JP2868772B2 - Manufacturing method of polishing tape - Google Patents

Manufacturing method of polishing tape

Info

Publication number
JP2868772B2
JP2868772B2 JP23594288A JP23594288A JP2868772B2 JP 2868772 B2 JP2868772 B2 JP 2868772B2 JP 23594288 A JP23594288 A JP 23594288A JP 23594288 A JP23594288 A JP 23594288A JP 2868772 B2 JP2868772 B2 JP 2868772B2
Authority
JP
Japan
Prior art keywords
polishing
film
shaping
coating
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP23594288A
Other languages
Japanese (ja)
Other versions
JPH0283172A (en
Inventor
正樹 ▲塚▼田
正彦 和田
修 竹厚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP23594288A priority Critical patent/JP2868772B2/en
Publication of JPH0283172A publication Critical patent/JPH0283172A/en
Application granted granted Critical
Publication of JP2868772B2 publication Critical patent/JP2868772B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は精密な仕上げ研磨に使用する研磨テープの製
造方法に関する。
Description: TECHNICAL FIELD The present invention relates to a method for producing a polishing tape used for precise finish polishing.

〔従来の技術及び発明が解決しようとする課題〕[Problems to be solved by conventional technology and invention]

近年、フロッピーディスク、磁気ヘッド、光ファイバ
ー端面、精密電子部品等の表面を高精度で鏡面仕上げす
るための研磨に使用する研磨テープが知られている。こ
の種研磨テープとしては一般的に研磨剤とバインダー成
分からなる塗料を基材に塗布し、単に皮膜化させて形成
してなる研磨層を有するものがあるが、この研磨テープ
の場合、被研磨体から生成する研磨屑が研磨テープと被
研磨体との間に入り込み、この状態で研磨を続行させる
と研磨屑によって被研磨体の表面を傷付けてしまった
り、研磨層面に研磨屑が付着して目詰まり状態となり研
磨能力が低下する等の不都合が生じていた。
2. Description of the Related Art In recent years, a polishing tape used for polishing a surface of a floppy disk, a magnetic head, an end face of an optical fiber, a precision electronic component, or the like to a mirror finish with high precision has been known. This kind of polishing tape generally has a polishing layer formed by simply applying a coating material containing an abrasive and a binder component to a substrate and forming a film, but in the case of this polishing tape, the polishing target is Polishing debris generated from the body enters between the polishing tape and the object to be polished, and if polishing is continued in this state, the polishing debris may damage the surface of the object to be polished, or the polishing debris adheres to the polishing layer surface. Inconveniences such as a clogging state and a decrease in polishing ability have occurred.

また研磨層に溝を設けた研磨テープとして、特開昭62
-255069号公報に研磨層を形成する際、コーティング剤
中に無機質成分が多量に含有されている塗料を塗工して
溶剤を乾燥させる時に塗工層中で発生する“対流セル現
象”によるベルナードセルの凹凸を用いたものが存在す
るが、この研磨テープは製造方法の関係で、形成される
凹部は平面が略六角形のものに限定されてしまい、しか
も常に同等パターンの凹部を形成し得ることが困難であ
り、その凹部のパターンを安定化させるためには製造に
当たり研磨層形成用塗料の溶剤組成、塗布量、乾燥条件
等の管理が難しく、製造作業が非常に煩雑となる問題が
あった。
In addition, as a polishing tape having grooves in the polishing layer, JP-A-62
-255069, when forming a polishing layer, Bernard due to "convection cell phenomenon" generated in the coating layer when applying a paint containing a large amount of inorganic components in the coating agent and drying the solvent Although there is one using the unevenness of the cell, this polishing tape is limited in shape to a substantially hexagonal flat surface because of the manufacturing method, and can always form a recess having the same pattern. In order to stabilize the pattern of the concave portions, it is difficult to control the solvent composition, the coating amount, the drying conditions, and the like of the coating material for forming the polishing layer in the production, and there is a problem that the production operation becomes very complicated. Was.

本発明は上記課題を解消するためになされたもので、
研磨中に生成する研磨屑を研磨テープ側に収容して精密
な研磨作業を容易に行うことができる研磨テープを安定
して且つ簡便に製造し得る製造方法を提供することを目
的とする。
The present invention has been made to solve the above problems,
An object of the present invention is to provide a manufacturing method capable of stably and easily manufacturing a polishing tape capable of easily carrying out a precise polishing operation by accommodating polishing waste generated during polishing on a polishing tape side.

〔課題を解決するための手段〕[Means for solving the problem]

本発明は、 (1)フィルム基材の少なくとも片面に研磨剤を含有し
た研磨層形成用塗料を塗布した後、未硬化状態にある塗
工層に、多数の凹陥部賦形用突起が付設された合成樹脂
フィルム又は紙に合成樹脂をコーティングした複合フィ
ルムからなる賦形用フィルムを該突起が塗工層と対向す
る向きで積層し、次いで、塗工層を硬化せしめた後、該
賦形用フィルムを剥離することを特徴とする研磨テープ
の製造方法。
The present invention provides: (1) After applying a polishing layer-containing coating material containing an abrasive to at least one surface of a film substrate, a coating layer in an uncured state is provided with a large number of concave portion forming projections. A shaping film consisting of a synthetic resin film or a composite film obtained by coating a synthetic resin on paper is laminated in a direction in which the projections face the coating layer, and then, after the coating layer is cured, the shaping film is formed. A method for producing a polishing tape, comprising removing a film.

(2)多数の凹陥部賦形用突起が付設された合成樹脂フ
ィルム又は紙に合成樹脂をコーティングした複合フィル
ムからなる賦形用フィルムの該突起側に研磨剤を含有し
た研磨層形成用塗料を塗布した後、未硬化状態にある塗
工層側をフィルム基材と対峙させて積層し、次いで塗工
層を硬化せしめた後、該賦形用フィルムを剥離すること
を特徴とする研磨テープの製造方法。
(2) A shaping layer-forming paint containing an abrasive on the projection side of a shaping film composed of a synthetic resin film provided with a large number of recessed shaping protrusions or a composite film obtained by coating paper with a synthetic resin. After the application, the coating layer side in the uncured state is laminated facing the film substrate, and then, after the coating layer is cured, the shaping film is peeled off. Production method.

(3)研磨層形成用塗料として電離線硬化性塗料を使用
し、電離放射線を照射して塗工層を硬化させる上記
(1)又は(2)記載の研磨テープの製造方法。
(3) The method for producing a polishing tape according to the above (1) or (2), wherein an ionizing radiation-curable paint is used as the paint for forming the polishing layer, and the coating layer is cured by irradiating with ionizing radiation.

(4)賦形用フィルムの賦形用突起をエンボス法にて形
成してなる上記(1)、(2)又は(3)記載の研磨テ
ープの製造方法。
(4) The method for producing a polishing tape according to the above (1), (2) or (3), wherein the shaping projections of the shaping film are formed by an embossing method.

を要旨とするものである。 It is the gist.

〔実施例〕 以下、本発明の実施例を図面に基づいて説明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.

第1図は本発明によって製造される研磨テープの一例
を示すもので、本発明研磨テープ1は基材フィルム2
と、該フィルム基材2の片面に設けられた研磨層3とか
らなり、該研磨層3には多数の特定の凹陥部4が付与さ
れて構成されている。
FIG. 1 shows an example of a polishing tape manufactured according to the present invention.
And a polishing layer 3 provided on one surface of the film substrate 2, and the polishing layer 3 is provided with a number of specific concave portions 4.

上記フィルム基材2としては、従来から研磨テープに
使用されるものであれば如何なるものでもよく、例え
ば、ポリエステルフィルム、ポリエチレンフィルム、ポ
リプロピレンフィルム、ポリ塩化ビニルフィルム、ポリ
塩化ビニリデンフィルム、ポリカーボネートフィルム、
ポリアミド(ナイロン)フィルム、ポリスチレンフィル
ム、エチレン−酢酸ビニルコポリマーフィルム等を使用
することができ、中でも加工適性、強度、コスト等の点
に考慮した場合、特にポリエステルフィルムが望まし
い。これらのフィルムの研磨層を形成する面には、必要
に応じてコロナ放電処理やポリエステル系樹脂等の易接
着プライマー処理を施すことができる。また上述の基材
の他に、必要に応じて目止め処理を施した紙、布、不織
布等を使用してもよい。フィルム基材2の厚さは12〜10
0μmが好ましい。
The film substrate 2 may be any material as long as it is conventionally used for a polishing tape. For example, a polyester film, a polyethylene film, a polypropylene film, a polyvinyl chloride film, a polyvinylidene chloride film, a polycarbonate film,
A polyamide (nylon) film, a polystyrene film, an ethylene-vinyl acetate copolymer film, or the like can be used. Among them, a polyester film is particularly preferable in consideration of workability, strength, cost, and the like. The surface of these films on which the polishing layer is to be formed can be subjected to a corona discharge treatment or an easy-adhesion primer treatment such as a polyester resin as required. Further, in addition to the above-described base material, paper, cloth, non-woven fabric, or the like which has been subjected to a sealing treatment as necessary may be used. The thickness of the film substrate 2 is 12 to 10
0 μm is preferred.

本発明における研磨層3の凹陥部4は、研磨の際に被
研磨体から生成する研磨屑を収容して溜める機能を果た
すものである。その研磨屑の効率の良い収容を可能なら
しめるため凹陥部4は、第3図に示すようにその開口
幅:aが0.1〜200μm、その深さ:bが0.1〜100μm、その
ピッチ:c(隣接する凹陥部の中心部分の間隔)が10〜50
0μmとなるよう特定されたものであり、これらの条件
を同時に満たさない凹陥部では研磨屑の収容能力が不十
分となる。また、凹陥部4は第2図に示すように研磨層
3の表面全面に均一で規則正しく配列しており、その平
面(水平断面)形状が四辺形、六角形、円、楕円等から
なり、その垂直断面形状が逆三角形、四角形、半円形、
台形等の形状を有するものである。
The concave portion 4 of the polishing layer 3 in the present invention has a function of accommodating and collecting polishing waste generated from the object to be polished during polishing. As shown in FIG. 3, the recess 4 has an opening width: a of 0.1 to 200 μm, a depth: b of 0.1 to 100 μm, and a pitch: c (FIG. The distance between the centers of adjacent recesses is 10-50
It is specified to be 0 μm, and the concave portion that does not satisfy these conditions at the same time has an insufficient capacity for accommodating the polishing debris. The recesses 4 are uniformly and regularly arranged on the entire surface of the polishing layer 3 as shown in FIG. 2, and the plane (horizontal cross section) shape is a quadrilateral, hexagon, circle, ellipse, or the like. The vertical cross section is inverted triangle, square, semicircle,
It has a shape such as a trapezoid.

上記の如き凹陥部4を有する研磨層3は研磨剤とバイ
ンダー成分とから構成され、フィルム基材2の片面、又
は特に図示しないが両面に設けられる。上記研磨剤は精
密な研磨を行うために使用される研磨剤であれば特に限
定されず、研磨用途に応じて種々選択して用いることが
できる。例えば、高硬度材料からなる超硬工具等の被研
磨材を研磨する場合は研磨剤として緑色炭化珪素(Si
C)、ダイヤモンド等が好適であり、同様に硬鋼特殊
鋼、高速度銅等の被研磨材の場合は白色溶融アルミナ
(Al2O3)、柔軟材料からなる被研磨材の場合は酸化ク
ロム(Cr2O3)、磁気ヘッドの最終研磨の場合は酸化鉄
(Fe2O3)がそれぞれ好適な研磨剤である。研磨剤の粒
子径は0.1〜20μmであることが好ましい。これらの研
磨剤は研磨層形成用塗料中、バインダー成分100重量部
に対して100〜1400重量部含有せしめることが好まし
い。
The polishing layer 3 having the concave portions 4 as described above is composed of an abrasive and a binder component, and is provided on one side of the film substrate 2 or on both sides (not shown). The polishing agent is not particularly limited as long as it is a polishing agent used for performing precise polishing, and various polishing agents can be selected and used depending on the polishing application. For example, when polishing a material to be polished such as a carbide tool made of a high-hardness material, green silicon carbide (Si) is used as an abrasive.
C), diamond and the like are suitable. Similarly, white fused alumina (Al 2 O 3 ) is used for a material to be polished such as hard steel special steel and high-speed copper, and chromium oxide is used for a material to be polished made of a flexible material. (Cr 2 O 3 ) and iron oxide (Fe 2 O 3 ) in the case of final polishing of the magnetic head are suitable polishing agents. The particle size of the abrasive is preferably 0.1 to 20 μm. It is preferable that 100 to 1400 parts by weight of these abrasives are contained in the coating material for forming a polishing layer based on 100 parts by weight of the binder component.

研磨層3のバインダー成分として使用される研磨層形
成用塗料としては大別して、溶剤塗料、熱硬化性塗料、
電離放射線硬化性塗料等が挙げられる。溶剤塗料として
は、ベヒクルとしてエチルセルロース、ニトロセルロー
ス、エチルヒドロキシエチルセルロース、セルロースア
セテートブチレート、酢酸セルロースなどのセルロース
誘導体;ポリスチレン、ポリ−α−メチルスチレンなど
のアクリル又はメタクリル樹脂の単独又は共重合樹脂;
ロジン、ロジン変性マレイン酸樹脂、ロジン変性フェノ
ール樹脂、重合ロジンなどのロジンエステル樹脂;ポリ
酢酸ビニル樹脂、クマロン樹脂、ビニルトルエン樹脂、
塩化ビニル樹脂、ポリエステル樹脂、ポリウレタン樹
脂、ブチラール樹脂などの一種又は2種以上を選択して
使用するものが挙げられ、この塗料の場合は適度な強
度、耐摩耗性を有する研磨層を得るために分子間を三次
元的に架橋せしめることが好ましい。熱硬化性塗料とし
てはエポキシ、メラミン、ポリウレタン、不不飽和ポリ
エステル或いはポリシロキサン系等のものが挙げられ
る。
The polishing layer forming paint used as a binder component of the polishing layer 3 is roughly classified into a solvent paint, a thermosetting paint,
Ionizing radiation-curable paints; As the solvent paint, as a vehicle, a cellulose derivative such as ethyl cellulose, nitrocellulose, ethyl hydroxyethyl cellulose, cellulose acetate butyrate, or cellulose acetate; an acrylic or methacrylic resin such as polystyrene or poly-α-methylstyrene;
Rosin, rosin modified maleic resin, rosin modified phenol resin, rosin ester resin such as polymerized rosin; polyvinyl acetate resin, cumarone resin, vinyl toluene resin,
Examples include those used by selecting one or two or more of vinyl chloride resin, polyester resin, polyurethane resin, butyral resin, and the like. In the case of this coating material, in order to obtain a polishing layer having appropriate strength and abrasion resistance. It is preferable to crosslink three-dimensionally between molecules. Examples of the thermosetting paint include epoxy, melamine, polyurethane, unsaturated polyester, and polysiloxane-based paints.

電離放射線硬化性塗料は、硬化物の架橋密度が高いた
め耐摩性、耐熱性等の物性に優れ、また硬化速度が速い
ため生産性が良好である点で好ましい。この電離放射線
硬化性塗料には電子線硬化性塗料と紫外線硬化性塗料と
があり、この2種は後者が光重合開始剤や増感剤を含有
することを除いて成分的に同様なものであり、一般的に
は被膜形成成分としてその構造中にラジカル重合性の二
重合結合を有するポリマー、オリゴマー、モノマー等を
主成分とし、その他必要に応じて非反応性のポリマー、
有機溶剤、ワックス、その他の帯電防止剤等の添加剤を
含有するものである。具体的には、被膜形成成分がアク
リレート系の官能基を有するもの、例えば、比較的低分
子量のポリエステル樹脂、ポリエーテル樹脂、アクリル
樹脂、エポキシ樹脂、ウレタン樹脂、アルキッド樹脂、
スピロアセタール樹脂、ポリブタジエン樹脂、ポリチオ
ールポリエン樹脂、多価アルコール等の多官能化合物の
(メタ)アクリレート等のオリゴマー又はプレポリマー
及び反応性希釈剤としてエチル(メタ)アクリレート、
エチルヘキシル(メタ)アクリレート、スチレン、メチ
ルスチレン、N−ビニルヒロリドン等の単官能モノマー
並びに多官能基モノマー、例えば、トリメチロールプロ
パントリ(メタ)アクリレート、ヘキサンジオールジ
(メタ)アクリレート、トリプロピレングリコールジ
(メタ)アクリレート、ジエチレングリコールジ(メ
タ)アクリレート、ペンタエリスリトールトリ(メタ)
アクリレート、ジペンタエリスリトールヘキサ(メタ)
アクリレート、ネオペンチルグリコールジ(メタ)アク
リレート等を比較的多量に含有するものである。
Ionizing radiation-curable coatings are preferred in that they have high physical properties such as abrasion resistance and heat resistance due to the high crosslink density of the cured product, and good productivity due to high curing speed. The ionizing radiation-curable paints include an electron beam-curable paint and an ultraviolet-curable paint, and the two are similar in composition except that the latter contains a photopolymerization initiator or a sensitizer. In general, as a film-forming component, the main component is a polymer, oligomer, monomer, or the like having a radical polymerizable dipolymer bond in its structure, and if necessary, a non-reactive polymer,
It contains an organic solvent, a wax, and other additives such as an antistatic agent. Specifically, a film forming component having an acrylate-based functional group, for example, a relatively low-molecular-weight polyester resin, polyether resin, acrylic resin, epoxy resin, urethane resin, alkyd resin,
Spiroacetal resins, polybutadiene resins, polythiol polyene resins, oligomers or prepolymers such as (meth) acrylates of polyfunctional compounds such as polyhydric alcohols, and ethyl (meth) acrylate as a reactive diluent;
Monofunctional monomers such as ethylhexyl (meth) acrylate, styrene, methylstyrene, N-vinyl hololidone and polyfunctional monomers, for example, trimethylolpropane tri (meth) acrylate, hexanediol di (meth) acrylate, tripropylene glycol di (Meth) acrylate, diethylene glycol di (meth) acrylate, pentaerythritol tri (meth)
Acrylate, dipentaerythritol hexa (meth)
It contains a relatively large amount of acrylate, neopentyl glycol di (meth) acrylate, and the like.

上記のような多官能(メタ)アクリレート系の電離放
射線硬化性塗料を使用することによって、最終的には、
表面硬度、透明性、耐摩耗性、耐擦傷性等に優れた硬化
樹脂層を形成できる。更にこのような硬化樹脂層が高い
可撓性や耐収縮性が要求される場合には上記の硬化性塗
料中に適当量の熱可塑性樹脂、例えば、非反応性のアク
リル樹脂や各種ワックス等を添加することによってそれ
らの要求に応えるたとができる。
By using a polyfunctional (meth) acrylate-based ionizing radiation-curable paint as described above, ultimately,
A cured resin layer having excellent surface hardness, transparency, abrasion resistance, scratch resistance and the like can be formed. Further, when such a cured resin layer is required to have high flexibility and shrink resistance, an appropriate amount of a thermoplastic resin, such as a non-reactive acrylic resin or various waxes, is used in the curable paint. The addition can meet those requirements.

また上記の硬化性塗料を紫外線硬化性塗料とするに
は、この中に光重合剤としてアセトフェノン類、ベンゾ
フェノン、ミヒラーベンゾイルヘッゾエート、α−アミ
ノキシムエステル、テトラメチルチウラムモノサルファ
イド、チオキサントン類等を、また光増感剤としてn−
ブチルアミン、トリエチルアミン、トリ−n−ブチルホ
スフィン等をそれぞれ混合して用いることができる。
In addition, in order to make the above-mentioned curable paint into an ultraviolet-curable paint, acetophenones, benzophenone, Michler benzoyl hezoate, α-aminoxime ester, tetramethylthiuram monosulfide, thioxanthone, etc. are used as photopolymerizing agents. And n- as a photosensitizer
Butylamine, triethylamine, tri-n-butylphosphine and the like can be used as a mixture.

研磨層3の厚さは用途に応じて適宜設定されるが、通
常、0.5〜500μm程度が好ましい。尚、研磨層には必要
に応じて帯電防止剤等を添加せしめることができる。
The thickness of the polishing layer 3 is appropriately set depending on the application, but is usually preferably about 0.5 to 500 μm. Incidentally, an antistatic agent or the like can be added to the polishing layer as needed.

次に、上記の如き構成からなる研磨テープを製造する
本発明製造方法について詳述する。
Next, the manufacturing method of the present invention for manufacturing the polishing tape having the above-described configuration will be described in detail.

本発明の製造方法では、先ず、第4図に示すように上
記フィルム基材2の少なくとも片面に研磨剤を含有した
研磨層形成用塗料5を塗布して塗工層6を形成する。こ
の塗布には、例えばブレードコート法、グラビアコート
法、ロッドコート法、ナイフコート法、リバースロール
コート法、スプレーコート法、オフセットグラビアコー
ト法、キスコート法等の塗布手段を採用する。
In the manufacturing method of the present invention, first, as shown in FIG. 4, at least one surface of the film substrate 2 is coated with a polishing layer forming paint 5 containing an abrasive to form a coating layer 6. For this coating, coating means such as blade coating, gravure coating, rod coating, knife coating, reverse roll coating, spray coating, offset gravure coating, and kiss coating are used.

次いで、上記塗工層6が未硬化状態にあるうちに、該
塗工層6上に別途準備する賦形用フィルム7を積層す
る。賦形用フィルム7は、上述した凹陥部4を賦形せし
めるための賦形用突起8が多数形成されたものであり、
賦形用突起8を塗工層6面に対峙させて重ね合わせ、必
要に応じて適度に加圧して積層する。賦形用フィルム7
の基材としてはポリ塩化ビニル、ポリエチレン、ポリプ
ロピレン等の合成樹脂からなるフィルム又はこれらの積
層フィルム、或いは紙等に上記合成樹脂等をコーティン
グした複合フィルム等を使用することができる。これら
のフィルムはそれ自体が塗工層7に対して離型性を有し
ないものである場合はその表面に離型処理を施すことが
できる。賦形用フィルム7の厚さは、凹陥部の深さ、塗
工層への押圧・剥離適性、フィルム強度等を考慮して設
定するが、12〜100μmが好ましい。
Next, while the coating layer 6 is in an uncured state, a shaping film 7 separately prepared is laminated on the coating layer 6. The shaping film 7 is formed with a large number of shaping projections 8 for shaping the recess 4 described above.
The shaping projections 8 are superposed so as to face the surface of the coating layer 6, and are appropriately pressed and laminated as needed. Shaping film 7
As the base material, a film made of a synthetic resin such as polyvinyl chloride, polyethylene, polypropylene, or the like, a laminated film thereof, a composite film in which paper or the like is coated with the above synthetic resin, or the like can be used. In the case where these films themselves do not have releasability from the coating layer 7, the surface thereof can be subjected to a release treatment. The thickness of the shaping film 7 is set in consideration of the depth of the concave portion, the suitability for pressing / peeling to the coating layer, the film strength, and the like, and is preferably 12 to 100 μm.

賦形用フィルム7の賦形用突起8の形成に当たっては
従来周知の方法を採用することができ、特に規則性を有
した突起パターンを任意に且つ安定して設けることがで
きる点でエンボス法が好ましい。この場合、賦形用突起
を付与したエンボスロールにより賦形用フィルム基材表
面にエンボスを行う。
In forming the shaping projections 8 of the shaping film 7, a conventionally well-known method can be employed. In particular, the embossing method is used in that a regular projection pattern can be arbitrarily and stably provided. preferable. In this case, the embossing is performed on the surface of the shaping film substrate by an embossing roll provided with shaping projections.

次いで、賦形用フィルム7を積層した状態で塗工層6
を硬化させるための硬化処理を行う。塗工層6が熱硬化
性塗料からなる場合は加熱処理を施して硬化せしめ、ま
た塗工層6が電離放射線硬化性塗料からなる場合は第5
図に示すように電離放射線線9を照射して硬化せしめ
る。電離放射線9の照射は賦形用フィルム7側若しくは
フィルム基材2側から行う。この電離放射線照射は、例
えば、塗工層が電子線硬化の場合にはコックロフトワル
トン型、バンデグラフ型、共振変圧型、絶縁コア変圧器
型、直線型、ダイナミトロン型、高周波型等の各種電子
線加速機から放出される50〜1000KeV、好ましくは100〜
300KeVのエネルギーを有する電子線等が使用され、紫外
線硬化の場合には超高圧水銀灯、低圧水銀灯、カーボン
アーク、キセノンアーク、メタルハライドランプ等の光
源から発する紫外線等が利用される。
Next, the coating layer 6 is formed in a state where the shaping film 7 is laminated.
Is subjected to a hardening treatment for hardening. When the coating layer 6 is made of a thermosetting paint, it is subjected to a heat treatment to be cured, and when the coating layer 6 is made of an ionizing radiation-curable paint, the fifth coating is applied.
As shown in the figure, it is cured by irradiation with an ionizing radiation ray 9. The irradiation with the ionizing radiation 9 is performed from the side of the shaping film 7 or the side of the film substrate 2. This ionizing radiation irradiation is performed, for example, when the coating layer is cured by an electron beam, various types of electron such as Cockloft-Walton type, Bande graph type, Resonant transformation type, Insulating core transformer type, Linear type, Dynamitron type, High frequency type, etc. 50 to 1000 KeV, preferably 100 to 100, emitted from the linear accelerator
An electron beam having an energy of 300 KeV is used, and in the case of ultraviolet curing, ultraviolet rays emitted from a light source such as an ultra-high pressure mercury lamp, a low pressure mercury lamp, a carbon arc, a xenon arc, and a metal halide lamp are used.

塗工層6を硬化させた後、賦形用フィルム7を剥離す
る(第6図)。この剥離によって賦形用フィルム7の賦
形用突起8に対応した形状が塗工層7表面に賦形され、
結果として、凹陥部4を有する研磨層3がフィルム基材
2上に形成された研磨テープ1が得られる。
After curing the coating layer 6, the shaping film 7 is peeled off (FIG. 6). By this peeling, a shape corresponding to the shaping projections 8 of the shaping film 7 is formed on the surface of the coating layer 7,
As a result, the polishing tape 1 in which the polishing layer 3 having the concave portion 4 is formed on the film substrate 2 is obtained.

また本発明製造方法は、上述のフィルム基材2に研磨
層形成用塗料5を塗布した後に賦形用フィルム7と積層
させる工程に代えて、まず研磨層形成用塗料5を賦形用
フィルム7の賦形用突起8面側に塗布し、しかる後、未
硬化状態にある塗工層6側を基材フィルム7に対峙させ
て積層させることが可能であり、これ以降は前記製造方
法と同様の塗工層の硬化工程、賦形用フィルムの剥離工
程を経て、凹陥部4を有する研磨層3がフィルム基材2
上に形成された研磨テープを得ることができる。
In the manufacturing method of the present invention, instead of the above-described step of applying the coating material 5 for forming a polishing layer on the film substrate 2 and then laminating the coating material 5 for forming a polishing layer on the film substrate 2, the coating material 5 for forming a polishing layer is first used. Can be applied to the surface of the shaping projections 8, and then the uncured coating layer 6 can be laminated with the coating layer 6 facing the base film 7. After the coating layer curing step and the shaping film peeling step, the polishing layer 3 having the recess 4 becomes the film substrate 2
A polishing tape formed thereon can be obtained.

次に、具体的実施例を挙げて本発明を更に詳細に説明
する。
Next, the present invention will be described in more detail with reference to specific examples.

実施例1 厚さ25μmのポリエステルフィルム(東レ製:T-60)
の片面に、ポリエステル系二液硬化型プライマーをグラ
ビアコート法にて乾燥時の厚さが0.3μmとなるように
塗布して離型処理を施した。この処理面に、白色溶融ア
ルミナを100重量%含有してなるポリエステルアクリレ
ート系電子線硬化性塗料をロールコート法にて湿潤時の
厚さが9μmとなるよう塗布した。
Example 1 Polyester film having a thickness of 25 μm (Toray T-60)
Was coated with a polyester-based two-component curable primer by a gravure coating method so as to have a dry thickness of 0.3 μm, and subjected to a release treatment. A polyester acrylate-based electron beam-curable paint containing 100% by weight of white fused alumina was applied to the treated surface by a roll coating method so that the wet thickness was 9 μm.

一方、厚さ25μmのポリエステルフィルム(東レ製:T
-60)の片面にECコート法にて厚さ20μmにポリプロピ
レンを積層せしめた積層フィルムのポリプロピレン層面
側に、凹部幅が10μm、版深(凹部深さ)が15μm、凹
部のピッチが30μmであり、且つ平面形状が亀甲形状で
断面形状が長方形の賦形用突起形成用パターンが規則正
しく配列させたエンボスロールを用いて熱エンボスを行
い、賦形用突起を形成せしめた賦形用フィルムを別途準
備した。
On the other hand, a 25 μm-thick polyester film (Toray: T
-60) On one side of the polypropylene film side of a laminated film obtained by laminating polypropylene to a thickness of 20 μm by EC coating method, the recess width is 10 μm, the plate depth (recess depth) is 15 μm, and the pitch of the recesses is 30 μm. The embossing roll is used, in which the shape of the shaping projections is rectangular and the cross-sectional shape is rectangular. did.

上記賦形用フィルムを、未硬化状態にある塗工層面に
重ね合わせ、ゴムロールと金属ロールからなるロール間
を通過させて押圧、積層せしめ、しかる後、カーテンビ
ーム型の電子線照射装置にて10×106radの電子線を照射
して塗工層を硬化させ、最後に賦形用フィルムを剥離す
ることにより、所定の凹陥部が形成される研磨層を有す
る研磨テープを得た。
The shaping film is superimposed on the coating layer surface in an uncured state, passed between rolls composed of a rubber roll and a metal roll, pressed and laminated, and thereafter, a curtain beam type electron beam irradiator is used. The coating layer was cured by irradiating an electron beam of × 10 6 rad, and finally, the shaping film was peeled off to obtain a polishing tape having a polishing layer in which a predetermined concave portion was formed.

得られた研磨テープは、研磨層に規則正しい所定の形
状を有した凹陥部が所望通り形成されており、この研磨
テープを用いて中心線0.5μmのステンレス(SUS-45C)
の研磨を行ったところ、中心平均粗さ0.1μmの研磨仕
上がりとなり、また研磨屑は上記凹陥部に収容され、研
磨屑による被研磨体表面への傷の発生はなかった。
In the obtained polishing tape, a concave portion having a regular predetermined shape is formed in the polishing layer as desired, and a stainless steel (SUS-45C) having a center line of 0.5 μm using this polishing tape is used.
As a result of the polishing, the polishing finished with a center average roughness of 0.1 μm, and the polishing dust was accommodated in the above-mentioned concave portion, and no scratch was generated on the surface of the body to be polished by the polishing dust.

一方、賦形用フィルムによる凹陥部を設けていない研
磨テープにより同じステンレスに対して研磨を行ったと
ころ、研磨効率が悪く、微小なキズが発生していること
が確認された。
On the other hand, when the same stainless steel was polished with a polishing tape having no concave portion formed by the shaping film, it was confirmed that polishing efficiency was poor and minute scratches were generated.

〔発明の効果〕〔The invention's effect〕

以上説明したように、本発明の研磨テープは研磨層に
特定の凹陥部が多数設けられたものであるため、研磨に
際して被研磨体から生成する研磨屑が該凹陥部に効率よ
く収容され、その結果、研磨テープと被研磨体の間に研
磨屑が介在することにより被研磨体の表面を傷つけるて
しまう虞れがなく、また研磨層の目詰りによって研磨能
力が低下することがなく、鏡面仕上げを要するような精
密な研磨をより確実に行うことができる。
As described above, since the polishing tape of the present invention is provided with a large number of specific concave portions in the polishing layer, polishing debris generated from the object to be polished at the time of polishing is efficiently stored in the concave portions. As a result, there is no risk of damaging the surface of the object to be polished due to the presence of polishing debris between the polishing tape and the object to be polished, and the polishing ability does not decrease due to clogging of the polishing layer. , Which can be performed more reliably.

また本発明の製造方法によれば、研磨層に所望通りの
凹陥部を形成した研磨テープを安定且つ簡便に製造し得
ることができ、特にエンボス法により形成した賦形用突
起を有する賦形用フィルムを使用することにより、同等
の凹陥部を有する研磨層を安定して量産することが可能
となり、しかも凹陥部の形状の選択が特定範囲内におい
て自由であり、研磨用途に応じた研磨テープを容易に得
ることができる顕著な効果がある。
Further, according to the manufacturing method of the present invention, a polishing tape having a desired concave portion formed in a polishing layer can be stably and easily manufactured, and in particular, a shaping tape having a shaping projection formed by an embossing method. By using a film, it is possible to stably mass-produce a polishing layer having an equivalent concave portion, and the shape of the concave portion can be freely selected within a specific range. There are significant effects that can be easily obtained.

更に、研磨層形成用塗料として電離放射線硬化性塗料
を使用すれば、凹陥部の賦形作業が迅速且つ正確に行う
ことができ、ひいては耐摩耗性等の物性に優れ、被研磨
品に対して傷が発生しにくい高精度研磨特性を有する研
磨層が得られる。
Furthermore, if an ionizing radiation-curable paint is used as the paint for forming the polishing layer, the shaping work of the concave portion can be performed quickly and accurately, and as a result, the physical properties such as abrasion resistance are excellent, and the polishing target is excellent. A polishing layer having high-precision polishing characteristics that does not easily cause scratches can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明によって製造される研磨テープの一例を
示す縦断面図、第2図は研磨層における凹陥部の一例を
示す一部拡大平面図、第3図は第2図のIII-III線に沿
う縦断面図、第4図〜第6図は本発明製造方法の各工程
を示す縦断面図である。 1……研磨テープ、2……フィルム基材 3……研磨層、4……凹陥部 5……研磨層形成用塗料 6……塗工層、7……賦形用フィルム 8……賦形用突起 a……凹陥部の開口幅 b……凹陥部の深さ c……凹陥部のピッチ
FIG. 1 is a longitudinal sectional view showing an example of a polishing tape manufactured according to the present invention, FIG. 2 is a partially enlarged plan view showing an example of a concave portion in a polishing layer, and FIG. FIG. 4 to FIG. 6 are vertical cross-sectional views taken along the line, showing the respective steps of the manufacturing method of the present invention. DESCRIPTION OF SYMBOLS 1 ... Polishing tape 2 ... Film base material 3 ... Polishing layer 4 ... Depressed portion 5 ... Paint for forming a polishing layer 6 ... Coating layer, 7 ... Film for shaping 8 ... Shaping Protrusion for a: opening width of recess b: depth of recess c: pitch of recess

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭62−255069(JP,A) 特開 昭57−168868(JP,A) 特開 昭63−16980(JP,A) 特開 昭63−216679(JP,A) 特開 昭62−28177(JP,A) 特開 昭63−156664(JP,A) 実開 昭62−144163(JP,U) 実開 昭63−17768(JP,U) (58)調査した分野(Int.Cl.6,DB名) B24D 11/00 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-255069 (JP, A) JP-A-57-168868 (JP, A) JP-A-63-16980 (JP, A) JP-A-63-1988 216679 (JP, A) JP-A-62-28177 (JP, A) JP-A-63-156664 (JP, A) JP-A-62-144163 (JP, U) JP-A-63-17768 (JP, U) (58) Field surveyed (Int. Cl. 6 , DB name) B24D 11/00

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】フィルム基材の少なくとも片面に研磨剤を
含有した研磨層形成用塗料を塗布した後、未硬化状態に
ある塗工層に、多数の凹陥部賦形用突起が付設された合
成樹脂フィルム又は紙に合成樹脂をコーティングした複
合フィルムからなる賦形用フィルムを該突起が塗工層と
対向する向きで積層し、次いで、塗工層を硬化せしめた
後、該賦形用フィルムを剥離することを特徴とする研磨
テープの製造方法。
1. A synthetic method in which a coating material for forming a polishing layer containing an abrasive is applied to at least one surface of a film base material, and a large number of recess-shaped shaping projections are provided on an uncured coating layer. After laminating a shaping film consisting of a resin film or a composite film in which paper is coated with a synthetic resin in a direction in which the protrusions face the coating layer, and then after curing the coating layer, the shaping film is removed. A method for producing a polishing tape, comprising peeling off.
【請求項2】多数の凹陥部賦形用突起が付設された合成
樹脂フィルム又は紙に合成樹脂をコーティングした複合
フィルムからなる賦形用フィルムの該突起面側に研磨剤
を含有した研磨層形成用塗料を塗布した後、未硬化状態
にある塗工層側をフィルム基材と対峙させて積層し、次
いで塗工層を硬化せしめた後、該賦形用フィルムを剥離
することを特徴とする研磨テープの製造方法。
2. A formation of a polishing layer containing an abrasive on the projection side of a shaping film made of a synthetic resin film provided with a number of recessed shaping protrusions or a composite film obtained by coating paper with a synthetic resin. After applying the coating material, the coating layer side in the uncured state is laminated facing the film substrate, and then, after the coating layer is cured, the shaping film is peeled off. Manufacturing method of polishing tape.
【請求項3】研磨層形成用塗料として電離線硬化性塗料
を使用し、電離放射線を照射して塗工層を硬化させる請
求項1又は2記載の研磨テープの製造方法。
3. The method for producing a polishing tape according to claim 1, wherein an ionizing radiation-curable coating is used as the coating for forming the polishing layer, and the coating layer is cured by irradiating with ionizing radiation.
【請求項4】賦形用フィルムの賦形用突起をエンボス法
にて形成してなる請求項1、2又は3記載の研磨テープ
の製造方法。
4. The method for producing a polishing tape according to claim 1, wherein the shaping projections of the shaping film are formed by an embossing method.
JP23594288A 1988-09-20 1988-09-20 Manufacturing method of polishing tape Expired - Lifetime JP2868772B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23594288A JP2868772B2 (en) 1988-09-20 1988-09-20 Manufacturing method of polishing tape

Publications (2)

Publication Number Publication Date
JPH0283172A JPH0283172A (en) 1990-03-23
JP2868772B2 true JP2868772B2 (en) 1999-03-10

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ID=16993509

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Publication number Priority date Publication date Assignee Title
WO2007041538A1 (en) * 2005-10-05 2007-04-12 3M Innovative Properties Company Method of making a structured abrasive article
US7491251B2 (en) 2005-10-05 2009-02-17 3M Innovative Properties Company Method of making a structured abrasive article
CN101277789B (en) * 2005-10-05 2012-01-18 3M创新有限公司 Method of making a structured abrasive article

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