JP3062101B2 - Article loading container transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an article loading container transfer apparatus for transferring containers between a plurality of storage apparatuses capable of storing containers loaded with articles, the apparatus including a main body portion and wheels. In particular, it is advantageously used for transferring a board carrier having a burn-in board in a burn-in factory for semiconductor products.

[0002]

2. Description of the Related Art Burn-in tests are performed on semiconductor products such as integrated circuit devices (hereinafter referred to as "ICs") for screening for eliminating defective products from a manufacturing process at an early stage. The equipment for this test is usually an IC insertion / extraction machine for attaching / detaching a burn-in board to / from a board carrier (hereinafter simply referred to as a “carrier”) and inserting / exchanging an IC on the burn-in board, and a burn-in board equipped with the IC. A thermostat for accommodating the loaded carrier and performing an IC burn-in test, and a stocker with a buffer function to store the carrier in the middle and absorb the difference in the processing timing between the IC insertion / extraction machine and the thermostat. It is configured.

[0003] It is necessary to transfer a carrier between the accommodating devices including the IC insertion / extraction machine, the thermostatic bath and the stocker. However, conventionally, a person pulls out the carrier from the IC insertion / extraction machine and places it on an appropriate carrier. Use a transport vehicle such as a forklift to transport it to a constant temperature bath and put it in it.
Put the carrier on a fork from one of the two storage devices and pull it out
Such a method has been used that it is transported as it is and inserted into another storage device. However, in the former method, it is difficult to reload the carrier between the storage device and the transport trolley,
Further, there is no room for labor saving in the burn-in test.

In the latter method, a fork is placed under a carrier and lifted and inserted into a thermostat or the like. Therefore, the height of the thermostat or the like is raised by the size of the fork inserted under the carrier and the fork is lifted. In this case, the height of the fork must be set with a margin in consideration of the swaying of the fork, an increase in the height of the carrier due to the inclination of the fork, and the like. or,
Since the error of the stop position of the forklift is inevitable,
In order for the fork not to be accurately opposed to the storage device and to be inserted, it is necessary to allow a margin in the width direction of the device. As a result, there is a problem that the accommodation device becomes large. In particular, in a thermostat for burn-in, the size of the equipment is high because the cost of the equipment is high, and the cost increases. In addition, the capacity of equipment such as a heater and a blower is affected, and the thermal efficiency is reduced. Further, in the forklift system, remote operation and unmanned operation are difficult.

[0005]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems in the prior art, and makes it easy to transfer containers between storage devices, without increasing the size of the storage device for transfer. It is an object of the present invention to provide an article-loading-container transfer device capable of saving labor for loading work and easily performing remote operation or automation.

[0006]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to a method for transferring containers between a plurality of storage devices including a thermostatic bath capable of storing containers loaded with articles. An article loading container transfer device, comprising: a main body portion and wheels; and a roller structure provided in each of the plurality of storage devices. And a wheel having a plurality of rollers that are movably supported in one direction and the opposite direction so as to protrude from the main body portion in one direction and that can easily support the container in the direction. A support member, a movable body including a coupling portion coupled to the container, the movable body being movably supported by the support member in the direction, a first moving unit configured to move the support member, and a moving unit configured to move the movable body. 2 means of transportation Has, the roller structure is
When the container is transferred to any of the plurality of storage devices by the one including the main body portion and the wheels, the container is rotatably supported so as to movably support the container in the transfer direction. A plurality of fixed position rollers, and are axially supported together with the fixed position rollers so as to project outward from the support surface of the fixed position rollers so as to be inclined outward and to guide the containers outside the moving range of the container. having a guide ring provided rotatably, characterized in that.

[0007] said plurality of least diameter than the other ones of the inlet end of the be of a constant temperature bath該恒heating tank of the fixed position roller becomes large Nozomu
Good.

According to a first aspect of the present invention, there is provided an article loading container transfer apparatus, wherein the article is a plurality of burn-in boards on which semiconductor products are mounted, and the accommodating apparatus includes at least a plurality of burn-in apparatuses and a plurality of semiconductor product attaching / detaching apparatuses. Conveniently applied to what is configured. Further, in the article loading container transfer device according to the first aspect of the present invention, there is provided a driving means for driving the wheels, a traveling control means for controlling the driving means by a predetermined signal, the first moving means and the second moving means. Transfer control means for controlling the movement means to operate at a predetermined time can be provided.

[0009]

1 and 2 show an article loading container transfer apparatus to which the present invention is applied, the apparatus having a main body portion and wheels.
The of showing an example of the overall structure of the self-traveling board carrier transport system is an example (hereinafter referred to as "AGV"), 3 and 4 show an example of the structure of the board carrier loading portion. AG
V1 is a first part for moving the main body part 11, the wheels 12, the lower plate 2 as a support member, the upper plate 3 as a moving body, and the lower plate 2
It has a lower plate moving mechanism 4 as a moving means, an upper plate moving mechanism 5 as a second moving means for moving the upper plate 3, and the like, and accommodates a board carrier 6 (hereinafter referred to as "carrier 6") as a container. This is a device for transferring between a constant temperature bath 7 shown in FIG. 6 or the like which is a device and a burn-in device, a stocker 8 which is an intermediate storage device, and an IC insertion / extraction machine 9 which is a semiconductor product attaching / detaching device. The carrier 6 has a large number of burn-in boards 61 (see FIG. 9) on which ICs 61a, which are a large number of semiconductor products, are mounted.

As shown in FIGS. 3 and 4, the lower plate 2 includes a mounting plate 21, a linear guide 22 mounted on the mounting plate 21, and an intermediate plate mounted on the moving body. It is suspended and supported via 23. The linear guide 22 is movable in the X direction, which is one direction, and in the X 'direction, which is the opposite direction. As shown by the two-dot chain line in FIG. It can be protruded. The lower plate 2 is provided with a shaft support plate 24 extending in the XX ′ direction. By supporting the roller 25 with this plate and the intermediate plate 23, the carrier 6 is moved through the roller 25. It can be easily moved in any direction.

The lower plate moving mechanism 4 includes a motor 41 provided with a reduction gear portion 41a and fixed to the mounting plate 21, a pinion 42 fixed to the end of the output shaft of the motor 41, and fixed to the intermediate plate 23 in the XX 'direction. It is constituted by an extended rack 43 and the like, and can move the lower plate 2 in that direction.

The upper plate 3 is slidably fitted with a guide block 31 fixed to the upper plate 3 on a guide rail 27 fixed to the lower plate 2, so that the upper plate 3 is slidably fitted in the XX 'direction. It is movably supported. Further, as shown in FIG. 5, a claw 32 is provided as a connecting portion to be connected to the carrier 6.

The upper plate moving mechanism 5 includes a motor 51 provided with a reduction gear portion 51a and fixed to the upper plate 3, a pinion 52 fixed to the tip of the output shaft of the motor 51, and XX 'fixed to the lower plate 2.
The upper plate 3 can be moved in that direction together with the motor 51, the guide block 31, and the like.

The main body 11 is composed of the upper structure 11a and the lower structure 11b supporting the upper structure 11a. Inside the upper structure 11a, as shown in FIG.
Mechanism 13 as a driving means for driving the vehicle, a traveling control unit 14 as a traveling control means for controlling the same by a predetermined signal described later, and motors 41 and 51 constituting the up and down moving mechanisms 4 and 5 operate at predetermined times. A transfer control unit 15 as transfer control means for controlling the transfer is provided. An operation unit, a display, and the like are appropriately provided on the main body 11, and an antenna 1 for receiving a control signal is provided.
6, an AGV-side portion 10a of a spatial light transmitter for communicating with the traveling display lamp 17, the position sensor 18, the constant temperature bath 7, and the like to confirm the state thereof is provided. Although details of the traveling mechanism 13 are not shown, the traveling mechanism 13 includes, for example, a DC motor or a reduction gear driven by a battery. When the traveling mechanism 13 operates, the AGV 1 travels on a predetermined track according to an induction cable or the like laid on the floor.

FIG. 5 shows a structural example of the claw lifting mechanism. Claws 32
May be capable of coupling and uncoupling the carrier 6 by an appropriate mechanism capable of locking and unlocking without using a driving source. In this embodiment, the claw 32 is formed by using a motor.
The mechanism which raises and lowers is used. The pawl elevating mechanism 33 includes a mounting plate 34 fixed to the upper plate 3, a motor 35 mounted on the upper plate 3 and having a reduction gear portion 35a, an intermediate pin 36 fixed to a tip of an output shaft thereof, and rotatably mounted on the intermediate pin 36. Roller 37, an elevating plate 38 having an elongated hole 38a in which the roller 37 is movably fitted in the horizontal direction, and a mounting plate 3
4, a linear guide 39 for guiding the lifting plate 38 in the lifting direction, a connecting member 40 connecting the lifting plate 38 and the claw 32, and the like. The claws 32 move into and out of the holes 6 a of the carrier 6.

In this example, as shown in FIG. 1B, the lower plate 2 and the like are provided in two upper and lower stages so that the carrier 6 can be mounted on the AGV 1 in two upper and lower stages. AGV
It is also possible to use a single carrier part and make it a structure that can be raised and lowered. In that case, the above-described claw lifting mechanism 33 is omitted,
The claw 32 can be raised and lowered by using the lifting mechanism of the carrier, and can be fitted into and removed from the hole 6a of the carrier. In addition, when the carrier mounting portion such as a thermostat is provided in one stage, the AGV carrier may naturally be provided in one stage.

FIG. 6 shows a configuration example of a part of an IC burn-in facility using the AGV 1 of the present invention. This equipment includes one AGV 1, 30 thermostats 7 (only a part is shown in the figure), 6 stockers 8 and 7 IC insertion / extraction machines 9
Are arranged in parallel, and a computer 100 and the like arranged in the operation control room are added thereto. In this system, a maximum of 144 carriers 6 are used per line. Computer 100 is an AG
V1 is composed of a plurality of personal computers connected to the thermostatic chamber 7 and the IC insertion / extraction machine 9 wirelessly or by wiring, and manages the operation and operation schedules of each and issues operation commands to each. The AGV 1 travels on a predetermined track according to the command. For each device of the thermostat 7, the stocker 8, and the IC insertion / extraction machine 9, a position indicator (not shown) for indicating the position of the device itself or on the track of the AGV is provided. The AGV 1 stops at that position when the position sensor 18 mounted on the AGV 1 counts and runs the position display and detects the count value received at the time of departure.

FIG. 7 shows a part of the outer shape of a thermostat and the positional relationship between them and the AGV. FIG. 8 shows a structural example of the roller portion. FIG. 9 shows the arrangement of the burn-in board in the thermostat.
FIG. 10 shows a part of the burn-in board and the shape of the connector attaching / detaching claw. The constant temperature bath 7 has a burn-in board 61.
Are housed in two rows and two rows, and a test room 73 surrounded by a heat insulating wall 71 and a door 72 is provided with a blower, a heater, etc. (not shown) for circulating hot air therein, and is used for a burn-in test. It has a normal structure, but includes a roller structure 74 for supporting the carrier 6 and a connector insertion / extraction mechanism 75, and furthermore, the door 72 is an automatic opening / closing door including a retractable armored door, a sliding door, and the like. It is a device capable of automatic operation. Also, corresponding to the AGV side portion 10a of the spatial light transmitter, a space for interacting with the AGV 1 about a state related to transfer of the carrier such as opening and closing of a door, presence / absence of the carrier 6 in the test chamber, insertion / removal of a connector, and the like. It is provided with a thermostat side portion 10b of the optical transmitter.

The roller structure 74 includes a plurality of rollers 74a and guide rings 74b (not shown in FIG. 7 (b)) provided on each side as a plurality of rollers . And a supporting plate 74d (see FIG. 8) for supporting this, and fixedly supporting the shaft by being fitted thereto and attached to a structure of a thermostat (not shown). The roller 74a is provided with a bearing (not shown).
Even when the carrier 6 is mounted, the resistance torque is small and the rotation is easy. Guide ring 74b is also in contact with roller 74a.
Both are rotatably supported by a shaft 74c . Guidelin
The outer peripheral portion of the roller 74b is outward from the support surface of the roller 74a.
The carrier 6 can be guided
It has become so. Among the rollers 74a, the one at the inlet end of the thermostat has a larger diameter than the other rollers. The constant temperature bath roller 74a and the AGV roller 25 are designed to have the same height. However, if the diameter of the constant temperature bath entrance roller is increased as described above, the constant temperature bath roller becomes
Even at a position slightly higher than the V roller, it is possible to reduce the impact force received by the carrier 6 transferred from the AGV to the constant temperature bath.

As shown in FIG. 9, the burn-in board 61 has an edge 61b to be inserted into and removed from an edge connector 76 provided on the back side of the thermostat 7, and an IC mounting socket 61c connected to the edge 61b by printed wiring. ing. The edge connector 76 is mounted on a connector mounting rod 77 fixed to a structure of a thermostat, and is electrically coupled to a relay board 200 connected to a driver board or a test board (not shown) for a burn-in test. . With such an arrangement, the IC mounted on the IC socket 61c is
C61a is connected to a driver board or the like.

The connector insertion / extraction mechanism 75 is provided at the back of the thermostat 7. The burn-in board 61 is shown in FIG.
As shown at 0, a frame 61d and a hole 61e which are also used for connector insertion / removal are provided on both sides on the back side. The insertion / extraction mechanism 75 includes a claw member 75a that is moved in a square shape by a driving device (not shown). The claw member rises, the claw portion 75a-1 enters the hole 61e, and the edge thereof is hooked to the arrow. By pulling in the direction A, the edge 61b is inserted into the edge connector 76, lowered and moved in the direction of arrow B to return to the original position, and by further moving from that position in the direction of arrow B, the distance between the claws is reduced. Groove portion 75a-2 presses the frame 61d, and operates to pull out the edge from the edge connector. With the above configuration, the constant temperature bath 7 can be automatically operated.

The stocker 8 is also a device usually used in the IC burn-in step, and has a two-stage, multi-row carrier loading space like the thermostat 7, although not shown. The stocker 8 has a function of temporarily storing the carrier 6 and reporting the presence of the carrier to the computer 100. or,
It has a stocker-side portion of the spatial light transmitter for transmitting the presence / absence of a carrier and the like corresponding to the AGV side portion 10a of the spatial light transmitter. The roller device has the same structure as that of the thermostat.

The IC insertion / extraction machine 9 is a device having a normal structure used for burn-in of an IC. As shown in FIG. 11, the carrier 6 can be stacked in two stages, and although not shown, the carrier 6 is disposed adjacent thereto. It has a space to move and go up and down. For this reason, the carrier at each stage is
Further, the carrier in the elevating part can be moved laterally at each stage. Then, while the carrier descends or ascends in the adjacent space, the burn-in boards are inserted and removed one by one from here on, the IC that has completed the burn-in test is removed from the IC socket, and a new IC is mounted. This device usually has a function of classifying the quality of burned-in ICs. Note that the IC insertion / extraction machine 9
Also, an IC insertion / extraction machine side portion 10c of the spatial light transmitter for transmitting the presence or absence of a carrier and the like is attached to the AGV side portion 10a of the spatial light transmitter.

FIG. 12 shows a configuration of an AGV control system in the burn-in facility as described above. The control system of AGV is
An antenna 16 for receiving an operation command signal transmitted from the computer 100;
Control unit 14, which controls the traveling of the vehicle, and in connection with this, the transfer control which also controls the driving of the motor 41 for moving the lower plate, the motor 51 for moving the upper plate, and in this example, the motor 35 for moving the claw up and down. The unit 15 includes an AGV-side part 10a of the spatial light transmitter and the like. On the burn-in equipment side, a command from the computer 100 is transmitted to the constant temperature bath 7 and the IC insertion / extraction machine 9, and the operation state and the loading state of the stacker 8 and these are fed back to the computer 100 as necessary.

The AGV to which the present invention is applied as described above is used in a burn-in facility as follows. For example, when the burn-in test is completed in any one of the thermostats 7i (FIG. 6) and the door 72 is automatically opened, the computer 100
Recognizes this and sends a traveling command to AGV1. AG
V1 receives this with the antenna 16 and operates the traveling mechanism 13 via the traveling control unit 14. Thereby, AGV1
Travels while counting the position display according to the traveling trajectory indicated by the arrow, and stops at that position when the count value of the position display of the thermostat 7i is detected.

In the thermostatic chamber 7i, the claw member 75a shown in FIG. 10 is moved in the direction of arrow B by the connector insertion / extraction mechanism 75 shown in FIG. The edge 61b of the burn-in board 61 is pulled out from the edge connector 76, and the carrier 6 can be taken out of the thermostat. AGV1
Stops the running, the AGV part 1 of the spatial light transmission device
The transfer control unit 15 drives and controls the motors that constitute the transfer mechanism while performing a dialog such as confirmation of necessary items regarding carrier transfer between the constant temperature bath 7i and the constant temperature bath 7i. Is transferred to the AGV1 side.

The transfer operation includes a claw moving operation by moving the lower plate and the upper plate forward, a claw raising operation, and a carrier retracting operation by retracting the upper plate and the lower plate. First, the motor 41 is driven to rotate the pinion 42, and the rack 43 engaged with the pinion 42 is sent to move the lower plate 2 and the roller 25 supported by the lower plate 2 along the linear guide 22, and project from the main body 11 of the AGV. Stop at a fixed position. This stop position is determined by controlling the rotation speed of the motor 41 or detecting a position sensor such as a limit switch or an optical sensor.

As a result, the lower plate 2 is supported in a protruding state by the linear guide 22, and the roller 25 also protrudes together with the lower plate to the position shown by the two-dot chain line (FIGS. 3 and 7 (FIG. 7)).
Shows the state when the carrier 6 is transferred from the AGV 1 in the direction of the thermostatic bath 7, but also when the carrier 6 is transferred from the thermostatic bath to the AGV, the lower plate is in the same position). As a result, the distance between the roller 74a of the thermostat 7 and the roller 25 of the AGV is reduced (FIG. 7), and the carrier 6 can be transferred. When the lower plate 2 is moved so as to protrude from the main body portion, the transfer of the carrier 6 can be performed easily and safely.

Next, the motor 51 is driven to rotate the pinion 52, and the pinion 52 is engaged with the rack 53 fixed to the lower plate 2, whereby the pinion 52, the motor 51 and the upper plate 3 to which these are attached are lowered. It moves relatively to the plate 2. The upper plate 3 is moved in the X direction by a guide block 31 fixed to the upper plate 3 being slidably guided by a guide rail 27 fixed to the lower plate 2, and the claw 32 attached to the distal end thereof is moved downward. When it reaches a predetermined position protruding from the plate 2, it stops.

The stop position of the upper plate 3 has to be a position where the position of the engaging hole 6a of the position and the carrier of the pawl 32 are matched. For this purpose, a method can be used in which an appropriate position sensor such as a limit switch or an optical sensor is provided on the AGV side and the carrier 6 side, and the sensor is turned on when the claw and the engagement hole match. . However, AGV
1 and constant temperature bath 7 and carrier 6 in constant temperature bath
Is substantially constant, the engagement hole 6a is made slightly larger, and the position of the claw 32 and the carrier engagement hole 6a are adjusted.
The upper plate 3 may be moved by a predetermined fixed distance so that the position of the upper plate 3 substantially coincides with the position of the upper plate 3.

As described above, by projecting the lower plate 2 from the main body portion 11 and further projecting the claws 32 from the lower plate 2 in the direction of the carrier, the claws 32 can be connected to the AGV as shown by a two-dot chain line in FIG. 7 protrudes from the main body of the carrier, and the claw 32 is positioned below the engagement hole 6a of the carrier as shown by a two-dot chain line in FIG. The state is shown in FIG.
The claw 32 is also in the same position when transferring to the GV). As a result, the claw 32 and the carrier 6 can be easily engaged.

In the above-described claw moving operation, the upper plate is advanced after the lower plate is advanced. However, these are advanced in parallel, or the lower plate is advanced after the upper plate is advanced first. You may use the method which makes it do.

When the pawl 32 matches the engagement hole 6a, the motor 5
When the motor 1 stops, the motor 35 shown in FIG. 5 is driven to rotate the intermediate pin 36 attached to the output shaft thereof, and the roller 37 attached thereto is moved upward by 1 as indicated by the arrow.
By this rotation and the guide by the linear guide 39, the lifting plate 38 is raised to the position indicated by the two-dot chain line just above the elongated hole 38a by this movement, and the claw 32 is raised accordingly, and the carrier 6 Insert into the engaging hole 6a. Thereby, the claw and the carrier are engaged, and the carrier can be pulled out of the thermostat.

The operation of pulling out the carrier 6 is an operation opposite to the operation of feeding the claws 32 described above. That is, the motor 51 is rotated in the reverse direction, the claw 32 and the carrier 6 locked thereto are pulled onto the lower plate 2, and the motor 41 is rotated in the reverse direction to move the lower plate 2 to the A position.
Pull into the GV. Also at this time, the respective movement stop positions are determined by the number of rotations of the motor, appropriately provided sensors, and the like.

With the above operation, the step of transferring one carrier from the thermostat to the AGV is completed. Since carriers can be loaded in the upper and lower stages on the AGV 1, normally two upper and lower carriers are transferred simultaneously. However, in consideration of the reaction force applied to the AGV when the carrier is transferred, the transfer may be performed one by one while maintaining the stability of the AGV.

When the AGV 1 completes the mounting of the two carriers 6, the traveling control unit 14 causes the AGV 1 to travel again, and
The GV stops at the position of, for example, the IC inserter / extractor 9i instructed by the computer 100 along a predetermined track (FIG. 6). Such movement and stop are performed in the same manner as in the case of the thermostat. When the AGV stops, the AGV
By the same operation as the claw moving operation at the time of transfer to the V, the claw coupled with the carrier is advanced to above the IC insertion / extraction machine. However, in this case, the lower plate 2 is always advanced first, and then the claw and the carrier together with the upper plate 3 are advanced.

Also in this case, as shown in FIG.
, The roller 25 on the AGV side projects to the position shown by the two-dot chain line and bridges the roller 91 on the IC insertion / extraction machine 9, so that the carrier 6 can be easily and safely and securely transferred onto the IC insertion / extraction machine. When the transfer of the carrier is completed, the motor 35 is driven to lower the claw 32, and the claw is pulled out from the engagement hole 6a of the carrier. Thereafter, the motor 51 is driven to retract the upper plate, and then the motor 41 is driven to retract the lower plate, returning the pawl to the initial position.

[0038] In the IC insertion machine 9 i, first ones on one of the carrier stacked in two stages is lateral movement, one stage carrier stop of the burn-in board 61 stacked in multiple stages - down repeatedly lowering I do. At this time, at a certain position, the first-stage burn-in board is firstly pulled out of the carrier, and the IC 61a that has been mounted in the IC socket 61c (FIG. 9) and has been subjected to the burn-in test is removed from the socket, and a new IC to be tested is tested. Is attached to the socket.
At this time, the IC in which the defect is found is excluded before the burn-in test. The burn-in board equipped with the new IC is loaded on the carrier again. When the IC replacement of the first-stage burn-in board is completed, the carrier is lowered by one step, and the IC of the second-stage burn-in board is replaced in the same manner.

When the IC replacement of the burn-in boards of all stages is completed, the carrier is raised again and moved laterally so that it can be carried out to the thermostat for the next burn-in test.
When the processing of the upper carrier is completed, the lower carrier is moved laterally and the same processing is performed. In this case, the carrier rises one step at a time,
Exchange begins. When the carriers 6 are stacked in the upper and lower stages or when the exchange of the IC is completed, the IC inserter detects this and sends a signal to the computer 100.

In the thermostatic chamber 7i, two of the four-stage carriers are provided.
AGV1 has been carried out and two remain, so AGV1
In response to another command from the computer 100 or a predetermined operation sequence, the computer 100 is again moved to the constant-temperature bath 7i, and the remaining two carriers are transferred onto the AGV. The transfer at this time is also performed in the same manner as in the first two units.

For example, an IC replacement operation in an IC insertion / extraction machine is performed in about one hour, and a burn-in test in a constant temperature bath requires ten to several hours to several tens of hours. For this reason, the number of devices for burn-in equipment is determined in consideration of such differences and variations in use time, but the required time varies greatly depending on the type of IC, test content, and the like.
As shown in FIG. 6, there is provided a stacker 8 for temporarily storing a carrier subjected to a burn-in test or a carrier before the test.

For example, when two carriers are loaded on the IC insertion / extraction machine 9i, there is a possibility that a state where carriers are loaded on all the seven IC insertion / extraction machines may occur. In such a case, the carrier transferred from the thermostat is temporarily loaded on the stacker 8. The same applies to the case where there is no acceptable IC insertion / extraction machine when the first two carriers are pulled out from the thermostat. Although the stacker 8 does not have a door and does not have a heat insulating structure, the structure of the accommodation portion of the carrier is the same as that of the thermostat. Therefore, the transfer of the carrier between the stacker 8 and the AGV 1 is the same as the transfer between the constant temperature bath and the AGV, and the description of the transfer to the stacker is omitted.

At an appropriate time interval, a carrier loaded with a burn-in board on which a new IC is mounted is put into the constant temperature bath from which all the carriers have been taken out after the burn-in test has been completed. On the other hand, in the IC inserting / extracting machine 9, the IC replacement operation is always performed automatically, and the carrier having completed the replacement is directly transported to the constant temperature bath or, if there is no acceptable constant temperature bath, to the stacker 8. Will be accommodated. Therefore,
A carrier is transferred from the stacker 8 or the IC insertion / extraction machine 9 to the thermostat 7i. Such an instruction is transmitted from the computer 100.

The removal of the carrier from the stacker 8 or the IC insertion / extraction machine 9 is performed by the same method as that described for the constant temperature bath 7i. Thus, the transfer of the carrier mounted on the AGV 1 to the thermostat 7i is performed in the same manner as the method described in the transfer from the AGV 1 to the IC insertion / extraction machine 9i. In this case, although not shown in FIG. 11, as shown in FIGS. 7 and 8, the roller 74a in FIG.
Relative to 1, so that on both the outer guide ring 74 b is provided, be slightly misaligned carrier mounted on AGV relative to the roller position of the thermostatic chamber or the like, when the carrier enters is guided by the guide ring 74 b surely rides on the roller travels guided by also thereafter, it does not proceed to a direction inclined. Therefore, the transfer operation is easy, and the dimension in the width direction of the thermostat can be minimized.

In a factory having burn-in equipment as shown in FIG. 6, if it is assumed that two carriers loaded with a burn-in board with a new IC can be mounted every hour based on the IC insertion / extraction machine 9, Even if the most efficient operation of the apparatus without using the stacker 8 is performed, the AGV 1
Every hour, 72 carriers must be transferred between the IC insertion / extraction machine and the thermostat. In this case, the pace becomes one or more per minute, and if this operation is performed by a person using an appropriate transport vehicle as in the past, an extremely large number of workers are required. The number of vehicles will also increase, resulting in confusion and reduced efficiency.

When an unmanned forklift is used, the size of the thermostat is increased as described above, and the transfer time is lengthened by extra steps such as changing the direction of the vehicle and positioning the fork in the height direction. Further, the factory area needs to be greatly increased due to the fork operation space.
With the AGV of the present invention, it is easy to use with a minimum factory area,
Carriers can be transferred quickly, safely and reliably, and the above-described hard carrier transfer schedule can be executed. And since one AGV can handle many devices such as constant temperature baths, A
GV traffic becomes smoother, and the transfer work can be performed more efficiently.

On the other hand, if the AGV has only a carrier mounting space of a normal structure, and if a device for transfer is installed in a constant temperature bath or an IC insertion / extraction machine, each of these multiple devices is driven. Equipment must be provided. On the other hand, according to the present invention, a driving device for moving and elevating only needs to be provided in only one AGV, so that significant cost reduction can be achieved. That is, by combining the AGV of the present invention with a normal automation technology such as a thermostat, automation of high efficiency and high efficiency can be achieved at the lowest cost.

As described above, the AGV can be automatically driven, and the lower plate moving mechanism 4, the upper plate moving mechanism 5, and the claw elevating mechanism 33 can be automated to use the AGV in an automated IC burn-in facility. Very effective.
However, in a small-scale, non-automatic burn-in facility, or a factory for manufacturing other electric or electronic products, a device in which the operation of the AGV and the above-mentioned mechanisms are operated by a person or remotely from the machine may be used. . Even in this case, the lower plate and upper plate
The device for projecting from the main body portion, and hooking the claw to transfer the container such as the carrier can perform the transfer operation of the container easily and safely with higher efficiency than the conventional method.

[0049]

As described above, according to the present invention, according to the first aspect of the present invention, the main body of the article loading container transferring apparatus is provided.
Minutes and wheels (hereinafter, for example, "AGV")
The supporting member is supported so as to protrude from the main body portion in one direction so as to be movable in one direction, for example, in the forward direction and in the reverse direction as the opposite direction, and provided with first moving means for moving this. As a result, the support member can be advanced and projected from the main body. On the other hand, the moving body is supported by the supporting member so as to be movable in the same direction as the moving direction of the supporting member, and the second moving means for moving the moving body back and forth is provided. Can be relatively moved forward and backward. Further, the support member can support the container by a plurality of rollers so that the container can be easily moved forward and backward, and the moving body has a connecting portion to be connected to the container. In addition, the container loading device
The roller structure provided in the container device
Multiple supports that movably support the container in that direction when
It has a position roller.

As a result, for example, when the container is on the roller of the support member and the moving body and the container are connected, the roller is advanced together with the support member to protrude from the main body, and the AGV
When the container is opposed to the storage device, the support member is brought closer to the storage device by reducing the space inevitably generated between the storage device and the storage device, the moving body is advanced, and the container is further advanced on the support member. It can be transferred onto the fixed position roller of the storage device from the roller of the support member. In this case, the container support surface of the support member, the container support surface of the storage device, that is, the roller and the fixed position roller are substantially at the same level. Then, as described above, the rollers protrude and bridge the fixed position rollers, so that the container can be easily and safely and securely transferred onto the storage device. In this case, the roller structure portion of the storage device is provided rotatably by being axially supported together with the roller so as to project outward from the support surface of the fixed-position roller and to be able to guide the container outside the moving range of the container. When the container is transferred to a thermostat, even if the position of the container mounted on the AGV is slightly displaced, the container is guided by the guide ring when the container enters, so And will continue to be guided by this, and will not go diagonally. Therefore, the transfer operation is easy, and the dimension of the storage device in the width direction can be minimized.

On the other hand, when there is no container on the support member,
By moving the moving body by the same operation as described above, the container housed in the housing device and the connecting portion of the moving body can be connected. This connection can be made by various known methods such as a locking device. After the coupling, the container can be transferred from the storage device to the transfer device side by retreating the moving body and the support member.

According to such an apparatus, articles can be transferred between the storage apparatus and the transfer apparatus by one-way basic operation of moving the support member and the moving body in the same direction or the opposite direction. The transfer operation is extremely easy,
Safe, reliable and quick. In addition, since it is not necessary to move the support member and the moving body in different directions from the forward and backward movement directions, there is no need for a dimensional allowance in the height direction and the width direction of the storage device for such movement, and the device can be downsized. Can be. Furthermore, since these operations are simple, the operation of the moving means can be facilitated, labor can be saved, and the transfer device is suitable for remote operation and automatic operation.

If the end of the plurality of fixed position rollers on the entrance side has a diameter larger than that of the other rollers, the position of the fixed position rollers can be increased.
Also location rollers it becomes slightly higher than the rollers that includes a main body portion and the wheel, to reduce the impact force experienced by the container to be transferred to the fixed position roller side, making it possible to Noriutsuri container smoothly it can. In the invention of claim 1, when the article loading container transfer device is used in a burn-in facility having a plurality of burn-in devices and a plurality of semiconductor product attaching / detaching devices, such a burn-in facility requires extremely frequent and high efficiency. It is necessary to transfer goods between devices
Easy, safe, reliable and quick transfer operation as described above,
The ease of operation and suitability for remote operation and automatic driving are more effectively utilized.

[0054] Further, by driving the wheels in driving means, and control this by running control means, further the first moving means and the lever provided transfer control means for controlling the second moving means, burn-in apparatus and semiconductor products Automated attachment / detachment equipment by ordinary technology,
By adding a normal control technique to this, a burn-in facility that is easily automated can be realized. In addition, it is possible to improve the production efficiency, and to achieve unmanned or significant labor saving. In this case, the operation of the moving means and the second moving means is simple, so that a container on which the burn-in board is mounted can be quickly and reliably transferred, and a highly efficient and reliable burn-in test automation factory is realized. be able to.

If a drive unit or a control unit for transferring is provided in the burn-in device or the like itself, the number thereof becomes very large, and the total equipment cost becomes extremely high. Therefore, the wheels are driven by the driving means as described above, and the wheels are driven.
Controlled by a row control means, and further, a first moving means and a second moving means
Lever provided transfer control means for controlling the door, the automation cost of burn-in test equipment can be greatly reduced.

[Brief description of the drawings]

FIG. 1 shows an overall structure of an AGV as an example of an article loading container transfer device to which the present invention is applied, wherein (a) is a plan view and (b) is a front view.

FIG. 2 is a side view of the AGV.

FIG. 3 is a plan view showing a structure of a carrier mounting portion of the AGV.

FIG. 4A is a front view showing a structure of a carrier mounting portion of the AGV, and FIG.

FIG. 5 shows the structure of the claw elevating part of the AGV, and (a)
Is a plan view and (b) is a front view.

FIG. 6 is an explanatory diagram showing a configuration of a burn-in test facility using the AGV.

7A and 7B show a carrier transfer state between an AGV used in the burn-in test facility and a thermostatic chamber, and FIG.
Is a plan view and (b) is a side view.

FIG. 8 is a side view showing a structure of a roller portion of the constant temperature bath.

FIG. 9 is a plan view showing an arrangement of a burn-in board in a part of the constant temperature bath.

FIG. 10A is a perspective view of a connector insertion / extraction claw member of the constant temperature bath, and FIG. 10B is a perspective view showing a part of a burn-in board.

FIG. 11 is an AGV used in the burn-in test facility.
FIG. 6 is a side view showing a carrier transfer state between the IC and the IC insertion / extraction machine.

FIG. 12 is an explanatory diagram of a control system centering on an AGV in the burn-in test facility.

[Explanation of symbols]

1 AGV (present an article loading container transfer device
Body part to that a wheel) 2 lower plate (supporting member) 3 upper (mobile) 4 lower plate moving mechanism (first moving means) 5 upper moving mechanism (second moving means) 6 board carrier, Carrier (container) 7 Constant temperature bath (container, burn-in device) 9 IC insertion / extraction machine (container, semiconductor product attaching / detaching device) 11 Main body part 12 Wheel 13 Travel mechanism (drive means) 14 Travel controller (travel control means) 15 Transfer Loading control section (transfer control means) 25 rollers (plural rollers) 32 claws (joining section) 61 burn-in board (article) 74 roller structure section (roller structure section, article loading capacity)
Vessel transfer device) 74a rollers (multiple position roller) 74b guide ring 74c shaft X, X'one direction, the opposite direction of the

Claims (1)

(57) [Claims] 1. An article loading container transfer device for transferring a container among a plurality of storage devices including a thermostatic chamber capable of storing a container loaded with articles, the device having a main body portion and wheels. An article loading container transfer device having a roller structure provided in each of the plurality of storage devices, wherein the device including the main body portion and the wheels is configured to protrude in one direction from the main body portion. A supporting member having a plurality of rollers movably supported in a direction and a direction opposite thereto and capable of easily supporting the container in the direction, and a coupling portion coupled to the container, the supporting member moving in the direction. A moving body that is supported so as to be movable, a first moving unit that moves the supporting member, and a second moving unit that moves the moving body, wherein the roller structure unit includes the main body portion and wheels. On what you have A plurality of fixed position rollers the container is movably rotatably axially supported so as to support in a direction that is transferred to the container when it is transferred to one of said plurality of storage devices I, A guide ring protruding from the support surface of the fixed position roller so as to incline outward from the support surface of the fixed position roller, and being rotatably provided with the fixed position roller so as to be capable of guiding the container and supported by the shaft ; the a, cargo-loading container transfer device, characterized in that.