JP3129726B2 - Polishing method of headpiece aggregate - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention mounts a headpiece assembly on a jig,
The present invention relates to a polishing method for polishing an end face of a head piece assembly opposite to a mounting surface.

<Prior Art> As a polishing technique for a headpiece assembly, for example, those described in JP-A-1-153264, JP-A-1-153265, and the like are known. Basically, a headpiece assembly is mounted on a jig, and the end face of the headpiece assembly opposite to the mounting surface is polished to obtain a predetermined throat height (gap depth). The headpiece assembly has a plurality of magnetic headpieces aligned in one direction on a ceramic support. Each of the magnetic head pieces has a pole portion located on an end surface side to be a polished surface, and has a processing mark indicating a predetermined position of the pole portion.

The ceramic support that supports the magnetic headpiece is μ
Although it is in the unit of m, bending occurs due to strain. Due to this bending, the position of the magnetic headpiece, particularly the throat height position of the pole portion, is different depending on each magnetic headpiece. Therefore, the work mark is used as a mark, and polishing is performed so as to obtain a predetermined throat height. Conventionally, in polishing, it has been determined, based on the experience and intuition of a worker, to which position the polishing can be performed with the highest yield when viewed from the processing mark.

<Problems to be Solved by the Invention> As described above, since the polishing position is conventionally determined based on the experience and intuition of the worker, individual differences among workers are likely to occur, workability is poor, and mass productivity is low. And the variation in yield is increased.

Japanese Patent Application Laid-Open No.
The technique described in Japanese Patent Publication No. 426 is also known. The technique described in this prior art document forms a pattern for a throat height measurement mark on the substrate of a thin-film magnetic head at a position substantially equal to the gap side of a head core, and the dimension of the throat height measurement mark on the lap surface side A predetermined throat height is obtained by measuring.

However, the technique described in this prior art document has a problem that the workability is poor and the mass productivity is low because of the trouble of measuring the size of the throat height measurement mark on the lap surface side for each of the head cores. The point has not been resolved.

Therefore, an object of the present invention is to solve the above-mentioned conventional problems, set the polishing amount objectively and rationally, increase the number of non-defective headpieces obtained from one headpiece assembly, and increase the yield. It is an object of the present invention to provide a method of polishing a headpiece aggregate in which the work efficiency is improved by increasing the probability of a combination to be mounted on the same jig.

<Means for Solving the Problems> In order to solve the above-described problems, the present invention mounts a plurality of headpiece aggregates on a jig and polishes an end face of the headpiece aggregate on a side opposite to a mounting surface. In the polishing method, the headpiece assembly includes a plurality of magnetic headpieces arranged on a ceramic support at intervals in one direction, and each of the magnetic headpieces is disposed on the end face side. The pole portion is located, and has a processing mark provided with a predetermined positional relationship with respect to the pole portion, and is located at the magnetic head piece and the intermediate portion on both sides in the alignment direction of the magnetic head piece. At least at three points of the magnetic head piece to be measured, distances La, Lb, and Lc from the end face to the processing mark are measured and a first point including the three points is measured.
From the first curve, assuming a second curve from which the throat height is substantially zero, for the magnetic head pieces located on both sides in the alignment direction, from the end face to the second curve The distances LA, LB, Lc, LA, and LB are determined as follows: Δa = La−LA Δb = Lb−LB Δc = ｛(La + Lb) / 2｝ −Lc A plurality of headpiece assemblies are mounted on the same jig and polished.

<Example> FIGS. 1 to 3 are views showing a method for polishing a head piece aggregate according to the present invention. In FIG. 1, 1 is a jig,
2 is a headpiece assembly. Headpiece assembly 2
Is mounted on the jig 1 by means such as bonding. The end surface 2B opposite to the mounting surface 2A is a polished surface.

The head piece assembly 2 shares a plurality of magnetic head pieces Q1 to Q
It is formed by aligning Qn in one direction. Each of the magnetic head pieces Q1 to Qn has a pole portion located on the end face 2B side, and has a processing mark 21 provided in a predetermined positional relationship with the pole portion. The number of magnetic head pieces Q1 to Qn is an arbitrary number.

Each of the magnetic head pieces Q1 to Qn is one or two.
Transducers. FIG. 8 is a partially enlarged plan sectional view of the transducer part, and FIG. 9 is FIG.
It is sectional drawing in the A1-A1 line. FIGS. 8 and 9 are used to show the outline of the structure, and the dimensions of each part are exaggerated and do not always match.
Reference numeral 20 denotes a ceramic structure having a base portion 201 made of Al ₂ O ₃ —TiC or the like and an insulating film 202 made of alumina or the like formed thereon. 22 is a lower magnetic film, 23 is a gap film made of alumina or the like, 24 is an interlayer insulating film, 25 is a coil film, 26
Is an upper magnetic film, 27 is a protective film such as alumina, and 28 and 29 are lead conductors, which are formed by integrated circuit technology. The lower magnetic film 22 and the upper magnetic film 26 have pole portions 221 and 261 extending in the direction of the end face 2B, respectively.
Yoke portions 222 and 262 are provided behind the pole portions 221 and 261, and the rear regions of the yoke portions 222 and 262 are connected to each other to complete a magnetic circuit. The coil film 25 is arranged so as to spiral around the joint.

The pole portion 261 of the upper magnetic film 26 has a displacement region 264 rising from the surface of the ceramic structure 20 behind a tip region 263 formed so as to be substantially parallel to the surface of the ceramic structure 20. Then, the yoke portion 26 passes through the displacement region 264.
It is connected to 2. Displacement start point Y from tip of pole part 261
Is the throat height and the displacement start point Y
Is zero throat height. In order to obtain predetermined electromagnetic conversion characteristics, the throat height TH must be set to a predetermined value. The throat height TH is determined by polishing the end face 2B, and the processing mark 21 is used as a reference for the polishing. Processing mark 21 is magnetic headpiece Q1
To Qn of the pole portions 221 and 261.

The description will be continued with reference to FIGS. 1 to 3 again. At least three points a to c of the magnetic head pieces Q1 and Qn and the magnetic head piece Qr located at the intermediate portion on both sides in the alignment direction of the magnetic head pieces Q1 to Qn, the processing mark is formed from the end face 2B.
The distance La to Lc to 21 is measured. More measurement points can be set including the above three points a to c. The measurement is performed, for example, by an optical processing mark detection device.
Before measuring the distances La to Lc, the surface 2B to be polished is ground so as to have a high flatness.

From the measured values La to Lc obtained as described above, three points a
Suppose a first curve f1 including 〜c. In this case, the first curve f1 is a quadratic curve, and can be regarded as an envelope of the processing mark 21 included in each of the magnetic head pieces Q1 to Qn.

Next, a second curve f2 in which the throat height TH becomes substantially zero from the first curve f1 is assumed. The processing mark 21 is designed to have a fixed positional relationship with respect to the displacement start point Y (see FIGS. 8 and 9) where the throat height TH is substantially zero. A second curve may be assumed based on the value. In this case, the second curve
f2 is a curve obtained by translating the first curve f1. As another means, a means in which one head piece assembly cut out from the same wafer is polished prior to the other and the throat height TH with respect to the processing mark 21 is actually measured at a zero point may be considered. The setting of the first curve f1 and the second straight line f2 can be realized by data processing by a computer.

Next, distances LA and LB from the end face 2B to the second curve f2 are determined for the magnetic head pieces arranged on both sides. Then, a plurality of headpiece assemblies similar to each other: Δa = La−LA Δb = Lb−LB Δc = {(La + Lb) / 2} −Lc are mounted on the same jig and polished. The number of headpiece assemblies attached to the same jig is about 3 to 5.

According to the equations of Δa and Δb, the relationship between the distance La and the distance LA,
Further, from the relationship between the distance Lb and the distance LB, the throat height zero point based on the end face 2B is known. The distances La and LB are measured values and are known. The distances LA and LB can be predicted in advance. Therefore, based on the throat height zero point given by △ a, △ b, the amount of polishing required to obtain the throat height TH having a predetermined height (length) is determined by the distance L from the end face 2B.
Abrasive can be set to the required value within the range not exceeding A and LB.

If Δa and Δb are not similar, the throat height TH
Since the throat height zero point serving as a reference for determining is different, and hence the amount of polishing is also different, the throat height is removed from the headpiece assembly to be mounted on the same jig.

Δc is a bending component of the head piece assembly. A plurality of headpiece aggregates having similar flexural components △ c,
When polishing is performed by attaching to the same jig, the number of magnetic head pieces having similar throat heights TH can be increased with the same polishing amount.

Therefore, according to the present invention, the amount of polishing is objectively and rationally set, and the yield is improved by increasing the number of non-defective headpieces obtained from one headpiece aggregate,
The working efficiency can be improved by increasing the combination probability of being mounted on the same jig.

FIG. 4 is a front sectional view of a polishing jig to which the headpiece assembly selected as described above is mounted, and FIG. 5 is a bottom view of the same. In the embodiment, the head piece assembly 2
Are attached to a common polishing jig 3. The head piece assembly 2 attached to each jig 1 satisfies the combination conditions described with reference to FIGS. 4 and 5 are adhesives and 6 is a reference piece.

6 and 7 show specific examples of polishing. In the figure, reference numeral 7 denotes a rotating body. The rotating body 7 is driven to rotate in a direction a1 indicated by an arrow by a motor (not shown) or the like. The rotating body 7 includes a disk-shaped support member 72 formed of a metal material such as stainless steel on the back surface of a disk-shaped polishing member 71 formed of a soft metal member such as tin.
The surfaces are integrally joined by an adhesive 73. Support member
Reference numeral 72 denotes a member made of a soft metal material such as tin and provided to support the polishing member 71 having insufficient mechanical strength.

In the polishing, the rotating body 7 is rotated in the direction of arrow a1 and the surface (a) of the polishing member 71 is supplied to the surface (a) of the polishing member 71 while supplying the abrasive containing diamond particles and the like to the surface (a). The lower surface of the headpiece assembly 2 is brought into contact. The jig 3 is moved in parallel in the radial direction of rotation indicated by the arrow b1 or b2 so that the entire surface of the polishing member 71 (a) is polished. Arrow a2 indicates jig 3 and headpiece assembly 2
Indicates the direction of rotation. With respect to the structures of the jigs 1 and 3 and the mounting technique of the headpiece assembly 2, the techniques described in the above-mentioned Japanese Patent Application Laid-Open Nos. 1-153264 and 1-153265 can be applied.

<Effect of the Invention> As described above, the present invention is a polishing method for mounting a plurality of headpiece aggregates on a jig and polishing an end face of the headpiece aggregate opposite to the mounting surface. Measuring a distance from an end face to a processing mark at least at three points of the magnetic head piece on both sides in the alignment direction of the magnetic head pieces and a magnetic head piece located at an intermediate portion, and obtaining a first curve including the three points from the measured values; Assuming a second curve where the throat height becomes substantially zero from the first curve, distances LA and LB from the end face to the second curve for the magnetic head pieces located on both sides in the alignment direction are calculated. Δa = La−LA, Δb = Lb−LB Δc = {(La + Lb) / 2} −Lc A headpiece assembly having similar similarities is mounted on the same jig and polished. , Set the polishing amount objectively and rationally , Improves the headpiece number increased by yield of non-defective resulting from one head piece aggregate, to facilitate the combination selected to be mounted on the same jig,
It is possible to provide a method for polishing a headpiece aggregate with improved work efficiency.

[Brief description of the drawings]

1 to 3 are views showing a method of polishing a headpiece assembly according to the present invention, FIG. 4 is a front sectional view of a polishing jig to which a selected headpiece assembly is attached, and FIG. FIGS. 6 and 7 are bottom views, showing specific examples of polishing.
FIG. 8 is a partially enlarged cross-sectional view of the transducer portion, and FIG. 9 is a cross-sectional view taken along line A1-A1 of FIG. 1, 3, jig 2, headpiece assembly Q1 to Qn, magnetic headpiece f1, first curve f2, second curve

──────────────────────────────────────────────────の Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B24B 37/04

Claims (1)

(57) [Claims] 1. A polishing method for mounting a plurality of headpiece aggregates on a jig and polishing an end face of the headpiece aggregate opposite to a mounting surface, wherein the headpiece aggregate is a ceramic. A plurality of magnetic headpieces are arranged on a support at an interval in one direction, and each of the magnetic headpieces has a pole portion located on the end face side and has a predetermined position with respect to the pole portion. At least three points of the magnetic head piece on both sides in the alignment direction of the magnetic head piece and the magnetic head piece located at the intermediate portion, from the end face. The distances La, Lb and Lc to the mark are measured, and the first including the three points is measured.
Assuming a second curve in which the throat height is substantially zero from the first curve, the second curve from the end face for the magnetic head pieces located on both sides in the alignment direction 4 The distances LA and LB are determined, and for the distances La, Lb, Lc, LA and LB, Δa = La−LA Δb = Lb−LB Δc = ｛(La + Lb) / 2｝ −Lc A plurality of headpiece aggregates mounted on the same jig and polished.