JP3096025B2 - Glow discharge emission spectrometer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glow discharge emission spectrometer for analyzing generated light with a spectroscope while sputtering a sample.

[0002]

2. Description of the Related Art When a DC or high-frequency high voltage is applied between two electrodes in an argon (Ar) atmosphere at a gas pressure of about 500 to 1300 Pa, a glow discharge occurs.
Ar ions are generated. The generated Ar ions are accelerated by a high electric field, collide with the surface of the cathode, and knock out substances existing there. This phenomenon is called sputtering, and the sputtered particles (atoms, molecules, and ions) are excited in the plasma and emit light having a wavelength specific to the element when returning to the ground state. An analysis method in which the emitted light is separated by a spectroscope to identify elements is called a glow discharge emission spectral analysis method.

[0003]

However, in a conventional analyzer embodying this glow discharge emission spectroscopic analysis method,
The work of bringing the analysis surface of the sample into contact with the support of the glow discharge tube was not automated, and the analysis was troublesome, for example, the worker had to make the contact manually.

Accordingly, an object of the present invention is to provide a glow discharge optical emission spectrometer in which the contact of a sample with a supporting portion is automated.

[0005]

To achieve the above object, according to the Invention The glow discharge emission spectroscopic analysis apparatus according to claim 1 of the present invention, first, an anode tube and the sample voltage to the sample is引加A glow discharge tube having a supporting portion to be abutted, a decompression means for evacuating an inner space in which the anode tube is housed, and a power supply for applying a voltage between the anode tube and the sample to generate a glow discharge Means, and a robot device for holding the sample with the analysis surface of the sample in contact with the support.
According to this configuration , the robot device can automate the contact and holding of the sample with the support.

Further, in the apparatus according to the first aspect, the support portion is an insulating portion, and the glow discharge tube includes an anode block having an anode tube, the support portion, and a cathode block separated from the support portion. Become. Further, the robot device brings the cathode block into conductive contact with a sample. According to this configuration , when the support portion is an insulating portion, the robot device can automate the conductive contact of the cathode block with the sample.

Further, in the apparatus according to the first aspect , the anode block includes an anode block main body and an anode block unit, and the anode block unit and the support are integrally formed as a unit. The gap between the tip surface of the anode tube and the surface where the analysis surface of the sample abuts is adjusted in advance. In addition, one of the plurality of units is selectively attached to the single anode block main body, and the anode block main body has an engagement means for detachably attaching the unit, and the unit is There is provided engaged means for engaging with the engaging means. Further, the robot apparatus operates according to an instruction of an operator, and selectively attaches the unit to the anode block body. According to this configuration , the unit can be replaced in a short time in accordance with the size of a desired portion of the sample to be analyzed, and the replacement can be automated by the robot device.

According to a second aspect of the present invention, there is provided the glow discharge optical emission spectrometer according to the first aspect, further comprising a cleaning tool for cutting or polishing an inner surface and a front end surface of the anode tube, wherein the robot device is provided with a pre-analysis device. Next, the inner surface and the distal end surface of the anode tube are cut or polished using the cleaning tool. According to the apparatus of the second aspect, the cleaning of the inner surface and the tip surface of the anode tube, which is required regularly before the analysis, can be automated by the robot device.

A glow discharge optical emission spectrometer according to a third aspect of the present invention corresponds to the device according to the first or second aspect , which is a substantially disk-shaped sample having a notch indicating a crystal orientation in a peripheral portion. An orientation flat aligner for setting and holding the sample in a predetermined direction around the axis thereof based on the position of the cutout portion of the sample, further comprising: Is transferred to an analysis position facing the anode tube. According to the apparatus of the third aspect , analysis of a desired portion of a sample such as a semiconductor wafer can be automated by the orientation flat aligner and the robot device.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A glow discharge optical emission spectrometer according to one embodiment of the present invention will be described below with reference to the drawings.
First, the configuration of this device will be described. In this apparatus, as shown in FIG. 5, light S emitted from a grim glow discharge tube 21 that generates light having a wavelength specific to an element by sputtering using glow discharge and transmitted through a window 13a is converted into a spectroscope 13 Incident inside. The spectroscope 13 has a window 13
a, an entrance slit 24, a diffraction grating 26 that diffracts the light S incident from the entrance slit 24 at different diffraction angles according to the wavelength, and an exit slit 27 that passes the diffracted light.
And a photomultiplier tube 28 for measuring the intensity of the diffracted light.

The apparatus has a glow discharge tube 21 as shown in FIG. This glow discharge tube 21
First, an anode block 1 having an anode tube 4a to which a voltage is applied to a sample 6, and a supporting portion 5 to which the sample 6 contacts
(In the present embodiment, it is an insulating portion made of a resin such as polyimide or Vespel at the same time), and a supporting portion 5 and a separated (separate) cathode block 7. Here, the anode block 1 includes an anode block main body 2 fixed below the window 13a of the spectroscopic chamber 13, and an anode block unit 4 which is a part of the unit 3 described later. In the present embodiment, the sample 6 is illustrated as a substantially disk-shaped one such as a semiconductor wafer, but the application of the present invention is not limited to such a sample.

The anode block unit 4 and the support 5 are
For example, it is connected at three places in the circumferential direction by bolts 9 with a spacer 8 interposed therebetween, and is integrally formed as a unit 3. In the unit 3, a surface 5a on which the anode tube tip surface 4b and the analysis surface 6a of the sample 6 are in contact. Is adjusted in advance by the thickness of the spacer 8. This gap is
If the dimensional accuracy of each part 4 and 5 of the unit 3 is sufficient,
Even if the spacers 8 having different thicknesses are not used, an appropriate size can be obtained simply by assembling, but such a case is also included in the “adjusted in advance” here. The circumferential direction is a circumferential direction about the central axis of the anode tube 4a.

Further, in this apparatus, a plurality of units 3 are provided for a single anode block main body 2, and one of them is selectively attached in accordance with the size of a portion of the sample 6 to be analyzed. (FIG. 3 shows a partial cross section in a state where one selected unit 3A is attached to the anode block main body 2). Therefore, first, the anode block main body 2 has three spring plungers (engaging means) 10 for detachably attaching the unit 3 in the circumferential direction. Here, the spring plunger 10 is formed by projecting a ball (engagement element) 10a pressed by an internal spring from an open end of a cylindrical case. More specifically, a stepped ring-shaped member 2a (made of copper or the like) having three circumferentially arranged spring plungers 10 whose ball 10a faces the central axis of the anode tube 4a is attached from below by bolts or the like (not shown). ing. On the other hand, the unit 3 has the ball 1 on the outer periphery of the base (upper part) of the anode block unit 4.
It has a step (engaged means) 3a that engages with 0a.

The anode block body 2 has an O-ring 11 for improving the sealing performance with the unit 3. The unit 3 also has an O-ring 11 for improving the sealing performance between the anode block body 2 and the sample 6. In addition, the anode block body 2 and the unit 3 have vacuum exhaust paths 2b and 3b communicating with each other, and they communicate with the inner space V in which the anode tube 4a is stored, so that the inner space V is
A vacuum is drawn from a vacuum exhaust hole 2c of the anode block main body 2 by a pressure reducing means (not shown). The anode block body 2 has an argon gas supply hole (not shown), and the inner space V has a rare gas atmosphere of argon (500 to 1300).
Pa). Further, the apparatus according to the present embodiment includes a power supply unit (power supply) that generates a glow discharge by applying a voltage between the anode tube 4a and the sample 6 via the anode block body 2 (the anode block 1) and the cathode block 7. Unit 12).

Further, the apparatus of the present embodiment includes a robot device for holding the sample 6 in a state where the analysis surface 6a of the sample is in contact with the support portion 5, and the like. It is composed of one robot hand 14 (FIG. 1) and a second robot hand 15 (FIG. 2). The first robot hand 14 is, as shown in the plan view of FIG.
a, a first shaft 14b that moves up and down (perpendicularly to the paper surface) with respect to the base 14a, a first arm 14c having a base end fixed to the first shaft 14b, and a first shaft 14b that rotates with respect to the distal end of the first arm 14c. A second arm 14e having a proximal end fixed to the two shafts 14d and 14d, a third shaft 14f rotating with respect to the distal end of the second arm 14e, and a third arm having a proximal end fixed to the third shaft 14f. The arm 14g includes a hand 14h provided on the distal end of the third arm 14g and on which the sample 6 is placed.

Further, the apparatus calculates the positions of the notch 6b and the center 6c of the placed sample, and sets the center 6c of the sample at a predetermined delivery position P based on those positions. Further, a so-called orientation flat aligner 19 for setting a desired direction 6d of the sample to a predetermined delivery direction L is provided. The orientation flat aligner 19 includes, for example, an XY table 19a and a rotary table 19b provided thereon and on which the sample 6 is placed. And the first robot hand 1
Reference numeral 4 denotes a storage position where the sample 6 is stored in a cassette 20 described later, an orientation flat aligner 19, and an anode tube 4
The sample is set at the predetermined delivery position P and the delivery direction L such that the sample is moved between the analysis position O and the analysis position O, and the desired part of the analysis surface 6a of the sample is located at the analysis position O. 6 from the orientation flat aligner 19,
The sample 6 is moved while keeping the desired direction 6d at least parallel to the analysis position O.

The second robot hand 15 shown in FIG. 2 is used for exchanging the unit 3 or bringing the cathode block 7 into conductive contact with the sample 6 abutting on the support portion 5. A horizontal moving body 15b that moves in the left-right direction with respect to the base 15a, a vertical moving body 15c that moves up and down with respect to the horizontal moving body 15b, a rotating body 15d that rotates with respect to the vertical moving body 15c, and a tip of the rotating body 15d It comprises a hand unit 15e that opens and closes and grips the unit 3, the cathode block 7, and the like. The horizontal moving body 15b and the vertical moving body 15c are driven horizontally and vertically by, for example, a ball screw and an air cylinder, respectively. The hand unit 15e
Are formed in a shape that can easily hold the unit 3 and the cathode block 7.

On the other hand, the base 15 of the second robot hand 15
Above “a”, a first stocker 16 and a second stocker 17 are provided on the left and right of the anode block body 2. The first stocker 16 has the spring plunger (not shown) at the height of the one-dot chain line, and has a plurality of units as in the case where the anode block body 2 holds the unit 3 (3A) (FIG. 3). 3A, 3B, and 3C (in FIG. 2,
The unit 3A is attached to the anode block main body 2. ). For quick and accurate analysis, unit 3
It is desirable that the surface of the first stocker 16 be in an inert gas atmosphere such as argon gas or vacuum to prevent the unit 3 to be held from being oxidized, adhering dust and preventing moisture absorption. It is desirable to pull. The second stocker 17 also has the spring plunger 10 (FIG. 4A) at the height of the one-dot chain line, and similarly holds the cathode block 7. For this purpose, the cathode block 7 has a V-shaped (FIG. 3) engaging groove 7a which engages with a spring plunger ball 10a (FIG. 4A) on the outer periphery of the lower part.

Further, the apparatus is provided with an inner surface 4 of the anode tube 4a.
In order to polish f, a brush cleaning tool 18B to which a brush 30 having a substantially cylindrical shape as shown in the front view of FIG. This brush 30 is shown in FIG.
As shown in the plan view of FIG.
Have a plurality of flexible branches 30b spirally around the axis 30a. Here, the spherical abrasive grains 30c are, for example, silicon carbide, the branches 30b are, for example, nylon resin, the shaft 3
Oa is preferably made of, for example, stainless steel. FIG.
In (a), the outer diameter of the brush 30 (the spherical abrasive grains 30 c
Is set to be slightly larger than the inner diameter of the anode tube 4a (FIG. 3). The brush 30 is attached to a substantially cylindrical holder 31, and constitutes a brush cleaning tool 18B as a whole.

Specifically, first, the lower part of the brush body 30d is housed in the hole 31b on the upper part of the holder 31, and the shaft 3 having no spherical abrasive grains 30c below the brush body 30d.
A mounting portion 30e, which is a portion of 0a, is passed through a hole 31c at the lower portion of the holder 31. The lower left side of the holder 31 is separated from the upper side, and a pair of flanges 31e and 31f (only one side 31e is shown) are formed in a direction perpendicular to the paper across the slit 31d. By screwing a bolt 31g for pinching through the through hole formed in the other side 31e, the brush attaching portion 30e passed through the hole 31c is tightened, and the brush 30 is detachably attached to the holder 31.

The apparatus also includes a reamer cleaning tool 18A having a stepped reamer 32 as shown in FIG. 2 for cutting the inner surface 4f and the tip surface 4b of the anode tube 4a in FIG. Brush cleaning tool 18
B, The reamer cleaning tool 18A is held by the second stocker 17 when not in use. Second
The stocker 17 is set at the height indicated by the one-dot chain line in FIG.
The spring plunger 10 for detachably attaching the brush cleaning tool 18B as shown in FIG.
Are provided in the circumferential direction about the shaft 30a of the brush cleaning tool 18B. On the other hand, the holder 31 of the brush cleaning tool 18B has its sphere 10a
And has a V-shaped engagement groove 31a that engages with the groove.

Similarly, the second stocker 17 is shown in FIG.
The spring plunger 1 for detachably mounting the reamer cleaning tool 18A at a height indicated by a chain line.
0 (FIG. 4 (a)) in the circumferential direction about the axis of the reamer cleaning tool 18A, while the holder 33 of the reamer cleaning tool 18A also has a V-shaped engagement groove 33a.

The second robot hand 15 uses the stepped reamer 32 and the brush 30 to cut or polish the inner surface 4f and the tip surface 4b (FIG. 3) of the anode tube before the analysis. But also. Therefore, the second
The hand portion 15e of the robot hand 15 is formed in a shape that can easily hold the holders 31 and 33 of the reamer cleaning tool 18A and the brush cleaning tool 18B.

Next, the operation of this device will be described.
First, the transfer of the sample 6 by the first robot hand 14, the contact of the sample with the support 5 of the analysis surface 6a, and the like will be described. The shelf 2 on which the sample 6 is placed is placed inside the side portion other than the side opened to face the first robot hand 14 in FIG.
A large number of samples 6 with the analysis surface 6a facing upward are stored in a substantially box-shaped cassette 20 having a large number of Oa in the vertical direction (perpendicular to the paper surface). Now, for example, for the uppermost sample 6, there are several desired portions to be analyzed in the direction of the orientation flat 6b (direction from the center 6c of the sample so as to be orthogonal to the orientation flat 6b). It shall be. When the effect is input to the apparatus from an input unit (not shown), the first robot hand 14 moves the uppermost sample 6 to be analyzed from the cassette 20, which is the storage position, to the hand unit 14h. Then, it is placed on the rotary table 19b of the orientation flat aligner 19.

At this time, the first robot hand
The desired direction 6d of the sample, that is, the direction of the orientation flat 6b of the sample in this case, does not match the predetermined delivery direction L connecting the rotation center N of the shaft 14b and the rotation center 19c of the rotary table in the initial state. The center 6c of the sample is accurately positioned at a predetermined delivery position P at a predetermined distance from the rotation center N of the first axis of the first robot hand in the predetermined delivery direction L, that is, at the rotation center 19c of the rotary table in the initial state. They do not always match.

Therefore, the orientation flat aligner 19 rotates the rotary table 19b one rotation, and cuts the mounted sample based on the change in the intensity of light incident on the optical sensor 19d provided to face the periphery of the sample 6. The position of the notch 6b and the center 6c (the position with respect to the predetermined delivery position P) is calculated. Then, based on those calculated positions, the orientation flat aligner 19 sets the center 6c of the sample at the predetermined delivery position P, and sets the desired direction 6d of the sample as the predetermined delivery direction L.

Here, when there is no deviation between the calculated position of the center 6c of the sample and the predetermined delivery position P,
When the robot hand 14 places the sample 6 such that the center 6c of the sample accurately matches the center of rotation 19c of the rotary table in the initial state, the orientation flat aligner 19 rotates the rotary table 19b, Desired direction of sample 6d
Need only be set in the predetermined delivery direction L. The orientation flat aligner 19 of FIG. 1 is in this case, and shows a state when the desired direction 6d is the direction of the orientation flat 6b of the sample. The tip of the desired direction 6d (the peripheral side of the sample 6) is set so as to face the opposite side (the left side in FIG. 3) of the first robot hand 14 in the predetermined transfer direction L.

On the other hand, when there is a deviation between the calculated position of the center 6c of the sample and the predetermined delivery position P, that is, the first robot hand 14 moves the sample to a position shifted from the rotation center 19c of the rotary table in the initial state. When the sample 6 is placed so that the center 6c comes, the orientation flat aligner 19
The rotation of the rotary table 19b and the parallel movement of the XY table 19a set the center 6c of the sample at a predetermined transfer position P and set the desired direction 6d of the sample to a predetermined transfer direction L. In this case, the rotation amount of the rotary table 19b of the orientation flat machine 19 and the parallel movement amount of the XY table 19a are uniquely determined, and either the rotation or the parallel movement may be performed first or may be performed simultaneously.

Next, the first robot hand 14 applies the sample 6 set at the predetermined delivery position P and delivery direction L as described above to the rotary table 19 of the orientation flat aligner.
b to the hand unit 14h, and a desired portion (for example, the center 6c of the sample in this case) on the analysis surface 6a of the sample is
a while maintaining the desired direction 6d (eg, the direction of the sample orientation flat 6b) toward the analysis position O, that is, the first axis 14b of the first robot hand. The sample 6 is moved in a straight line while matching a predetermined analysis carrying direction M connecting the rotation center N and the analysis position O. And the first robot hand 14
With the desired portion 6c of the analysis surface 6a of the sample positioned at the analysis position O, the analysis surface 6a of the sample is brought into horizontal contact with the support portion 5 of the glow discharge tube 21 from below (the state shown at the upper right of FIG. 1). ).

It should be noted that maintaining the desired direction 6d toward the analysis position O does not mean that the sample 6 is continuously maintained immediately after receiving the sample 6 from the orientation flat aligner 19; May be rotated,
After receiving, the desired direction 6d is directed to the analysis position O,
This means that the analysis surface 6a of the sample is maintained when it is moved to make it contact the support portion 5. Further, in the present invention, it is not always necessary to direct the desired direction of the sample to the analysis position after receiving it, and to move the sample straight while maintaining the state. That is, it suffices that the desired direction of the sample as a result of the movement is parallel to the desired direction of the moving sample. In the present invention, a sample set at a predetermined delivery position and delivery direction is received from the orientation flat aligner so that a desired portion of the analysis surface of the sample is located at the analysis position, and at least the desired direction is directed toward the analysis position. Moving the sample while keeping it parallel means that.

The inner space V in FIG. 3 is evacuated by a pressure reducing means (not shown), and an argon rare gas atmosphere (5
00-1300 Pa), the analysis surface 6a of the sample
Is pressed against the support portion 5 via the seal member 11 by the atmospheric pressure applied to the back surface 6e, and is brought into close contact therewith. In the present embodiment, the sample is brought into contact with the support 5 in a state where the analysis surface 6a is horizontal. However, the present invention is not limited to this. For example, the analysis surface of the sample is vertical. You may make it abut on a support part in such a state.

Next, the second robot hand 15 of FIG.
The cathode block 7 is moved from the second stocker 17 to below the sample 6 in contact with the support portion 5, and is held in contact with the sample 6. At this time, the hand portion 14h of the first robot hand is, as shown in FIG.
(FIG. 2). As described above, according to the apparatus of the present embodiment, when the support section 5 is an insulating section, the second robot hand 15 allows the conductive contact of the cathode block 7 to the sample 6 contacted with the support section 5, The holding of the sample 6 can also be automated.

Thereafter, the first robot hand 14 returns to the initial state as shown in FIG. 1 and stands by, for example, to avoid the application of the next high voltage. The hand unit 14h
Is made of ceramic or the like and the insulation is sufficient, the first robot hand 14 moves the analysis surface 6a of the sample to the support 5
May be kept in contact with the lower part from below. In this case, the analysis surface 6a of the sample is
Can be held in contact with and held by the support portion 5. The cathode block 7 has a three-stage structure in which the middle part is made of an insulator and the upper and lower parts are made of a conductor (metal). As shown in FIG. As shown in FIG. 2, the second robot hand 15 grips the lower part from the middle step, so there is no possibility that a high voltage is applied to the second robot hand 15.

As described above, according to the apparatus of the present embodiment,
The center 6c of the sample in FIG. 1 is the rotation center 1 of the orientation flat aligner.
9c, the orientation flat aligner 19 sets the desired direction 6d of the sample to the predetermined transfer direction L to the first robot hand 14 while correcting the shift, and
The robot hand 14 receives the sample 6 and transfers the sample 6 to the analysis position O, and moves the desired direction 6 d so that the center 6 c of the sample is located at the analysis position O.
The sample 6 is moved while being kept at least parallel to the sample, so that the analysis surface 6a of the sample is
, And the state can be maintained by the second robot hand 15 (FIG. 2). That is, the center 6c of the sample
Can be accurately automated even if it is placed off the center of rotation 19c of the orientation flat aligner.

The first robot hand 14 may move the sample 6 while maintaining the desired direction 6d set by the orientation flat aligner 19 at least parallel to the analysis position O, and the direction of the sample 6 Therefore, the control of the first robot hand 14 is easy. Moreover, since the orientation flat aligner 19 can use an existing one, the apparatus can be easily configured.

In the present embodiment, the analysis surface 6a of the sample is brought into contact with the support 5 by the first robot hand 14 in a state where the desired portion 6c of the analysis surface 6a of the sample is located at the analysis position O. After that, the cathode block 7 was pressed from below by the second robot hand 15 in FIG.
The present invention is not limited to such a procedure. For example, the first robot hand 14 in FIG. 1 may be used in a state where a desired portion 6c of the analysis surface 6a of the sample is located immediately below the analysis position O.
a is placed on the cathode block 7 held by the second robot hand 15 in FIG. 2 which stands by immediately below the analysis position O, and then the second robot hand 15 is raised to support the analysis surface 6a of the sample. The sample 6 can be held in contact with the portion 5.

The analysis surface 6a of the sample is not only held in contact with the support portion 5 by the first and second robot hands 14 (FIG. 1) and 15 as described above, but also by a pressure reducing means (not shown). 3 is evacuated to an argon noble gas atmosphere (500-1300 Pa),
Due to the atmospheric pressure applied to the back surface 6e of the sample, the sample is pressed against the support portion 5 via the seal member 11 and closely adheres.

Then, between the anode tube 4a and the sample 6, the anode block body 2 (anode block 1) and the cathode block 7
When a high voltage of several hundred to several thousand volts is applied by the power supply means 12 via the power supply, glow discharge is generated, and cations of argon are generated. The sample 6 is sputtered by the Ar ions, and the generated light S passes through the window 13a and travels through the entrance slit 24 of FIG. The diffraction grating 26 diffracts light of a predetermined wavelength, and passes through the exit slit 27 to the photomultiplier tube 2.
8 The photomultiplier tube 28 measures the intensity of the incident light. That is, a desired portion of the sample 6, for example, FIG.
Of the sample center 6c is performed.

Next, in order to analyze another desired portion in the same desired direction 6d, the first robot hand 14 returns to the posture when the analysis surface 6a of the sample is brought into contact with the support 5, and
When the decompression of the inner space V in FIG. 3 by the decompression means is released and the second robot 15 (FIG. 2) holding the cathode block 7 descends, the sample 6 is placed on the hand part 14h of FIG. You.

When it is not necessary to replace a unit 3 described later in the subsequent analysis, the second robot hand 15 shown in FIG. 2 does not need to hold the cathode block 7 on the second stocker 17, and While holding 7
It is sufficient that the sample 6 is retracted to an appropriate position so as not to hinder the contact of the sample 6 with the support portion 5. When the unit 3 to be described later needs to be replaced or the analysis is completed, the second robot hand 15 moves the cathode block 7 from below the sample 6 abutted on the support 5 to the second stocker 17. It is moved downward and raised so as to be held by the second stocker 17. When the cathode block 7 is held by the second stocker 17, the second robot hand 15 opens the hand portion 15e to release the grip of the cathode block 7, and returns to the initial state shown by the solid line in FIG.

Now, the first robot hand 14 in FIG.
The desired direction 6d (for example, the sample orientation flat 6 here) is set so that the desired portion to be analyzed next is located at the analysis position O.
The direction of b) is maintained toward the analysis position O, that is, the sample 6 is moved straight while matching the predetermined analysis carry-in direction M, and the sample is moved in a state where a desired portion is located at the analysis position O. The analysis surface 6a is brought into horizontal contact with the support portion 5, and the second robot hand 15 (FIG. 2) maintains this state. The subsequent analysis procedure is the same as described above.

To analyze a desired portion of the same sample 6 in another desired direction 6d, the sample 6 placed on the hand section 14h is moved to the first robot hand 14h after the previous analysis.
Is moved from the analysis position O and is mounted again on the rotary table 19b of the orientation flat aligner 19. Then, in the same manner as described above, the orientation flat aligner 19 moves the center 6c of the sample.
Is set to a predetermined delivery position P, and a new desired direction 6d of the sample is set to a predetermined delivery direction L. The subsequent procedure is the same as described above.

When the analysis has been completed for the sample 6, the first robot hand 14 places the sample 6 on the hand section 14h from the analysis position O and moves it to the position below the cassette 20 which is the storage position. On the shelf plate 20a. When performing analysis on another sample 6, the above procedure is repeated. As described above, according to the apparatus of the present embodiment, the first robot hand 14 controls the cassette 2 in which the sample 6 is stored at the storage position.
Since it is moved between 0 and the orientation flat aligner 19 and the analysis position O, continuous analysis of a plurality of samples 6 can be automated. Moreover, not only the orientation flat aligner 19 but also the first
Robot hand 14, second robot hand 15 (FIG. 2)
Also, since an existing device can be used, the device can be easily configured.

In summary, according to the apparatus of the present embodiment, the robot apparatuses 14 and 15 can automate the contact and holding of the sample 6 with the support section 5. When the support unit 5 is an insulating unit, the robot devices 14 and 15 can automate the conductive contact of the cathode block 7 with the sample 6. Further, for a sample 6 such as a semiconductor wafer,
The analysis of a desired part can be automated by the orientation flat aligner 19 and the robot devices 14 and 15.

Next, the replacement operation of the unit 3 in FIG. 2 of this apparatus will be described. For example, suppose that the unit 3C is already attached to the anode block body 2, and if the inner diameter of the anode tube 4a of the unit 3C matches the size of a desired portion of the sample 6 to be analyzed, the unit 3 is replaced. However, if it does not fit and the inside diameter of the anode tube 4a of the other unit 3A matches, the fact is input to the apparatus from input means (not shown). At this time,
As described above, the second robot hand 15 causes the second stocker 17 to hold the cathode block 7 and returns to the initial state shown by the solid line in FIG.

The second robot hand 15 operates to that effect, that is, in response to an instruction from the operator, and holds the unit 3C with the hand unit 15e and pulls it downward. Thereby, the ball 10a of the spring plunger in FIG. 3 is pushed outward by the engagement step 3a of the unit 3C, the engagement is released, and the unit 3C is detached from the anode block main body 2. The second robot hand 15 in FIG. 2 moves the unit 3C thus removed to the lower right part of the first stocker 16 while holding the unit 3C with the hand unit 15e, and raises it. Then, the ball (not shown) of the spring plunger of the first stocker 16 is brought into contact with the engaging step 3a (FIG. 3) of the unit 3C.
2 and the unit 3C is held at the right side of the first stocker 16 to be in the state shown in FIG.

Subsequently, the second robot hand 15 opens the hand portion 15e to release the grip of the unit 3C, lowers the hand portion 15e slightly, and moves it to the lower left portion of the first stocker 16. Then, the raised hand unit 1
5e is closed, and the unit 3A is gripped. Thereafter, the second robot hand 15 removes the unit 3A from the first stocker 16 and attaches it to the anode block body 2 in the same manner as removing the unit 3C from the anode block body 2 and holding the unit 3C on the first stocker 16.

As described above, according to the device of the present embodiment,
In accordance with the size of the desired part of the sample 6 to be analyzed, the unit 3 can be replaced in a short time by replacing it, and the replacement can be automated by the robot devices 14 and 15. More specifically, the anode block 1 comprises a single anode block body 2 and a plurality of units 3 selectively attached thereto.
The anode tube 4a can be easily replaced according to the size of a desired portion of the sample 6 to be analyzed, etc., since the gap is adjusted in each unit 3 in advance. In addition, no gap adjustment is required for replacement. Further, since the attachment / detachment at the time of replacement is automated by the spring plunger 10 and the engagement step portion 3a (FIG. 3) of the unit without using a bolt or the like, and furthermore, the replacement is automated by the second robot hand 15. The replacement of the anode tube 4a is easier.

This replacement is not only required when the inner diameter of the anode tube 4a is to be changed according to the size of a desired portion of the sample 6 to be analyzed, but also when the anode tube 4a is worn out and needs to be replaced. Is also performed. Furthermore, for the same part, first, the superficial layer is slowly sputtered with the large-diameter anode tube 4a and analyzed precisely, and then replaced with the small-diameter anode tube 4a to increase the sputtering speed, and to the deep portion in a short time. It is also performed when analyzing.

Next, the cleaning operation of the anode tube 4a of this apparatus will be described. Now, after the last analysis,
It is assumed that the sample 6 has just been removed from the support 5 of the glow discharge tube 21. Before the next analysis, when input to the apparatus that cleaning of the anode tube 4a should be performed is input from an input unit (not shown), the second robot hand 15
5e from the initial state shown in FIG.
The reamer cleaning tool 18A is moved to a position below the reamer cleaning tool 18A held therein, and is lifted. As a result, the ball 10a of the spring plunger (FIG. 4A) is
The outer peripheral surface above 3a is pushed outward, the engagement is released, and the reamer cleaning tool 18A is removed from the second stocker 17.

The second robot hand 15 removes the reamer cleaning tool 18A thus removed from the hand section 15e.
3. While holding the anode tube 4a, move it to below the anode tube 4a, raise it while rotating, insert the upper part of the stepped reamer 32 into the inside of the anode tube 4a, and insert the step into the tip surface 4b of the anode tube in FIG.
To cut the inner surface 4f and the tip surface 4b of the anode tube. Here, the hand unit 15 of the second robot hand in FIG.
e and the supporting portion 5 serving as the lower part of the glow discharge tube 21 are formed in shapes that do not interfere with each other. When the reamer cleaning tool 18A has been rotated for a predetermined time, the second robot hand 15 lowers the hand portion 15e to release the stepped reamer 3A.
2 is extracted from the anode tube 4a, and in conjunction with this, argon gas is flushed from an argon gas supply hole (not shown) of the anode block body 2.

When the cutting by the stepped reamer 32 and the flushing of the argon gas are repeated a predetermined number of times, the second robot hand 15 stops the rotation of the hand portion 15e, and holds the second stocker 17A while holding the reamer cleaning tool 18A. Move to below the original predetermined position in,
To raise. Then, the ball (not shown) of the spring plunger at the corresponding portion of the second stocker 17 projects and engages inward with the engaging groove 33a of the holder of the reamer cleaning tool 18A, and the reamer cleaning tool 18A is engaged with the second stocker 17A. At the predetermined position, and the state shown in FIG. 2 is obtained. The second robot hand 15 is a hand unit 15e
Is opened to release the grip of the reamer cleaning tool 18A, and the hand section 15e is lowered. Thus, the first-stage cleaning operation is completed. In addition, if the dirt on the inner surface 4f of the anode tube in FIG. 3 can be sufficiently removed only by the second-stage cleaning operation described below, the first-stage cleaning operation may be performed only on the tip surface 4b of the anode tube. Good.

Now, in the conventional technique, the inner surface 4f of the anode tube
In some cases, dirt cannot be sufficiently removed by the stepped reamer 32 in FIG. Therefore, the following second stage cleaning operation is performed. First, the second robot hand 15
Moves the hand unit 15e to the lower right part of the second stocker 17. Then, the raised hand portion 15e is closed, and the brush cleaning tool 18B is gripped.

Thereafter, the second robot hand 15 removes the brush cleaning tool 18B from the second stocker 17 in the same manner as in the first stage cleaning operation, and
The brush 30 is lifted while rotating, and the upper part of the brush 30 is inserted into the anode tube 4a, and the inner surface 4f (FIG. 3) of the anode tube is polished. After the polishing by the brush 30 for a predetermined time and the flushing of the argon gas are repeated a predetermined number of times, the brush cleaning tool 18B is held on the right part of the second stocker 17 as before. The second robot hand 15 opens the hand unit 15e to release the grip of the brush cleaning tool 18B, and returns to the initial state shown in FIG. This completes the second-stage cleaning operation. In addition, the cleaning work of the first and second stages includes:
It may be performed periodically or every time before the analysis, but may be performed as needed before analyzing a sample of a different type from the last time or before precisely analyzing the outermost layer.

As described above, according to the device of the present embodiment,
Cleaning of the inner surface 4f and the distal end surface 4b of the anode tube 4a, which is required regularly before analysis, can be automated by a robot device. More specifically, the abrasive surface (the brush body 30) of the brush 30 shown in FIG.
d) is soft and the abrasive grains 30c are spherical, so that it can be appropriately polished without damaging the inner surface 4f of the anode tube of FIG. 3 and, therefore, the inner surface 4f of the anode tube.
Can be sufficiently removed. Moreover, the entire cleaning operation can be easily performed by the second robot hand 15 in FIG. Further, in the present invention, a plurality of stepped reamers or brushes corresponding to the inner diameter of the anode tube can be prepared and selected for use. Select a stepped reamer or brush according to your requirements. This makes it possible to cope with a case where the inner diameter of the anode tube used for analysis is changed.

[0056]

As described above in detail, according to the glow discharge optical emission spectrometer of the present invention, the contact of the sample with the support can be automated.

[Brief description of the drawings]

FIG. 1 is a plan view showing a robot device and the like included in a glow discharge optical emission spectrometer according to an embodiment of the present invention.

FIG. 2 is a front view showing another part of the robot device provided in the analyzer according to the first embodiment;

FIG. 3 is a partial longitudinal sectional view showing a glow discharge tube provided in the analyzer according to the first embodiment.

FIG. 4A is a front view showing a cleaning tool provided in the analyzer, and FIG. 4B is a plan view showing the cleaning tool.

FIG. 5 is a front view showing a spectroscope included in the analyzer of the above.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Anode block, 2 ... Anode block main body, 3 ... Unit, 3a ... Engagement means (engaging step part), 4 ... Anode block unit part, 4a ... Anode tube, 4b ... Tip surface of anode tube, 4
f: inner surface of the anode tube, 5: support portion, 6: sample, 6a: sample analysis surface, 6b: cutout portion of the sample, 7: cathode block,
DESCRIPTION OF SYMBOLS 10 ... engagement means (spring plunger), 12 ... power supply means, 14, 15 ... robot device (first and second robot hands), 18 ... cleaning tool, 19 ... orientation flatter, 21 ... glow discharge tube, L ... Predetermined direction, O: analysis position, V: inner space.

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-8-193953 (JP, A) JP-A-65-2156 (JP, A) JP-A-5-113402 (JP, A) JP-A-4-1992 154146 (JP, A) JP-A-9-229864 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 21/62-21/74 JICST file (JOIS)

Claims (3)

(57) [Claims] 1. A glow discharge tube having an anode tube to which a voltage is applied to a sample and a support portion to which the sample comes in contact, and a pressure reducing means for evacuating an inner space in which the anode tube is housed. A glow comprising power supply means for generating a glow discharge by applying a voltage between the anode tube and the sample; and a robot device for holding the sample with an analysis surface of the sample in contact with the support. A discharge emission spectrometer, wherein the support portion is an insulating portion, and the glow discharge tube has an anode block having an anode tube;
The support part includes a cathode block separated from the support part.The anode block includes an anode block body and an anode block unit part. The anode block unit part and the support part are integrally formed as a unit. In the unit, the gap between the anode tube tip surface and the surface on which the analysis surface of the sample abuts is adjusted in advance, and one of the plurality of units is selected for the single anode block body. Being mounted, the anode block main body has engaging means for detachably mounting the unit, and the unit has engaged means for engaging with the engaging means; Is for bringing the cathode block into conductive contact with the sample, which operates according to the instruction of the operator, and selectively connects the unit to the anode block body. Glow discharge emission spectroscopic analysis apparatus for attaching. 2. The anode tube according to claim 1 , further comprising a cleaning tool for cutting or polishing an inner surface and a tip surface of the anode tube, wherein the robot apparatus uses the cleaning device to perform analysis before the analysis. Glow discharge emission spectrometer for cutting or polishing the tip surface. 3. The sample according to claim 1 , wherein the sample has a substantially disk shape with a notch indicating a crystal orientation in a peripheral portion, and the sample is moved based on a position of the notch in the sample. A glow discharge optical emission spectrometer, comprising: an orientation flat aligner for setting and holding the sample in a predetermined direction about an axis, wherein the robot apparatus transfers a sample from the orientation flat aligner to an analysis position facing the anode tube. .