JP2006090879A - Optical measurement instrument and optical measurement method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To measure the shapes of uneven objects under measurement with high accuracy. <P>SOLUTION: This optical measurement instrument is equipped with: a plurality of measurement parts 101 to 103 and a control part 104. The measurement parts 101 to 103 comprise light sources 105, 107, and 109 for outputting light for measurement, and light detection parts 106, 108, and 110 for detecting the light for measurement reflected by the objects 114 and 115 under measurement. The control part 104 calculates the shapes of the objects 114 and 115 based on the light for measurement detected by the plurality of measurement parts 101 to 103. The optical axes of the light for measurement outputted from the light sources 105, 107, and 109 of the respective measurement parts 101 to 103, are kept from crossing each other while the respective light sources 105, 107, and 109 output the light for measurement so that it passes through a common area 113 in a prescribed domain. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention detects the measurement light reflected by the measurement object while irradiating the measurement light generated by the light source and the shape of the measurement object based on the detected measurement light The present invention relates to an optical measurement device that measures the above and an optical measurement method using the optical measurement device.

  Conventionally, the measurement object such as a laser beam generated from a light source such as a laser light source is irradiated on the object to be measured, and the measurement light reflected by the object to be measured is detected. An optical measuring device that measures the distance of the object to be measured from a position has been developed (for example, see Non-Patent Document 1).

FIG. 4 is a principle diagram showing the measurement principle of the optical measurement device described in Non-Patent Document 1, and shows the measurement principle of the triangulation system.
In FIG. 4, 401 denotes a light emitting element (for example, a semiconductor laser or an infrared light emitting diode) as a light source that outputs measurement light for measuring a distance from a predetermined position to the object to be measured m, a shape of the object to be measured m, and the like. , 402 is a light projecting lens, 403 is a light receiving lens, 404 is a PSD (Position Sensitive Detector) as a light detection unit, 405 is an optical axis of the light projecting lens 402 (an axis passing through the center of the lens and perpendicular to the lens surface), 406 Is the optical axis of the light receiving lens 403, and m is the object to be measured. As the light detection unit, a CCD (Charge Coupled Device) or the like can be used instead of the PSD 404. In the following description, an example using the PSD 404 will be described.

The measurement light output from the light emitting element 401 is given a predetermined directivity by the light projection lens 402 and is irradiated to the object m to be measured. The measurement light that reaches the measurement object m is irregularly reflected by the measurement object m, and a part of the reflected light is collected as a spot (point) on the PSD 404 by the light receiving lens 403.
As a result, the measurement light reflected by the measurement object m is detected by the PSD 404. At this time, the position of the light receiving spot on the PSD 404 changes according to the distance between the light receiving lens 403 and the object m to be measured. Therefore, by electrically detecting the light receiving spot position on the PSD 404, it is possible to measure the distance from the predetermined position to the object m to be measured.

This will be described with reference to FIG. 4. A measuring distance output from the light projecting lens 402 with a center distance (base line length) between the light projecting lens 402 and the light receiving lens 403 being A and a focal length of the light receiving lens 403 being f. And the thickness and aberration of the lenses 402 and 403 are ignored, and the light receiving surface of the PSD 404 is located at a distance f from the light receiving lens 403. In this case, the distance d from the light projecting lens 402, which is a predetermined position, to the object m to be measured is obtained geometrically by the following equation using the center-to-center distance A, the focal distance f, and the position X of the light receiving spot.
d = A · f / X
Since the center-to-center distance A and the focal length f of the light receiving lens 403 are known values, by detecting the position X of the light receiving spot in the PSD 404, the distance from the predetermined position to the object m to be measured, and the shape of the object m to be measured The amount of movement of the object to be measured m can be optically measured. As described above, it is possible to measure the shape or the like of the measurement object m with high accuracy with a simple configuration.

By the way, many objects to be measured have convex portions and concave portions. FIG. 5 is an explanatory diagram in the case of measuring the shape of the object 501 having the convex portion 502 and the concave portion 503, and FIG. 5A is an explanatory diagram in the case of measuring the shape of the convex portion 502. b) is an explanatory diagram in the case of measuring the shape of the recess 503.
When measuring the shape of the convex portion 502 of the device under test 501, as shown in FIG. 5A, the measurement light 504 is sent from the optical measuring device (not shown) to the convex portion 502 of the device under test 501. The shape of the convex portion 502 of the measurement object 501 is calculated by detecting the measurement light reflected on the convex portion 502 with an optical measurement device and performing a predetermined shape calculation process.

  At this time, in the vicinity of the central portion of the convex portion 502, the measurement light from the optical measurement device is irradiated at a substantially right angle with respect to the surface of the convex portion 502 of the object 501. Most of the measurement light is reflected from the convex portion 502 toward the optical measuring device. Therefore, the optical measurement apparatus can detect the reflected measurement light satisfactorily, so that it is possible to calculate the convex shape of the measurement object 501 based on the detected measurement light, High-precision measurement is possible.

  However, in the vicinity of the end of the convex portion 502, the measurement light from the optical measuring device is irradiated substantially parallel to the surface of the convex portion 502 of the object 501. Most of the measured light is not reflected from the convex portion 502 toward the optical measuring device. Therefore, since the reflected measurement light cannot be detected satisfactorily by the optical measurement device, it is difficult to calculate the shape of the object to be measured 501 and the measurement accuracy is deteriorated.

On the other hand, when measuring the shape of the recess 503 of the object 501 to be measured, as shown in FIG. 5B, the measurement light 504 is irradiated from the optical measuring device to the recess 503 of the object 501 to be measured. The measurement light reflected at 503 is detected by an optical measurement device, and the shape of the recess 503 of the measurement object 501 is calculated by performing a predetermined shape calculation process.
At this time, in the vicinity of the central portion of the concave portion 503, the measurement light from the optical measurement device is irradiated at a substantially right angle to the surface of the concave portion 503 of the object 501 to be measured. Most of the light is reflected from the concave portion 503 toward the optical measuring device. Therefore, the optical measurement apparatus can detect the reflected measurement light satisfactorily, so that it is possible to calculate the concave shape of the measurement object 501 based on the detected measurement light. Accurate measurement is possible.

  However, in the vicinity of the end of the concave portion 503, the measurement light from the optical measurement device is irradiated substantially parallel to the surface of the concave portion 503 of the object 501 to be measured. Most of the light for use will not be reflected from the concave portion 503 to the optical measuring device side. Therefore, since the reflected measurement light cannot be detected satisfactorily by the optical measurement device, it is difficult to calculate the shape of the object to be measured 501 and the measurement accuracy is deteriorated.

As shown in FIG. 6, when the measurement target is a vehicle, it is necessary to measure the gap 303 between the vehicle main body 301 and the door main body 302. Although it is necessary to measure the shape and dimensions in the vicinity of the end portion 305, in the vicinity of the end portions 304 and 305, the measurement light from the optical measurement device is irradiated substantially parallel to the surfaces of the end portions 304 and 305. For this reason, it is difficult to measure the positions of the end portions 304 and 305, and therefore it is difficult to measure the distance of the gap 303.
"Sensor Technology" published by the Information Research Committee (October 1992 issue (Vol.12.No.11))

  This invention makes it a subject to enable it to measure the shape and edge part of a to-be-measured object which has an unevenness | corrugation with high precision.

According to the present invention, a plurality of measurement means having a light source that outputs measurement light and a light detection unit that detects the measurement light reflected by the object to be measured, and the measurement detected by the plurality of measurement means Calculation means for calculating the shape of the object to be measured based on light, and the optical axes of the measurement light output from the light sources of the measurement means do not cross each other and pass through a common area within a predetermined range. In addition, there is provided an optical measuring device characterized in that each light source outputs measurement light.
The light sources output the measurement light so that the optical axes of the measurement light output from the light sources of the measurement means do not intersect each other and pass through a common area within a predetermined range. The calculation means calculates the shape of the object to be measured based on the measurement light detected by the light detection units of the plurality of measurement means.

Here, three measurement means may be provided, and the calculation means may be configured to calculate the shape of the object to be measured based on the measurement light detected by each measurement means.
Further, the light sources of the measuring means may be configured to be arranged at equal intervals on the same circumference.
The calculation unit may be configured to calculate the shape of the object to be measured based on the measurement light detected by two of the three measurement units.

According to the present invention, when measuring the shape of the object to be measured using the optical measuring device according to any one of the above, when measuring the convex surface of the object to be measured, the object to be measured is used as the common object. There is provided an optical measurement method characterized in that measurement is performed by disposing at a position closer to each measurement means than an area. When measuring the convex surface of the object to be measured, the object to be measured is disposed at a position closer to each measuring means than the common area.
Here, when measuring the shape of the object to be measured using the optical measuring device according to any one of the above, when measuring the concave surface of the object to be measured, the object to be measured is more than the common region. The measurement may be performed by disposing at a position far from the measurement means.

According to the optical measuring device of the present invention, it becomes possible to measure the shape of the object to be measured having irregularities with high accuracy. Moreover, it becomes possible to measure the edge part of a to-be-measured object with high precision.
Further, according to the optical measurement method of the present invention, it becomes possible to measure the shape of the object to be measured having irregularities with high accuracy. Moreover, it becomes possible to measure the edge part of a to-be-measured object with high precision.

  Hereinafter, an optical measuring device and an optical measuring method according to an embodiment of the present invention will be described with reference to the drawings. The optical measurement apparatus according to the embodiment of the present invention irradiates the measurement object with the measurement light from the light source of the optical measurement apparatus, and reflects the measurement light reflected by the measurement object. An optical type that is detected by the light detection unit of the measuring device and measures the shape of the object to be measured, the distance from the predetermined position to the object to be measured, and the like by the calculation means based on the signal detected by the light detector It is a measuring device. An optical measurement method according to an embodiment of the present invention is an optical measurement method for measuring the shape or the like of an object to be measured using the optical measurement apparatus. In the following drawings, the same parts are denoted by the same reference numerals.

FIG. 1 is an external perspective view of a triangulation optical measuring device according to an embodiment of the present invention, and FIG. 2 is a front view of the optical measuring device shown in FIG. These are shown together with the measured objects 114 and 115.
1 and 2, the optical measurement apparatus includes a plurality of (three in the present embodiment) measurement means (a first measurement unit 101 as a first measurement means and a second measurement means as a second measurement means). , The third measuring unit 103 as the third measuring means, and the shape of the object to be measured based on the control of each measuring unit 101 to 103 and the measuring light detected by each measuring unit 101 to 103 And a control unit 104 that calculates the above.

Each of the measuring units 101 to 103 is disposed at a known position with a predetermined reference position as a reference. Moreover, each measurement part 101-103 is electrically connected to the control part 104 with the electrical cable.
Each measurement unit 101 to 103 is assigned a measurement region in advance so as to measure a different region (measurement region), and each measurement unit 101 to 103 measures a different region of the object to be measured. Here, the measurement area allocated to each of the measurement units 101 to 103 is that the measurement light output from the light sources 105, 107, and 109 of each of the measurement units 101 to 103 is reflected by the object to be measured and reflected by a predetermined ratio or more. It is an area that returns.

  That is, this is a region where the measurement light output from each of the light sources 105, 107, and 109 is incident on the surface of the object to be measured at an angle of a predetermined value or more that is closer to a right angle. By allocating the measurement areas of the measurement units 101 to 103 to the areas as described above, most of the measurement light output from the light sources 105, 107, and 109 of the measurement units 101 to 103 is reflected by the object to be measured. Therefore, since the detection is returned to the light detection units 106, 108, and 110 of the angle measurement units 101 to 103, the shape and the like of the object to be measured having the concavo-convex part are measured favorably.

The control unit 104 controls the light sources 105, 107, and 109 of the measurement units 101 to 103 to scan the measurement regions assigned to the measurement units 101 to 103 with the measurement light. Control rotation.
The control unit 104 calculates the overall shape of the object to be measured by synthesizing the measurement data of the area of the object to be measured that is measured by each of the measuring units 101 to 103.

  That is, the control unit 104 calculates the overall shape of the object to be measured based on the signal corresponding to the light for measurement obtained by the measurement by the measuring units 101 to 103. Since the measurement units 101 to 103 are disposed at positions with reference to a predetermined reference position, the measurement signals measured by the measurement units 101 to 103 have a reference position common to the measurement units 101 to 103. Since the signal is a reference signal, the control unit 104 can easily synthesize the signals from the measurement units 101 to 103 to calculate the overall shape of the object to be measured.

  Each of the measuring units 101 to 103 is a light source (for example, laser, light emitting diode (LED)) 105, 107, 109 that outputs measurement light, and light detection that detects the measurement light reflected from the object to be measured. Sections (for example, PSD (Position Sensitive Detector), CCD (Charge Coupled Device)) 106, 108, 110. Light emission of the light sources 105, 107, and 109 is controlled by the control unit 104. In addition, a signal corresponding to the measurement light detected by the light detection units 106, 108, and 110 is transmitted to the control unit 104, and the control unit 104 functions as a calculation unit and is detected by the light detection units 106, 108, and 110. Based on the measurement light, the shape of the object to be measured is calculated.

Each measurement part 101-103 is arrange | positioned at equal intervals on the periphery of the circle | round | yen 111 centering on the vertical axis | shaft 112 provided in the perpendicular direction. That is, the three measuring units 101 to 103 are arranged at equal intervals (that is, apexes of an equilateral triangle) on the circumference of the same circle 111 provided in the horizontal plane.
The optical axes of the measurement light beams output from the light sources 105, 107, and 109 of the measurement units 101 to 103 are configured not to cross each other and pass through a predetermined common area 113 that is a circular area having a predetermined area. It is configured.

The optical axis of the measurement light output from each light source 105, 107, 109 is configured to be inclined within a predetermined angle with respect to the vertical axis 112. The common area 113 is an area where the area in the horizontal plane constituted by the light sources 105, 107, and 109 is the narrowest.
In the present embodiment, a region closer to each measurement unit 101 to 103 than the common region 113 is defined as a first region, and a region farther from each measurement unit 101 to 103 than the common region 113 is defined as a second region, and the convex shape is measured. An object to be measured 114 is arranged and measured in the first area, and an object to be measured 115 for measuring the concave shape is arranged and measured in the second area.

The optical measuring apparatus and the optical measuring method according to the embodiment of the present invention configured as described above will be described in detail.
First, when measuring the concave shape of the DUT 115, the DUT 115 is disposed in the second region.
In this state, the control unit 104 controls the measurement units 101 to 103 and outputs measurement light from the light sources 105, 107, and 109 of the measurement units 101 to 103. At this time, the control unit 104 assigns areas allocated in advance to the measurement units 101 to 103 so that the measurement lights output from the light sources 105, 107, and 109 of the measurement units 101 to 103 do not intersect each other. The measurement units 101 to 103 are controlled so that the light sources 105, 107, and 109 of the measurement units 101 to 103 scan with measurement light.

  The measurement light output from the light source 105 of the measurement unit 101 reaches the measurement object 115 via the common area 113 and then is reflected by the concave surface of the measurement object 115, and the reflected measurement light is again reflected in the common area. It returns to the measurement unit 101 side via 113 and is detected by the light detection unit 106. In the measurement signal detected by the light detection unit 106, point cloud data (in order to represent the shape of the measurement object 115) serving as a basis for representing the shape of the measurement object 115 in the measurement region previously assigned to the measurement unit 101. The data of a plurality of points in the DUT 115: shape data). The light detection unit 106 detects the measurement light and outputs a corresponding electrical signal to the control unit 104. The electrical signal includes data on the shape of the DUT 115 in the measurement region previously assigned to the measurement unit 101.

  The measurement light output from the light source 107 of the measurement unit 102 reaches the measurement object 115 via the common region 113 and then is reflected by the concave surface of the measurement object 115. The reflected measurement light is again reflected in the common region. It returns to the measurement unit 102 side through 113 and is detected by the light detection unit 108. The measurement signal detected by the light detection unit 108 includes data on the shape of the object 115 to be measured in the measurement region previously assigned to the measurement unit 102. The light detection unit 108 detects the measurement light and outputs a corresponding electrical signal to the control unit 104. The electrical signal includes data on the shape of the DUT 115 in the measurement region previously assigned to the measurement unit 102.

The measurement light output from the light source 109 of the measurement unit 103 reaches the measurement object 115 via the common region 113 and then is reflected by the concave surface of the measurement object 115, and the reflected measurement light is again reflected. It returns to the measurement unit 103 side through the common region 113 and is detected by the light detection unit 110. The measurement signal detected by the light detection unit 110 includes data on the shape of the measurement object 115 in the measurement region previously assigned to the measurement unit 103. The light detection unit 110 detects the measurement light and outputs a corresponding electrical signal to the control unit 104. The electrical signal includes data on the shape of the DUT 115 in the measurement region assigned in advance to the measurement unit 103.
The control unit 104 calculates the shape of the DUT 115 based on signals corresponding to the measurement light input from the light detection units 106, 108, and 110. That is, the control unit 104 calculates the shape of the measurement object 115 by combining signals corresponding to the measurement light input from the light detection units 106, 108, and 110.

  On the other hand, when the device under test is a device under test 114 having a convex shape, the device under test 114 is arranged in the first region. In this state, the same operation as described above is performed. In this case, although the device under test 114 has a convex shape, the device under test 114 is measured in a state of being arranged in the first region, and therefore is output from the light sources 105, 107, and 109 of the measurement units 101 to 103. Since the measurement light to be measured is irradiated at an angle closer to a right angle with respect to the convex surface of the object to be measured 114, the light detection units 106, 108, and 110 of each of the measurement units 101 to 103 are Most of the measurement light reflected by can be detected. Therefore, it is possible to measure the shape of the measurement object 114 having a convex surface with high accuracy.

  In the above-described embodiment, the measurement units 101 to 103 are described as being fixedly disposed at predetermined positions. However, on the disk that rotates about the vertical axis 112, along the circumferential direction of the disk. The measurement units 101 to 103 may be attached at equal intervals, and the motor may be rotationally controlled by the control unit 104 so that the measurement is performed while rotating the disk by a predetermined angle by the motor. Thereby, it is possible to accurately measure a portion hidden behind the object to be measured.

  FIG. 3 is a front view for explaining an optical measuring device and an optical measuring method according to another embodiment of the present invention, and the same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals. . In the above-described embodiment, the three measuring units 101 to 103 are used, and the measured objects 114 and 115 having convex portions and concave portions are measured, but in the present embodiment, of the three measuring units 101 to 103, Two measuring units 101 and 103 are used to measure the end of the object to be measured.

In FIG. 3, the optical measurement device itself is the optical measurement device according to the above embodiment, but in this embodiment, the measurement unit 102 is not used among the three measurement units 101 to 103, and 2 The two measuring units 101 and 103 are used to measure the end of the object to be measured.
In the present embodiment, the measurement target is a vehicle, and an example in which a gap between the vehicle main body 301 and the door 302 is measured is shown.

As shown in FIG. 3, the object to be measured (vehicle) is placed in a second region that is farther from the optical measurement device than the common region 113 for measurement.
In this case, the control unit 104 controls the measurement units 101 and 103 to output measurement light from the light sources 105 and 109 of the measurement units 101 and 103. At this time, the control unit 104 measures the areas previously assigned to the measurement units 101 and 103 so that the measurement lights output from the light sources 105 and 109 of the measurement units 101 and 103 do not intersect each other. The measurement units 101 and 103 are controlled so that the light sources 105 and 109 of the units 101 and 103 scan with the measurement light.

  The measurement light output from the light source 105 of the measuring unit 101 is reflected around the end 304 of the vehicle main body 301 and the end 305 of the door main body 302 after reaching the object to be measured via the common region 113. The reflected measurement light returns to the measurement unit 101 side again through the common region 113 and is detected by the light detection unit 106. The measurement signal detected by the light detection unit 106 includes data on the shape of the object to be measured in the measurement region previously assigned to the measurement unit 101. The light detection unit 106 detects the measurement light and outputs a corresponding electrical signal to the control unit 104.

  The electrical signal includes data on the shape of the object to be measured in the measurement region previously assigned to the measurement unit 101. Note that the measurement light from the measurement unit 103 is incident on the surface of the end 304 of the vehicle main body 301 at an angle closer to a right angle, and more measurement light reflected by the end 304 is detected by the measurement unit 103. Therefore, the end 304 of the vehicle main body 301 is accurately measured by the measuring unit 103.

  The measurement light output from the light source 109 of the measurement unit 103 is reflected around the end 304 of the vehicle main body 301 and the end 305 of the door main body 302 after reaching the object to be measured through the common region 113. The reflected measurement light returns to the measurement unit 103 side again through the common region 113 and is detected by the light detection unit 110. The measurement signal detected by the light detection unit 110 includes data on the shape of the object to be measured in the measurement region assigned in advance to the measurement unit 103. The light detection unit 110 detects the measurement light and outputs a corresponding electrical signal to the control unit 104.

  The electrical signal includes data on the shape of the object to be measured in the measurement region previously assigned to the measurement unit 103. Note that the measurement light from the measurement unit 101 is incident on the surface of the end 305 of the door body 302 at an angle closer to a right angle, and more measurement light reflected by the end 305 is detected by the measurement unit 101. Therefore, the end portion 305 of the door main body 302 is accurately measured by the measurement unit 101.

  The control unit 104 calculates the shape of the object to be measured (the vehicle main body 301 and the door main body 302) based on the signal corresponding to the measurement light input from each of the light detection units 106 and 110. The distance 303 is calculated. That is, the control unit 104 calculates the end portions 304 and 305 of the object to be measured by synthesizing signals corresponding to the measurement light input from the light detection units 106 and 110, and sets the gap 303. calculate.

In the above-described embodiment, the measurement units 101 and 103 have been described as being fixedly arranged at predetermined positions. However, as in the above-described embodiment, the disk is rotated on a disk that rotates about a vertical axis. The measurement units 101 to 103 are attached at equal intervals along the circumferential direction of the motor, and the rotation of the motor is controlled by the control unit 104, so that the measurement is performed while rotating the disk by a predetermined angle. Good. Thereby, it is possible to accurately measure a portion hidden behind the object to be measured.
Further, the measuring units 101 and 103 move the measuring units 101 and 103 at a predetermined speed in a direction crossing the end of the measured object (left and right direction in FIG. 3), and the measuring units 101 and 103 end the measured object ends 304 and 305. Alternatively, the gap 303 may be measured.

  Further, in each of the above embodiments, a signal corresponding to the measurement light detected by each of the measurement units 101 to 103 is transmitted to the control unit 104 constituting the calculation means, and the control unit 104 performs overall measurement of the object to be measured. Although it was comprised so that a shape etc. might be calculated, the individual measurement means was provided in each measurement part 101-103, and the shape (partial shape) of the to-be-measured object in the area | region measured by each measurement part 101-103 etc. Is calculated by the individual calculating means provided in each of the measuring units 101 to 103, and the partial shapes calculated by the individual calculating means of each of the measuring units 101 to 103 are synthesized by the control unit 104 constituting the calculating means. Thus, the overall shape or the like of the object to be measured may be calculated.

Also in this case, the control unit 104 constituting the individual calculation units and calculation units of the measurement units 101 to 103 calculates the shape of the object to be measured based on the measurement light detected by the plurality of measurement units 101 to 103. The calculation means is configured.
In each of the above-described embodiments, the example of the optical measuring apparatus and the optical measuring method of the triangulation system has been described, but the present invention is not limited to this.

  As described above, according to the optical measurement device according to each of the embodiments, the measurement light reflected from the light sources 105, 107, and 109 and the measured objects 114 and 115 that output the measurement light is detected. A plurality of measuring units 101 to 103 having photodetecting units 106, 108, and 110 that calculate the shapes of the objects to be measured 114 and 115 based on the measurement light detected by the plurality of measuring units 101 to 103. Calculation means 104, and the optical axes of the measurement light beams output from the light sources 105, 107, and 109 of the measurement units 101 to 103 do not cross each other and pass through the common region 113 within a predetermined range. The light sources 105, 107, and 109 are configured to output measurement light.

Therefore, it becomes possible to measure the shape of the DUTs 114 and 115 having a concave surface or a convex surface with high accuracy. Further, the end portions 304 and 305 and the gap 303 of the object to be measured can be measured with high accuracy. In addition, since the measurement lights output from the respective light sources do not cross each other and do not interfere with each other, good measurement is possible.
In the optical measurement method according to each of the above embodiments, when measuring the shape of the measurement object 114 or 115 using any one of the optical measurement devices, when measuring the convex surface of the measurement object 114, The measurement object 114 is arranged at a position closer to the measurement units 101 to 103 than the common region 113 to perform measurement.

Further, when measuring the concave surface of the measurement object 115, the measurement object 115 is arranged at a position farther from the measurement units 101 to 103 than the common region 113 for measurement.
Therefore, it becomes possible to measure the shape of the DUTs 114 and 115 having a concave surface or a convex surface with high accuracy.
Further, when measuring the shape of the end portions 304 and 305 of the object to be measured using any one of the optical measuring devices, the object to be measured is farther from the measuring units 101 to 103 than the common region 113. It is arranged at a position to perform measurement. Therefore, the end portions 304 and 305 and the gap 303 of the object to be measured can be measured with high accuracy. In this case, the measurement can be performed even if the measurement object is disposed at a position closer to the measurement units 101 to 103 than the common region 113.

  The present invention can be applied to an optical measurement apparatus and an optical measurement method for measuring the shape of an object to be measured having various uneven surfaces and hole ends, such as an automobile transmission.

1 is an external perspective view of an optical measuring device according to an embodiment of the present invention. It is a front view of the optical measuring device which concerns on embodiment of this invention. It is a front view of the optical measuring device which concerns on other embodiment of this invention. It is a principle figure which shows the measurement principle of the conventional optical measuring device. It is explanatory drawing of the measurement by the conventional optical measuring device. It is explanatory drawing of the measurement by the conventional optical measuring device.

Explanation of symbols

101-103 ... measurement unit 104 ... control units 105, 107, 109 ... light source 106, 108,110 ... light detection unit 111 ... circle 112 ... vertical axis constituting calculation means 113 ... Common area 114, 115 ... DUT 301 ... Vehicle body 302 ... Door body 303 ... Gap 304, 305 ... End

Claims (6)

A plurality of measuring means having a light source that outputs measurement light and a light detection unit that detects the measurement light reflected by the measurement object;
Calculating means for calculating the shape of the object to be measured based on the measurement light detected by the plurality of measuring means;
Optical measurement characterized in that each light source outputs measurement light so that the optical axes of the measurement light output from the light sources of each measurement means do not cross each other and pass through a common area within a predetermined range apparatus. The measuring means is arranged in three,
The optical measurement apparatus according to claim 1, wherein the calculation unit calculates a shape of the object to be measured based on measurement light detected by the measurement units.   3. The optical measuring apparatus according to claim 1, wherein the light sources of the measuring means are arranged at equal intervals on the same circumference.   4. The optical measurement according to claim 2, wherein the calculating means calculates the shape of the object to be measured based on measurement light detected by two of the three measuring means. apparatus.   When measuring the shape of the object to be measured using the optical measuring device according to any one of claims 1 to 4, when measuring the convex surface of the object to be measured, the object to be measured is more than the common region. An optical measurement method, wherein the measurement is performed by being arranged at a position close to each of the measurement means.   When measuring the shape of the object to be measured using the optical measuring device according to any one of claims 1 to 4, when measuring the concave surface of the object to be measured, the object to be measured is more than the common region. 6. The optical measurement method according to claim 5, wherein the measurement is performed by disposing at a position far from each of the measurement means.

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