JP2926955B2 - Phase change type optical recording medium - Google Patents

Phase change type optical recording medium

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Publication number
JP2926955B2
JP2926955B2 JP2266497A JP26649790A JP2926955B2 JP 2926955 B2 JP2926955 B2 JP 2926955B2 JP 2266497 A JP2266497 A JP 2266497A JP 26649790 A JP26649790 A JP 26649790A JP 2926955 B2 JP2926955 B2 JP 2926955B2
Authority
JP
Japan
Prior art keywords
recording
layer
recording medium
phase change
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2266497A
Other languages
Japanese (ja)
Other versions
JPH04143937A (en
Inventor
則和 大嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP2266497A priority Critical patent/JP2926955B2/en
Publication of JPH04143937A publication Critical patent/JPH04143937A/en
Application granted granted Critical
Publication of JP2926955B2 publication Critical patent/JP2926955B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は書換え可能な大容量ファイルとして用いられ
る光ディスクのなかで、薄膜の相変化を利用した光記録
媒体に関する。
Description: TECHNICAL FIELD The present invention relates to an optical recording medium using a phase change of a thin film in an optical disk used as a rewritable large-capacity file.

[従来の技術] 相変化型光記録媒体は、大容量な書換え可能な光ディ
スクとして利用されている。記録媒体として要求される
特性は、相変化が高速に生じること、記録・消去状態が
安定なこと、繰り返し書き換えても記録・消去特性が変
化しないこと、である。
[Prior Art] A phase-change optical recording medium is used as a large-capacity rewritable optical disk. The characteristics required as a recording medium are that a phase change occurs at a high speed, that the recording / erasing state is stable, and that the recording / erasing characteristics do not change even after repeated rewriting.

高速な相変化を起こす材料としては、Ge−Sb−Te系合
金が代表的なものとして知られており、既にオーバーラ
イト特性に優れた光ディスクが作製されている。これら
のディスクは106回繰り返し書き換えたときの記録・消
去特性にも優れている。
As a material that causes a high-speed phase change, a Ge—Sb—Te-based alloy is known as a typical material, and an optical disc having excellent overwrite characteristics has already been manufactured. These disks are excellent recording and erasing characteristics when repeatedly rewritten 10 6 times.

しかし、これらのディスクの保護膜では記録層との付
着力が弱いため、記録層と保護層の間で剥離が生じ易い
という欠点があった。このため光ディスクの長期保存性
は劣っていた。
However, since the protective film of these disks has a weak adhesive force with the recording layer, there is a disadvantage that the recording layer and the protective layer are easily peeled off. For this reason, the long-term storability of the optical disc was inferior.

[発明が解決しようとする課題] 上記観点から、相変化型光記録媒体の開発に際して、
高い繰り返し回数を保ち、記録膜との付着力の強い保護
膜が探索されていた。ところが、繰り返し回数を高くで
きる保護膜は通常強い共有結合をとるため、記録膜との
付着力は弱いものであった。
[Problems to be Solved by the Invention] From the above viewpoint, when developing a phase-change optical recording medium,
A protective film having a high number of repetitions and strong adhesion to the recording film has been sought. However, since a protective film capable of increasing the number of repetitions generally takes a strong covalent bond, its adhesion to the recording film is weak.

本発明の目的は、繰り返し記録・消去特性に優れ、し
かも長期保存性に優れた相変化型光記録媒体を提供する
ことにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a phase-change type optical recording medium having excellent repetitive recording / erasing characteristics and excellent long-term storage characteristics.

[課題を解決するための手段] 本発明は、非晶質と結晶との間の相変化を利用して情
報の記録・再生・消去を行う相変化型光記録媒体におい
て、基板、下地層、付着強化層、記録層、付着強化層、
保護層および反射層からなる構成とし、かつ前記付着強
化層を透明な誘導体よりなるものとしたことを特徴とす
る相変化型光記録媒体である。
Means for Solving the Problems The present invention relates to a phase change type optical recording medium for recording, reproducing, and erasing information by utilizing a phase change between an amorphous state and a crystal state. Adhesion enhancement layer, recording layer, adhesion enhancement layer,
A phase-change type optical recording medium characterized by comprising a protective layer and a reflective layer, and wherein the adhesion reinforcing layer is made of a transparent derivative.

第1図は、本発明の相変化型光記録媒体の基本的構成
を示す断面図であり、基板1上に、下地層2、第1付着
強化層3、記録層4、第2付着強化層5、保護層6、反
射層7が順次積層されている。1の基板材質にはポリカ
ーボネート、PMMA、ポリオレフィン、溝付きガラスなど
がある。下地層2および保護層6は、種々の透明誘電体
あるいは誘電体混合物、例えばSi3N4,SiO,AlN,Ta2O5,Ti
O2,ZrO2などから形成される。これらの層は、記録層4
で生じた反射率の差異を増幅するとともに、記録・消去
の繰り返しに伴う基板1や記録層4の熱変形を防ぐ役割
を持つ。付着強化層3,5は種々の透明誘電体で、例えばZ
nS,ZnSe,SiO2,CdS,In2O3などからなる。これらの層も下
地層2,保護層6と同様に、記録層4で生じた反射率の差
異を増幅させる役割を持つ。この付着強化層3と5の間
に記録層4が形成される。7はAl,Au,Si,Ni−Crなどか
らなる反射層である。
FIG. 1 is a sectional view showing a basic structure of a phase change type optical recording medium of the present invention, in which an underlayer 2, a first adhesion strengthening layer 3, a recording layer 4, and a second adhesion enhancing layer are formed on a substrate 1. 5, a protective layer 6, and a reflective layer 7 are sequentially laminated. The material of the substrate 1 includes polycarbonate, PMMA, polyolefin, grooved glass and the like. The underlayer 2 and the protective layer 6 are made of various transparent dielectrics or dielectric mixtures, for example, Si 3 N 4 , SiO, AlN, Ta 2 O 5 , Ti
It is formed from O 2 , ZrO 2 and the like. These layers are the recording layer 4
In addition to amplifying the difference in reflectivity caused by the above, it has a role of preventing thermal deformation of the substrate 1 and the recording layer 4 due to repetition of recording / erasing. The adhesion enhancing layers 3, 5 are various transparent dielectrics, for example, Z
It is composed of nS, ZnSe, SiO 2 , CdS, In 2 O 3 and the like. These layers, like the underlayer 2 and the protective layer 6, also play a role in amplifying the difference in reflectance generated in the recording layer 4. The recording layer 4 is formed between the adhesion enhancing layers 3 and 5. Reference numeral 7 denotes a reflection layer made of Al, Au, Si, Ni—Cr, or the like.

下地層2,付着強化層3,5、保護層6の材質はレーザ光
の波長に対して透明であることが必要である。下地層2
と保護層6は記録層4の温度上昇に対して十分な耐熱
性、変形に対して十分な機械的強度を満足するという条
件で選定されるものである。一方、付着強化層3,5は下
地層2や保護層6および記録層4との濡れ性がよい材料
であれば、耐熱性や機械的強度は保護層ほど強い必要は
ない。上記で例示した化合物類はいずれもカルコゲナイ
ド系非晶質と酸化物,窒化物などのセラミックス材料と
の中間的な結合様式であり、界面においてはカルコゲナ
イド系非晶質とセラミックス材料の両方に結合手を出し
うる材料である。記録層4は、可逆的な相変化を示す材
料である。各層の膜厚は、記録・消去時に照射されるレ
ーザ光の波長で光学的な吸収が大きく、再生信号振幅が
大きくなるように設定する。
The materials of the underlayer 2, the adhesion reinforcing layers 3, 5 and the protective layer 6 need to be transparent to the wavelength of the laser beam. Underlayer 2
The protective layer 6 is selected under the condition that the recording layer 4 satisfies sufficient heat resistance against a temperature rise and sufficient mechanical strength against deformation. On the other hand, if the adhesion enhancing layers 3 and 5 are made of a material having good wettability with the underlayer 2, the protective layer 6 and the recording layer 4, the heat resistance and the mechanical strength do not need to be as strong as those of the protective layer. All of the compounds exemplified above have an intermediate bonding mode between the chalcogenide-based amorphous material and the ceramic material such as an oxide or a nitride. At the interface, the bond is bonded to both the chalcogenide-based amorphous material and the ceramic material. Is a material that can produce The recording layer 4 is a material that exhibits a reversible phase change. The thickness of each layer is set so that the optical absorption is large at the wavelength of the laser beam irradiated at the time of recording / erasing, and the amplitude of the reproduced signal is increased.

下地層2、付着強化層3,5、保護層6はスパッタ法、
真空蒸着法、CVD法などで形成する。記録層4、反射層
7は、スパッタ法あるいは蒸着法で形成される。
The underlayer 2, the adhesion enhancing layers 3, 5 and the protective layer 6 are formed by sputtering.
It is formed by a vacuum deposition method, a CVD method, or the like. The recording layer 4 and the reflection layer 7 are formed by a sputtering method or an evaporation method.

[作用] 相変化型光記録媒体で、記録すなわち非晶質化は液体
状態からの急冷過程を利用する。この時、液体状態にな
る記録材料と記録材料を保護する保護層との濡れ性が良
ければ記録動作時に両者は密着状態を保ち、濡れ性が悪
いと両者は分離する。また、表面張力の大きさと下地と
の濡れ性の兼ね合いで物質の形状も変化する。このよう
な記録層と保護層の濡れ性の関係を利用すれば、記録動
作時における密着性を向上させ、形状変化を抑えること
が可能である。
[Operation] In a phase change optical recording medium, recording, that is, amorphization utilizes a rapid cooling process from a liquid state. At this time, if the recording material in a liquid state and the protective layer for protecting the recording material have good wettability, the two will keep close contact during the recording operation, and if the wettability is poor, they will separate. In addition, the shape of the substance changes depending on the balance between the magnitude of the surface tension and the wettability with the base. If such a relationship between the wettability of the recording layer and the protective layer is used, it is possible to improve the adhesion during the recording operation and suppress the shape change.

本発明では、記録層と保護層の間で濡れ性の大きさを
最適化することにより、長期保存のきく相変化型光記録
媒体を与える。ここでは、保護層と記録層との間に両方
の層に対して濡れ性の良い付着強化層を設けることで、
記録層と保護層の密着性を上げ、膜の剥離を抑え、長期
保存性を高める。
The present invention provides a phase-change optical recording medium that can be stored for a long time by optimizing the degree of wettability between the recording layer and the protective layer. Here, by providing an adhesion-enhancing layer having good wettability to both layers between the protective layer and the recording layer,
Increases the adhesion between the recording layer and the protective layer, suppresses peeling of the film, and enhances long-term storage.

記録・消去の繰り返し回数を多くするためには、硬度
の高い保護膜を利用することが有利である。例えば窒化
珪素などのセラミックス材料がこれに相当する。一方、
相変化型光記録材料にはカルコゲナイド系非晶質合金の
適していることが知られている。ところが、セラミック
スとカルコゲナイド非晶質との濡れ性は悪い。これは、
セラミックスは強い共有結合であり、アルコゲナイド合
金は弱い共有結合とイオン結合の混ざった結合であるこ
とから、両者の界面における結合力が弱いためである。
In order to increase the number of repetitions of recording / erasing, it is advantageous to use a protective film having high hardness. For example, a ceramic material such as silicon nitride corresponds to this. on the other hand,
It is known that a chalcogenide amorphous alloy is suitable for a phase change type optical recording material. However, the wettability between the ceramic and the chalcogenide amorphous is poor. this is,
This is because ceramics have a strong covalent bond and an alkogenide alloy has a weak covalent bond and a mixed ionic bond. Therefore, the bonding force at the interface between the two is weak.

そこで、記録層と保護層のいずれに対しても濡れ性の
良い層、すなわちセラミックスとカルコゲナイドの両方
に対して結合の手を出しうるような物質を挟めば、繰り
返し記録・消去特性に優れた性質を生かしつつ、長期保
存の観点から記録層と保護層の間で剥離しにくい相変化
型光記録媒体とすることができる。
Therefore, if a layer that has good wettability to both the recording layer and the protective layer, that is, a substance that can bond to both the ceramics and chalcogenide, is sandwiched, the properties with repeated recording / erasing characteristics are excellent. It is possible to obtain a phase-change type optical recording medium which is hard to peel off between the recording layer and the protective layer from the viewpoint of long-term storage while utilizing the above.

[実施例] 次に、本発明の実施例について説明する。[Example] Next, an example of the present invention will be described.

実施例1 ポリカーボネート基板に膜厚100nmの下地層を窒化珪
素で成膜し、以下、膜厚50nmの第1付着強化層ZnS、膜
厚30nmの記録層Ge2Sb2Te5、膜厚50nmの第2付着強化層Z
nS、膜厚40nmの保護層窒化珪素、膜厚50nmの反射膜Siを
成膜して相変化型光ディスクを作製した。
Example 1 An underlayer having a thickness of 100 nm was formed on a polycarbonate substrate using silicon nitride. A first adhesion enhancement layer ZnS having a thickness of 50 nm, a recording layer Ge 2 Sb 2 Te 5 having a thickness of 30 nm, and a Second adhesion strengthening layer Z
A phase-change optical disk was manufactured by depositing nS, a protective layer silicon nitride having a thickness of 40 nm, and a reflective film Si having a thickness of 50 nm.

このディスクの記録・消去特性と繰り返し記録・消去
回数を測定した。線速11.3m/s・記録周波数7.4MHz,3.7M
Hz・duty50%の条件で第2図からなるパルス光を照射し
てオーバーライトしたとき、CNRの最大は記録パワー19m
Wで55dB、最大消去率は記録パワー19mW、消去パワー8mW
の組み合わせで35dBであった。また、線速11.3m/s・記
録周波数7.4MHz,3.7MHz・duty50%の条件で記録パワー1
9mW、消去パワー8mWの組み合わせとして第2図のパルス
光を繰り返し照射してオーバーライトした時、106回ま
での繰り返しでCNR、消去率はともに変化しなかった。
なお、第2図中、8は読み出し光、9は消去パルス、10
は記録パルスである。
The recording / erasing characteristics of this disk and the number of times of repeated recording / erasing were measured. Linear velocity 11.3m / s, recording frequency 7.4MHz, 3.7M
When overwriting by irradiating the pulse light shown in Fig. 2 under the condition of Hz and duty 50%, the maximum of CNR is the recording power of 19m.
55 dB in W, maximum erasure rate 19 mW recording power, 8 mW erasing power
Was 35 dB in the combination of. The recording power is 1 at a linear velocity of 11.3 m / s, recording frequencies of 7.4 MHz and 3.7 MHz, and a duty of 50%.
9 mW, when the overwriting is irradiated repeatedly pulsed light of FIG. 2 as a combination of the erasing power 8 mW, CNR at repeated up to 10 6 times the erasure rate did not change together.
In FIG. 2, 8 is a reading light, 9 is an erasing pulse, 10
Is a recording pulse.

次に、このディスクを温度80℃、湿度90%RHの環境に
1000時間入れ、耐環境性を調べたところ、記録膜と保護
膜との間に剥離は見られなかった。付着強化層を形成し
ない記録・消去特性,繰り返し回数の同じディスクを同
一の環境に入れた場合、短い場合には約50時間で膜の剥
離が見られたことから、付着強化層を加えることにより
相変化型光ディスクの長期保存性を向上することができ
ることがわかる。
Next, put this disc in an environment with a temperature of 80 ° C and a humidity of 90% RH.
After 1000 hours, the environment resistance was examined, and no peeling was observed between the recording film and the protective film. When a disk with the same recording and erasing characteristics and the same number of repetitions as the one in which the adhesion enhancement layer was not formed was placed in the same environment, the film was peeled off in about 50 hours in the shortest case. It can be seen that the long-term storability of the phase change optical disk can be improved.

[発明の効果] 以上、述べてきた如く、本発明によれば、付着強化層
を設けることにより、記録・消去特性、繰り返し回数は
そのままで、長期保存性に優れた相変化型光記録媒体を
提供することができる。
[Effects of the Invention] As described above, according to the present invention, by providing the adhesion strengthening layer, a phase change type optical recording medium having excellent long-term storage characteristics while maintaining the recording / erasing characteristics and the number of repetitions is maintained. Can be provided.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明による相変化型光記録媒体の基本的構成
を示す断面図、第2図は記録・消去特性、繰り返し回数
測定で用いたレーザ光のパルス形状を示す図である。 1……基板、2……下地層 3……第1付着強化層、4……記録層 5……第2付着強化層、6……保護層 7……反射層、8……読み出し光 9……消去パルス、10……記録パルス
FIG. 1 is a cross-sectional view showing a basic configuration of a phase change type optical recording medium according to the present invention, and FIG. 2 is a view showing a recording / erasing characteristic and a pulse shape of a laser beam used in measurement of the number of repetitions. DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Underlayer 3 ... 1st adhesion reinforcement layer 4 ... Recording layer 5 ... 2nd adhesion reinforcement layer 6 ... Protective layer 7 ... Reflective layer 8 ... Readout light 9 …… Erase pulse, 10 …… Record pulse

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G11B 7/24 535 G11B 7/24 534 G11B 7/24 538 G11B 7/24 533 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) G11B 7/24 535 G11B 7/24 534 G11B 7/24 538 G11B 7/24 533

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】非晶質と結晶との間の相変化を利用して情
報の記録・再生・消去を行う相変化型光記録媒体におい
て、基板、下地層、付着強化層、記録層、付着強化層、
保護層および反射層からなる構成とし、かつ前記付着強
化層を透明な誘導体よりなるものとしたことを特徴とす
る相変化型光記録媒体。
1. A phase change type optical recording medium for recording, reproducing and erasing information by utilizing a phase change between an amorphous phase and a crystal phase. Reinforcement layer,
A phase-change optical recording medium, comprising a protective layer and a reflective layer, and wherein the adhesion reinforcing layer is made of a transparent derivative.
JP2266497A 1990-10-05 1990-10-05 Phase change type optical recording medium Expired - Lifetime JP2926955B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2266497A JP2926955B2 (en) 1990-10-05 1990-10-05 Phase change type optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2266497A JP2926955B2 (en) 1990-10-05 1990-10-05 Phase change type optical recording medium

Publications (2)

Publication Number Publication Date
JPH04143937A JPH04143937A (en) 1992-05-18
JP2926955B2 true JP2926955B2 (en) 1999-07-28

Family

ID=17431747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2266497A Expired - Lifetime JP2926955B2 (en) 1990-10-05 1990-10-05 Phase change type optical recording medium

Country Status (1)

Country Link
JP (1) JP2926955B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2191691C (en) * 1995-12-11 2001-09-11 Atsushi Ebina Phase change optical recording medium
US6821707B2 (en) 1996-03-11 2004-11-23 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US6503690B1 (en) * 1997-08-12 2003-01-07 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, method for producing the same, and method for recording and reproducing optical information
JPH11134720A (en) 1997-08-28 1999-05-21 Matsushita Electric Ind Co Ltd Optical information recording medium and its recording/ reproducing method
US6343062B1 (en) 1997-09-26 2002-01-29 Matsushita Electric Industrial Co., Ltd Optical disk device and optical disk for recording and reproducing high-density signals
TW448443B (en) 1998-08-05 2001-08-01 Matsushita Electric Ind Co Ltd Optical information storage media and production method as well as the storage reproducing method and device
TWI272607B (en) 2002-10-02 2007-02-01 Mitsubishi Kagaku Media Co Ltd Optical recording medium

Also Published As

Publication number Publication date
JPH04143937A (en) 1992-05-18

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