JPS6314883B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION According to the present invention, a probe is movable in the directions of the X, Y, and Z axes that are orthogonal to each other, and the shape of the object to be measured can be determined from the displacement of the probe. Regarding a three-dimensional measuring machine for measurement.

Conventionally, three-dimensional measuring machines have been known that measure the shape of the workpiece by bringing the contact point into contact with the surface of the workpiece and measuring the shape of the workpiece from the displacement of the contact point, and such measuring machines can measure with high accuracy. It is used in all industrial fields.

There are various types of such conventional three-dimensional measuring machines, but in the case of a structure in which the support that supports the probe itself is movable in one direction, for example, in the Y-axis direction, the support It is generally constructed in the form of a gate so that it straddles the base. in this case,
In the past, the idea was that a robust structure with no adjustment points would ensure high precision, so the gate-shaped support was constructed as an integral part by welding, etc., and the guide rail was also welded onto the crossbeam of this support. etc., and the slider is supported so as to be movable along the guide rail in a direction perpendicular to the direction of movement of the support column, for example, in the X-axis direction.

However, in such a conventional structure, each part is fixedly installed and is stacked up one after another with accuracy on a base (surface plate) that serves as a positional reference, so it is difficult to process. Also, it is difficult to assemble, which increases manufacturing costs.

SUMMARY OF THE INVENTION An object of the present invention is to provide a three-dimensional measuring machine with a movable support, which is easy to assemble and adjust, and is inexpensive.

The present invention provides Y-axis guide portions extending in the Y-axis direction on both sides of the base in the X-axis direction, and supports that are movably erected along these guide portions. Either one of the struts is engaged with a guide part in which the strut is guided so that it cannot be displaced in the X-axis direction and the Z-axis direction, and a slider is inserted between the upper parts of these two struts in the X-axis direction. A removable slider guide rail is installed across both supports that are movably supported, and a measuring element is provided on the slider so as to be movable in the Z-axis direction. A horizontal member for setting the distance in the X-axis direction between the two columns to a predetermined dimension is fixed between the two columns above the slider guide rail and below the slider guide rail. Unlike the conventional integrated structure, the function is separated into separate members, that is, the horizontal member and the slider guide member, and the slider guide member can be adjusted. By using it as a reference, the engagement with the other guide part is free, which facilitates assembly, and the horizontal member for dimensioning can be used to prevent disengagement due to this free engagement. The aim is to achieve the above objectives.

An embodiment in which the present invention is applied to a coordinate measuring machine will be described below with reference to the drawings.

In the overall structural diagram of FIG. 1, a base 21 consisting of a stone surface plate formed into a substantially rectangular parallelepiped has a plurality of screw holes 22 for attaching the object to be measured on its upper surface, and front and rear end surfaces perpendicular to the longitudinal direction. Each has a handle 23 having an L-shaped cross section. This base 21
Two guide rails 31 and 32 constituting a Y-axis direction guide section are attached to both left and right side surfaces of. These guide rails 31 and 32 are connected to the base 21
(see FIG. 2), and is provided below the upper surface of the base 21, parallel to the upper surface, and protruding from the side surface of the base 21. In this case, the fact that the guide rails 31 and 32 are below the top surface of the base 21 means that the top surfaces of the guide rails 31 and 32 are at the same or lower position than the top surface of the base 21. In addition, both guide rails 31 and 32 are made so that both sides of the cylinder are shaved off parallel to each other so that the cross-sectional shape perpendicular to the longitudinal direction has a substantially oval shape consisting of a circular arc portion and a straight portion (see Fig. 4). On the other hand, on the outer surface of the guide rail 31 at the front in FIG. 1, a long scale 33 is attached as will be described in detail later.

On the guide rails 31 and 32 on both sides, prismatic supports 41 and 42 are attached to the guide rails 31 and 32, respectively.
It is supported so as to be movable along the longitudinal direction (Y-axis direction). A horizontal member 43 made of a single round bar is installed midway between the pillars 41 and 42 on both sides in order to set the distance between the pillars 41 and 42 in the X-axis direction to a predetermined dimension and to increase rigidity. Furthermore, slider guide rails 46 and 47 made of two round bars and a slider fine movement rail 48 made of one round bar are connected between the upper ends of both supports 41 and 42 via connecting parts 44 and 45, respectively. rail 3
1 and 32 and in a direction parallel to the upper surface of the base 21, that is, in the X-axis direction. A box-shaped slider 49 is supported by these slider guide rails 46 and 47 so as to be movable in the X-axis direction along the slider guide rails 46 and 47, and a box-shaped spindle is attached to the slider 49 via an angle measuring means 50. A support body 51 is supported so as to be tiltable about the Y-axis. A spindle 52 is supported on this spindle support 51 so as to be slidable in the direction of its central axis.
A measuring point 53 is attached to the lower end of the probe. At this time, the spindle 52 is set so that it can move exactly in the Z-axis direction (vertical direction) when the inclination of the spindle support 51 is zero, and this allows the slider 49 to move in the X-axis direction and the supports 41 and 42 to move. Along with the movement in the Y-axis direction, the measuring stylus 53 moves toward the base 2.
1 and the object to be measured 54 placed on this base 21
It is possible to move arbitrarily in the X, Y, and Z axis directions that are orthogonal to each other. In addition, these pillars 41, 42, horizontal members 43, connecting parts 44, 4
5, slider guide rails 46, 47, slider 4
9. An angle measuring means 50, a spindle support 51, and a spindle 52 constitute a probe support member 40.

In FIGS. 3 and 4, that is, enlarged cross-sectional views of main parts of this embodiment, a plurality of holes 24 are formed in series in the Y-axis direction on both left and right sides of the base 21,
Inside these holes 24, one end small diameter portion 25A of a support shaft 25 constituting a rail support portion is adhered with an adhesive 26 (see FIG. 4). On this occasion,
The outer periphery of the small diameter portion 25A is textured with twill knurling or the like to increase adhesive strength. Further, a small diameter convex portion 25C is integrally formed on the other end side of the support shaft 25 via a step portion 25B.
A V-groove 25D is formed in the middle of 5C over the entire circumference.

At positions corresponding to each of the plurality of support shafts 25 protruding from both side surfaces of the base 21, recesses 31A are provided on the inner surfaces of both guide rails 31 and 32 to be engaged with the convex portions 25C of the support shafts 25. , 32A are formed, respectively, and screw holes 31B, 32B penetrating into these recesses 31A, 32A are formed from the arcuate surfaces of the guide rails 31, 32 having an oval cross section to the recesses 31A, 32A of each guide rail 31, 32. Two screw holes are formed at positions corresponding to the screw holes 32.
Fixing screws 34 each having a tapered tip are screwed into B and 32B. At this time, the center line of the V-groove 25D and the center axis of the fixing screw 34 are formed to be misaligned. 25C, so that the tapered end surface of the fixing screw 34 is aligned with the V-groove 2.
Step portion 25 of support shaft 25 when in contact with wall surface of 5D
The end face of B is crimped to the inner straight part of each guide rail 31, 32, and the support shaft 2 of each rail 31, 32 is
The mounting position can be regulated for 5. In addition, both guide rails 31 and 32 are connected to the support shaft 2.
When the guide rails 31 and 32 are adhesively fixed to the base 21 via the guide rails 5, a positioning jig (not shown) is used. In particular, the guide rail 31 is designed to have sufficient accuracy to serve as a positional reference for the measuring machine.

A groove 31C is formed over the entire length on the outer surface of one of the guide rails 31 and 32, and the groove 31C is parallel to the center axis of the rail 31, and its bottom surface is parallel to the center axis of the rail 31. Finished to be parallel to the outside surface. The scale 33 is pasted in the groove 31C, and the scale 33 is, for example, a reflective scale having vertical graduations on the μm order formed on the surface of a stainless steel plate.

An engagement block 6 is provided at the lower part of the one pillar 41.
1 is fixed, and the longitudinal direction (Y
There are three rollers 6 at each end of the axial direction).
One set each of roller groups consisting of rollers 2, 63, and 64 are provided. These rollers 62, 63, 64
are arranged so that the normal direction of their circumferential surfaces is 120 degrees, and the support shaft 62 of the roller 62 is
A bushing 62B and a roller 63,
The rollers 63 on the support shafts 63A and 64A of 64,
The fitting portions 64 are each eccentrically eccentric by a predetermined amount with respect to the center line, so that the normal position of each roller 62, 63, 64 can be adjusted, and contact with the guide rail 31 is ensured. . Moreover, the roller 62,
Among the rollers 63 and 64, the roller 62 is formed relatively wide because it comes into contact with a straight section of the rail 31, and the other rollers 63 and 64 are formed narrowly because they come into contact with an arcuate part of the rail 31. has been done. Furthermore, a guide rail 31 and three rollers 6
2, 63, and 64 are in contact with each other at three points in the 120 degree direction, so that the block 61, that is, the support column 41, cannot be moved in the X-axis and Z-axis directions.

The engagement block 61 is provided with the probe support member 4.
A measuring unit 70 is provided which, together with the scale 33, constitutes Y-direction measuring means for measuring the amount of movement of 0 in the Y-axis direction (see FIG. 3). This measurement unit 70 includes an index scale 71 having graduations similar to those of the scale 33 formed on a transparent plate such as glass, and the index scale 71.
a light emitting element 72 that emits light onto the surface of the scale 33 through the light emitting element 72; and a light receiving element 7 that receives the light emitted from the light emitting element 72 and reflected by the scale 33.
3, the amount of movement of the support member 40 in the Y direction is measured by a sinusoidal current generated in the light receiving element 73 due to a change in the amount of light received due to the brightness and darkness of both scales based on the relative movement of both scales 33 and 71. I'm starting to be able to do it. At this time, the optical axes of the light emitting element 72 and the light receiving element 73 are arranged in a V-shape so that the light from the light emitting element 72 is reflected by the scale 33 and reaches the light receiving element 73 reliably.

An engagement block 6 is provided at the bottom of the other support 42.
5 is fixed, and the longitudinal direction (Y
There are two rollers 6 at each end of the axial direction).
One set of roller groups each consisting of 6 and 67 rollers are provided. These rollers 66 and 67 are arranged so that the normal direction of their circumferential surfaces is 180 degrees, and
The fitting portions of the rollers 66, 67 on the spindles 66A, 67A of the rollers 66, 67 are respectively eccentric by a predetermined amount with respect to the spindle center line, so that the normal position of each roller 66, 67 can be adjusted, and the guide rail 32
This ensures reliable contact with the At this time, both rollers 66 and 67 are placed on the rail 3 at the 180 degree position.
2, both rollers 66 and 67, that is, the support column 42, are movable in the axial direction of the support shaft 25 (X-axis direction).

Further, the engagement block 61 is provided with a fine movement feeder 80 for the probe support member 40. This fine movement feeding device 80, as shown in FIG.
A frame 81 is formed with a substantially C-shaped side surface, and the opening side ends of the upper and lower arms 81A, 81B of this C-shape are arranged at a predetermined distance from the circumferential surface of the guide rail 31; An operating shaft 82 has a fine screw portion 82A at one end of the C-shaped shoulder and is rotatably supported by the engagement block 61 via a bush 83, and the other end protrudes from the block 61 and has a knob 84 attached thereto; A swinging piece (not shown) that can swing freely is screwed through the upper end of the C-shaped opening side of the frame 81 so that its lower end can come into contact with the upper surface of the guide rail 31, and its upper end is connected to the block 6.
1, and a tightening screw 87 protruding outward through a long hole (not shown) formed in the frame 81.
The guide rail 31 is held between the lower arm 81B of the probe and the engagement block 61 of the probe support member 40 is substantially fixed to the guide rail 31 via the frame 81 and the operating shaft 82. If the operating shaft 82 is rotated, the operating shaft 82 and the frame 8
1 is moved slightly relative to the guide rail 31, so that the probe support member 40 can be moved slightly relative to the guide rail 31.
On the other hand, if the tightening screw 87 is loosened to release the contact with the guide rail 31, the block 61 becomes freely movable relative to the guide rail 31, and therefore the probe support member 40 also becomes movable. There is.
Note that each arm 81 of the frame 81 may be
An appropriate spring may be applied to the frame 81 to ensure that A and 81B are separated from the circumferential surface of the guide rail 31.

Of the guide rails 31 and 32 on both sides, shock absorbers 90 are attached to both sides of one guide rail 31 (see FIGS. 2 and 3). Each of these shock absorbers 90
is the small diameter portion 3 formed at the end of the guide rail 31.
A cylindrical body 91 having an inner peripheral protrusion 91A that is slidably engaged with the guide rail 1D and can come into contact with the step end surface 31E between the small diameter portion 31D and the large diameter portion of the guide rail 31; A spring receiver 9 is screwed into the end of the cylindrical body 91 and has an outer periphery larger than the small diameter portion 31D and smaller than the inner periphery of the cylindrical body 91.
2, this spring receiver 92 and the inner peripheral protrusion 9 of the cylindrical body 91
1A, and the cylinder 91 is always connected to the step end face 3.
1E, and an engagement block 61 (more precisely, block 61 When the contact point (cover fitted over the contact point) is brought into contact with the contact point, the compression spring 93 is bent, thereby reducing the impact received by the engagement block 61 and by extension the contact point support member 40.

Furthermore, stoppers 95 having a larger diameter than the guide rail 32 are attached to both ends of the other guide rail 32 (see FIGS. 1 and 2).

The connection between the pillar 41 and the horizontal member 43 is such that the end face of the horizontal member 43 is connected to the pillar 41 as shown in FIG.
A bushing with a flange 101 attached to the column 41 is inserted into the recess 43A formed at the end of the horizontal member 43, and penetrates through the bushing with a flange 101. This is done by being fixed by the tensile force of a bolt 102 screwed into the horizontal member 43. Furthermore, although not shown, the connection between the support column 42 and the horizontal member 43 has a similar structure. At this time, since the length between both end surfaces of the horizontal member 43 is accurately formed to a predetermined dimension, and the end portion is formed at right angles to the axis, by tightening the bolt 102, both support columns 41 ,42
The distance therebetween is made to be exactly the length of the transverse member 43. Here, the horizontal member 43 is provided above the uppermost movement position of the lower end of the measuring element 53 and below the slider guide rails 46, 47.

Further, as shown in FIGS. 3 and 4, the structure of the connecting portion 44 includes a connecting block 111 that is formed narrower than the distance between the front and rear side walls of the support column 41 and inserted with a gap between both side walls. Bushes 113 and 114 are attached to the block 111 so as to penetrate in the X-axis direction and into which the small diameter end portions of the slider guide rails 46 and 47 are inserted, and a portion is inserted into each of these bushes 113 and 114. and bushes with flanges 115 and 116 whose flanges are locked to the end faces of the bushes 113 and 114, and screwed into the ends of the guide rails 46 and 47 through the bushes 115 and 116. Bolts 117 and 118 which connect 46 and 47 to the connecting block 111 have one end abutted on the upper, lower and left side walls of the connecting block 111 on the right side in FIG. 3, respectively. and positioning bushes 122, 123, 124 as screw members screwed into reinforcing nuts 119, 120, 121 whose other ends are fixed to the side walls of the support column 41, respectively, so as to be able to adjust their advancing and retracting positions, and these positioning bushes 122, Bolts 125, 126, 127 pass through the bolts 123, 124 and are screwed into the connecting block 111 to fix the positioning bushes 122, 123, 124, respectively.
One end is brought into contact with the lower surface of the connecting block 111, and the other end is brought into contact with the reinforcing plate 128 of the support column 41.
It consists of a positioning bush 129 as a screw member which is screwed into the positioning bush 129 so that its forward and backward positions can be adjusted, and a bolt 130 which passes through this positioning bush 129 and is screwed into the connecting block 111 to fix the positioning bush 129. By adjusting the positions of the bushes 122, 123, 124, and 129, the slider guide rail 4
6, 47, and the position of the measuring stylus 53 in the X, Y, and Z axis directions, that is, the three-dimensional attitude of the measuring stylus 53 relative to the base 21 can be adjusted. Here, the positioning bush 122,1
23, 124, 129 and bolts 125, 12
6, 127, and 130 constitute an adjusting means.

Although only the connecting block 112 of the other connecting part 45 is shown in FIG. 1, the other structure is the same as that of the connecting part 44, and the position adjustment in the X, Y, and Z axis directions is also the same. I am learning how to do it.

In the enlarged perspective view of the slider section in FIG.
The slider fine movement rail 48, which is stretched between the upper ends of the slider 12, is movable in the axial direction, and a fine screw (not shown) is provided in the portion inserted into the connecting block 111. By turning an adjustment nut 141 which is fitted together and supported by the connecting block 111 so as not to be able to move in the axial direction, the fine movement rail 48 can be moved in small amounts in the axial direction. In addition, the fine movement rail 48 is slidably inserted into a pair of brackets 142 and 143 erected on the upper surface of the slider 49, and the fine movement rail 48 is inserted in the middle of the fine movement rail 48 with a tightening screw 144 screwed into one of the brackets 142. By tightening, the rail 48 and the slider 49 are integrated, and by turning the adjustment nut 141 in this state, the slider 48 can be finely moved in the X-axis direction. Further, a scale 145 is fixed to the upper slider guide rail 46,
Due to the action of this scale 145 and a detector (not shown) provided inside the slider 49, the slider 49
Furthermore, the amount of movement of the probe 53 in the X-axis direction can be detected.

Both brackets 142, 14 of the slider 49
A support body angle fine adjustment screw 151 is rotatably but immovably supported between 3 and 3, and a nut member 152 is screwed into this fine adjustment screw 151. A fixing screw 153 is inserted into the groove (not shown), and this fixing screw 153 is attached to the side arm 154A of the rotating arm 154.
screwed into the tip of the Therefore, when the fixing screw 153 is loosened, the nut member 152 is moved as the fine adjustment screw 151 rotates, while when it is tightened, the nut member 152 is moved by the rotation of the fine adjustment screw 151.
51 rotation is not possible. Also,
The lower end of the rotating arm 154 is rotatably engaged with a rotation center shaft (not shown) of the spindle support 51, and by screwing in a tightening screw 155 inserted into the rotating arm 154, the rotating arm 15 is rotated.
4 and the rotation center shaft are fixed together.

Therefore, when the tightening screw 155 is loosened, the spindle support 51 can be tilted to the slider 49, while when the tightening screw 155 is tightened, the spindle support 51 can be fixed at an arbitrary angle. Furthermore, with this tightening screw 155 in the tightened state, loosen the fixing screw 153, and then loosen the fine adjustment screw 1.
By rotating 51, the angle of the support body 51 can be finely adjusted. Further, the inclination angle of the support body 51 at this time can be accurately read by the main scale 156 and the vernier scale 157 of the angle measuring means 50. At this time, the main length 156 is provided, for example, on the slider 49 side, and the vernier length 157 is provided on the spindle support 51 side, and this may be reversed.

The spindle 52 is provided with a scale 161 along the axial direction, and by the action of this scale 161 and a detector (not shown) provided in the spindle support 51, the amount of axial movement of the spindle 52 and thus the measuring tip 53 is determined. When the inclination of the support body 51 is zero, the amount of movement in the Z-axis direction can be measured. Further, between the lower end of the spindle 52 and the support body 51, a constant pressure spring 162 made of a thin and wide spring material and formed by winding one end into a spiral spring shape is stretched.
62 urges the spindle 52 to rise at a slight speed due to balance with its own weight, and also protects the surface of the scale 161 when the spindle 82 descends.

A spindle 5 is provided at the lower end of the spindle 52.
A spindle fine movement shaft 163 parallel to 2 is supported so as to be movable in the axial direction, and an adjustment nut 1 is screwed into a fine screw (not shown) provided on this fine movement shaft 163.
64 is rotatably but immovably supported at the bottom of the spindle 52, and by turning this adjustment nut 164, the spindle 52 and fine adjustment shaft 163 are moved relative to each other in the axial direction. . Further, the fine movement shaft 1 is provided on the side surface of the support body 51.
63 to the support body 51 is screwed in, and the fine movement shaft 163 is screwed in from this tightening screw 165.
The spindle 52 can be slightly moved in its axial direction by rotating the adjusting nut 164 while the spindle 52 is fixed.

Further, a probe attachment bush 171 is removably attached to the lower end of the spindle 52 with a set screw 172, and a probe 53 is detachably attached to the attachment bush 171 with a set screw 173. The mounting bush 171 also has mounting holes 17 in the direction orthogonal to the axis of the spindle 52.
1A is drilled, and the probe 5 is inserted into this mounting hole 171A.
3 and fixing with a set screw 173, the tip of the probe 53 can be directed in a direction 90 degrees different from the axis of the spindle 52. In addition, by not using the mounting bush 171,
It is also possible to use a probe 53 having the same thickness as the mounting bush 171.

Next, the assembly and adjustment method of this embodiment will be explained.

During assembly, each part is assembled into intermediate assemblies, that is, a unit including the base 21 and the guide rails 31 and 32, a unit including the respective pillars 41 and 42, a unit including the slider 49, and a unit including the spindle support 51 and the spindle 52. Each part is assembled into a unit, and it is sufficient to assemble each part in sequence in the same way as in normal assembly. At this time, when fixing the guide rails 31 and 32 to the base 21, accurate dimensions are determined using a jig.

The units assembled in this way are assembled to each other, but before they are assembled to the unit on the base 21, the probe support 40 is assembled. That is, the unit of the spindle support 51 is attached to the unit of the slider 49, and these are connected to the connecting block 111 of the connecting parts 44, 45 via the two slider guide rails 46, 47 and the fine movement rail 48.
Temporarily fixed at 112. On the other hand, the pillars 41, 4 on both sides
2 is assembled using the horizontal member 43 and, if necessary, a horizontal member for dimensioning, and the distance between both supports 41, 42 is fixed to accurately match the dimension of the horizontal member 43, and the dimensioned support pillars 41, 42 are fixed. 42 between the slider 4
Connecting parts 44 and 45 with 9 are positioned by positioning button 1.
22, 123, 124, 129 and bolt 12
5, 126, 127, and 130 for temporary fixation.

Next, this temporarily fixed gauge head support member 40
Both guide rails 31 and 32 fixed to the base 21
When assembling, the guide rail 31 side is used as a reference, so first,
The eccentric bushings 62 of each roller 62, 63, 64 are arranged so that the rollers 62, 63, 64 on the support column 41 side are in proper contact with this guide rail 31.
B. Adjust using eccentric shafts 63A and 64A. As a result, the measuring head support member 40 is attached to the guide rail 31.
Since it has been assembled based on the reference rail 32, the contact between the other guide rail 32 and each roller 66, 67 of the support column 42 is adjusted in the same manner, and the entire temporary assembly is completed. At this time, since the rollers 66 and 67 of the support column 42 are brought into contact with the guide rail 32 from above and below, they are movable in the axial direction of the rail support shaft 25, and therefore the dimensions are determined in advance by the horizontal member 43. The supporting columns 41 and 42 are supported by both guide rails 31 and 32 while maintaining the sized spacing.

When the temporary assembly is completed in this way, the horizontal member for dimensioning assembled between the supports 41 and 42 as necessary is removed, and adjustment is started.

To start the adjustment, loosen the other tightening screws 87, 144, and 165, except for the tightening screw 155 that allows the spindle support 51 to tilt.
The slider 49 and spindle 52 are allowed to move freely, so that the probe 53 can be moved to arbitrary positions on the X, Y, and Z axes. In this state, first, in order to smooth the movement of the slider 49 relative to both slider guide rails 46 and 47, both connecting blocks 11
Adjust the assembly position with respect to 1 and 112, and fix with bolts 117 and 118 after adjustment.

Next, we will adjust the accuracy of the measuring device itself.
At this time, the angle measuring means 50 is used to set the spindle support 51 to the slider 49 at a predetermined angle, that is, so that the spindle 52 is accurately perpendicular to the slider guide rails 46 and 47. In this state, a product with standard dimensions is mounted on the base 21, and the measurement stylus 53 is brought into contact with this product with standard dimensions, so that the movement of the measurement stylus 53 is adjusted so that it moves accurately in the X, Y, and Z axis directions. This adjustment is all done at both connecting parts 44 and 45, and each fixing bolt 12
5, 126, 127, 130 as appropriate, and each positioning bush 122, 123, 124, 129
Move forward and backward.

Once the adjustment is completed in this manner, the dimensions, shape, etc. of each part of the object to be measured 54 can be measured in the same manner as with a conventional three-dimensional measuring machine.

When making adjustments, it is possible to make adjustments more easily by attaching an indicator such as a test indicator to the spindle 52 instead of the probe 53, and making adjustments while watching this pointer so that the pointer does not move. can. Furthermore, the accuracy of only the mechanical structure can be set purely without going through the electrical system of the measuring machine.

According to this embodiment as described above, there are the following effects.

That is, the two columns 41 and 42 are not fixed together by welding or the like as in the past, but are completely separate, and one column 41 is attached to the accurately positioned guide rail 31 in three pieces. roller 6
2, 63, and 64 so that they cannot move in the X-axis direction, and the other support 42 uses a horizontal member 43 to measure the distance between the supports 41 and 42, so the slider 49 can be guided. The slider guide rails 46 and 47 can be attached to the supports 41 and 42 in an adjustable manner, thereby facilitating assembly. Also, the positional reference is one rail 31
Since the other rail 32 only needs to have its top surface parallel to the top surface of the base 21, the rail 32
High accuracy is not required for the mounting accuracy, and from this point of view as well, assembly can be facilitated. At this time, the rails 33 of each roller 66, 67 of the support column 42 are
It is possible to effectively prevent wheels from falling off. Further, it is sufficient that the supports 41 and 42 are fixed below the horizontal member 43, and the length above the horizontal member 43 does not matter.
Both columns 41 and 42 can be adjusted using
It is also possible to have a structure that can be expanded and contracted above the horizontal member 43.

In addition, since the precision adjustment of the contact point 53 is performed using the contact point 53 itself after the entire structure is assembled, high precision can be achieved.The adjustment is made only at the connecting portions 44 and 45, so from this point of view as well, the assembly is easy. It does not require any skill and can be assembled in a short time. Furthermore, since adjustments can be made after assembly, it is possible to significantly reduce costs while maintaining accuracy by reducing the need for high-grade machined parts and making adjustments easier.Also, because it is easy to adjust during transportation, transportation is possible. Improves sex.

Furthermore, since the columns 41 and 42 are supported by the side surfaces of the base 21, the entire upper surface of the base 21 can be used as the effective measurement area, and the base 21, which is made of an expensive stone surface plate, etc.
1 can be made smaller, which not only reduces the cost of the device, but also allows the entire device to be made smaller and requires less installation space. In addition, the base 21
Since there are no obstructions on the top surface, the movement of the object 54 to be measured is not restricted, and even the object 54 to be measured larger than the top surface of the base 21 can be installed, and its installation posture is not limited. Furthermore, since the entire surface of the base 21 is open, the position of the user is not limited, making it easy to use. Additionally, since the entire device is small in diameter, it is extremely convenient to carry.

Since the guide rails 31 and 32 are fixed to the base 21 by adhesion via the support shaft 25, the rails 3 can be fixed by using an appropriate jig or the like.
1 and 32 easily against the upper surface of the base 21, and
This guide rail 31, 3 can be positioned with high precision.
The probe support member 40 can be installed using 2 as a positional reference. Further, each roller 62, 63, 64 is in contact with the guide rail 31.
3 and 64 are oriented at 120 degrees to each other, and
The base 21 side is not on the side, but diagonally above the arc part,
Since the contact is made from below, the space on the side surface of the base 21 due to the contact of the rollers 63 and 64 can be reduced, and therefore the guide rail 3
1 can be brought close to the base 21 side, which is advantageous in terms of load support due to the cantilever structure.

In each of the above embodiments, the measuring element 53 has a contact type structure, but the measuring element in the present invention is not limited to this, and may be one using capacitance or a laser length measuring device. It also includes a so-called non-contact structure. Further, in the above embodiment, there is one support post 41, 42 on each side, but it is also possible to use two or more supports on each side, and the guide rail 3
1 and 32 may also be provided on one side. Here, two or more guide rails 31 on the reference side may be provided on one side, one of which may be used as a reference, and the remaining guide rails 31 may receive the load of the probe support member 40. Furthermore, one of the connecting portions 44, 45 may not have an adjusting means. Furthermore, detection of the amount of movement in the X, Y, and Z axis directions is not limited to optical detectors as in the above embodiments, but may also use other detectors such as magnetic, electromagnetic detectors, and laser length measuring devices. It's okay. Furthermore, in the above embodiment, it has been explained that the connection blocks 111, 112 and the slider guide rails 46, 47 are both fixed by bolts 117, 118. Alternatively, it may be movable in the axial direction without being bolted. At this time, the connection part of the structure shown in Fig. 6 is
It is not always necessary to provide an adjustment means.

As described above, according to the present invention, it is possible to provide a three-dimensional measuring machine that is easy to assemble and adjust and is inexpensive.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of the three-dimensional measuring machine according to the present invention, FIG. 2 is a plan view thereof, FIG. 3 is an enlarged side view of the main part of FIG. Fig. 4 is an enlarged front view of the same, Fig. 5 is an enlarged perspective view with a part of the slider section of this embodiment cut away, and Fig. 6 is a schematic diagram showing another example of the mounting structure of the slider guide rail in each embodiment. FIG. 21... Base, 24... Hole, 25... Support shaft,
31, 32, 431, 432...Guide rail, 4
0...Measurement head support member, 41, 42, 441, 4
42... Support column, 43... Horizontal member, 44, 45, 4
44, 445... Connecting portion, 46, 47... Slider guide rail, 49... Slider, 51... Spindle support, 52... Spindle, 53... Measuring head, 54... Measured object, 101... Bush with flange, 102... Bolt, 111, 112... Connection block, 113, 114... Bush, 11
5,116...Button with brim, 117,118
... Bolt, 119, 120, 121 ... Reinforcement nut, 122, 123, 124, 129 ... Positioning bush, 130 ... Bolt.

Claims (1)

[Claims] 1. A probe that can be displaced in the X, Y, and Z axis directions perpendicular to each other is connected to the object to be measured placed on the base, and the shape etc. of the object to be measured is measured from the movement and displacement of this probe. In a three-dimensional measuring machine that
Axial guide sections are arranged in parallel, and columns are movably erected along these guide sections, and either one of these columns is aligned along the A slider guide rail for supporting a slider movably in the X-axis direction, which has a measuring element that is displaceably engaged in the Z-axis direction and the Z-axis direction and is movable in the Z-axis direction, is provided at both ends of the slider guide rail. It is installed between the upper parts of both supports via a member that adjusts the three-dimensional attitude of the gauge head with respect to the base, and is located above the maximum movement position of the lower end of the gauge head and above the slider guide rail. A three-dimensional measuring machine, characterized in that a horizontal member for increasing rigidity is fixed between the two columns at the lower side, the distance between the two columns in the X-axis direction being set to a predetermined dimension.