JP3007290B2 - Assembling type line type environmental test apparatus and assembling method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for conducting an electric current test on an electronic component such as a semiconductor while changing the environment such as temperature and humidity.

[0002]

2. Description of the Related Art As a conventional line type environmental test device, a pair of guide rails is laid on a vertically connected environmental test device and slidable in the axial direction in parallel with the guide rails. A pallet on which electronic components and the like are placed is axially moved at predetermined intervals in a shaft provided with a shaft rotatably supported in a circumferential direction, and protruding pieces arranged at predetermined intervals in the axial direction of the shaft. A system of which type is known (Japanese Utility Model Publication No. 5-228868, Japanese Utility Model Application Publication No. 59-1)
No. 76950).

[0003]

However, such conventional line-type environmental test apparatuses are not generally mass-produced, but are mostly individually produced in order to meet the requirements of the client. Therefore, it is inefficient to design and manufacture according to individual needs, and there is a disadvantage that a lot of time is required from order receipt to delivery. Therefore, an object of the present invention is to provide a device which can be standardized and can be assembled immediately upon request, in view of the drawbacks of the conventional technology.

[0004]

That is, the present invention provides an environmental test chamber covered with a heat insulating material, a transport means for transporting electronic components and the like installed in the environmental test chamber, and an environmental test chamber. A test device for conducting a conduction test of the electronic components and the like, a forwarding unit for forwarding the electronic components and the like installed at a position separate from the environmental test chamber, and a predetermined temperature with respect to the environmental test chamber. A test module for low-temperature, high-temperature and / or normal temperature, which is composed of a constant-temperature air supply means for supplying air, an inlet lifter installed at an electronic component insertion port of the environmental test device, and a terminal connected to the end of the environmental test device. And an exit lifter that turns electronic components and the like from the transporting means to the forwarding means. The transporting means of each of the test modules has a pair of guide rails extending in the width direction of the module, and slides and rotates below the guide rails. And a pair of guide rails and a predetermined slide slidably and rotatably supported below the guide rails, similarly to the conveying means provided in the module in the entrance lifter. A shaft having protruding pieces at intervals, a horizontal driving means for sliding the shaft in the longitudinal direction, and a rotation driving means for rotating the shaft are installed so that the guide rails and shafts of each module and the entrance lifter can be connected to each other. Is an assembled line type environmental test apparatus. The invention according to claim 2 is characterized in that the forwarding means has a pair of guide rails extending in the width direction of the test module, a pair of guide rails similar to the forwarding means provided on the module in the outlet lifter, and a lower portion of the guide rails. A shaft having projecting pieces that are slidably and rotatably supported at predetermined intervals, a horizontal drive unit that slides the shaft in the longitudinal direction, and a rotation drive unit that rotates the shaft are installed, and each of the modules and the entrance is installed. This is an assembled line type environmental test apparatus configured so that guide rails of a lifter can be connected to each other. The invention according to claim 3 relates to an assembling method of an environmental test apparatus, wherein the environmental test chamber is covered with a heat insulating material, a transport means for transporting electronic components and the like installed in the environmental test chamber, and an environmental test chamber. A test device for conducting an electrical current test of electronic components and the like disposed in the test chamber; a forwarding unit for forwarding an electronic component and the like installed at a position separate from the environmental test chamber; A test module for low temperature, high temperature and / or room temperature, comprising constant temperature air supply means for supplying air at a temperature, an inlet lifter installed at an electronic component insertion port of an environmental test device, and An outlet lifter that folds electronic components and the like from the connected transporting means to the forwarding means, wherein the transporting means of each of the test modules slides below the guide rails with a pair of guide rails extending in the width direction of the module. It is constituted by a shaft rotatably supported and having protruding pieces at predetermined intervals, and is slidably and rotatably supported below the pair of guide rails and the guide rails similarly to the transport means provided in the module in the entrance lifter. A shaft having protruding pieces at predetermined intervals, a horizontal driving means for sliding the shaft in the longitudinal direction, and a rotation driving means for rotating the shaft are provided, and the guide rails and shafts of each module and the entrance lifter are mutually connected. By connecting the modules for low temperature, normal temperature or high temperature as needed according to the specifications in the assembly type line type environmental test device configured to be connectable, and by connecting the transport means and the forwarding means of each module The step of making the shafts interlock, and the entrance lifter and the exit lift at the front end and the rear end of the combined module, respectively. Connecting the over, a further step of connecting the guide rail and the shaft of each lifter, assembling method comprising city.

[0005]

In the apparatus according to the present invention, since the test equipment modules are for low temperature, normal temperature, and high temperature, the modules are selected according to the order of the client and the modules are connected in series. The guide rail and shaft of each module are
These cannot be linked because they are manufactured independently. Therefore, first, the guide rails are connected together, and the shafts are connected together. However, since the shaft driving means is not installed in each module, the inlet lifter and the outlet lifter are connected to the front end and the rear end of the module connected in series, and the guide rail of each lifter is connected to the adjacent module. As well as the shaft. As a result, the guide rails become a series in a fixed state, and the shaft is connected to the horizontal and rotary drive means of the inlet lifter, so that it can slide in the axial direction and rotate in the circumferential direction Becomes Drive each module in this state,
After the temperature of the test chamber is set to a predetermined temperature, a pallet on which electronic components such as semiconductors are placed is set on the entrance lifter. Next, when the shaft is slid forward with the protruding piece upright, the pallet is held in place.When the protruding piece is retracted downward and slid backward, the pallet does not move and the pallet moves. Return to the starting position. When the next pallet is set in the inlet lifter and the shaft is rotated to set the protruding piece upright, the pallet can be moved again because the protruding piece also exists near the previous pallet. By repeating such a sliding and rotating operation of the shaft, the electronic components placed on the pallet can be subjected to an electricity test under the temperature and humidity conditions of each module. The pallet that has been subjected to the power-on test is moved to a different position (for example, in the left-right direction or upward or downward) at the exit lifter, and returned to the entrance lifter via the circulating means.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the illustrated embodiments. In FIG. 1, 1a, 1b, 1
c is for high temperature (50-90 ° C.) and normal temperature (25
C), low-temperature (-35 to 30 C) environmental test module, 2 is an inlet lifter, and 3 is an outlet lifter.
As shown in FIG. 3, each test module 1a, 1b, 1c includes an environmental test room 6 covered with a heat insulating material 4 and a door 5, and a machine room 7 located thereunder. It is partitioned into an environmental test tank 9 and a constant temperature air supply tank 10 via a partition plate 8. Side walls 1 forming environmental test tank 9
Openings 13, 13 for communicating the respective test modules are provided in 2, 2. A pair of parallel guide rails 14, 14, and a pallet 15 for transporting electronic components on the rails 14, 14 are installed in the environmental test tank 9.
And a shaft 16 having a protruding piece 17 for transferring the pallet 15 at a predetermined interval. In the constant temperature air supply tank 10, an evaporator 18 of a refrigeration cycle, a heating means 20 and a blower fan 22 are arranged in series, and communication ports 23 and 24 are opened at positions above and below the partition plate 8. Therefore, air at a predetermined temperature is blown from above the environmental test tank 9 and sucked from below.

[0007] In the machine room 7 below the environmental test chamber 6, a compressor 25, a condenser 26 and the like of the refrigeration cycle are arranged, and guide rails 27 and 28 as recirculating means are provided in parallel with the conveying means. Has been laid.

The driving of the transfer means is the same as that of the automatic transfer apparatus (Japanese Utility Model Application Laid-Open No. 59-176950) invented by the applicant of the present invention, and the shaft 16 slidably and rotatably supported by the bearing 30; The shaft 16 is connected to a horizontal air cylinder 32 installed in the inlet lifter 2 and a tip end of a piston of the cylinder 32, and the projecting pieces 17 are joined to the shaft 16 at predetermined intervals. It is configured to be able to move in the horizontal direction by a support member 34 that rotatably supports the shaft 16. Further, the rotation of the shaft 16 in the circumferential direction is performed by the support member 34.
The air cylinder 36 is rotatably supported by a member 38, and the tip of the piston of the air cylinder 36 is rotatably supported by a member 38 projecting at right angles from the shaft 16. The outlet lifter 3 is also provided with the same air cylinder and shaft as the above-described inlet lifter 2.
In the forwarding means, the pallets 15 are forwarded to the inlet lifter 2 side sequentially in a state of being connected in series. Therefore, no shaft is provided in the machine room 7 in each test module.

The guide rails 14 in each of the test modules 1a, 1b, 1c are connected so as to be aligned by the concave and convex engagement as shown in FIG. 6, and the shaft 16 of each test module and the lifter is axially moved. Flanges 39 are formed at the respective ends in order to slide and rotate in the circumferential direction.

As described above, the environmental test apparatus according to the present embodiment is assembled in the following procedure. That is, for example, as shown in FIG. 1, a combination of test modules is determined in accordance with the request of the client, and the test modules are connected in accordance with the combination. Since the guide rails 14 and 14 and the shaft 16 of each test module are independent, as shown in FIG. 6, the guide rails 14 and 14 are engaged with each other in a concave and convex manner, and the shafts 16 and 16 are connected and linked. To be configured. Further, the test modules 1a, 1 connected in series
An inlet lifter 2 and an outlet lifter 3 are connected to the electronic component insertion opening (opening 13) and the rear end at the front end of b and 1c, respectively. Also, the guide rails 14, 14 and the shaft 16 of the inlet lifter 2 and the outlet lifter 3 are joined so as to interlock with those of the other test modules. As a result, each lifter and each test module are integrated and connected in series.

In this state, each test module 1
After turning on the switches a, 1b, and 1c and setting the temperature of the environmental test chamber of the module to a predetermined temperature, the pallet 15 on which the electronic components are mounted is guided from the inlet lifter 2 to the guide rails 14,
When the pallet 15 is placed on the pallet 15, the horizontal air cylinder 32 in the lifter 2 moves forward in the axial direction of the shaft, and the projecting piece 17 that projects upright from the shaft 16. After moving forward by a predetermined stroke, the air cylinder 36 is driven to rotate the shaft 16 in the circumferential direction to release the engagement between the projecting piece 17 and the pallet 15, and in this state, the cylinder 32 is driven to move the shaft 16 backward. Then, the air cylinder 36 is further driven to return the protruding piece 17 to the upright state, thereby returning to the original state. Then, a new pallet 15 is set in the lifter 2, the same movement is performed on the shaft 16 again, and the pallet 16 is moved forward. This is because the projecting pieces 1 are
7, each test module 1a, 1
b, 1c projecting piece 1 joined to each shaft 16 to move synchronously from the connected relationship
7 comes into contact with the pallet 15 and advances the pallet 15 by a predetermined distance in the forward direction. As a result, each pallet 15 sequentially passes through the low-temperature module, the normal-temperature module, and the high-temperature module, and it is possible to perform an energization test in each test module.

The pallet 15 which has been subjected to the energization test in the high-temperature module which is the final module is placed on the exit lifter 3.
, And a backward movement is given intermittently in the direction of the inlet via guide rails 27 and 28 laid in the machine room 7 in each of the test modules 1a, 1b and 1c. It can be recovered from the inlet lifter 2. In this embodiment, the type of module is set to high temperature,
It is composed of three kinds of low temperature and normal temperature, but it is not limited to this. It can be composed of five kinds of ultra low temperature, low temperature, normal temperature, high temperature and ultra high temperature according to the purpose, or for high temperature and low temperature It is also possible to use a combination of the two types. In addition, the connection of each test module can be arbitrarily connected, and it is also possible to connect such as low temperature, normal temperature, high temperature, normal temperature, low temperature, normal temperature, and high temperature. Further, in the present embodiment, the machine room is configured to be disposed below the environmental test room. However, the present invention is not limited to this. It may be constituted by one installed at a position.

[0013]

As described above, the assembling type environmental test apparatus and the assembling method according to the present invention standardize the module as compared with the case where the module is made to order according to individual specifications as in the conventional apparatus. It can be mass-produced, and it can correspond to all specifications of the client.In addition, it is not necessary to lay guide rails and arrange drive shafts after creating an environmental test room, An environmental test device can be provided well.

[Brief description of the drawings]

FIG. 1 is a front view showing a state in which environmental test modules are arbitrarily connected in series.

FIG. 2 is a plan view of the apparatus of FIG.

FIG. 3 is a sectional view taken along line AA of FIG.

FIG. 4 is a schematic view showing a mechanism of the transfer device.

FIG. 5 is a perspective view of a transfer device.

FIG. 6 is a transparent front view showing a connection relationship between a guide rail and a shaft.

[Explanation of symbols]

 1a, 1b, 1c Environmental test module 2 Inlet lifter 3 Outlet lifter 4 Insulation material 5 Door 6 Environmental test room 7 Machine room 8 Partition plate 9 Environmental test tank 10 Constant temperature air supply tank 12 Side wall 13 Opening 14 Guide rail 15 Pallet 16 Shaft 17 Projecting piece 18 Evaporator 20 Heating means 22 Blowing fan 23, 24 Communication port 25 Compressor 26 Condenser 27, 28 Guide rail 30 Bearing 32 Air cylinder 34 Support member 36 Air cylinder 38 Member

Claims (3)

(57) [Claims] 1. An environment test chamber covered with a heat insulating material, a transport means for transporting electronic components and the like installed in the environmental test chamber, and a conduction test of the electronic components and the like arranged in the environmental test chamber. A testing device for, a recirculation means for recirculating electronic components and the like installed at a position separate from the environmental test chamber, and a constant temperature air supply means for supplying air at a predetermined temperature to the environmental test chamber. A test module for low temperature, high temperature and / or room temperature, an inlet lifter installed at an electronic component insertion port of an environmental test device, and electronic components from a transport means connected to a terminal of the environmental test device to a forwarding means. And a pair of guide rails extending in the width direction of the module, and slidably and rotatably supported below the guide rails and having projecting pieces at predetermined intervals. You A shaft having a pair of guide rails and a protruding piece at a predetermined interval slidably and rotatably supported below the guide rails, similarly to the conveying means provided in the module in the entrance lifter. Horizontal drive means for sliding the shaft in the longitudinal direction and rotary drive means for rotating the shaft are provided, and the guide rails of the modules and the inlet lifter and the shaft can be connected to each other. Assembling line type environmental test equipment. 2. A pair of guide rails extending in the width direction of the test module, and a pair of guide rails and a slide below the guide rails as in the case of the transfer unit provided in the module in the outlet lifter. A shaft having protruding pieces that are movably and rotatably supported at predetermined intervals, a horizontal driving unit that slides the shaft in the longitudinal direction, and a rotation driving unit that rotates the shaft are installed. The assembly line type environmental test apparatus according to claim 1, wherein the guide rails are configured to be connected to each other. 3. An environment test chamber covered with a heat insulating material, a transport means for transporting electronic components and the like installed in the environment test chamber, and a conduction test of the electronic components and the like arranged in the environment test chamber. A testing device for, a recirculation means for recirculating electronic components and the like installed at a position separate from the environmental test chamber, and a constant temperature air supply means for supplying air at a predetermined temperature to the environmental test chamber. A test module for low temperature, high temperature and / or room temperature, an inlet lifter installed at an electronic component insertion port of an environmental test device, and electronic components from a transport means connected to a terminal of the environmental test device to a forwarding means. And a pair of guide rails, each of which is transported in the width direction of the module, and a protruding piece that is slidably and rotatably supported below the guide rails. Yes A shaft having a pair of guide rails and a protruding piece at a predetermined interval slidably and rotatably supported below the guide rails similarly to the conveying means provided in the module in the entrance lifter. An assembly line type environment in which a horizontal driving means for sliding the shaft in the longitudinal direction and a rotation driving means for rotating the shaft are installed, and the guide rails of the modules and the inlet lifter and the shaft can be connected to each other. In the test apparatus, the steps of connecting the modules for low temperature, normal temperature, or high temperature as appropriate according to the specifications in series and the step of connecting the conveying means and the forwarding means of each module so that the shafts are linked to each other are combined. An inlet lifter and an outlet lifter are connected to the front and rear ends of the module, respectively, and a guide rail for each lifter And a step of connecting the shafts.