| KR101384981B1 (en) * | 2012-01-30 | 2014-04-14 | 연세대학교 산학협력단 | Thermoelectric device having structure capable of improving thermal efficiency |
| JP6933441B2 (en) * | 2016-03-10 | 2021-09-08 | 株式会社アツミテック | Thermoelectric conversion module |
-
1996
- 1996-08-29 JP JP22858596A patent/JP3168318B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101779328B1 (en) * | 2017-01-05 | 2017-09-19 | 아이세로미림화학주식회사 | Coupler for fluid discharge with improved matching structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1074987A (en) | 1998-03-17 |
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