CN214321026U - Ion source pole piece cleaning device - Google Patents
Ion source pole piece cleaning device Download PDFInfo
- Publication number
- CN214321026U CN214321026U CN202023229491.7U CN202023229491U CN214321026U CN 214321026 U CN214321026 U CN 214321026U CN 202023229491 U CN202023229491 U CN 202023229491U CN 214321026 U CN214321026 U CN 214321026U
- Authority
- CN
- China
- Prior art keywords
- ion source
- pole piece
- source pole
- target
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The utility model discloses an ion source pole piece cleaning device, which belongs to the technical field of ion source pole piece cleaning; the ion source pole piece cleaning device is used for cleaning an ion source pole piece of a mass spectrometer, the mass spectrometer comprises a shell, a transition cavity is formed in the shell, the ion source pole piece and a sample target holder movably arranged in the transition cavity are mounted in the transition cavity, the sample target holder is provided with a mounting cavity communicated with the transition cavity, and the mounting cavity is used for mounting a sample; the ion source pole piece cleaning device comprises a cleaning target, wherein the cleaning target comprises a target seat and a cleaning brush, the target seat is matched with the sample target holder in size and is used for being installed in an installation cavity, the cleaning brush is arranged on the target seat, at least part of the cleaning brush extends out of the installation cavity, and the cleaning brush is configured to clean an ion source pole piece under the driving of the sample target holder. The ion source pole piece cleaning device has the advantages of convenience and quickness in pole piece cleaning, short cleaning time, high efficiency, low cost, no need of dismounting the ion source pole piece and capability of effectively ensuring the integral precision of an instrument.
Description
Technical Field
The utility model relates to an ion source pole piece washs technical field, particularly, relates to an ion source pole piece belt cleaning device.
Background
Matrix-assisted laser desorption ionization time-of-flight mass spectrometer is a kind of biological mass spectrometer instrument commonly used for macromolecular sample analysis. When analyzing a sample, after the sample forms a solid on the sample target, the sample target in the sample chamber is transferred to the moving platform under vacuum state by the lifting device. The electric field generated by the combination of the pole piece and the electric system is utilized to lead the initially dispersed ions into a field-free flight area in an accelerating, focusing and deflecting way, and the ions with different masses are separated and then sequentially sent into a detector for detection. Over time, non-ionised material accumulates on surfaces in the vicinity of the sample spot, in particular the surface of a pole piece of the MALDI ion source, to form an insulating layer of impurity material which can become charged (charge up) over time and adversely affect the operation of the MALDI ion source. In particular, the insulating layer of impurity material on the electrodes can distort the electric field generated by the electrodes, so that the sensitivity or resolution of a mass spectrometer using a MALDI ion source is reduced.
Thus, MALDI ion source pole pieces generally require cleaning, and the main method for cleaning a conventional MALDI ion source pole piece is to inject dry clean gas into the chamber and disassemble the apparatus to remove the MALDI ion source and remove the pole piece for thorough cleaning. The method usually needs several hours to recover the vacuum state of the MALDI instrument and needs to perform quality calibration on the MALDI instrument again besides the time for cleaning the MALDI ion source pole piece, has higher time cost, and is difficult to ensure the installation precision by repeatedly disassembling the ion source pole piece, thereby influencing the overall performance of the instrument.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a wash convenient, the cleaning time is short, efficient, with low costs, and need not to dismantle the ion source pole piece, can guarantee the whole ion source pole piece belt cleaning device of precision of instrument effectively.
The embodiment of the utility model is realized like this:
in a first aspect, the utility model provides an ion source pole piece cleaning device, which is used for cleaning an ion source pole piece of a mass spectrometer, wherein the mass spectrometer comprises a shell, a transition cavity is arranged in the shell, an ion source pole piece and a sample target holder movably arranged in the transition cavity are arranged in the transition cavity, the sample target holder is provided with an installation cavity communicated with the transition cavity, and the installation cavity is used for installing a sample; ion source pole piece belt cleaning device includes:
and cleaning the target, wherein the cleaning target comprises a target seat and a cleaning brush, the target seat is matched with the sample target holder in size and is used for being installed in the installation cavity, and the cleaning brush is arranged on the target seat, at least partially extends out of the installation cavity and is configured to clean the ion source pole piece under the driving of the sample target holder.
In an alternative embodiment, the cleaning brush includes a plurality of brush heads arranged in an array on the backing plate, and each brush head is connected to the backing plate at one end and extends away from the backing plate at the other end.
In an optional embodiment, the ion source pole piece cleaning device further comprises a driving mechanism, wherein the driving mechanism is in transmission connection with the sample target holder and is used for driving the sample target holder to move in the transition cavity so as to drive the cleaning target to clean the ion source pole piece.
In an optional embodiment, the driving mechanism includes a first driving member, a driving seat and a second driving member, the first driving member extends along a first direction and is disposed in the transition cavity, the driving seat is in transmission connection with the first driving member and is configured to move along the first direction under the driving of the first driving member, the second driving member is disposed in the driving seat and extends along a second direction which forms an included angle with the first direction, and the sample target holder is in transmission connection with the second driving member and is configured to move along the second direction under the driving of the second driving member so as to drive the cleaning target to move along the first direction or the second direction, so as to clean the ion source pole piece.
In an optional embodiment, the transition cavity is provided with an opening which can be communicated with the outside;
the ion source pole piece cleaning device also comprises a lifting mechanism which is movably arranged in the transition cavity and used for delivering the sample target holder between the driving mechanism and the opening in a reciprocating way, so that when the sample target holder is positioned at the opening position, the cleaning target can be replaced and installed.
In optional embodiment, elevating system includes lifting unit and elevating platform, the inside wall fixed connection of lifting unit and casing, and the elevating platform is connected with the lifting unit transmission for along all being the third direction removal that the contained angle set up with first direction and second direction under lifting unit's drive, move in the direction that is close to or keeps away from the opening with the drive elevating platform.
In an optional embodiment, one of the lifting platform and the sample target holder is provided with a limiting bulge, the other of the lifting platform and the sample target holder is provided with a limiting groove, and the limiting bulge can be matched with the limiting groove, so that the lifting platform can obtain the sample target holder from the driving mechanism and deliver the sample target holder to the opening; the sample target holds in the palm the below and still is equipped with first magnetic part, and the actuating mechanism top still is equipped with second magnetic part, and second magnetic part can with first magnetic part actuation to obtain the sample target from the elevating platform and hold in the palm, so that actuating mechanism can deliver the sample target and hold in the palm to ion source pole piece department, washs the ion source pole piece through wasing the target.
In an optional implementation mode, a first matching piece is further arranged on the driving mechanism, a second matching piece is arranged on the lifting assembly, and the first matching piece can be matched with the second matching piece to drive the lifting assembly to drive the lifting table to move along the third direction.
In an alternative embodiment, the opening is further provided with a target cover, one end of the target cover is hinged with the shell, and the other end of the target cover can be far away from or close to the shell and used for opening or closing the opening; and when the sample target holder moves to the opening, the top wall of the sample target holder is configured to be abutted against the inner wall of the opening so as to cut off the passage of the installation cavity and the transition cavity.
In an alternative embodiment, the opening penetrates through the wall body of the shell, the target cover is provided with a matching part which can extend into the opening, and when the target cover closes the opening, the matching part extends into the opening and is abutted against the wall body at the opening; and when the sample target holder moves to the opening and the opening is closed by the target cover, a closed matching cavity can be formed between the matching part and the sample target holder through the opening so as to accommodate the cleaning brush with the cleaning target extending out of the installation cavity.
The embodiment of the utility model provides an at least possess following advantage or beneficial effect:
the embodiment of the utility model provides an ion source pole piece belt cleaning device for rinsing the ion source pole piece of mass spectrograph, the mass spectrograph includes the casing, has offered the transition chamber in the casing, installs ion source pole piece and movably sets up the sample target holder in the transition chamber, the sample target holder has the installation cavity with transition chamber intercommunication, the installation cavity is used for installing the sample; the ion source pole piece cleaning device comprises a cleaning target, wherein the cleaning target comprises a target seat and a cleaning brush, the target seat is matched with the sample target holder in size and is used for being installed in an installation cavity, the cleaning brush is arranged on the target seat, at least part of the cleaning brush extends out of the installation cavity, and the cleaning brush is configured to clean an ion source pole piece under the driving of the sample target holder. On one hand, the ion source pole piece cleaning device does not need to disassemble the ion source pole piece when cleaning the pole piece, so that the problem of instrument precision reduction caused by repeated disassembly of the ion source pole piece can be solved, and the overall performance of the instrument is ensured; on the other hand, the cleaning operation is carried out by additionally arranging the cleaning target outside the original structure of the mass spectrometer without additionally arranging other structures, the cost can be effectively saved, the cleaning time is saved, and the cleaning operation is more convenient and efficient.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic cross-sectional view of an ion source pole piece cleaning apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a cleaning target according to an embodiment of the present invention at a first viewing angle;
fig. 3 is a schematic structural diagram of a cleaning target according to an embodiment of the present invention at a second viewing angle;
fig. 4 is a schematic cross-sectional structure diagram of an ion source pole piece cleaning device according to an embodiment of the present invention when a cleaning target is replaced.
100-ion source pole piece cleaning device; 101-an ion source pole piece; 102-a housing; 103-a transition chamber; 104-sample target holder; 105-a mounting cavity; 106-cleaning the target; 107-washing brush; 108-a target holder; 109-a brush head; 113-a first drive member; 114-a drive seat; 115-a second drive member; 116-an opening; 118-a lifting assembly; 119-a lifting platform; 121-a first link; 122-a second link; 123-a third connecting rod; 124-a fourth link; 125-limit protrusion; 126-a limiting groove; 127-a first mating member; 128-a second mating member; 129-target cover; 131-a mating cavity; 132-a fifth link; 133-a sixth link; 134-mating portion.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the related art, in order to ensure the sensitivity and accuracy of a mass spectrometer, an ion source pole piece is usually required to be cleaned, the ion source pole piece is disassembled to be cleaned in a conventional cleaning mode, and the precision of pole piece installation is reduced due to frequent disassembly of an ion source pole piece in the cleaning method, so that the overall performance of an instrument is influenced. Meanwhile, the cost is also increased because professional technicians are required to clean the ion source pole pieces.
In view of this, the present embodiment provides an ion source pole piece cleaning apparatus, which can clean an ion source pole piece without disassembling the ion source pole piece, thereby ensuring the installation precision of the ion source pole piece and the overall performance of an instrument; on the other hand, the ion source pole piece is not required to be cleaned by professional technicians, and the cost can be effectively saved by cleaning the original structure of the mass spectrometer and the cleaning target. The structure of the ion source pole piece cleaning device is described in detail below.
Fig. 1 is a schematic cross-sectional view illustrating a pole piece cleaning device 100 for an ion source according to the present embodiment; fig. 2 is a schematic structural diagram of the cleaning target 106 provided in this embodiment at a first viewing angle; fig. 3 is a schematic structural diagram of the cleaning target 106 provided in this embodiment at a second viewing angle. Referring to fig. 1 to 3, in the present embodiment, an ion source pole piece cleaning apparatus 100 is used for cleaning an ion source pole piece 101 of a mass spectrometer. Wherein, the mass spectrometer includes casing 102, has seted up in the casing 102 and has installed ion source pole piece 101 and movably set up the sample target in transition chamber 103 in the transition chamber 103 and hold in the palm 104, and sample target holds in the palm 104 and has the installation cavity 105 with transition chamber 103 intercommunication, and installation cavity 105 is used for installing the sample, also promptly in original mass spectrometer, and the sample can be installed in the installation cavity 105 of sample target support 104 to make the mass spectrometer can detect the sample. In the present embodiment, the ion source pole piece cleaning apparatus 100 specifically includes a cleaning target 106. The cleaning target 106 comprises a target seat 108 and a cleaning brush 107, the target seat 108 is matched with the sample target holder 104 in size and is used for being installed in the installation cavity 105, and the cleaning brush 107 is arranged on the target seat 108, at least partially extends out of the installation cavity 105 and is configured to clean the ion source pole piece 101 under the driving of the sample target holder 104.
That is, in this embodiment, the structure of the original sample target holder 104 of the mass spectrometer can be used to mount both the sample and the cleaning target 106, and the cleaning target 106 is driven to clean the ion source pole piece 101, so that a professional is not required to clean the ion source pole piece, and other mounting structures for cleaning the target 106 are not required to be added, thereby effectively ensuring the cleaning cost and saving the cleaning time. Meanwhile, the ion source pole piece 101 is always arranged in the transition cavity 103, so that the ion source pole piece 101 does not need to be disassembled when the ion source pole piece cleaning device 100 cleans the pole piece, the problem of instrument precision reduction caused by repeated disassembly of the ion source pole piece 101 can be solved, and the overall performance of the instrument is ensured.
Referring again to FIGS. 2 and 3, in this embodiment, the cleaning brush 107 includes a plurality of brush heads 109 arranged in an array on backing plate 108. The backing plate 108 is substantially rectangular and is adapted to the shape of the mounting cavity 105 of the sample backing plate 104, so that the backing plate 108 can be stably mounted on the sample backing plate 104. Meanwhile, one end of each brush head 109 is connected with the target holder 108, and the other end extends in the direction far away from the target holder 108, so that the positions of the ion source pole piece 101 are deeply cleaned under the driving of the sample target holder 104, and the cleaning efficiency and quality are ensured.
Referring to fig. 1 again, in the present embodiment, the ion source pole piece cleaning apparatus 100 further includes a driving mechanism. The driving mechanism is in transmission connection with the sample target holder 104 and is used for driving the sample target holder 104 to move in the transition cavity 103 so as to drive the cleaning target 106 to clean the ion source pole piece 101. That is, through the arrangement of the driving mechanism, the sample target holder 104 can be driven to move in the transition cavity 103, so that the cleaning target 106 installed in the sample target holder 104 is driven to clean each position of the ion source pole piece 101, and the cleaning comprehensiveness is ensured.
In detail, the driving mechanism includes a first driving member 113, a driving seat 114, and a second driving member 115.
In more detail, the first driving member 113 is disposed in the transition cavity 103 and extends along a first direction (also a left-right direction in fig. 1), and specifically includes a motor and a screw rod driving mechanism, the screw rod extends along the left-right direction, a moving member is sleeved on the screw rod, and the moving member is connected to the driving seat 114, so that when an output shaft of the motor rotates, the moving member can be driven to move, and thus the driving seat 114 can be driven to move in the left-right direction, so as to clean the length direction of the ion source pole piece 101.
More specifically, the second driving member 115 extends along a second direction (i.e. the inner and outer directions in fig. 1), and the second driving member 115 is also a motor and screw rod matching structure, a slider is sleeved outside the screw rod of the second driving member 115, the slider is slidably connected to the driving seat 114, and extends along the second direction forming an included angle with the first direction, and the sample target holder 104 is fixedly connected to the upper end of the slider, so that the slider can be driven by the motor to move in the front-back direction, and the sample target holder 104 can be driven to move in the front-back direction, so as to clean the width direction of the ion source pole piece 101, thereby ensuring the cleaning integrity of the ion source pole piece 101, and ensuring the cleaning effect and quality.
Fig. 4 is a schematic cross-sectional view illustrating a cross-sectional structure of the ion source pole piece cleaning apparatus 100 according to the present embodiment when the cleaning target 106 is replaced. Referring to fig. 1 and 4, in order to facilitate the installation, replacement and detachment of the sample target holder 104, in the present embodiment, the transition cavity 103 is provided with an opening 116 capable of communicating with the outside. The ion source pole piece cleaning device 100 further comprises a lifting mechanism movably arranged in the transition chamber 103 and used for delivering the sample target holder 104 between the driving mechanism and the opening 116 in a reciprocating manner, so that the cleaning target 106 can be replaced and installed when the sample target holder 104 is located at the position of the opening 116. That is, through the setting of elevating system for sample target holder 104 can also be in upper and lower upward movement, thereby can drive sample target holder 104 to move to opening 116 department, so that the user installs, changes or dismantles washing target 106 through opening 116, and then guarantees cleaning efficiency and quality.
In detail, referring to fig. 1 to 4 again, in the present embodiment, the lifting mechanism includes a lifting assembly 118 and a lifting platform 119.
In detail, the lifting assembly 118 is a six-bar linkage, and specifically includes a first bar 121, a second bar 122, a third bar 123, a fourth bar 124, a fifth bar 132, and a sixth bar 133. The first connecting rod 121, the second connecting rod 122, the third connecting rod 123 and the fourth connecting rod 124 are sequentially hinged, the other end of the first connecting rod 121 is hinged to the side wall of the shell 102, two ends of the fourth connecting rod 124 are respectively hinged to the bottom wall of the shell 102 and the first end of the lifting platform 119, one end of the fifth connecting rod 132 is hinged to the side wall of the shell 102, the middle position of the fifth connecting rod 132 is hinged to the third connecting rod 123, and the other end of the fifth connecting rod 132 extends to a position far away from the position hinged to the third connection; the sixth link 133 is hingedly disposed between the bottom wall of the housing 102 and the second end of the lifting platform 119. The arrangement of the six-bar linkage mechanism can effectively ensure that the lifting platform 119 can move upwards (namely, in the up-and-down direction) along the third direction which forms an included angle with the first direction and the second direction, so that the lifting platform can be close to or far away from the opening 116, and the sample target holder 104 can be driven to the opening 116, so that a worker can replace, install or disassemble the cleaning target 106.
It should be noted that, in this embodiment, the first direction, the second direction and the third direction are three directions perpendicular to each other two by two, and in other embodiments, the first direction, the second direction and the third direction may also be set to be other directions forming an included angle, and this embodiment is not limited.
Referring to fig. 1 and 4 again, in order to realize that the lifting platform 119 can start the sample target holder 104 between the opening 116 and the slider of the driving mechanism, in this embodiment, the lifting platform 119 is provided with a limiting protrusion 125, the limiting protrusion 125 is in a triangular shape with a barb, the sample target holder 104 is provided with a limiting groove 126, and the shape of the limiting groove 126 is adapted to the shape of the limiting protrusion 125, so that the limiting protrusion 125 can be matched with the limiting groove 126, and the lifting platform 119 can obtain the sample target holder 104 from the driving mechanism and deliver the sample target holder 104 to the opening 116. Meanwhile, a first magnetic part is further arranged below the sample target holder 104, a plurality of second magnetic parts are further mounted on a sliding block of the driving mechanism, the magnetic parts can be iron blocks and the like with magnetic structures, the second magnetic parts can be attracted with the first magnetic parts to obtain the sample target holder 104 from the lifting platform 119, so that the driving mechanism can deliver the sample target holder 104 to the ion source pole piece 101, and the ion source pole piece 101 is cleaned through the cleaning target 106. Of course, in other embodiments, the limiting protrusion 125 may also be disposed below the sample target holder 104, and the limiting groove 126 may also be disposed above the lifting table 119, so as to ensure that the lifting table 119 can be driven by the lifting assembly 118 to cooperate with the sample target holder 104, so as to drive the sample target holder 104 to move to the opening 116, which is not limited in this embodiment.
That is, with such an arrangement, when a cleaning operation is required, firstly, a target needs to be entered, the driving mechanism drives the sample target holder 104 to move towards the lifting device, the lifting platform 119 is driven by the lifting component 118 to move to the lower part of the sample target holder 104, so that the limiting protrusion 125 is matched with the limiting groove 126, so that the sample target holder 104 continues to be removed from the drive mechanism by the lift assembly 118, and moves sample target holder 104 to the position of opening 116, the user mounts cleaning target 106 on sample target holder 104, then the sample target holder 104 is magnetically attracted to the upper part of the lifting mechanism by the matching of the first magnetic part and the second magnetic part when the lifting mechanism is approached by the driving mechanism, so as to continuously drive the sample target holder 104 to drive the cleaning target 106 to move to the position of the ion source pole piece 101, so as to clean the ion source pole piece 101 under the cooperation of the first driving member 113 and the second driving member 115; after the cleaning, if the cleaning target 106 needs to be removed or replaced, the driving mechanism continues to drive the sample target holder 104 to move to the lifting mechanism, the lifting table 119 repeats the process of sampling the sample target holder 104, and drives the sample target holder 104 to the opening 116 for replacement or removal.
That is to say, in this embodiment, through the cooperation of actuating mechanism and elevating gear, the advance of target 106 and the going on of moving back the target operation have been guaranteed effectively, need not to dismantle ion source pole piece 101, can guarantee cleaning quality and efficiency, can guarantee instrument precision and performance again, can also save the cost.
Referring to fig. 1 to 4 again, in order to further save cost, in the present embodiment, the driving mechanism is further provided with a first matching member 127, the first matching member 127 is a curved hook-shaped structure, and the second end of the fifth connecting rod 132 of the lifting assembly 118 can be matched with the hook-shaped structure, so that the hook-shaped structure can drive the connecting rod mechanism of the lifting assembly 118 to move under the driving of the driving mechanism, so as to drive the lifting table 119 to move along the third direction, that is, the present embodiment can realize the movement of three dimensions of the three sample target holders 104 by using two motors, which can further save cost and improve the operation efficiency and quality.
Meanwhile, through the arrangement, in the target entering or target retreating process, only the first fitting piece 127 and the second fitting piece 128 are matched, so that the lifting assembly 118 can be driven to drive the lifting table 119 to move, and therefore the sample target holder 104 can be delivered above the driving mechanism and the lifting table 119, so that the sample introduction and the replacement, disassembly and installation operation of the cleaning target 106 are facilitated.
Referring again to fig. 1 and 4, since the mass spectrometer is a device that needs to operate under vacuum, and it is necessary to ensure that the transition chamber 103 is in a vacuum state up to standard during the process of detecting the sample or cleaning the ion source pole piece 101, in this embodiment, a target cover 129 is further disposed at the opening 116 of the transition chamber 103. Wherein one end of the target cover 129 is hinged with the housing 102, and the other end of the target cover 129 can be far away from or close to the housing 102 for opening or closing the opening 116, so that the vacuum state in the transition chamber 103 can be preserved when the target cover 129 closes the opening 116. Meanwhile, in the present embodiment, when the sample target holder 104 moves to the opening 116, the top wall of the sample target holder 104 is configured to abut against the inner wall of the opening 116 to block the passage between the installation cavity 105 and the transition cavity 103, so that the vacuum environment in the transition cavity 103 is not affected when the cleaning target 106 is replaced, installed and removed at the opening 116, thereby ensuring the integrity of the equipment in the transition cavity 103, and further saving the cost.
It should be noted that, in order to ensure the sealing and blocking effect, in this embodiment, an O-ring (not shown) is further disposed on the side wall below the opening 116, and the O-ring is configured to cooperate with the top wall of the sample target holder 104 when the top wall of the sample target holder 104 cooperates with the opening 116, so as to completely block the passage between the installation cavity 105 and the transition cavity 103, thereby further ensuring the vacuum environment in the transition cavity 103.
In more detail, in the present embodiment, the opening 116 is opened through the top wall of the housing 102, and the target cover 129 has a fitting portion 134 capable of protruding into the opening 116, and when the target cover 129 closes the opening 116, the fitting portion 134 protrudes into the opening 116 and abuts against the wall body at the opening 116. Meanwhile, when sample target holder 104 is moved to opening 116 and target cover 129 closes opening 116, fitting portion 134 and sample target holder 104 can form closed fitting cavity 131 through opening 116 to accommodate cleaning brush 107 with cleaning target 106 drawn out from mounting cavity 105. Meanwhile, through the arrangement, after the cleaning target 106 is installed on the sample target holder 104, the matching cavity 131 can be vacuumized through the vacuumizing device, so that the matching cavity can be matched with the vacuum state in the transition cavity 103, and the situation that equipment in the transition cavity 103 is damaged due to the pressure difference between the transition cavity 103 and the matching cavity 131 when the lifting device drives the sample target holder 104 to move downwards is avoided, so that the cleaning operation can be further safely carried out, the integrity of an instrument can be effectively guaranteed, and the efficient and orderly operation of all the operations can be further guaranteed. Of course, in this embodiment, various buttons may be provided on the housing 102 to control the opening of the target cover 129, and even to control the movement of the driving mechanism and the lifting device, so as to improve the intelligence of the apparatus and facilitate the operation. Meanwhile, since the ion source pole piece cleaning device 100 and the mass spectrometer both need to operate in a vacuum state, they necessarily include some necessary vacuum pumping devices, such as a backing pump, and the like, which are not described herein again.
That is, with such an arrangement, when the cleaning target 106 needs to be installed, the driving mechanism can drive the sample target holder 104 to move towards the direction of the lifting device, and then the lifting platform 119 is matched with the limiting protrusion 125 and the limiting groove 126 on the sample target holder 104 to drive the sample target holder 104 to move to the lifting platform 119, and then the lifting platform 119 drives the sample target holder 104 to move to the opening 116, so as to close the opening 116 and block the passage between the outside and the transition cavity 103; at this time, target cover 129 is opened, cleaning target 106 is mounted on sample target holder 104, and then target cover 129 is closed, so that a closed fitting cavity 131 is formed between fitting portion 134 of target cover 129 and sample target holder 104; then, the vacuum-pumping device is adopted to vacuumize the matching cavity 131 between the two to be matched with the vacuum state in the transition cavity 103, then the sample target holder 104 is continuously moved through the lifting component 118, and the first magnetic part on the sample target holder 104 is sucked through the second magnetic part arranged above the driving mechanism, so that the sample target holder 104 drives the cleaning target 106 to move to the upper part of the driving mechanism, and the driving mechanism can drive the sample target holder 104 to drive the cleaning target 106 to perform omnibearing cleaning on the ion source pole piece 101. And the target backing-off process is vice versa and is not described in detail herein.
In the above process, on one hand, the ion source pole piece cleaning device 100 does not need to disassemble the ion source pole piece 101 when cleaning the pole piece, so that the problem of instrument precision reduction caused by repeated disassembly of the ion source pole piece 101 can be reduced, and the overall performance of the instrument is ensured; on the other hand, the mass spectrometer is beneficial to cleaning operation of the cleaning target 106 additionally arranged on the original structure of the mass spectrometer, more other structures are not required additionally, the cost can be effectively saved, the cleaning time is saved, and the cleaning operation is more convenient and efficient; and because the integration level is high, the cleaning process can be completed within several minutes, so that the cleaning time is saved, and the cleaning state of the ion source pole piece 101 is ensured.
To sum up, the embodiment of the utility model provides a wash convenient, the cleaning time is short, efficient, with low costs, and need not to dismantle ion source pole piece 101, can guarantee the ion source pole piece belt cleaning device 100 of the whole precision of instrument effectively.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An ion source pole piece cleaning device is used for cleaning an ion source pole piece of a mass spectrometer, the mass spectrometer comprises a shell, a transition cavity is formed in the shell, the ion source pole piece and a sample target holder movably arranged in the transition cavity are mounted in the transition cavity, the sample target holder is provided with a mounting cavity communicated with the transition cavity, and the mounting cavity is used for mounting a sample; characterized in that, ion source pole piece belt cleaning device includes:
wash the target, it includes target holder and cleaning brush to wash the target, the target holder with the size adaptation of sample target holder, and be used for install in the installation cavity, the cleaning brush set up in the target holder, and at least part stretch out the installation cavity, and be configured to be in wash under the drive of sample target holder the ion source pole piece.
2. The ion source pole piece cleaning apparatus of claim 1, wherein:
the cleaning brush include a plurality of arrays set up in the brush head of target holder, and every the equal one end of brush head with the target holder is connected, and the other end is to keeping away from the direction extension of target holder.
3. The ion source pole piece cleaning apparatus of claim 1, wherein:
the ion source pole piece cleaning device further comprises a driving mechanism, wherein the driving mechanism is in transmission connection with the sample target support and is used for driving the sample target support to move in the transition cavity so as to drive the cleaning target to clean the ion source pole piece.
4. The ion source pole piece cleaning apparatus of claim 3, wherein:
actuating mechanism includes first driving piece, drive seat and second driving piece, first driving piece extend along the first direction set up in the transition chamber, drive seat with first driving piece transmission is connected, is used for follow under the drive of first driving piece first direction motion, the second driving piece set up in drive seat, and along with first direction is the second direction extension setting of contained angle, the sample target hold in the palm with the second driving piece transmission is connected, is used for follow under the drive of second driving piece second direction motion, in order to drive wash the target and follow first direction or second direction motion, in order to wash the ion source pole piece.
5. The ion source pole piece cleaning apparatus of claim 4, wherein:
the transition cavity is provided with an opening which can be communicated with the outside;
the ion source pole piece cleaning device further comprises a lifting mechanism, wherein the lifting mechanism is movably arranged in the transition cavity and is used for enabling the sample target holder to be delivered between the driving mechanism and the opening in a reciprocating mode, so that when the sample target holder is located at the position of the opening, replacement and installation of the cleaning target can be carried out.
6. The ion source pole piece cleaning apparatus of claim 5, wherein:
elevating system includes lifting unit and elevating platform, lifting unit with the inside wall fixed connection of casing, the elevating platform with the lifting unit transmission is connected, be used for lifting unit's drive down along with first direction with the second direction all is the third direction removal that the contained angle set up, in order to drive the elevating platform is being close to or keeps away from the motion in the open-ended direction.
7. The ion source pole piece cleaning apparatus of claim 6, wherein:
one of the lifting platform and the sample target holder is provided with a limiting bulge, the other of the lifting platform and the sample target holder is provided with a limiting groove, and the limiting bulge can be matched with the limiting groove, so that the lifting platform can obtain the sample target holder from a driving mechanism and deliver the sample target holder to the opening; the sample target holds in the palm the below and still is equipped with first magnetism spare, the actuating mechanism top still is equipped with second magnetism spare, second magnetism spare can with first magnetism spare actuation, in order to follow the elevating platform department acquires the sample target holds in the palm, so that actuating mechanism can with the sample target holds in the palm delivers to ion source pole piece department, through it is right to wash the target ion source pole piece washs.
8. The ion source pole piece cleaning apparatus of claim 6, wherein:
the driving mechanism is further provided with a first matching piece, the lifting assembly is provided with a second matching piece, and the first matching piece can be matched with the second matching piece to drive the lifting assembly to drive the lifting platform to move along the third direction.
9. The ion source pole piece cleaning device of any one of claims 5 to 8, wherein:
the opening is further provided with a target cover, one end of the target cover is hinged with the shell, and the other end of the target cover can be far away from or close to the shell so as to be used for opening or closing the opening; and when the sample target holder moves to the opening, the top wall of the sample target holder is configured to abut against the inner wall of the opening so as to block the passage of the installation cavity and the transition cavity.
10. The ion source pole piece cleaning apparatus of claim 9, wherein:
the opening penetrates through the wall body of the shell, the target cover is provided with a matching part which can extend into the opening, and when the target cover closes the opening, the matching part extends into the opening and is abutted against the wall body at the opening; and when the sample target support moves to the opening and the target cover closes the opening, a closed matching cavity can be formed between the matching part and the sample target support through the opening so as to accommodate the cleaning target extending out of the mounting cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023229491.7U CN214321026U (en) | 2020-12-28 | 2020-12-28 | Ion source pole piece cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023229491.7U CN214321026U (en) | 2020-12-28 | 2020-12-28 | Ion source pole piece cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214321026U true CN214321026U (en) | 2021-10-01 |
Family
ID=77903577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023229491.7U Active CN214321026U (en) | 2020-12-28 | 2020-12-28 | Ion source pole piece cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214321026U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112657902A (en) * | 2020-12-28 | 2021-04-16 | 广州禾信仪器股份有限公司 | Ion source pole piece cleaning device |
-
2020
- 2020-12-28 CN CN202023229491.7U patent/CN214321026U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112657902A (en) * | 2020-12-28 | 2021-04-16 | 广州禾信仪器股份有限公司 | Ion source pole piece cleaning device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4903764B2 (en) | VPD unit of semiconductor wafer pollutant measuring device and door opening / closing device thereof | |
| CN214321026U (en) | Ion source pole piece cleaning device | |
| CN112657902A (en) | Ion source pole piece cleaning device | |
| KR20200118846A (en) | Sample handling systems, mass spectrometers and related methods | |
| WO2021047263A1 (en) | Hand-held vacuum cleaner, and hand-held and upright integrated vacuum cleaner | |
| WO2023041042A1 (en) | Nucleic acid extraction and detection device and nucleic acid extraction and detection method | |
| KR20090105586A (en) | Scanstage of measurement apparatus for metal impurities on the semiconductor wafer | |
| CN212622642U (en) | Sample processing device | |
| US20240081592A1 (en) | Cleaning apparatus comprising cleaner and docking station | |
| CN220145172U (en) | Disassembling mechanism of container assembly | |
| CN110215944B (en) | Automatic liquid-transfering gun | |
| US7230253B2 (en) | Carrier and analyzing apparatus including the carrier | |
| US6251218B1 (en) | Ion beam processing apparatus | |
| KR101879076B1 (en) | Apparatus for cleaning filter | |
| CN111223742A (en) | Sample target lifting mechanism, mass spectrometer sample changing device and mass spectrometer sample changing method | |
| CN218885835U (en) | Be used for hierarchical collection back analytical equipment of dye sample | |
| CN213091307U (en) | Blood test preliminary treatment extraction element | |
| CN218157733U (en) | Automatic device for preparing solid sample solution | |
| CN219551889U (en) | Sample cutting device | |
| CN217180972U (en) | Automatic unloader that takes a sample of PCB board | |
| CN215880693U (en) | Micro-gap switch equipment | |
| CN221046267U (en) | Miniaturized portable sample grinding instrument | |
| CN216189017U (en) | Elastic sheet assembling device | |
| CN220572113U (en) | Dust cup, dust collector and cleaning equipment | |
| CN218520531U (en) | Taking-off device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 510700 No. 16, Xinrui Road, Huangpu District, Guangzhou, Guangdong Patentee after: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd. Address before: 510000 3rd floor, building A3, No. 11, Kaiyuan Avenue, Science City, Guangzhou high tech Industrial Development Zone, Guangdong Province Patentee before: GUANGZHOU HEXIN INSTRUMENT Co.,Ltd. |