JPS6314882B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is a two-dimensional measuring machine or a three-dimensional measuring machine, in which a measuring point can be displaced in two or more orthogonal axes, and the shape of a workpiece can be determined from the movement and displacement of this measuring point. This invention relates to a method for assembling a multidimensional measuring machine for measurement.

Conventionally, two-dimensional or two-dimensional measuring machines are well known, which measure the shape of the workpiece by bringing the contact point into contact with the surface of the workpiece and measuring the shape of the workpiece from the displacement of the contact point. It is used in all industrial fields because it can be measured.

However, with conventional coordinate measuring machines, the idea was that a robust structure with no adjustment points would ensure high accuracy, so the structural positional reference of the measuring machine was set on the top of the surface plate or on the top of the surface plate. The pillars are erected based on these positional standards, such as on the foundation. In this case, the pillars must be exactly perpendicular to the reference, and if the pillars are placed on both sides, the pillars on both sides must be finished and assembled so that they are parallel and exactly the same height. Then, structures to be supported by this support, such as a cross beam, a slider that can slide on this cross beam, etc. are assembled in order parallel to and perpendicular to the X, Y, and Z axes,
Furthermore, after adjusting this assembled structure, scales are fixed so that they are parallel to the sliders and have a certain clearance, etc., and each part is adjusted and stacked one by one based on a surface plate, etc., making it an extremely complex structure. It required extensive procedures and skill.

Therefore, in the case of conventional structures, the machining accuracy of a single part has a large influence on the overall accuracy, and if there is a discrepancy in adjustment at the initial stage, corrections and improvements cannot be made, and in the end Everything had to be adjusted and reassembled using lap finishing, etc. For this reason, since the overall accuracy greatly depends on the level of assembly skill, not only does the work require a high level of skill, but also requires the use of high-precision parts, which makes the product extremely expensive. It has the disadvantage of becoming. Furthermore, since each part is stacked one after another after adjustment, it is difficult to assemble on-site and extremely inconvenient to transport, which also makes conventional three-dimensional measuring machines difficult to use.

Furthermore, the above-mentioned circumstances are the same not only in three-dimensional measuring machines but also in two-dimensional measuring machines, and similar inconveniences occur.

An object of the present invention is to provide a method for assembling a multidimensional measuring machine that is easy to assemble and adjust.

The present invention is not bound by conventional thinking and focuses on the fact that ultimately it is sufficient for these measuring machines to move the measuring head accurately in the X, Y, and Z axis directions, and after assembling the structure, the measurement This was done based on the idea that the accuracy can be measured by directly using the sensor, and if there is an accuracy error based on the results, adjustments can be made in the X, Y, and Z axis directions without modifying the overall structure. , the connection part between the slider guide rail, which is spanned between a pair of columns set up on the base, and the pair of columns is connected via an adjustment means that allows the measuring head to be displaced in the X, Y, and Z axis directions. However, the above object is achieved by adjusting the accuracy by pressing the slider guide rail with the screw member of this adjusting means.

An embodiment in which the present invention is applied to a coordinate measuring machine will be described below with reference to the drawings.

In the overall structural diagram of FIG. 1, a base 21 consisting of a stone surface plate formed into a substantially rectangular parallelepiped has a plurality of screw holes 22 for attaching the object to be measured on its upper surface, and on front and rear end surfaces perpendicular to the longitudinal direction. Each has a handle 23 having an L-shaped cross section. Two guide rails 31 and 32 constituting a Y-axis direction guide section are attached to both left and right side surfaces of this base 21. These guide rails 31 and 32 are formed to be longer than the length in the longitudinal direction (Y-axis direction) of the base 21 (see FIG. 2), and are located below the upper surface of the base 21 and parallel to the upper surface of the base 21. It is provided to protrude from the side surface of the stand 21. At this time, guide rail 3
1 and 32 are below the top surface of the base 21, which means that the top surface of the guide rails 31 and 32 is below the top surface of the base 21.
This means that it is at a position that is equal to or lower than the top surface of. In addition, both guide rails 31 and 32 are made so that both sides of the cylinder are shaved off parallel to each other so that the cross-sectional shape perpendicular to the longitudinal direction has a substantially oval shape consisting of a circular arc portion and a straight portion (see Fig. 4). On the other hand, on the outer surface of the guide rail 31 at the front in FIG. 1, a long scale 33 is attached as will be described in detail later.

On the guide rails 31 and 32 on both sides, prismatic supports 41 and 42 are attached to the guide rails 31 and 32, respectively.
It is supported so as to be movable along the longitudinal direction (Y-axis direction). A horizontal member 43 made of one round bar is installed between the columns 41 and 42 on both sides in order to set the distance between the columns 41 and 42 in the X-axis direction to a predetermined dimension. 41, 42
A slider guide rail 46 consisting of two round bars is connected between the upper ends via connecting parts 44 and 45, respectively.
47 and a slider fine movement rail 48 consisting of one round bar is spanned in a direction perpendicular to the guide rails 31 and 32 and parallel to the upper surface of the base 21, that is, in the X-axis direction. A box-shaped slider 49 is supported by these slider guide rails 46 and 47 so as to be movable in the X-axis direction along the slider guide rails 46 and 47, and a box-shaped spindle is attached to the slider 49 via an angle measuring means 50. A support body 51 is supported so as to be tiltable about the Y-axis.
A spindle 52 is supported on the spindle support 51 so as to be slidable in the direction of its central axis, and a measuring element 53 is attached to the lower end of the spindle 52. At this time, the spindle 52 is set so that it can move exactly in the Z-axis direction (vertical direction) when the inclination of the spindle support 51 is zero, and this allows the slider 49 to move in the X-axis direction and the supports 41 and 42 to move. In conjunction with the movement in the Y-axis direction, the measuring head 53 can be moved arbitrarily in the X-, Y-, and Z-axis directions perpendicular to each other with respect to the base 21 and the object to be measured 54 placed on the base 21. has been done. In addition, these pillars 41, 42, horizontal member 43, connecting parts 44, 45, slider guide rails 46, 47, slider 49, angle measuring means 50,
The spindle support 51 and the spindle 52 constitute a probe support member 40 .

In FIGS. 3 and 4, that is, enlarged cross-sectional views of main parts of this embodiment, a plurality of holes 24 are formed in series in the Y-axis direction on both left and right sides of the base 21, and inside these holes 24, The small diameter portions 25A at one end of the support shaft 25 constituting the rail support portion are each fixed with an adhesive 26 (see FIG. 4).
At this time, the outer periphery of the small diameter portion 25A is processed with unevenness such as twill knurling to increase adhesive strength. Further, a stepped portion 25B is provided on the other end side of the support shaft 25.
A small-diameter convex portion 25C is integrally formed through the convex portion 25C, and a V-groove 25D is formed over the entire circumference in the middle of this convex portion 25C.
is formed.

At positions corresponding to each of the plurality of support shafts 25 protruding from both side surfaces of the base 21, recesses 31A are provided on the inner surfaces of both guide rails 31 and 32 to be engaged with the convex portions 25C of the support shafts 25. , 32A are formed, respectively, and two screw holes 31B, 32B penetrating into these recesses 31A, 32A are formed from the arcuate surfaces of the guide rails 31, 32, each having an oval cross section. A fixing screw 34 having a tapered tip is screwed into each of the fixing screws 32B. At this time, the center line of the V-groove 25D and the center axis of the fixing screw 34 are formed to be misaligned, and the direction of this misalignment is the same as that of the fixing screw 34.
The center line of 4 is closer to the protrusion 25C than the center line of the V groove 25D.
As a result, when the tapered end surface of the fixing screw 34 comes into contact with the wall surface of the V-groove 25D, the end surface of the stepped portion 25B of the support shaft 25 aligns with the straight line inside each guide rail 31, 32. crimped to the part,
The mounting position of each rail 31, 32 relative to the support shaft 25 can be regulated. Further, both guide rails 31 and 32 are connected to the base 2 via the support shaft 25.
1, each guide rail 3 is bonded using a positioning jig (not shown).
1 and 32 are fixed parallel to the upper surface of the base 21 with high precision, and in particular, the guide rail 31 has sufficient precision to serve as a positional reference for the measuring machine.

A groove 31C is formed over the entire length on the outer surface of one of the guide rails 31 and 32, and the groove 31C is parallel to the center axis of the rail 31, and its bottom surface is parallel to the center axis of the rail 31. Finished to be parallel to the outside surface. The scale 33 is pasted in the groove 31C, and the scale 33 is, for example, a reflective scale having vertical graduations on the μm order formed on the surface of a stainless steel plate.

An engagement block 6 is provided at the lower part of the one pillar 41.
1 is fixed, and the longitudinal direction (Y
There are three rollers 6 at each end of the axial direction).
One set each of roller groups consisting of rollers 2, 63, and 64 are provided. These rollers 62, 63, 64
are arranged so that the normal direction of their circumferential surfaces is 120 degrees, and the support shaft 62 of the roller 62 is
A bushing 62B and a roller 63,
The rollers 63 on the support shafts 63A and 64A of 64,
The fitting portions 64 are each eccentrically eccentric by a predetermined amount with respect to the center line, so that the normal position of each roller 62, 63, 64 can be adjusted, and contact with the guide rail 31 is ensured. . Moreover, the roller 62,
Among the rollers 63 and 64, the roller 62 is formed relatively wide because it comes into contact with a straight section of the rail 31, and the other rollers 63 and 64 are formed narrowly because they come into contact with an arcuate part of the rail 31. has been done.

The engagement block 61 is provided with the probe support member 4.
A measuring unit 70 is provided which, together with the scale 33, constitutes Y-direction measuring means for measuring the amount of movement of 0 in the Y-axis direction (see FIG. 3). This measurement unit 70 includes an index scale 71 having graduations similar to those of the scale 33 formed on a transparent plate such as glass, and the index scale 71.
A light emitting element 72 that emits light onto the surface of the scale 33 through the light emitting element 72, and a light receiving element 73 that receives light emitted from the light emitting element 72 and reflected by the scale 33.
The amount of movement of the support member 40 in the Y direction can be measured using a sine wave current generated in the light receiving element 73 due to changes in the amount of light received due to the brightness and darkness of both scales based on the relative movement of both scales 33 and 71. It's becoming like that. At this time, the optical axes of the light emitting element 72 and the light receiving element 73 are arranged in a V-shape so that the light from the light emitting element 72 is reflected by the scale 33 and reaches the light receiving element 73 reliably.

An engagement block 6 is provided at the bottom of the other support 42.
5 is fixed (see Figure 6), and this block 65
One set of roller groups each consisting of two rollers 66 and 67 are provided at both ends in the longitudinal direction (Y-axis direction). These rollers 66,6
7 is arranged so that the normal direction of its circumferential surface is 180 degrees, and the support shaft 66 of each roller 66, 67
The fitting portions of the rollers 66 and 67 in A and 67A are each eccentric by a predetermined amount with respect to the center line of the spindle, so that the normal position of each roller 66 and 67 can be adjusted, and the contact with the guide rail 32 is ensured. It is designed to be. At this time, both rollers 66 and 67 are 180
Since both the rollers 66 and 67, that is, the support column 42 are in contact with the rail 32 at the axial position, they are movable in the axial direction of the support shaft 25 (X-axis direction).

Further, the engagement block 61 is provided with a fine movement feeder 80 for the probe support member 40. This fine movement feeding device 80, as shown in FIG.
A frame 81 is formed in a substantially C-shape on its side, and the upper and lower arms 81A, 81B of the C-shape are disposed at a predetermined distance from the circumferential surface of the guide rail 31; The operating shaft 82 has a fine threaded portion 82A at one end thereof rotatably supported by the engaging block 61 via a bush 83 at the shoulder of the figure, and has the other end protruding from the block 61 to which a knob 84 is attached, and the frame. A rocking piece (not shown) which can swing freely is screwed through the upper end of the opening side of the C-shape 81 so that its lower end can come into contact with the upper surface of the guide rail 31, and the upper end is connected to the block 61.
A tightening screw 87 protrudes outward through a long hole (not shown) formed in the tightening screw 8.
7 to sandwich the guide rail 31 between the tightening screw 87 and the lower arm 81B of the frame 81,
As a result, the engagement block 61 of the probe support member 40 is substantially fixed to the guide rail 31 via the frame 81 and the operating shaft 82, and in this state, the operating shaft 82
When rotated, the operation shaft 82 and the frame 81 are slightly moved relative to each other, and the probe support member 40 can be slightly moved toward the guide rail 31. on the other hand,
When the tightening screw 87 is loosened to release the contact with the guide rail 31, the block 61 becomes freely movable relative to the guide rail 31, and accordingly, the probe support member 40 also becomes movable. In addition,
Each arm 81A, 81 of the frame 81 as necessary.
An appropriate spring may be applied to the frame 81 to ensure that B is separated from the circumferential surface of the guide rail 31.

Of the guide rails 31 and 32 on both sides, shock absorbers 90 are attached to both ends of one guide rail 31 (see FIGS. 2 and 3).
(see figure). Each of these shock absorbers 90 is
Small diameter portion 31D formed at the end of the guide rail 31
The guide rail 3 is slidably engaged with the guide rail 3.
Step end face 31 between the small diameter part 31D and the large diameter part of 1
A cylindrical body 91 having an inner peripheral protrusion 91A that can come into contact with E
and a spring receiver 92 which is screwed into the end of the guide rail 31 and whose outer periphery is larger than the small diameter portion 31D and smaller than the inner periphery of the cylindrical body 91;
A compression spring 93 is interposed between the spring receiver 92 and the inner protrusion 91A of the cylindrical body 91, and serves as a biasing means for constantly biasing the cylindrical body 91 to contact the step end surface 31E. Guide rail 31 of cylinder body 91
An engagement block 61 is attached to the end extending toward the large diameter side.
(To be more precise, the cover fitted over the block 61) is brought into contact with the compression spring 93, thereby reducing the impact received by the engagement block 61 and by extension the probe support member 40. There is.

Furthermore, stoppers 95 having a larger diameter than the guide rail 32 are attached to both ends of the other guide rail 32 (see FIGS. 1 and 2).

The connection between the pillar 41 and the horizontal member 43 is such that the end face of the horizontal member 43 is connected to the pillar 41 as shown in FIG.
A bushing with a flange 101 attached to the column 41 is inserted into the recess 43A formed at the end of the horizontal member 43, and penetrates through the bushing with a flange 101. This is done by being fixed by the tensile force of a bolt 102 screwed into the horizontal member 43. Furthermore, although not shown, the connection between the support column 42 and the horizontal member 43 has a similar structure. At this time, since the length between both end surfaces of the horizontal member 43 is accurately formed to a predetermined dimension, and the end surface is formed perpendicular to the axis, by tightening the bolt 102, both supports 41, 42
The distance therebetween is made to be exactly the length of the transverse member 43.

Further, as shown in FIGS. 3 and 4, the structure of the connecting portion 44 includes a connecting block 111 that is formed narrower than the distance between the front and rear side walls of the support column 41 and inserted with a gap between both side walls. Bushes 113 and 114 are attached to the block 111 so as to penetrate in the X-axis direction and into which the small diameter end portions of the slider guide rails 46 and 47 are inserted, and a portion is inserted into each of these bushes 113 and 114. At the same time, there are collared bushes 115, 116 whose collars are locked to the end faces of the respective bushes 113, 114, and a guide rail 46 which passes through each of these bushes 115, 116 and is screwed into the end of each guide rail 46, 47. , 47 and the connecting block 111, and the connecting block 1.
Reinforcement nuts 119, 120, each having one end abutted against the upper, lower, and center portions of the left side wall of the right side wall in FIG. 3 of FIG. Positioning bushes 122, 123, 124 as screw members screwed into the connecting block 111 so as to be adjustable in forward and backward positions, and positioning bushes 122, 123, 124 screwed into the connecting block 111 through these positioning bushes 122, 123, 124, respectively. bolts 125, 126, 127 for fixing, respectively;
A positioning bush 129 as a screw member whose one end is in contact with the lower surface of the connecting block 111 and whose other end is screwed into the reinforcing plate 128 of the support column 41 so as to be adjustable in forward and backward positions; It consists of a bolt 130 that is screwed into the connecting block 111 and fixes the positioning bush 129. By adjusting the position of each of these positioning bushes 122, 123, 124, 129, the slider guide rail 46,
47 and, in turn, the position of the measuring stylus 53 in the X, Y, and Z axis directions can be adjusted. Here, positioning bushes 122, 123, 124,
129 and bolts 125, 126, 127, 13
0 constitutes an adjusting means.

Although only the connecting block 112 of the other connecting part 45 is shown in FIG. 1, the other structure is the same as that of the connecting part 44, and the position adjustment in the X, Y, and Z axis directions is also the same. I am learning how to do it.

In the enlarged perspective view of the slider section in FIG.
The slider fine movement rail 48, which is stretched between the upper ends of the slider 12, is movable in the axial direction, and a fine screw (not shown) is provided in the portion inserted into the connecting block 111. An adjusting nut 141 that is screwed together and is supported by the connecting block 111 so as not to be able to move in the axial direction.
By turning the fine movement rail 48, the fine movement rail 48 can be moved in small amounts in the axial direction. Further, a midway of the fine movement rail 48 is slidably inserted into a pair of brackets 142 and 143 erected on the upper surface of the slider 49.
Fine movement rail 48 with tightening screw 144 screwed into
By tightening the rail 48 and slider 49
are integrated, and by turning the adjustment nut 141 in this state, the slider 49 can be finely moved in the X-axis direction. In addition, a scale 145 is fixed to the upper slider guide rail 46,
Due to the action of this scale 145 and a detector (not shown) provided inside the slider 49, the slider 49
Furthermore, the amount of movement of the probe 53 in the X-axis direction can be detected.

Both brackets 142, 14 of the slider 49
A support body angle fine adjustment screw 151 is rotatably but immovably supported between 3 and 3, and a nut member 152 is screwed into this fine adjustment screw 151. A fixing screw 153 is inserted into the groove (not shown), and this fixing screw 153 is attached to the side arm 154A of the rotating arm 154.
screwed into the tip of the Therefore, when the fixing screw 153 is loosened, the nut member 152 is moved as the fine adjustment screw 151 rotates, while when it is tightened, the nut member 152 is moved by the rotation of the fine adjustment screw 151.
51 rotation is not possible. Also,
The lower end of the rotating arm 154 is rotatably engaged with a rotation center shaft (not shown) of the spindle support 51, and by screwing in a tightening screw 155 inserted into the rotating arm 154, the rotating arm 15 is rotated.
4 and the rotation center shaft are fixed together.

Therefore, when the tightening screw 155 is loosened, the spindle support 51 can be tilted to the slider 49, while when the tightening screw 155 is tightened, the spindle support 51 can be fixed at an arbitrary angle. Furthermore, with this tightening screw 155 in the tightened state, loosen the fixing screw 153, and then loosen the fine adjustment screw 1.
By rotating 51, the angle of the support body 51 can be finely adjusted. Further, the inclination angle of the support body 51 at this time can be accurately read by the main scale 156 and the vernier scale 157 of the angle measuring means 50. At this time, the main length 156 is provided, for example, on the slider 49 side, and the vernier length 157 is provided on the spindle support 51 side, and this may be reversed.

The spindle 52 is provided with a scale 161 along the axial direction, and by the action of this scale 161 and a detector (not shown) provided in the spindle support 51, the amount of axial movement of the spindle 52 and thus the measuring tip 53 is determined. When the inclination of the support body 51 is zero, the amount of movement in the Z-axis direction can be measured. Further, between the lower end of the spindle 52 and the support body 51, a constant pressure spring 162 made of a thin and wide spring material and formed by winding one end into a spiral spring shape is stretched.
62, the spindle 52 is urged to rise at a slight speed due to balance with its own weight, and the surface of the scale 161 can also be protected.

A spindle 5 is provided at the lower end of the spindle 52.
A spindle fine movement shaft 163 parallel to 2 is supported so as to be movable in the axial direction, and an adjustment nut 1 is screwed into a fine screw (not shown) provided on this fine movement shaft 163.
64 is rotatably but immovably supported at the bottom of the spindle 52, and by turning this adjustment nut 164, the spindle 52 and fine adjustment shaft 163 are moved relative to each other in the axial direction. . Further, the fine movement shaft 1 is provided on the side surface of the support body 51.
A tightening screw 165 that fixes the fine movement shaft 16 to the support body 51 is screwed in.
By rotating the adjusting nut 164 with the spindle 5 fixed, the spindle 52 can be slightly moved in its axial direction.

Further, a probe attachment bush 171 is removably attached to the lower end of the spindle 52 with a set screw 172, and a probe 53 is detachably attached to the attachment bush 171 with a set screw 173. The mounting bush 171 also has mounting holes 17 in the direction orthogonal to the axis of the spindle 52.
1A is drilled, and the probe 5 is inserted into this mounting hole 171A.
3 and fixing with a set screw 173, the tip of the probe 53 can be directed in a direction 90 degrees different from the axis of the spindle 52. In addition, by not using the mounting bush 171,
It is also possible to use a probe 53 having the same thickness as the mounting bush 171.

Next, the assembly and adjustment method of this embodiment will be explained.

During assembly, each part is assembled into intermediate assemblies, that is, a unit including the base 21 and the guide rails 31 and 32, a unit including the respective pillars 41 and 42, a unit including the slider 49, and a unit including the spindle support 51 and the spindle 52. Each part is assembled into a unit, and it is sufficient to assemble each part in sequence in the same way as in normal assembly. At this time, when fixing the guide rails 31 and 32 to the base 21, accurate dimensions are determined using a jig.

The units assembled in this way are assembled to each other, but before they are assembled to the unit on the base 21, the probe support 40 is assembled. That is, the unit of the spindle support 51 is attached to the unit of the slider 49, and these are connected to the connecting block 111 of the connecting parts 44, 45 via the two slider guide rails 46, 47 and the fine movement rail 48.
Temporarily fixed at 112. On the other hand, the pillars 41, 4 on both sides
2 is assembled using the horizontal member 43 and a horizontal member for dimensioning if necessary, and the distance between both supports 41, 42 is fixed to accurately match the dimension of the horizontal member 43, and the dimensioned support pillars 41, 42 are fixed. 42 between the slider 4
Connecting parts 44 and 45 with 9 are positioned by positioning button 1.
22, 123, 124, 129 and bolt 12
5, 126, 127, and 130 for temporary fixation.

Next, this temporarily fixed gauge head support member 40
Both guide rails 31 and 32 fixed to the base 21
When assembling, the guide rail 31 side is used as a reference, so first,
The eccentric bushings 6 of each roller 62, 63, 64 are arranged so that the rollers 62, 63, 64 on the support 41 side are in proper contact with the guide rail 31.
2B, and the eccentric shafts 63A and 64A are used for adjustment.
As a result, the measuring head support member 40 is attached to the guide rail 3.
1 as a reference, the contact between the other guide rail 31 and each roller 66, 67 of the support column 42 is then adjusted in the same manner, and the entire temporary assembly is completed. At this time, since the rollers 66 and 67 of the support column 42 are brought into contact with the guide rail 32 from above and below, they are movable in the axial direction of the rail support shaft 25, and therefore the dimensions are determined in advance by the horizontal member 43. The supporting columns 41 and 42 are supported by both guide rails 31 and 32 while maintaining the sized spacing.

When the temporary assembly is completed in this way, the horizontal member for dimensioning assembled between the supports 41 and 42 as necessary is removed, and adjustment is started.

To start the adjustment, loosen the other tightening screws 87, 144, and 165, except for the tightening screw 155 that allows the spindle support 51 to tilt.
The slider 49 and spindle 52 are allowed to move freely so that the probe 53 can be moved to any position on the X, Y, and Z axes. In this state, first, the movement of the slider 49 with respect to both slider guide rails 46 and 47 is determined. For smoothness, both connecting blocks 11
Adjust the assembly position with respect to 1 and 112, and fix with bolts 117 and 118 after adjustment.

Next, we will adjust the accuracy of the measuring device itself.
At this time, the angle measuring means 50 is used to set the spindle support 51 to the slider 49 at a predetermined angle, that is, so that the spindle 52 is accurately perpendicular to the slider guide rails 46 and 47. In this state, a product with standard dimensions is mounted on the base 21, and the measurement stylus 53 is brought into contact with this product with standard dimensions, so that the movement of the measurement stylus 53 is adjusted so that it moves accurately in the X, Y, and Z axis directions. This adjustment is all done at both connecting parts 44 and 45, and each fixing bolt 12
5, 126, 127, 130 as appropriate, and each positioning bush 122, 123, 124, 129
Move forward and backward.

Once the adjustment is completed in this manner, the dimensions, shape, etc. of each part of the object to be measured 54 can be measured in the same manner as with a conventional three-dimensional measuring machine.

When making adjustments, it is possible to make adjustments more easily by attaching an indicator such as a test indicator to the spindle 52 instead of the probe 53, and making adjustments while watching this pointer so that the pointer does not move. can. Furthermore, the accuracy of only the mechanical structure can be set purely without going through the electrical system of the measuring machine.

According to this embodiment as described above, there are the following effects.

That is, the precision adjustment of the measuring head 53 is performed using the measuring head 53 itself after the entire structure is assembled.
Since the adjustment is made only at the connecting portions 44 and 45, no skill is required for assembly, and assembly can be completed in a short time. In addition, since adjustments can be made after assembly, the need for high-grade machined parts can be reduced.
With the ease of adjustment, it is possible to significantly reduce the cost while maintaining accuracy, and the adjustment associated with transportation is also easy, so transportability can be improved.
Furthermore, since each part of the probe support member 40 is made into a unit and can be assembled individually, and all adjustments can be made at the connecting parts 44 and 45, one of the guide rails 31 and 32 can be In the embodiment, it is only necessary to assemble the guide rail 31 as a reference, and therefore the parallelism of both rails 31 and 32 does not need to be much of a problem.
It is only necessary to attach them to the same dimensions from the upper surface of the base 21, and the assembly work can be simplified. Further, the guide rails 31 and 32 are connected to each support shaft 25 by a V
The scale 33 is positioned at a predetermined position by the groove 25D and the fixing screw 34 and is removable.
The rails 31 and 32 can be easily replaced when the rails 31 and 32 are damaged.

As mentioned above, each part of the probe support member 40 is made into a unit, so it is possible to replace only each part, for example, only the support column 42 can be replaced.
In addition, since both the supports 41 and 42 do not need to be bent, the measurement range can be expanded by making them expandable and retractable.

Furthermore, since both the columns 41 and 42 are connected by a tensile force via the horizontal member 43, the columns 41 and 42
Furthermore, the rigidity of the structure including the slider guide rails 46 and 47 can be increased. In this case, since it is sufficient that the horizontal member 43 is located above the highest position of the lower end of the measuring head 53, it is not necessary to provide it at the upper ends of the columns 41 and 42, but it can be provided at the middle part of both the columns 41 and 42. , deformation in the spreading direction between the lower ends of the struts 41 and 42 can be effectively prevented.

Further, two slider guide rails 46 and 47 are provided, and they are mutually arranged in the front and back direction (Y-axis direction).
Since the scale 145 is shifted in position and supported on the back side of the upper rail 46, the slider 49 can be easily prevented from rotating, and in order to protect the scale 145, the scale 145 is at least vertical or It is desirable to install the scale downward, and in this embodiment, the upper rail 46 focuses on holding the scale, and the lower rail 47
can receive vertical loads. Furthermore, by shifting both rails 46 and 47 in the front-rear direction, the height dimension can be reduced.

Furthermore, since the columns 41 and 42 are supported by the side surfaces of the base 21, the entire upper surface of the base 21 can be used as the effective measurement area, and the base 21, which is made of an expensive stone surface plate, etc.
1 can be made smaller, which not only reduces the cost of the device, but also makes the entire device smaller and requires less installation space. Further, since there are no obstructions on the top surface of the base 21, the movement of the object 54 to be measured is not restricted, and even the object 54 to be measured larger than the top surface of the base 21 can be installed, and its installation posture is not limited. Furthermore, since the entire surface of the base 21 is open, the position of the user is not limited, making it easy to use. In addition, since the overall size is miniaturized,
It is extremely convenient to carry. Furthermore, since the guide rails 31 and 32 on both sides are set longer than the length of the base 21, it is also possible to measure a larger object 54 from this point of view. In addition, the pillar 41,
The rollers 62, 63, 64, 66, and 67 that movably support the rollers 42 on the guide rails 31 and 32 have no effect on the effective measurement area no matter how many they are arranged in the longitudinal direction of the rails 31 and 32, so these should be compared. By using many pillars, the pillars 41 and 42 can be stably supported. Furthermore, since there are no obstacles on the base 21, the object to be measured 54 can be automatically installed.
Easy to remove.

Since the guide rails 31 and 32 are fixed to the base 21 by adhesion via the support shaft 25, the rails 3 can be fixed by using an appropriate jig or the like.
1 and 32 easily against the upper surface of the base 21, and
This guide rail 31, 3 can be positioned with high precision.
The probe support member 40 can be installed using 2 as a positional reference. Further, each roller 62, 63, 64 is in contact with the guide rail 31.
3 and 64 are oriented at 120 degrees to each other, and
The base 21 side is not on the side, but diagonally above the arc part,
Since the contact is made from below, the space on the side surface of the base 21 due to the contact of the rollers 63 and 64 can be reduced, and therefore the guide rail 3
1 can be brought close to the base 21 side, which is advantageous in terms of load support due to the cantilever structure.

FIG. 6 shows another embodiment of the present invention, in which the guide rail is provided above the base. Here, the same or equivalent components in this embodiment and the previous embodiment are designated by the same or equivalent symbols to simplify the explanation.

In FIG. 6, large support stands 425A and 425B are fixedly erected on both sides of the base 21,
Guide rails 431 and 432 are provided above the support stands 425A and 425B, respectively, along the Y-axis direction, and these guide rails 431 and 43
Connecting parts 444 and 445 are connected to rails 431 and 43 on the top of 2 via short supports 441 and 442, respectively.
It is provided movably along 2. These supports 441, 442 are equipped with means for sliding on the rails 431, 432, such as rollers, air bearings, etc., and Y-direction movement measuring means for measuring the amount of movement along the rails 431, 432. Similar to the example, and both connecting members 444, 44
5 is also constructed in the same manner as the previous embodiment, and the connecting blocks 111, 112 are adjustable by screw members such as positioning bushes.

Both pillars 441, 442 and connecting portion 444,
445, the horizontal member 43, slider guide rails 46, 47, and slider fine movement rail 48 are respectively spanned, and both slider guide rails 46, 47
A slider 49 is slidably supported.
A spindle support 51 is attached to this slider 49 via angle measuring means, and this support 51
A spindle 52 having a measuring element 53 at its lower end is supported so as to be freely movable in the axial direction.

This embodiment configured in this manner can also provide the same functions and effects as the embodiments described above.

In each of the above embodiments, the measuring element 53 has a contact type structure, but the measuring element in the present invention is not limited to this, and may be one using capacitance or a laser length measuring device. It also includes a so-called non-contact structure. Furthermore, in the first embodiment, the guide rail 32 that is not used as a reference among both guide rails 31 and 32 does not necessarily have to be provided on the side of the base 21 and below the upper surface. Alternatively, the upper surface of the base 21 itself may be used as a direct guide without particularly providing a guide rail. In short, it is sufficient that a guide rail serving as a reference is provided on one side of the base 21. Furthermore, the present invention is not limited to three-dimensional measuring machines, but can also be applied to other types of measuring machines, such as two-dimensional measuring machines or shape measuring machines that cannot move in one direction among three orthogonal axes. However, it is more effective if the apparatus itself is used in a large and expensive three-dimensional measuring machine. Further, in the above embodiment, there is one pillar 41, 42 on each side, but there may be two or more pillars on each side, and two or more guide rails 31, 32 may be provided on one side. Here, two or more guide rails 31 on the reference side may be provided on one side, one of which may be used as a reference, and the remaining guide rails 31 may receive the load of the probe support member 40. Furthermore, detection of the amount of movement in the X, Y, and Z axis directions is not limited to optical detectors as in the above embodiments, but may also be performed using other detectors such as magnetic, electromagnetic detectors, and laser length measuring devices. Good too. Further, in the above embodiment, the connection blocks 111, 112 and the slider guide rails 46, 47 are both connected by bolts 11.
7, 118, but in implementation, one of them is fixed as shown in FIG.
It may be possible to move in the axial direction without bolting.

As described above, according to the present invention, it is possible to provide a method for assembling a multidimensional measuring machine that is easy to assemble and adjust and is inexpensive.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment in which the present invention is applied to a three-dimensional measuring machine, FIG. 2 is a plan view thereof, and FIG. 3 is an enlarged side view of the main part with a part of FIG. 2 cut away. FIG. 4 is an enlarged front view of the same, FIG. 5 is an enlarged perspective view with a part of the slider portion of this embodiment cut away, FIG. 6 is a perspective view showing another embodiment of the present invention, and FIG. FIG. 7 is a sectional view of a main part showing another structural example of the slider guide rail mounting structure in the embodiment. 21... Base, 24... Hole, 25... Support shaft,
31, 32, 431, 432...Guide rail, 4
0...Measurement head support member, 41, 42, 441, 4
42... Support column, 43... Horizontal member, 44, 45, 4
44, 445... Connecting portion, 46, 47... Slider guide rail, 49... Slider, 51... Spindle support, 52... Spindle, 53... Measuring head, 54... Measured object, 101... Bush with flange, 102... Bolt, 111, 112... Connection block, 113, 114... Bush, 11
5,116...Button with brim, 117,118
... Bolt, 119, 120, 121 ... Reinforcement nut, 122, 123, 124, 129 ... Positioning bush, 130 ... Bolt, 425A,
425B...Support stand.

Claims (1)

[Claims] 1. A probe that can be displaced in at least two directions of the X, Y, and Z axes that are perpendicular to each other is brought into contact with an object to be measured placed on a base, and the measurement of the object is determined from the displacement of the probe. This is a method of assembling a multidimensional measuring machine for measuring shapes, etc., in which a pair of columns are erected on a base, a slider guide rail is spanned between these columns, and a slider with a measuring head is attached to the slider guide rail. Then, by pressing the slider guide rail from each column side with a screw member, the measuring head is displaced in the X, Y, and Z axis directions with respect to the base, and the posture of the measuring head is adjusted. A method for assembling a multidimensional measuring machine characterized by performing the following steps.