JP2961061B2 - Electromagnetic ultrasonic flaw detector - Google Patents
Electromagnetic ultrasonic flaw detectorInfo
- Publication number
- JP2961061B2 JP2961061B2 JP7019434A JP1943495A JP2961061B2 JP 2961061 B2 JP2961061 B2 JP 2961061B2 JP 7019434 A JP7019434 A JP 7019434A JP 1943495 A JP1943495 A JP 1943495A JP 2961061 B2 JP2961061 B2 JP 2961061B2
- Authority
- JP
- Japan
- Prior art keywords
- transmission
- rectangular wave
- coil
- reception
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁石体と送信コイルと
受信コイルとを有する電磁超音波探触子により、非破壊
検査、構造物の板厚計測等を行う電磁超音波探傷装置に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic ultrasonic inspection apparatus for performing nondestructive inspection, thickness measurement of a structure, and the like by using an electromagnetic ultrasonic probe having a magnet body, a transmission coil, and a reception coil. It is.
【0002】[0002]
【従来の技術】従来、導電性被検体の非破壊検査に使用
される電磁超音波探触子の1つにEMATがある。この
電磁超音波探触子(EMAT)の原理を図6により説明
する。永久磁石若しくは電磁石よりなる磁石体1に磁束
Bが発生したとき、磁石体1と導電性被検体2との間に
設けた送信コイル3に正弦波状の高周波電流Iを流す
と、導電性被検体2の表面に渦電流Jが生じ、この渦電
流Jと上記磁束Bとの相互作用により、ローレンツ力F
が発生し、このローレンツ力Fを振動源として超音波S
が発生する。そしてこの超音波Sを受信すると、上記と
は逆の過程で超音波信号が電信信号に変換される。2. Description of the Related Art Conventionally, there is an EMAT as one of the electromagnetic ultrasonic probes used for nondestructive inspection of a conductive object. The principle of the electromagnetic ultrasonic probe (EMAT) will be described with reference to FIG. When a magnetic flux B is generated in the magnet body 1 made of a permanent magnet or an electromagnet, when a sinusoidal high-frequency current I flows through the transmission coil 3 provided between the magnet body 1 and the conductive subject 2, the conductive subject An eddy current J is generated on the surface of No. 2 and the interaction between the eddy current J and the magnetic flux B causes Lorentz force F
Is generated, and the ultrasonic wave S is generated using the Lorentz force F as a vibration source.
Occurs. When the ultrasonic wave S is received, the ultrasonic signal is converted into a telegraph signal in a process reverse to the above.
【0003】上記原理を利用した電磁超音波探触子(E
MAT)を有する電磁超音波探傷装置の従来例を図7に
より説明すると、1が磁石体、2が導電性被検体、3が
送信コイル、4が受信コイルで、これらの磁石体1と導
電性被検体2と送信コイル3と受信コイル4とは、図4
のように配置されている。図7の5が磁石体1と送信コ
イル3と受信コイル4とよりなる電磁超音波探触子、7
が受信信号増幅アンプ部、8が電磁超音波信号処理部、
12が正弦波送信様パワーアンプ部、13が送信整合回
路、14が受信整合回路である。[0003] An electromagnetic ultrasonic probe (E
A conventional example of an electromagnetic ultrasonic flaw detector having MAT) will be described with reference to FIG. 7. Reference numeral 1 denotes a magnet body, 2 denotes a conductive object, 3 denotes a transmission coil, and 4 denotes a reception coil. The subject 2, the transmitting coil 3, and the receiving coil 4 are shown in FIG.
It is arranged as follows. 7 in FIG. 7 is an electromagnetic ultrasonic probe including the magnet body 1, the transmission coil 3, and the reception coil 4, and 7
Is a reception signal amplification amplifier section, 8 is an electromagnetic ultrasonic signal processing section,
12 is a sine wave transmission-like power amplifier unit, 13 is a transmission matching circuit, and 14 is a reception matching circuit.
【0004】正弦波送信様パワーアンプ部12から送信
コイル3に数A〜数十Aの正弦波電流を流す。この場
合、送信波形の反射を抑制するために、アンプの出力イ
ンピーダンスに負荷インピーダンスを整合させて、反射
による振動波形を少なくさせるための送信整合回路13
を挿入している。超音波が発生し、対象物から反射して
帰ってくる反射超音波信号により、受信コイル4に数μ
V〜数百μVの微小信号が誘起される。この信号は、送
信と同様に受信信号増幅アンプ部7の入力インピーダン
スに整合させるための受信整合回路14を介して受信信
号増幅アンプ部7により増幅されて、電磁超音波信号処
理部8により反射超音波信号が検出、表示される。同電
磁超音波信号処理部8では、反射の超音波信号の有無に
より対象物の有無が判り、また反射して帰ってくる反射
超音波信号の時間により対象物までの距離(時間×音速
/2:往復)が求められる。A sine wave current of several A to several tens A flows from the sine wave transmission-like power amplifier section 12 to the transmission coil 3. In this case, in order to suppress the reflection of the transmission waveform, a transmission matching circuit 13 for matching the load impedance to the output impedance of the amplifier and reducing the oscillation waveform due to the reflection.
Is inserted. Ultrasonic waves are generated and reflected from the target object.
A small signal of V to several hundred μV is induced. This signal is amplified by the reception signal amplification amplifier 7 via the reception matching circuit 14 for matching to the input impedance of the reception signal amplification amplifier 7 in the same manner as in the transmission, and is reflected by the electromagnetic ultrasonic signal processing unit 8. A sound wave signal is detected and displayed. The electromagnetic ultrasonic signal processing unit 8 determines the presence or absence of the target object based on the presence or absence of the reflected ultrasonic signal, and determines the distance to the target object (time × sound speed / 2) based on the time of the reflected ultrasonic signal that is reflected back. : Round trip) is required.
【0005】[0005]
【発明が解決しようとする課題】前記図7に示す従来の
電磁超音波探触子(EMAT)を有する電磁超音波探傷
装置では、一般に電気音響変換効率が低いため、前述の
ように送信側では大電流を流し、受信側では微弱な信号
を検出している。また片側方向から検査する場合、電磁
超音波探触子(EMAT)は、図4に示すように送信コ
イル3と受信コイル4とが近接配置されてしまい、送信
電流により受信コイル4に大きな信号を誘導する。また
整合回路を挿入しても若干の振動波形が生じてしまう。
従って微小信号を増幅する受信信号増幅アンプ部7に
は、過大入力が加わり、同アンプ部7が飽和することに
より、図8に示すように計測不能時間が長くなる。In the conventional electromagnetic ultrasonic flaw detector having the conventional electromagnetic ultrasonic probe (EMAT) shown in FIG. 7, the electro-acoustic conversion efficiency is generally low. A large current flows, and a weak signal is detected on the receiving side. Also, when inspecting from one side, the electromagnetic ultrasonic probe (EMAT) has a transmitting coil 3 and a receiving coil 4 arranged close to each other as shown in FIG. Induce. Further, even if a matching circuit is inserted, a slight vibration waveform is generated.
Accordingly, an excessive input is applied to the reception signal amplification amplifier unit 7 for amplifying the minute signal, and the amplifier unit 7 is saturated, so that the measurement impossible time is lengthened as shown in FIG.
【0006】このため、導電性被検体の表面直下等の探
触子に近い部分、例えば5mm厚の鋼材の板厚を計測す
る場合、鋼材中の音速を3.2mm/secとすると、
飽和時間を約3μsec以内に押さえる必要があるが、
現状では飽和時間が長過ぎて、計測が不可能になるとい
う問題があった。本発明は前記の問題点に鑑み提案する
ものであり、その目的とする処は、導電性被検体の表
面直下の探触子に近い部分を計測でき、小型化、低コ
スト化を達成できる電磁超音波探傷装置を提供しようと
する点にある。For this reason, when measuring a portion close to the probe, such as immediately below the surface of a conductive object, for example, the thickness of a steel material having a thickness of 5 mm, if the sound speed in the steel material is 3.2 mm / sec,
It is necessary to keep the saturation time within about 3 μsec,
At present, there is a problem that the saturation time is too long and measurement becomes impossible. The present invention has been made in view of the above problems, and has as its object the object of the present invention is to measure a portion close to a probe directly below the surface of a conductive test object, and to achieve miniaturization and cost reduction. It is in trying to provide an ultrasonic flaw detector.
【0007】[0007]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明は、磁石体と送信コイルと受信コイルとを
有する電磁超音波探触子により、非破壊検査等を行う電
磁超音波探傷装置において、前記送信コイルをドライブ
する矩形波送信信号の立ち上がり時の受信コイルへの受
信振動波形をモニタする受信信号モニタ部と、同受信信
号モニタの出力波形により前記受信振動波形の1周期目
のゼロクロスポイントを検出して後記矩形波送信部をオ
フするための送信オフ信号を発生する矩形波時間コント
ロール部と、送信コイル回線をオンオフして矩形波電流
を前記送信コイルへ流す矩形波送信部とを有し、前記受
信コイルを前記受信信号モニタ部に接続し、同受信信号
モニタ部を前記矩形波送信部に接続し、同矩形波送信部
を前記送信コイルに接続している(請求項1)。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides an electromagnetic ultrasonic probe having a magnet body, a transmitting coil and a receiving coil for performing nondestructive inspection and the like. In the flaw detector, a reception signal monitoring unit that monitors a reception vibration waveform to the reception coil when a rectangular wave transmission signal driving the transmission coil rises, and a first cycle of the reception vibration waveform based on an output waveform of the reception signal monitor. A rectangular wave time control unit for generating a transmission off signal for detecting a zero cross point of the rectangular wave transmission unit and turning off a transmission coil line to supply a rectangular wave current to the transmission coil by turning a transmission coil line on and off. And the receiving coil is connected to the received signal monitoring unit, the received signal monitoring unit is connected to the rectangular wave transmitting unit, and the rectangular wave transmitting unit is connected to the transmitting coil. It is connected (claim 1).
【0008】前記電磁超音波探傷装置において、受信コ
イルからの微弱な信号を増幅する受信信号増幅アンプ部
と受信信号切替部とを有し、同受信信号増幅アンプ部を
矩形波送信部の入力側に設け、受信信号切替部を同受信
信号増幅アンプ部の入力側に設けて、矩形波時間コント
ロール部の出力側及び前記矩形波送信部の入力側を同受
信信号切替部に接続してもよい(請求項2)。In the above-mentioned electromagnetic ultrasonic flaw detector, a reception signal amplification amplifier unit for amplifying a weak signal from the reception coil and a reception signal switching unit are provided, and the reception signal amplification amplifier unit is connected to the input side of the rectangular wave transmission unit. And the reception signal switching unit may be provided on the input side of the reception signal amplification amplifier unit, and the output side of the rectangular wave time control unit and the input side of the rectangular wave transmission unit may be connected to the reception signal switching unit. (Claim 2).
【0009】[0009]
【作用】本発明の電磁超音波探傷装置は前記のように構
成されており、送信信号の立ち上がりによる受信振動波
形が送信信号のオフタイミングの調整及び送信コイル回
線の遮断により不要振動が大幅に制限されることにな
る。しかも受信信号増幅アンプ部の入力側に入力信号を
切り替えるための受信信号切替部が設けられており、送
信時の受信アンプの飽和が防止されることになり、計測
不能(アンプ飽和)時間が大幅に短縮されて、導電性被
検体の表面直下の探触子に近い部分の計測が可能にな
る。The electromagnetic ultrasonic flaw detector according to the present invention is configured as described above, and the received vibration waveform caused by the rise of the transmission signal is greatly restricted by adjusting the off timing of the transmission signal and cutting off the transmission coil line. Will be done. In addition, a reception signal switching unit for switching the input signal is provided on the input side of the reception signal amplification amplifier unit, thereby preventing the saturation of the reception amplifier during transmission and greatly preventing the measurement from being performed (amplifier saturation). This enables measurement of a portion near the probe immediately below the surface of the conductive subject.
【0010】[0010]
【実施例】次に本発明の電磁超音波探傷装置を図1〜図
5に示す一実施例により説明する。1が磁石体、2が導
電性被検体、3が送信コイル、4が受信コイルで、これ
らの磁石体1と導電性被検体2と送信コイル3と受信コ
イル4とは、図4のように配置されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an electromagnetic ultrasonic flaw detector according to the present invention will be described with reference to an embodiment shown in FIGS. 1 is a magnet body, 2 is a conductive object, 3 is a transmitting coil, 4 is a receiving coil. These magnet body 1, conductive object 2, transmitting coil 3 and receiving coil 4 are arranged as shown in FIG. Are located.
【0011】5が電磁超音波探触子(EMAT)で、同
電磁超音波探触子5は,従来と同様に、磁石体1と送信
コイル3と受信コイル4とにより構成されている。6が
受信信号切替部、7が受信信号増幅アンプ部、8が電磁
超音波信号処理部、9が矩形波送信部、10が受信信号
モニタ部、11が矩形波時間コントロール部である。Reference numeral 5 denotes an electromagnetic ultrasonic probe (EMAT). The electromagnetic ultrasonic probe 5 includes a magnet body 1, a transmission coil 3, and a reception coil 4 as in the conventional case. 6 is a reception signal switching unit, 7 is a reception signal amplification amplifier unit, 8 is an electromagnetic ultrasonic signal processing unit, 9 is a rectangular wave transmission unit, 10 is a reception signal monitoring unit, and 11 is a rectangular wave time control unit.
【0012】上記矩形波送信部9は、図2に示すよう
に、半導体パワースイッチ15により高速で送信コイル
回線をオンオフし、数A〜数十Aの矩形波電流を送信コ
イルに流すことが可能で、矩形波送信部9からの送信開
始トリガ信号と矩形波時間コントロール部11からの送
信オフ信号との時間差により、送信電流の幅を調整でき
るようになっている。As shown in FIG. 2, the rectangular wave transmitting section 9 can turn on and off the transmitting coil line at high speed by the semiconductor power switch 15 and allow a rectangular wave current of several A to several tens A to flow through the transmitting coil. Thus, the width of the transmission current can be adjusted by the time difference between the transmission start trigger signal from the rectangular wave transmission unit 9 and the transmission off signal from the rectangular wave time control unit 11.
【0013】受信信号切替部6は、図3に示すように、
矩形波送信部9からの送信開始トリガ信号と矩形波時間
コントロール部11からの送信オフ信号とにより、アナ
ログスイッチ16を切替えて、受信信号増幅アンプ部7
の入力を切替えるようになっている。受信信号モニタ部
10は、送信コイル3をドライブする矩形波送信信号の
立ち上がり時の受信コイル4への受信振動数をモニタす
るためのアンプである。As shown in FIG. 3, the reception signal switching unit 6
The analog switch 16 is switched by the transmission start trigger signal from the rectangular wave transmission unit 9 and the transmission off signal from the rectangular wave time control unit 11, and the reception signal amplification amplifier unit 7
Input is switched. The reception signal monitoring unit 10 is an amplifier for monitoring the frequency of reception to the reception coil 4 when the rectangular wave transmission signal for driving the transmission coil 3 rises.
【0014】矩形波時間コントロール部11は、受信信
号モニタ部10の出力波形から図5(b)に示すように
受信振動波形の1周期目のゼロクロスポイントを検出し
て矩形波送信部9をオフするための送信オフ信号を発生
するようになっている。電磁超音波信号処理部8は、受
信信号増幅アンプ部7からの信号と矩形波送信部9から
の送信開始トリガ信号とにより、導電性被検体2内の対
象物の有無を検出する一方、送信開始から反射超音波信
号検出までの時間計測により、距離を算出するようにな
っている。The rectangular wave time control section 11 detects a zero-cross point in the first cycle of the received vibration waveform from the output waveform of the received signal monitor section 10 as shown in FIG. To generate a transmission off signal. The electromagnetic ultrasonic signal processing unit 8 detects the presence or absence of an object in the conductive subject 2 based on the signal from the reception signal amplification amplifier unit 7 and the transmission start trigger signal from the rectangular wave transmission unit 9, and transmits the signal. The distance is calculated by measuring the time from the start to the detection of the reflected ultrasonic signal.
【0015】上記のように構成された電磁超音波探傷装
置では、受信振動波形の減衰、整定を早くすることが可
能になる。また送信中は、受信信号増幅アンプ部7の入
力をグランドに接続して、入力電圧を0Vにしておくこ
とにより、送信時の受信アンプ飽和が防止される。また
送信終了後に受信コイル4側に切り替えることにより、
受信アンプの飽和による計測不能時間が短縮され、導電
性被検体2の表面直下等の探触子に近い部分の計測が可
能になる。[0015] In the electromagnetic ultrasonic flaw detector configured as described above, the attenuation and settling of the received vibration waveform can be accelerated. Also, during transmission, the input of the reception signal amplification amplifier unit 7 is connected to the ground, and the input voltage is kept at 0 V, thereby preventing the reception amplifier from being saturated during transmission. Also, by switching to the receiving coil 4 side after the transmission is completed,
The non-measurable time due to the saturation of the receiving amplifier is reduced, and a portion close to the probe such as immediately below the surface of the conductive subject 2 can be measured.
【0016】[0016]
【発明の効果】本発明の電磁超音波探傷装置は前記のよ
うに構成されており、電磁超音波探触子の計測不能時間
を短縮できて、導電性被検体の表面直下の探触子に近い
部分を計測できる。また矩形波送信にしており、送信ド
ライバは高速の半導体スイッチを使用することが可能
で、送信コイル及び受信コイルのインピーダンスの整合
をとる必要がなくなり、整合回路を不要にできて、電磁
超音波探傷装置の小型化、低コスト化を達成できる。The electromagnetic ultrasonic flaw detector according to the present invention is configured as described above, and can reduce the time during which the electromagnetic ultrasonic probe cannot be measured, and can be used for a probe directly below the surface of a conductive subject. Close parts can be measured. In addition, it uses square wave transmission, and the transmission driver can use a high-speed semiconductor switch, eliminating the need to match the impedance of the transmission coil and the reception coil, eliminating the need for a matching circuit, and providing electromagnetic ultrasonic flaw detection. The apparatus can be reduced in size and cost.
【図1】本発明の電磁超音波探傷装置の一実施例を示す
系統図である。FIG. 1 is a system diagram showing one embodiment of an electromagnetic ultrasonic flaw detector according to the present invention.
【図2】同電磁超音波探傷装置の矩形波送信部のブロッ
ク図である。FIG. 2 is a block diagram of a rectangular wave transmitting unit of the electromagnetic ultrasonic testing device.
【図3】同電磁超音波探傷装置の受信信号切替部のブロ
ック図である。FIG. 3 is a block diagram of a reception signal switching unit of the electromagnetic ultrasonic testing device.
【図4】(a)〜(c)は同電磁超音波探傷装置の送受
信コイルの配置例を示す説明図である。FIGS. 4A to 4C are explanatory diagrams showing examples of the arrangement of transmitting and receiving coils of the electromagnetic ultrasonic testing apparatus.
【図5】(a)〜(c)は同電磁超音波探傷装置の送受
信波形を示す説明図である。FIGS. 5A to 5C are explanatory diagrams showing transmission / reception waveforms of the electromagnetic ultrasonic flaw detector.
【図6】電磁超音波探触子(EMAT)の原理を示す説
明図である。FIG. 6 is an explanatory diagram showing the principle of an electromagnetic ultrasonic probe (EMAT).
【図7】従来の電磁超音波探傷装置を示す系統図であ
る。FIG. 7 is a system diagram showing a conventional electromagnetic ultrasonic flaw detector.
【図8】同電磁超音波探傷装置の送受信波形例を示す説
明図である。FIG. 8 is an explanatory diagram showing an example of transmission / reception waveforms of the electromagnetic ultrasonic testing device.
1 磁石体 2 導電性被検体 3 送信コイル 4 受信コイル 5 電磁超音波探触子 6 受信信号切替部 7 受信信号増幅アンプ部 8 電磁超音波信号処理部 9 矩形波送信部 10 受信信号モニタ部 11 矩形波時間コントロール部 REFERENCE SIGNS LIST 1 magnet body 2 conductive subject 3 transmission coil 4 reception coil 5 electromagnetic ultrasonic probe 6 reception signal switching section 7 reception signal amplification amplifier section 8 electromagnetic ultrasonic signal processing section 9 rectangular wave transmission section 10 reception signal monitoring section 11 Square wave time control section
Claims (2)
する電磁超音波探触子により、非破壊検査等を行う電磁
超音波探傷装置において、前記送信コイルをドライブす
る矩形波送信信号の立ち上がり時の受信コイルへの受信
振動波形をモニタする受信信号モニタ部と、同受信信号
モニタの出力波形により前記受信振動波形の1周期目の
ゼロクロスポイントを検出して後記矩形波送信部をオフ
するための送信オフ信号を発生する矩形波時間コントロ
ール部と、送信コイル回線をオンオフして矩形波電流を
前記送信コイルへ流す矩形波送信部とを有し、前記受信
コイルを前記受信信号モニタ部に接続し、同受信信号モ
ニタ部を前記矩形波送信部に接続し、同矩形波送信部を
前記送信コイルに接続したことを特徴とする電磁超音波
探傷装置。1. An electromagnetic ultrasonic flaw detector for performing non-destructive inspection or the like using an electromagnetic ultrasonic probe having a magnet body, a transmission coil, and a reception coil, when a rectangular wave transmission signal driving the transmission coil rises. A receiving signal monitoring unit that monitors a receiving vibration waveform to the receiving coil, and a zero-cross point in a first cycle of the receiving vibration waveform that is detected based on an output waveform of the receiving signal monitor to turn off a rectangular wave transmitting unit to be described later. A rectangular wave time control unit for generating a transmission off signal; and a rectangular wave transmission unit for turning a transmission coil line on and off to flow a rectangular wave current to the transmission coil, and connecting the reception coil to the reception signal monitoring unit. An electromagnetic ultrasonic flaw detector wherein the received signal monitor is connected to the rectangular wave transmitter, and the rectangular wave transmitter is connected to the transmission coil.
する受信信号増幅アンプ部と受信信号切替部とを有し、
同受信信号増幅アンプ部を前記矩形波送信部の入力側に
設け、前記受信信号切替部を同受信信号増幅アンプ部の
入力側に設けて、前記矩形波時間コントロール部の出力
側及び前記矩形波送信部の入力側を同受信信号切替部に
接続した請求項1記載の電磁超音波探傷装置。2. A reception signal amplification amplifier unit for amplifying a weak signal from the reception coil, and a reception signal switching unit,
The reception signal amplification amplifier section is provided on the input side of the rectangular wave transmission section, and the reception signal switching section is provided on the input side of the reception signal amplification amplifier section, and the output side of the rectangular wave time control section and the rectangular wave 2. The electromagnetic ultrasonic flaw detector according to claim 1, wherein an input side of the transmission unit is connected to the reception signal switching unit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7019434A JP2961061B2 (en) | 1995-02-07 | 1995-02-07 | Electromagnetic ultrasonic flaw detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7019434A JP2961061B2 (en) | 1995-02-07 | 1995-02-07 | Electromagnetic ultrasonic flaw detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08211027A JPH08211027A (en) | 1996-08-20 |
JP2961061B2 true JP2961061B2 (en) | 1999-10-12 |
Family
ID=11999189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7019434A Expired - Fee Related JP2961061B2 (en) | 1995-02-07 | 1995-02-07 | Electromagnetic ultrasonic flaw detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2961061B2 (en) |
-
1995
- 1995-02-07 JP JP7019434A patent/JP2961061B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH08211027A (en) | 1996-08-20 |
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