JP2947543B2 - Anodizing equipment - Google Patents
Anodizing equipmentInfo
- Publication number
- JP2947543B2 JP2947543B2 JP26709792A JP26709792A JP2947543B2 JP 2947543 B2 JP2947543 B2 JP 2947543B2 JP 26709792 A JP26709792 A JP 26709792A JP 26709792 A JP26709792 A JP 26709792A JP 2947543 B2 JP2947543 B2 JP 2947543B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- container
- anodizing
- liquid
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Formation Of Insulating Films (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は半導体の評価を補助する
ための一手段である陽極酸化装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anodizing apparatus which is a means for assisting semiconductor evaluation.
【０００２】[0002]
【従来の技術】従来の陽極酸化装置に用いられる陽極酸
化用試料台について、図５を参照しながら説明する。2. Description of the Related Art An anodizing sample stage used in a conventional anodizing apparatus will be described with reference to FIG.
【０００３】陽極酸化を行う試料を、試料台２と陽極酸
化液容器３との間にＯリングを介して、取り付ける。９
は、液体を入れる容器を試料と密着させるために固定す
るネジである。ネジ９を３〜４本使用して、試料台２に
試料１を固定して、液が試料１にＯリングを介して漏れ
ないように固定する。A sample to be anodized is mounted between the sample stage 2 and the anodizing solution container 3 via an O-ring. 9
Is a screw for fixing the container for holding the liquid in order to bring the container into close contact with the sample. The sample 1 is fixed to the sample stage 2 using three or four screws 9, and the liquid is fixed to the sample 1 so as not to leak through the O-ring.
【０００４】このような構造で、陽極酸化液のＮメチル
アセトアミドに硝酸カリウムを加えて、白金電極を液中
に浸して、試料１側をプラス電位として電流を流し、陽
極酸化を行う。In such a structure, potassium nitrate is added to N-methylacetamide of the anodic oxidizing solution, a platinum electrode is immersed in the solution, and a current is made to flow with the sample 1 side at a positive potential to perform anodic oxidation.
【０００５】このようにして、試料１の上に酸化膜を形
成することができる。In this manner, an oxide film can be formed on the sample 1.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら前記のよ
うな構成では、ネジ９の締めつけ具合のアンバランスか
ら、試料１の表面から液漏れを生じる。また、この試料
台２に試料１を多数回付け替えて都度用いるが、上記の
試料台２では非常に手間がかかるという問題を有してい
た。また試料１の厚さが異なる場合には、このＯリング
の面と一致しないため、そのままでは液漏れなどがおこ
る。このため、試料１の厚さに応じてスペーサー等を用
いて調整する必要がある。また、陽極酸化で試料１に設
けられたＰＮ接合のＰ型部を陽極酸化しようとすると、
ＰＮ接合に対してプラス電位が印加される部分がＮ型部
となっているために、そのＰＮ接合部が逆バイアスされ
てしまい異常な事態が生じる。However, in the above-described configuration, liquid leakage occurs from the surface of the sample 1 due to imbalance in the degree of tightening of the screw 9. In addition, the sample 1 is attached to the sample table 2 many times and used every time, but the sample table 2 has a problem that it takes much time and effort. Further, when the thickness of the sample 1 is different, the surface does not coincide with the surface of the O-ring. Therefore, it is necessary to adjust the thickness of the sample 1 using a spacer or the like. Also, when anodizing the P-type portion of the PN junction provided in Sample 1 by anodization,
Since a portion to which a positive potential is applied to the PN junction is an N-type portion, the PN junction is reverse-biased, and an abnormal situation occurs.
【０００７】本発明はかかる点に鑑み、取り付けが容易
で、試料の厚さにかなりの許容度を持ち、しかも試料の
表面に電極を取ることができる陽極酸化装置を提供する
ことを目的とする。SUMMARY OF THE INVENTION In view of the foregoing, it is an object of the present invention to provide an anodic oxidation apparatus which can be easily mounted, has a considerable tolerance for the thickness of a sample, and can take electrodes on the surface of the sample. .
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するため
に本発明の陽極酸化装置は、陽極酸化する試料を上面に
配置した試料台と、前記試料上にＯリングを介して液体
を注ぐ容器を配置し、前記容器に重りを載せている。In order to achieve the above object, an anodic oxidation apparatus according to the present invention comprises a sample stage on which a sample to be anodized is disposed on an upper surface, and a container for pouring a liquid on the sample via an O-ring. And a weight is placed on the container.
【０００９】また、前記重りが前記容器と物理的に分離
されている。さらに、前記試料には前記試料台に取り付
けられた金属性電極が接触している。Further, the weight is physically separated from the container. Further, a metallic electrode attached to the sample stage is in contact with the sample.
【００１０】[0010]
【作用】本発明は前記した構成により、試料を試料台に
設置して必要なら試料表面に電極をとり、またＯリング
面の高さと一致するように試料台の高さをネジでもって
調整し、その上にＯリングを介して液体を入れる容器を
載せ、その回りにリング状の重りを載せる。その上から
陽極化成に必要な液体を入れる。そして、液体中に白金
電極を浸すことで、取り付けが容易で、試料の厚さにか
なりの許容度を持ち、しかも試料の表面に電極を取るこ
とができる。According to the present invention, the sample is placed on the sample table, electrodes are provided on the sample surface if necessary, and the height of the sample table is adjusted with a screw so as to match the height of the O-ring surface. A container for holding the liquid is placed thereon via an O-ring, and a ring-shaped weight is placed around the container. The liquid necessary for anodization is poured from above. Then, by immersing the platinum electrode in the liquid, the mounting is easy, the thickness of the sample has a considerable tolerance, and the electrode can be placed on the surface of the sample.
【００１１】[0011]
【実施例】図１は本発明の第１の実施例における陽極酸
化装置の構成図である。FIG. 1 is a block diagram of an anodizing apparatus according to a first embodiment of the present invention.
【００１２】以下の図において、１は試料、２は試料
台、３は容器、４は重り、５はＯリング、６は陽極酸化
液、７はネジ部、８は金属性電極、９はネジ部である。In the following figures, 1 is a sample, 2 is a sample stage, 3 is a container, 4 is a weight, 5 is an O-ring, 6 is an anodizing solution, 7 is a screw portion, 8 is a metal electrode, and 9 is a screw. Department.
【００１３】シリコン試料１を金属で作成した試料台２
に設置し、陽極酸化用液に対して電気的に絶縁され、か
つ溶剤に溶けない樹脂製の容器３をＯリング５を介して
上におく。さらに、その上に重量のある重り４を上に載
せる。このようにして、試料１の一部にＯリング５を介
して液体を容器３に入れ、プラス電極を試料台２に接続
する。また、容器３内部の液体中に白金電極を浸してマ
イナス電位とする。これに電界を加えて、試料１の上に
陽極酸化膜を形成する。Sample stage 2 made of metal from silicon sample 1
And a resin container 3 which is electrically insulated from the anodizing liquid and is insoluble in the solvent is placed on the upper side via an O-ring 5. Further, a heavy weight 4 is placed thereon. In this way, the liquid is put into the container 3 through the O-ring 5 on a part of the sample 1 and the positive electrode is connected to the sample table 2. In addition, a platinum electrode is immersed in the liquid inside the container 3 to have a negative potential. An anodic oxide film is formed on the sample 1 by applying an electric field thereto.
【００１４】すなわち、本実施例は、陽極酸化の試料１
を上面として配置し、その上にゴム製のＯリング５を介
して液体を注ぐ容器３を試料１の一部に配置してある。
その容器３を試料１に接するように、重り４でもって液
の漏れを防ぐ構造をしている。また、その重り４がリン
グ状である。重り４が液体の容器３と容易に物理的に分
離することができる構造を持つ。That is, in this embodiment, anodized sample 1
Is arranged as an upper surface, and a container 3 on which a liquid is poured via a rubber O-ring 5 is arranged on a part of the sample 1.
A structure is adopted in which the container 3 is in contact with the sample 1 with a weight 4 to prevent liquid leakage. The weight 4 has a ring shape. It has a structure in which the weight 4 can be easily physically separated from the liquid container 3.
【００１５】図２に断面構造を示す。ここで試料台２の
試料１を装着する部分の高さを可変とするために、図３
に示したようにネジ部７を形成する。このようにして試
料台２の高さはネジ部７の動きによって調整することが
できる。FIG. 2 shows a sectional structure. Here, in order to make the height of the portion of the sample stage 2 where the sample 1 is mounted variable, FIG.
The threaded portion 7 is formed as shown in FIG. In this way, the height of the sample stage 2 can be adjusted by the movement of the screw portion 7.
【００１６】以上のようにこの実施例によれば、高さの
調整を行うことなく、さらに容器３の液体を漏らすこと
なく陽極酸化を行うことができる。また試料１が表面に
Ｐ型部が出ており、しかもＮ型部が下に存在するとき、
試料１を陽極とすることで、逆方向バイアスされ、陽極
酸化がスムーズになされない場合がある。特に接合部の
不純物濃度が薄い場合にはブレークダウン耐圧が高く、
好ましくない。このときに図４に示すように試料１の上
からバネ状の金属性電極８によって試料の表面にコンタ
クトをとることで、陽極酸化できる。As described above, according to this embodiment, anodic oxidation can be performed without adjusting the height and without leaking the liquid in the container 3. Also, when the sample 1 has a P-type part on the surface and an N-type part exists below,
When the sample 1 is used as an anode, a reverse bias is applied and the anodic oxidation may not be performed smoothly. Especially when the impurity concentration at the junction is low, the breakdown voltage is high,
Not preferred. At this time, as shown in FIG. 4, anodization can be performed by contacting the surface of the sample 1 with the spring-shaped metal electrode 8 from above.
【００１７】[0017]
【発明の効果】本発明によれば、容易にＯリングを用い
て高さを合わせて試料の表面を陽極酸化することがで
き、その実用的効果は大きい。According to the present invention, the surface of the sample can be easily anodized by adjusting the height using an O-ring, and the practical effect is large.
【図１】本発明の第１の実施例における陽極酸化装置の
構成図FIG. 1 is a configuration diagram of an anodizing apparatus according to a first embodiment of the present invention.
【図２】本発明の第１の実施例における陽極酸化装置の
断面図FIG. 2 is a sectional view of the anodizing apparatus according to the first embodiment of the present invention.
【図３】本発明の試料台の細部を説明するための図FIG. 3 is a view for explaining details of a sample stage of the present invention.
【図４】本発明の電極を試料上部より取る場合の試料台
の細部を説明する図FIG. 4 is a view for explaining details of a sample stage when the electrode of the present invention is taken from above the sample.
【図５】従来の陽極酸化装置の構成図FIG. 5 is a configuration diagram of a conventional anodizing apparatus.
１ 試料 ２ 試料台 ３ 容器 ４ 重り ５ Ｏリング ６ 陽極酸化液 ７ ネジ部 ８ 金属性電極 ９ ネジ部 DESCRIPTION OF SYMBOLS 1 Sample 2 Sample stand 3 Container 4 Weight 5 O-ring 6 Anodizing liquid 7 Screw part 8 Metal electrode 9 Screw part
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭52−137448（ＪＰ，Ａ) 特開 平３−231703（ＪＰ，Ａ) 実開 昭59−195734（ＪＰ，Ｕ) 実開 平２−122067（ＪＰ，Ｕ) 実開 平３−85470（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.6，ＤＢ名) C25D 17/00 C25D 11/32 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-52-137448 (JP, A) JP-A-3-231703 (JP, A) JP-A-59-195734 (JP, U) JP-A-2 122067 (JP, U) JP-A 3-85470 (JP, U) (58) Field surveyed (Int. Cl. 6 , DB name) C25D 17/00 C25D 11/32
Claims (3)
と、前記試料上にＯリングを介して液体を注ぐ容器を配
置し、前記容器に重りを載せていることを特徴とする陽
極酸化装置。1. An anodizing method comprising the steps of: placing a sample stage on which a sample to be anodized is disposed on an upper surface; and a container for pouring a liquid on the sample via an O-ring, and placing a weight on the container. apparatus.
いることを特徴とする請求項１に記載の陽極酸化装置。2. An anodizing apparatus according to claim 1, wherein said weight is physically separated from said container.
金属性電極が接触していることを特徴とする請求項１に
記載の陽極酸化装置。3. An anodizing apparatus according to claim 1, wherein a metallic electrode attached to said sample stage is in contact with said sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26709792A JP2947543B2 (en) | 1992-10-06 | 1992-10-06 | Anodizing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26709792A JP2947543B2 (en) | 1992-10-06 | 1992-10-06 | Anodizing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06116796A JPH06116796A (en) | 1994-04-26 |
| JP2947543B2 true JP2947543B2 (en) | 1999-09-13 |
Family
ID=17440018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26709792A Expired - Fee Related JP2947543B2 (en) | 1992-10-06 | 1992-10-06 | Anodizing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2947543B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0130967D0 (en) * | 2001-12-24 | 2002-02-13 | Hunting Oilfield Services Ltd | Anti galling threaded joint |
| JP6447575B2 (en) | 2016-05-23 | 2019-01-09 | トヨタ自動車株式会社 | Metal film forming method and film forming apparatus |
-
1992
- 1992-10-06 JP JP26709792A patent/JP2947543B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06116796A (en) | 1994-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |