JP2979498B2 - Apparatus and method for measuring object to be measured - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for measuring an object to be measured, and more particularly, to an outer diameter and a length of a precision cutting shaft.
The present invention relates to a measuring device and a measuring method capable of efficiently and continuously measuring coaxiality.

[0002]

2. Description of the Related Art In general, there are various types of cut functional parts, such as a shaft for a printer, an ABS actuator part of an automobile, and a fuel injection device part. Depending on the application, high accuracy may be required for the outer diameter, length, coaxiality, and the like. For example, precision cutting shafts are required to have micron-order accuracy, so that careful attention is paid to quality control of manufactured parts.

Therefore, conventionally, the size of each part of the precision cutting shaft is measured and managed by using a magnifying projection apparatus or a method disclosed in Japanese Patent Application Laid-Open No. 7-19840.
For example, when using a magnifying projection device, first, a precision cutting shaft is mounted on a mounting table, and it is quadrupled by an optical system.
The cutting axis image enlarged by an appropriate magnification such as 2 times is projected on the projection surface. Next, the reference position of the measured portion of the projected image is adjusted to the reference line provided on the projection surface by the manipulator, and the outer diameter and length are measured by the scale extending from the reference line.

Japanese Patent Application Laid-Open No. 7-19840 discloses a method for measuring roundness. This is to measure the roundness by rotating the object to be measured around an axis while irradiating the object with a laser beam.

[0005]

However, in the former case, when the cutting shaft is formed in a round bar shape, the cutting shaft is mounted on a mounting table, and the cutting shaft moves when a measuring operation is performed by a manipulator. Since it is easy and lacks in stability, it takes a long time to adjust the reference position. Therefore, there is a problem that the measurement time per one becomes longer and that the measurement accuracy is low due to an error in a micron order depending on how the reference position is aligned with the reference line.

[0006] In the latter case, the roundness of each point in the axial direction of the object to be measured can be measured accurately and efficiently, but the coaxiality between the measurement points can be measured. Instead, the above-described measuring device must be used. For this reason, there is a problem that the measurement is performed twice and the measurement efficiency is impaired.

SUMMARY OF THE INVENTION An object of the present invention is to provide an apparatus and a method for measuring an object to be measured, which can measure an outer diameter, a length, a coaxiality, and the like accurately and efficiently with a relatively simple structure. Is to do.

[0008]

SUMMARY OF THE INVENTION Accordingly, in order to achieve the above-mentioned object, the present invention provides a mounting table on which an object to be measured is mounted, and an intermittent movement of the mounting table at a predetermined pitch in the vertical axis direction. A first driving means to be fixed to both sides of the movement locus of the mounting table.
A first sensor unit having a light emitting unit and a light receiving unit disposed thereon, a second sensor unit having a light emitting unit and a light receiving unit disposed on both sides of the movement locus of the mounting table and at a different height from the first sensor unit; Moving the second sensor means in the horizontal axis direction.
A driving unit, a third driving unit connected to the mounting table and rotating the mounting table around an axis, and first, second, and second appropriately selected.
Control means for measuring the measured amount of the measured object by calculating based on output signals from the first sensor means and / or the second sensor means obtained with the driving of the third driving means; Output means for outputting the calculated data of (1). The second invention of the present invention is that the output means is a display device such as a liquid crystal display or a CRT display and / or a printing device. It is characterized by the following.

According to a third aspect of the present invention, there is provided a mounting table on which an object to be measured is mounted, first driving means for intermittently moving the mounting table at a predetermined pitch in the longitudinal axis direction, and A first sensor unit having a light emitting unit and a light receiving unit disposed on both sides of the movement locus, and calculating an outer diameter based on an output from the first sensor unit
And a control means for measuring, wherein the light transmitted from the light emitting part to the light receiving part in the first sensor means is set to be substantially larger than the outer diameter of the measured object. The light transmitted from the light emitting section to the light receiving section is formed into a beam, and scanning is performed in a range wider than the outer diameter of the measured object.

In a fifth aspect of the present invention, a step of setting an object to be measured on a mounting table, a step of intermittently moving the mounting table at a predetermined pitch in a vertical direction by a first driving means, Outputting the outer diameter sampling signal of the object to be measured from the first sensor means in connection with the intermittent movement, measuring the outer diameter by calculating based on the sampling data; Outputting the data of the first object under test output from the first sensor means in connection with the intermittent movement of the mounting table. The outer diameter data calculated / measured in the above is used as master data, and when measuring the outer diameter of the second object to be measured, a measurement point of a portion of the master data having a small change in outer diameter is measured. Is the outer diameter measurement point of the first DUT The seventh aspect of the present invention is characterized in that the standard width is set prior to the execution of measurement at a set measurement point set based on the master data. It is characterized in that it is determined whether or not the result of measuring the outer diameter of the object to be measured falls within the standard width.

An eighth invention of the present invention provides a method for setting an object to be measured on a mounting table, a step of intermittently moving the mounting table at a predetermined pitch in a vertical axis direction by a first driving means, Outputting the outer diameter sampling signal of the object to be measured from the first sensor means in connection with the intermittent movement; calculating based on the sampling data; and determining the outer diameter changing portion from the calculation result. Positioning the second sensor means at a portion corresponding to the outer diameter changing portion by the second driving means, and intermittently moving the mounting table at a predetermined pitch in the vertical axis direction by the first driving means; Outputting the sampling signal of the length of the object to be measured (width between portions where the outer diameter changes) from the second sensor means in connection with the intermittent movement; and calculating the length based on the sampling data. To The ninth invention is characterized in that it comprises a step of measuring the length of the first object to be measured output from the second sensor means in connection with the intermittent movement of the mounting table. When the length data calculated / measured in the above is used as master data and the length of the second object is measured, the measurement point of a portion of the master data where the change in the outer diameter is small is small. Is set coarsely as compared with the length measurement point of the first DUT. According to a tenth aspect of the invention, the measurement of the set measurement point set based on the length master data is performed. By setting a standard width in advance, it is characterized in that it is determined whether or not the length measurement result of the second DUT falls within the standard width.

An eleventh aspect of the present invention provides a method of setting an object to be measured on a mounting table, and a step of intermittently moving the mounting table at a predetermined pitch in a vertical direction by a first driving means. Outputting an outer diameter sampling signal of the object to be measured from the first sensor means in connection with the intermittent movement;
Calculating the outer diameter based on the sampling data, measuring the outer diameter based on the result of the calculation, and determining the outer diameter of the second sensor by the second driving means. Positioning the mounting table at a portion corresponding to the changed portion; and intermittently moving the mounting table in the longitudinal direction at a predetermined pitch by the first driving means. Outputting a sampling signal of the length (width between portions where the outer diameter changes), calculating the length based on the sampling data, and measuring the outer diameter and length data. Outputting the data, and sequentially measuring the outer diameter and the length of the object to be measured.

In a twelfth aspect of the present invention, a step of setting an object to be measured on a mounting table and a step of determining first and second measurement positions for measuring an outer diameter of the object to be measured are provided. Moving the mounting table by the first driving means so that the first sensor means is located at the first measurement position of the object to be measured; and in this state, intermittently moving the mounting table by the third driving means. Rotating the step, calculating the outer diameter based on the outer diameter sampling signal at the first measurement position output from the first sensor means in connection with the intermittent rotation, and measuring the outer diameter. Is moved in the vertical axis direction to search for an outer diameter portion that is the same as or within a predetermined range as the outer diameter measurement data, and the outer diameter of the searched portion (third measurement position) is measured. Together with the first and second Determining the center at the measurement position of the above, and moving the mounting table in the vertical axis direction by the first driving means so that the first sensor means is located at the second measurement position of the object to be measured. At the third
A step of intermittently rotating the mounting table by the driving means, and measuring the outer diameter and the center based on the outer diameter sampling signal output from the first sensor means in connection with the intermittent rotation; And a step of calculating and measuring a shift amount of the center of the second measurement position from an axis connecting the centers of the first and third measurement positions.

[0014]

According to the above arrangement, the mounting table on which the object to be measured is set is intermittently moved in the vertical direction at a predetermined pitch by the first driving means. An outer diameter sampling signal of the object to be measured is output, and the outer diameter is measured by calculating based on the sampling data, and the measured data is output to output means.
In particular, when the outer diameter data is used as master data, when measuring the outer diameter of the second DUT, a measurement point of a portion of the master data having a small change in outer diameter is set as a second point. The outer diameter measurement of the second DUT can be efficiently performed by roughly setting the outer diameter measurement point of the first DUT. In addition, by setting the standard width before performing the measurement at the set measuring point set based on the master data, the outer diameter measurement result of the second DUT falls within the standard width. Can be automatically determined.

Further, a portion where the outer diameter changes is determined from the calculation result based on the above-described outer diameter sampling data, and the second driving means positions the second sensor means at a portion corresponding to the outer diameter changing portion. After that, the mounting table is intermittently moved in the vertical axis direction at a predetermined pitch by the first driving means, and the length of the object to be measured (the portion where the outer diameter is changed) is transmitted from the second sensor means in connection with this intermittent movement. The width can be measured by outputting a sampling signal and calculating based on the sampling data. In particular, if the outer diameter measurement and the length measurement are docked, the initial data can be effectively used.

After determining the first and second measurement positions for measuring the outer diameter of the object set on the mounting table, the first sensor means is moved to the first measurement position of the object. In this state, the mounting table is rotated once by the third driving means, and the outer diameter is measured by calculating based on the outer diameter sampling signal output from the first sensor means. The outer diameter portion within the same or a predetermined range as the data is searched, the outer diameter of the portion (third measurement position) is measured, the center at the first and third measurement positions is obtained, and the second measurement position is further obtained. The first sensor means is located at the first position, the outer diameter and the center are measured based on the outer diameter sampling signal output from the first sensor means in relation to the rotation, and the axis connecting the centers of the first and third measurement positions is measured. Deviation of the center of the second measurement position from the line It can be measured concentricity by calculating.

[0017]

1 to 4 show an embodiment of the present invention.
This will be described with reference to FIG.

Referring to FIG. 1, an apparatus according to the present invention includes, for example, an input section A, a control section B for performing various operations, storage, and instructions based on an input signal from the input section A; An output unit C for displaying output data of B and a driving unit D driven based on a control signal from the control unit B are provided. Each will be described in detail later,
The input section A includes a first sensor section (first sensor section) 6, a second sensor section (second sensor section) 7, a third sensor section 8 for confirming return to origin, and an input section 9 such as a keyboard. It is composed of The control section B comprises an input interface Ba, control means Bb, and an output interface Bc. The output unit C is constituted by display means 10 such as a liquid crystal display and a CRT display, but can be replaced with a printing device or the like or used together. The driving unit D includes a first driving unit 33, a second driving unit 45, and a third driving unit 5.

Reference numeral 1 denotes a mechanism section mainly including an input section A and a drive section D in the above-described measuring apparatus. For example, a box-shaped base section 2, a vertical axis drive section 3, a horizontal axis drive section 4, ,
It comprises a rotation drive unit 5, a first sensor unit 6, and a second sensor unit 7, each of which is arranged in the base unit 2.

More specifically, the vertical drive unit 3 is provided upright on the base unit 2, and the housing 3 provided upright on the base unit 2 is provided.
1, a screw screw 32 disposed inside the housing 31 so as to be rotatable in a vertical direction, a first driving means 33 such as a stepping motor connected to a lower end of the screw screw 32, A movable block 34 which is screwed to the screw 32 and moves appropriately in the longitudinal direction based on the rotation thereof, and a pair of movable blocks 34 arranged on the front surface of the housing 31 for smoothing the movement of the movable block 34. It comprises a rail 35, a support 36 connected to the movable block 34, and a mounting table 37 rotatably supported by the support 36. The mounting table 37 is provided with a magnet (not shown) for adsorbing and fixing the workpiece W made of a magnetic material. The lower end of the mounting table 37 is connected to a rotation driving unit (third driving unit) 5 such as a stepping motor.

Further, the horizontal axis driving section 4 is mounted on the base section 2 and has a base 41 fixed on an upper portion of the base section 2;
A pair of rails 4 spaced apart above the base 41
2, a movable block 43 movably mounted on the rail 42, a screw screw 44 screwed to a part of the movable block 43, and a stepping motor connected to one end of the screw screw 44. Second driving means 45 such as
It is composed of

Further, the first sensor unit 6 is fixed to the longitudinal axis driving unit 3. For example, a pair of support bases 61 fixed to respective side surfaces of the housing 31 and both sides of the movement locus of the mounting table 37 are provided. The first arranged on the support 61 located
And a sensor means 62. The first sensor means 62 is a light emitting unit 63A such as a laser diode.
And a light receiving section 63B, and the light from the light emitting section 63A is configured to be radiated to the entire radial direction of the measured object using a polygon mirror or the like. The second sensor unit 7 is a U-shaped support 7 fixed on the upper part of the movable block 43.
1 and second sensor means 72 disposed on support members 71 located on both sides of the movement locus of the mounting table 37. The second sensor means 72 includes a light emitting section 73A and a light receiving section 73B, and light is incident on the light receiving section 73B through a hole having a diameter of 0.5 mm, for example.

Next, a method for measuring the outer diameter of the workpiece W will be described with reference to FIGS. First, as shown in FIG. 6, the first workpiece W is fixed to the mounting table 37 by magnetic attraction. When the measurement is started, the mounting table 37 moves toward the origin position, and the return to the origin position is completed by the operation of the third sensor means 8 such as a limit switch (step S1). After completion of the origin return, the mounting table 37 is intermittently moved by the first driving means 33 at a pitch of 0.05 mm in the vertical axis direction (the direction of the arrow shown in FIG. 6). Every time it stops, the outer diameter sampling signal of the first DUT W is input from the first sensor means 62 to the control section (control means Bb) B (step S2). The sampling data is calculated by the control section B to sort out a portion having a large or small change in the outer diameter, and to determine a position of the second DUT W based on these. Is determined (step S3). The measurement efficiency is improved by measuring a portion having a small change in the outer diameter at a pitch coarser than the 0.05 mm pitch, for example, a 2 mm pitch. Next, the measurement data from the control section B is input to the display means 10 and displayed (step S4). Next, it is determined whether or not the measurement of the set point determined in step S3 is performed on the second workpiece W (step S5). When the set point measurement is performed in this step, the process proceeds to step S6, and the measurement result is stored in the memory of the control unit B. When not performed, the measurement ends. Next, it is determined whether or not a standard width (tolerance) is set as an inspection / selection standard of the second DUT W to be subsequently measured (step S7). When the standard width is set, the process proceeds to step S8, and for example, ± 2 mμ is input by the input means 9. If the standard width is not set, step S
Proceed to 9 to execute set point measurement. That is, the mounting table 37 is sequentially and intermittently moved by the first driving means 33 to the set point for measurement determined in step S3, and the outer diameter is measured. Then, it is determined whether or not the measurement data of the second object W falls within the standard width set in step S7 (step S10). This determination result is displayed on the output means 10 (step S11), so that the quality of the second DUT W can be easily determined. When measuring the outer diameter, the measurement data of step S3 is used as a master data.
In addition to utilizing it as data for subsequent measurement, step S9
Can be used as master data.

Next, a method for measuring the length (width) of the workpiece W will be described with reference to FIGS. First, as shown in FIG. 6, the first workpiece W is fixed to the mounting table 37 by magnetic attraction. When the measurement is started, the mounting table 37
Moves toward the origin position, and the return to the origin position is completed by the operation of the third sensor means 8 such as a limit switch (step S31). After completion of the origin return, the mounting table 37 is intermittently moved by the first driving means 33 at a pitch of 0.05 mm in the vertical axis direction (the direction of the arrow shown in FIG. 6). At each stop, the outer diameter sampling signal of the first device under test W is sent from the first sensor unit 62 to the control unit (control unit B
b) Input to B (step S32). This sampling data is calculated by the control unit B, and the portion where the variation of the outer diameter is large (FIG. 6A) and the portion where the variation of the outer diameter is small (FIGS. 6B, 6C and 6D)
In addition, the position to be measured and the length measurement position of the second measured object W are determined based on these (Step S33). The measurement efficiency is improved by measuring the portion where the length change is small at a pitch coarser than the 0.05 mm pitch, for example, a 2 mm pitch. Next, after returning to the origin, the second driving means 45 moves the second sensor means 72 to the position shown in FIG. 6 and stops. In this state, the mounting table 37 is intermittently moved by the first driving means 33 at a pitch of 0.05 mm in the arrow direction shown in FIG. At this time, the second sensor means 7
2, a, b, c, d of the first DUT W shown in FIG.
The length sampling signal of the portion is input to the control section B and calculated (step S34). Note that an output signal shown in FIG. 8 is output from the second sensor means 72. Then, it is determined whether or not the measurement has been completed for all the measurement points of the first DUT W (step S35). If the measurement has been completed, the process proceeds to step S36. If not, the process proceeds to step S34. Return to Next, it is determined whether or not the measurement of the set point determined in step S33 is performed on the second object W (step S36). When the set point is measured in this step, the process proceeds to step S37 and the measurement result is transmitted to the control unit B.
The measurement is terminated if not performed. Next, it is determined whether or not a standard width (tolerance) is set as an inspection / sorting criterion of the second DUT W to be subsequently measured (step S38). If the standard width is to be set, the process proceeds to step S39, and the
Is input to the control unit B. If the standard width is not set, the process immediately proceeds to step S40 to execute the set point measurement. That is, the mounting table 37 is moved by the first driving means 33 to step S3.
The length of the portions a, b, c, and d shown in FIG. 6 is measured by sequentially and intermittently moving to the set point for measurement determined in step 3. Then, it is determined whether or not the measurement data of the second object W falls within the standard width set in step S38 (step S41). The result of this determination is displayed on the output means 10 (step S42).
Quality of the device under test W can be easily determined. When measuring the length, the measurement data of step S33 is used as a master data.
In addition to utilizing the data for subsequent measurements, step S4
0 data can be used as master data. If the length is measured continuously to the measurement of the outer diameter, the measuring operation can be efficiently performed.

Next, a method of measuring the coaxiality of the DUT W will be described with reference to FIGS. Fix it. When the measurement is started, the mounting table 37 moves toward the origin position, and the return to the origin position is completed by the operation of the third sensor means 8 such as a limit switch (step S51). After completion of the home position return, measurement positions for measuring coaxiality (first measurement positions NN,
It is determined whether the second measurement position PP has been input to the control unit B (step S52). When the input is completed, the process proceeds to step 53, and when the input is not completed, the process returns to step S52. When the input is completed, the first driving means 3
The mounting table 37 is moved in the longitudinal direction by the step 3, and the first sensor means 62 is positioned at the first measurement position N-N of the first DUT W. In this state, the third driving means 5
Thus, the mounting table 37 is intermittently rotated, for example, 1000 times at a minute equal angle, and is rotated 360 degrees (one rotation). At this time, for example, 1000 outer diameter sampling signals are output from the first sensor means 62, and the outer diameter and the center are measured by the control unit B (step 53). Subsequently, the same outer diameter portion as the measurement data is searched (Step S).
54) It is determined whether there is a position of, for example, ± 2 μm or less (step S55). If there is a position of ± 2 μm or less, the process proceeds to step S56; otherwise, the process proceeds to step S6.
Proceed to 1. As shown in FIG. 10, when the value is ± 2 μm or less at the MM portion (third measurement position), 1000 pieces of outer diameter sampling data are obtained at that position in the same manner as in step S53. The outer diameter and the center are measured (step S56). Next, the first measurement position N
A correction coefficient for the tilt angle of the object to be measured W is obtained from the outer diameter and the center data of -N and the third measurement position MM, and is corrected and converted (step S57). Next, the first driving means 33 moves the first sensor means 62 in the direction of the vertical axis so as to be located at the second measurement position PP, and stops. In this state, the mounting table 37 is moved by the third driving means 5 to step S53.
Is rotated intermittently in the same manner as
2 outputs an outer diameter sampling signal and inputs it to the controller B (step S58). This outer diameter sampling data
The outer diameter and center are measured by the control unit B, and the first
The deviation of the center of the second measurement position PP from the extension line (QQ) connecting the centers of the measurement positions NN and the third measurement position MM is analyzed (step S59). The analysis result is displayed on the display means 10 (step S60). On the other hand, if there is no position smaller than ± 2 μm in step S55, the first
The object to be measured W is moved in the vertical direction by, for example, 0.
It is moved by 1 mm (step S61). Then, it is determined whether or not the entire area of the device under test W has been searched (step S62). If the entire area has not been searched, the process returns to step S54. If the search has been completed, the process proceeds to step S63. Then, it is determined whether or not the coaxiality measurement should be forcibly performed without the tilt correction (step S63). If it is forcible, the process proceeds to step S58. If it is not forcible, the measurement ends. The above method relates to a method of measuring the coaxiality. However, the roundness (the minimum diameter is subtracted from the maximum diameter) is calculated from the calculation results based on the outer diameter sampling data in steps S53, S56, and S58. thing)
Can also be measured. Further, it is also possible to configure so as to measure the coaxiality (and the roundness) continuously to the measurement of the outer diameter and the length.

[0026]

As described above, according to the present invention, the first sensor means is disposed on both sides of the movement trajectory of the mounting table which moves intermittently in the direction of the vertical axis, and the output side of the first sensor means is provided on both sides. Since the control unit is connected, the outer diameter can be measured quickly and accurately by calculating the outer diameter sampling signal obtained with the DUT fixed on the mounting table. it can.

In particular, when the outer diameter data of the first measured object is used as master data and the outer diameter of the second measured object is measured, the outer diameter of the master data is determined. By setting the measurement point of the portion having a small change amount to be coarser than the outer diameter measurement point of the first measured object, the outer diameter measurement of the second measured object can be performed more efficiently. Moreover,
By setting the width, it is possible to automatically determine whether or not the outer diameter measurement result of the second object to be measured is within the standard width, so that the measurement can be speeded up. In addition, appropriate quality control becomes possible.

Further, a portion where the outer diameter changes is determined from the calculation result based on the above-mentioned outer diameter sampling data, and the second sensor is positioned by the second driving means at a portion corresponding to the portion where the outer diameter changes. After that, in connection with this intermittent movement, the second sensor means outputs a sampling signal of the length of the object to be measured (width between portions where the outer diameter changes), and calculates based on the sampling data. The length can be measured more accurately. In particular, if the outer diameter measurement and the length measurement are docked, the initial data can be effectively used, and efficient measurement can be performed for a plurality of measurement items.

After determining the first and second measurement positions for measuring the outer diameter of the object set on the mounting table, the first sensor means is moved to the first measurement position of the object. In this state, the mounting table is rotated once by the third driving means, and the outer diameter is measured by calculating based on the outer diameter sampling signal output from the first sensor means. The outer diameter portion within the same or a predetermined range as the data is searched, the outer diameter of the portion (third measurement position) is measured, the center at the first and third measurement positions is obtained, and the second measurement position is further obtained. The first sensor means is located at the first position, the outer diameter and the center are measured based on the outer diameter sampling signal output from the first sensor means in relation to the rotation, and the axis connecting the centers of the first and third measurement positions is measured. Deviation of the center of the second measurement position from the line Concentricity can be accurately and efficiently measured by calculating.

[Brief description of the drawings]

FIG. 1 is a basic block configuration diagram showing one embodiment of the present invention.

FIG. 2 is a schematic block diagram of FIG. 1;

FIG. 3 is a plan view of the device of the present invention.

FIG. 4 is a side view of FIG. 3;

FIG. 5 is a flowchart for measuring an outer diameter.

FIG. 6 is a side view showing a state where an object to be measured is mounted on a mounting table for measuring an outer diameter and a length.

FIG. 7 is a flowchart for length measurement.

FIG. 8 is an output signal diagram of the first sensor unit at the time of length measurement.

FIG. 9 is a flowchart for measuring coaxiality.

FIG. 10 is a side view showing a state where an object to be measured is mounted on a mounting table for coaxiality measurement.

[Explanation of symbols]

 Reference Signs List A input section B control section Bb control means C output section D drive section W DUT 1 mechanism section 3 vertical axis drive section 32 screw screw 33 first drive section 34 movable block 36 support 37 mounting table 4 horizontal axis drive section 41 base 43 movable block 44 screw screw 45 second driving means 5 third driving means 62 first sensor means 63A light emitting section 63B light receiving section 72 second sensor means 73A light emitting section 73B light receiving section 8 third sensor means 9 input Means 10 Display means

────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-8-29133 (JP, A) JP-A-7-294228 (JP, A) JP-A-4-289403 (JP, A) JP-A-4-294 184105 (JP, A) JP-A-2-176508 (JP, A) JP-A-53-119080 (JP, A) JP-A-6-201375 (JP, A) JP-A-5-340744 (JP, A) JP-A-5-141958 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) G01B 11/00-11/30 G01B 21/00-21/32

Claims (12)

(57) [Claims] 1. A mounting table on which an object to be measured is mounted, first driving means for intermittently moving the mounting table at a predetermined pitch in a longitudinal direction, and fixed and arranged on both sides of a movement locus of the mounting table. A first sensor unit having a light emitting unit and a light receiving unit, a second sensor unit having a light emitting unit and a light receiving unit arranged on both sides of the movement trajectory of the mounting table, and at a different height from the first sensor unit; 2nd driving means for moving the two sensor means in the horizontal axis direction;
A third driving unit connected to the mounting table and rotating the mounting table around an axis, and a first sensor unit and / or a first sensor unit obtained by driving the appropriately selected first, second, and third driving units. 2
Control means for measuring the measured amount of the object by calculating based on an output signal from the sensor means, and output means for outputting measurement data of the control means. A measuring device for measuring objects. 2. The liquid crystal display according to claim 2, wherein said output means is a liquid crystal display.
2. The device for measuring an object to be measured according to claim 1, wherein the device is a display device such as an RT display and / or a printing device. 3. A mounting table on which an object to be measured is mounted, first driving means for intermittently moving the mounting table at a predetermined pitch in a longitudinal direction, and light emitting units arranged on both sides of a movement locus of the mounting table. And first control means for calculating and measuring the outer diameter based on the output from the first sensor means. The light transmitted from the light emitting part to the light receiving part in the first sensor means An apparatus for measuring an object to be measured, wherein the apparatus is set to be substantially wider than the outer diameter of the object to be measured. 4. The apparatus for measuring an object to be measured according to claim 3, wherein the light to be transmitted from the light emitting section to the light receiving section is beam-shaped, and scanning is performed in a range wider than the outer diameter of the object to be measured. 5. A step of setting an object to be measured on a mounting table, a step of intermittently moving the mounting table in a vertical direction at a predetermined pitch by a first driving means, and A step of outputting an outer diameter sampling signal of the object to be measured from the sensor means, and a step of measuring the outer diameter by calculating based on the sampling data;
Outputting the measurement data. 6. An outer diameter data calculated / measured based on an outer diameter sampling signal of a first object to be measured output from a first sensor means in connection with intermittent movement of the mounting table.
When measuring the outer diameter of the second measured object as data,
6. The measuring object according to claim 5, wherein a measuring point of the master data at a portion having a small variation in outer diameter is set to be coarser than an outer diameter measuring point of the first measuring object. Measuring method. 7. A standard width is set before execution of measurement at a set measuring point set based on the master data, so that the outer diameter measurement result of the second object to be measured becomes standard. 7. The method for measuring an object to be measured according to claim 6, wherein it is determined whether or not the width is within the width. 8. A step of setting an object to be measured on a mounting table, a step of intermittently moving the mounting table in a vertical direction at a predetermined pitch by first driving means, and a first step related to the intermittent movement. A step of outputting an outer diameter sampling signal of the object to be measured from the sensor means; a step of calculating based on the sampling data; and a step of determining a portion where the outer diameter changes from the result of the calculation; Positioning the sensor means at a portion corresponding to the change portion of the outer diameter;
The mounting table is intermittently moved in the vertical axis direction at a predetermined pitch by the driving means, and the length of the object to be measured (width between portions where the outer diameter changes) is sampled from the second sensor means in connection with the intermittent movement. A method for measuring an object to be measured, comprising a step of outputting a signal and a step of measuring a length by calculating based on the sampling data. 9. A length data calculated / measured based on a length sampling data of a first object to be measured outputted from a second sensor means in connection with intermittent movement of the mounting table. When measuring the length of the second object to be measured, the measurement point of the portion of the master data having a small variation in the outer diameter is the length measurement point of the first object to be measured. The method for measuring an object to be measured according to claim 8, wherein the setting is made coarser than in (1). 10. A measurement result of a length of a second object to be measured by setting a standard width prior to execution of measurement at a set measurement point set based on the length master data. 10. The method for measuring an object to be measured according to claim 9, wherein it is determined whether or not is within a standard width. 11. A step of setting an object to be measured on a mounting table, a step of intermittently moving the mounting table at a predetermined pitch in a vertical direction by a first driving means, and A step of outputting an outer diameter sampling signal of the object to be measured from the sensor means, a step of calculating based on the sampling data, and a step of measuring the outer diameter, and determining a portion where the outer diameter changes based on the calculation result. Steps and
Positioning the second sensor means at a portion corresponding to the portion where the outer diameter changes by the second driving means; and intermittently moving the mounting table at a predetermined pitch in the vertical axis direction by the first driving means. Outputting the sampling signal of the length of the object to be measured (the width between portions where the outer diameter changes) from the second sensor means in connection with the intermittent movement, and calculating the length based on the sampling data to measure the length And outputting the measured outer diameter and length data, and sequentially measuring the outer diameter and the length of the measured object. 12. A step of setting an object to be measured on a mounting table, a step of determining first and second measurement positions for measuring an outer diameter of the object to be measured, and a step of mounting the mounting table by first driving means. Moving the mounting table so that the first sensor means is positioned at the first measurement position of the object; intermittently rotating the mounting table by the third drive means in this state; A step of calculating the outer diameter by calculating based on the outer diameter sampling signal at the first measurement position output from the first sensor means;
A step of retrieving an outer diameter portion which is the same as the outer diameter measurement data or within a predetermined range by moving the mounting table in the longitudinal direction by the driving means; Measuring the outer diameter and determining the center at the first and third measurement positions; and positioning the mounting table by the first drive means so that the first sensor means is located at the second measurement position of the workpiece. Moving the mounting table one turn intermittently by the third drive means in this state, and a second measurement position output from the first sensor means in connection with the intermittent rotation. Measuring the outer diameter and the center based on the outer diameter sampling signal in the above, and calculating and measuring the amount of deviation of the center of the second measurement position from the axis connecting the centers of the first and third measurement positions. including Method of measuring the object to be measured, characterized and.