JPH05333152A - Inclination measuring device - Google Patents
Inclination measuring deviceInfo
- Publication number
- JPH05333152A JPH05333152A JP16531892A JP16531892A JPH05333152A JP H05333152 A JPH05333152 A JP H05333152A JP 16531892 A JP16531892 A JP 16531892A JP 16531892 A JP16531892 A JP 16531892A JP H05333152 A JPH05333152 A JP H05333152A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light emitting
- measuring device
- inclination
- emitting elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、平面等の傾きを計測す
る傾き計測装置に関するものである。近年、ロボットに
よる作業が盛んに行われるようになっているが、作業対
象のワークの位置が未知であるような場合、遠隔操作あ
るいはワークの自動位置決めなどを行うためには、その
ワークの位置・姿勢などを距離センサ等の各種センサ情
報に基づいて求める必要がある。このため、例えばロボ
ットのハンドに非接触式の計測装置を取り付けてこの計
測装置によりワークまでの距離や傾きなどを計測してい
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tilt measuring device for measuring the tilt of a plane or the like. In recent years, work by robots has been actively performed, but when the position of the work to be worked is unknown, in order to perform remote operation or automatic positioning of the work, the position of the work must be It is necessary to obtain the posture and the like based on various sensor information such as a distance sensor. For this reason, for example, a non-contact type measuring device is attached to the hand of the robot, and the measuring device measures the distance to the workpiece and the inclination.
【０００２】[0002]
【従来の技術】一般的な従来の傾き計測装置は、任意の
位置にある計測対象の平面と基準平面との成す角度を非
接触で計測するものであり、そのためには、図６に示さ
れるように、基準平面の座標上に３つの非接触距離セン
サ９a 、９b 、９c を同一円周上に１２０°間隔で配置
している。この非接触距離センサ９a 、９b 、９c は発
光素子と光点位置検出素子（ＰＳＤ）を用いて距離測定
を行うものである。この傾き計測装置を用いて、図７に
示されるように、各非接触距離センサ９a 、９b、９c
と計測平面１０間の距離をそれぞれ計測し、それらの距
離情報に基づいて計測平面１０の傾きθを求めている。2. Description of the Related Art A general conventional tilt measuring device measures the angle formed by a plane to be measured at a given position and a reference plane in a non-contact manner, and for that purpose, it is shown in FIG. As described above, the three non-contact distance sensors 9a, 9b and 9c are arranged on the same circumference at 120 ° intervals on the coordinates of the reference plane. The non-contact distance sensors 9a, 9b, 9c measure distances using a light emitting element and a light spot position detecting element (PSD). Using this inclination measuring device, as shown in FIG. 7, the non-contact distance sensors 9a, 9b, 9c
The distance between the measurement plane 10 and the measurement plane 10 is measured, and the inclination θ of the measurement plane 10 is obtained based on the distance information.
【０００３】[0003]
【発明が解決しようとする課題】従来の傾き計測装置
は、センサ取付け面の所定位置に複数の非接触距離セン
サをそれぞれ配置するものであるが、その配置に相対位
置誤差があるとその誤差が計測精度を劣化させる。この
ため、非接触距離センサはその配置位置を正確に取り付
けなければならず、その取付け作業は慎重を要し時間が
かかる。The conventional inclination measuring device arranges a plurality of non-contact distance sensors at predetermined positions on the sensor mounting surface, but if there is a relative position error in the arrangement, the error will occur. Measurement accuracy is degraded. For this reason, the non-contact distance sensor must be accurately attached at the position where the non-contact distance sensor is to be attached, and the attaching operation is careful and time-consuming.
【０００４】また各々独立した非接触距離センサを複数
個必要とする構成であるため、装置が大きく重たくなる
という問題点があり、特にロボットハンド部分に装置を
取り付けようとする場合などには不都合である。Further, since a plurality of independent non-contact distance sensors are required, there is a problem that the device becomes large and heavy, which is inconvenient especially when the device is attached to the robot hand portion. is there.
【０００５】本発明はかかる問題点に鑑みてなされたも
のであり、その目的とするところは、製造作業が容易
で、計測精度のよい小型、軽量な傾き計測装置を提供す
ることにある。The present invention has been made in view of the above problems, and an object of the present invention is to provide a small-sized and lightweight tilt measuring device which is easy to manufacture and has good measurement accuracy.
【０００６】[0006]
【課題を解決するための手段】図１は本発明に係る原理
説明図である。本発明の傾き計測装置は、傾きを計測す
る対象の計測面２３に対して出力光を照射する複数の発
光素子２０1 〜２０n であって互いに離間して配置され
たものと、計測面２３からの反射光を受光する光検出部
２１とを備え、これら複数の発光素子２０1 〜２０n を
順次に発光させて光検出部２１でその反射光を受光する
ことで、各発光素子２０1 〜２０n と計測平面２３との
距離をそれぞれ計測して計測面２３の傾きを求めるよう
構成されたものである。FIG. 1 is an explanatory view of the principle of the present invention. The inclination measuring device of the present invention includes a plurality of light emitting elements 20 1 to 20 n that emit output light to the measurement surface 23 of which the inclination is to be measured and that are arranged apart from each other, and the measurement surface 23. and a light detector 21 for receiving light reflected from, that the plurality of sequentially emit light emitting element 20 1 to 20 n receives the reflected light by the light detection unit 21, the light-emitting elements 20 1 ˜20 n and the measurement plane 23 are respectively measured to obtain the inclination of the measurement plane 23.
【０００７】ここで、上記光検出部２１は、受光した反
射光の結像点の位置を一次元的に検出する一つの光点位
置検出素子、またはかかる光点位置検出素子の複数個の
組合せで構成することができる。Here, the photo-detecting section 21 is one light-point position detecting element for one-dimensionally detecting the position of the image forming point of the received reflected light, or a combination of a plurality of such light-point position detecting elements. Can be composed of
【０００８】また上記光検出部２１は、受光した反射光
の結像点の位置を二次元的に検出する光点位置検出素子
で構成することができる。Further, the photo-detecting section 21 can be composed of a light-spot position detecting element for two-dimensionally detecting the position of the image forming point of the received reflected light.
【０００９】また、本発明の傾き計測装置は、発光素子
の数を２個として、この発光素子を含む面を回転できる
ように構成し、回転前の計測値と回転後の計測値に基づ
いて計測面の傾きを求めるように構成されたものであ
る。Further, the inclination measuring device of the present invention is configured such that the number of light emitting elements is two and the surface including the light emitting elements can be rotated, and based on the measured value before rotation and the measured value after rotation. It is configured to obtain the inclination of the measurement surface.
【００１０】[0010]
【作用】複数の発光素子２０1 〜２０n を順次に発光さ
せて光検出部２１でその反射光を受光し、それにより信
号処理回路２２で各発光素子２０1 〜２０n と計測平面
２３との距離をそれぞれ計測して計測面２３の傾きを求
める。The plurality of light emitting elements 20 1 to 20 n are sequentially made to emit light, and the reflected light is received by the photodetection section 21, whereby the signal processing circuit 22 causes the respective light emitting elements 20 1 to 20 n and the measurement plane 23 to be connected. Is measured to obtain the inclination of the measurement surface 23.
【００１１】光検出部２１は、例えば発光素子が２個の
場合には、受光した反射光の結像点の位置を一次元的に
検出する一つの光点位置検出素子をこの２個の発光素子
に共用してもよいし、また例えば発光素子が３個である
場合には、かかる光点位置検出素子を二つ（そのうち一
つの二つの発光素子に共用）または三つ（各発光素子に
それぞれ対応）組み合わせて使用してもよい。When the number of light emitting elements is two, the light detecting section 21 uses one light spot position detecting element for one-dimensionally detecting the position of the image forming point of the received reflected light. It may be shared by the elements, or, for example, when there are three light emitting elements, two or more such light spot position detecting elements (shared by one of the two light emitting elements) or three (for each light emitting element) They may be used in combination.
【００１２】また上記光検出部２１を、受光した反射光
の結像点の位置を二次元的に検出する光点位置検出素子
で構成すれば、光点位置検出素子としては一つで足り
る。Further, if the light detecting section 21 is constituted by a light spot position detecting element for two-dimensionally detecting the position of the image forming point of the received reflected light, one light spot position detecting element is sufficient.
【００１３】また、発光素子の数を２個として、この発
光素子を含む面を回転できるように構成すれば、回転前
の各計測値と回転後の各計測値を求めることで、それら
に基づいて計測面の傾きを求めることができる。なお、
回転を行わない場合には、２点の距離よりセンサの長手
方向と計測面の成す角度を求めることができる。If the number of light emitting elements is two and the surface including the light emitting elements can be rotated, each measured value before the rotation and each measured value after the rotation are obtained, and based on them. The inclination of the measurement surface can be obtained by In addition,
When rotation is not performed, the angle formed by the longitudinal direction of the sensor and the measurement surface can be obtained from the distance between the two points.
【００１４】[0014]
【実施例】以下、図面を参照して本発明の実施例を説明
する。図２および図３には本発明の一実施例としての傾
き計測装置が示される。ここで図２は傾き計測装置にお
けるセンサヘッド部の構成が、また図３はこのセンサヘ
ッド部の他に電気回路部分も含めた傾き計測装置の全体
的構成が示される。Embodiments of the present invention will be described below with reference to the drawings. 2 and 3 show an inclination measuring device as an embodiment of the present invention. Here, FIG. 2 shows the configuration of the sensor head portion in the inclination measuring device, and FIG. 3 shows the overall configuration of the inclination measuring device including the electric circuit portion in addition to the sensor head portion.
【００１５】図２において、（Ａ）はセンサヘッド部の
正面図、（Ｂ）はその側面図、（Ｃ）はセンサヘッド部
内の電気回路の構成図である。図２に示されるように、
三つの発光素子１a 、１b 、１c が、素子取付け面にお
いて同一円周上に１２０°間隔で離間して配置され、そ
の同心円の中心点付近に光検出素子２a 、２bcが配置さ
れる。この光検出素子２a 、２bcは反射光の結像位置を
一次元的（線的）に検出する光点位置検出素子によりそ
れぞれ構成されるもので、光検出素子２a は発光素子１
a の反射光の受光用、光検出素子２bcは１b 、１c の反
射光の受光用で、この二つがまとまって一つの光検出部
２を形成している。In FIG. 2, (A) is a front view of the sensor head portion, (B) is a side view thereof, and (C) is a configuration diagram of an electric circuit in the sensor head portion. As shown in FIG.
The three light emitting elements 1a, 1b, 1c are arranged on the element mounting surface at intervals of 120 ° on the same circumference, and the light detecting elements 2a, 2bc are arranged near the center point of the concentric circle. The light detecting elements 2a and 2bc are each constituted by a light spot position detecting element that detects the image forming position of the reflected light one-dimensionally (linearly).
The light detecting element 2bc receives the reflected light of a and the light detecting element 2bc receives the reflected light of 1b and 1c, and these two are collectively formed as one light detecting section 2.
【００１６】また発光素子１a 、１b 、１c の前方位置
（計測平面側）にはそれぞれ投光レンズ５a 、５b 、５
c が取り付けられており、この投光レンズ５a 、５b 、
５cにより計測平面１０上に照射光を集光させるように
なっている。同様に光検出部２の前方位置には一つの受
光レンズ６が取り付けられており、この受光レンズ６に
より光検出部２上に計測平面１０からの反射光が結像す
るようになっている。Further, light projecting lenses 5a, 5b, 5 are provided in front of the light emitting elements 1a, 1b, 1c (on the measurement plane side).
c is attached to the projection lens 5a, 5b,
The irradiation light is focused on the measurement plane 10 by 5c. Similarly, one light receiving lens 6 is attached to the front position of the light detecting section 2, and the light receiving lens 6 forms an image of the reflected light from the measurement plane 10 on the light detecting section 2.
【００１７】また、駆動回路３a 、３b 、３c はそれぞ
れ発光素子１a 、１b 、１c を駆動するための回路、信
号増幅回路４は光検出部２から受信した光／電気変換後
の受信信号（結像点の位置情報）を増幅するための回路
である。Further, the drive circuits 3a, 3b and 3c are circuits for driving the light emitting elements 1a, 1b and 1c, respectively, and the signal amplification circuit 4 is a received signal (concatenation) after optical / electrical conversion received from the photodetector 2. This is a circuit for amplifying image point position information).
【００１８】図３において、制御装置７は駆動回路３a
、３b 、３c を順番に駆動する制御を行ったり、ある
いは駆動照射中の発光素子からの受信信号に基づいてそ
の発光素子と計測平面間の距離に相当するアナログ出力
（電圧）を生成して後段の演算器８に与えたりする制御
を行う回路である。演算器８はこれらのアナログ出力Ｖ
a 、Ｖb 、Ｖc に基づいて各発光素子１a 、１b 、１c
の位置から計測平面までの距離ａ、ｂ、ｃを求め、それ
らの距離情報から計測平面の傾きθを計算して、それら
距離ａ、ｂ、ｃと傾きθの値を出力する回路である。In FIG. 3, the control device 7 includes a drive circuit 3a.
3b, 3c are sequentially driven, or an analog output (voltage) corresponding to the distance between the light emitting element and the measurement plane is generated based on the received signal from the light emitting element during drive irradiation. Is a circuit for performing control such as giving to the arithmetic unit 8 of FIG. The calculator 8 outputs these analog outputs V
Based on a, Vb, and Vc, each light emitting element 1a, 1b, 1c
Is a circuit that calculates the distances a, b, and c from the position to the measurement plane, calculates the inclination θ of the measurement plane from the distance information, and outputs the values of the distances a, b, and c and the inclination θ.
【００１９】この実施例装置の動作を以下に説明する。
制御装置７により、まず発光素子１a が発光するよう制
御する。その出力光は投光レンズ５a で細く絞られ、計
測対象の計測平面１０に入射される。計測平面１０で拡
散反射された反射光は受光レンズ６で集光されて光検出
部２上に結像する。その結像位置情報は制御装置７を通
してアナログ出力Ｖa として演算器８に送られ、このア
ナログ出力Ｖa から発光素子１a と計測平面１０間の距
離ａが求まる。The operation of the apparatus of this embodiment will be described below.
The control device 7 first controls the light emitting element 1a to emit light. The output light is narrowed down by the light projecting lens 5a and is incident on the measurement plane 10 to be measured. The reflected light diffusely reflected by the measurement plane 10 is condensed by the light receiving lens 6 and forms an image on the photodetector 2. The image formation position information is sent to the calculator 8 as an analog output Va through the control device 7, and the distance a between the light emitting element 1a and the measurement plane 10 is obtained from this analog output Va.
【００２０】次に、制御装置７により発光素子１b を発
光させて同様にして発光素子１b と計測平面１０間の距
離ｂを求める。さらに同様にして発光素子１c を発光さ
せて発光素子１c と計測平面１０間の距離ｃを求める。
演算器８はこれらの距離情報に基づいて計測平面１０の
傾きθを演算し出力する。Next, the control device 7 causes the light emitting element 1b to emit light, and the distance b between the light emitting element 1b and the measurement plane 10 is similarly obtained. Further, similarly, the light emitting element 1c is caused to emit light and the distance c between the light emitting element 1c and the measurement plane 10 is obtained.
The calculator 8 calculates and outputs the inclination θ of the measurement plane 10 based on the distance information.
【００２１】図４には本発明の他の実施例が示される。
この実施例はセンサヘッド部の構成を変更したものであ
る。図示するように、発光素子１a 、１b 、１c の配置
は前述の実施例と同様である。相違するところは光検出
部２の構成であり、この実施例では、発光素子１a の反
射光受光用に光検出素子２a を、発光素子１b の反射光
受光用に光検出素子２b を、発光素子１c の反射光受光
用に光検出素子２c をそれぞれ設け、これらを同心円の
中心付近に１２０°間隔で配置し、これら３つの光検出
素子２a 、２b 、２c によって光検出部２を形成してい
る。動作は前述の実施例と同様であり、発光素子１a 、
１b 、１c を順次に発光させて各発光素子１a 、１b 、
１c と計測平面１０間の距離を求めている。FIG. 4 shows another embodiment of the present invention.
In this embodiment, the configuration of the sensor head unit is changed. As shown in the drawing, the arrangement of the light emitting elements 1a, 1b and 1c is the same as that in the above-mentioned embodiment. The difference lies in the configuration of the photodetector 2. In this embodiment, the photodetector 2a is used for receiving the reflected light of the light emitting device 1a, and the photodetector 2b is used for receiving the reflected light of the light emitting device 1b. Photodetector elements 2c are provided respectively for receiving the reflected light of 1c, and these are arranged at intervals of 120 ° near the center of the concentric circle, and the photodetector 2 is formed by these three photodetector elements 2a, 2b, 2c. .. The operation is similar to that of the above-described embodiment, and the light emitting element 1a,
1b, 1c are sequentially made to emit light, and each light emitting element 1a, 1b,
The distance between 1c and the measurement plane 10 is calculated.
【００２２】このように各発光素子１a 、１b 、１c に
それぞれ対応させて光検出素子２a、２b 、２c を設け
ると、前述の実施例の光検出素子２bcのように二つの発
光素子１b 、１c に共用する場合に比べて、結像の際の
誤差が少なくなり計測できる距離レンジが大きくなる。When the light detecting elements 2a, 2b, 2c are provided in correspondence with the respective light emitting elements 1a, 1b, 1c in this manner, two light emitting elements 1b, 1c like the light detecting element 2bc of the above-described embodiment are provided. Compared with the case of sharing the same, the error in image formation becomes small and the measurable distance range becomes large.
【００２３】図５には本発明のまた他の実施例が示され
る。この実施例もセンサヘッド部の構成を変更したもの
である。図示するように、発光素子１a 、１b 、１c の
配置は前述の実施例と同様である。相違するところは光
検出部２の構成であり、この実施例では、光検出部２は
結像点位置を２次元的（面的）に計測することができる
２次元配置形の単一の光点位置検出素子で構成し、これ
を発光素子１a 、１b、１c を配置した同心円の中心部
分に配置している。動作は前述の実施例と同様であり、
発光素子１a 、１b 、１c を順次に発光させて各発光素
子１a 、１b 、１c と計測平面１０間の距離を求めてい
る。FIG. 5 shows another embodiment of the present invention. Also in this embodiment, the configuration of the sensor head portion is changed. As shown in the drawing, the arrangement of the light emitting elements 1a, 1b and 1c is the same as that in the above-mentioned embodiment. The difference lies in the configuration of the light detection unit 2. In this embodiment, the light detection unit 2 is a two-dimensionally arranged single light that can measure the image forming point position two-dimensionally (planarly). It is composed of a point position detecting element, which is arranged at the center of a concentric circle where the light emitting elements 1a, 1b, 1c are arranged. The operation is similar to the above-mentioned embodiment,
The distances between the light emitting elements 1a, 1b, 1c and the measurement plane 10 are obtained by sequentially causing the light emitting elements 1a, 1b, 1c to emit light.
【００２４】本発明の実施にあたっては上述した各実施
例の他にも種々の変形形態が可能である。例えば、上述
の実施例では発光素子を三つ使用して傾きを計測するも
のについて説明したが、本発明はこれに限られるもので
はなく、発光素子を二つとすることもできる。この場
合、この二つの発光素子を素子取付け面における同一円
周上で直径方向に対峙する２点に配置してその中心点に
その直径方向に沿うようにして一次元配置形の一つの光
点位置検出素子を配置する。このようにした装置では、
２点の距離からセンサの長手方向（二つの発光素子を結
ぶ方向）と計測平面との成す角度を求めることができ
る。このような傾き計測装置は、例えば計測平面の傾き
がある方向については既知で一定である場合のような計
測条件が限定されている場合などに有用である。In implementing the present invention, various modifications other than the above-described embodiments are possible. For example, in the above-described embodiment, the case where the inclination is measured using three light emitting elements has been described, but the present invention is not limited to this, and two light emitting elements may be used. In this case, the two light emitting elements are arranged at two points facing each other in the diametrical direction on the same circumference on the element mounting surface, and one light spot of a one-dimensional arrangement type is arranged along the diametrical direction at the center point. A position detecting element is arranged. In a device like this,
From the distance between the two points, the angle between the longitudinal direction of the sensor (direction connecting the two light emitting elements) and the measurement plane can be obtained. Such an inclination measuring device is useful, for example, when the measurement conditions are limited, such as when the inclination of the measurement plane is known and constant in a certain direction.
【００２５】また、計測条件が限定されていない場合で
も、このような二つの発光素子で構成された計測装置を
用いて各発光素子と計測平面間の距離を計測し、その後
にその計測装置の素子取付け面を面の法線を中心として
例えば９０°回転させて回転後の各発光素子と計測平面
間の距離を計測することで、等価的に四つの発光素子と
計測平面間の距離を計測することもでき、それにより面
の傾きを求めることができる。Even when the measurement conditions are not limited, the distance between each light emitting element and the measurement plane is measured by using the measuring device composed of such two light emitting elements, and then the measuring device By measuring the distance between each light emitting element and the measurement plane after rotation by rotating the element mounting surface by, for example, 90 ° about the normal line of the surface, the distance between the four light emitting elements and the measurement plane is equivalently measured. It is also possible to obtain the tilt of the surface.
【００２６】[0026]
【発明の効果】以上に説明したように、本発明によれ
ば、従来のような各非接触距離センサの取付け位置の相
対位置誤差に起因する計測精度の劣化を排除することが
できる。また製造時において、従来のように各非接触距
離センサを正確な位置に取り付けるのに比べて、その製
造作業が簡単になる。また受光レンズや信号処理回路を
複数の発光素子に共用化できるため、装置の小型化、軽
量化を図ることができる。As described above, according to the present invention, it is possible to eliminate the deterioration of the measurement accuracy due to the relative positional error of the mounting position of each non-contact distance sensor as in the conventional case. Further, at the time of manufacturing, the manufacturing work is simplified as compared with the conventional case where each non-contact distance sensor is mounted at an accurate position. Further, since the light receiving lens and the signal processing circuit can be shared by a plurality of light emitting elements, the size and weight of the device can be reduced.
【図１】本発明に係る原理説明図である。FIG. 1 is a diagram illustrating the principle of the present invention.
【図２】本発明の一実施例としての傾き計測装置のセン
サヘッド部の構成を示す図である。FIG. 2 is a diagram showing a configuration of a sensor head unit of an inclination measuring device as an embodiment of the present invention.
【図３】本発明の一実施例としての傾き計測装置の全体
構成を示す図である。FIG. 3 is a diagram showing an overall configuration of a tilt measuring device as an embodiment of the present invention.
【図４】本発明の傾き計測装置のセンサヘッド部の他の
実施例を示す図である。FIG. 4 is a diagram showing another embodiment of the sensor head portion of the tilt measuring device of the present invention.
【図５】本発明の傾き計測装置のセンサヘッド部のまた
他の実施例を示す図である。FIG. 5 is a diagram showing another embodiment of the sensor head portion of the tilt measuring device of the present invention.
【図６】傾き計測装置のセンサヘッド部の従来例を示す
図である。FIG. 6 is a diagram showing a conventional example of a sensor head unit of an inclination measuring device.
【図７】従来の傾き計測装置の動作を説明する図であ
る。FIG. 7 is a diagram illustrating an operation of a conventional inclination measuring device.
１a 、１b 、１c 発光素子 ２a 、２b 、２c 光検出素子（光点位置検出装置：Ｐ
ＳＤ） ２ 光検出部 ３a 、３b 、３c 駆動回路 ４ 信号増幅回路 ５a 、５b 、５c 投光レンズ ６ 受光レンズ ７ 制御装置 ８ 演算器 ９a 、９b 、９c 非接触距離センサ1a, 1b, 1c Light emitting element 2a, 2b, 2c Photodetection element (light spot position detection device: P
SD) 2 Photodetector sections 3a, 3b, 3c Driving circuit 4 Signal amplification circuit 5a, 5b, 5c Projecting lens 6 Receiving lens 7 Control device 8 Computing unit 9a, 9b, 9c Non-contact distance sensor
Claims (4)
対して出力光を照射する複数の発光素子（２０1 〜２０
n ）であって互いに離間して配置されたものと、 該計測面からの反射光を受光する光検出部（２１）とを
備え、 該複数の発光素子を順次に発光させて該光検出部でその
反射光を受光することで、各発光素子と計測平面との距
離をそれぞれ計測して計測面の傾きを求めるよう構成さ
れた傾き計測装置。1. A plurality of light emitting elements (20 1 to 20) for irradiating output light to a measurement surface (23) of which inclination is to be measured.
n ), which are arranged apart from each other, and a photodetection unit (21) for receiving the reflected light from the measurement surface, and the photodetection unit is configured to sequentially emit light from the plurality of light emitting elements. The tilt measuring device configured to measure the distance between each light emitting element and the measuring plane to obtain the tilt of the measuring surface by receiving the reflected light.
の位置を一次元的に検出する一つの光点位置検出素子、
またはかかる光点位置検出素子の複数個の組合せで構成
された請求項１記載の傾き計測装置。2. A light spot position detecting element for one-dimensionally detecting the position of an image formation point of received reflected light,
Alternatively, the tilt measuring device according to claim 1, wherein the tilt measuring device comprises a plurality of combinations of such light spot position detecting elements.
の位置を二次元的に検出する光点位置検出素子で構成さ
れた請求項１記載の傾き計測装置。3. The tilt measuring device according to claim 1, wherein the light detecting section is composed of a light spot position detecting element which two-dimensionally detects the position of the image forming point of the received reflected light.
素子を含む面を回転できるように構成し、回転前の計測
値と回転後の計測値に基づいて計測面の傾きを求めるよ
うに構成された請求項１〜３の何れかに記載の傾き計測
装置。4. The number of the light emitting elements is two, the surface including the light emitting elements is configured to be rotatable, and the inclination of the measurement surface is obtained based on the measured value before the rotation and the measured value after the rotation. The inclination measuring device according to any one of claims 1 to 3, configured as described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16531892A JPH05333152A (en) | 1992-06-01 | 1992-06-01 | Inclination measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16531892A JPH05333152A (en) | 1992-06-01 | 1992-06-01 | Inclination measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05333152A true JPH05333152A (en) | 1993-12-17 |
Family
ID=15810054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16531892A Pending JPH05333152A (en) | 1992-06-01 | 1992-06-01 | Inclination measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05333152A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271350A (en) * | 2006-03-30 | 2007-10-18 | Fujifilm Corp | Reference planar setting method for planar representation type display, and visibility angle measuring method |
| JP2009121991A (en) * | 2007-11-15 | 2009-06-04 | Casio Comput Co Ltd | Distance measurement apparatus and projector |
| WO2015046127A1 (en) * | 2013-09-25 | 2015-04-02 | 株式会社村田製作所 | Inclination detection device |
| CN104678998A (en) * | 2013-11-29 | 2015-06-03 | 丰田自动车株式会社 | Autonomous Moving Object, Control Method Thereof |
| CN104850119A (en) * | 2014-02-14 | 2015-08-19 | 丰田自动车株式会社 | Autonomous vehicle and its failure determination method |
| JP2019164121A (en) * | 2018-01-26 | 2019-09-26 | ジック アーゲー | Photoelectric sensor and object detection method |
-
1992
- 1992-06-01 JP JP16531892A patent/JPH05333152A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007271350A (en) * | 2006-03-30 | 2007-10-18 | Fujifilm Corp | Reference planar setting method for planar representation type display, and visibility angle measuring method |
| JP2009121991A (en) * | 2007-11-15 | 2009-06-04 | Casio Comput Co Ltd | Distance measurement apparatus and projector |
| WO2015046127A1 (en) * | 2013-09-25 | 2015-04-02 | 株式会社村田製作所 | Inclination detection device |
| JP6020738B2 (en) * | 2013-09-25 | 2016-11-02 | 株式会社村田製作所 | Tilt detection device |
| CN104678998A (en) * | 2013-11-29 | 2015-06-03 | 丰田自动车株式会社 | Autonomous Moving Object, Control Method Thereof |
| JP2015106254A (en) * | 2013-11-29 | 2015-06-08 | トヨタ自動車株式会社 | Autonomous moving vehicle, and control method and control program of the same |
| CN104850119A (en) * | 2014-02-14 | 2015-08-19 | 丰田自动车株式会社 | Autonomous vehicle and its failure determination method |
| JP2019164121A (en) * | 2018-01-26 | 2019-09-26 | ジック アーゲー | Photoelectric sensor and object detection method |
| US11914074B2 (en) | 2018-01-26 | 2024-02-27 | Sick Ag | Optoelectronic sensor and method for the detection of objects |
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