JP3077455B2 - Electrode forming device for dielectric resonance parts - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for forming an electrode of a dielectric resonance component, and more particularly, to manufacturing a dielectric resonance component having at least one dielectric coaxial resonator formed on a dielectric block. The present invention relates to an apparatus for forming input / output electrodes on the outer peripheral surface of the dielectric block.

[0002]

2. Description of the Related Art FIG. 5 shows a process of forming input / output electrodes in a conventional dielectric resonance component. First, FIG.
As shown in FIG. 1, a substantially rectangular parallelepiped dielectric block 1 is prepared. Inside the dielectric block 1, for example, 2
The inner conductor forming holes 2 and 3 of the book are formed. These inner conductor forming holes 2, 3 penetrate between the front end face 1 a and the rear end face 1 b of the dielectric block 1. A pair of resist films 4 and 5 are formed on the outer peripheral surface of the dielectric block 1 by screen printing, tampon printing, or the like. The resist film 4 is formed so as to straddle the upper surface 1c and the right side surface 1d of the dielectric block 1.
Is formed so as to straddle the upper surface 1c and the left side surface 1e. Next, as shown in FIG. 5B, a conductor film 6 is formed on the entire outer periphery of the dielectric block 1. Further, inner conductors 7 and 8 are formed on the inner peripheral surfaces of the inner conductor forming holes 2 and 3. Next, as shown in FIG. 5C, the resist films 4 and 5 are peeled from the dielectric block 1. Depending on the resist film 4,
5, a part 1 of the outer periphery of the dielectric block 1 located below
f and 1 g are exposed to the outside. As a result, the conductor film 6 is separated into the outer conductor 9 and the input / output electrodes 10 and 11.

Thereafter, each of the inner conductors 7, 8 is removed in a ring shape having a predetermined width inside the inner conductor forming holes 2, 3. As a result, the inner conductors 7 and 8 are electrically insulated from the outer conductor 9 formed on the front end face 1a of the dielectric block 1 and are electrically connected to the outer conductor 9 formed on the rear end face 1b. Will remain. And the input / output electrodes 10, 1
1 is capacitively coupled to the inner conductors 7 and 8, respectively.
With such a configuration, the inside of the dielectric block 1
For example, two dielectric coaxial resonators each having one open end and another short circuit are formed.

[0004]

As described above, the conventional method for forming the input / output electrodes requires the steps of forming the resist films 4 and 5 and the step of stripping them, which is very troublesome. In particular, in the resist film forming step, the resist films 4 and 5 must be separately formed on the three surfaces of the upper surface 1c, the right side surface 1d, and the left side surface 1e of the dielectric block 1, and it is necessary to repeat a troublesome operation. there were. Therefore, there was a problem that productivity was poor. Further, in the conventional method of forming input / output electrodes, it is necessary to complete the patterning of the resist films 4 and 5 before forming the conductor film 6 and the inner conductors 7 and 8, and the pattern and position of the input / output electrodes can be arbitrarily changed. There is a problem that it is not easy.

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide an electrode forming apparatus for a dielectric resonance component which has excellent productivity and can easily change the pattern and position of input / output electrodes.

[0006]

The invention according to claim 1 is
In the process of manufacturing a dielectric resonator component having at least one dielectric coaxial resonator formed on a dielectric block,
An apparatus for forming input / output electrodes on an outer peripheral surface of the dielectric block, comprising: holding means for holding a dielectric block having a conductive film formed on the outer peripheral surface; and an ultrasonic vibration generator for generating ultrasonic vibration. Means to leave input and output electrodes at the tip
Is provided , and a cutting tool to which ultrasonic vibration is transmitted from the ultrasonic vibration generating means, and a dielectric block and / or a predetermined tool on the outer peripheral surface of the dielectric block by moving the cutting tool. A moving means for bringing the cutting tool into contact with the position is provided, and a part of the conductive film is scraped off from the dielectric block by the vibration of the cutting tool, whereby the conductive film is formed with the outer conductor and the input / output electrode corresponding to the hollow portion. It is characterized by being separated into

[0007]

In the invention according to the first aspect, the cutting tool is brought into contact with the conductor film formed on the outer peripheral surface of the dielectric block,
By transmitting the ultrasonic vibration from the ultrasonic vibration generating means to the cutting tool, a part of the conductor film is cut off from the outer peripheral surface of the dielectric block. Thereby, the conductor film is separated into the outer conductor and the input / output electrode.

[0008]

FIG. 1 is an external view showing the configuration of an input / output electrode forming apparatus according to an embodiment of the present invention. In FIG. 1, the input / output electrode forming apparatus includes a stage device 20, an ultrasonic cutting device 30, and a compression pump 40. The stage device 20 includes a holding jig 21, a processing table 22, and a displacement table 23. A concave portion 21a is formed on the upper surface of the holding jig 21, and the workpiece 50 is substantially
It is held at a tilt angle of 5 °. The holding jig 21 is fixedly placed on the processing table 22. The processing table 22 is movably supported by a displacement table 23. The displacement table 23 has three orthogonal axes (X-axis, Y-axis, and Z-axis) and a rotation axis (θ-axis) around the Z-axis.
And, therefore, an actuator for moving the workpiece 50 is provided. The actuator for each axis is
It is composed of a pulse motor, a servomotor, a hydraulic control device and the like.

The ultrasonic cutting device 30 includes a tool 31, an amplification horn 32, an ultrasonic vibration device 33, and a displacement table 3.
4 is included. The ultrasonic vibration device 33 has a frequency of 16 to 3
An ultrasonic wave of about 6 KHz is generated. This ultrasonic wave is transmitted to the tool 31 after being amplified by the amplification horn 32. The ultrasonic vibration device 33 is movably supported by a displacement table 34. Like the displacement table 23, the displacement table 34 has three orthogonal axes (X axis, Y axis, and Z axis).
And a rotation axis (θ axis) about the Z axis, and an actuator for moving the ultrasonic vibration device 33 and thus the tool 31 in each axial direction. The actuator of each axis is constituted by a pulse motor, a servomotor, a hydraulic control device, and the like.

The compression pump 40 compresses water in which cutting abrasive grains (mainly boron carbide) are mixed, and injects it from a nozzle 40a as cutting water. The cutting water injected from the nozzle 40a is sprayed between the workpiece 50 and the tool 31.

FIG. 2 is a view of the tip of the tool 31 shown in FIG. 1 as viewed from below. As shown in FIG. 2, the tip of the tool 31 includes cutting surfaces 31a and 31b combined at a substantially right angle. In the center of the tip of the tool 31, the workpiece 5
A hollow portion 31c for leaving the input / output electrode on 0 is formed.

Next, the operation of the input / output electrode forming apparatus shown in FIG. 1 will be described. First, the workpiece 50 is prepared and placed on the holding jig 21. As shown in FIG. 3, the workpiece 50 includes a rectangular parallelepiped dielectric block,
A conductor film 6 is formed on the entire outer peripheral surface of the dielectric block. Further, inner conductors 7 and 8 similar to the above-described conventional structure are formed on the inner peripheral surfaces of the inner conductor forming holes 2 and 3 provided inside the dielectric block. Next, displacement table 2
3, 34 are activated and the tool 31 for the workpiece 50 is
Is performed. The cutting surface 31a at the tip of the tool 31,
31b is a first region 50a surrounded by a dotted line in FIG.
It is positioned so as to contact.

Next, the compression pump 40 starts operating, and cutting water is jetted from the nozzle 40a to the work piece 50. After that, the ultrasonic vibration device 33 operates to generate ultrasonic vibration. This ultrasonic vibration is transmitted to the tool 31 after being amplified by the amplification horn 32. As a result, the tool 31
The abrasive grains existing between the cutting surfaces 31a, 31b at the tip and the workpiece 50 vibrate, and the conductive film 6 in the portion 50a in contact with the cutting surfaces 31a, 31b is scraped off. As a result, a groove is formed on the surface of the workpiece 50. The depth of the groove is detected by detecting the contact state between the tool 31 and the workpiece 50 by a strain sensor (not shown) or the like.
Then, when the depth of the groove reaches a preset depth, or when the processing time reaches the preset processing time, the ultrasonic vibration device 33 moves up (or the worktable 22 moves down). Then, the processing of the workpiece 50 is stopped.

Next, the work piece 50 is moved from the holding jig 21 to the work piece 50.
Is taken up and rotated by 180 °, and then placed on the holding jig 21 again. Then, the displacement tables 23, 34
Is operated, and the positioning of the tool 31 with respect to the workpiece 50 is performed. At this time, the cutting surface 31 at the tip of the tool 31
a and 31b are second regions 50b surrounded by a dotted line in FIG.
It is positioned so as to contact. Thereafter, in the same manner as above, the conductive film 6 in the second region 50b is scraped off.

FIG. 4 shows a dielectric resonance component obtained by the above processing. The dielectric resonance component shown in FIG. 4 has a portion 1 corresponding to the first and second regions 50a and 50b in FIG.
At f and 1g, a groove is formed, and the surface of the dielectric block is exposed to the outside in the groove. As a result, the conductor film 6 of FIG.
And one. That is, the ultrasonic cutting device 30
The conductive film 6 on the surface of the work piece 50 is partially scraped off by the
11 is formed. The degree of capacitance coupling between the input / output electrodes 10 and 11 and the inner conductors 7 and 8 is determined depending on the depth of the groove. That is, the deeper the groove, the more
The degree of capacitance coupling has increased. In other words, external Q
(Qe) became smaller as the groove became deeper. Note that one dielectric coaxial resonator may be formed in the dielectric block.

[0016]

According to the first aspect of the present invention, a part of the conductor film formed on the outer peripheral surface of the dielectric block is scraped off by using ultrasonic vibration, so that the conductor film is connected to the outer conductor by input / output. Since the electrodes are separated from each other, the process of forming the input / output electrodes is simplified, and the productivity is greatly improved. In addition, since the formation position and the formation pattern of the input / output electrodes can be arbitrarily changed after the formation of the conductor film, processing with a high degree of freedom can be performed.

[Brief description of the drawings]

FIG. 1 is an external view showing a configuration of an input / output electrode forming apparatus according to an embodiment of the present invention.

FIG. 2 is a view of the tip of the tool 31 shown in FIG. 1 as viewed from below.

FIG. 3 is an external perspective view illustrating a configuration of a workpiece before input / output electrode processing.

FIG. 4 is an external perspective view illustrating a configuration of a dielectric resonance component after input / output electrode processing.

FIG. 5 is a view showing a process of forming input / output electrodes in a conventional dielectric resonance component.

[Explanation of symbols]

 2, 3 ... inner conductor forming hole 6 ... conductor film 7, 8 ... inner conductor 9 ... outer conductor 11, 12 ... input / output electrode 20 ... table device 21 ... holding jig 22 ... processing table 23 ... displacement table 30 ... ultrasonic wave Cutting device 31 ... Tool 32 ... Amplification horn 33 ... Ultrasonic vibration device 40 ... Compression pump 50 ... Workpiece

Continued on the front page (72) Inventor Masaru Kojima 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto Murata Manufacturing Co., Ltd. (56) References JP-A-4-92503 (JP, A) US Patent 5162760 (US, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01P 11/00 H01P 1/205

Claims (1)

(57) [Claims] 1. An apparatus for forming an input / output electrode on an outer peripheral surface of a dielectric block in a process of manufacturing a dielectric resonator component having at least one dielectric coaxial resonator formed on the dielectric block. Holding means for holding a dielectric block having a conductor film formed on an outer peripheral surface thereof; ultrasonic vibration generating means for generating ultrasonic vibration; and a hollow portion for leaving an input / output electrode at a tip thereof.
Cage, wherein the cutting tool ultrasonic vibrations from the ultrasonic vibration generating means is transmitted, and by moving the dielectric block and / or said cutting tool, said at a predetermined position on the outer peripheral surface of the dielectric block Moving means for bringing the cutting tool into contact with the cutting tool; a part of the conductor film is scraped off from the dielectric block by vibration of the cutting tool, whereby the conductor film is input / output corresponding to the outer conductor and the hollow portion; An electrode forming device for a dielectric resonance component, wherein the device is separated from an electrode.