JPS5890109A - Multi-dimensional measuring apparatus - Google Patents

Abstract

PURPOSE:To make assembly and adjustment easy by bridging a slider guide rail between a pair of supporting columns that are erected on a base and providing a freely movable slider with a measuring element. CONSTITUTION:Supporting columns 41 and 42 are supported on guide rails 31 and 32 freely movably in the longitudinal direction (the Y-axis direction) of the guide rails 31 and 32, and between those columns 41 and 42 on both sides a lateral beam 43 is bridged, and, further, between the upper ends of the columns 41 and 42 a slider guide rails 46 and 47 that consist of two round bars and a slider fine movement rail are bridged in the X-axis direction. Furthermore, on an engagement block 61, a fine feeding device 80 of a measurement element supporting member 40 is provided. With this arrangement adjustment of the assembly can be made easy and inexpensive.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides orthogonal two-dimensional measuring machines such as two-dimensional measuring machines and three-dimensional measuring machines.
The present invention relates to a multidimensional measuring machine in which a measuring stylus is movable beyond an axis and measures the shape of an object to be measured from the movement and displacement of this measuring stylus.

Conventionally, two-dimensional or three-dimensional measuring machines are well known, which measure the shape of the workpiece from the movement and displacement of the measuring member by placing the measuring head in contact with the surface of the workpiece, and these measuring machines have high accuracy. It is used in all industrial fields because it can be measured.

However, in conventional coordinate measuring machines, the idea was that a robust structure with no adjustment points would ensure high accuracy, so the positional reference of the measuring machine's structure was set on the top surface of the surface plate or on the surface plate. The pillars are erected based on these positional standards, such as on the foundation on which they will be placed. In this case, the pillars must be exactly perpendicular to the standard, and if the pillars are arranged on both sides, the pillars on both sides must be finished and assembled so that they are parallel and exactly the same height. , Next, a structure to be supported by this support, such as a cross beam, and a slider etc. that can be slid on the cross beam are sequentially X.

After assembling parallel and perpendicular to the Y and two axes, and adjusting this assembled structure, adjust each part using the surface plate as a reference, such as fixing a scale etc. so that it is parallel to the slider etc. and with a constant clearance. It had a structure in which it was built up one after another, requiring extremely complex procedures and skill.

Therefore, in the conventional structure, the machining accuracy of one part is not as high as the overall accuracy, which has a large influence, and if there is a mistake in adjustment at the initial stage, corrections and improvements cannot be made, and eventually the initial From then on, I had to redo all the repairs and reassembly using lapping and other means. For this reason, the overall accuracy varies greatly depending on the level of assembly skill.
Not only does this require a high degree of skill, but the use of high-precision parts makes the product extremely expensive, which is a drawback. However, since each part is stacked one after another after adjustment, it is difficult to assemble on-site and it is inconvenient to transport, which also makes conventional coordinate measuring machines less convenient to use. Ta.

Furthermore, the above-mentioned circumstances are the same not only in three-dimensional measuring machines but also in two-dimensional measuring machines, and there are similar inconveniences.

An object of the present invention is to provide a multidimensional measuring machine that is easy to assemble and adjust and is inexpensive.

The present invention is not limited by conventional thinking, and ultimately the measuring head in these measuring machines is X.

Focusing on the fact that it is sufficient to be able to move accurately in the Y and two-axis directions, after assembling the structure, we measure the accuracy directly using the probe, and based on the results, if there is an accuracy error, we manually remove the entire structure. This was done based on the concept of adjusting the x, y, and z axes in one place without adding any The above object is achieved by connecting the connecting portion with at least one of the following through an adjusting means that allows the measuring head to be displaced in the X, Y and two axis directions, and adjusting the precision with the adjusting means. It is something.

An embodiment in which the present invention is applied to a coordinate measuring machine will be described below with reference to the drawings.

In the overall structural diagram of FIG. 1, a base 21 consisting of a stone surface plate formed into a substantially rectangular parallelepiped has a plurality of screw holes 22 for attaching the object to be measured on its upper surface, and front and rear end surfaces perpendicular to the longitudinal direction. Each has a handle 23 having an angular cross-section. Two guide rails 31 and 32 forming a Y-axis direction guide section are attached to both left and right side surfaces of the base 21. Which guide rails 31 and 32 are formed longer than the longitudinal direction (Y-axis direction) of the base 21 (see FIG. 2), and are located below the upper surface of the base 21 and parallel to the upper surface thereof. It is provided to protrude from the side surface of the base 21. In this case, the fact that the guide rails 31 and 32 are below the top surface of the base 21 means that the top surfaces of the guide rails 31 and 32 are at the same or lower position than the top surface of the base 21. In addition, both guide rails 31 and 32 are cut down parallel to each other on both sides of the cylinder so that the cross-sectional shape perpendicular to the longitudinal direction has a substantially oval shape consisting of a rigid arc portion and a straight portion (see Fig. 4). Furthermore, a long scale 33 is attached to the outer surface of the guide rail 31 on one side, that is, on the front side in FIG. 1, as will be described in detail later.

The guide rails 31 and 32 on both sides are provided with prismatic supports 41.
．． 42 in the longitudinal direction (Y
It is supported so as to be movable along the axial direction. A horizontal member 43 consisting of a single round bar is installed midway between the pillars 41 and 42 on both sides in order to set the interval in the X-axis direction between the inner pillars 41 and 42 to a predetermined dimension. 41
．． A slider guide rail 46,47 made of two round bars and a slider fine movement rail 48 made of one round bar are connected to the guide rail 31,32 between the upper ends of 42, respectively, via connecting parts 44,45. The hook runs in a direction that is orthogonal and parallel to the top surface of the base 21, that is, in the X-axis direction.

A box-shaped slider 49 is supported on these slider guide rails 46.47 so as to be movable in the X-axis direction along the slider guide rails 46.47, and a box-shaped spindle is connected to the slider 49 via an angle measuring means 50. A support body 51 is supported so as to be tiltable about the Y-axis. A spindle 52 is supported on this spindle support 51 so as to be slidable in the direction of its central axis.
A measuring element 53 is attached to the lower end of the probe 2. On this occasion,
The spindle 52 is set so that it can move in exactly two axes (up and down) when the spindle support 51 is at zero inclination, and this allows the slider 49 to move in the X-axis direction and the supports 41 and 42 to move in the In conjunction with the movement in the axial direction, the measuring head 53 can be moved arbitrarily in the x-, y-, and z-axis directions perpendicular to each other with respect to the base 21 and the object to be measured 54 placed on the base 21. has been done. Furthermore, the measuring member supporting member 40 is supported by these columns 41, 42, the horizontal member 43, the connecting parts 44, 45, the slider guide rails 46, 47, the slider 4q, the angle measuring means 50, the spindle support 51, and the spindle 52. It is configured.

In FIGS. 3 and 4, which are enlarged cross-sectional views of the main parts of this embodiment, there are a plurality of holes 2 on both left and right sides of the base 21.
4 are formed in KM rows in the Y-axis direction, and in these holes 24 there is a small diameter portion 25 at one end of a support shaft 25 that constitutes a rail support portion.
A are adhesively fixed with an adhesive 26, respectively. At this time, the outer periphery of the small diameter portion 25A is processed with unevenness such as twill knurling to improve adhesive strength. Further, a small diameter convex portion 2 is provided on the other end side of the support shaft 25 via a stepped portion 25B.
5C is integrally formed, and a PV groove 25D is formed around the entire circumference in the middle of this convex portion 25C. In position, both guide rails 31.
Recesses 31A and 32A that are engaged with the convex portion 25C of the support shaft 25 are respectively formed on the inner surface of the support shaft 25, and screw holes 31B and 32B that penetrate into these four parts 31A and 32A are formed.
are formed from the arcuate surfaces of the guide rails 31 and 32 each having an oval cross section, and fixing screws 34 having tapered tips are screwed into these screw holes 31B and 32B, respectively. At this time, ■ the center line of the groove 25D and the fixing screw 34.
The direction of this positional deviation is such that the center line of the fixing screw 34 is on the tip side of the protrusion 25C from the center line of the V-groove 25D. When the tapered end surface of the fixing screw 34 comes into contact with the wall surface of the groove 25D, the end surface of the stepped portion 25B of the support shaft 25 is pressed against the inner straight portion of each guide rail 31. 32, the mounting position relative to the support shaft 25 can be regulated. In addition, both guide rails 31.3
2 is adhesively fixed to the base 21 via the support shaft 25,
They are bonded using a positioning jig (not shown), whereby each guide rail 31, 32 is fixed so as to be parallel to the top surface of the base 21 with high precision. It is designed to have sufficient accuracy.

Both guide rails 31. , one rail 3 of 32
A concave groove 31C is formed over the entire length on the outer surface of 1,
The concave groove 31C is finished parallel to the central axis of the rail 31, and its bottom surface is parallel to the outer surface of the rail 31. The scale 33 is in this groove 31C.
The scale 33 is, for example, a reflective scale having a vertical scale of μm order formed on the surface of a stainless steel plate.

An engagement block 61 is fixed to the lower part of one of the pillars 41, and at both ends of this block 61 in the longitudinal direction (X-axis direction), there are roller groups each consisting of three rollers 62, 63, and 64. There are two. These rollers 62, 63, 64 are arranged so that the normal direction of their circumferential surfaces is 120 degrees, and
The bushing 62B and the roller 6 that are fitted onto the support shaft 62A of
Rollers 62, 6 on support shafts 63A, 64A of 3, 64
The fitted portions 3 and 64 are each eccentric by a predetermined amount with respect to the center line, so that the normal position of each roller 62, 63, and 64 can be adjusted, and the contact with the guide rail 31 is ensured. ing. Further, among the rollers 62, 63, and 64, the roller 62 is formed to be relatively wide because it comes into contact with a straight section of the rail 31, and the other rollers 63 and 6 come into contact with an arcuate part of the rail 31. It is formed narrow in order to

The engagement block 61 is provided with a measuring unit 70 that together with the scale 33 constitutes a Y-direction measuring means for measuring the amount of movement of the probe support member 40 in the Y-axis direction (see FIG. 3). This measurement unit 70 includes an index scale 71 in which a scale similar to that of the scale 33 is formed on a transparent plate such as glass, a light emitting element 72 that emits light onto the surface of the scale 33 through the index scale 71, and a light emitting element 72 that emits light onto the surface of the scale 33 through the index scale 71. The scale 3 is emitted from the element 72.
A sine wave-like current generated in the light receiving element 73 due to changes in the amount of light received due to the brightness and darkness of both scales based on the relative movement of both scales 33 and 71. The amount of movement of the support member 40 in the Y direction can be measured. At this time, the light emitting element 72
The optical axes of the and light receiving element 73 are arranged in a V-shape,
The light from the light emitting element 72 is reflected by the scale 33 to ensure that it reaches the light receiving element 73.

A retaining block 65 is fixed to the lower part of the other support 42, and at both ends of this block 65 in the longitudinal direction (Y-axis direction), there are roller groups each consisting of two rollers 66 and 67. It is provided. These rollers 66
．． 67 is arranged so that the normal direction of its circumferential surface is 180 degrees, and the support shafts 66A, 6 of each roller 66, 67
The fitted portions of the rollers 66, 67 in 7A are each centered at a predetermined -is center with respect to the center line of the spindle, so that the normal position of each roller 66, 67 can be adjusted, and contact with the guide rail 32 is ensured. It is meant to be. At this time, both rollers 6
6.67 is in contact with the rail 32 at the 180 degree position, so both rollers 66.67, that is, the support column 42 are in contact with the support shaft 2.
5 in the axial direction (X-axis direction).

Further, the engagement block 61 is provided with a fine movement feeder 80 for the probe support member 40 . This fine movement υ device 8
As shown in FIG. 3, 0 has a substantially C-shaped side surface, and the opening side ends of the upper and lower arms 81A, 81B of this 0 are spaced apart from the circumferential surface of the guide rail 31 by a predetermined distance. A frame 81 is arranged as shown in FIG. An operating shaft 82 to which a knob 84 is attached and a swinging piece (not shown) which can swing freely is screwed into the upper end of the frame 81 on the opening side of the letter 0, and its lower end touches the upper surface of the guide rail 31. and a tightening screw 87 whose upper end protrudes outward through a long hole (not shown) formed in the block 61. The guide rail 31 is sandwiched between the frame 81 and the lower arm 81B of the frame 81, thereby substantially fixing the retaining block 61 of the probe support member 40 to the guide rail 31 via the frame 81 and the operation shaft 82. If the operating shaft 82 is rotated in this state, the operating shaft 82 and the frame 81 are slightly moved relative to each other, so that the rod 11 stator support member 40 can be slightly moved toward the guide rail 31. On the other hand, loosen the tightening screw 87 and
When the block 61 is released from contact with the guide rail 31
Therefore, the probe support member 40 can be moved freely.
It is also designed to be movable.

Note that each arm 81A of the frame 81 may be attached as necessary.

An appropriate spring may be applied to the frame 81 to ensure that the 81B is separated from the circumferential surface of the guide rail 31.

Of the guide rails 31 and 32 on both sides, one of the guide rails 31 is provided with additional copies of Shock Apsopa 90 at both ends (FIG. 2 and third examination). Each of these shock absorbers 90 is slidably engaged with a small diameter portion 310 formed at the end of the guide rail 31, and is also fitted into a step between the small diameter portion 31D and the large diameter portion of the guide rail 31. A cylindrical body 91 having an inner periphery protrusion 91A that can come into contact with the end face 31E, and a cylindrical body 91 that is screwed into the end of the guide rail 31 and has an outer periphery larger than the small diameter portion 31D and smaller than the inner periphery of the cylindrical body 91. The spring holder 92 and this spring holder 9
2 and the inner peripheral protrusion 91A of the cylinder 91.
1 and a compression spring 93 as a biasing means for always biasing the guide rail 31 into contact with the step end face 31E. 61 (more precisely, the cover fitted to the block 61) is brought into contact with the compression spring 93, thereby reducing the impact received by the retaining block 61 and by extension the probe support member 40. .

Further, there are guide rails 32 at both ends of the other guide rail 32.
A stopper 95 with a larger diameter is attached to each (
(See Figures 1 and 2).

The connection between the column 41 and the horizontal member 43 is such that the end of the column 43 is in contact with the inner wall of the column 41 and is formed at the end of the column 43, as shown in FIG. A bushing with a collar 1 attached to the support column 41 in the recess 43A
01 is inserted, and is fixed by the tensile force of a delt 102 that passes through the inside of the flanged bushing 101 and is screwed into the horizontal member 43. Further, the connection between the support column 42 and the horizontal member 43 has a similar structure, although it is not shown in the figures. At this time, since the length between both end surfaces of the horizontal member 43 is accurately formed to a predetermined dimension, and the end surface is formed at right angles to the axis, by tightening the delts 102, the side skin column 41 .42 is exactly the length of the cross member 43.

Further, the structure of the connecting portion 44 is formed to be narrower than the distance between the front and rear side walls of the support column 41, as shown in FIG. 3.4.
Connecting block 111 inserted between both side walls with a gap
Bushes 113 and 114 are inserted through this block 111 in the X-axis direction and into which small-diameter end portions of the slider guide rails 46 and 47 are inserted, and a portion of the bushes 113 and 114 are inserted into each of these bushes 113 and 114. are inserted into the bushings 115 and 116 with flanges whose flange portions are locked to the end faces of the bushings 113 and 114, and screwed into the ends of the guide rails 46 and 47 by passing through the bushings 115 and 116, respectively. The guide rails 46 and 47 are connected to the connecting block 111, and one end is provided at the top, bottom, and center of the right side wall of the connecting block 111 in FIG. 3, respectively. (119, 120, 121); and a positioning bushing 122 as a screw member screwed into 119, 120, and 121 so as to be able to adjust the forward and backward positions.
123.124 and these positioning bushes 122
゜123 and 124 respectively through the connecting block 11
Positioning bushes 122, 123, 12 screwed into 1
Do each of the 4 fixes? Root 125, 126, 12
7, a positioning bush 129 as a screw member whose one end is in contact with the lower surface of the connection block 111 and whose other end is screwed into the reinforcing plate 128 of the support column 41 so that its forward and backward positions can be adjusted; and this positioning bush 129. A positioning bushing 12 is screwed through the connecting block 111.
9, and each of these positioning bushes 122, 123° 124, 129
By adjusting the position of the syslider guide rail 46
．． 47 and hence the X of the probe 53.

The position can be adjusted in the Y and Z axis directions. Here, positioning bushes 122, 123° 124
．． 129 and 7+? Root 125, 126, 127, 13
The adjustment means is configured by 0.

Note that the other connecting portion 45 is connected to the connecting block 11 in FIG.
Although only 2 is shown, the other structure is the same as that of the connecting part 44, and the buttons are provided so that the position adjustment in each of the X, Y, and Z axis directions can be performed in the same way.

In the enlarged perspective view of the slider section in FIG. 5, the slider fine movement rail 48, which is hooked between the upper ends of the connecting blocks 111 and 112 of both the connecting sections 44 and 45, is movable in its axial direction. At the same time, the connecting block 111
A minute screw (not shown) is provided in the part inserted into the
The connecting block 111 is connected to this fine screw.
Adjustment nut 141 supported so as not to be movable in the axial direction
By turning the fine movement rail 48, the fine movement rail 48 can be moved in small amounts in the axial direction. In addition, the fine movement rail 48 is slidably inserted into a pair of platens (142, 143) erected on the upper surface of the slider 49 in the middle of the fine movement rail 48.
- a tightening screw 144 screwed into the force bracket 142;
By tightening the fine movement rail 48, the rail 48 and slider 49 are integrated, and in this state, the adjustment nut 14 is tightened.
By turning 1, the system slider 49 can be slightly moved in the X-axis direction. In addition, a scale 145 is fixed to the upper slider guide rail 46, and the amount of movement of the slider 49 and, in turn, the contact point 53 in the X-axis direction is detected by the action of this scale 145 and a detector (not shown) provided inside the slider 49. It is now possible to do so.

A support body angle fine adjustment screw 151 is rotatably supported between the brackets 142 and 143 of the slider 49, but cannot be moved in the axial direction. A nut member 152 is screwed onto this fine adjustment screw 151. A fixing screw 153 is inserted into a U-shaped groove (not shown) formed in the lower part of the member 152, and this fixing screw 153 is inserted into the side arm 1 of the rotating arm 154.
It is screwed into the tip of 54A. Therefore, when this fixing screw 153 is loosened, the nut member 152
is moved as the fine adjustment screw 151 rotates, while the fine adjustment screw 151 is allowed to rotate freely when it is tightened. The lower end of the rotating arm 154 is rotatably engaged with a rotation center shaft (not shown) of the spindle support 510, and by screwing in a tightening screw 155 inserted into the rotating arm 154, the rotating arm 154 is rotated. 1
54 and the rotation center shaft are fixed together.

Therefore, when the screw 155 is loosened, the spindle support 51 can be tilted by the slider 49 by one degree, while when the tightening screw 155 is tightened, the spindle support 51 can be fixed at the desired angle. Further, while the tightening screw 155 is in the tightened state, by loosening the fixing screw 153 and rotating the fine adjustment screw 151, the angle of the support body 51 can be finely adjusted. Further, the inclination angle of the support body 51 at this time is determined by the main scale 1 of the angle measuring means 50.
56 and a vernier scale 157 for accurate reading. At this time, the main scale 156 is placed on the slider 49 side, for example.
The vernier 157 is provided on the spindle support 5 side, and this may be reversed.

The spindle 52 has a scale 161 along the axial direction.
is provided, and this scale 161 and spindle support 5
When the inclination of the support body 5 is zero, the amount of movement in the axial direction of the system spindle 52 and the probe 53, that is, the amount of movement in the two axial directions can be measured. It is being done. Between the lower end of the spindle 52 and the support body 51, a constant pressure spring 162 made of a thin, wide spring material and formed by winding one end into a clockwise spring shape is stretched. 162, the spindle 52 is urged to rise at a slight speed in balance with its own weight, and the surface of the scale 161 can also be protected.

A spindle fine movement shaft 163 parallel to the spindle 52 is supported at the lower end of the spindle 52 so as to be movable in the axial direction, and a fine screw (not shown) is provided on the fine movement shaft 163.
An adjusting nut 164 screwed into the spindle 52 is rotatably but immovably supported at the bottom of the spindle 52, and by turning the adjusting nut 164, the spindle 52
The fine movement shaft 163 is configured to move relative to each other in the axial direction. Further, a screw 165 for fixing the fine adjustment shaft 163 to the support 51 is screwed into the side surface of the support 51, and with the tightening screw 165 fixing the fine adjustment shaft 165, the adjusting nut 164 is rotated. By doing so, the system spindle 52 can be moved slightly in its axial direction.

Further, a probe mounting bush 171 is removably attached to the lower end of the spindle 52 with a set screw 172.
The measuring element 53 is attached to the set screw 17 on this mounting bush 171.
3 is removably attached. In addition, the mounting bush 171 is also provided with a mounting hole 171 in a direction perpendicular to the axis of the spindle 52, and by inserting the AK probe 53 into this mounting hole 171 and fixing it with a set screw 173, the axis of the spindle 52 can be adjusted. The tip of the probe 53 can be directed in directions of 90 degrees. Note that by not using the mounting bushing 171, the mounting bushing 17
It is also possible to use a measuring tip 53 having the same thickness as 1.

Next, the assembly and adjustment method of this embodiment will be explained.

During assembly, each part is assembled into an intermediate assembly, namely a unit including the base 21 and the guide rails 31, 32, a unit including each column 41, 42, a unit including the slider 49, and a unit including the spindle support 51 and the spindle 52. Each unit is assembled by assembling each part in sequence in the same way as normal assembly.

At this time, when fixing the guide rails 31 and 32 to the base 21, accurate dimensions are determined using a jig.

The units assembled in this way are assembled to each other, but the probe support 40 is assembled before being assembled to the unit on the base 21. That is, the unit of the spindle support 51 is attached to the unit of the slider 49, and these are connected to the connecting block 1 of both connecting parts 44,45 via the two slider guide rails 46,47 and the fine movement rail 48.
11, 112 temporarily fixed. On the other hand, the pillars 41 on both sides.
, 42 are assembled using the side part side 43 and a horizontal member for dimensioning if necessary, and the spacing between both supports 41 and 42 is fixed accurately according to the dimensions of the horizontal member 43, and this dimensioned support is assembled. Connecting portion 44 with the slider 49 between 41 and 42.
45 positioning bushes 122 , 123 , 124
.

129 and delts 125, 126, 127, and 130 for temporary fixation.

Next, this temporarily fixed gauge head support member 40 is placed on the base 2.
The guide rails 31 and 32 fixed to the guide rails 31 and 32 are assembled to the guide rails 31 and 32, and since the guide rail 31 side is used as a reference when threading the silk, first, each roller 62. 63 and 64 are adjusted using the eccentric bushes 62B1 and eccentric shafts 63A and 64A of the rollers 62, 63, and 64, respectively.

As a result, the probe support member 40 has been assembled with the guide rail 31 as a reference, so the contact between the other guide rail 32 and each roller 66, 67 of the support 42 is adjusted in the same manner. , the entire temporary assembly is completed. At this time, each roller 66, 67 of the support column 42 is connected to the guide rail 32.
Since it is still in contact with the rail support shaft 2 from above and below,
5 is movable in the axial direction of the transverse member 43.
Both support columns 41.42 dimensioned by
2 will be supported.

When the temporary assembly is completed in this way, both columns 41.4
Remove the horizontal member for dimensioning assembled between the two as necessary, and begin adjustment.

When starting the adjustment, except for the tightening screw 155 that allows the spindle support 51 to tilt, the other tightening screws 87, 144 are
and 165 to allow free movement of the support 41, slider 49 and spindle 52, and move the measuring head 53 to x, y, z.
Make it possible to move to any position along the axis. In this state, both slider guide rails 46 and 47 of the slider 49 are not separated.
Both connecting blocks 111
, 112 should be assembled after adjusting the position. Fix with bolts 117 and 118.

Next, the accuracy of the measuring device itself is adjusted. At this time, the angle measuring means 50 is used to ensure that the spindle support 51 is at a predetermined angle to the slider 49, that is, the spindle 52 is accurately aligned with respect to the slider guide rail 46, 47. Set it so that it is perpendicular to .

In this state, a product with standard dimensions is mounted on the base 21, and the measurement stylus 53 is brought into contact with this product with standard dimensions, so that the movement of the measurement stylus 53 is adjusted so that it moves accurately in the x, y, and z axis directions.

All this adjustment is done at both connecting parts 44°45, and each fixing part? Loosen the bolts 125, 126°, 127.130 as appropriate, and
Move forward and backward.

Once the adjustment is completed in this way, the dimensions, shape, etc. of each part of the object to be measured 54 can be measured in the same way as with a conventional three-dimensional measuring machine.

When making adjustments, attach a test indicator or other indicator to the needle 52 in place of the probe 53, and adjust the pointer so that it does not move from time to time. can be done more easily. Also,
The accuracy of the mechanical structure can be set purely without going through the electrical system of the measuring machine.

As described above, this embodiment has the following effects.

That is, the accuracy of the measuring head 53 is determined by using the measuring head 53 itself after the entire structure is assembled, and the adjustment is made by using the connecting part 4.
Since only 4.45 is used, assembly does not require skill and can be assembled in a short time. In addition, since adjustments can be made after assembly, it is possible to significantly reduce costs while maintaining accuracy by reducing the need for high-grade machined parts and making adjustments easier.Also, it is easy to make adjustments during transportation, so transportation is possible. Improves sex. Furthermore, since each part of the probe support member 40 is made into a unit and can be assembled individually, and all adjustments can be made at the connecting parts 44 and 45, one of the guide rails 31 and 32 can be In the embodiment, it is only necessary to assemble the guide rail 31 as a reference, and therefore the parallelism of both rails 31, 32 does not need to be much of a problem, so each rail 31, 32 is attached to the top surface of the base 21 with the same dimensions. It is possible to simplify the assembly work. In addition, the guide rails 31 * 32 are positioned at predetermined positions on each support shaft 25 using V grooves 25D and fixing screws 34, and are removable. Therefore, when the scale 33 is damaged, the rails 31
．． 32 can be easily replaced.

As mentioned above, each part of the probe support member 40 is made into a unit, so it is possible to replace only each part.
It is also possible to replace only 2, and both pillars 41.42
As long as there is no bending, the measurement range can be expanded by making it expandable and retractable.

Furthermore, since the two columns 41, 42 are connected by tension via the horizontal member 43, the rigidity of the structure including the columns 41, 42 and the slider guide rail 46, 47 can be increased. At this time, it is sufficient that the horizontal member 43 is located above the highest position of the lower end of the measuring head 53, so it is not necessarily necessary to provide it at the upper end of the pillars 41 and 42, but it can be provided in the middle of both the pillars 44 and 42. , expansion between the lower ends of the struts 41 and 42 can effectively prevent deformation in the direction.

In addition, two slider guide rails 46 and 47 are provided, and their positions are shifted from each other in the front-rear direction (Y-axis direction), and the scale 145 is supported on the back surface of the upper rail 46. In order to easily stop the rotation and to protect the scale 145, it is desirable to mount the scale 145 at least vertically or downwardly.In this embodiment, the upper rail 46 places emphasis on holding the scale. The lower rail 47 can receive vertical loads. Furthermore, both rails 46.
By shifting 47 in the front-rear direction, the height dimension can be reduced.

Furthermore, since the columns 41 and 42 are supported by the side surfaces of the base 21, the entire upper surface of the base 21 can be used as the effective measurement area.
The base 21 made of an expensive stone surface plate or the like can be made smaller, and from this point of view as well, the cost of the device can be reduced, and the entire device can also be made smaller and the installation space can be reduced. In addition, since there are no obstacles on the upper surface of the base 21, the object to be measured 5
There are no restrictions on the entry and exit of the object 4, and even an object 54 to be measured larger than the top surface of the base 21 can be installed, and its installation orientation is also not limited. Furthermore, since the entire surface of the base 21 is open, the position of the user is not limited, making it easy to use. Also,
Since the entire device is compact, it is extremely convenient to carry. Furthermore, the guide rails 31, 32 on both sides are connected to the base 21.
Since the length is set longer than the length of , it is possible to measure a much larger object 54 from this point of view. Also, pillar 4
The rollers 62, 63, 64, 66.67 which movably support 1.42 on the guide rail 31.32 are the rails 31, 3.
The number of columns 41 and 42 arranged in the longitudinal direction does not affect the fixed effective area in any way, so by using a relatively large number of them, the pillars 41 and 42 can be stably supported. Furthermore, since there are no obstructions on the base 21, the object to be measured 54 can be automatically installed and removed easily.

Since the guide rails 31 and 32 are fixed to the base 21 by adhesion via the support shaft 25, the rails 31 and 32 can be fixed to the top surface of the base 21 by using an appropriate jig or the like. Positioning can be performed easily and with high precision, and the probe support member 40 can be installed using the guide rails 31 and 32 as a positional reference. Further, each roller 62, 63, 64 is brought into contact with the guide rail 31.
64 are oriented at 120 degrees to each other, and the base 21
Since the side contacts the arcuate portion diagonally from above and below rather than from the side, the space on the side of the base 21 based on the contact of the rollers 63 and 64 can be reduced.
Therefore, the guide rail 31 can be brought close to the base 21 side, which is advantageous in terms of load support due to the cantilever structure.

FIG. 6 shows another embodiment of the present invention, in which the guide rail is provided above the base. Here, the same or equivalent components in this embodiment and the previous embodiment are designated by the same or equivalent symbols to simplify the explanation.

In FIG. 6, there are large support stands 4 on both sides of the base 21.
25A and 425B are fixedly erected, and a guide rail 43 is provided on the top of each of these support stands 425A and 425B.
1,432 are provided along the Y-axis direction, and each of these guide rails 431 and 4321 has a short support 44.
1,442, connecting portions 444 and 445 connect to the rail 43.
1,432 so as to be freely movable. These supports 441, 442 are provided with means for sliding on the rails 431, 432, such as rollers, air bearings, etc., and a means for measuring the amount of movement in the Y direction for measuring the amount of movement along the rails 431, 432. Same as the example, and
Both coupling members 444, 445 are constructed in the same way as in the previous embodiment, with the coupling blocks 11.1, 112 being adjustable by means of threaded elements such as positioning bushes.

A horizontal member 43, a slider guide rail 46, 47, and a slider fine movement rail 48 are respectively hooked between the inner struts 441, 442 and the connecting portions 444, 445, and a slider 49 is attached to both slider guide rails 46, 47. Supported in a slidable manner. A spindle support 51 is attached to the slider 49 via angle measuring means, and a spindle 52 having a measuring element 53 at its lower end is supported on the support 51 so as to be movable in the axial direction.

This embodiment configured as above can also provide the same functions and effects as those of the embodiments described above.

In each of the above embodiments, the measuring element 53 has a contact type structure, but the measuring element in the present invention is not limited to this, and may be one using capacitance or a laser length measuring device. It also includes a so-called non-contact structure. Further, on the first A flow side, the guide rail 32 that is not used as a reference among both guide rails 31 and 32 does not necessarily have to be provided on the side of the base 21 and below the upper surface. It may be installed on the top of the base 21, and the plate 21 may be directly guided by the upper surface of the base 21 without particularly providing a guide rail. In short, if a guide rail that serves as a reference is provided on one side of the base 21, it will be more difficult. Furthermore, the present invention is not limited to three-dimensional measuring machines, but can also be applied to other types of measuring machines, such as two-dimensional measuring machines or shape measuring machines that cannot move in one direction among three orthogonal axes. but,
It is more effective if the device itself is applied to a large and expensive three-dimensional measuring machine. Further, in the above embodiment, there is one pillar 41, 42 on each side, but there may be two or more pillars on each side, and two or more pillar guide rails 31, 32 may be provided on one side. Here, two or more guide rails 31 on the reference side may be provided on one side, one of which may be used as a reference, and the remaining guide rails 31 may receive the load on the probe support side 40. Furthermore, one of the two coupling parts 44, 45 may be free of adjustment means. Furthermore, the detection of the amount of movement in the X, Y, and Z axis directions is not limited to the optical detector as in the above embodiment.
A magnetic or electromagnetic detector or a radar detector such as a Radhe length measuring device may also be used. Furthermore, on the actual male side, it has been explained that the connecting blocks 111, 112 and the slider guide rails 46, 47 are both fixed at an angle of 117°118 (gel). As shown in Figure 2, it may be possible to move axially without being bolted. At this time, the connecting portion having the structure shown in FIG. 7 does not necessarily need to be provided with an adjusting means.

As described above, according to the present invention, it is possible to provide a multidimensional measuring machine that is easy to assemble and adjust and is inexpensive.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment in which the present invention is applied to a three-dimensional measuring machine, FIG. 2 is a plan view thereof, and FIG. 3 is an enlarged side view of the main part with a part of FIG. 2 cut away. Figure 4 is an enlarged front view of the same.
FIG. 5 is an enlarged perspective view with a part of the slider section of this embodiment cut away, FIG. 6 is a perspective view showing another embodiment of the present invention, and FIG.
The figure is a sectional view of a main part showing another structural example of the slider guide rail mounting structure in each embodiment. 21... Base, 24... Hole, 25... Support shaft, 3
1゜32.431,432...Guide rail, 40...
・Measurement head support member, 41, 42, 441, 442...
Support column, 43... horizontal member, 44, 45, 444, 445
...Connection part, 46.47...Slider guide rail,
49...Slider, 51...Spindle support, 5
2... Spindle, 53... Measuring point, 54... Measured object, 101... Bush with collar, 102... Day? root, 11.1, 112... connection block, 113
．． 114... Bushing, 1.15, 116... Bushing with collar, 117, 118... Bolt, 119,
120, 121... reinforcing nut, 122, 123,
124, 129...Positioning bushing, 130...
Bolts, 425A, 425B...Support stand. Agent Patent Attorney Minoru Kinoshita Figure 7-81- 111112 143, 114

Claims (1)

[Claims] (1) At least two of X, Y and two axes that are orthogonal to each other
In a multidimensional measuring machine, a measuring head that can be displaced in the axial direction is attached to a workpiece placed on a base, and the shape of the workpiece is measured from the displacement of this measuring head. A pair of columns are erected, a slider guide rail is hung and passed between these columns, and a slider having a probe is provided movably along the slider guide rail, and the slider guide rail and the pair of columns are connected to each other. A multidimensional measuring machine, characterized in that the connecting portion with at least one of the measuring elements is connected via an adjusting means that allows the measuring element to be displaced in the X, Y, and two axis directions. (2. In Claim 1, the multi-dimensional measuring machine is characterized in that the pair of support columns are movable upright on a base in a direction perpendicular to the moving direction of the slider. (3) In claim 1, the support columns are fixedly erected on a base, and the slider guide rail is supported movably in a direction perpendicular to a moving direction of the slider at the upper end of these support columns. (4) In any one of claims 1 to 3, the slider guide rail is comprised of two parallel members. Multidimensional measuring machine. (5) Permissible Claims In any one of claims 1 to 4, the adjusting means includes a screw member that presses the connecting portion of the slider guide rail in X, Y, and two axial directions. A multidimensional measuring machine characterized by comprising: