JP3017073B2 - Test method of line type environmental test equipment using each test module - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for conducting an electric current test on an electronic component such as a semiconductor while changing the environment such as temperature and humidity. To a test method that can be raised or lowered.

[0002]

2. Description of the Related Art As a conventional line type environmental test device, a pair of guide rails is laid on a vertically connected environmental test device and slidable in the axial direction in parallel with the guide rails. A pallet on which electronic components and the like are placed is axially moved at predetermined intervals in a shaft provided with a shaft rotatably supported in a circumferential direction, and protruding pieces arranged at predetermined intervals in the axial direction of the shaft. A system of which type is known (Japanese Utility Model Publication No. 5-228868, Japanese Utility Model Application Publication No. 59-1)
No. 76950). In such an apparatus, even when the temperature in the test chamber reaches the set temperature, the temperature of the electronic component does not rise or fall, so it is necessary to wait until the electronic component reaches the set temperature.

[0003]

However, in such a conventional line-type environmental test apparatus, in order to gain time, the apparatus must be longer in order to gain time because the electronic components travel at a predetermined speed by the transport means. There is an inconvenience that it must be done. In order to shorten the length of the apparatus, it is necessary to reduce the transport speed. However, in such a case, the number of electronic components that can be tested per unit time is limited, and there is a disadvantage that efficiency is poor. SUMMARY OF THE INVENTION The present invention has been made in view of the above-described drawbacks of the related art, and has as its object to provide a test method capable of reducing the length of a line without reducing the speed of a conventional transport unit.

[0004]

That is, the present invention provides an environmental test chamber covered with a heat insulating material, a transport means for transporting electronic components and the like installed in the environmental test chamber, and an environmental test chamber. A test device for conducting a conduction test of the electronic components and the like, a forwarding unit for forwarding electronic components and the like installed at a position (left or right or up and down position) separate from the environmental test chamber, and the environmental test A plurality of test modules comprising constant temperature air supply means for supplying air at a predetermined temperature to the chamber, an inlet lifter installed at an electronic component insertion port of the environmental test apparatus, and a transport connected to a terminal of the environmental test apparatus An outlet lifter that folds electronic components and the like from the means to the forwarding means, connects at least two or more test modules in series, and connects the inlet lifter and the outlet lifter to each terminal. A step of forming, when performing a current test at a temperature t _H higher than room electronic parts, etc., the temperature in the test module coupled to the plurality sets the temperature in the final module t _H, sequentially inlet side When the electronic component is heated by setting the set temperature of the other modules to be higher by 5 ° C. to 10 ° C. each time, and the electronic component is subjected to the energization test at a temperature lower than room temperature t _L , it is connected to the plurality. cooling the electronic components by setting the temperature in the test module the temperature of the final module the set temperature of the other modules toward the sequentially inlet side is set to t _L to 5 ° C. to 10 ° C. increments lower This is a test method of a line type environmental test apparatus using each test module composed of: According to a second aspect of the present invention, there is provided a shaft having a pair of guide rails in which the transport means of each of the test modules extends in the width direction of the module, and slidably and rotatably supported below the guide rails and having projecting pieces at predetermined intervals. A shaft having a pair of guide rails, a protruding piece provided at a predetermined interval slidably and rotatably supported below the guide rails, and a longitudinally extending shaft. A horizontal driving means for sliding in the direction and a rotation driving means for rotating the shaft are installed, and the guide rails and shafts of the modules and the entrance lifter are connected to each other, and the electronic components are intermittently arranged at predetermined intervals. This is a test method for a line type environmental test apparatus that is designed to move forward.

[0005]

In the apparatus according to the present invention, for example, three test modules for low temperature are connected in series. Since the guide rails and shafts of each module are manufactured independently, they cannot be linked. Therefore, the guide rails are connected together and the shafts are connected together. However, since the shaft driving means is not installed in each module, the inlet lifter and the outlet lifter are connected in series to drive the transporting means and the circulating means. In this state, the set temperature of the final test module is set to t _H , the set temperature of the adjacent test module is set to (t _H +5 to 10 ° C.), and the set temperature of the test module on the inlet side is sequentially increased by 5 to 10 ° C. After setting the temperature, the device is driven. Then, since the temperature inside the first test module is considerably higher than the set temperature t _H , the electronic components and the like in the test chamber are forced to rise in temperature, and are transferred to the next test module in a state where the temperature has risen to a certain extent. The transferred electronic components have a lower temperature in the test module by 5-10 ° C. than the former, so that
The temperature of the electronic component continues to rise with a somewhat moderate rate of temperature rise. And when it reaches the final test module, the electronic component becomes a state close to substantially set temperature, the temperature rise from the relationship set in the setting temperature t _H in the test module, it is possible to perform a current test without falling . The electronic component that has been subjected to the power-on test is returned to the direction of the entrance lifter via a circulating means provided at a position separate from the environmental test chamber.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the illustrated embodiments. In FIG. 1, 1a, 1b, 1
Reference numeral c denotes an environmental test module for high temperature (50 to 90 ° C.) connected in series, and an inlet lifter 2 and an outlet lifter 3 are connected to respective ends. As shown in FIG. 3, each test module 1a, 1b, 1c includes an environmental test room 6 covered with a heat insulating material 4 and a door 5, and a machine room 7 located thereunder. Partition plate 8
Is divided into an environmental test tank 9 and a constant-temperature air supply tank 10 through the air. Openings 13, 13 for communicating each test module are formed on both side walls 12, 12 forming the environmental test tank 9.
Is provided. A pair of parallel guide rails 14, 14 are provided in the environmental test tank 9.
A transport means including a pallet 15 for transporting electronic components and a shaft 16 having a projecting piece 17 for transporting the pallet 15 at a predetermined interval is provided thereon.
In the constant temperature air supply tank 10, an evaporator 18 of a refrigeration cycle is provided.
And a heating means 20 and a blower fan 22 are arranged in series, and communication ports 23,
Because of the opening 24, air at a predetermined temperature is blown from above the environmental test tank 9 and sucked from below.

[0007] In the machine room 7 below the environmental test chamber 6, a compressor 25, a condenser 26 and the like of the refrigeration cycle are arranged, and guide rails 27 and 28 as recirculating means are provided in parallel with the conveying means. Has been laid.

The driving of the transfer means is the same as that of the automatic transfer apparatus (Japanese Utility Model Application Laid-Open No. 59-176950) invented by the applicant of the present invention, and the shaft 16 slidably and rotatably supported by the bearing 30; The shaft 16 is connected to a horizontal air cylinder 32 installed in the inlet lifter 2 and a tip end of a piston of the cylinder 32, and the projecting pieces 17 are joined to the shaft 16 at predetermined intervals. It is configured to be able to move in the horizontal direction by a support member 34 that rotatably supports the shaft 16. Further, the rotation of the shaft 16 in the circumferential direction is performed by the support member 34.
The air cylinder 36 is rotatably supported by a member 38, and the tip of the piston of the air cylinder 36 is rotatably supported by a member 38 projecting at right angles from the shaft 16. The outlet lifter 3 is also provided with the same air cylinder and shaft as the above-described inlet lifter 2.
In the forwarding means, the pallets 15 are forwarded to the inlet lifter 2 side sequentially in a state of being connected in series. Therefore, no shaft is provided in the machine room 7 in each test module.

The guide rails 14 in each of the test modules 1a, 1b, 1c are connected so as to be aligned by the concave and convex engagement as shown in FIG. 6, and the shaft 16 of each test module and the lifter is axially moved. Flanges 39 are formed at the respective ends in order to slide and rotate in the circumferential direction.

As described above, the environmental test apparatus according to the present embodiment is assembled in the following procedure. That is, for example, as shown in FIG. 1, for example, the number of connected test modules for high temperature is determined, and the test modules are connected to each other in accordance with the determined number. Since the guide rails 14 and 14 of each test module and the shaft 16 are independent, as shown in FIG.
6 and 16 are connected to each other and configured to work together. Further, the test modules 1a, 1b,
An inlet lifter 2 and an outlet lifter 3 are connected to an electronic component insertion opening (opening 13) and a rear end of the front end of the electronic component 1c, respectively. Also, the guide rails 14, 14 and the shaft 16 of the inlet lifter 2 and the outlet lifter 3 are joined so as to interlock with those of the other test modules. As a result, each lifter and each test module are integrated and connected in series.

Next, when the temperature for conducting the electrical test of the electronic parts is 80 ° C., the set temperature of the final test module 1a is set to 80 ° C., and the set temperature of the test module 1b is set to 8 sequentially.
The temperature is set to 5 ° C. and the set temperature of the test module 1c is set to 90 ° C., and the temperature in each environmental test tank 9 is set to the set temperature. In this state, each test module 1a, 1b,
After turning on the switch of 1c and setting the temperature of the environmental test chamber of the module to a predetermined temperature, the pallet 15 on which electronic components at room temperature are mounted is guided from the inlet lifter 2 to the guide rails 14, 14.
When the pallet 15 is placed on the pallet 15, the horizontal air cylinder 32 in the lifter 2 advances in the axial direction of the shaft, and the protruding piece 17 that protrudes upright from the shaft 16. After moving forward by a predetermined stroke, the air cylinder 36 is driven to rotate the shaft 16 in the circumferential direction.
When the lock between the pallet 7 and the pallet 15 is released, the cylinder 16 is driven in this state to move the shaft 16 backward, and the air cylinder 36 is further driven to return the projecting piece 17 to the upright state, thereby returning to the original state. . Then, a new pallet 15 is set in the lifter 2, the same movement is performed on the shaft 16 again, and the pallet 16 is moved forward. This is because the test pieces 1a, 1b, 1
In order for the shafts 16 in c to move synchronously due to the connection, the protruding pieces 17 joined to the shafts 16 come into contact with the pallets 15 and advance the pallets 15 by a predetermined distance in the forward direction. As a result, each pallet 15 sequentially passes through the test modules at 90 ° C., 85 ° C., and 80 ° C., and as shown in FIG. 7, the temperature of the electronic components rises rapidly in the test module 1c, Module 1b
Then, the temperature gradually rises, and in the final test module, the temperature of the electronic component and the temperature of the test module become substantially the same. Therefore, an electric current test of the electronic component is performed in such a state.

The pallet 15 which has completed the energization test in the final module 1a is turned (moved downward) by the exit lifter 3, and the test modules 1a, 1b, 1
Through the guide rails 27 and 28 laid in the machine room 7 in the area c, backward movement is given intermittently in the direction of the entrance, so that the vehicle can be recovered from the entrance lifter 2. In this embodiment, the type of module is set to a high temperature. Conversely, when the set temperature is t _L (−20 ° C.) lower than room temperature,
The set temperature of the final test module 1a is set to −20 ° C., and the temperatures of the test modules 1b and 1c are sequentially set to −27 ° C. and −34 ° C.
The device is driven in a state set at ℃ to conduct an energization test. Then, the relationship between the temperature in the environmental test tank and the temperature of the electronic component is as shown in FIG. In this embodiment, the means for forwarding the pallets on which the electronic components and the like are mounted is configured to be installed in the machine room below the environmental test room. However, the present invention is not limited to this. It can be installed in any position above or below the environmental test chamber where possible.

[0013]

As described above, the energization test method using the assembled environmental test apparatus according to the present invention can shorten the line length and reduce the temperature of the electronic component to the target temperature as compared with the conventional one. Since the arrival time can be shortened, an efficient energization test can be performed in a compact environment.

[Brief description of the drawings]

FIG. 1 is a front view showing a state in which environmental test modules are arbitrarily connected in series.

FIG. 2 is a plan view of the apparatus of FIG.

FIG. 3 is a sectional view taken along line AA of FIG.

FIG. 4 is a schematic view showing a mechanism of the transfer device.

FIG. 5 is a perspective view of a transfer device.

FIG. 6 is a transparent front view showing a connection relationship between a guide rail and a shaft.

FIG. 7 is a time chart showing a state of a rise in the temperature of an electronic component when a current test is performed at a high temperature.

FIG. 8 is a time chart showing a state of a temperature rise of an electronic component when a current test is performed at a low temperature.

[Explanation of symbols]

 1a, 1b, 1c Environmental test module 2 Inlet lifter 3 Outlet lifter 4 Insulation material 5 Door 6 Environmental test room 7 Machine room 8 Partition plate 9 Environmental test tank 10 Constant temperature air supply tank 12 Side wall 13 Opening 14 Guide rail 15 Pallet 16 Shaft 17 Projecting piece 18 Evaporator 20 Heating means 22 Blowing fan 23, 24 Communication port 25 Compressor 26 Condenser 27, 28 Guide rail 30 Bearing 32 Air cylinder 34 Support member 36 Air cylinder 38 Member

Claims (2)

(57) [Claims] 1. An environment test chamber covered with a heat insulating material, a transport means for transporting electronic components and the like installed in the environmental test chamber, and a conduction test of the electronic components and the like arranged in the environmental test chamber. A testing device for, a recirculation means for recirculating electronic components and the like installed at a position separate from the environmental test chamber, and a constant temperature air supply means for supplying air at a predetermined temperature to the environmental test chamber. A plurality of test modules consisting of
At least two test modules are provided in an apparatus consisting of an inlet lifter installed at an electronic component insertion port of an environmental test apparatus and an outlet lifter that turns electronic components and the like from a transport means connected to a terminal of the environmental test apparatus to a forwarding means. a step of connecting an inlet lifter and outlet lifter to each terminal as well as coupled in series above, when performing a conduction test at a temperature t _H higher than room electronic parts or the like, the temperature in the test module coupled to the plurality The electronic component is heated by setting the temperature in the final module to t _H , and sequentially increasing the set temperature of the other modules by 5 ° C. to 10 ° C. toward the inlet side to lower the electronic component below room temperature. When conducting the current test at the temperature t _L , the temperature in the test module connected to the plurality is set to t _L in the final module, and the temperature is sequentially inputted. A method of testing a line-type environmental test apparatus using each test module, comprising the steps of cooling electronic components by setting the set temperature of another module lower by 5 ° C. to 10 ° C. toward the mouth side. 2. The transport means of each test module is constituted by a pair of guide rails extending in the width direction of the module, and a shaft slidably and rotatably supported below the guide rails and having protruding pieces at predetermined intervals. A shaft having a pair of guide rails and a protruding piece at a predetermined interval slidably and rotatably supported below the guide rails similarly to the conveying means provided on the module in the entrance lifter, and moving the shaft in the longitudinal direction. A horizontal driving means for sliding and a rotation driving means for rotating the shaft are installed so that the guide rails and shafts of each module and the entrance lifter can be connected to each other, and the electronic components advance intermittently at predetermined intervals. A test method for a line type environmental test apparatus using each of the test modules according to claim 1 configured as described above.