JP2915535B2 - Headpiece assembly alignment method and apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a first jig and a second jig having a headpiece assembly attached to a polishing-side surface, and a polishing-side surface. Regarding a method and an apparatus for positioning a headpiece assembly to be positioned on the basis of a reference, a jig receiving device for receiving a first jig includes at least three ball bearings, and the ball bearings are aligned with the first jig. By scattered on the reference surface of the cradle so as to form one reference surface for the tool,
A high-precision reference surface can be formed on the first jig, so that labor for attaching a reference piece or the like to the first jig is omitted, and work efficiency is improved.

<Prior Art> A method for positioning and polishing a headpiece assembly is disclosed in, for example, JP-A-01-153264 and JP-A-01-153265. In these conventional techniques, a first jig and a plurality of second jigs each having a headpiece assembly adhered to a polishing-side surface are aligned with respect to a polishing-side surface, and The side end surfaces are joined to each other, and then the head piece assembly is polished with reference to the polished surface.

In aligning the first jig and the second jig, the surfaces on the polishing side of both are placed on a pedestal, and the surface of the head piece assembly is positioned with reference to the surface of the pedestal. Together, and
The side end surfaces of the first jig and the second jig are brought into contact with each other and joined with an adhesive.

The first jig and the second jig are subjected to a polishing process after being joined, and the head piece assembly attached to the second jig is polished. In this polishing step, a reference piece serving as a dummy is provided on the polishing-side surface of the first jig in order to prevent the first jig from being directly polished.

<Problems to be Solved by the Invention> However, in the above-described related art, since it is necessary to provide a reference piece serving as a dummy on the polishing-side surface of the first jig, the reference piece is worn by bonding work and polishing. Work such as removal of the reference piece and re-adhesion is required. For this reason, there has been a problem that the polishing operation efficiency is deteriorated.

Therefore, an object of the present invention is to solve the above-described conventional problems and to form a highly accurate reference surface on the first jig,
An object of the present invention is to provide a method and an apparatus for positioning a head piece assembly, which can eliminate the trouble of attaching a reference piece or the like to a first jig and improve work efficiency.

<Means for Solving the Problems> In order to solve the above problems, the present invention provides a first jig,
A method or an apparatus for aligning a second jig having a headpiece assembly attached to a surface on a polishing side, wherein the alignment apparatus includes a receiving table and a jig receiving apparatus, One surface side is a polishing-side surface of the second jig and a reference surface for receiving the jig receiving device, wherein the jig receiving device includes three ball bearings,
The ball bearings are scattered on the reference surface of the pedestal so as to support the first jig at three points.

<Operation> The jig receiving device constituting the positioning device includes three ball bearings, and the ball bearings are scattered on the reference surface of the pedestal so as to support the first jig at three points. Therefore, a highly accurate reference surface determined by the accuracy of the ball bearing can be formed on the first jig.

In addition, since the first jig is received by a ball bearing that is less likely to cause uneven wear, a stable predetermined reference surface can be formed on the first jig regardless of long-term use.

Further, in forming the reference plane for the first jig,
It is only necessary to place the jig on the ball bearing. This eliminates the need for attaching a reference piece or the like to the first jig, and improves the polishing efficiency.

<Example> Fig. 1 is a plan view showing an alignment method and apparatus according to the present invention, and Fig. 2 is a front partial sectional view of the same. In the figure, 1 is a receiving stand, 2 is a jig receiving device, 3 is a first jig, 4
Denotes a second jig, and 5 denotes an optical system for detecting interference fringes.

It is desirable that the cradle 1 is formed of an optical flat. The pedestal 1 constituted by an optical flat is optically transparent, and the surface 101 serving as a reference surface has a high degree of flatness of, for example, JIS1 class.

The jig receiving device 2 includes three ball bearings 21. The three ball bearings 21 have the same outer shape,
The reference surface of the pedestal 1 so as to support the first jig 3 at three points
It is dotted on 101. A support 22 supports the three ball bearings 21 so that they can freely roll while maintaining a predetermined positional relationship. The jig receiving device 2
The ball bearing 21 may be simply placed on the reference surface 101 of the pedestal 1 such that the ball bearing 21 rests on the reference surface 101 of the pedestal 1.

The first jig 3 is supported at three points by the ball bearing 21 of the jig receiving device 2 on the polishing-side surface 31. As a result, a highly accurate reference surface determined by the accuracy of the ball bearing 21 can be formed on the first jig 3.

Moreover, since the first jig 3 is received by the ball bearing 21 which is less likely to cause uneven wear, a stable predetermined reference surface can be formed on the first jig 3 regardless of long-term use.

Further, in forming the reference surface for the first jig 3, it is only necessary to place the first jig 3 on the ball bearing 21. This eliminates the need for attaching a reference piece or the like to the first jig 3, thereby improving the polishing efficiency.

In addition, since the first jig 3 is received by the ball bearing 21 that is less likely to cause uneven wear, a stable predetermined reference surface can be formed on the first jig 3 for a long time.

The side end surface 32 of the first jig 3 is a surface perpendicular to the surface 31 on the polishing side. The second jig 4 has a headpiece assembly 6 adhered to the polishing-side surface 41 with an adhesive 7.
The side end surface 42 of the second jig 4 is perpendicular to the polishing-side surface 41. The adhesive 7 uses a hot melt resin in order to prevent an adhesive distortion.

The headpiece assembly 6 forms a plurality of magnetic transducers Q ₁ , Q ₂ , Q ₃ ,... In one direction by sharing a ceramic structure 61 as shown in an enlarged manner in FIG. It was done.

As is well known, the magnetic conversion element is formed by a high-precision pattern forming technology mainly based on photolithography, similar to the IC manufacturing technology. Figure 8 is a plan enlarged partial broken side view of a magnetic transducer, 8 FIG. 9 is likewise FIG A ₉ -
A cross sectional view taken along the plane A ₉ line. Ceramic structure
61 is deposited an insulating film 612 made of Al ₂ O ₃ on the surface of the substrate 611 is Al ₂ O ₃ · TiC, on the insulating film 612, is formed a magnetic transducer. The magnetic transducer includes a lower magnetic film 62, a gap film 63, an upper magnetic film 64, a coil film 65, and an interlayer insulating film 66.
And a structure in which the whole is covered with a protective film 67 such as Al ₂ O ₃ .

The lower magnetic film 62 and the upper magnetic film 64 have pole portions 621 and 641 facing each other via the gap film 63, and yoke portions 622 and 642 continuous with the pole portions 621 and 641. The above magnetic film 64
Behind the tip region 643 formed substantially parallel to the surface of the insulating film 612.
It has a displacement region 644 that rises in the direction away from the surface 12 and is connected to the yoke portion 642 via the displacement region 644. Depth Th from the end face C ₁ to the position of the tip of the pole portion 641 to displace the starting point Y is the throat height. The throat height Th is polished end face C ₁ so as to have a predetermined dimension. The yoke part 622 and the yoke 642 are connected so as to complete a magnetic circuit in the rear area, and the coil film 65 is formed so as to spiral around the connection part.

The interference fringe detecting optical system 5 is arranged below a lower surface 102 of the pedestal 1 facing the reference surface 101. In the drawing, the reflecting mirror is arranged obliquely at a predetermined angle θ with respect to the horizontal direction.

When aligning the first jig 3 and the second jig 4, the first jig 3 is placed on a ball bearing 21 constituting the jig receiving device 2 and the second jig 4 Is placed on the reference surface 101 of the cradle 1. The first jig 3 is set on the reference surface formed by the ball bearing 21, and the second jig 4 is such that the end face C ₁ of the head piece assembly 6 is
Contact 1

In the embodiment, since the optical system has the interference fringe detecting optical system 5, the contact interface between the reference surface 101 of the receiving table 1 and the end face C _{1 of} the head piece assembly 6 attached to the second jig 4 is provided. Can be detected by the interference fringe detecting optical system 5 through the optical path l. If the second jig 4 is tilted for any reason, Newtonian stripes having a shape, number, interval and width corresponding to the tilt angle appear. Therefore, the alignment is performed so that a predetermined Newtonian stripe is obtained, and the resultant is adhered. The relationship between the tilt angle and Newtonian fringes is measured in advance.

An adhesive 7 for bonding and fixing the headpiece assembly 6
Even if the thickness of different, without being influenced by it, the end face C ₁ of the surface to be polished surface, set to a predetermined plane position determined by the position of the reference surface 101 of the cradle 1, based on the end face C ₁ Predetermined polishing can be performed. Thus, the throat height Th (see FIGS. 8 and 9) can be polished and adjusted with high accuracy, and a magnetic head having predetermined electromagnetic conversion characteristics can be obtained.

Next, the polishing step will be described. FIG. 4 is a front sectional view of the polishing jig obtained through the alignment joining process of FIGS. 1 and 2, and FIG. 5 is a bottom view of the polishing jig. Of the first jig 3
The structure is bonded to the side end surface 32. Reference numeral 8 denotes an adhesive for joining the first jig 3 and the second jig 4.

6 and 7 show a polishing step of the polishing jig shown in FIGS. 4 and 5. FIG. In the figure, 9 is a rotating body,
Numeral 10 denotes a polishing jig shown in FIGS. Rotating body 9 by a motor, not shown, is driven to rotate in a ₁ direction indicated by the arrow. The rotating body 9 is formed by bonding a support member 92 formed of a metal material such as stainless steel to a back surface of a polishing member 91 formed of a disk using a soft metal member such as tin. The surfaces are integrally joined by an agent 93. The support member 92 is made of a soft metal material such as tin and is provided to support the polishing member 91 having insufficient mechanical strength.

Is hitting the polishing, a rotating body 9 is plane rotated in the arrow a ₁ direction, while supplying an abrasive containing diamond particles or the like on the surface (a) of the abrasive member 91, the surface of the abrasive member 91 (a) the end face C ₁ of the head piece aggregate 6 of the polishing jig 10 is brought into contact with. Polishing jig 10 moves parallel to the radial direction indicated by the arrow b ₁ or b _2, so that polishing the entire surface of the surface (b) of the polishing member 91 is performed. Arrow a ₂ indicates the direction of rotation of the polishing jig 10.

By the above-described polishing, the headpiece assembly 6 is polished so as to have a high-precision throat height based on a predetermined alignment.

<Effects of the Invention> As described above, according to the present invention, the following effects can be obtained.

(A) The jig receiving device constituting the positioning device includes three ball bearings, and the ball bearings are scattered on the reference surface of the pedestal so as to support the first jig at three points. Therefore, it is possible to provide an alignment method and apparatus capable of forming a high-precision reference surface determined by the accuracy of the ball bearing with respect to the first jig.

(B) Since the first jig is received by a ball bearing that is less likely to cause uneven wear, the first jig can be aligned with the first jig to form a stable predetermined reference surface regardless of long-term use. Methods and apparatus can be provided.

(C) In forming the reference surface for the first jig, it is only necessary to place the first jig on the ball bearing, so that it is possible to provide an alignment method and apparatus with high polishing work efficiency.

[Brief description of the drawings]

FIG. 1 is a plan view showing an alignment method and apparatus according to the present invention, FIG. 2 is a front partial sectional view of the same, FIG. 3 is an enlarged view of a part of a headpiece assembly, and FIG. Second
FIG. 5 is a front sectional view of the polishing jig obtained through the alignment joining step shown in FIG. 5, FIG. 5 is a bottom view thereof, and FIG. 6 shows a polishing step of the polishing jig shown in FIGS. 4 and 5. Plan view, seventh
Figure also shows a cross-sectional view in a front view, enlarged plan partially cutaway view of FIG. 8 is a magnetic transducer, Figure 9 is also Fig. 8 A ₉ -A ₉ line. DESCRIPTION OF SYMBOLS 1 ... Receiving stand 2 ... Jig receiving device 21 ... Ball bearing 3 ... First jig 4 ... Second jig

Claims (2)

(57) [Claims] 1. A method for aligning a first jig and a second jig having a head piece assembly adhered to a polishing-side surface using an alignment device, wherein the alignment device comprises: Includes a pedestal and a jig receiving device, wherein the pedestal has one surface serving as a polishing-side surface of the second jig and a reference surface for receiving the jig receiving device. The receiving device includes three ball bearings, and the ball bearings are scattered on the reference surface of the pedestal so as to support the first jig at three points. How to align the headpiece assembly. 2. An apparatus for aligning a first jig and a second jig having a headpiece assembly adhered to a polishing-side surface, the apparatus including a receiving table and a jig receiving apparatus, One side of the pedestal is a polishing-side surface of the second jig and a reference surface for receiving the jig receiving device. The jig receiving device includes three ball bearings. A head piece assembly positioning apparatus, wherein the first jig is supported at three points on the reference surface of the pedestal.