JP2633273B2 - Polishing method and polishing jig - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a polishing method and a polishing jig based on a polishing surface. INDUSTRIAL APPLICABILITY The present invention is effective in, for example, polishing the flying surface of a slider carrying a read / write element so as to obtain a predetermined gap depth in a manufacturing process of a flying magnetic head.

<Prior Art> FIGS. 5 and 6 show a conventional example of a polishing method for polishing a flying surface of a slider carrying a read / write element in a manufacturing process of a flying magnetic head. In the figure, 1
Is a rotating body, 2 is a headpiece assembly which is an object to be polished, and 3 is a jig for supporting the headpiece assembly 2. Rotating body 1
Is driven to rotate in the a1 direction indicated by an arrow by a motor (not shown) or the like. The rotating body 1 is formed by bonding a support member 102 formed of a metal material such as stainless steel to a back surface of a polishing member 101 formed of a disk shape using a soft metal member such as tin. The surface is integrally joined by the agent 103. The support member 102 is made of a soft metal material such as tin and has a mechanical strength that is insufficient.
It is provided to support.

In the polishing, the rotating body 1 is rotated in the plane of the arrow a1 and the surface (a) of the polishing member 101 is supplied to the surface (a) of the polishing member 101 while supplying the abrasive containing diamond particles and the like to the surface (a). The lower surface 211 of the slider member 21 is brought into contact. The jig 3 is moved in parallel in the direction of the radius of rotation indicated by the arrow b1 or b2 so that the entire surface of the surface (a) of the polishing member 101 is polished. An arrow a2 indicates the direction of rotation of the jig 3 and the headpiece assembly 2.

As shown in FIGS. 7 and 8, the headpiece assembly 2 is fixed to the polishing-side surface 31 of the jig 3 using an adhesive 4 such as a hot-melt resin. Headpiece assembly 2
As shown in FIG. 9, a plurality of magnetic head elements Q1, Q2,
Q3, .... formed in one direction.

Each of the magnetic head elements Q1, Q2, Q3... Carries a read / write element. FIG. 10 is an enlarged cross-sectional view of a read / write element portion, 22 is a lower magnetic film, 23 is a protective film made of alumina or the like, 24 is an interlayer insulating film, 25 is a conductor coil, 26 is an upper magnetic film, and 27 is an alumina or the like. Protective films, which are formed by integrated circuit technology. 5 and 6, the flying surface 211 of the slider member 21 shown in FIG.
And the gap depth dg formed by the ball portion 221 of the lower magnetic film 22 and the ball portion 261 of the upper magnetic film 26 is set to a predetermined value.

<Problem to be Solved by the Invention> However, since the headpiece assembly 2 as the object to be polished is directly attached to the polishing-side surface 31 of the jig 3, the headpiece due to the variation in the applied thickness of the adhesive 4 is There is a problem that the polishing amount of the aggregate 2 fluctuates. For example, as shown in FIG. 11, even if the thickness t1 of the slider member 21 is the same, if the thickness of the adhesive 4 is different like h1 and h2, the position of the lower surface 211 of the slider member 21 is changed. The thickness difference h2−h1 = Δh, and the polishing amount changes by Δh. When the object to be polished is the head piece assembly 2 for a magnetic head, it involves an important operation of determining the gap depth dg by polishing.
Moreover, since the gap depth dg must be polished and adjusted with high precision of 0.1 μm or less, it is difficult to adjust the gap depth dg to a predetermined value due to the above-mentioned surface fluctuation, and the predetermined electromagnetic conversion characteristics Cannot be obtained.

When an instantaneous adhesive is used as the adhesive 4 instead of the hot melt resin, the variation in the coating thickness can be reduced. In this case, however, the slider member 21 is distorted due to the instantaneous adhesion, and the surface variation due to the distortion is generated. Invite.

An object of the present invention is to provide a polishing method capable of performing polishing so that a polishing amount from a polishing surface becomes a predetermined value without being affected by an adhesive or the like for attaching an object to be polished, and a polishing method which can be directly used in the execution thereof. It is to provide a jig for use.

<Means for Solving the Problems> In order to solve the above-described problems, the polishing method according to the present invention includes:
A jig composed of a first jig and a second jig, and a reference piece attached to a polishing-side surface of the first jig;
An object to be polished is affixed to the polishing side of the jig, the first jig and the second jig are aligned with respect to the surface of the reference piece, and the side end faces are joined to each other. Then, the object to be polished is polished with reference to the surface of the reference piece.

Next, the polishing jig according to the present invention comprises a first jig and a second jig.
Jig. The first jig has a reference piece adhered and fixed on a polishing-side surface. In the second jig, an object to be polished is attached on a surface on a polishing side. The first jig and the second jig are aligned with respect to the surface of the reference piece, and a side end surface formed so as to be substantially perpendicular to the surface on the polishing side is bonded with an adhesive. Glued to each other.

<Operation> The object to be polished is adhered to the surface on the polishing side of the second jig, and the first and second jigs are aligned with respect to the surface on the polishing side. Even when the applied thickness of the applied adhesive changes, the polished surface of the surface of the object to be polished comes to coincide with the alignment reference plane, so that the change in the adhesive applied thickness can be absorbed. For this reason, it is possible to set the surface on the polishing side of the object to be polished at a predetermined position and perform polishing with high precision.

The polishing jig according to the present invention includes a first jig and a second jig, and the first jig has a reference piece having a mirror-finished surface adhered and fixed on a polishing-side surface. The second jig has an object to be polished adhered on the surface on the polishing side, and the first jig and the second jig are aligned with respect to the surface on the polishing side, Further, since the side end surfaces formed to be substantially perpendicular to the surface on the polishing side are adhered to each other with an adhesive, it is possible to provide a polishing jig which can be directly used for performing the polishing method. .

<Embodiment> FIG. 1 is a sectional view of a jig used for carrying out a polishing method according to the present invention, and FIG. 2 is a bottom view of the same. In the drawings, the same reference numerals as those in FIGS. 5 and 6 indicate the same components. Reference numeral 3 denotes a first jig, and reference numeral 5 denotes a second jig. In the first jig 3, a reference piece 6 having a mirror-finished surface is adhered and fixed on a polishing-side surface 31 with an adhesive or the like.

The second jig 5 has the head piece assembly 2 adhered to the polishing-side surface 51 with an adhesive 7. The adhesive 7 uses a hot melt resin in order to prevent an adhesive distortion.

The first jig 3 and the second jig 5 have a polishing side surface 3
Side end faces 32, 52 formed to be substantially perpendicular to 1, 51
Are fixed by an adhesive 8.

Referring to FIGS. 3 and 4, when the first jig 3 and the second jig 5 are aligned, as shown in FIG. On the flat 9, the slider member 21 is placed on the surface of the optical flat 9.
Is aligned with the surface of the reference piece 6. Thus, the first jig 3 and the second jig 5 are aligned on the surface of the optical flat 9 with reference to the surface of the reference piece 6. Thereafter, the first jig 3 and the second jig 5
Are brought into contact with each other at the side end surfaces 32 and 52, and are joined with the adhesive 8 (see FIGS. 1 and 2).

According to the above-described positioning, as shown in FIG. 4, the adhesive 7 for bonding and fixing the head piece aggregate 2 as the object to be polished is used.
Even if the thicknesses of h1 and h2 are different from each other, the surface of the lower surface 211 serving as a polished surface is set to the surface position of the reference piece 6 determined by the surface position of the optical flat 9, without being affected by the difference. The predetermined polishing can be performed with reference to the surface of No. 6. This allows for gap depth
The dg can be polished and adjusted with high precision, and a magnetic head having predetermined electromagnetic conversion characteristics can be obtained.

In the above embodiment, the method of polishing the headpiece assembly has been described as an example. However, the present invention is not limited to this and can be widely applied to a method of polishing an object to be polished based on the surface on the polishing side.

<Effect of the Invention> As described above, the polishing method according to the present invention includes the jig including the first jig and the second jig, and the polishing-side surface of the first jig. A reference piece is adhered to the surface of the second jig on the polishing side, and the object to be polished is adhered to the first jig and the second jig, with respect to the surface of the reference piece as a reference. In addition, the side end surfaces are joined to each other, and the object to be polished is characterized in that it is polished with reference to the surface of the reference piece. Polishing can be performed so that the polishing amount becomes a predetermined value.

Further, the polishing jig according to the present invention includes a first jig and a second jig, and the first jig has a reference piece adhered and fixed on a polishing-side surface, The second jig has an object to be polished affixed to the surface on the polishing side, the first jig and the second jig are aligned with respect to the surface of the reference piece, and
The side end surface formed to be substantially perpendicular to the polishing side surface,
Since they are adhered to each other by the adhesive, it is possible to provide a polishing jig which can be directly used for carrying out the polishing method of the present invention.

[Brief description of the drawings]

FIG. 1 is a front sectional view of a jig used for carrying out a polishing method according to the present invention, FIG. 2 is a bottom view thereof, FIG. 3 is a view for explaining positioning in the polishing method according to the present invention, 4 is an enlarged view of FIG. 3, FIG. 5 is a plan view illustrating a polishing method using a conventional polishing apparatus, FIG. 6 is a front view of the same, and FIG. 7 is a front cross section of a conventional jig. FIG. 8, FIG. 8 is a bottom view of the same, FIG. 9 is an enlarged view of an essential part of the same, FIG. 10 is an enlarged sectional view of a read / write element portion of the head piece assembly, FIG.
The figure shows a conventional problem. 2… Polished object 3… First jig 5… Second jig

Claims (2)

(57) [Claims] 1. A jig comprising a first jig and a second jig, wherein a reference piece is attached to a polishing-side surface of the first jig, and wherein the second jig is provided. An object to be polished is adhered to the surface of the abrasive, and the first jig and the second jig are aligned with respect to the surface of the reference piece, and the side end faces are joined to each other, A polishing method for polishing an object to be polished based on the surface of the reference piece. 2. A polishing jig including a first jig and a second jig, wherein the first jig has a reference piece adhered and fixed on a surface on a polishing side. In the second jig, an object to be polished is stuck on a surface of an abrasive, and the first jig and the second jig are aligned with respect to the surface of the reference piece. And a polishing jig in which side end surfaces formed so as to be substantially perpendicular to the polishing-side surface are bonded to each other with an adhesive.