JP3126297B2 - Resin-sealed semiconductor device - Google Patents
Resin-sealed semiconductor deviceInfo
- Publication number
- JP3126297B2 JP3126297B2 JP07197368A JP19736895A JP3126297B2 JP 3126297 B2 JP3126297 B2 JP 3126297B2 JP 07197368 A JP07197368 A JP 07197368A JP 19736895 A JP19736895 A JP 19736895A JP 3126297 B2 JP3126297 B2 JP 3126297B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- case
- semiconductor device
- substrate
- heat sink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明はパワー半導体素子、制御
用集積回路素子等を内蔵したインテリジェントパワーモ
ジュールと呼ばれるモーター制御に利用される樹脂封止
型半導体装置に関し、特にその樹脂封止型半導体装置内
で発生した熱を効果的に外部へ放散するに適した取り付
け部を備えた樹脂封止型半導体装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin-sealed semiconductor device used for motor control called an intelligent power module containing a power semiconductor element, a control integrated circuit element, and the like, and more particularly to the resin-sealed semiconductor device. The present invention relates to a resin-encapsulated semiconductor device having a mounting portion suitable for effectively dissipating heat generated inside to the outside.
【0002】[0002]
【従来の技術】従来の樹脂封止型半導体装置は、図6に
示すように、金属基板1上にパワー半導体素子2、制御
用集積回路素子3を搭載し、金属細線4で結線したもの
を樹脂ケース5に収容し、封止樹脂6で封止したもので
あり、外部接続用に外部端子7が封止樹脂の外部に突出
して設けられたものであった。そして樹脂封止型半導体
装置の放熱板8への取り付けは、前記樹脂ケース5の端
部に設けた取り付け部9の取り付け用穴10にボルト1
1(またはビス)などを用いて行なっていた。また樹脂
封止型半導体装置内で発生した熱の外部への放散に対し
ては、樹脂封止型半導体装置と放熱板8との間隙を放熱
用グリス12にて埋めることにより、放熱を高めてい
た。2. Description of the Related Art As shown in FIG. 6, a conventional resin-encapsulated semiconductor device has a power semiconductor element 2 and a control integrated circuit element 3 mounted on a metal substrate 1 and connected by thin metal wires 4. It was housed in a resin case 5 and sealed with a sealing resin 6, and an external terminal 7 for external connection was provided so as to protrude outside the sealing resin. The resin-encapsulated semiconductor device is attached to the heat radiating plate 8 by inserting a bolt 1 into a mounting hole 10 of a mounting portion 9 provided at an end of the resin case 5.
1 (or screw) or the like. Also, with respect to the dissipation of heat generated in the resin-encapsulated semiconductor device to the outside, the gap between the resin-encapsulated semiconductor device and the radiator plate 8 is filled with heat-dissipating grease 12 to enhance heat radiation. Was.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、パワー
半導体素子や制御用集積回路素子を搭載した金属基板を
樹脂ケースを用いて包囲した樹脂封止型半導体装置にお
いては、樹脂ケースと金属基板との一体化が不十分で、
樹脂ケースの取り付け部と金属基板の取り付け面がずれ
ていたり、樹脂ケースと金属基板との間に段差を生じる
場合がある。これは樹脂ケースの成形時の変形または樹
脂ケースと金属基板との一体化作業時のミスに起因する
ものであるが、このような段差やずれが生じたままの状
態で樹脂封止型半導体装置の金属基板面を放熱板に取り
付けた場合、段差により放熱板と金属基板との接着固定
性が低下し、放熱特性(熱抵抗)を悪化させていた。ま
た、樹脂ケースと金属基板との間に段差を生じたまま、
ボルトにより締め付けることにより、樹脂ケースと封止
樹脂との間にストレスが生じ、樹脂ケースと封止樹脂と
の間に剥離を発生させて、信頼性を損なうおそれがあっ
た。However, in a resin-encapsulated semiconductor device in which a metal substrate on which a power semiconductor element and a control integrated circuit element are mounted is surrounded by a resin case, the resin case and the metal substrate are integrated. Is not enough,
The mounting portion of the resin case and the mounting surface of the metal substrate may be displaced, or a step may occur between the resin case and the metal substrate. This is due to deformation during the molding of the resin case or an error during the integration operation of the resin case and the metal substrate. When the surface of the metal substrate is attached to the heat sink, the adhesiveness between the heat sink and the metal substrate is reduced due to the step, and the heat radiation characteristic (thermal resistance) is deteriorated. Also, with a step between the resin case and the metal substrate,
Tightening with the bolts causes stress between the resin case and the sealing resin, which may cause separation between the resin case and the sealing resin, thereby impairing reliability.
【0004】本発明は上述のような従来の課題を解決す
るものであり、樹脂ケースと金属基板との間に生じた段
差により、放熱板と金属基板との接着固定性が損なわれ
るのを防止し、接着固定性を向上させて放熱性を効果的
に行なうことができる樹脂封止型半導体装置を提供する
ことを目的とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems, and prevents a step formed between a resin case and a metal substrate from deteriorating the adhesiveness between the heat sink and the metal substrate. Further, it is an object of the present invention to provide a resin-encapsulated semiconductor device capable of effectively performing heat dissipation by improving adhesive fixability.
【0005】[0005]
【課題を解決するための手段】本発明の樹脂封止型半導
体装置は従来のような課題を解決するため、複数の電子
部品が導電材上に載置され、樹脂ケースで外囲を包囲し
た構造の樹脂封止型半導体装置において、前記樹脂ケー
スに設けられた放熱板取り付け用の取り付け部が変形可
能な領域を有し、前記変形可能な領域が、柔軟性材料で
形成されている。また、本発明の樹脂封止型半導体装置
は、複数の電子部品と、外部接続用の外部端子とを搭載
した金属基板と、前記複数の電子部品と前記外部端子と
の外囲を包囲し、前記金属基板に固定され、放熱板取り
付け用の取り付け部を有した樹脂ケースと、前記樹脂ケ
ース内の前記金属基板上の前記複数の電子部品と前記外
部端子との領域を封止した樹脂とよりなる樹脂封止型半
導体装置であって、前記樹脂ケースに設けられた取り付
け部が変形可能な領域を有しており、前記変形可能な領
域が、柔軟性材料で形成されている。 SUMMARY OF THE INVENTION The resin-sealed semiconductor of the present invention.
The body device uses multiple electronic devices to solve the conventional problems.
The component is placed on the conductive material, and the resin case is
In the resin-encapsulated semiconductor device having the
The mounting part for mounting the heat sink provided on the surface can be deformed
The deformable area is made of a flexible material.
Is formed. Further, the resin-encapsulated semiconductor device of the present invention
Has multiple electronic components and external terminals for external connection
Metal substrate, the plurality of electronic components and the external terminals
Is fixed to the metal substrate, and the heat sink is removed.
A resin case having a mounting portion for
The plurality of electronic components on the metal substrate in the case and the outside
Resin mold half made of resin that seals the area with the terminal
A conductor device, comprising: a mounting provided on the resin case.
The barrier has a deformable area, and the deformable area is
The region is formed of a flexible material.
【0006】[0006]
【作用】樹脂ケース端部の取り付け部に柔軟性材料から
なる変形可能な領域を形成することにより、取り付け部
に対して、ボルトまたはビスにより放熱板に締め付けて
取り付けた場合、取り付け部自体のみを変形させ、段差
によるずれなどを取り付け部の変形で緩和させ、放熱板
と金属基板とは平坦に接着させ、放熱板との接着性を向
上させるものである。その結果、放熱性を効果的に行な
うことができる。また段差によるずれなどを取り付け部
の変形で緩和するので、樹脂ケースと封止樹脂との間に
発生するずれによるストレスも抑制でき、樹脂ケースと
封止樹脂との間の剥離も防止できる。[Action] From the flexible material to the mounting part at the end of the resin case
By forming a deformable region consisting for Installing put unit, when installed tightened to the heat radiating plate by bolts or screws to deform only the attachment portion itself, a variation of the mounting portion such displacement by the step The heat radiation plate and the metal substrate are bonded flat to improve the adhesiveness with the heat radiation plate. As a result, heat dissipation can be effectively performed. In addition, since the displacement due to the step is alleviated by the deformation of the mounting portion, the stress caused by the displacement between the resin case and the sealing resin can be suppressed, and the separation between the resin case and the sealing resin can be prevented.
【0007】[0007]
【実施例】以下、本発明の一実施例について図面を参照
しながら説明する。An embodiment of the present invention will be described below with reference to the drawings.
【0008】図1は本実施例の樹脂封止型半導体装置を
示す構成図であり、導電材である金属基板1上にパワー
半導体素子2、制御用集積回路素子3を搭載し、金属細
線4で結線したものを樹脂ケース5で包囲収容し、封止
樹脂6で封止したものであり、外部接続用に外部端子7
が封止樹脂の外部に突出して設けられるものである。そ
して樹脂封止型半導体装置の放熱板8への取り付けは、
前記樹脂ケース5の端部に設けた取り付け部9の取り付
け用穴10にボルト11(またはビス)などを用いて行
なうものである。ここで本実施例では、樹脂ケース5の
端部に設けた取り付け部9の構成において、前記取り付
け部9が変形可能な領域として、取り付け部9に切込み
部13が設けられている。FIG. 1 is a structural view showing a resin-encapsulated semiconductor device of the present embodiment. A power semiconductor element 2 and a control integrated circuit element 3 are mounted on a metal substrate 1 which is a conductive material. Are enclosed in a resin case 5 and sealed with a sealing resin 6, and external terminals 7 are provided for external connection.
Are provided to protrude outside the sealing resin. The mounting of the resin-encapsulated semiconductor device on the heat sink 8 is as follows.
This is performed by using a bolt 11 (or a screw) or the like in a mounting hole 10 of a mounting portion 9 provided at an end of the resin case 5. Here, in the present embodiment, in the configuration of the attachment portion 9 provided at the end of the resin case 5, a notch 13 is provided in the attachment portion 9 as a region where the attachment portion 9 can be deformed.
【0009】この切込み部13により、取り付け部9と
樹脂ケース5の本体部との間の樹脂の厚みHは低減し、
樹脂ケース5の取り付け部9と金属基板1の取り付け面
がずれていたり、樹脂ケース5と金属基板1との間に段
差を生じていたりする場合でも、ボルト11またはビス
により放熱板8に取り付けたとき、樹脂厚の薄くなった
切込み部13の箇所で変形させることにより、段差をそ
の変形で緩和し、金属基板1と放熱板8とは平坦性を保
ったまま接着固定させることができる。その結果、放熱
板8への熱の放散に支障はなくなり、放熱板8への熱の
放散が効果的に行なわれる。The thickness H of the resin between the mounting portion 9 and the main body of the resin case 5 is reduced by the cuts 13,
Even when the mounting portion 9 of the resin case 5 and the mounting surface of the metal substrate 1 are shifted or a step is generated between the resin case 5 and the metal substrate 1, the mounting portion 9 is mounted on the heat radiating plate 8 with the bolts 11 or screws. At this time, by deforming the cut portion 13 where the resin thickness is reduced, the step can be reduced by the deformation, and the metal substrate 1 and the heat sink 8 can be bonded and fixed while maintaining the flatness. As a result, there is no problem in dissipating the heat to the radiator plate 8, and the heat is radiated to the radiator plate 8 effectively.
【0010】また樹脂封止型半導体装置内で発生した熱
の外部への放散に対しては、樹脂封止型半導体装置、す
なわち金属基板1と放熱板8との間隙を放熱用グリス1
2にて埋めることにより、放熱をさらに効果的に行なう
ものである。In order to dissipate the heat generated in the resin-sealed semiconductor device to the outside, the resin-sealed semiconductor device, that is, the gap between the metal substrate 1 and the heat radiating plate 8 is radiated by the heat-radiating grease 1.
By burying with 2, the heat radiation is more effectively performed.
【0011】なお、取り付け部9の変形可能な領域であ
る切込み部13はV溝状やU溝状などの溝状であっても
よく、また切込み部13の領域は取り付け部9と樹脂ケ
ース5の本体部との間の全域、部分的であってもよい。
ただし、ボルト11により締め付けて放熱板に固定させ
たときに取り付け部9のみが変形するように、切込み部
13を設ける必要がある。The notch 13, which is a deformable area of the mounting portion 9, may be a groove such as a V-shaped groove or a U-shaped groove. The entire area between the main body and the main body may be partial.
However, it is necessary to provide the notch 13 so that only the mounting portion 9 is deformed when it is fixed to the radiator plate by fastening with the bolt 11.
【0012】図2には、金属基板1と樹脂ケース5との
間にずれが生じた場合における取り付け部9に形成した
切込み部13の作用を示している。FIG. 2 shows the action of the cut 13 formed in the mounting portion 9 when there is a shift between the metal substrate 1 and the resin case 5.
【0013】図2に示すように、ずれによって生じた段
差を取り付け部9の変形により緩和し、金属基板1と放
熱板8とは平坦性を保ちつつ、かつ金属基板1上の樹脂
ケース5領域にはストレスを発生させずに接着固定でき
るものである。しかし、切込み部13がない場合には、
取り付け部9での変形ができず、図3に示すように、金
属基板1が放熱板に対して浮き上がり14を発生した
り、または図4に示すように、樹脂ケース5自体が変形
し、樹脂ケース5と封止樹脂6とがストレスにより剥離
15を発生したりすることがある。As shown in FIG. 2, the step caused by the displacement is alleviated by the deformation of the mounting portion 9, so that the metal substrate 1 and the heat radiating plate 8 maintain the flatness and the area of the resin case 5 on the metal substrate 1 Can be bonded and fixed without generating stress. However, when there is no cut portion 13,
The deformation at the mounting portion 9 is not possible, and as shown in FIG. 3, the metal substrate 1 rises 14 with respect to the heat sink, or the resin case 5 itself is deformed as shown in FIG. The case 5 and the sealing resin 6 may cause peeling 15 due to stress.
【0014】次に本実施例の放熱性(熱抵抗)について
図5を参照しながら説明する。この図5は、寸法8cm
×15cm×3cmのアルミニウム製の放熱板を用い、
パワー50W、印加時間10分として本実施例の構造、
ならびに従来の構造の各樹脂封止型半導体装置につい
て、それぞれの熱抵抗値を測定した結果を示したもので
ある。Next, the heat dissipation (thermal resistance) of this embodiment will be described with reference to FIG. This FIG.
Using an aluminum radiator plate of × 15cm × 3cm,
The structure of the present embodiment with a power of 50 W and an application time of 10 minutes,
The figure also shows the results of measuring the respective thermal resistance values of each resin-encapsulated semiconductor device having a conventional structure.
【0015】図5に示すように、本実施例のように樹脂
ケース5の取り付け部9に切込み部13を形成した場合
と、従来の構造とでは、熱抵抗値が大きく異なり、本実
施例で切込み部13を形成した構造の方が放熱性がよい
ことがわかる。As shown in FIG. 5, the thermal resistance is significantly different between the case where the cut portion 13 is formed in the mounting portion 9 of the resin case 5 as in this embodiment and the conventional structure. It can be seen that the structure in which the cuts 13 are formed has better heat dissipation.
【0016】さらにまた、取り付け部9の変形可能な領
域は、前述したような切込み部13以外にも、変形可能
な材料、たとえばゴム材、柔軟性樹脂などで形成しても
同様の作用により同様の効果が得られる。また取り付け
部9自体を柔軟性樹脂などで部分形成、全面形成しても
同様の作用により同様の効果が得られる。Further, the deformable region of the mounting portion 9 may be formed of a deformable material, for example, a rubber material, a flexible resin, or the like, in addition to the cut portion 13 as described above. The effect of is obtained. Further, even if the mounting portion 9 itself is partially formed of a flexible resin or the like and the entire surface is formed, the same effect can be obtained by the same operation.
【0017】[0017]
【発明の効果】本発明では樹脂ケース端部の取り付け部
に変形可能な領域として、たとえば切込み部を形成する
ことにより、その取り付け部に対して、ボルトまたはビ
スにより放熱板に締め付けて取り付けた場合、取り付け
部自体のみを変形させ、段差によるずれなどを取り付け
部の変形で緩和させ、放熱板との接着性を向上させ、放
熱性を向上することができる。また段差によるずれなど
を取り付け部の変形で緩和するので、樹脂ケースと封止
樹脂との間に発生したずれによるストレスも抑制でき、
樹脂ケースと封止樹脂との間の剥離も防止することがで
きる。According to the present invention, for example, a notch is formed as a deformable area in the mounting portion at the end of the resin case, and the mounting portion is fastened to the heat radiating plate with bolts or screws. In addition, only the mounting portion itself is deformed, a shift due to a step is reduced by the deformation of the mounting portion, the adhesiveness to the heat radiating plate is improved, and the heat radiation can be improved. In addition, since the displacement due to the step is alleviated by the deformation of the mounting part, the stress caused by the displacement generated between the resin case and the sealing resin can be suppressed,
Separation between the resin case and the sealing resin can also be prevented.
【図1】本発明の一実施例にかかる樹脂封止型半導体装
置を示す構成図FIG. 1 is a configuration diagram showing a resin-sealed semiconductor device according to one embodiment of the present invention.
【図2】本発明の一実施例にかかる樹脂封止型半導体装
置の作用を示す図FIG. 2 is a diagram showing the operation of a resin-sealed semiconductor device according to one embodiment of the present invention.
【図3】本発明の一実施例における樹脂封止型半導体装
置の作用を示す図FIG. 3 is a diagram showing the operation of a resin-sealed semiconductor device according to one embodiment of the present invention.
【図4】本発明の一実施例における樹脂封止型半導体装
置の作用を示す図FIG. 4 is a diagram showing the operation of a resin-sealed semiconductor device according to one embodiment of the present invention.
【図5】本発明の一実施例にかかる樹脂封止型半導体装
置の放熱性を示す図FIG. 5 is a view showing the heat dissipation of the resin-sealed semiconductor device according to one embodiment of the present invention;
【図6】従来の樹脂封止型半導体装置を示す構成図FIG. 6 is a configuration diagram showing a conventional resin-encapsulated semiconductor device.
1 金属基板 2 パワー半導体素子 3 制御用集積回路素子 4 金属細線 5 樹脂ケース 6 封止樹脂 7 外部端子 8 放熱板 9 取り付け部 10 取り付け用穴 11 ボルト 12 放熱用グリス 13 切込み部 14 浮き上がり 15 剥離 DESCRIPTION OF SYMBOLS 1 Metal substrate 2 Power semiconductor element 3 Control integrated circuit element 4 Fine metal wire 5 Resin case 6 Sealing resin 7 External terminal 8 Heat sink 9 Attachment part 10 Attachment hole 11 Bolt 12 Radiation grease 13 Cut part 14 Lifting 15 Peeling
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−168656(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01L 25/04 ────────────────────────────────────────────────── (5) References JP-A-59-168656 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01L 25/04
Claims (2)
樹脂ケースで外囲を包囲した構造の樹脂封止型半導体装
置において、前記樹脂ケースに設けられた放熱板取り付
け用の取り付け部が変形可能な領域を有し、前記変形可
能な領域が、柔軟性材料で形成されていることを特徴と
する樹脂封止型半導体装置。1. A plurality of electronic components are mounted on a conductive material,
In a resin-encapsulated semiconductor device having a structure in which an outer periphery is surrounded by a resin case, a mounting portion for mounting a heat sink provided in the resin case has a deformable region,
A resin-encapsulated semiconductor device, wherein the active region is formed of a flexible material .
子とを搭載した金属基板と、前記複数の電子部品と前記
外部端子との外囲を包囲し、前記金属基板に固定され、
放熱板取り付け用の取り付け部を有した樹脂ケースと、
前記樹脂ケース内の前記金属基板上の前記複数の電子部
品と前記外部端子との領域を封止した樹脂とよりなる樹
脂封止型半導体装置であって、前記樹脂ケースに設けら
れた取り付け部が変形可能な領域を有しており、前記変
形可能な領域が、柔軟性材料で形成されていることを特
徴とする樹脂封止型半導体装置。Wherein a plurality of electronic components, and the metal substrate mounted with an external terminal for external connection, it encloses the outer circumference of said plurality of electronic component and the <br/> external terminal, the metal substrate Fixed,
A resin case having a mounting portion for mounting a heat sink,
Wherein a region become more resin-sealed semiconductor device as sealed resin and the metal of the plurality of electronic components on a substrate in a resin case and the external terminal, the mounting portion is provided in the resin case It has a deformable region, wherein the variable
A resin-encapsulated semiconductor device , wherein a shapeable region is formed of a flexible material .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07197368A JP3126297B2 (en) | 1995-08-02 | 1995-08-02 | Resin-sealed semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07197368A JP3126297B2 (en) | 1995-08-02 | 1995-08-02 | Resin-sealed semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0945852A JPH0945852A (en) | 1997-02-14 |
JP3126297B2 true JP3126297B2 (en) | 2001-01-22 |
Family
ID=16373340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP07197368A Expired - Fee Related JP3126297B2 (en) | 1995-08-02 | 1995-08-02 | Resin-sealed semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3126297B2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4453498B2 (en) | 2004-09-22 | 2010-04-21 | 富士電機システムズ株式会社 | Power semiconductor module and manufacturing method thereof |
DE102007034847B4 (en) * | 2007-07-26 | 2019-06-13 | Semikron Elektronik Gmbh & Co. Kg | Power semiconductor module with a plastic housing with connecting devices |
US7839004B2 (en) * | 2008-07-30 | 2010-11-23 | Sanyo Electric Co., Ltd. | Semiconductor device, semiconductor module, method for manufacturing semiconductor device, and lead frame |
JP6743916B2 (en) * | 2017-02-13 | 2020-08-19 | 富士電機株式会社 | Semiconductor device and method of manufacturing semiconductor device |
JP6666048B2 (en) * | 2018-07-10 | 2020-03-13 | 三菱電機株式会社 | Circuit board device |
US10720379B2 (en) * | 2018-12-19 | 2020-07-21 | Cree, Inc. | Robust integrated circuit package |
JP7325316B2 (en) | 2019-12-16 | 2023-08-14 | 三菱電機株式会社 | semiconductor equipment |
KR102428948B1 (en) * | 2020-06-15 | 2022-08-04 | 에스티씨 주식회사 | Cooling module with improved insulation efficiency |
-
1995
- 1995-08-02 JP JP07197368A patent/JP3126297B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0945852A (en) | 1997-02-14 |
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