JPH0469164A - Polishing method for aggregate of head piece - Google Patents

Abstract

PURPOSE:To polish the polishing face of the head piece aggregate surface in a high accuracy, even in case of the coating thickness of the adhesive sticking a head piece aggregate being fluctuated, by sticking the head piece aggregate onto the face of the polishing side of a 2nd jig and aligning 1st and 2nd jigs with the face of the polishing side as the reference. CONSTITUTION:On one face of an optically transparent optical flat 1, 1st jig 3 and 2nd jig 4 are placed. Then, an optical system 2 for interference detection is arranged at the other face side opposed to one face side of this optical flat, the interference fringe on the contact interface of the head piece aggregate 6 sticked to the optical flat and 2nd jig is detected by the optical system for detecting interference, and the alignment of the 2nd jig to the 1st jig and the joining of the both are performed so as to obtain the specified interference fringe. Consequently, the polishing face of the surface of the head piece aggregate is conformed to an alignment reference face even in case of the coating thickness of the adhesive sticking the head piece aggregate being fluctuated and the adhesive coating thickness fluctuation is absorbed.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention provides a first jig and a second jig having a head piece assembly affixed to the polishing side surface, with the polishing side surface being the reference point. A method for polishing a head piece assembly, in which the head piece assembly is aligned, the side end surfaces are joined to each other, and then the head piece assembly is polished with the polishing side surface as a reference, a first jig and a second jig are used. The tool is placed on one side of the optical flat, and the optical interference fringes at the contact interface between the optical flat and the bed piece assembly affixed to the second jig are detected by an interference fringe detection optical system, and based on the obtained interference fringes, By aligning the second jig with respect to the first jig and joining them together, the contact interface between the surface of the bed piece assembly attached to the second jig and the surface of the optical flat is adjusted. It is possible to provide a polishing method that detects the contact state with high sensitivity and high precision and can polish a head piece assembly with high precision.

<Prior art> A method of polishing a head piece assembly is described, for example, in Japanese Patent Application Laid-open No.
It is disclosed in Japanese Patent Application Laid-open No. 153264 and Japanese Patent Application Laid-Open No. 0F-153265. In these conventional technologies, the first
The jig and a plurality of second jigs with head piece assemblies affixed to the polishing side surface are aligned with the polishing side surface as a reference, and the side end surfaces are joined to each other, and then Second, the head piece assembly is polished with the polishing side surface as a reference.

When aligning the first jig and the second jig, place the polishing side surfaces of both on the optical flat, and position the surface of the head piece assembly with reference to the surface of the optical flat. Then, the side end surfaces of the first jig and the second jig are brought into contact with each other and joined with an adhesive.

According to the alignment described above, even if the thickness of the adhesive that fixes the headpiece assembly to the jig differs, the surface of the headpiece assembly that will be the polished surface can be aligned with the surface of the optical flat without being affected by the difference in thickness. A predetermined plane position determined by the position can be set with high precision.

<Problems to be Solved by the Invention> However, in the above-mentioned prior art, it is difficult to determine in what state the contact interface between the surface of the bed piece assembly attached to the second jig and the surface of the optical flat is. cannot know.

For example, there may be dust on the surface of the headpiece assembly or the surface of the optical flat, the surface of the headpiece assembly may be inclined to the surface of the optical flat, or the contact interface may have been properly positioned before joining. but,
It may be tilted due to adhesive strain etc. during the bonding process. If such an incorrect condition occurs, the reference plane will fluctuate during the polishing process in which the polishing side surface of the head piece assembly is used as a reference, and the polishing accuracy will deteriorate. However, conventionally, there is no way to detect incorrect alignment as described above.

The polishing process of the headpiece assembly involves the important work of defining the throat hide by polishing.
Moreover, the throat hide must be polished and adjusted with high accuracy of 0.1 μm or less, so if the above-mentioned incorrect alignment occurs, it becomes difficult to adjust the throat hide to a predetermined value, and the electromagnetic conversion characteristics are Therefore, it becomes impossible to obtain a magnetic head having the following characteristics.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned conventional problems and to detect the contact state of the contact interface between the surface of the bed piece assembly attached to the second jig and the surface of the optical flat with high sensitivity. An object of the present invention is to provide a polishing method capable of detecting high precision and polishing a head piece assembly with high precision.

Means for Solving the Problems> In order to solve the problems described above, the present invention provides a first jig and a plurality of $2.
and a jig with respect to the polishing side surface, and joining the side end surfaces to each other, and then polishing the head piece assembly with the polishing side surface as a reference, the polishing method comprising: , the first jig and the second jig are placed on one side of an optically transparent optical flat, and an optical system for detecting interference fringes is arranged on the other side of the optical flat opposite to the one side. The optical interference fringes at the contact interface between the optical flat and the head piece assembly attached to the second jig are detected by the interference fringe detection optical system, and the interference fringes are detected based on the obtained interference fringes. The method is characterized in that the second jig is aligned with the first jig and the two are joined.

Effect> By attaching the head piece assembly to the polishing side surface of the second jig and aligning the first jig and the second jig with reference to the polishing side surface, the head piece Even if the applied thickness of the adhesive that adheres the aggregate varies, the polished surface of the head piece aggregate can be brought into alignment with the alignment reference plane, thereby absorbing the variation in the adhesive applied thickness.

The first jig and the second jig are placed on one surface of an optically transparent optical flat, and optical interference fringes are detected at the contact interface between the optical flat and the bed piece assembly attached to the second jig. Since the interference fringe detection optical system is used for detection, the contact state of the contact interface between the surface of the bed piece assembly attached to the second jig and the surface of the optical flat can be detected with high sensitivity and precision.

Then, by aligning the second jig with respect to the first jig and joining them based on the obtained interference fringes, the surface of the bed piece assembly attached to the second jig and the optical flat are aligned. The contact state of the contact interface with the surface of the head piece can be set with high precision, the head piece assembly can be polished with high precision, and a predetermined throat hide can be set.

<Example> FIG. 1 is a diagram showing the positioning and bonding steps of the polishing method according to the present invention, and FIG. 2 is an enlarged view thereof. In the figure, 1 is an optical flat, and 2 is an optical system for detecting interference fringes. The optical flat 1 is optically transparent, and its surface 101 has a high degree of flatness, for example, JIS class 1. The interference fringe detection optical system 2 is arranged below the lower surface 102 of the optical flat 1, which faces the surface 101. In the illustration, the reflecting mirror is disposed obliquely at a predetermined angle θ with respect to the horizontal direction.

3 is a first jig, and 4 is a second jig. First jig 3
In this case, a reference piece 5 whose surface is mirror-finished is adhesively fixed onto the surface 31 on the polishing side using an adhesive or the like. The side end surface 32 of the first jig 3 is a surface perpendicular to the polishing side surface 31. The second jig 4 has a head piece assembly 6 pasted on the polishing side surface 41 with an adhesive 7. The side end surface 42 of the second jig 4 is perpendicular to the polishing side surface 41. Hot melt resin is used as the adhesive 7 to prevent adhesive distortion.

As shown in an enlarged view in FIG. 7, the headpiece assembly 6 includes a plurality of magnetic transducers Ql, Q2, Q31 . , , are formed in one direction.

As is well known, the magnetic transducer element is formed using high-precision pattern forming technology mainly based on photolithography, similar to IC manufacturing technology. FIG. 8 is an enlarged plan view partially broken sectional view of the magnetic transducer, FIG. 9 is also FIG. 8A,
-A shows a cross-sectional view on the line. The ceramic structure 61 is made of Al, 0. An insulating film 612 made of Al2O3 is deposited on the surface of a base 611 made of -TiC, and a magnetic transducer element is formed on this insulating film 612. The magnetic conversion element has a thin film laminated structure of a lower magnetic film 62, a gap film 63, an upper magnetic film 64, a coil film 65, and an interlayer insulating film 66, and the entire structure is covered with a protective film 67 such as ^l, 03, etc. It becomes.

The lower magnetic film 62 and the upper magnetic film 64 are connected to the ball portions 621 and 641 and the pole portion 6 facing each other with the gap film 63 interposed therebetween.
21.641 and a continuous yoke portion 622.642. The pole portion 641 of the upper magnetic film 64 is connected to the insulating film 6.
A displacement region 644 that rises in a direction away from the surface of the insulating film 612 is provided behind the tip region 643 which is formed to be parallel to the surface of the insulating film 612 in actual terms.
44 and continues to the yoke portion 642.

The depth Th from the end surface C1 where the tip of the ball portion 641 is located to the displacement start point Y is the throat hide. The end face C1 is polished so that the throat hide Th has a predetermined dimension. The yoke portion 622 and the yoke 642 are coupled in the rear region to complete a magnetic circuit, and a coil [65 is formed to spiral around the coupled portion.

When aligning the first jig 3 and the second jig 4,
The polishing side surfaces 31 and 41 of both are optically flat 1
Put it on top. A reference piece 5 is bonded to the polishing side surface 31 of the first jig 3, and a head bead assembly 6 is bonded to the polishing side surface 41 of the second jig 4. Therefore,′
The jig 3 of s1 contacts the surface 101 of the optical flat 1 with the lower surface of the reference piece 5, and the second jig 4 contacts the surface 101 of the optical flat 1 with the lower surface of the reference piece 5.
Contact with 1.

Then, the interference fringes generated at the contact interface between the surface 101 of the optical flat 1 and the end surface C8 of the head piece assembly 6 attached to the second jig 4 are passed through the optical paths ILI and IL2,
The interference fringe detection optical system 2 detects the interference fringes. If for some reason the second jig 4 is tilted at an angle β as shown by the dashed line in FIG.
Newtonian fringes NL of spacing and width appear. Therefore, they are aligned and bonded so that a predetermined Newtonian stripe is obtained. The relationship between the inclination angle β and the Newtonian fringe is measured in advance.

Another advantage of the alignment according to the present invention is that, as shown in FIG. This can be determined by setting the surface of the end surface C8, which will be the polished surface, at a predetermined plane position determined by the position of the surface 101 of the optical flat 1, and performing a predetermined polishing with reference to the end surface C1. Thereby, the throat hide Th (see FIGS. 8 and 9) can be polished and adjusted with high precision, and a magnetic head having predetermined electromagnetic conversion characteristics can be obtained.

Next, the polishing process will be explained. FIG. 3 is a front sectional view of the polishing jig obtained through the alignment and bonding process shown in FIGS. 1 and 2, and FIG. The jig 4 is bonded to the side end surface 32 of the first jig 3. 8 is an adhesive for joining the first jig 3 and the second jig 4.

5 and 6 show the polishing process of the polishing jig shown in FIGS. 3 and 4. FIG. In the figure, 9 is a rotating body, 1
0 is the polishing jig shown in FIGS. 3 and 4. The rotating body 9 is rotationally driven in the direction a indicated by the arrow by a motor (not shown) or the like. This rotating body 9 has a support member 92 formed in the shape of a disk made of a metal material such as stainless steel, attached to the back surface of a polishing member 91 formed in the shape of a disk made of a soft metal material such as tin. They are integrally bonded face-to-face by the agent 93. The support member 92 is made of a soft metal material such as tin and is provided to support the polishing member 91 which has insufficient mechanical strength.

During polishing, the rotating body 9 is rotated in the direction of arrow a, and the surface of the polishing member 91 (A) is supplied with an abrasive material containing diamond particles etc.
b) End face C3 of head piece assembly 6 of polishing jig 10
contact. The polishing jig 10 is moved in parallel in the direction of the rotation radius indicated by the arrows 1 and 2, and the surface of the polishing member 91 (
b) Ensure that polishing is performed on the entire surface. Arrow a2 indicates the direction of rotation of polishing jig 10.

By the above-described polishing, the head piece assembly 6 is polished to have a highly accurate throat hide based on predetermined alignment.

<Effects of the Invention> As described above, according to the present invention, the following effects can be obtained.

(a) By attaching the head piece assembly to the polishing side surface of the second jig and aligning the first jig and the second jig with reference to the polishing side surface, the head piece Even if the thickness of the adhesive applied to the headpiece assembly changes, the polished surface on the surface of the headpiece assembly matches the alignment reference plane, absorbing variations in the adhesive application thickness, and polishing with high precision. We will provide a polishing method that can be used.

(b) The first jig and the second jig are placed on one surface of an optically transparent optical flat, and optical interference occurs at the contact interface between the optical flat and the bed piece assembly affixed to the second jig. Since the fringes are detected by an optical system for detecting interference fringes, the contact state of the contact interface between the surface of the headpiece assembly attached to the second jig and the surface of the optical flat can be detected with high sensitivity and precision. It is possible to provide a polishing method that can detect, polish a headpiece assembly with high precision, and set a predetermined throat hide.

[Brief explanation of the drawing]

Figure 1 is a diagram showing the alignment and bonding process in the polishing method according to the present invention, Figure 2 is an enlarged view thereof, and Figure 's3 is a diagram showing the alignment and bonding process of the polishing method according to the present invention. The front cross-sectional view of the polishing jig, Figure 's4 is also the bottom view,
Figure 5 is a plan view showing the polishing process of the polishing jig shown in Figures 3 and 4;

Claims (1)

[Claims] (1) Align the first jig and a plurality of second jigs with head piece assemblies affixed to the polishing side surface using the polishing side surface as a reference, and align the side end surfaces. A polishing method in which the head piece assembly is bonded to each other and then polished with the polishing side surface as a reference, the first jig and the second jig being optically transparent optical flats. an optical system for detecting interference fringes is placed on one surface of the optical flat, and an optical system for detecting interference fringes is disposed on the other surface opposite to the one surface side of the optical flat, and the head piece assembly is attached to the optical flat and the second jig. The interference fringes at the contact interface are
A polishing method characterized by aligning the second jig with respect to the first jig and joining the two so that predetermined interference fringes are detected by the interference fringe detection optical system. .