JPH10281995A - Method and device for emission spectroscopic analysis - Google Patents
Method and device for emission spectroscopic analysisInfo
- Publication number
- JPH10281995A JPH10281995A JP8959697A JP8959697A JPH10281995A JP H10281995 A JPH10281995 A JP H10281995A JP 8959697 A JP8959697 A JP 8959697A JP 8959697 A JP8959697 A JP 8959697A JP H10281995 A JPH10281995 A JP H10281995A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- metal sample
- metal
- electrode
- emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
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- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、発光分光分析方法
及び装置に関し、特に、金属試料中に存在する酸素元素
を精度良く分析する技術である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an emission spectroscopy method and apparatus, and more particularly to a technique for accurately analyzing an oxygen element present in a metal sample.
【0002】[0002]
【従来の技術】現在、金属試料中の元素分析をするに
は、発光分光分析装置、とりわけ後述のスパーク放電式
のものを用いることが多い。ところで、この発光分光分
析方法では、通常、製造現場で溶融状態にある金属を柄
杓でくみ取った所謂ボンブ試料を冷却したり、あるいは
鋼材から切り取ったものを、円形断面に加工した試料が
用いられる。また、分析に際しては、事前にその表面を
研磨してから、図2に示した試料保持部10にセットさ
れている。2. Description of the Related Art At present, for the purpose of elemental analysis in a metal sample, an emission spectrometer, particularly a spark discharge type described later, is often used. By the way, in this emission spectroscopic analysis method, usually, a so-called bomb sample obtained by cutting a metal in a molten state at a manufacturing site with a ladle, or a sample obtained by cutting a steel material into a circular cross section is used. Further, at the time of analysis, the surface is polished in advance and then set on the sample holding unit 10 shown in FIG.
【0003】しかしながら、前記ボンブ試料は、その直
径が20mm以上あることが多く、冷却速度が半径方向
で異なり、成分元素の濃度分布(偏析)が生じている。
この偏析は、特に、酸素等のガス形成元素で著しい。こ
のような偏析を抱えた試料を分析すると、一般的な発光
分光分析装置の放電面積は7mm程度なので、放電させ
る位置によって分析値が異なり、分析の誤差となってし
まう。従って、酸素の分析は、発光分光分析よりも、ま
だ昔ながらの燃焼法で行われることが多い。偏析がある
試料でも、全面積で放電させるようにすれば良いが、現
在の発光分光分析装置は、それを行えるような構造にな
っておらず、改良が熱望されている。[0003] However, the bomb sample often has a diameter of 20 mm or more, the cooling rate differs in the radial direction, and a concentration distribution (segregation) of component elements occurs.
This segregation is particularly significant for gas-forming elements such as oxygen. When a sample having such segregation is analyzed, a general emission spectrometer has a discharge area of about 7 mm, so that an analysis value differs depending on a discharge position, resulting in an analysis error. Therefore, the analysis of oxygen is often performed by a more traditional combustion method than the emission spectroscopy. Even a sample having segregation may be discharged over the entire area. However, the current emission spectrometer does not have a structure capable of performing the discharge, and improvement is eagerly desired.
【0004】[0004]
【発明が解決しようとする課題】本発明は、かかる事情
に鑑み、試料中で偏析し易い元素でも精度良く分析でき
るスパーク放電式の発光分光分析方法及び装置を提供す
ることを目的としている。SUMMARY OF THE INVENTION It is an object of the present invention to provide a method and an apparatus for a spark discharge type emission spectroscopy capable of accurately analyzing even an element which is easily segregated in a sample.
【0005】[0005]
【課題を解決するための手段】発明者は、上記目的を達
成するため、従来の分析方法の欠点を見直し、試料の小
径化を着想した。そして、該小径試料の複数本を試料保
持部にセットし、順次放電させることも着想し、その具
現化に鋭意努力して本発明を完成させた。すなわち、本
発明は、不活性ガス雰囲気中で、金属試料を対電極との
間でスパーク放電処理し、得られたスペクトル線に基づ
き該金属試料が含有する元素を発光分光分析するに際
し、1回の放電で全面積から発光可能な大きさの金属試
料を使用して分析することを特徴とする発光分光分析方
法である。Means for Solving the Problems In order to achieve the above object, the inventor reviewed the drawbacks of the conventional analysis method and conceived of reducing the sample diameter. The present inventors have also conceived of setting a plurality of the small-diameter samples in the sample holding portion and sequentially discharging the small-diameter samples. That is, according to the present invention, in a case where a metal sample is subjected to a spark discharge treatment with a counter electrode in an inert gas atmosphere, and the element contained in the metal sample is subjected to emission spectroscopy once based on the obtained spectral lines, An emission spectroscopic analysis method characterized in that analysis is performed using a metal sample having a size capable of emitting light from the entire area by the discharge of the sample.
【0006】また、本発明は、前記元素が酸素であるこ
とを特徴とする発光分光分析方法である。さらに、本発
明は、不活性雰囲気中に金属試料と電極とを対向させ、
それらの間で多数回のスパーク放電を行い、放電で生じ
たプラズマからの光を分光して該金属試料が含有する元
素を分析する発光分光分析装置であって、前記電極と対
向する位置に、金属試料を立設する試料保持具を備えて
なることを特徴とする発光分光分析装置である。[0006] The present invention is also an emission spectroscopic analysis method, wherein the element is oxygen. Further, the present invention, the metal sample and the electrode facing each other in an inert atmosphere,
Performing a number of spark discharges between them, an emission spectrometer for analyzing the elements contained in the metal sample by dispersing light from the plasma generated by the discharge, at a position facing the electrode, An emission spectrometer comprising a sample holder for erecting a metal sample.
【0007】加えて、本発明は、前記金属試料を離隔し
て複数本立設し、それらを前記電極と対向する位置に順
次移動させる試料保持具を備えてなることを特徴とし、
その試料保持具を、軸を中心に回転自在な円板とし、そ
の円周方向に前記金属試料を離隔して立設する複数の貫
通孔と、該貫通孔と金属試料の隙間を気密にするシール
材としてなることを特徴とする発光分光分析装置であ
る。[0007] In addition, the present invention is characterized in that it comprises a sample holder for arranging a plurality of the metal samples so as to be spaced apart from each other and sequentially moving them to a position facing the electrodes.
The sample holder is a disk that is rotatable about an axis, and a plurality of through holes that stand vertically apart from the metal sample in the circumferential direction, and a gap between the through hole and the metal sample is made airtight. An emission spectrometer that is used as a sealing material.
【0008】さらに加えて、本発明は、前記金属試料
を、直径7mm以下の棒状体としてなることを特徴とす
る発光分光分析装置でもある。本発明では、金属試料の
発光分光分析を上記のような構成で行うようにしたの
で、試料中で偏析し易い元素でも精度良く分析できるよ
うになる。特に、本発明は、金属試料中の酸素の分光分
析に有効である。In addition, the present invention is also an emission spectrometer characterized in that the metal sample is formed as a rod having a diameter of 7 mm or less. In the present invention, since the emission spectroscopy of a metal sample is performed with the above-described configuration, it is possible to accurately analyze even an element that is easily segregated in the sample. In particular, the present invention is effective for spectroscopic analysis of oxygen in a metal sample.
【0009】[0009]
【発明の実施の形態】まず、発光分光分析装置を図2に
基づき説明する。それは、被分析対象である金属試料1
(以下、試料という)を支持する試料保持部10と、試
料1に対向する位置に設けられ、該試料1との間で放電
する電極2がある。そして、放電により試料1から放電
プラズマ3が発生すると、該プラズマ3からの光4を集
める集光レンズ5が配置されており、該集光された光を
入射スリット7を介して分光する分光器6が接続されて
いる。この分光器6は、内臓する回折格子8で前記集光
された光を各元素に固有なスペクトルとし、そのスペク
トル強度を光検出器9で測定するようになっている。該
測定したスペクトル強度のデータは、別途操作室などに
置かれた計算機11に転送され、元素の濃度が計算さ
れ、表示されるのである。DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an emission spectrometer will be described with reference to FIG. It is the metal sample 1 to be analyzed.
There is a sample holding unit 10 for supporting the sample (hereinafter, referred to as a sample) and an electrode 2 provided at a position facing the sample 1 and discharging between the sample 1 and the sample. When a discharge plasma 3 is generated from the sample 1 by the discharge, a condensing lens 5 for collecting light 4 from the plasma 3 is arranged, and a spectroscope for dispersing the condensed light through an entrance slit 7. 6 are connected. The spectroscope 6 converts the light condensed by the built-in diffraction grating 8 into a spectrum unique to each element, and measures the spectrum intensity with a photodetector 9. The measured spectrum intensity data is transferred to the computer 11 placed separately in an operation room or the like, where the element concentration is calculated and displayed.
【0010】かかる発光分析装置において、本発明は、
前記試料保持部10の改造を行ったのである。すなわ
ち、1回の放電で全面積から発光可能な大きさの金属試
料1を使用できるようにした。通常、電極2と試料1間
の放電は、直径7mm程度の円形断面となるので、試料
1をその断面積を有する棒状体とした。7mm以上で
は、偏析が分析結果で問題となるからである。そして、
該試料1を固定して支持する試料保持具12を考案し
た。[0010] In such an emission spectrometer, the present invention provides:
The sample holder 10 was modified. That is, the metal sample 1 having a size capable of emitting light from the entire area by one discharge can be used. Usually, the discharge between the electrode 2 and the sample 1 has a circular cross section with a diameter of about 7 mm. Therefore, the sample 1 is a rod-shaped body having the cross-sectional area. If the thickness is 7 mm or more, segregation becomes a problem in the analysis result. And
A sample holder 12 for fixing and supporting the sample 1 has been devised.
【0011】その構造は、図1に示すように、ほぼ試料
1の径に等しい直径の貫通孔13を設けた板状部材14
であり、これを前記試料保持部10の孔15の上に載せ
るようにしたのである。前記貫通孔13に棒状の試料1
を挿入した際、気密が維持されないと、空気が流通し、
試料保持部10の不活性雰囲気が維持できなくなる。そ
のため、前記保持具12の貫通孔13には、試料1の係
止も兼ねたシール材16が備えてある。シール材16と
しては、例えば耐熱ゴム製のOリングが適当である。As shown in FIG. 1, a plate-like member 14 having a through hole 13 having a diameter substantially equal to the diameter of the sample 1 is provided.
This is mounted on the hole 15 of the sample holding unit 10. The rod-shaped sample 1 is inserted into the through hole 13.
If the airtightness is not maintained when inserting the air,
The inert atmosphere of the sample holder 10 cannot be maintained. For this purpose, the through hole 13 of the holder 12 is provided with a sealing material 16 which also serves to lock the sample 1. As the sealing material 16, for example, an O-ring made of heat-resistant rubber is suitable.
【0012】また、本発明では、該試料保持具12を複
数本の試料1を同時にセットできるようにもした。具体
的には、図3の平面図で示すように、軸18を中心に回
転自在な円板とし、その円周方向に前記金属試料1を離
隔して立設する複数の貫通孔13と、該貫通孔13と金
属試料1の隙間を気密にするシール材16とを設けたも
のである。このようにすれば、試料保持部10の不活性
雰囲気を破ることなく、順次試料を電極と対向させて、
分析が可能となる。つまり、分析値をそれら複数の試料
からの値の平均値として得易くしたのである。なお、本
発明では、試料保持具12は上記円板17に限る必要は
なく、直線移動式のもの他種々の方式のものがあっても
良い。また、貫通孔13の数は、分析必要数に対応して
任意に選択すれば良い。Further, according to the present invention, the sample holder 12 can set a plurality of samples 1 at the same time. Specifically, as shown in the plan view of FIG. 3, a plurality of through holes 13 are provided, each of which is a disk that is rotatable around a shaft 18, and that stands apart from the metal sample 1 in the circumferential direction. A seal member 16 for sealing the gap between the through hole 13 and the metal sample 1 is provided. In this way, the sample is sequentially opposed to the electrode without breaking the inert atmosphere of the sample holding unit 10,
Analysis becomes possible. That is, the analysis value was easily obtained as an average value of the values from the plurality of samples. In the present invention, the sample holder 12 does not need to be limited to the disk 17 but may be of a linear movement type or of various types. The number of through holes 13 may be arbitrarily selected in accordance with the number required for analysis.
【0013】[0013]
【実施例】精練中の転炉内のほぼ同一位置にある溶鋼か
ら、分析用試料をくみ上げ、直径が6mmおよび20m
mの炭素鋼試料とした。その直径が6mmの試料は、8
ヶに分割し、そのうちの4本については、表面を研磨し
てから、前記円板形の保持具12にセットし、図2の試
料保持部10に載置した。、次に、真空ポンプ(図示せ
ず)を稼働させて、減圧室(図示せず)内を排気してか
ら、アルゴン・ガスを導入して試料保持部10を一定圧
に維持した。そして、1本目の試料1と電極2間で放電
し、酸素分析を行った。次に、前記試料保持具12を軸
18を中心に90°だけ回転し、2番目の試料1を電極
2と対向する位置に移動させ、放電、分析した。この操
作を来り返すことで、試料1の酸素分析を実施した。EXAMPLE A sample for analysis was pumped from molten steel at substantially the same position in a converter during refining, and the diameter was 6 mm and 20 m.
m carbon steel sample. A sample whose diameter is 6 mm is 8
After the surface was polished, four of them were set on the disk-shaped holder 12 and placed on the sample holder 10 shown in FIG. Then, a vacuum pump (not shown) was operated to evacuate the inside of the decompression chamber (not shown), and then argon gas was introduced to maintain the sample holder 10 at a constant pressure. Then, discharge was performed between the first sample 1 and the electrode 2, and oxygen analysis was performed. Next, the sample holder 12 was rotated by 90 ° about the axis 18, the second sample 1 was moved to a position facing the electrode 2, and discharge and analysis were performed. By repeating this operation, oxygen analysis of Sample 1 was performed.
【0014】一方、直径6mmの残4本については、従
来通りの燃焼法で、及び径が20mmの試料について
は、発光分光分析法により、試料の同一面内で4ヶ所を
分析した。表1にそれぞれの分析結果を示す。表1よ
り、本発明に係る発光分光分析法による結果は、従来の
燃焼法によるものとほぼ一致していた。一方、20mm
試料での値は、燃焼法の値と異なり、またバラツキも大
きかった。On the other hand, the remaining four tubes having a diameter of 6 mm were analyzed by the conventional combustion method, and the sample having a diameter of 20 mm was analyzed by the emission spectroscopy at four locations in the same plane of the sample. Table 1 shows the results of each analysis. From Table 1, the results obtained by the emission spectroscopy according to the present invention were almost the same as those obtained by the conventional combustion method. On the other hand, 20mm
The value of the sample was different from the value of the combustion method, and the variation was large.
【0015】[0015]
【表1】 [Table 1]
【0016】[0016]
【発明の効果】以上述べたように、本発明により、発光
分光分析装置で用いる試料を、従来より小径として、精
度良く金属試料を分析できるようになった。また、1セ
ットで複数の試料が分析できるようになったので、分析
値の信頼性を高めるばかりでなく、迅速分析にも効果が
期待できる。As described above, according to the present invention, a metal sample can be analyzed with high accuracy by reducing the diameter of a sample used in an emission spectrometer to a smaller diameter than in the prior art. In addition, since a plurality of samples can be analyzed in one set, not only the reliability of the analysis value is improved, but also an effect can be expected for rapid analysis.
【図1】本発明に係る発光分光分析装置で用いる試料の
保持具を示す縦断面図である。FIG. 1 is a longitudinal sectional view showing a sample holder used in an emission spectrometer according to the present invention.
【図2】スパーク式発光分光分析装置を示す縦断面図で
ある。FIG. 2 is a longitudinal sectional view showing a spark type emission spectrometer.
【図3】複数の試料を1セットで分析可能とした試料の
保持具を示す平面図である。FIG. 3 is a plan view showing a sample holder which can analyze a plurality of samples in one set.
1 試料(金属試料) 2 電極 3 放電プラズマ(プラズマ) 4 光 5 集光レンズ 6 分光器 7 入射スリット 8 回折格子 9 光検出器 10 試料保持部 11 計算機 12 試料保持具 13 貫通孔 14 板状部材 15 孔 16 シール材 17 円板 18 軸 DESCRIPTION OF SYMBOLS 1 Sample (metal sample) 2 Electrode 3 Discharge plasma (plasma) 4 Light 5 Condensing lens 6 Spectroscope 7 Incident slit 8 Diffraction grating 9 Photodetector 10 Sample holder 11 Computer 12 Sample holder 13 Through hole 14 Plate member 15 hole 16 sealing material 17 disk 18 axis
Claims (6)
極との間でスパーク放電処理し、得られたスペクトル線
に基づき該金属試料が含有する元素を発光分光分析する
に際し、 1回の放電で全面積から発光可能な大きさの金属試料を
使用して分析することを特徴とする発光分光分析方法。In an inert gas atmosphere, a metal sample is subjected to a spark discharge treatment with a counter electrode, and the emission spectrum analysis of elements contained in the metal sample is performed once based on the obtained spectral lines. An emission spectroscopic analysis method characterized in that analysis is performed using a metal sample having a size capable of emitting light from all areas by discharge.
請求項1記載の発光分光分析方法。2. The method according to claim 1, wherein the element is oxygen.
向させ、それらの間で多数回のスパーク放電を行い、放
電で生じたプラズマからの光を分光して該金属試料が含
有する元素を分析する発光分光分析装置であって、 前記電極と対向する位置に、金属試料を立設する試料保
持具を備えてなることを特徴とする発光分光分析装置。3. A metal sample and an electrode are opposed to each other in an inert atmosphere, a number of spark discharges are performed between the metal sample and the electrode, and light from plasma generated by the discharge is dispersed to separate the elements contained in the metal sample. An emission spectroscopy apparatus for analyzing a light emission spectrum, comprising: a sample holder for erecting a metal sample at a position facing the electrode.
それらを前記電極と対向する位置に順次移動させる試料
保持具を備えてなることを特徴とする請求項3記載の発
光分光分析装置。4. A plurality of metal samples are erected at a distance from each other,
4. An emission spectrometer according to claim 3, further comprising a sample holder for sequentially moving them to a position facing said electrodes.
な円板とし、その円周方向に前記金属試料を離隔して立
設する複数の貫通孔と、該貫通孔と金属試料の隙間を気
密にするシール材としてなることを特徴とする請求項4
記載の発光分光分析装置。5. The sample holder is a disk that is rotatable about an axis, a plurality of through-holes that stand vertically apart from the metal sample in the circumferential direction, and a plurality of through-holes for the metal sample. 5. A sealing material for airtightly sealing a gap.
An emission spectrometer according to the above.
体としてなることを特徴とする請求項3〜5いずれかに
記載の発光分光分析装置。6. The emission spectrometer according to claim 3, wherein the metal sample is a rod having a diameter of 7 mm or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8959697A JPH10281995A (en) | 1997-04-08 | 1997-04-08 | Method and device for emission spectroscopic analysis |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8959697A JPH10281995A (en) | 1997-04-08 | 1997-04-08 | Method and device for emission spectroscopic analysis |
Publications (1)
Publication Number | Publication Date |
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JPH10281995A true JPH10281995A (en) | 1998-10-23 |
Family
ID=13975163
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JP8959697A Withdrawn JPH10281995A (en) | 1997-04-08 | 1997-04-08 | Method and device for emission spectroscopic analysis |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102998299A (en) * | 2012-12-16 | 2013-03-27 | 重庆望江工业有限公司 | Small sample auxiliary device of spark direct-reading spectrometer |
JP2017534058A (en) * | 2014-11-07 | 2017-11-16 | サーモ フィッシャー サイエンティフィック (エキュブラン) エスアーエールエル | Apparatus and method for controlling an atomic emission spectrometer |
EP4227669A1 (en) * | 2022-02-15 | 2023-08-16 | Heraeus Electro-Nite International N.V. | Exchangeable spark unit and calibration method |
-
1997
- 1997-04-08 JP JP8959697A patent/JPH10281995A/en not_active Withdrawn
Cited By (4)
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CN102998299A (en) * | 2012-12-16 | 2013-03-27 | 重庆望江工业有限公司 | Small sample auxiliary device of spark direct-reading spectrometer |
JP2017534058A (en) * | 2014-11-07 | 2017-11-16 | サーモ フィッシャー サイエンティフィック (エキュブラン) エスアーエールエル | Apparatus and method for controlling an atomic emission spectrometer |
EP4227669A1 (en) * | 2022-02-15 | 2023-08-16 | Heraeus Electro-Nite International N.V. | Exchangeable spark unit and calibration method |
WO2023156131A1 (en) * | 2022-02-15 | 2023-08-24 | Heraeus Electro-Nite International N.V. | Exchangeable spark unit, system and calibration method |
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