JPH0641160Y2 - Glow discharge emission spectroscopy analyzer - Google Patents

Description

TECHNICAL FIELD The present invention relates to a glow discharge emission spectroscopic analyzer having an anode regeneration mechanism.

2. Description of the Related Art A glow discharge emission spectroscopic analyzer as shown in FIG. 4 is known as an apparatus for spectroscopically analyzing massive metals and the like. This device using glow discharge as a light source includes a thick-walled cylindrical anode mounting base 11 and a sample base 12 joined to one end side thereof. A cylindrical anode 13 concentrically attached to one end of the anode mounting base 11 penetrates the sample base 12, and the accommodating portion of the anode 13 is a positive / negative pressure chamber 14. Anode of anode mount 11
A tapered sub-negative pressure chamber 15 that communicates with the inside of the anode 13 is formed on the other end side of the anode 13. Sample 30 is a sample support block
It is fixed to the sample table 12 by the sample retainer 17 via 16.
The sample 30 and the sample table 12 are hermetically sealed by an O-ring 18, and the tip surface of the anode 13 faces the sample 30 with a slight gap.

In the case of spectroscopically analyzing the sample 30, the positive and negative pressure chambers 14 and the sub-negative pressure chamber 15 are evacuated to a predetermined vacuum pressure, and argon gas is introduced into the sub-negative pressure chamber 15 as a discharge gas, with the anode 13 sample
A discharge voltage is applied between 30 and. As a result, a glow discharge is generated between the anode 13 and the sample 30, the sample 30 is sputtered by the ionized argon gas molecules, and the sample component is excited to emit light. The components of the sample 30 are analyzed by introducing the emitted light into the spectroscope from the auxiliary negative pressure chamber 15.
By evacuating the positive and negative pressure chambers 14 so that the degree of vacuum is higher than that of the auxiliary negative pressure chambers 15, sputtering for the sample 30 mainly occurs in a range inside the inner peripheral surface of the anode 13.

When the spectroscopic analysis for the sample 30 is repeated, the substance evaporated from the sample 30 is vapor-deposited on the anode 13, and usually the anode 13 is subjected to several analyzes.
And the sample 30 are short-circuited by the deposit. Therefore, it is necessary to clean the anode 13 for each analysis, and conventionally, this work was automatically performed by a reamer provided in the apparatus. That is, the analysis of the sample 30 is completed, and the sample 30 is
When the reamer is removed from 12, the reamer is rotated and inserted into the anode 13 to scrape off the deposits attached to the inner peripheral surface of the anode 13.

Problems to be Solved by the Invention In the anode regeneration by such a reamer, the inner peripheral surface of the anode 13 can be regenerated, but the end surface of the anode 13 facing the sample 30 cannot be regenerated. Therefore, even if the device is equipped with a reamer, it is necessary to wipe the end surface of the anode 13 with a cloth each time the analysis is completed. This work is a manual work, which not only lowers the work efficiency, but also poses a major obstacle in promoting the full automation and unmanned analysis work.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a glow discharge emission spectroscopic analyzer capable of automatically regenerating the inner peripheral surface and the end surface of an anode with a simple structure.

Means for Solving the Problems An analyzer according to the present invention is an emission spectroscopic analyzer using glow discharge as a light source, and an analyzer main body having a cylindrical anode, and an analyzer main body inserted into the anode of the analyzer main body. An annular body that has a rotating reamer for regeneration of the inner surface of the anode and that is fitted onto the reamer and rotates with the reamer.The end face contacts the anode end face as the reamer is inserted into the anode, and the end face is regenerated. And an anode regeneration mechanism having a cleaning head having a blade portion for use therein.

Action When the reamer is rotated, the annular cleaning head fitted on the reamer also rotates. When the reamer is inserted into the anode in this state, the deposits adhering to the inner peripheral surface of the anode are scraped off by the reamer, and the end surface of the rotating cleaning head comes into contact with the end surface of the anode. The deposit formed on the end face of the anode is scraped off by the blade portion formed on.

Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. First
1 is a vertical sectional side view of an analyzer according to an embodiment of the present invention, FIG. 2 is a perspective view of a cleaning head thereof, and FIG. 3 is a vertical sectional front view of the vicinity thereof.

The analyzer according to the present invention comprises an analyzer body 10 and an anode regeneration mechanism 20. The analyzer main body 10 is substantially the same as the apparatus shown in FIG. 4, and the cylindrical anode 13 attached to the anode mount 11 is made of copper. A resin bush 19 is externally fitted to the portion of the anode 13 excluding the base end portion. The anode 13 and the bush 19 are concentrically housed in the main negative pressure chamber 14, and the tip end surface thereof is exposed to the sample fixing surface side of the sample table 12. With respect to other parts of the analyzer main body 10, the same parts as those of the device shown in FIG.

The anode regeneration mechanism 20 is arranged opposite to the sample table 12 side of the analyzer body 10. The anode regeneration mechanism 20 includes a main housing 21 and a sub-housing 22 attached to the analyzer main body 10 side. The main housing 21 and the sub housing 22 rotatably support the reamer 23, and are reciprocally driven by the air cylinder 24 in the axial direction of the reamer 23.
A front chamber 221 is formed in front of the bearing 25 that supports the reamer 23 in the sub housing 22, and a rear chamber 222 is formed in the rear thereof.
The rear chamber 222 has an exhaust port 224 for evacuation.

The reamer 23 is a commercially available straight reamer (tool steel), has the same outer diameter as the inner diameter of the anode 13 of the analyzer body 10, and is located on the axis of the anode 13. The tip portion of the reamer 23 projects forward of the sub-housing 22 so that it can be inserted into the anode 13. The rear end of the reamer 23 is a motor for rotation drive.
It is connected to 26 by a belt 261. At four circumferential positions on the outer peripheral surface of the reamer 23, there are substantially U-shaped grooves 231 extending in the axial direction.
Are formed. One edge of each groove 231 is the anode 13
Is a blade portion 232 for reproducing the inner peripheral surface of the.

In the front chamber 221 of the sub-housing 22, an annular cleaning head 27 made of stainless steel, which is loosely fitted on the outer surface side of the reamer 23, is housed. Two pins 271 that penetrate the cleaning head 27 in the radial direction engage with the groove 231 of the reamer 23 to prevent the cleaning head 27 from rotating with respect to the reamer 23. The cleaning head 27 is pressed against the front cover 223 of the sub-housing 22 by the spring 28 and is supported concentrically with the reamer 23.

An annular second cleaning head 29 made of resin is externally fitted to the small-diameter tip portion 272 of the cleaning head 27. The tip portion 272 of the cleaning head 27 and the second cleaning head 29 are inserted into a round hole formed in the front lid 223 of the sub housing 22. The tip surfaces of both are pushed forward of the front lid 223 by the spring 28. Radial grooves 273 are formed on the tip surface of the cleaning head 27, and the edge portion thereof has a blade portion 274 for reproducing the tip surface of the anode 13.
It has become. Second cleaning head 29 is bush 19
Is for reproducing the tip surface of the bush, has the same inner diameter as the bush 19, and the tip surface is flat.

In the analyzer having such a structure, the anode 13 is regenerated as follows.

The anode regeneration mechanism 20 is separated from the analyzer body 10 when the analyzer body 10 is performing spectroscopic analysis. When the spectroscopic analysis is completed and the sample is removed from the sample table 12, the motor 26 of the anode regeneration mechanism 20 operates. This allows the reamer 23
The cleaning head 27 and the second cleaning head 29 rotate together with the reamer 23 as they rotate. Next, the operation of the air cylinder 24 advances the main housing 21 toward the analyzer body 10. As a result, the tip portion of the reamer 23 is inserted into the anode 13 while rotating, and the deposit attached to the inner peripheral surface thereof is scraped off by the blade portion 232 of the reamer 23.

Further, by inserting the tip portion of the reamer 23 into the anode 13, the tip surfaces of the cleaning head 27 and the second cleaning head 29 are elastically pressed by the spring 28 against the tip surfaces of the anode 13 and the bush 19. It Since the cleaning head 27 and the second cleaning head 29 are rotating together with the reamer 23, the deposit adhered to the tip surface of the anode 13 is scraped off by the blade portion 274 formed on the tip surface of the cleaning head 27. Further, the tip surface of the bush 19 is rubbed by the tip surface of the second cleaning head 29, so that the dirt is removed.

During the regeneration work of the anode 13, the rear chamber 222 of the sub housing 22 is evacuated from the exhaust port 224, so that the deposits and the like scraped off from the anode 13 are mainly sucked into the rear chamber 222 through the groove 231 of the reamer 23. And is discharged to the outside through the exhaust port 224.

When the regeneration of the anode 13 is completed, the main housing 21 retracts to its original position and the motor 26 stops to prepare for the next regeneration work.

In this way, each time the spectroscopic analysis is completed, the inner peripheral surface and the tip surface of the anode 13 are automatically regenerated, and at the same time, the tip surface of the bush 19 is also cleaned. Further, since the cleaning head 27 is held by the spring 28, alignment with the reamer 23 is unnecessary. Further, the contact pressure of the cleaning head 27 with respect to the anode 13 can be adjusted by selecting the spring 28, and an appropriate cutting force can be obtained.

Effect of the Invention In the analyzer according to the present invention, when the inner peripheral surface of the anode is regenerated by the reamer, its end surface can be automatically regenerated at the same time. Therefore, the efficiency of the analysis work is improved, and the work can be fully automated and unmanned. Further, since the cleaning head used for the end face regeneration uses the reamer as the support and the drive source, the structure is simple even though the inner peripheral surface and the end face of the anode are simultaneously regenerated.

[Brief description of drawings]

FIG. 1 is a vertical sectional side view of an analyzer showing an embodiment of the present invention, FIG. 2 is a perspective view of a cleaning head thereof, FIG. 3 is a vertical sectional front view of the vicinity thereof, and FIG. 4 is glow discharge emission spectral analysis. It is a vertical side view which shows the general structure of an apparatus. 10 …… Analyzer body 13 …… Anode 20 …… Anode regeneration mechanism 23 …… Reamer 27 …… Cleaning head 274 …… Blade part

Claims (1)

[Scope of utility model registration request] 1. An emission spectroscopic analyzer using glow discharge as a light source, comprising an analyzer body having a cylindrical anode, and a reamer for regeneration of the inner surface of the anode which is inserted into the anode of the analyzer body and rotates. In addition, the cleaning head is an annular body which is fitted onto the reamer and rotates together with the reamer. The end face of the annular body comes into contact with the anode end face as the reamer is inserted into the anode, and a blade portion for reproducing the anode end face is formed on the end face. And an anode regeneration mechanism having the following.