CN103328158A - Abrasive article with replicated microstructured backing and method of using same - Google Patents
Abrasive article with replicated microstructured backing and method of using same Download PDFInfo
- Publication number
- CN103328158A CN103328158A CN2012800056627A CN201280005662A CN103328158A CN 103328158 A CN103328158 A CN 103328158A CN 2012800056627 A CN2012800056627 A CN 2012800056627A CN 201280005662 A CN201280005662 A CN 201280005662A CN 103328158 A CN103328158 A CN 103328158A
- Authority
- CN
- China
- Prior art keywords
- abrasive
- micro
- structural
- copies
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
- B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/02—Backings, e.g. foils, webs, mesh fabrics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
Abstract
An abrasive article is provided that includes a flexible backing having opposed first and second major surfaces. The first major surface includes a plurality of abrasive particles in at least one binder disposed thereon. The second major surface includes replicated microstructures having recesses. The abrasive article also includes adhesive contained substantially in the recesses of the replicated microstructures. A rigid substrate can be in contact with at least a portion of the replicated microstructures. Also provide is a method of polishing a work-piece that uses the provided articles.
Description
Technical field
The present invention relates to can be used for polishing the abrasive product of composite.
Background technology
As being used for the first-class workpiece of read/write of hard disk drive (HDD) industry, have stone Yu very soft composite, described composite forms by using abrasive product to grind simultaneously and polish usually.The very soft material that constitutes read/write transducers is positioned at the edge of stone material, for example aluminium oxide titanium dioxide carbide (AlTiC).Owing to need high pressure to remove hard AlTiC material, so apply the pressure up to 40 pounds/square inch (psi).If abrasive substrate has enough low modulus, the high capacity on the workpiece will cause the displacement of abrasive surface so.This can cause abrasive material to be deposited on the edge of workpiece.The excessive abrasive material at edge of work place can cause that the edge accelerates to remove or to be commonly called the phenomenon of " convexity " or " edge collapse limit ".This convexity effect can be damaged the sensor that is positioned at edge of work place.Multilayer abrasive product with conformal performance contact adhesive may aggravate the convexity of read/write head.
Fig. 1 is the diagram of the typical prior art systems of abrasive product 10, described abrasive product 10 has the abrasive particle 12 (formation abrasive material) in the binding agent 13 that is scattered on the first first type surface 18a of flexible backing 18, has the adhesive phase 14 on the second first type surface 18b that is coated in abrasive product.This adhesive phase, for example pressure sensitive adhesive layer is fixed to abrasive product on the non-yielding prop thing 22.During each component in abrasive product 10 relatively, adhesive phase is than flexible backing and abrasive particle softer (that is, having lower Young's modulus).
As depicted in figs. 1 and 2, in use, workpiece 20 is exposed to abrasive material (this abrasive material comprises abrasive particle 18a and binding agent 13) under load P usually.In this case, this workpiece and be applied to load above it and make 14 distortion of softer relatively adhesive phase.The profile of flexible substrates 18 and abrasive material 13 is tending towards following the distortion of adhesive phase and deforms, thereby the edge that causes workpiece becomes circle or convexity.In addition, the heavily stressed edge of work that also may cause of workpiece 20 edges becomes circle.
Summary of the invention
Need find the method for the convexity problem that can solve on the polished workpiece, especially for the workpiece that can be used for the sensitive electrical devices industry, for example be used for the read/write head self of hard disk drive or thin hard disk drive.Abrasive product in this paper and method have long service life, are easy to remove material from workpiece, can be polished to best bright finish and the high benefit that removes rate.In addition, the convexity of their opposing edges of work, and generate more desirable product.
In one aspect, provide a kind of abrasive product, described abrasive product comprises: flexible backing, and described flexible backing has the first relative first type surface and second first type surface; Abrasive material, described abrasive material comprises a plurality of abrasive particles that are retained at least a binding agent, described abrasive material is arranged on described first first type surface of described flexible backing, and at least a portion of described second first type surface of wherein said flexible backing comprises the micro-structural that copies with depressed part; And adhesive, wherein said adhesive is substantially included in the depressed part of the micro-structural that copies.Described goods also comprise the stiff base that contacts with at least a portion of the micro-structural that copies or the release liner that contacts with at least a portion of adhesive.Described flexible backing can have greater than about 0.5 gigapascal (GPa) or even greater than the Young's modulus of 2GPa, and can comprise clavate, triangle, pyramid, truncated pyramid, taper, truncated cone shape, spherical or spheroidal and other possible shapes.
On the other hand, provide a kind of method of polishing, described method comprises provides workpiece; Described workpiece is contacted with abrasive product, and described abrasive product comprises: flexible backing, and described flexible backing has the first relative first type surface and second first type surface; Abrasive material, described abrasive material comprises a plurality of abrasive particles that are retained at least a binding agent, described abrasive material is arranged on described first first type surface of described flexible backing, and at least a portion of described second first type surface of wherein said flexible backing comprises the micro-structural that copies with depressed part; Adhesive; And the stiff base that contacts with at least a portion of the described micro-structural that copies, wherein said adhesive is substantially included in the depressed part of the micro-structural that copies; And move abrasive product with respect to described workpiece.Described abrasive product moves with respect to described workpiece, thereby the surface of described workpiece is polished.Usually, load is applied on the described workpiece.
The abrasive product that provides and method can be used for polishing by very level and smooth and smooth workpiece on whole dimension.The flexible backing that comprises the micro-structural that copies allow to be applied on the workpiece load on polishing during supported by stiff base.The described micro-structural that copies has been born the load of part, stiff base is transferred at least a portion load, thereby reduced or eliminated deformation of binder.Described adhesive is substantially included in the depressed part of the micro-structural that copies, and the micro-structural that allows to copy directly contacts with stiff base.The abrasive product that provides and method make the finished product workpiece have high flatness, for abrasive product provides the long life, is easy to apply, is easy to remove, best bright finish and the high benefit that removes rate, are better than reducing the technology of convexity then.
Above summary of the invention is not each disclosed embodiment that intention is described every kind of embodiment of the present invention.Description of drawings and the specific embodiment subsequently more specifically illustrate exemplary embodiment.
Description of drawings
The present invention can further describe by reference to the accompanying drawings, in the accompanying drawings:
Fig. 1 is the schematic cross-section of prior art slurry system;
Fig. 2 is the schematic cross-section of the prior art slurry system of Fig. 1, wherein applies load to workpiece;
The schematic cross-section of an a kind of embodiment of the abrasive product that provides is provided Fig. 3, the part of the second surface that the wherein said micro-structural that copies is described flexible backing and comprise pyramid or the pyramid ridge;
The schematic cross-section of an a kind of embodiment of the abrasive product that provides is provided Fig. 4, and the wherein said micro-structural that copies structurally is attached to the second surface of described flexible backing and comprises pyramid or the pyramid ridge;
The schematic cross-section of a kind of another embodiment of the abrasive product that provides is provided Fig. 5, and the wherein said micro-structural that copies comprises truncated pyramid or pyramid ridge; And
The schematic cross-section of a kind of another embodiment of the abrasive product that provides is provided Fig. 6, and the wherein said micro-structural that copies comprises square ridge.
The sectional view on the volume surface (roll surface) of the micro-structural that uses in an exemplary embodiment of the described abrasive product that provides is provided Fig. 7.
Fig. 8 is sectional view or the reel transverse view (cross-web view) of a kind of exemplary backing micro-structural of the volume surface preparation of the micro-structural among use Fig. 7.
The specific embodiment
In the following description, with reference to the accompanying drawing of a part that forms this explanation, and wherein show some specific embodiments with diagramatic way.Should be appreciated that do not depart from the scope of the present invention or the prerequisite of spirit under, it is contemplated that out other embodiment and implement.Therefore, the following specific embodiment does not have restrictive, sense.
Except as otherwise noted, the numerical value of employed all expression characteristic sizes, amount and physical characteristic all should be understood to by term " about " and modifies otherwise in specification and claims.Therefore, unless opposite explanation is arranged, otherwise the numerical parameter of listing in above-mentioned specification and appended claims is approximation, and these approximations can change according to the desirable properties that those skilled in the art uses instruction content disclosed herein to seek to obtain.The number range of representing by end value comprise all numerals in this scope (as, 1 to 5 comprises 1,1.5,2,2.75,3,3.80,4 and 5) and this scope in any scope.
Flexible backing
The described abrasive product that provides and method comprise flexible backing, and described flexible backing has the first relative first type surface and second first type surface.The suitable flexible backing that can use in the abrasive product that provides is usually known those in the abrasive material field.They comprise: polymer-type substrate, for example polyester, Merlon, polypropylene, polyethylene, cellulose, polyamide, polyimides, polysiloxanes and polytetrafluoroethylene (PTFE); Metal forming comprises aluminium, copper, tin and bronze; And paper, comprise fine and close brown paper and the paper of polymer-coated.
The material of flexible backing is included in the micro-structural that copies at least a portion of its second first type surface.In certain embodiments, can select to comprise the independent backing of the micro-structural that copies, thereby obtain presenting the abrasive material structure that uniform material removes in whole work-piece, that is, and good homogeneous degree and the flatness that comprises flatness.Importantly flexible backing and the material behavior that is included in the microstructure features that copies above it have allow workpiece the surface on its whole dimension, especially in the level and smooth material behavior of the edge of workpiece.
Abrasive material
The abrasive product that provides comprises abrasive material, described abrasive material comprises a plurality of abrasive particles that are retained at least a binding agent, described abrasive material is arranged on first first type surface of flexible backing, and wherein at least a portion of second first type surface of flexible backing comprises the micro-structural that copies with depressed part.Suitable abrasive particle in the goods that can be used for providing and the method comprises aloxite (AI, through heat treated aluminium oxide, white aloxite (AI, black silicon carbide, green silicon carbide, titanium diboride, boron carbide, tungsten carbide, titanium carbide, diamond (natural and synthetic, comprise polycrystalline diamond), silica, iron oxide, chromium oxide, ceria, zirconia, titanium dioxide, silicate, tin oxide, cubic boron nitride, garnet, aloxite (AI-zirconia, collosol and gel abrasive particle etc.The example of collosol and gel abrasive particle is found in U.S. Patent number 4,314,827 (people such as Leitheiser); 4,623,364 (people such as Cottringer); 4,744,802 (Schwabel); Among 4,770,671 (people such as Monroe) and 4,881,951 (people such as Wood).
Among the present invention, the term abrasive particle also comprises combining with polymer, pottery, metal or glass and forms the single abrasive particle of abrasive material aggregate grain.Term abrasive material aggregate includes but not limited to make the non-densifying abrasive material/silica aggregate of the densified abrasive material of silica/silica aggregate by annealing steps at high temperature, and it can have or not have silica.The abrasive material aggregate is at U.S. Patent number 4,311,489 (Kressner), 4,652,275 (people such as Bloecher), 4,799,939 (people such as Bloecher), 5,500,273 (people such as Holmes), 6,645,624 (people such as Adefris), 7, further describe among 044,835 (people such as Mujumdar).Perhaps, abrasive particle can pass through that gravitation combines between particle that U.S. Patent number 5,201,916 people such as () Berg describes.Typical abrasive material aggregate comprise have diamond as abrasive particle and silica as the aggregate in conjunction with component.When adopting aggregate, the scope that is included in the size of the single abrasive particle in the aggregate can be 0.1 to 50 micron (μ m) (0.0039 to 2.0 mil), preferred 0.2 to 20 micron (μ m) (0.0079 to 0.79 mil), most preferably 0.5 to 5 micron (μ m) (0.020 to 0.20 mil).
The particle mean size of abrasive particle can be less than 150 μ m (5.9 mil), usually less than 100 μ m (3.9 mil), or even less than 50 μ m (2.0 mil).The granularity of abrasive particle is often referred to its longest dimension.Usually, particle diameter has a distribution.In some cases, can distribute to particle diameter and carry out strictness control, so that the abrasive product that obtains provides consistent surface smoothness to polished workpiece.
And the abrasive particle of another kind of available types is the abrasive particle based on metal, it has the containing metal matrix that is essentially globoid, described matrix has periphery and superabrasive, and this superabrasive has less than 50 μ m, preferably the average diameter less than 8 μ m also is embedded in the periphery of containing metal matrix at least in part.These abrasive particles can be made by add containing metal matrix (mainly being globoid), super abrasive particle and grinding media in container.Subsequently described container is rolled a period of time, normally at room temperature.Though be not subjected to the constraint of any theory, it is believed that process of lapping forces superabrasive to be penetrated into, to be attached in the containing metal matrix, and from containing metal matrix, stretch out.The periphery of containing metal matrix becomes the composite of superabrasive and metal or metal alloy from simple metal or metal alloy.Lower surface near peripheral containing metal matrix also comprises superabrasive, and this superabrasive will be counted as and be embedded in the containing metal matrix.This abrasive particle based on metal is disclosed in the U.S. patent application case publication No. 2010/0000160 (people such as Lugg) of assignee's common pending trial.
Abrasive particle can be coated with and make described particle have the material of desirable characteristics.For instance, show that the material that is coated to the abrasive particle surface can strengthen the bonding force between abrasive particle and the binding agent.In addition, the material that is coated to the abrasive particle surface can strengthen the bonding of abrasive particle when using softening granular curable adhesive material as binding agent.Perhaps, face coat can change and improve the cutting characteristic of gained abrasive particle.This class face coat is at for example U.S. Patent number 5,011,508 (people such as Wald), 3,041,156 (people such as Rowse), 5,009,675 (people such as Kunz), 4,997,461 (people such as Markhoff-Matheny), 5,213,591 (people such as Celikkaya), 5,085,671 (people such as Martin) and 5, describe to some extent among 042,991 people such as () Kunz.
The abrasive product that provides and method can comprise conventional coated abrasives, coating (primer coating, multiple gel coating and super multiple gel coating) and material.The exemplary coating abrasive product is at U.S. Patent number 5,378, describes to some extent in 252 (Follensbee), U.S. Patent number 5,834,109 people such as () Follett and the U.S. Patent number 6,979,713 (Barber).The abrasive product that provides and method can comprise shaping or structurized abrasive coating.Shaping or structuring mean described abrasive coating and have bossing and sunk part.Comprise and being shaped or the exemplary abrasive product of structurized abrasive coating can (3M Company, St.Paul MN) buys from the 3M company of Saint Paul City, State of Minnesota, US according to trade name TRIZACT.They are generally at U.S. Patent number 5,152, describe to some extent among 917 people such as () Pieper.In the abrasive product that provides and method, can be used as other grinding-materials of abrasive product also at U.S. Patent number 5,489, describe to some extent among 235 people such as () Gagliardi.
Described abrasive particle can be partially embedded among first apparent surface of flexible backing and can be by described flexible backing fixing in position.Described abrasive product also can be attached to by the combination of thermal, ultra-sonic welded or microwave activation on the flexible backing.Perhaps, binding agent can be used for abrasive particle is secured to the first surface of flexible backing.The available binding agent and the adhesive that are used for abrasive particle is secured on the first surface of flexible backing are that one of ordinary skill in the art are known.
Suitable binder precursor is in uncured or the non-crosslinked state usually, in environmental condition or near flowing under the environmental condition.Subsequently, usually this binder precursor is exposed under the condition (being generally energy source) of at least part of curing or crosslinked (that is, radical polymerization) this binder precursor, is translated into the binding agent of the abrasive particle that can keep dispersion thus.Exemplary source of energy comprises: electron beam, ultraviolet radiation, visible radiation, infrared radiation, γ radiation, heat and their combination.
Available poly-(methyl) acrylate comprises monomer and/or has at least two oligomer that (methyl) is acrylate-based, for example three (methyl) acrylate and four (methacrylates).Exemplary poly-(methacrylate) comprising: two (methyl) acrylate, for example 1,3-butanediol two (methyl) acrylate, 1,4-butanediol two (methyl) acrylate, 1,6-hexylene glycol two (methyl) acrylate, 1,6-hexylene glycol list (methyl) acrylate, ethylene glycol bisthioglycolate (methyl) acrylate, oxyalkylated aliphatic two (methyl) acrylate, oxyalkylated cyclohexanedimethanol two (methyl) acrylate, oxyalkylated hexylene glycol two (methyl) acrylate, oxyalkylated neopentyl glycol two (methyl) acrylate, neopentyl glycol 3-hydroxypivalic acid ester two (methyl) acrylate of caprolactone modification, neopentyl glycol 3-hydroxypivalic acid ester two (methyl) acrylate of caprolactone modification, cyclohexanedimethanol two (methyl) acrylate, diethylene glycol two (methyl) acrylate, DPG two (methyl) acrylate, (10) bisphenol-A two (methyl) acrylate of ethoxylation, (3) bisphenol-A two (methyl) acrylate of ethoxylation, (30) bisphenol-A two (methyl) acrylate of ethoxylation, (4) bisphenol-A two (methyl) acrylate of ethoxylation, trimethylolpropane two (methyl) acrylate of the special valeral modification of hydroxyl, neopentyl glycol two (methyl) acrylate, polyethylene glycol (200) two (methyl) acrylate, polyethylene glycol (400) two (methyl) acrylate, polyethylene glycol (600) two (methyl) acrylate, propenoxylated neopentyl glycol two (methyl) acrylate, TEG two (methyl) acrylate, tristane dimethanol two (methyl) acrylate, triethylene glycol two (methyl) acrylate, tripropylene glycol two (methyl) acrylate; Three (methyl) (methyl) acrylate, for example glycerine three (methyl) acrylate, trimethylolpropane tris (methyl) acrylate, three (methyl) acrylate of ethoxylation ((3) trimethylolpropane tris (methyl) acrylate of ethoxylation for example, (6) trimethylolpropane tris (methyl) acrylate of ethoxylation, (9) trimethylolpropane tris (methyl) acrylate of ethoxylation, (20) trimethylolpropane tris (methyl) acrylate of ethoxylation), pentaerythrite three (methyl) acrylate, propenoxylated three (methyl) acrylate (propenoxylated (3) glyceryl three (methyl) acrylate for example, propenoxylated (5.5) glyceryl three (methyl) acrylate, propenoxylated (3) trimethylolpropane tris (methyl) acrylate, propenoxylated (6) trimethylolpropane tris (methyl) acrylate), trimethylolpropane tris (methyl) acrylate, three (2-ethoxy) isocyanuric acid ester three (methyl) acrylate; And the compound that comprises higher functionality (methyl) acryloyl group: dipentaerythritol six (methyl) acrylic acid of (4) pentaerythrite four (methyl) acrylate of double trimethylolpropane four (methyl) acrylate, dipentaerythritol five (methyl) acrylate, ethoxylation, pentaerythrite four (methyl) acrylate, caprolactone modification for example; Oligomeric (methyl) acryl compound, for example polyester (methyl) acrylate, epoxy radicals (methyl) acrylate; And their combination.This compounds can obtain from several suppliers, (the Sartomer Co.of Exton of Sartomer company that pauses of Pennsylvania's Aix-en-Provence for example, PA), the UCB chemical company of Georgia State Shi Maina (UCB Chemicals Corporation of Smyrna, GA) and the aldrich chemical company of Milwaukee, the state of Wisconsin (Aldrich Chemical Company of Milwaukee, WI).
Described binder precursor can comprise at least a light trigger of effective dose, for example the amount for from 0.1,1 or 3 weight % to 5,7 or even 10 weight %, perhaps more.Available light trigger comprises those that become known for radical photoinitiator curing (methyl) acrylate.Exemplary light trigger comprises benzoin and its derivative, for example Alpha-Methyl benzoin; α-phenyl benzoin; α-allyl benzene acyloin; α-benzyl benzoin; Benzoin ether, for example the benzil dimethyl ketal (for example derives from the different chemical company of vapour Bart (the Ciba Specialty Chemicals of New York, United States Ta Lidun with trade name IRGACURE 651, Tarrytown, NY)), benzoin methylether, benzoin ethyl ether, benzoin n-butylether; Acetophenone and its derivative, for example 2-hydroxy-2-methyl-1-phenyl-1-acetone (deriving from the different chemical company of vapour Bart with trade name DAROCUR 1173) and 1-hydroxycyclohexylphenylketone (deriving from the different chemical company of vapour Bart with trade name IRGACURE 184); 2-methyl isophthalic acid-[4-(methyl mercapto) phenyl]-2-(4-morpholinyl)-1-acetone (deriving from the different chemical company of vapour Bart with trade name IRGACURE 907); 2-benzyl-2-(dimethylamino)-1-[4-(4-morpholinyl) phenyl]-1-butanone (deriving from the different chemical company of vapour Bart with trade name IRGACURE 369); And phenyl two (2,4,6-, three Yue base benzoyl) phosphine oxide (deriving from the different chemical company of vapour Bart with trade name IRGACURE 819).That other available light triggers comprise is single-and two-acylphosphanes (for example deriving from the different chemical company of vapour Bart with IRGACURE 1700, IRGACURE 1800, IRGACURE 1850 and DAROCUR 4265).
Described binder precursor can comprise at least a thermal initiator of effective dose, for example the amount for from 0.1,1 or 3 weight % to 5,7 or even 10 weight %, perhaps more.The exemplary hot radical initiator comprises: azo-compound, for example 2,2-azo-two isobutyronitriles, 2,2 '-two (isobutyric acid) dimethyl esters of azo, azo two (diphenyl methane), 4,4 '-azo is two-and (4-cyanopentanoic acid), (2,2 '-azo is two, and (2,4-methyl pentane nitrile (derives from the E.I.Du Pont Company (E.I.du Pont de Nemours and Co.of Wilmington, DE)) of Wilmington, the Delaware State with VAZO 52; Peroxide, for example benzoyl peroxide, dicumyl peroxide, tert-butyl peroxide, cyclohexanone peroxide, peroxidating glutaric acid and peroxidating dilauryl; Hydrogen peroxide; Hydroperoxides, for example t-butyl hydroperoxide and cumene hydroperoxide; Peracid, for example peracetic acid and benzylhydroperoxide; Potassium peroxydisulfate; And perester, for example percarbonic acid diisopropyl ester.
In certain embodiments, be desirably in and comprise in the binder precursor that one or more monoene are the compound of undersaturated free redical polymerization, for example with the viscosity in the binding agent that reduces gained and/or reduce crosslink density.Exemplary monoene is that the compound of undersaturated free redical polymerization comprises: single (methyl) acrylate comprises (methyl) Hexyl 2-propenoate, 2-EHA, (methyl) acrylic acid ester in the different ninth of the ten Heavenly Stems, (methyl) isobornyl acrylate, (methyl) phenoxyethyl acrylate, (methyl) acrylic acid 2-hydroxy methacrylate, (methyl) acrylic acid dodecane ester, (methyl) methyl acrylate, (methyl) ethyl acrylate, (methyl) acrylic acid n-propyl, (methyl) n-butyl acrylate, (methyl) acrylic acid n-octyl, (methyl) isobutyl acrylate, (methyl) cyclohexyl acrylate or (methyl) acrylic acid octadecane ester; N-vinyl compound, for example N-vinyl formamide, N-vinyl pyrrolidone or N-caprolactam; And their combination.
In certain embodiments, described abrasive material can also comprise one or more additives.Described additive can comprise one or more antioxidants, colouring agent, heat and/or light stabilizer, perhaps filler (described filler is in fact to not influence of nonferromagnetic substance).Therefore, can be by comprising binder precursor (for example with slurry form) the preparation binding agent that abrasive particle, surfactant and abrasive particle are dispersed in additive wherein.
Micro-structural
The abrasive product that provides comprises flexible backing, and described flexible backing has the first relative first type surface and second first type surface.At least a portion of second first type surface of flexible backing comprises the micro-structural that copies with depressed part.The described micro-structural that copies and flexible backing are in aggregates.The part that the micro-structural that copies is flexible backing (for example second surface of flexible backing) that means in aggregates.The described micro-structural that copies can be extended from general-purpose base (being flexible backing), is arranged on the independent backing, and their combination, thereby form projection (far-end of the micro-structural that copies) and depression.In certain embodiments, the described micro-structural that copies can be the extension of flexible back lining materials, as the micro-structural that for example ought copy be form simultaneously with flexible substrates, molded or impression or directly under the situation that flexible substrates forms.
In certain embodiments, the described micro-structural that copies forms depressed part in the second surface of flexible backing, that is, as the result of veining such as for example impression technology, they form texturizing surfaces at flexible backing.Presented available flexible backing hereinbefore, and comprised: polyester, Merlon, polypropylene, polyethylene, cellulose, polyamide, polyimides, polysiloxanes and polytetrafluoroethylene (PTFE); Metal forming comprises aluminium, copper, tin and bronze; And paper, comprise fine and close brown paper and the paper of polymer-coated.
Perhaps, the described micro-structural that copies can be arranged on or be formed in the independent backing.Described independent backing can be flexible or rigidity.Described independent backing can structurally be attached on second side of flexible backing subsequently.Can use any independent backing, yet described independent backing can not change the whole modulus of flexible backing significantly, especially near the top surface that can form grinding element.When using independent backing, the micro-structural that copies on second backing can be used multiple mechanism, for example comprise adhesive composition (for example construction adhesive), ultra-sonic welded, add thermal weld, machanical fastener and their combination, structurally be attached on the flexible backing.
The described micro-structural that copies can have definite shape.The example of this type of shape comprises clavate, triangle, pyramid, truncated pyramid, taper, truncated cone shape, three-dimensional dihedral, cube shaped, spherical or spheroidal.The described micro-structural that copies can have the elongated shape that forms ridge.In certain embodiments, described ridge has the cross section of triangle or section triangle (triangle with smooth top).In other embodiments, described ridge can have rectangle, square or trapezoidal cross section.Alternatively, the described micro-structural that copies can be shape at random.Because the described micro-structural that copies is duplicate, therefore the two-dimensional cross sectional of the 3D shape of the described micro-structural that copies or the described micro-structural that copies has the sidewall that plane with respect to second first type surface of flexible backing is about 90 ° or higher angle usually.In other words, the shape of the described micro-structural that copies does not comprise usually and can't remove the bottom cutting portion of preserving the described features of microstructures that copies simultaneously from mould easily.
As defined herein, " micro-structural that copies " is the micro-structural that can form by the technology that copies or repeat.These technologies comprise that one of ordinary skill in the art are known for replicating microstructured duplication process, for example impression, injection molding, casting and curing, hot briquetting or serigraphy.
Can form the described micro-structural that copies according to several different methods, comprise for example molded, extrude, impress and their combination.The available method that forms micro-structured component is at for example U.S. Patent number 5,897,930 people such as () Calhoun; 5,183,597 (Lu); 4,588,258 (Hoopman); 4,576,850 (Martens); And describe to some extent in 4,374,077 (Kerfeld).Other available methods for the manufacture of the micro-structural that copies are included in U.S. Patent number 5,958, the universal method of the three-dimensional abrasive product of disclosed manufacturing among 794 (people such as Bruxvoort).The described micro-structural that copies also can be by multiple additive method manufacturing.For example, the described micro-structural that copies can by the casting and curing process from described master tool, transfer on other media (for example band of polymeric material or net), with formation the tool of production.The described tool of production can use any above-mentioned clone method subsequently, for the manufacture of the little replicated architecture thing that comprises the micro-structural that copies.Can use as additive methods such as electroforming and copy this master tool.
Another alternative method of the micro-structural that manufacturing copies is that direct second first type surface to flexible back lining materials cuts or process to form the described micro-structural that copies.For this purpose can be utilized as chemical etching, laser ablation, bead-blast or other technology such as surface modification technology at random.It is envisaged for when micro-structural is second first type surface of the directly flexible backing of incision, if this technology is under the control of the computer system of some types, automatically repeatedly guide cutting tool, ablative laser for example, produce the multiple flexible backing with the micro-structural that copies, so they are regarded as " micro-structural that copies ".Extra disclosing for the manufacture of the flexible backing with the micro-structural that copies is found in for example U.S. Patent Application Publication No. 2010/0277802 (people such as Gardiner).
Adhesive
The abrasive product that provides and method comprise a kind of adhesive that viscosity is provided between flexible backing and stiff base.In certain embodiments, described adhesive can contact with release liner.Can provide any adhesive of viscosity all to be applicable among the present invention.Described adhesive is to be included in the depressed part of the micro-structural that copies basically." consist essentially of " and mean binder constitutes according to the essence volume of the depressed part in the micro-structural that copies on the opposite second major surface of flexible backing.When having stiff base, the volume of depressed part is the volume that is defined by the wall of depressed part and stiff base.When not having stiff base, the volume of depressed part is by the wall of depressed part and passes the volume that the plane of the micro-structural far-end that copies is defined.In the goods that provide and method, adhesive can occupy about 15 volume % greater than the depressed part volume, greater than about 25 volume % of depressed part volume, perhaps even greater than about 35 volume % of depressed part volume.In certain embodiments, the volume of adhesive can be greater than the depressed part volume, and 110%, 120% or 130% of the volume of depressed part is no more than 150% of depressed part volume usually.In addition, described adhesive can just occupy the volume of depressed part, perhaps can occupy the depressed part volume less than about 85 volume %, less than about 75 volume %, perhaps even less than about 65 volume %.
In addition, " consist essentially of " and mean on the far-end or projection of the micro-structural that copies that adhesive is not present in second first type surface that forms flexible backing basically.Usually, when having stiff base, stiff base directly contacts with at least a portion of the micro-structural that copies.For the operation of the abrasive product that provides and method, importantly between flexible backing and non-yielding prop body, there be certain direct contact, thus during polishing or grinding, when workpiece is subjected to a fixed load, the load of carrying workpiece.This key character can be when using the abrasive product provide and method that workpiece is polished opposing or prevent convexity or the edge becomes the generation of circle.Usually, adhesive is not present on the far-end or projection of the micro-structural that copies of second first type surface that forms flexible backing basically.In certain embodiments, in fact on the far-end of the micro-structural that copies or projection, there is not adhesive.In other embodiments, the average magnitude of the adhesive that on the far-end of micro-structural or projection, can exist on thickness less than about 10 μ m, less than about 5 μ m, perhaps even less than about 3 μ m.Importantly the amount of the adhesive of Cun Zaiing will be less than the amount that can change overall mechanical properties and the overall modulus that keeps abrasive product.During polishing, need be supported from the load that is applied on the abrasive product of workpiece, up to the non-yielding prop thing, thereby avoid convexity.
The available adhesive that is used for abrasive product is fastened on the stiff base is that one of ordinary skill in the art are known.The adhesive that is fit to comprises contact adhesive (PAS), hotmelt and can solidify and/or vitrified liquid adhesive by usual measure, comprise radiation-curable, for example light curable, that UV is curable, electron beam curable, γ is curable; Heat solidifiable, moisture curable etc.Hotmelt is flowable those adhesives in heating back under the temperature of the glass transition temperature that is higher than adhesive and/or melting transition temperature.After being cooled under the described transition temperature, hotmelt will solidify.Some hotmelts can flow after heating and solidify because of the further curing of adhesive then.
Available adhesive comprises for example contact adhesive, hotmelt and glue.Suitable contact adhesive comprises multiple contact adhesive, comprise for example natural rubber based adhesive, (methyl) acrylate polymer and copolymer, the AB of thermoplastic elastomer or ABA block copolymer, for example can be according to trade name KRATON ((the Shell Chemical Co. of the shell chemical company of Houston, Texas, Houston, Tex.)) phenylethylene/butadiene or styrene/isoprene block copolymer or the polyolefin of buying.Suitable hotmelt comprises for example polyester, ethylene vinyl acetate (EVA), polyamide, epoxy resin and their combination.Described adhesive has enough bonding strengths usually and peels off resistance, with the component fixing relation to each other that keeps abrasive product during use, and can resist chemical degradation under service condition.Exemplary adhesive comprises epoxy resin, for example those that can buy from the 3M company in Sao Paulo, Minnesota State city according to trade name SCOTCH-WELD, for example 3M SCOTCH-WELD epobond epoxyn 1838,2158,2216 and 3501.
Stiff base
It is substrate from supporting at least that term " rigidity " has been described a kind of, that is, this substrate can be out of shape basically under himself weight.Rigidity does not represent that substrate is deflection anything but.Stiff base is applying under the load deformable or crooked but very low compression ratio is provided.In one embodiment, stiff base comprises that rigidity modulus is 1 * 10
6Pound/square inch (psi) (7 * 10
4Kg/cm
2) or bigger material.In another embodiment, stiff base comprises that rigidity modulus is 10 * 10
6Psi (7 * 10
5Kg/cm
2) or bigger material.
The suitable material that can be used as stiff base comprises metal, metal alloy, metal-matrix composite, metal plastic, unorganic glass and vitrified organic resin, the pottery of making and polymer substrate reinforced composite materials.Described stiff base can be a platen, above the abrasive product that provides during the substrate polishing can be installed in.
Suitable rigid base material for example comprises the compound of organic polymer, inorganic polymer, pottery, metal, organic polymer and their combination.Suitable organic polymer can be thermoplasticity or heat cured.Suitable thermoplastic comprises Merlon, polyester, polyurethane, polystyrene, polyolefin, poly-perfluoroolefine, polyvinyl chloride and their copolymer.Suitable thermosetting polymer comprises for example epoxy resin, polyimides, polyester, and their copolymer (polymer that namely comprises at least two kinds of different monomers comprises for example terpolymer and quadripolymer).
The polymer of stiff base can be strengthened.Enhancing can be the form of fiber or granular materials.The suitable material that can be used as reinforcing agent comprises organic or inorganic fiber for example (for example continuous or short); Silicate, for example mica or talcum powder; Based on the material of silica, for example sandstone and quartz; Metallic particles, glass, metal oxide and calcium carbonate and their combination.
Useful especially stiff base can also comprise poly-(ethylene glycol terephthalate), Merlon, glass reinforced epoxy plate, aluminium, steel, stainless steel.Sheet metal or plate also can be used as stiff base.Suitable metal comprises for example aluminium, stainless steel, copper, nickel and chromium.Also can use the metallic plate of multilayer, for example tin above the steel or tin above aluminium.
Can be by figure of the present disclosure and graphic goods and the method that provides that further specify be provided.The schematic cross-section of an a kind of embodiment of the abrasive product that provides is provided Fig. 3, wherein said micro-structural be described flexible backing second surface a part and comprise pyramid or the pyramid ridge.Fig. 3 is an embodiment of abrasive product 300, and described abrasive product comprises flexible backing 308.Abrasive material 302 (it comprises the abrasive particle that is retained in the binding agent) is arranged on first first type surface of flexible backing 308.On at least a portion of its second first type surface, flexible backing 308 comprises the micro-structural 306 with depressed part.Adhesive 305 is located substantially in the depressed part.In this embodiment, the cross section of micro-structural is V-shape, defines as depressed part.The workpiece 320 that comprises polished surface contacts with abrasive material 302, and moves with respect to abrasive product 300, so that workpiece 320 is polished.As shown in Figure 2, apply load P to workpiece 320.Load P is supported with direct contact of stiff base 312 by at least a portion of micro-structural 306, thereby make the minimizing deformation (if not eliminating) of adhesive phase, and reduce convexity or the change circle (if not eliminating) at the edge of workpiece 320.
The schematic cross-section of a kind of another embodiment of the abrasive product that provides is provided Fig. 4.Abrasive product 400 comprises flexible backing 408.Abrasive material 402 (it comprises the abrasive particle that is retained in the binding agent) is arranged on first first type surface of flexible backing 408.On at least a portion of its second first type surface, flexible backing 408 comprises the micro-structural that copies 406 with depressed part.Adhesive 405 is located substantially in the depressed part.The shape of described micro-structural is the same with the shape of the embodiment shown in Fig. 3.Yet, in the embodiment shown in fig. 4, the micro-structural 406 that copies be formed at that independent backing (not shown) is gone up and subsequently integrated bond to flexible backing 408.The workpiece 420 that comprises polished surface contacts with abrasive material 402, and it moves with respect to abrasive product 400, so that workpiece 420 is polished.As shown in Figure 2, apply load P to workpiece 420.Load P is supported with direct contact of stiff base 412 by at least a portion of the micro-structural 406 that copies, thereby make the minimizing deformation (if not eliminating) of adhesive phase, and reduce convexity or the change circle (if not eliminating) at the edge of workpiece 420.
The schematic cross-section of a kind of another embodiment of the abrasive product that provides is provided Fig. 5, and the wherein said micro-structural that copies comprises truncated pyramid or pyramid ridge.Fig. 5 is an embodiment of abrasive product 500, and it comprises flexible backing 508.Abrasive material 502 (it comprises the abrasive particle that is retained in the binding agent, and is not shown) is arranged on first first type surface of flexible backing 508.On at least a portion of its second first type surface, flexible backing 508 comprises the micro-structural that copies 506 with depressed part.Adhesive 505 is located substantially in the depressed part.In this embodiment, the cross section of the micro-structural that copies defines as depressed part for cutting flat V-shape.Described section flat micro-structural has the smooth platform that can increase the contact area between flexible backing 508 and the stiff base 512.This provides more load-carrying supporting during polishing.The workpiece 520 that comprises polished surface contacts with abrasive material 502, moves with respect to abrasive product 500, so that workpiece 520 is polished.As shown in Figure 2, apply load P to workpiece 520.Load P is supported with direct contact of stiff base 512 by at least a portion of the micro-structural 506 that copies, thereby make the minimizing deformation (if not eliminating) of adhesive phase, and reduce convexity or the change circle (if not eliminating) at the edge of workpiece 520.
The schematic cross-section of a kind of another embodiment of the abrasive product that provides is provided Fig. 6, and the wherein said micro-structural that copies is cube or cubical ridge.The cross section of the described micro-structural that copies is rectangular shape, defines as depressed part.Fig. 6 is an embodiment of abrasive product 600, and it comprises flexible backing 608.Abrasive material 602 (it comprises the abrasive particle that is retained in the binding agent) is arranged on first first type surface of flexible backing 608.On at least a portion of its second first type surface, flexible backing 608 comprises the micro-structural that copies 606 with depressed part.Adhesive 605 is located substantially in the depressed part.Described cubical micro-structural has the smooth platform that can increase the contact area between flexible backing 608 and the stiff base 612.This provides more load-carrying supporting during polishing.The workpiece 620 that comprises polished surface contacts with abrasive material 602, and it moves with respect to abrasive product 600, so that workpiece 620 is polished.As shown in Figure 2, apply load P to workpiece 620.Load P is supported with direct contact of stiff base 612 by at least a portion of the micro-structural 606 that copies, thereby make the minimizing deformation (if not eliminating) of adhesive phase, and reduce convexity or the change circle (if not eliminating) at the edge of workpiece 620.
Further illustrate objects and advantages of the present invention by following example, but the certain material of narrating in these examples and consumption thereof and other conditions and details should not be construed as the present invention is carried out improper restriction.
Example
Method of testing
Grinding step
Use Lapmaster 15 type milling tools (can derive from (the Lapmaster International LLC of Lai Mate international corporation on scenery mountain, Illinois, Mount Prospect, Illinois)) carrying out three AlTiC coupons (grinds in the time of 2.40cm * 0.20cm * 0.5cm).The platen of subsidiary abrasive product is installed to the bottom of instrument.Use adhesive SCOTCHWELD DP100 two component epoxy adhesives (can derive from the 3M company in Sao Paulo, the Minnesota State) 15cm diameter * 1mm AlTiC wafer to be installed on the top surface of 5.5 inches (14.0cm) diameter rings of Lapmaster 15 types.Use same epobond epoxyn that three AlTiC coupons are installed on the AlTiC wafer surface.4.5mm radius along wafer is installed coupon, and is evenly spaced apart, namely is separated from each other about 120 °, and makes its length perpendicular to radius.Coupon is mounted to makes 2.40cm * 0.20cm be surface mounted to wafer.Grinding condition is: head rotating speed 20rpm, platen rotating speed 40rpm, and milling time 3 hours.In first hour, apply the load of a 2kg to head; In the second hour, apply the load of a 4kg and in three hour, apply the load of a 6kg.The AlTiC coupon rotates in the external diameter of the platen that abrasive material covers and the path in the internal diameter.Use polishing fluid: in whole 3 hours processes, on platen, drip no water glycol with the speed of 0.36g/min.
The convexity process of measurement
Use P16 type profilograph (can derive from the roughness measurement that back AlTiC coupon grinds in Mil's Pitta this KLA-Tencor company (KLA-Tencor Corporation, Milpitas, California)) in California.Carry out four profile curvometer scanning at the 0.2cm of each coupon width.Four scanning is being carried out along the increment with about 0.5cm on the length of coupon.Convexity is defined as the difference between the minimum and maximum height of given profilograph scanning.Then will be average in addition from ten secondary measurements that three coupons obtain, obtain average convexity value.
Manufacturing with backing of the micro-structural of being with depressed part
At coil of strip with copper surface with 25.25 inches (64.1cm) width and 12 inches (30.5cm) diameters of diamond turning machine cutting, make the surface have a series of micro-structural and between described micro-structural, have depressed part.Figure 7 illustrates the sectional view on a fraction of micro-structural volume surface 700 of volume 740.Depressed part 710 makes them along the girth of described volume through cutting, extends perpendicular to spool direction 730, shown in the double-headed arrow 730 of dotted line.This prepares a series of microstructure features 720, and they also extend along the girth of described volume.The mean depth of depressed part 710 is 1.3 mils (33.0 μ m).The mean breadth of the bottom of the feature 720 of micro-structural is 1.0 mils (15.4 μ m).Average distance between the bottom of the feature 720 of micro-structural is 0.48 mil (12.1 μ m).The feature 720 of described micro-structural is trapezoidal shape, and measured average internal angle is about 110 degree at the top of described feature.After the diamond turning machine cuts, remove the greasy dirt of described volume with isopropyl alcohol, and use alkaline solution to clean described surface.Use electroless nickel plating technology, to the copper plating nickel on surface of described coil of strip to protect described surface not oxidized.
Described twisting in is used as instrument to form micro-structure surface, the ridge with depression at backing in direct casting and the curing process.In this casting and curing process, use the polyester film of wide 23 inches (58.4cm) thick 0.005 inch (127 microns) as backing.A kind of photopolymerizable acrylate is coated on the described instrument, applies the width of about 20 inches (50.8cm) along the length of described volume.Described acrylate is that 75 weight % aliphatic carbamate diacrylates (can be buied (Cognis Corporation from the Kening Co.,Ltd of the Ohioan city of Cincinnati according to trade name PHOTOMER 6210, Cincinnati, OH)), 24 weight %1,6 hexanediyl esters (can buy from the Sartomer company that Pennsylvania's Aix-en-Provence pauses according to trade name SR238) and 1 weight % light trigger (can be buied (BASF Corp. from the BASF AG of the Xia Luote of the North Carolina state according to trade name LUCIRIN TPO, Charlotte, NC)).Described backing is applied to the acrylate-coated part of described instrument subsequently.Described acrylate is to pass described backing in still in the depression of described volume micro-structural to be subjected to UV and to solidify.Subsequently described backing is peeled off from instrument.The acrylic resin that solidifies adheres on the backing and from the described instrument demoulding, forms micro-structure surface.Figure 8 illustrates the sectional view corresponding to the reel transverse view of backing micro-structural.Fig. 8 shows micro-structural backing surface 800, and it has lip-deep depressed part 810 and the microstructure features 820 that is positioned at backing 840.Shown reel horizontal direction 830.The micro-structure surface that copies of described backing has the micro-structural reverse with instrument.The mean depth of depressed part 810 is 1.3 mils (33.0 μ m).The mean breadth of the bottom of the feature 820 of micro-structural is 1.0 mils (15.4 μ m).Average distance between the bottom of the feature 720 of micro-structural is 0.48 mil (12.1 μ m).The feature 720 of described micro-structural is trapezoidal shape, and measured average outside angle is about 100 degree in the bottom of described feature.Described micro-structural and between them corresponding depressed part follow the reel longitudinal direction of reel.
Example
20 inches (50.8cm) * 20 inch (50.8cm) thin slice with above-mentioned backing of micro-structure surface is banded on the aluminium sheet of inch (53.3cm) * 0.625,18 inches (45.7cm) * 21 inch (0.159cm), and wherein said micro-structure surface is towards described aluminium sheet.Mix with the MEK (MEK) of 3g according to the 3M SCOTCH-WEL epoxy resin B/A adhesive (buying from the 3M company in Sao Paulo, Minnesota State city) of supplier's specification with 1g, make a kind of solution.Be poured on the polyester backing and use rubber rollers to make on its surface that is dispersed throughout whole backing described solution.Along with the evaporation of solvent is repeatedly carried out roll extrusion and made epobond epoxyn cover described surface in uniform mode described surface.Restrain according to U.S. Patent number 6 ten, 645,624 people such as () Adefris preparation and screening are poured on the epobond epoxyn according to a line along the edge to the abrasive composites particle that comprises 1 micron diamond/silica 50/50 weight % less than 38 microns size.With the backing of the described aluminium sheet of 45 fixing and described coating and knock slightly so that described particle rolls and applies the resin that is clamminess.Repeat this operation till described backing comprises complete coating.The described plate of fixing and knock to separate loose granule tempestuously vertically subsequently.Cover the grinding agent of institute's combination and roll in single plane, described particle to be pressed in the epobond epoxyn with manual rubber rollers with a slice silicones release liner subsequently.Described coating was at room temperature solidified 12 hours, and solidified extra 2 hours down at 70 ℃ subsequently.
With the multiple glue of fixing resin described abrasive material is carried out spray application subsequently.Multiple gum resin solution is made up of the following: 4g accounts for 30 weight % in the 2-butanone phenoxy resin solution (can become (the Tohto Kasei Co.Lt.Inabata America Corp of rice field company of Co., Ltd from the Kazakhstan polyvoltine of New York, New York according to trade name YP-50S, NY, NY)); 2.3g account for the polyester polyurethane resin solution of 35 weight % at MEK (methylene diisocyanate by neopentyl glycol, 29 weight % polycaprolactones and the 50 weight % of 21 weight % is synthetic); 1.1g polymer-type isocyanates (can according to the Bayer chemistry (Bayer Chemical, Pittsburgh PA) buy) of trade name Mondur MRS from the Pennsylvania Pittsburgh); 40g MEK and 10g cyclohexanone.To answer gum resin solution is placed in the aerosol container.In draughty cover, sprayed multiple gum resin solution about 60 seconds to abrasive surface, up to the surface look more moistening till.In baking oven, described aluminium sheet and abrasive product were heated 17 hours down at 70 ℃ subsequently.After cooling, will have the film upset of micro-structural, so that abrasive surface contacts aluminium sheet and micro-structure surface is exposed.Use rubber rollers will be coated with manual being laminated on the micro-structure surface of backing of the contact adhesive based on acrylate of the non-commissure of one deck with 0.0009 inch (22.9 microns) nominal thickness of silication brown paper release liner subsequently.Remove and use rubber rollers that abrasive product is laminated on the smooth aluminum annular-shaped platen by hand the release liner of abrasive product, this aluminium platen external diameter is that 16 inches (40.6cm), internal diameter are that 8 inches (20.3cm), thickness are 1.5 inches (3.8cm), is to make with standard C NC cutting technique.
The abrasive surface that will have the platen of abrasive product subsequently is placed into downwards on the quartzy thin plate, this platen is inch (45.7cm) * 3/8,23 inches (58.4cm) * 18 inch (0.95cm), the identical platen of heavy 10.7kg is placed on the top of first platen with attached abrasive material, and in baking oven, whole laminates was heated 48 hours down at 70 ℃.Subsequently laminates is taken out from baking oven, second platen is removed from laminates, make the platen cooling with attached abrasive product subsequently, and abrasive material is contacted with quartz plate always.Repair abrasive product to join the size that is suitable for platen with razor blade.After grinding step as described above and convexity measurement operation, the average convexity of three AlTiC coupons is 0.9 microinch (0.0229 μ m).
Not departing under the prerequisite of scope and spirit of the present invention, will be apparent to various improvement of the present invention and change for those skilled in the art.Should be appreciated that the present invention is not intended to be limited to irrelevantly exemplary embodiment provided herein and example, these examples and embodiment only propose by way of example, and scope of the present invention is intended to only be subjected to the restriction of appended claims.All lists of references of quoting in the disclosure are all incorporated the application in full in the mode of quoting as proof.
Below be the abrasive product of the micro-structural backing that copies according to having of various aspects of the present invention and the exemplary embodiment of using the method for this abrasive product.
Embodiment 1 is a kind of abrasive product, comprises: have the first relative first type surface and the flexible backing of second first type surface, at least a portion of described second first type surface of wherein said flexible backing comprises the micro-structural that copies with depressed part; Abrasive material, described abrasive material comprise a plurality of abrasive particles that are retained at least a binding agent, and described abrasive material is arranged on described first first type surface of described flexible backing; And adhesive, wherein said adhesive is substantially included in the described depressed part of the described micro-structural that copies.
Embodiment 2 is a kind of abrasive product according to embodiment 1, also comprises: the stiff base that contacts with at least a portion of the described micro-structural that copies.
Embodiment 3 is a kind of abrasive product according to embodiment 1, also comprises: the release liner that contacts with at least a portion of described adhesive.
Embodiment 4 is a kind of abrasive product according to embodiment 1, and wherein said flexible backing is selected from fine and close brown paper, paper, metal forming and the polymeric substrates of polymer-coated.
Embodiment 5 is a kind of abrasive product according to embodiment 4, and wherein said metal forming is selected from aluminium, copper, tin and bronze.
Embodiment 6 is a kind of abrasive product according to embodiment 4, and wherein said polymeric substrates is selected from polyester, Merlon, polypropylene, polyethylene, cellulose, polyamide, polyimides, polysiloxanes and polytetrafluoroethylene (PTFE).
Embodiment 7 is a kind of abrasive product according to embodiment 1, and wherein said abrasive particle is selected from aloxite (AI, through heat treated aluminium oxide, white aloxite (AI, black silicon carbide, green silicon carbide, titanium diboride, boron carbide, tungsten carbide, titanium carbide, diamond, silica, iron oxide, chromium oxide, ceria, zirconia, titanium dioxide, silicate, tin oxide, cubic boron nitride, garnet, aloxite (AI-zirconia, sol-gel abrasive particle, abrasive material aggregate, based on metallic particle and their combination.
Embodiment 8 is a kind of abrasive product according to embodiment 1, and wherein said flexible backing has the Young's modulus greater than about 0.5GPa.
Embodiment 9 is a kind of abrasive product according to embodiment 8, and wherein said flexible backing has the Young's modulus greater than about 2.0GPa.
Embodiment 11 is a kind of abrasive product according to embodiment 1, and the wherein said micro-structural that copies has the shape that comprises ridge.
Embodiment 15 is a kind of finishing method according to embodiment 14, wherein said abrasive particle be selected from aloxite (AI, through heat treated aluminium oxide, white aloxite (AI, black silicon carbide, green silicon carbide, titanium diboride, boron carbide, tungsten carbide, titanium carbide, diamond, silica, iron oxide, chromium oxide, ceria, zirconia, titanium dioxide, silicate, tin oxide, cubic boron nitride, garnet, aloxite (AI-zirconia, sol-gel abrasive particle, abrasive material aggregate, based on metallic particle and their combination.
Embodiment 16 is a kind of finishing method according to embodiment 14, and the wherein said micro-structural that copies has the shape that comprises the following: clavate, triangle, pyramid, truncated pyramid, taper, truncated cone shape, three-dimensional dihedral, cube shaped, spherical or spheroidal.
Embodiment 17 is a kind of finishing method according to embodiment 14, and the wherein said micro-structural that copies has the shape that comprises ridge.
Embodiment 19 is a kind of finishing method according to embodiment 14, wherein said binder constitutes according to the described micro-structural that copies described depressed part volume greater than about 25 volume % and less than about 120 volume %.
Though this paper illustrates and describes specific embodiment for the purpose of explanation preferred embodiment, but those of ordinary skill in the art is to be understood that, under the prerequisite that does not depart from the scope of the present invention, variously be intended to reach the specific embodiment that the concrete enforcement optional and/or equivalents of identical purpose can replace diagram and describe.The technical staff of machinery, electromechanics and electric field will be readily appreciated that the present invention can implement in numerous embodiment.Present patent application is intended to contain any modification or the variations of preferred embodiment discussed in this article.Therefore, apparent, the present invention only is subjected to the restriction of claims of the present invention and equivalent thereof.
Claims (20)
1. abrasive product comprises:
Flexible backing, described flexible backing has the first relative first type surface and second first type surface, and at least a portion of described second first type surface of wherein said flexible backing comprises the micro-structural that copies with depressed part;
Abrasive material, described abrasive material comprise a plurality of abrasive particles that are retained at least a binding agent, and described abrasive material is arranged on described first first type surface of described flexible backing; And
Adhesive,
Wherein said adhesive is substantially included in the described depressed part of the described micro-structural that copies.
2. abrasive product according to claim 1 also comprises:
The stiff base that contacts with at least a portion of the described micro-structural that copies.
3. abrasive product according to claim 1 also comprises:
The release liner that contacts with at least a portion of described adhesive.
4. abrasive product according to claim 1, wherein said flexible backing are selected from fine and close brown paper, paper, metal forming and the polymeric substrates of polymer-coated.
5. abrasive product according to claim 4, wherein said metal forming is selected from aluminium, copper, tin and bronze.
6. abrasive product according to claim 4, wherein said polymeric substrates is selected from polyester, Merlon, polypropylene, polyethylene, cellulose, polyamide, polyimides, polysiloxanes and polytetrafluoroethylene (PTFE).
7. abrasive product according to claim 1, wherein said abrasive particle be selected from aloxite (AI, through heat treated aluminium oxide, white aloxite (AI, black silicon carbide, green silicon carbide, titanium diboride, boron carbide, tungsten carbide, titanium carbide, diamond, silica, iron oxide, chromium oxide, ceria, zirconia, titanium dioxide, silicate, tin oxide, cubic boron nitride, garnet, aloxite (AI-zirconia, sol-gel abrasive particle, abrasive material aggregate, based on metallic particle and their combination.
8. abrasive product according to claim 1, wherein said flexible backing has the Young's modulus greater than about 0.5GPa.
9. abrasive product according to claim 8, wherein said flexible backing has the Young's modulus greater than about 2.0GPa.
10. abrasive product according to claim 1, the wherein said micro-structural that copies has the shape that comprises the following: clavate, triangle, pyramid, truncated pyramid, taper, truncated cone shape, three-dimensional dihedral, cube shaped, spherical or spheroidal.
11. abrasive product according to claim 1, the wherein said micro-structural that copies has the shape that comprises ridge.
12. abrasive product according to claim 1, wherein said adhesive are selected from contact adhesive, hotmelt and curable liquid adhesive.
13. abrasive product according to claim 1, wherein said binder constitutes according to the described micro-structural that copies described depressed part volume greater than about 25 volume % and less than about 120 volume %.
14. a finishing method comprises:
Polished workpiece is provided;
Described workpiece is contacted with abrasive product, and described abrasive product comprises:
Flexible backing, described flexible backing has the first relative first type surface and second first type surface, and at least a portion of described second first type surface of wherein said flexible backing comprises the micro-structural that copies with depressed part;
Abrasive material, described abrasive material comprise a plurality of abrasive particles that are retained at least a binding agent, and described abrasive material is arranged on described first first type surface of described flexible backing;
Adhesive; And
With the stiff base that at least a portion of the described micro-structural that copies contacts, wherein said adhesive is substantially included in the described depressed part of the described micro-structural that copies; And
Move described abrasive product with respect to described workpiece.
15. finishing method according to claim 14, wherein said abrasive particle are selected from aloxite (AI, through heat treated aluminium oxide, white aloxite (AI, black silicon carbide, green silicon carbide, titanium diboride, boron carbide, tungsten carbide, titanium carbide, diamond, silica, iron oxide, chromium oxide, ceria, zirconia, titanium dioxide, silicate, tin oxide, cubic boron nitride, garnet, aloxite (AI-zirconia, sol-gel abrasive particle, abrasive material aggregate, based on metallic particle and their combination.
16. finishing method according to claim 14, the wherein said micro-structural that copies has the shape that comprises the following: clavate, triangle, pyramid, truncated pyramid, taper, truncated cone shape, three-dimensional dihedral, cube shaped, spherical or spheroidal.
17. finishing method according to claim 14, the wherein said micro-structural that copies has the shape that comprises ridge.
18. finishing method according to claim 14, wherein said adhesive are selected from contact adhesive, hotmelt and curable liquid adhesive.
19. finishing method according to claim 14, wherein said binder constitutes according to the described micro-structural that copies described depressed part volume greater than about 25 volume % and less than about 120 volume %.
20. finishing method according to claim 14 also comprises the release liner that is arranged on the described adhesive.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161436407P | 2011-01-26 | 2011-01-26 | |
| US61/436,407 | 2011-01-26 | ||
| PCT/US2012/022142 WO2012102978A1 (en) | 2011-01-26 | 2012-01-23 | Abrasive article with replicated microstructured backing and method of using same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103328158A true CN103328158A (en) | 2013-09-25 |
Family
ID=45755505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012800056627A Pending CN103328158A (en) | 2011-01-26 | 2012-01-23 | Abrasive article with replicated microstructured backing and method of using same |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20130295821A1 (en) |
| JP (1) | JP2014508650A (en) |
| KR (1) | KR20140018880A (en) |
| CN (1) | CN103328158A (en) |
| SG (1) | SG191978A1 (en) |
| TW (1) | TW201238716A (en) |
| WO (1) | WO2012102978A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104369120A (en) * | 2014-09-15 | 2015-02-25 | 陕西德赛新材料科技有限公司 | Method for manufacturing diamond or CBN grinding tool on basis of implantation of grinding unit |
| CN105500186A (en) * | 2016-01-21 | 2016-04-20 | 苏州新美光纳米科技有限公司 | Polishing pad for wafer polishing and self-absorption method thereof |
| CN105829024A (en) * | 2013-12-23 | 2016-08-03 | 3M创新有限公司 | Maker apparatus for coated abrasive article |
| CN107000171A (en) * | 2014-11-26 | 2017-08-01 | 3M创新有限公司 | Abrasive product, component and method with clamping material |
| CN108747876A (en) * | 2018-06-11 | 2018-11-06 | 河北思瑞恩新材料科技有限公司 | A kind of preparation method of lacquer painting abrasive sand dish |
| CN111032284A (en) * | 2017-08-04 | 2020-04-17 | 3M创新有限公司 | Microreplicated polished surfaces with enhanced coplanarity |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104403575B (en) * | 2014-12-23 | 2016-09-21 | 包头市华辰稀土材料有限公司 | A kind of preparation method of high accuracy aluminum oxide polishing powder |
| WO2016209651A1 (en) * | 2015-06-22 | 2016-12-29 | 3M Innovative Properties Company | Abrasive articles, assemblies, and methods with gripping material |
| CN105751090A (en) * | 2016-04-15 | 2016-07-13 | 常州市金牛研磨有限公司 | Anti-skid strengthened abrasive belt |
| US10849660B2 (en) * | 2017-02-21 | 2020-12-01 | Diamabrush Llc | Sanding screen device |
| TWI674947B (en) * | 2018-04-19 | 2019-10-21 | 智勝科技股份有限公司 | Polishing pad, manufacturing method of polishing pad and polishing method |
| US10954803B2 (en) * | 2019-01-17 | 2021-03-23 | Rolls-Royce Corporation | Abrasive coating for high temperature mechanical systems |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618225A (en) * | 1993-01-28 | 1997-04-08 | Minnesota Mining And Manufacturing Company | Abrasive attachment system for rotative abrading applications |
| CN1227519A (en) * | 1996-08-08 | 1999-09-01 | 美国3M公司 | Abrasive construction for semiconductor wafer modification |
| CN1411038A (en) * | 2002-05-30 | 2003-04-16 | 株式会社日立制作所 | Polishing method and apparatus |
| CN1489508A (en) * | 2001-02-15 | 2004-04-14 | 3M | FIxed abrasive article for use in modifying semiconductor wafer |
| CN1607997A (en) * | 2001-12-28 | 2005-04-20 | 3M创新有限公司 | Backing and abrasive product made with the backing and method of making and using the backing and abrasive product |
| CN1671511A (en) * | 2002-08-02 | 2005-09-21 | 3M创新有限公司 | Abrasive articles with a liner with protrusions and methods of making and using the same |
| CN100343019C (en) * | 2000-04-28 | 2007-10-17 | 3M创新有限公司 | Abrasive article and methods for grinding glass |
| WO2008079932A2 (en) * | 2006-12-21 | 2008-07-03 | Saint-Gobain Abrasives, Inc. | Abrasive article with cured backsize layer |
| US20100022174A1 (en) * | 2008-07-28 | 2010-01-28 | Kinik Company | Grinding tool and method for fabricating the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5318083A (en) * | 1976-08-04 | 1978-02-18 | Sankyo Rikagaku Co | Grinding instruments of multiilayer structure |
| US4629473A (en) * | 1985-06-26 | 1986-12-16 | Norton Company | Resilient abrasive polishing product |
| US5152917B1 (en) * | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| US6838142B2 (en) * | 2001-05-18 | 2005-01-04 | 3M Innovative Properties Company | Specular laminates |
| JP5020333B2 (en) * | 2006-12-20 | 2012-09-05 | スリーエム イノベイティブ プロパティズ カンパニー | Coated abrasive disc and method for making the same |
-
2012
- 2012-01-23 JP JP2013551260A patent/JP2014508650A/en active Pending
- 2012-01-23 CN CN2012800056627A patent/CN103328158A/en active Pending
- 2012-01-23 US US13/979,233 patent/US20130295821A1/en not_active Abandoned
- 2012-01-23 KR KR1020137022016A patent/KR20140018880A/en not_active Application Discontinuation
- 2012-01-23 SG SG2013054051A patent/SG191978A1/en unknown
- 2012-01-23 WO PCT/US2012/022142 patent/WO2012102978A1/en active Application Filing
- 2012-01-30 TW TW101102916A patent/TW201238716A/en unknown
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618225A (en) * | 1993-01-28 | 1997-04-08 | Minnesota Mining And Manufacturing Company | Abrasive attachment system for rotative abrading applications |
| CN1227519A (en) * | 1996-08-08 | 1999-09-01 | 美国3M公司 | Abrasive construction for semiconductor wafer modification |
| CN100343019C (en) * | 2000-04-28 | 2007-10-17 | 3M创新有限公司 | Abrasive article and methods for grinding glass |
| CN1489508A (en) * | 2001-02-15 | 2004-04-14 | 3M | FIxed abrasive article for use in modifying semiconductor wafer |
| CN1607997A (en) * | 2001-12-28 | 2005-04-20 | 3M创新有限公司 | Backing and abrasive product made with the backing and method of making and using the backing and abrasive product |
| CN1411038A (en) * | 2002-05-30 | 2003-04-16 | 株式会社日立制作所 | Polishing method and apparatus |
| CN1671511A (en) * | 2002-08-02 | 2005-09-21 | 3M创新有限公司 | Abrasive articles with a liner with protrusions and methods of making and using the same |
| WO2008079932A2 (en) * | 2006-12-21 | 2008-07-03 | Saint-Gobain Abrasives, Inc. | Abrasive article with cured backsize layer |
| US20100022174A1 (en) * | 2008-07-28 | 2010-01-28 | Kinik Company | Grinding tool and method for fabricating the same |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105829024A (en) * | 2013-12-23 | 2016-08-03 | 3M创新有限公司 | Maker apparatus for coated abrasive article |
| CN105829024B (en) * | 2013-12-23 | 2018-04-20 | 3M创新有限公司 | Coated abrasives prepare machine equipment |
| CN104369120A (en) * | 2014-09-15 | 2015-02-25 | 陕西德赛新材料科技有限公司 | Method for manufacturing diamond or CBN grinding tool on basis of implantation of grinding unit |
| CN107000171A (en) * | 2014-11-26 | 2017-08-01 | 3M创新有限公司 | Abrasive product, component and method with clamping material |
| CN105500186A (en) * | 2016-01-21 | 2016-04-20 | 苏州新美光纳米科技有限公司 | Polishing pad for wafer polishing and self-absorption method thereof |
| CN111032284A (en) * | 2017-08-04 | 2020-04-17 | 3M创新有限公司 | Microreplicated polished surfaces with enhanced coplanarity |
| TWI803502B (en) * | 2017-08-04 | 2023-06-01 | 美商3M新設資產公司 | Chemical mechanical polishing article, system, method, and microreplication tool |
| CN108747876A (en) * | 2018-06-11 | 2018-11-06 | 河北思瑞恩新材料科技有限公司 | A kind of preparation method of lacquer painting abrasive sand dish |
| CN108747876B (en) * | 2018-06-11 | 2021-03-19 | 河北思瑞恩新材料科技有限公司 | Preparation method of paint surface grinding sand disc |
Also Published As
| Publication number | Publication date |
|---|---|
| US20130295821A1 (en) | 2013-11-07 |
| JP2014508650A (en) | 2014-04-10 |
| WO2012102978A1 (en) | 2012-08-02 |
| KR20140018880A (en) | 2014-02-13 |
| SG191978A1 (en) | 2013-08-30 |
| TW201238716A (en) | 2012-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103328158A (en) | Abrasive article with replicated microstructured backing and method of using same | |
| CN112566753B (en) | Structured abrasive article and method of making the same | |
| JP4757891B2 (en) | Polishing pad | |
| TW411306B (en) | Abrasive article for providing a clear surface finish on glass | |
| JP5555453B2 (en) | Abrasive product, method for producing and using the same | |
| JP3459246B2 (en) | Method of making coated abrasive article | |
| EP0605008B1 (en) | Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same | |
| KR100371980B1 (en) | Structured abrasives with adhered functional powders | |
| KR100483090B1 (en) | Method and Article for the Production of Optical Quality Surface on Glass | |
| KR101643798B1 (en) | Structured abrasive article and method of using the same | |
| JP5680621B2 (en) | Flat abrasive article produced using transfer article and method for producing the same | |
| KR101160064B1 (en) | Backingless abrasive article and a method of repairing optical media | |
| US20030207659A1 (en) | Abrasive product and method of making and using the same | |
| PL185688B1 (en) | Method of obtaining shaped abrasive surfaces | |
| JPH09506557A (en) | Polishing supplies | |
| EP1102658A1 (en) | Abrasive article with integrally molded front surface protrusions containing a grinding aid and methods of making and using | |
| JPH09504235A (en) | Abrasive article, its manufacturing method and its use for finishing a workpiece surface | |
| JPH07502697A (en) | Abrasive article having an abrasive composite member within the recess | |
| JP2009534202A (en) | Embossed structure abrasive article and method for producing and using the same | |
| JP2868772B2 (en) | Manufacturing method of polishing tape | |
| JP2001179640A (en) | Abrasive material with abrasive layer in solid structure | |
| WO2019180656A1 (en) | Structured abrasives containing polishing materials for use in the home | |
| WO2024090474A1 (en) | Sheet-form polishing article | |
| RU2173251C1 (en) | Structuralized abrasives with coherent functional powders | |
| TW309631B (en) | Method of modifying an exposed surface of a semiconductor wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130925 |