JPH05288733A - Electromagnetic ultrasonic transducer - Google Patents

Electromagnetic ultrasonic transducer

Info

Publication number
JPH05288733A
JPH05288733A JP4094561A JP9456192A JPH05288733A JP H05288733 A JPH05288733 A JP H05288733A JP 4094561 A JP4094561 A JP 4094561A JP 9456192 A JP9456192 A JP 9456192A JP H05288733 A JPH05288733 A JP H05288733A
Authority
JP
Japan
Prior art keywords
metal
measured
electromagnetic ultrasonic
ultrasonic transducer
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4094561A
Other languages
Japanese (ja)
Other versions
JP2965784B2 (en
Inventor
Toshio Akagi
俊夫 赤木
Takao Tawaraguchi
隆雄 俵口
Katsuhiro Kawashima
捷宏 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP4094561A priority Critical patent/JP2965784B2/en
Publication of JPH05288733A publication Critical patent/JPH05288733A/en
Application granted granted Critical
Publication of JP2965784B2 publication Critical patent/JP2965784B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To reduce noise caused when a defect of metal is detected and thickness, stress and deep drawing moldability is detected by utilizing an electromagnetic ultrasonic transducer in a non-contact state. CONSTITUTION:By placing a metallic foil 4 set at the same potential as a coil 3 between metal 5 to be measured and a transmitting/receiving coil 3 of an electromagnetic ultrasonic transducer, the metallic foil absorbs external noise from the metal to be measured or the like. Ultrasonic waves can be stably generated in the meal 5 to be measured and the ultrasonic waves in the metal 5 can be stably detected, so that noise during measurement using electromagnetic ultrasonic waves can be reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電磁超音波を使って非
破壊・非接触にて金属の欠陥検出、厚さ・音速・厚み共
振周波数・応力等の測定、ならびに金属薄板の深絞り成
形性の測定等を行う電磁超音波トランスデューサに関す
る。
FIELD OF THE INVENTION The present invention relates to nondestructive and noncontact detection of metal defects using electromagnetic ultrasonic waves, measurement of thickness, speed of sound, thickness resonance frequency, stress, etc., and deep drawing of metal sheets. The present invention relates to an electromagnetic ultrasonic transducer for measuring sex and the like.

【0002】[0002]

【従来の技術】電磁超音波トランスデューサは、電磁力
を利用して、被測定金属中に非接触的に超音波を発生さ
せたり、また被測定金属中の超音波を検出することがで
きるものであり、該トランスデューサを構成するマグネ
ットやコイルの形式により、縦波・横波・板波・表面波
等を発生・検出でき、金属の様々な物理的性質を測定す
るのに利用されている(川島,「電磁超音波変換子と応
用」,応用物理,52−12(1983)等)。
2. Description of the Related Art An electromagnetic ultrasonic transducer is a device which can generate an ultrasonic wave in a metal to be measured in a non-contact manner or detect an ultrasonic wave in a metal to be measured by utilizing electromagnetic force. Yes, longitudinal and transverse waves, plate waves, surface waves, etc. can be generated and detected by the type of magnets and coils that make up the transducer, and are used to measure various physical properties of metals (Kawashima, "Electromagnetic Ultrasonic Transducers and Applications," Applied Physics, 52-12 (1983), etc.).

【0003】一般にこのような電磁超音波トランスデュ
ーサを用いた測定において、電磁超音波トランスデュー
サを被測定金属と非接触的に配置すると、ノイズが多く
発生し測定の障害となる。このノイズは、被測定金属
と、電磁超音波トランスデューサの発信、および受信コ
イルとの間を短絡して導通させることにより、その大部
分を除去することが可能である。ところで、電磁超音波
トランスデューサに対し、被測定金属を静止状態にて測
定する場合は、上記のごとく電磁超音波トランスデュー
サの発信、および受信コイルと該金属を間を短絡して導
通状態にさせることは容易であるが、被測定金属が電磁
超音波トランスデューサに対し、相対的に移動している
ような場合には、被測定金属と電磁超音波トランスデュ
ーサの発信、および受信コイルとの間を短絡させる適当
な方法がなかった。例えば、その方法として、導電性ロ
ールを被測定金属に接触させ、該ロール表面、ロール軸
受けおよびシャフト、該コイル間を電気的に導通させる
ことにより被測定金属と電磁超音波トランスデューサの
発信、および受信コイルとの間を短絡させる方法が考え
られるが、ロールの摩耗という問題や、被測定金属表面
に傷が付き易い等の問題がある。よってこのように、被
測定金属が電磁超音波トランスデューサに対し、相対的
に移動している場合には、ノイズの多い状態での測定を
余儀なくされていた。
Generally, in the measurement using such an electromagnetic ultrasonic transducer, if the electromagnetic ultrasonic transducer is arranged in a non-contact manner with the metal to be measured, a lot of noise is generated, which hinders the measurement. Most of this noise can be removed by short-circuiting the measured metal and the transmission and reception coils of the electromagnetic ultrasonic transducer to make them conductive. By the way, when measuring a metal to be measured with respect to an electromagnetic ultrasonic transducer in a stationary state, it is not possible to short-circuit the transmitting and receiving coils of the electromagnetic ultrasonic transducer and the metal to bring them into a conductive state as described above. Although easy, if the metal to be measured is moving relative to the electromagnetic ultrasonic transducer, it is appropriate to short-circuit between the metal to be measured and the transmitting and receiving coils of the electromagnetic ultrasonic transducer. There was no way. For example, as a method thereof, a conductive roll is brought into contact with a metal to be measured, and the roll surface, a roll bearing and a shaft, and the coil are electrically connected to each other to transmit and receive the metal to be measured and the electromagnetic ultrasonic transducer. A method of short-circuiting between the coil and the coil can be considered, but there are problems such as wear of the roll and scratches on the metal surface to be measured. Therefore, in this way, when the metal to be measured is moving relative to the electromagnetic ultrasonic transducer, measurement in a noisy state is forced.

【0004】[0004]

【発明が解決しようとする課題】従来の電磁超音波トラ
ンスデューサを用いた測定においては、被測定金属と電
磁超音波トランスデューサとが完全に非接触状態に配置
されているような場合に、被測定金属と、電磁超音波ト
ランスデューサの発信、および受信コイルとの間が同電
位にならないことによって電磁超音波のノイズが多く発
生し、測定の障害になるという問題点があった。本発明
は、金属の非接触状態における測定の際に生じるノイズ
を低減することが可能な電磁超音波トランスデューサを
提供することを目的とする。
In the measurement using the conventional electromagnetic ultrasonic transducer, when the metal to be measured and the electromagnetic ultrasonic transducer are arranged in a completely non-contact state, the metal to be measured is However, there is a problem in that a large amount of electromagnetic ultrasonic noise is generated due to the fact that the same potential is not generated between the transmitting and receiving coils of the electromagnetic ultrasonic transducer, which hinders measurement. It is an object of the present invention to provide an electromagnetic ultrasonic transducer capable of reducing noise generated during measurement of a metal in a non-contact state.

【0005】[0005]

【課題を解決するための手段】本発明は、上記目的を達
成するために、金属を非接触で測定する電磁超音波トラ
ンスデューサにおいて、被測定金属との間に、該トラン
スデューサのコイルと導通した金属箔を配置したことを
特徴とする電磁超音波トランスデューサを要旨とする。
In order to achieve the above object, the present invention provides an electromagnetic ultrasonic transducer for measuring a metal in a non-contact manner, the metal being electrically connected to the coil of the transducer with the metal to be measured. The gist is an electromagnetic ultrasonic transducer characterized by arranging a foil.

【0006】[0006]

【作用】被測定金属と電磁超音波トランスデューサの発
信および受信コイルとの間に、該コイルと同電位にした
金属箔を配置することにより、該金属箔が被測定金属
等、外部からのノイズを吸収し、被測定金属中に超音波
を安定的に発生させ、また該金属中の超音波を安定的に
検出することができ、電磁超音波を用いた測定における
ノイズを低減させる。金属箔は透磁率が低い非磁性体
で、比較的に導電率が低いものが適している。なぜなら
ば、該トランスデューサからの磁界が金属箔によってで
きるだけ遮られることのないよう、また金属箔中に渦電
流が発生して、発信・受信の際、トランスデューサと被
測定金属間でやり取りされるパワーができるだけ奪われ
ることのないようにするためである。
By placing a metal foil having the same potential as the coil between the metal to be measured and the transmitting and receiving coils of the electromagnetic ultrasonic transducer, the metal foil prevents noise from the outside such as the metal to be measured. It is possible to absorb, stably generate ultrasonic waves in the metal to be measured, and to stably detect ultrasonic waves in the metal, and reduce noise in measurement using electromagnetic ultrasonic waves. The metal foil is preferably a non-magnetic material having a low magnetic permeability and a material having a relatively low conductivity. This is because the magnetic field from the transducer is prevented from being blocked by the metal foil as much as possible, and the eddy current is generated in the metal foil, and the power exchanged between the transducer and the metal under measurement is generated during transmission / reception. This is to prevent it from being robbed as much as possible.

【0007】さらに、金属箔には放射状等の切れ目を入
れておくと、渦電流が金属箔内で発生しにくくなり、発
信・受信の際に、金属箔によってトランスデューサと被
測定金属間でやり取りされるパワーの一部が奪われてし
まうようなことがなくなるため、より効率の良い測定が
可能となる。
Further, if the metal foil is provided with radial cuts or the like, eddy currents are less likely to be generated in the metal foil, and during transmission and reception, the metal foil exchanges between the transducer and the metal to be measured. This eliminates the loss of a portion of the power that is consumed, enabling more efficient measurement.

【0008】[0008]

【実施例】図1に基づいて本発明の一実施例を詳細に説
明する。電磁超音波トランスデューサ1を被測定金属5
に対し、電気的に非接触状態に配置し、被測定金属5の
内部・表面に電磁超音波を発生・検出させる電磁超音波
測定系において、被測定金属5の表面と電磁超音波トラ
ンスデューサ1の発信・受信コイル3の間に被測定金属
5の表面と平行に金属箔4を配置し、該金属箔と発信お
よび受信コイルとの間を同電位にしている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail with reference to FIG. Electromagnetic ultrasonic transducer 1 to be measured metal 5
On the other hand, in the electromagnetic ultrasonic measurement system which is arranged in an electrically non-contact state and generates and detects electromagnetic ultrasonic waves inside and on the surface of the metal 5 to be measured, the surface of the metal 5 to be measured and the electromagnetic ultrasonic transducer 1 are A metal foil 4 is arranged between the transmitter / receiver coil 3 in parallel with the surface of the metal 5 to be measured, and the metal foil and the transmitter / receiver coil are at the same potential.

【0009】電磁超音波トランスデューサ1は被測定金
属5中に磁界を発生するためのマグネット2と、渦電流
を発生・検出させるための発信コイル・受信コイル3か
ら成り立っている。電磁超音波トランスデューサには、
このコイルと受信コイルのどちらか一方のみを備えて発
信専用、受信専用として用いられるもの、発信・受信兼
用の1つのコイルを備えて発信・受信とも行うものがあ
り、また、縦波、横波、板波、表面波等、各種のモード
の波を発生させるタイプがある。
The electromagnetic ultrasonic transducer 1 comprises a magnet 2 for generating a magnetic field in the metal 5 to be measured and a transmitting coil / receiving coil 3 for generating / detecting an eddy current. Electromagnetic ultrasonic transducers include
There are one that is equipped with only one of this coil and the receiving coil and is used only for transmission and reception, and one that is equipped with one coil for both transmission and reception to perform both transmission and reception. There are types that generate waves of various modes such as plate waves and surface waves.

【0010】さらに電磁超音波トランスデューサは、使
用周波数はおよそ数100kHz 〜100MHz で、パルス
状の超音波を使うもの、連続波を使うもの、さらに被測
定金属中に定在波を発生させるもの等があり、被測定金
属に対する欠陥検出や、音速測定、厚み測定、共振周波
数測定、材質測定、応力測定等の目的で使用される。こ
のうち定在波を発生させるものは、被測定金属がおよそ
0.1〜10mmの板状の場合に用いられ、板の厚み方向
に進行する各周波数の超音波を連続波として発生させ、
特定周波数の超音波を発生させた場合に、厚み方向で共
振が起きる現象をとらえて利用するものである。電磁超
音波トランスデューサ1は被測定金属5と接触させて測
定しても構わないが、非接触的に配置することも可能で
あり、その間のギャップは通常10mm以下程度である。
Further, electromagnetic ultrasonic transducers have operating frequencies of about several 100 kHz to 100 MHz, and those using pulsed ultrasonic waves, those using continuous waves, and those generating standing waves in the metal to be measured are also available. Yes, it is used for the purpose of detecting defects on the metal to be measured, sound velocity measurement, thickness measurement, resonance frequency measurement, material measurement, stress measurement and the like. Among them, the one that generates a standing wave is used when the metal to be measured has a plate shape of about 0.1 to 10 mm, and generates ultrasonic waves of each frequency traveling in the thickness direction of the plate as a continuous wave,
This is used by catching the phenomenon that resonance occurs in the thickness direction when ultrasonic waves of a specific frequency are generated. The electromagnetic ultrasonic transducer 1 may be brought into contact with the metal to be measured 5 for measurement, but it is also possible to dispose it in a non-contact manner, and the gap between them is usually about 10 mm or less.

【0011】被測定金属5としては、鉄、ステンレス、
アルミニウム、チタン、銅等、鉄、非鉄金属を問わず、
また、各種合金や表面にメッキや塗装、錆等の付いたも
のが利用できる。
As the metal 5 to be measured, iron, stainless steel,
Whether aluminum, titanium, copper, etc., iron or non-ferrous metal,
In addition, various alloys and those with plating, coating, rust, etc. on the surface can be used.

【0012】金属箔4には、非磁性体で比較的に導電率
が低いものが適しており、例えばオーステナイト系ステ
ンレス、チタン、マンガニン、コンスタンタン、エバノ
ーム、インバール、白金等が使用でき、また、金属箔の
代わりに導電性フィルムを使用しても同様の効果が得ら
れる。金属箔4の厚さはおよそ1〜100μmであり、
例えば30μmのオーステナイト系ステンレスであれ
ば、100kHz 〜50MHz 程度の周波数におけるノイズ
を低減させる効果がある。金属箔4は発信コイル・受信
コイルと被測定金属5の間に、被測定金属5の表面と平
行に配置されるが、金属箔4と発信コイル・受信コイル
3との距離は任意であり、金属箔4を発信・受信コイル
3と接するように配置しても差し支えない。また、その
大きさは発信コイル・受信コイル3と同じ大きさか、そ
れ以上の大きさがあれば良い。
For the metal foil 4, a non-magnetic material having a relatively low conductivity is suitable. For example, austenitic stainless steel, titanium, manganin, constantan, evanome, invar, platinum, etc. can be used. The same effect can be obtained by using a conductive film instead of the foil. The thickness of the metal foil 4 is about 1 to 100 μm,
For example, 30 μm austenitic stainless steel has an effect of reducing noise at a frequency of about 100 kHz to 50 MHz. The metal foil 4 is arranged between the transmitter coil / receiver coil and the measured metal 5 in parallel with the surface of the measured metal 5, but the distance between the metal foil 4 and the transmitter coil / receiver coil 3 is arbitrary. The metal foil 4 may be arranged so as to be in contact with the transmitting / receiving coil 3. Further, the size thereof may be the same as or larger than that of the transmitting coil / receiving coil 3.

【0013】さらに、金属箔4内に渦電流が発生する
と、発信・受信の際、トランスデューサと被測定金属5
間でやり取りされるパワーの一部が奪われてしまい、信
号感度が低下してしまうため、金属箔4内に発生する渦
電流はできるだけ少なくするのが望ましい。そのために
は、金属箔4に対し、図2に示すように放射状に切れ目
を入れておいたり、図3に示すように互いに平行な切れ
目を多数入れておくと、渦電流が金属箔4内で発生しに
くくなり、より効率の良い測定が可能となる。また、実
施例において、被測定対象である金属表面は平面でなく
て曲面であっても、本発明は有効である。
Furthermore, when an eddy current is generated in the metal foil 4, the transducer and the metal to be measured 5 are transmitted and received.
Since a part of the power exchanged between them is lost and the signal sensitivity is lowered, it is desirable to reduce the eddy current generated in the metal foil 4 as much as possible. For that purpose, if the metal foil 4 is provided with radial cuts as shown in FIG. 2 or a large number of parallel cuts as shown in FIG. 3, eddy currents are generated in the metal foil 4. It is less likely to occur, and more efficient measurement becomes possible. Further, in the embodiments, the present invention is effective even if the metal surface to be measured is not a flat surface but a curved surface.

【0014】最後に、冷延鋼板の板厚方向に伝播する超
音波の縦波が厚み方向に共振を起こす周波数を測定する
場合における、超音波スペクトラムの測定結果を示す。
まず、図4に本発明のノイズ低減対策を実施せず、従来
の方法にて測定した場合の結果を示し、図5に本発明
の、金属箔を利用したノイズ低減対策を実施した場合の
結果を示す。図4,図5のグラフにおいて、横軸が周波
数、縦軸がパワースペクトラムを表す。この測定例で
は、本発明を実施した場合の測定結果は、従来の測定結
果に比べ、ノイズレベルが−66dBから−84dBへと、
18dB程度低下している。また、共振周波数のピークレ
ベルは−45dBで両者とも変わらないため、本発明を実
施したことにより、信号雑音比は18dB向上したことに
なる。
Finally, the measurement result of the ultrasonic spectrum in the case of measuring the frequency at which the longitudinal wave of the ultrasonic wave propagating in the thickness direction of the cold-rolled steel plate resonates in the thickness direction will be shown.
First, FIG. 4 shows the result when the noise reduction measure of the present invention was not measured, and the result was measured by the conventional method, and FIG. 5 is the result when the noise reduction measure using the metal foil of the present invention was carried out. Indicates. In the graphs of FIGS. 4 and 5, the horizontal axis represents frequency and the vertical axis represents power spectrum. In this measurement example, the measurement result in the case of implementing the present invention has a noise level from −66 dB to −84 dB as compared with the conventional measurement result.
It is about 18 dB lower. Further, since the peak level of the resonance frequency is -45 dB and both are the same, the implementation of the present invention improves the signal noise ratio by 18 dB.

【0015】[0015]

【発明の効果】本発明は、電磁超音波を使って非破壊・
非接触にて金属の欠陥検出、厚さ・音速・厚み共振周波
数・応力等の測定ならびに、金属薄板の深絞り成形性の
測定等を行う場合に、電磁超音波の信号のノイズを大幅
に低減することを可能にする。
INDUSTRIAL APPLICABILITY The present invention uses electromagnetic ultrasonic waves to non-destructively
Significantly reduces noise in electromagnetic ultrasonic signals when non-contact metal defects are detected, thickness, sound velocity, thickness resonance frequency, stress, etc., and deep drawing formability of thin metal sheets are measured. To be able to do.

【図面の簡単な説明】[Brief description of drawings]

【図1】金属箔を配置した電磁超音波トランスデュー
サ。
FIG. 1 shows an electromagnetic ultrasonic transducer in which a metal foil is arranged.

【図2】放射状に切れ目をいれた金属箔。[FIG. 2] A metal foil with radial cuts.

【図3】平行に切れ目をいれた金属箔。FIG. 3 is a metal foil in which slits are made in parallel.

【図4】本発明を実施しない場合の測定例。FIG. 4 shows a measurement example when the present invention is not carried out.

【図5】本発明を実施した場合の測定例。FIG. 5 shows a measurement example when the present invention is carried out.

【符号の説明】[Explanation of symbols]

1 電磁超音波トランスデューサ 2 マグネット用コイル 3 発信・受信コイル 4 金属箔 5 被測定金属 6 マグネット用電源 7 信号処理装置 1 Electromagnetic Ultrasonic Transducer 2 Magnet Coil 3 Transmission / Reception Coil 4 Metal Foil 5 Metal to be Measured 6 Magnet Power Supply 7 Signal Processing Device

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 金属を非接触で測定する電磁超音波トラ
ンスデューサにおいて、被測定金属との間に、該トラン
スデューサのコイルと導通した金属箔を配置したことを
特徴とする電磁超音波トランスデューサ。
1. An electromagnetic ultrasonic transducer for measuring a metal in a non-contact manner, characterized in that a metal foil electrically connected to the coil of the transducer is arranged between the metal to be measured.
【請求項2】 電磁超音波トランスデューサが、被測定
金属中で超音波の定在波を発生・検出するタイプの電磁
超音波トランスデューサであることを特徴とする請求項
1記載の電磁超音波トランスデューサ。
2. The electromagnetic ultrasonic transducer according to claim 1, wherein the electromagnetic ultrasonic transducer is of a type that generates and detects a standing wave of ultrasonic waves in the metal to be measured.
【請求項3】 金属箔が、切れ目を入れたものであるこ
とを特徴とする請求項1又は請求項2記載の電磁超音波
トランスデューサ。
3. The electromagnetic ultrasonic transducer according to claim 1 or 2, wherein the metal foil is a slit.
JP4094561A 1992-04-14 1992-04-14 Electromagnetic ultrasonic transducer Expired - Fee Related JP2965784B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06138097A (en) * 1992-10-29 1994-05-20 Nippon Steel Corp Method and device for electromagnetic ultrasonic measurement
JP2008026150A (en) * 2006-07-21 2008-02-07 Central Res Inst Of Electric Power Ind Measured noise suppression method
JP2009025093A (en) * 2007-07-18 2009-02-05 Nichizou Tec:Kk Electromagnetic ultrasonic measuring device, and measuring method of plate thickness and stress using electromagnetic ultrasonic wave
FR3116337A1 (en) * 2020-11-17 2022-05-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Device for non-destructive testing of a structure, comprising an electromagnetic noise reduction device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06138097A (en) * 1992-10-29 1994-05-20 Nippon Steel Corp Method and device for electromagnetic ultrasonic measurement
JP2008026150A (en) * 2006-07-21 2008-02-07 Central Res Inst Of Electric Power Ind Measured noise suppression method
JP2009025093A (en) * 2007-07-18 2009-02-05 Nichizou Tec:Kk Electromagnetic ultrasonic measuring device, and measuring method of plate thickness and stress using electromagnetic ultrasonic wave
FR3116337A1 (en) * 2020-11-17 2022-05-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Device for non-destructive testing of a structure, comprising an electromagnetic noise reduction device
WO2022106220A1 (en) * 2020-11-17 2022-05-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives Device for non-destructive inspection of a structure, comprising an electromagnetic noise reduction member

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