JP2868431B2 - Film thickness measuring device with cleaning jig - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film thickness measuring apparatus for measuring the thickness of a moving film in an online state.

[0002]

2. Description of the Related Art Organic or inorganic thin films or films that are continuously produced are often produced while strictly controlling the film thickness. In this case, the film thickness of the film is measured by a film thickness measuring device. As a means, there is a device for knowing the film thickness from the absorbance of X-rays. However, since this is expensive, a mechanical contact is used. Contact-type film thickness measuring devices are often used.

In this contact type film thickness measuring apparatus, as shown in FIG. 3, a movable contact 1 is mounted on a cylinder 11 so as to be movable in a vertical direction. A fixed contact 02 having a contact plane is attached to the fixed base 21. In measuring the film thickness, the separation length when the film to be measured is sandwiched between the movable contact 1 and the contact plane of the fixed contact table 02 is defined as the thickness of the film. As a result, a differential transformer (not shown) connected to the movable contact 1 can detect and electrically calculate and measure the film thickness with an accuracy of approximately ± 0.4 μm.

However, when the film thickness is measured on-line at a film production site, the film to be measured is constantly moved while being in contact with the fixed contact 02 in order to maintain the measurement accuracy. The child 1 must be brought into contact with the surface of the film to be measured. In this case, fine foreign matter having a size of about 0.5 μm or less attached to the front and back surfaces of the film to be measured accumulates between the film to be measured and the movable contact 1 and the fixed contact 02, causing a measurement error. There was a problem. In addition, there is a problem that the film to be measured floats due to a slight change in the air flow near the film thickness measuring device, causing a measurement error, and an error of about 1 μm often occurs.

[0005] Due to such inconveniences, when the above-mentioned contact type film thickness measuring apparatus is used, a part of a continuously manufactured film is cut and sampled, or the production line is temporarily stopped. However, there is a drawback that the film thickness must be measured by using it, and it cannot be used in the online state.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and a film thickness measuring apparatus provided with a simple cleaning jig capable of measuring the film thickness online. I will provide a.

[0007]

The above problem can be solved by the following film thickness measuring device . A film thickness measuring device for detecting a change in film thickness of a film to be measured as a movement of the moving contact by sliding the film to be measured between opposed moving and fixed contacts while sliding the film to be measured. The tips of the mobile contact and the fixed contact shall be formed in a smoothly curved convex part, and flexible wires shall be attached to the respective tips of the mobile contact and the fixed contact.
A film thickness measuring device provided with a cleaning jig, which is movably stretched at a position slidable while being curved along a curved shape and individually contacting each other.

[0008]

Next, the present invention will be described in detail with reference to the embodiments shown in FIGS. First, FIG. 1 (side conceptual diagram of the film thickness measuring apparatus of the embodiment) and FIG. 2 (similar front conceptual diagram)
1, the movable contact 1 is mounted on the cylinder 11 so as to be movable in the vertical direction, and the cylinder 11 is fixed to the upper fixed base 12. On the other hand, a fixed contact 2 is attached to a fixed base 21 at a position facing the movable contact 1. The tips of the movable contact 1 and the fixed contact 2 are formed as smoothly curved convex portions. In this embodiment, two pairs of the movable contact 1 and the fixed contact 2 are provided in parallel. In order to measure the film thickness by this apparatus, the moving contact 1
By moving the moving contact 1 and the fixed contact 2 while sliding the film to be measured between the smooth convex tips of the moving contact 1 and the fixed contact 2. The motion is detected by a differential transformer (not shown) connected to the moving contact 1 and electrically calculated to measure the film thickness.

Further, in this embodiment, an inverted L-shaped (see FIG. 1) guide fitting 7 is fixed to the upper fixed base 12 at its upper side, and the tip of the moving contact 1 is inserted through the insertion hole 71 at its lower side. It is arranged to protrude. Further, a pair of arms 5a and 5b are attached to the cylinder 4 so as to be able to expand and contract in the left-right direction (see FIG. 1) with the movable contact 1 sandwiched from the left and right (see FIG. 2). And this arm 5
a, flexible nylon wire 5 between 5a
Reference numeral 1 is stretched along the lower surface of the lower side of the guide fitting 7. On the other hand, a pair of arms 6a and 6b are attached to the cylinder 4 so as to be able to expand and contract in the left-right direction (see FIG. 1) with the fixed base 21 fixing the fixed contact 2 sandwiched from left and right (see FIG. 2). I have. And this arm 6
A nylon wire 61 is also stretched between a and 6b along the upper surface of the fixed base 21.

Next, the operating condition of the above-mentioned apparatus will be described. The film to be measured is usually in contact with the fixed contact 2 and is moving while sliding, and the moving contact 1 is separated from the film to be measured and waits upward. doing. In this embodiment, 15
The moving contact 1 is lowered at 0-second intervals to make contact with the film to be measured for 30 seconds, during which the film thickness is measured. Prior to this measuring operation, the arms 5a, 5b having the wires 51, 61 are provided. And 6a, 6b are reciprocated to the left and right, and the wires 51, 61 are bent along the curved shape at the tip of the movable contact 1 and the tip of the fixed contact 2, respectively.
Then, it is slid while being brought into contact , and the attached foreign matter is removed in advance.

[0011]

As described in the above embodiment, according to the present invention, the tips of the movable contact 1 and the fixed contact 2 are formed into smoothly curved convex portions, and the wire 5 is connected to the wire 5 prior to the measurement.
Since the sliding members 1 and 61 are curved along the curved shape of the tip of the movable contact 1 and the tip of the fixed contact 2 and are slid while being in contact therewith, foreign substances adhering thereto are removed in advance.
Measurement errors due to the presence of foreign matter or fluctuations in airflow can be eliminated, and the film thickness of a film can be measured online at a production site. The frequency of occurrence of measurement errors due to foreign matter was conventionally extremely high, so that it was impossible to perform measurement in an online state. However, in the case of this embodiment, about once per 1200 m of moving distance of the film to be measured. As a result, online measurement became possible.

(Preferred Embodiment) In the present invention, in addition to the embodiment described in the above embodiment, the configuration can be embodied as follows. (1) As the flexible wire, a nylon wire is used in the embodiment, but the present invention is not limited to this, and a plastic wire such as Tetron or fluororesin can be used. In the case of a nylon wire, a commercially available nylon fishing line can be diverted as it is, which is particularly simple. (2) The flexible wire may be a single fiber or a composite fiber of a single fiber, and the thickness thereof is 0.1 to 0.1 mm in diameter.
5 mm is preferred.

[0013]

Since the film thickness measuring apparatus provided with the cleaning jig of the present invention is configured as described above, the film thickness of the film to be measured can be measured online at the production site. It became. Therefore, the present invention has an extremely large industrial value as a film thickness measuring device which has solved the conventional problems.

[Brief description of the drawings]

FIG. 1 is a conceptual side view of a film thickness measuring apparatus according to an embodiment of the present invention.

FIG. 2 is a conceptual front view.

FIG. 3 is a conceptual side view of a conventional film thickness measuring apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Moving contact 2 Fixed contact 51 Wire 61 Wire

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G01B 5/00-5/30

Claims (1)

(57) [Claims] 1. A film thickness for detecting a change in the film thickness of a film to be measured as a movement of the moving contact by sliding the film to be measured between opposed moving contacts and fixed contacts while sliding the film to be measured. A measuring device, wherein the tips of the moving contact and the fixed contact are formed in smoothly curved convex portions, and flexible wires are attached to the respective tips of the moving contact and the fixed contact. Curved along the shape
A film thickness measuring apparatus provided with a cleaning jig, which is movably stretched at a position where it can slide while being individually contacted.