JPH08261702A - Film thickness measuring instrument with cleaning tool - Google Patents

Abstract

PURPOSE: To provide a film thickness measuring instrument with a simple cleaning tool for measuring film thickness on-line. CONSTITUTION: The tips of a traveling contact 1 and a fixed contact 2 are formed to be a smoothly curved projection part, at the same time a flexible nylon wire 51 is extended between freely stretchable arms 5a and 5b so that it can slide at the tip of the traveling contact 1, and further a wire 61 is stretched slidably between freely stretching arms 6a and 6b at the tip of the fixed contact 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film thickness measuring device for measuring the film thickness of a moving film online.

[0002]

2. Description of the Related Art A continuously produced organic or inorganic thin film or film is often produced by strictly controlling the film thickness. In this case, the film thickness of the film is measured by a film thickness measuring device, and there is also a device for knowing the film thickness from the X-ray absorption, which is expensive and uses a mechanical contactor. Contact-type film thickness measuring devices are often used.

In this contact-type film thickness measuring apparatus, as shown in FIG. 3, a moving contact 1 is attached to a cylinder 11 so as to be movable in the vertical direction, and the moving contact 1 is horizontal at a position facing the moving contact 1. A fixed contact 02 having a contact plane is attached to the fixed base 21. In measuring the film thickness, the contact length between the moving contact 1 and the contact plane of the fixed contact base 02 is used as a reference for the film thickness of 0, and the separation length when the film to be measured is sandwiched therebetween is set to the film thickness. As a result, a differential transformer (not shown) connected to this moving contact 1 can detect and electrically calculate the film thickness with an accuracy of approximately ± 0.4 μm.

However, when the film thickness is measured online at the film production site, in order to maintain the measurement accuracy, the film to be measured is always in contact with the fixed contact 02 and slid while being moved, and the moving contact is also performed. The child 1 must be brought into contact with the surface of the film to be measured. In that case, it is said that fine foreign matter having a size of about 0.5 μm or less that adheres to the front surface and the back surface of the film to be measured is accumulated between the film to be measured and the moving contact 1 and the fixed contact 02 to cause a measurement error. There was a problem. Further, there is also a problem that the film to be measured floats and a measurement error occurs due to a slight change in the air flow in the vicinity of the film thickness measuring device, and an error of about 1 μm often occurs.

Due to such inconvenience, when the above-mentioned contact type film thickness measuring apparatus is used, a part of the film continuously produced is cut out and sampled, or the production line is temporarily stopped. However, there was a drawback that the film thickness had to be measured, and it could not be used in the online state.

[0006]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and is a film thickness measuring apparatus equipped with a simple cleaning jig that enables film thickness measurement in an online state. I will provide a.

[0007]

The above problems can be solved by the following cleaning jig for the film thickness measuring section. A film thickness measuring device for detecting a change in film thickness of a film to be measured as movement of the moving contact by moving the film to be measured while sandwiching the film to be measured between a moving contact and a fixed contact facing each other. , The moving contact and the fixed contact have tips formed on a smoothly curved convex portion, and at a position where the flexible wire can slide while individually contacting the tips of the moving contact and the fixed contact. A film thickness measuring device equipped with a cleaning jig, which is provided so as to be movable.

[0008]

EXAMPLES The present invention will be described in detail with reference to the examples shown in FIGS. First, FIG. 1 (side conceptual view of the film thickness measuring device of the embodiment) and FIG. 2 (similarly front conceptual view).
In, the moving contact 1 is attached to the cylinder 11 so as to be vertically movable, and the cylinder 11 is fixed to the upper fixed base 12. On the other hand, a fixed contact 2 is attached to the fixed base 21 at a position facing the moving contact 1. The tips of the moving contact 1 and the fixed contact 2 are formed into smoothly curved convex portions. Further, in this embodiment, two combinations of the pair of moving contacts 1 and fixed contacts 2 are provided in parallel in this way. To measure the film thickness with this device, this moving contact 1
The film thickness to be measured is lowered by moving the moving contactor 1 and the fixed contactor 2 between the smooth contact points of the moving contactor 1 and the fixed contactor 2 while sliding the film to be measured. As a motion, a differential transformer (not shown) connected to the moving contact 1 detects and electrically calculates the film thickness.

Further, in this embodiment, an inverted L-shaped (see FIG. 1) guide metal fitting 7 is fixed to the upper fixed base 12 at the upper side thereof, and the tip of the moving contact 1 is inserted from the insertion hole 71 to the lower side thereof. It is arranged so as to project. Further, a pair of arms 5a and 5b are attached to the cylinder 4 so as to be capable of expanding and contracting in the left-right direction (see FIG. 1) with the movable contactor 1 sandwiched from the left and right (see FIG. 2). And this arm 5
Flexible nylon wire 5 between a and 5b
1 is stretched along the lower surface of the lower side of the guide metal fitting 7. On the other hand, a pair of arms 6a and 6b are further attached to the cylinder 4 so as to be capable of expanding and contracting in the left-right direction (see FIG. 1) with the fixed base 21 fixing the fixed contactor 2 sandwiched from the left and right (see FIG. 2). There is. And this arm 6
A nylon wire 61 is also stretched between a and 6b along the upper surface of the fixed base 21.

Next, the operating conditions of the above-mentioned apparatus will be described. The film to be measured is normally in contact with the fixed contact 2 and is moving while sliding, and the moving contact 1 is separated from the film to be measured and waits upward. are doing. In this example, 15
The moving contact 1 is lowered at 0 second intervals and brought into contact with the film to be measured for 30 seconds, during which the film thickness is measured. Prior to this measurement operation, the arms 5a, 5b equipped with the wires 51, 61 are provided. And 6a and 6b are reciprocally expanded and contracted to the left and right, and the wires 51 and 61 are slid while contacting the tips of the movable contact 1 and the fixed contact 2 to remove foreign matter adhering in advance. .

[0011]

As described in the above embodiment, in the present invention, the tips of the moving contact 1 and the fixed contact 2 are formed into the smoothly curved convex portions, and the wire 5 is used prior to the measurement.
Since the foreign substances adhering to the movable contactor 1 and 61 are slid while being brought into contact with the tips of the moving contact 1 and the fixed contactor 2 in advance, the measurement error due to the presence of the foreign matter or the fluctuation of the air flow can be eliminated. , It became possible to measure the film thickness online at the production site. It should be noted that the frequency of occurrence of measurement error due to foreign matter was extremely large in the past, and therefore it was impossible to perform measurement in an online state. However, in the case of this embodiment, the measurement error is about once per 1200 m of the moving distance of the film to be measured. It became possible to measure in the online state by decreasing to.

(Preferred Embodiment) In the present invention, in addition to the embodiment described in the above embodiment, the structure thereof can be embodied as follows. (1) As the flexible wire, a nylon wire is used in the embodiment, but the present invention is not limited to this, and a plastic wire made of, for example, Tetron or fluororesin can be used. In the case of a nylon wire, a commercially available nylon fishing line can be diverted as it is, which is particularly convenient. (2) The flexible wire may be a monofilament or a monofilament composite fiber having a diameter of 0.1 to 0.
5 mm is preferable.

[0013]

Since the film thickness measuring device having the cleaning jig of the present invention is configured as described above, it is possible to measure the film thickness of the film to be measured online at the production site. Became. Therefore, the present invention has an extremely great industrial value as a film thickness measuring device which solves the conventional problems.

[Brief description of drawings]

FIG. 1 is a conceptual side view of a film thickness measuring device according to an embodiment of the present invention.

FIG. 2 is a conceptual front view of the same.

FIG. 3 is a side view conceptual diagram of a conventional film thickness measuring device.

[Explanation of symbols]

 1 Moving contact 2 Fixed contact 51 Wire 61 Wire

Claims (1)

[Claims] 1. A film thickness for detecting a change in the film thickness of the film to be measured as a movement of the moving contact by moving the film to be measured while sandwiching the film to be measured between the moving contact and the fixed contact facing each other. A measuring device, in which the tips of the moving contact and the fixed contact are formed on a smoothly curved convex portion, and the flexible wire is individually brought into contact with the tips of the moving contact and the fixed contact. A film thickness measuring device provided with a cleaning jig, which is provided so as to be movable at a slidable position.