JP3078078U - Laser displacement sensor for inner diameter measurement - Google Patents
Laser displacement sensor for inner diameter measurementInfo
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- JP3078078U JP3078078U JP2000005198U JP2000005198U JP3078078U JP 3078078 U JP3078078 U JP 3078078U JP 2000005198 U JP2000005198 U JP 2000005198U JP 2000005198 U JP2000005198 U JP 2000005198U JP 3078078 U JP3078078 U JP 3078078U
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- light
- round hole
- circumference inside
- sensor head
- inner diameter
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Abstract
(57)【要約】 （修正有）
【課題】 計測値に個人差が少なく、効率的に高精度に
計測ができ、計測システムの小型化、丸穴内部に挿入す
る測定装置も省容積化を計る。
【解決手段】 半導体レーザに代表される発光素子と光
位置検出素子（ＰＳＤ）やＣＣＤに代表される受光素子
を一つの対とすれば、三対の発光素子と受光素子（４ａ
と７ａ、４ｂと７ｂ、４ｃと７ｃ）を一つのセンサヘッ
ド２に収納し、集積化を計り、このセンサヘッドを丸穴
の内部に挿入させる。三対の発光素子と受光素子は、丸
穴内部の円周に向かってビーム光ａ、ｂ、ｃを三方向に
照射し、丸穴内部の円周で乱反射したスポット光Ａ、
Ｂ、Ｃの一部を受け、受光素子上に結んだスポット光の
位置より、光学的三角測量方式を応用して、センサヘッ
ド中心から丸穴内部の円周までの三方向の変位量を測定
する。
(57) [Summary] (Modifications required) [Problem] Measured values have few individual differences, can measure efficiently and with high accuracy, miniaturize the measuring system, and reduce the volume of the measuring device inserted into the round hole. measure. When a light emitting element represented by a semiconductor laser and a light position detecting element (PSD) or a light receiving element represented by a CCD are formed as one pair, three pairs of light emitting elements and light receiving elements (4a) are provided.
, 7a, 4b and 7b, 4c and 7c) are housed in one sensor head 2, integrated, and this sensor head is inserted into the round hole. The three pairs of light emitting elements and light receiving elements irradiate the light beams a, b, and c in three directions toward the circumference inside the round hole, and spot light A irregularly reflected on the circumference inside the round hole,
Measure the displacement in three directions from the center of the sensor head to the circumference inside the round hole by applying the optical triangulation method from the position of the spot light connected to the light receiving element, receiving part of B and C. I do.
Description
【０００１】[0001]
【産業上の利用分野】内径を測定することにより、丸穴の寸法の良否を判定する 検査方法に関し、特に光学的三角測量方式を応用して測定するレーザ変位センサ に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection method for determining the quality of a round hole by measuring its inner diameter, and more particularly to a laser displacement sensor for measuring by applying an optical triangulation method.
【０００２】[0002]
【従来の技術】丸穴の内径を測定する方法として、ノギス、マイクロメータなど の手動の測定器で計測する方法があり、これに対し自動で測定する方法としては 、接触式、非接触式を問わず、変位計を丸穴の内部に挿入し、これを周方向に回 転させることにより内径計測を行う装置あるいは計測方法がある。後者の計測方 法あるいは装置を構成するためには、接触式あるいは非接触式変位計に加え、位 置決め機構を備えた周方向に回転するモータや、センサの姿勢を探るエンコーダ や、制御装置や、演算装置などが必要となる。2. Description of the Related Art As a method of measuring the inner diameter of a round hole, there is a method of measuring with a manual measuring instrument such as a caliper and a micrometer. In contrast, as a method of automatically measuring, there are contact type and non-contact type. Regardless, there is a device or measuring method for measuring the inner diameter by inserting a displacement gauge into the inside of a round hole and rotating it in the circumferential direction. In order to configure the latter measurement method or device, in addition to the contact or non-contact displacement meter, a motor that rotates in the circumferential direction with a positioning mechanism, an encoder that searches for the position of the sensor, and a control device And an arithmetic unit are required.
【０００３】[0003]
【考案が解決しようとする課題】上記の測定方法には以下に記載する問題点があ る。すなわち、手動の測定器で計測する方法では、作業能率が悪いことや、計測 作業者による個人差が生じるなどの問題点がある。また、後者の自動で測定する 方法では、装置が大掛かりとなることや、測定精度がモータなどの位置決め精度 やエンコーダの精度に左右されることや、測定対象の内径が、内部に挿入するモ ータなどの装置類の大きさに制約されるようになるなどの問題点が発生する。[Problems to be Solved by the Invention] The above-mentioned measuring method has the following problems. That is, the method of measuring with a manual measuring instrument has problems such as poor work efficiency and individual differences among measurement operators. In the latter automatic measurement method, the size of the device is large, the measurement accuracy depends on the positioning accuracy of the motor and the like, and the accuracy of the encoder. There are problems such as being restricted by the size of devices such as data.
【０００４】本考案は上記のような問題点を解決すべく、計測値に個人差がなく 、効率的に高精度に計測ができ、計測システムの小型化、丸穴の内部に挿入する 装置類も省容積化を計ろうとするものである。In order to solve the above-mentioned problems, the present invention makes it possible to efficiently and accurately measure a measured value without individual differences, to reduce the size of a measuring system, and to insert a device into a round hole. Also seeks to reduce the volume.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するために、次のようなセンサを 考案した。半導体レーザに代表される発光素子と光位置検出素子（ＰＳＤ）やＣ ＣＤに代表される受光素子を一つの対とすれば、三対の発光素子と受光素子を一 つのセンサヘッドに収納し、集積化を計り、このセンサヘッドを丸穴の内部に挿 入させる。三対の発光素子と受光素子は、丸穴内部の円周に向かってビーム光を 三方向に照射し、丸穴内部の円周で乱反射した光の一部を受け、受光素子上に結 んだスポット光の位置より、光学的三角測量方式を応用して、センサヘッド中心 から丸穴内部の円周までの三方向の変位量を測定する。次に、センサアンプ部に て、測定した三方向の変位量と三光軸のなす角より、三角形の余弦定理と正弦定 理を利用して、丸穴の内径を計算し、算出結果をアナログ信号や制御信号などを 介して出力する機能を備えるセンサである。[Means for Solving the Problems] In order to solve the above problems, the following sensors have been devised. If a light emitting element typified by a semiconductor laser and a light receiving element typified by a photo position detecting element (PSD) or CCD are paired, three pairs of light emitting elements and a light receiving element are housed in one sensor head, Measure the integration and insert this sensor head into the round hole. The three pairs of light-emitting elements and light-receiving elements irradiate the light beam in three directions toward the circumference inside the round hole, receive a part of the light irregularly reflected on the circumference inside the round hole, and form the light on the light-receiving element. From the position of the spot light, the displacement in three directions from the center of the sensor head to the circumference inside the round hole is measured by applying the optical triangulation method. Next, the sensor amplifier calculates the inner diameter of the round hole from the measured displacements in the three directions and the angle between the three optical axes, using the cosine and sine theorems of a triangle, and calculates the analog signal as an analog signal. It is a sensor that has a function to output via a control signal or the like.
【０００６】このように三組の発光素子と受光素子は一つのセンサヘッドに小さ く集積されており、このヘッド部分のみが丸穴の内部に挿入されるので、内部に 挿入する装置の省容積化が計られる。また、センサはヘッド部とアンプ部のみで 構成されているので、システムの小型化が計れる。As described above, the three sets of light emitting elements and light receiving elements are small and integrated in one sensor head, and only this head part is inserted into the round hole, so that the volume of the device inserted inside is reduced. Is measured. Also, since the sensor is composed of only the head and the amplifier, the size of the system can be reduced.
【０００７】またレーザ式の非接触式変位センサを応用しているので、高精度の 計測が期待でき、センサヘッド部を取り付けて丸穴の内部に挿入する周辺治具類 を除いては人手が介入する部分が少なく、計測値に個人差は少なくなる。Further, since a laser-type non-contact type displacement sensor is applied, high-precision measurement can be expected. Except for peripheral jigs for mounting the sensor head and inserting it into the round hole, manual operation is required. There are few steps to intervene, and individual differences in measured values are reduced.
【０００８】[0008]
【考案の実施の形態】以下は、本考案を図に示す実施形態によって具体的に説明 する。図１は本考案によって丸穴の内径測定の概要を示す図である。この図にお いて、１は被測定対象の円筒体で、その内部に挿入されている２は、レーザ式の センサヘッドである。ａ、ｂ、ｃはセンサヘッドより丸穴内部の円周へ三方向に 照射されるビーム光であり、丸穴内部の円周に結ぶスポット光は、それぞれＡ、 Ｂ、Ｃとなる。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be specifically described below with reference to an embodiment shown in the drawings. FIG. 1 is a diagram showing an outline of measuring the inner diameter of a round hole according to the present invention. In this figure, 1 is a cylinder to be measured, and 2 is a laser sensor head inserted therein. a, b, and c are light beams emitted from the sensor head to the circumference inside the round hole in three directions, and the spot lights connected to the circumference inside the round hole are A, B, and C, respectively.
【０００９】図２は本考案のセンサ全体のシステム構成となる。センサは２のセ ンサヘッド部と３のセンサアンプ部からなり、その間を８の信号ケーブルで結ば れている。FIG. 2 shows a system configuration of the whole sensor of the present invention. The sensor consists of two sensor heads and three sensor amplifiers, which are connected by eight signal cables.
【００１０】センサヘッド２は三個の発光素子４ａ、４ｂ、４ｃがあり、発光素 子には半導体レーザが用いられている。７ａ、７ｂ、７ｃは光位置検出素子（Ｐ ＳＤ）やＣＣＤに代表される受光素子である。これらの発光素子と受光素子は、 ４ａと７ａで一対、４ｂと７ｂで一対、４ｃと７ｃで一対の計三対の構成となる 。The sensor head 2 has three light emitting elements 4a, 4b and 4c, and a semiconductor laser is used as the light emitting element. Reference numerals 7a, 7b, and 7c denote light receiving elements typified by a light position detecting element (PSD) and a CCD. These light-emitting elements and light-receiving elements have a total of three pairs of a pair of 4a and 7a, a pair of 4b and 7b, and a pair of 4c and 7c.
【００１１】一つの対を代表して詳細を記述することにする。半導体レーザ４ａ から照射されたビーム光ａは、投光レンズ５ａを通し集光され、測定対象の丸穴 内部の円周に照射され、スポットＡを結ぶ。Ａにおいて拡散反射された光線の一 部は受光レンズ６ａを通して、受光素子７ａ上にスポットを結ぶ。センサヘッド ２と丸穴内部の円周との距離関係が変化すれば、受光素子７ａ上に結ぶスポット も移動するので、受光素子７ａ上のスポットを検出することで、光学的三角測量 方式を応用しで、線分Ｏ’Ａの変位量あるいは距離を知ることができる。同様に して、線分Ｏ’Ｂ、線分Ｏ’Ｃの変位量を知ることができる。ただし、Ｏ’は三 光軸ａ、ｂ、ｃの交点とする。The details will be described on behalf of one pair. The beam light a emitted from the semiconductor laser 4a is condensed through the light projecting lens 5a, is applied to the circumference inside the round hole to be measured, and connects the spot A. A part of the light beam diffusely reflected at A forms a spot on the light receiving element 7a through the light receiving lens 6a. If the distance relationship between the sensor head 2 and the circumference inside the round hole changes, the spot connected to the light receiving element 7a also moves, so the optical triangulation method is applied by detecting the spot on the light receiving element 7a. Thus, the displacement or distance of the line segment O'A can be known. Similarly, the displacement amounts of the line segments O'B and O'C can be known. Here, O 'is the intersection of the three optical axes a, b, and c.
【００１２】センサアンプ３は大きくブロック化すれば、演算制御回路９、電源 回路１０、デジタル・アナログ変換回路１１、ドライバ回路１２から構成される 。If the sensor amplifier 3 is largely divided into blocks, it comprises an operation control circuit 9, a power supply circuit 10, a digital / analog conversion circuit 11, and a driver circuit 12.
【００１３】上記の三方向に照射されたビーム光から測定された変位量をａ、ｂ 、ｃと定義しなおすと、演算制御回路９ではこれらの測定結果より、円筒体１の 内径を演算する。すなわち、三光軸のなす角θ１、θ２、θ３は既知の値である ので、これらと測定された変位量より下記の計算の手順を踏んでいくことで、円 筒体１の内径を求めることができる。If the displacements measured from the light beams irradiated in the above three directions are redefined as a, b, and c, the arithmetic control circuit 9 calculates the inner diameter of the cylindrical body 1 from these measurement results. . That is, since the angles θ 1 , θ 2 , and θ 3 formed by the three optical axes are known values, the inner diameter of the cylindrical body 1 is determined by performing the following calculation procedure from these and the measured displacement. You can ask.
【００１４】[0014]
【実施例】計算手順を詳述するに当たって、測定概要を簡略化した図３を用いる ことにする。三角形Ｏ’ＡＢに注目すれば、三角形の余弦定理より数１が求まる 。同様に、三角形Ｏ’ＢＣに注目すれば、数２が求まる。同様に、三角形Ｏ’Ｃ Ａに注目すれば、数３が求まる。次に、三角形ＡＢＣに注目すれば、余弦定理よ り数４が求まり、また、三角形ＡＢＣの外接円の半径をＲとすれば、正弦定理よ り数５が求まる。三角関数の基本公式に数４と数５を代入すれば、数６が求まり 、これを変形すれば数７となり、これに数１と数２と数３の値を代入し平方根を とれば、三角形ＡＢＣの外接円すなわち円筒体１の内径２Ｒが求められる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In detail, the calculation procedure will be described with reference to FIG. When attention is paid to the triangle O'AB, Equation 1 is obtained from the cosine theorem of the triangle. Similarly, if attention is paid to the triangle O'BC, Equation 2 is obtained. Similarly, if attention is paid to the triangle O'C A, Equation 3 is obtained. Next, if attention is paid to the triangle ABC, Equation 4 is obtained from the cosine theorem, and if the radius of the circumscribed circle of the triangle ABC is R, Equation 5 is obtained from the sine theorem. By substituting Equations 4 and 5 into the basic formula of the trigonometric function, Equation 6 can be obtained. By transforming this, Equation 7 can be obtained. The circumscribed circle of the triangle ABC, that is, the inner diameter 2R of the cylindrical body 1 is obtained.
【００１５】[0015]
【数１】ｄ２＝ａ２＋ｂ２−２ａｂ・ｃｏｓ（θ１）D 2 = a 2 + b 2 -2ab · cos (θ 1 )
【００１６】[0016]
【数２】ｅ２＝ｂ２＋ｃ２−２ｂｃ・ｃｏｓ（θ２）E 2 = b 2 + c 2 -2bc · cos (θ 2 )
【００１７】[0017]
【数３】ｆ２＝ｃ２＋ａ２−２ｃａ・ｃｏｓ（θ３）F 2 = c 2 + a 2 -2ca · cos (θ 3 )
【００１８】[0018]
【数４】ｃｏｓ（θａ）＝（ｄ２＋ｆ２−ｅ２）／２ｄｆCos (θ a ) = (d 2 + f 2 −e 2 ) / 2df
【００１９】[0019]
【数５】ｓｉｎ（θａ）＝ｅ／２Ｒ## EQU5 ## sin (θ a ) = e / 2R
【００２０】[0020]
【数６】（（ｄ２＋ｆ２−ｅ２）／２ｄｆ）２＋（ｅ／２Ｒ）２＝１((D 2 + f 2 −e 2 ) / 2df) 2 + (e / 2R) 2 = 1
【００２１】[0021]
【数７】（２Ｒ）２＝ｅ２／（１−（ｄ２＋ｆ２−ｅ２）２／４ｄ２ｆ２）(2R) 2 = e 2 / (1− (d 2 + f 2 −e 2 ) 2 / 4d 2 f 2 )
【００２２】演算結果はデジタル・アナログ変換回路１１を通じて外部機器にア ナログ信号として出力される。この際、ドライバ回路１２を介して、外部機器と タイミング信号や警報信号やゼロ校正信号などの制御入出力信号などが、やり取 りされる。The operation result is output as an analog signal to an external device through the digital / analog conversion circuit 11. At this time, a timing signal, a warning signal, a control input / output signal such as a zero calibration signal, and the like are exchanged with an external device via the driver circuit 12.
【００２３】[0023]
【考案の効果】上述したように、本考案によって、効率的に高精度に計測ができ 、計測システムの小型化、丸穴の内部に挿入する装置類も省容積化を計ることが できる。また、丸穴内部の円周の中心Ｏはセンサヘッドの中心Ｏ’と一致させる 必要は無いので、センサヘッドを丸穴の内部に挿入させる際の位置決め方法も簡 単になる。[Effects of the Invention] As described above, according to the present invention, measurement can be efficiently performed with high accuracy, the size of the measurement system can be reduced, and devices to be inserted into the round hole can be reduced in volume. Also, since the center O of the circumference inside the round hole does not need to coincide with the center O 'of the sensor head, the positioning method when inserting the sensor head into the inside of the round hole is also simplified.
【００２４】ところで、丸穴内部の円周の真円度が悪く、多少歪んでいる場合に は、本考案は問題となる場合もあるが、その場合でも各光軸のなす角の一つを鋭 角にすることで、対処できないことはない。The present invention may be problematic when the roundness inside the round hole is poor and slightly rounded, but even in such a case, one of the angles formed by the optical axes must be changed. With a sharp angle, there is nothing you can't cope with.
【図１】丸穴の内径測定の概要を示す図である。FIG. 1 is a diagram showing an outline of measuring the inner diameter of a round hole.
【図２】本考案のセンサ全体のシステム構成図である。FIG. 2 is a system configuration diagram of the entire sensor of the present invention.
【図３】測定概要を簡略化した図である。FIG. 3 is a diagram showing a simplified measurement outline.
１ 被測定対象の円筒体 ２ センサヘッド ３ センサアンプ ４ａ 発光素子 ４ｂ 発光素子 ４ｃ 発光素子 ５ａ 投光レンズ ５ｂ 投光レンズ ５ｃ 投光レンズ ６ａ 受光レンズ ６ｂ 受光レンズ ６ｃ 受光レンズ ７ａ 受光素子 ７ｂ 受光素子 ７ｃ 受光素子 ８ 信号ケーブル ９ 演算制御回路 １０ 電源回路 １１ デジタル・アナログ変換回路 １２ ドライバ回路 ａ 丸穴内部の円周に照射されたビーム光あるいは
線分Ｏ’Ａ ｂ 丸穴内部の円周に照射されたビーム光あるいは
線分Ｏ’Ｂ ｃ 丸穴内部の円周に照射されたビーム光あるいは
線分Ｏ’Ｃ Ａ 丸穴内部の円周に結ぶビーム光ａのスポット Ｂ 丸穴内部の円周に結ぶビーム光ｂのスポット Ｃ 丸穴内部の円周に結ぶビーム光ｃのスポット ｄ 線分ＡＢ ｅ 線分ＢＣ ｆ 線分ＣＡ Ｏ 丸穴内部の円周の中心 Ｏ’ 各光軸の交点、センサヘッドの中心 θ１ ビーム光ａとビーム光ｂのなす角 θ２ ビーム光ｂとビーム光ｃのなす角 θ３ ビーム光ｃとビーム光ａのなす角 θａ 線分ＣＡと線分ＡＢのなす角 θｂ 線分ＡＢと線分ＢＣのなす角 θｃ 線分ＢＣと線分ＣＡのなす角Reference Signs List 1 Cylindrical object to be measured 2 Sensor head 3 Sensor amplifier 4a Light emitting element 4b Light emitting element 4c Light emitting element 5a Light emitting lens 5b Light emitting lens 5c Light emitting lens 6a Light receiving lens 6b Light receiving lens 6c Light receiving lens 7a Light receiving element 7b Light receiving element 7c Light receiving element 8 Signal cable 9 Arithmetic control circuit 10 Power supply circuit 11 Digital / analog conversion circuit 12 Driver circuit a Beam light or line segment O'A b radiated to the circumference inside the round hole Radiated to the circumference inside the round hole Spot of the light beam or the light beam a radiated to the circumference inside the line segment O'B c round hole or the spot of the light beam a connected to the circumference inside the round hole O'B C B Spot C of the connected light beam b C Spot of the light beam c connected to the circumference inside the round hole d Line segment AB e Line segment BC f Line segment CA O Center of the circumference inside the round hole 'Intersection of the optical axes, the angle theta a line of center theta 1 light beam a and the beam angle theta 2 light beam of light b b a beam light c angle theta 3-beam light c and the light beam a in the sensor head angle minute CA and the angle of the angle theta b segment AB and the line segment BC of the line segment AB theta c segment BC and the line segment CA
【数１】ｄ２＝ａ２＋ｂ２−２ａｂ・ｃｏｓ（θ１）D 2 = a 2 + b 2 -2ab · cos (θ 1 )
【数２】ｅ２＝ｂ２＋ｃ２−２ｂｃ・ｃｏｓ（θ２）E 2 = b 2 + c 2 -2bc · cos (θ 2 )
【数３】ｆ２＝ｃ２＋ａ２−２ｃａ・ｃｏｓ（θ３）F 2 = c 2 + a 2 -2ca · cos (θ 3 )
【数４】ｃｏｓ（θａ）＝（ｄ２＋ｆ２−ｅ２）／２ｄ
ｆCos (θ a ) = (d 2 + f 2 −e 2 ) / 2d
f
【数５】ｓｉｎ（θａ）＝ｅ／２Ｒ## EQU5 ## sin (θ a ) = e / 2R
【数６】（（ｄ２＋ｆ２−ｅ２）／２ｄｆ）２＋（ｅ／
２Ｒ）２＝１## EQU6 ## ((d 2 + f 2 −e 2 ) / 2df) 2 + (e /
2R) 2 = 1
【数７】（２Ｒ）２＝ｅ２／（１−（ｄ２＋ｆ２−
ｅ２）２／４ｄ２ｆ２）(2R) 2 = e 2 / (1- (d 2 + f 2 −)
e 2 ) 2 / 4d 2 f 2 )
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１２年９月７日（２０００．９．７）[Submission date] September 7, 2000 (2009.7)
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】実用新案登録請求の範囲[Correction target item name] Claims for utility model registration
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【実用新案登録請求の範囲】[Utility model registration claims]
【請求項２】三角形の正弦定理と余弦定理に基づき、丸
穴の内径を計算する機能を備えた、マイクロプロセッサ
に代表される演算制御回路をセンサアンプ部に組込んだ
レーザ変位センサ。 ─────────────────────────────────────────────────────
2. A laser displacement sensor having a function of calculating an inner diameter of a round hole based on a sine and cosine theorem of a triangle and incorporating an arithmetic control circuit represented by a microprocessor in a sensor amplifier section. ────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１２年１２月１４日（２０００．１２．
１４）[Submission date] December 14, 2000 (200.12.
14)
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】実用新案登録請求の範囲[Correction target item name] Claims for utility model registration
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【実用新案登録請求の範囲】[Utility model registration claims]
Claims (2)
受光素子を一つのセンサヘッドに収納し、集積化を計っ
たレーザ変位センサ。三対の発光素子と受光素子は丸穴
内部の円周に向かってビーム光を三方向に照射し、丸穴
内部の円周で乱反射した光の一部を受け、受光素子上に
結んだスポット光の位置より、光学的三角測量方式を応
用して、センサヘッド中心から丸穴内部の円周までの三
方向の変位量を測定する。1. A laser displacement sensor in which three pairs of a light emitting element and a light receiving element are housed in one sensor head for measuring the inner diameter of a round hole, and are integrated. The three pairs of light-emitting elements and light-receiving elements irradiate the light beam in three directions toward the circumference inside the round hole, receive a part of the light irregularly reflected on the circumference inside the round hole, and join the spot on the light-receiving element From the position of light, the displacement in three directions from the center of the sensor head to the circumference inside the round hole is measured by applying an optical triangulation method.
位量と三光軸のなす角より、三角形の余弦定理と正弦定
理を利用して、丸穴の内径を計算し、算出結果をアナロ
グ信号や制御信号などを介して出力する。2. The inner diameter of a round hole is calculated by a sensor amplifier unit using the cosine theorem and the sine theorem of a triangle from the measured displacements in three directions and the angle between the three optical axes, and the calculation result is analogized. Output via signals and control signals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000005198U JP3078078U (en) | 2000-06-16 | 2000-06-16 | Laser displacement sensor for inner diameter measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000005198U JP3078078U (en) | 2000-06-16 | 2000-06-16 | Laser displacement sensor for inner diameter measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3078078U true JP3078078U (en) | 2001-06-22 |
Family
ID=43211039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000005198U Expired - Fee Related JP3078078U (en) | 2000-06-16 | 2000-06-16 | Laser displacement sensor for inner diameter measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3078078U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011196899A (en) * | 2010-03-23 | 2011-10-06 | Kurimoto Ltd | Inner diameter measuring device |
| JP2015099025A (en) * | 2013-11-18 | 2015-05-28 | ボッシュ株式会社 | Strain measuring sensor and axial force measuring device |
| CN105043278A (en) * | 2015-05-06 | 2015-11-11 | 天津大学 | Non-contact and multi-point measurement method for measuring internal diameter of circular hole |
| CN112325782A (en) * | 2020-10-30 | 2021-02-05 | 太原科技大学 | Method and device for measuring radius of arc-shaped workpiece in real time |
-
2000
- 2000-06-16 JP JP2000005198U patent/JP3078078U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011196899A (en) * | 2010-03-23 | 2011-10-06 | Kurimoto Ltd | Inner diameter measuring device |
| JP2015099025A (en) * | 2013-11-18 | 2015-05-28 | ボッシュ株式会社 | Strain measuring sensor and axial force measuring device |
| CN105043278A (en) * | 2015-05-06 | 2015-11-11 | 天津大学 | Non-contact and multi-point measurement method for measuring internal diameter of circular hole |
| CN105043278B (en) * | 2015-05-06 | 2018-02-13 | 天津大学 | A kind of method of contactless multimetering bore inner diameter |
| CN112325782A (en) * | 2020-10-30 | 2021-02-05 | 太原科技大学 | Method and device for measuring radius of arc-shaped workpiece in real time |
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