JP2965784B2 - Electromagnetic ultrasonic transducer - Google Patents

Electromagnetic ultrasonic transducer

Info

Publication number
JP2965784B2
JP2965784B2 JP4094561A JP9456192A JP2965784B2 JP 2965784 B2 JP2965784 B2 JP 2965784B2 JP 4094561 A JP4094561 A JP 4094561A JP 9456192 A JP9456192 A JP 9456192A JP 2965784 B2 JP2965784 B2 JP 2965784B2
Authority
JP
Japan
Prior art keywords
metal
measured
electromagnetic ultrasonic
ultrasonic transducer
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4094561A
Other languages
Japanese (ja)
Other versions
JPH05288733A (en
Inventor
俊夫 赤木
隆雄 俵口
捷宏 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP4094561A priority Critical patent/JP2965784B2/en
Publication of JPH05288733A publication Critical patent/JPH05288733A/en
Application granted granted Critical
Publication of JP2965784B2 publication Critical patent/JP2965784B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、電磁超音波を使って非
破壊・非接触にて金属の欠陥検出、厚さ・音速・厚み共
振周波数・応力等の測定、ならびに金属薄板の深絞り成
形性の測定等を行う電磁超音波トランスデューサに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to non-destructive and non-contact metal defect detection, measurement of thickness, sound velocity, thickness resonance frequency, stress, etc. using electromagnetic ultrasonic waves, and deep drawing of thin metal sheets. The present invention relates to an electromagnetic ultrasonic transducer for measuring properties and the like.

【0002】[0002]

【従来の技術】電磁超音波トランスデューサは、電磁力
を利用して、被測定金属中に非接触的に超音波を発生さ
せたり、また被測定金属中の超音波を検出することがで
きるものであり、該トランスデューサを構成するマグネ
ットやコイルの形式により、縦波・横波・板波・表面波
等を発生・検出でき、金属の様々な物理的性質を測定す
るのに利用されている(川島,「電磁超音波変換子と応
用」,応用物理,52−12(1983)等)。
2. Description of the Related Art An electromagnetic ultrasonic transducer is capable of generating ultrasonic waves in a metal to be measured in a non-contact manner and detecting ultrasonic waves in the metal to be measured by using an electromagnetic force. Depending on the type of magnets and coils that constitute the transducer, longitudinal waves, transverse waves, plate waves, surface waves, etc. can be generated and detected, and are used to measure various physical properties of metals (Kawashima, "Electromagnetic ultrasonic transducers and applications," Applied Physics, 52-12 (1983), etc.).

【0003】一般にこのような電磁超音波トランスデュ
ーサを用いた測定において、電磁超音波トランスデュー
サを被測定金属と非接触的に配置すると、ノイズが多く
発生し測定の障害となる。このノイズは、被測定金属
と、電磁超音波トランスデューサの発信、および受信コ
イルとの間を短絡して導通させることにより、その大部
分を除去することが可能である。ところで、電磁超音波
トランスデューサに対し、被測定金属を静止状態にて測
定する場合は、上記のごとく電磁超音波トランスデュー
サの発信、および受信コイルと該金属を間を短絡して導
通状態にさせることは容易であるが、被測定金属が電磁
超音波トランスデューサに対し、相対的に移動している
ような場合には、被測定金属と電磁超音波トランスデュ
ーサの発信、および受信コイルとの間を短絡させる適当
な方法がなかった。例えば、その方法として、導電性ロ
ールを被測定金属に接触させ、該ロール表面、ロール軸
受けおよびシャフト、該コイル間を電気的に導通させる
ことにより被測定金属と電磁超音波トランスデューサの
発信、および受信コイルとの間を短絡させる方法が考え
られるが、ロールの摩耗という問題や、被測定金属表面
に傷が付き易い等の問題がある。よってこのように、被
測定金属が電磁超音波トランスデューサに対し、相対的
に移動している場合には、ノイズの多い状態での測定を
余儀なくされていた。
Generally, in the measurement using such an electromagnetic ultrasonic transducer, if the electromagnetic ultrasonic transducer is arranged in a non-contact manner with the metal to be measured, a lot of noise is generated, which hinders the measurement. Most of this noise can be removed by short-circuiting the metal to be measured and the transmitting and receiving coils of the electromagnetic ultrasonic transducer to make it conductive. By the way, when the metal to be measured is measured in a stationary state with respect to the electromagnetic ultrasonic transducer, it is not possible to make the conductive state by short-circuiting the transmitting coil of the electromagnetic ultrasonic transducer and the receiving coil and the metal as described above. Although it is easy, when the metal to be measured is relatively moving with respect to the electromagnetic ultrasonic transducer, an appropriate short circuit is provided between the metal to be measured and the transmitting and receiving coils of the electromagnetic ultrasonic transducer. There was no way. For example, as a method, the conductive roll is brought into contact with the metal to be measured, and the metal surface to be measured and the electromagnetic ultrasonic transducer are transmitted and received by electrically connecting the roll surface, the roll bearing and the shaft, and the coil. A method of short-circuiting between the coil and the coil is conceivable, but there are problems such as abrasion of the roll and a problem that the surface of the metal to be measured is easily damaged. Thus, when the metal to be measured is relatively moving with respect to the electromagnetic ultrasonic transducer, measurement in a noisy state must be performed.

【0004】[0004]

【発明が解決しようとする課題】従来の電磁超音波トラ
ンスデューサを用いた測定においては、被測定金属と電
磁超音波トランスデューサとが完全に非接触状態に配置
されているような場合に、被測定金属と、電磁超音波ト
ランスデューサの発信、および受信コイルとの間が同電
位にならないことによって電磁超音波のノイズが多く発
生し、測定の障害になるという問題点があった。本発明
は、金属の非接触状態における測定の際に生じるノイズ
を低減することが可能な電磁超音波トランスデューサを
提供することを目的とする。
In the measurement using a conventional electromagnetic ultrasonic transducer, when the metal to be measured and the electromagnetic ultrasonic transducer are arranged in a completely non-contact state, the metal to be measured is In addition, there is a problem that a large amount of electromagnetic ultrasonic noise is generated due to the fact that the electric potential between the transmitting and receiving coils of the electromagnetic ultrasonic transducer does not become the same as that of the coil, which causes an obstacle to measurement. SUMMARY OF THE INVENTION It is an object of the present invention to provide an electromagnetic ultrasonic transducer capable of reducing noise generated during measurement in a non-contact state of metal.

【0005】[0005]

【課題を解決するための手段】本発明は、上記目的を達
成するために、金属を非接触で測定する電磁超音波トラ
ンスデューサにおいて、被測定金属との間に、渦電流の
発生を防ぐための切れ目を入れた金属箔を配置するとと
もに、該トランスデューサのコイルと導通したことを特
徴とする電磁超音波トランスデューサを要旨とする。
The present invention SUMMARY OF THE INVENTION In order to achieve the above object, the electromagnetic ultrasonic transducers for measuring without contact the metal, between the measured metal, eddy current
When placing metal foil with cuts to prevent occurrence
The gist of the invention is an electromagnetic ultrasonic transducer characterized by being electrically connected to a coil of the transducer.

【0006】[0006]

【作用】被測定金属と電磁超音波トランスデューサの発
信および受信コイルとの間に、該コイルと同電位にした
金属箔を配置することにより、該金属箔が被測定金属
等、外部からのノイズを吸収し、被測定金属中に超音波
を安定的に発生させ、また該金属中の超音波を安定的に
検出することができ、電磁超音波を用いた測定における
ノイズを低減させる。金属箔は透磁率が低い非磁性体
で、比較的に導電率が低いものが適している。なぜなら
ば、該トランスデューサからの磁界が金属箔によってで
きるだけ遮られることのないよう、また金属箔中に渦電
流が発生して、発信・受信の際、トランスデューサと被
測定金属間でやり取りされるパワーができるだけ奪われ
ることのないようにするためである。
By arranging a metal foil having the same potential as the coil between the metal to be measured and the transmitting and receiving coils of the electromagnetic ultrasonic transducer, the metal foil reduces external noise such as the metal to be measured. It absorbs and stably generates ultrasonic waves in the metal to be measured, and can stably detect the ultrasonic waves in the metal, thereby reducing noise in measurement using electromagnetic ultrasonic waves. The metal foil is a nonmagnetic material having a low magnetic permeability, and a material having a relatively low conductivity is suitable. This is because the magnetic field from the transducer is not interrupted by the metal foil as much as possible, and an eddy current is generated in the metal foil, and the power exchanged between the transducer and the metal under test during transmission and reception is reduced. This is in order to avoid being deprived as much as possible.

【0007】さらに、金属箔には放射状等の切れ目を入
れておくと、渦電流が金属箔内で発生しにくくなり、発
信・受信の際に、金属箔によってトランスデューサと被
測定金属間でやり取りされるパワーの一部が奪われてし
まうようなことがなくなるため、より効率の良い測定が
可能となる。
[0007] Furthermore, if a cut such as a radial line is formed in the metal foil, eddy currents are less likely to be generated in the metal foil, and the transmitter and the receiver are exchanged between the transducer and the metal to be measured during transmission and reception. Since a portion of the power is not lost, more efficient measurement can be performed.

【0008】[0008]

【実施例】図1に基づいて本発明の一実施例を詳細に説
明する。電磁超音波トランスデューサ1を被測定金属5
に対し、電気的に非接触状態に配置し、被測定金属5の
内部・表面に電磁超音波を発生・検出させる電磁超音波
測定系において、被測定金属5の表面と電磁超音波トラ
ンスデューサ1の発信・受信コイル3の間に被測定金属
5の表面と平行に金属箔4を配置し、該金属箔と発信お
よび受信コイルとの間を同電位にしている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described in detail with reference to FIG. The electromagnetic ultrasonic transducer 1 is connected to the metal 5 to be measured.
On the other hand, in an electromagnetic ultrasonic measurement system for generating and detecting electromagnetic ultrasonic waves inside and on the surface of the metal 5 to be measured in an electrically non-contact state, the surface of the metal 5 to be measured and the electromagnetic ultrasonic transducer 1 A metal foil 4 is disposed between the transmitting and receiving coils 3 in parallel with the surface of the metal 5 to be measured, and the same potential is applied between the metal foil and the transmitting and receiving coils.

【0009】電磁超音波トランスデューサ1は被測定金
属5中に磁界を発生するためのマグネット2と、渦電流
を発生・検出させるための発信コイル・受信コイル3か
ら成り立っている。電磁超音波トランスデューサには、
このコイルと受信コイルのどちらか一方のみを備えて発
信専用、受信専用として用いられるもの、発信・受信兼
用の1つのコイルを備えて発信・受信とも行うものがあ
り、また、縦波、横波、板波、表面波等、各種のモード
の波を発生させるタイプがある。
The electromagnetic ultrasonic transducer 1 comprises a magnet 2 for generating a magnetic field in the metal 5 to be measured, and a transmitting coil and a receiving coil 3 for generating and detecting an eddy current. Electromagnetic ultrasonic transducers include
There is a coil having only one of the coil and the receiving coil and used only for transmission and reception, and a coil having one coil for both transmission and reception and performing both transmission and reception. There are types that generate waves in various modes such as a plate wave and a surface wave.

【0010】さらに電磁超音波トランスデューサは、使
用周波数はおよそ数100kHz 〜100MHz で、パルス
状の超音波を使うもの、連続波を使うもの、さらに被測
定金属中に定在波を発生させるもの等があり、被測定金
属に対する欠陥検出や、音速測定、厚み測定、共振周波
数測定、材質測定、応力測定等の目的で使用される。こ
のうち定在波を発生させるものは、被測定金属がおよそ
0.1〜10mmの板状の場合に用いられ、板の厚み方向
に進行する各周波数の超音波を連続波として発生させ、
特定周波数の超音波を発生させた場合に、厚み方向で共
振が起きる現象をとらえて利用するものである。電磁超
音波トランスデューサ1は被測定金属5と接触させて測
定しても構わないが、非接触的に配置することも可能で
あり、その間のギャップは通常10mm以下程度である。
[0010] Further, electromagnetic ultrasonic transducers are used at frequencies of about several hundred kHz to 100 MHz, and include those using pulsed ultrasonic waves, those using continuous waves, those generating standing waves in the metal to be measured, and the like. Yes, it is used for the purpose of detecting defects in the metal to be measured, measuring the speed of sound, measuring the thickness, measuring the resonance frequency, measuring the material, measuring stress, and the like. Among these, those that generate a standing wave are used when the metal to be measured has a plate shape of about 0.1 to 10 mm, and generate ultrasonic waves of each frequency traveling in the thickness direction of the plate as a continuous wave,
When an ultrasonic wave of a specific frequency is generated, a phenomenon in which resonance occurs in the thickness direction is captured and used. The electromagnetic ultrasonic transducer 1 may be measured by bringing it into contact with the metal 5 to be measured, but it can also be placed in a non-contact manner, and the gap between them is usually about 10 mm or less.

【0011】被測定金属5としては、鉄、ステンレス、
アルミニウム、チタン、銅等、鉄、非鉄金属を問わず、
また、各種合金や表面にメッキや塗装、錆等の付いたも
のが利用できる。
As the metal 5 to be measured, iron, stainless steel,
Regardless of iron, non-ferrous metal such as aluminum, titanium, copper, etc.
In addition, various alloys and those having plating, coating, rust, etc. on the surface can be used.

【0012】金属箔4には、非磁性体で比較的に導電率
が低いものが適しており、例えばオーステナイト系ステ
ンレス、チタン、マンガニン、コンスタンタン、エバノ
ーム、インバール、白金等が使用でき、また、金属箔の
代わりに導電性フィルムを使用しても同様の効果が得ら
れる。金属箔4の厚さはおよそ1〜100μmであり、
例えば30μmのオーステナイト系ステンレスであれ
ば、100kHz 〜50MHz 程度の周波数におけるノイズ
を低減させる効果がある。金属箔4は発信コイル・受信
コイルと被測定金属5の間に、被測定金属5の表面と平
行に配置されるが、金属箔4と発信コイル・受信コイル
3との距離は任意であり、金属箔4を発信・受信コイル
3と接するように配置しても差し支えない。また、その
大きさは発信コイル・受信コイル3と同じ大きさか、そ
れ以上の大きさがあれば良い。
As the metal foil 4, a nonmagnetic material having a relatively low conductivity is suitable. For example, austenitic stainless steel, titanium, manganin, constantan, evanome, invar, platinum and the like can be used. The same effect can be obtained by using a conductive film instead of the foil. The thickness of the metal foil 4 is approximately 1 to 100 μm,
For example, a 30 μm austenitic stainless steel has an effect of reducing noise at a frequency of about 100 kHz to 50 MHz. The metal foil 4 is disposed between the transmitting coil / receiving coil and the metal 5 to be measured in parallel with the surface of the metal 5 to be measured, but the distance between the metal foil 4 and the transmitting coil / receiving coil 3 is arbitrary, The metal foil 4 may be arranged so as to be in contact with the transmitting / receiving coil 3. Further, the size may be equal to or larger than the size of the transmitting coil / receiving coil 3.

【0013】さらに、金属箔4内に渦電流が発生する
と、発信・受信の際、トランスデューサと被測定金属5
間でやり取りされるパワーの一部が奪われてしまい、信
号感度が低下してしまうため、金属箔4内に発生する渦
電流はできるだけ少なくするのが望ましい。そのために
は、金属箔4に対し、図2に示すように放射状に切れ目
を入れておいたり、図3に示すように互いに平行な切れ
目を多数入れておくと、渦電流が金属箔4内で発生しに
くくなり、より効率の良い測定が可能となる。また、実
施例において、被測定対象である金属表面は平面でなく
て曲面であっても、本発明は有効である。
Further, when an eddy current is generated in the metal foil 4, when transmitting and receiving, the transducer and the metal 5 to be measured
Since a part of the power exchanged between them is taken away and the signal sensitivity is reduced, it is desirable to minimize the eddy current generated in the metal foil 4 as much as possible. For this purpose, if radial cuts are made in the metal foil 4 as shown in FIG. 2 or a large number of parallel cuts are made in the metal foil 4 as shown in FIG. It is less likely to occur, and more efficient measurement can be performed. Further, in the embodiments, the present invention is effective even if the metal surface to be measured is not a flat surface but a curved surface.

【0014】最後に、冷延鋼板の板厚方向に伝播する超
音波の縦波が厚み方向に共振を起こす周波数を測定する
場合における、超音波スペクトラムの測定結果を示す。
まず、図4に本発明のノイズ低減対策を実施せず、従来
の方法にて測定した場合の結果を示し、図5に本発明
の、金属箔を利用したノイズ低減対策を実施した場合の
結果を示す。図4,図5のグラフにおいて、横軸が周波
数、縦軸がパワースペクトラムを表す。この測定例で
は、本発明を実施した場合の測定結果は、従来の測定結
果に比べ、ノイズレベルが−66dBから−84dBへと、
18dB程度低下している。また、共振周波数のピークレ
ベルは−45dBで両者とも変わらないため、本発明を実
施したことにより、信号雑音比は18dB向上したことに
なる。
Finally, a measurement result of an ultrasonic spectrum when measuring a frequency at which a longitudinal wave of an ultrasonic wave propagating in the thickness direction of the cold-rolled steel sheet causes resonance in the thickness direction is shown.
First, FIG. 4 shows the result of the measurement by the conventional method without implementing the noise reduction measure of the present invention, and FIG. 5 shows the result of performing the noise reduction measure using the metal foil of the present invention. Is shown. 4 and 5, the horizontal axis represents frequency, and the vertical axis represents power spectrum. In this measurement example, the measurement result in the case where the present invention is implemented is, as compared with the conventional measurement result, the noise level is changed from -66 dB to -84 dB,
It is about 18 dB lower. Further, since the peak level of the resonance frequency is -45 dB, which is not changed, the signal-to-noise ratio is improved by 18 dB by implementing the present invention.

【0015】[0015]

【発明の効果】本発明は、電磁超音波を使って非破壊・
非接触にて金属の欠陥検出、厚さ・音速・厚み共振周波
数・応力等の測定ならびに、金属薄板の深絞り成形性の
測定等を行う場合に、電磁超音波の信号のノイズを大幅
に低減することを可能にする。
According to the present invention, non-destructive and non-destructive
Significantly reduces electromagnetic ultrasonic signal noise when performing non-contact metal defect detection, measurement of thickness, sound velocity, thickness resonance frequency, stress, etc., and measurement of deep drawability of thin metal sheets. To be able to

【図面の簡単な説明】[Brief description of the drawings]

【図1】金属箔を配置した電磁超音波トランスデュー
サ。
FIG. 1 is an electromagnetic ultrasonic transducer having a metal foil disposed thereon.

【図2】放射状に切れ目をいれた金属箔。FIG. 2 is a metal foil with radial cuts.

【図3】平行に切れ目をいれた金属箔。FIG. 3 is a metal foil cut in parallel.

【図4】本発明を実施しない場合の測定例。FIG. 4 shows a measurement example when the present invention is not performed.

【図5】本発明を実施した場合の測定例。FIG. 5 is a measurement example when the present invention is implemented.

【符号の説明】[Explanation of symbols]

1 電磁超音波トランスデューサ 2 マグネット用コイル 3 発信・受信コイル 4 金属箔 5 被測定金属 6 マグネット用電源 7 信号処理装置 DESCRIPTION OF SYMBOLS 1 Electromagnetic ultrasonic transducer 2 Magnet coil 3 Transmitting / receiving coil 4 Metal foil 5 Metal under test 6 Power supply for magnet 7 Signal processing device

───────────────────────────────────────────────────── フロントページの続き (72)発明者 川島 捷宏 神奈川県相模原市淵野辺5−10−1 新 日本製鐵株式会社 エレクトロニクス研 究所内 (56)参考文献 特開 平2−96607(JP,A) (58)調査した分野(Int.Cl.6,DB名) G01N 29/00 - 29/28 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Katsuhiro Kawashima 5-10-1 Fuchinobe, Sagamihara-shi, Kanagawa Prefecture Nippon Steel Corporation Electronics Research Laboratory (56) References JP-A-2-96607 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) G01N 29/00-29/28

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 金属を非接触で測定する電磁超音波トラ
ンスデューサにおいて、被測定金属との間に、渦電流の
発生を防ぐための切れ目を入れた金属箔を配置するとと
もに、該トランスデューサのコイルと導通したことを特
徴とする電磁超音波トランスデューサ。
1. An electromagnetic ultrasonic transducer for measuring a metal in a non-contact manner, wherein an eddy current of an eddy current flows between the metal and a metal to be measured .
When placing metal foil with cuts to prevent occurrence
Moni, electromagnetic ultrasonic transducers, characterized in that the conductive coil of the transducer.
JP4094561A 1992-04-14 1992-04-14 Electromagnetic ultrasonic transducer Expired - Fee Related JP2965784B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4094561A JP2965784B2 (en) 1992-04-14 1992-04-14 Electromagnetic ultrasonic transducer

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JP4094561A JP2965784B2 (en) 1992-04-14 1992-04-14 Electromagnetic ultrasonic transducer

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JPH06138097A (en) * 1992-10-29 1994-05-20 Nippon Steel Corp Method and device for electromagnetic ultrasonic measurement
JP2008026150A (en) * 2006-07-21 2008-02-07 Central Res Inst Of Electric Power Ind Measured noise suppression method
JP2009025093A (en) * 2007-07-18 2009-02-05 Nichizou Tec:Kk Electromagnetic ultrasonic measuring device, and measuring method of plate thickness and stress using electromagnetic ultrasonic wave
FR3116337B1 (en) * 2020-11-17 2022-12-09 Commissariat Energie Atomique Device for non-destructive testing of a structure, comprising an electromagnetic noise reduction device

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