JPH08136306A - Variable orifice - Google Patents
Variable orificeInfo
- Publication number
- JPH08136306A JPH08136306A JP27515494A JP27515494A JPH08136306A JP H08136306 A JPH08136306 A JP H08136306A JP 27515494 A JP27515494 A JP 27515494A JP 27515494 A JP27515494 A JP 27515494A JP H08136306 A JPH08136306 A JP H08136306A
- Authority
- JP
- Japan
- Prior art keywords
- orifice
- slit
- fixing plate
- plate
- movable plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、可変オリフィスに関す
るものである。FIELD OF THE INVENTION The present invention relates to variable orifices.
【０００２】[0002]
【従来の技術】ポンプ等の減圧手段により、真空容器の
内部を真空状態にまで減圧する場合には、真空容器の内
壁に囲まれる空間に存在している気体分子のほかに、真
空容器の内壁面に吸着している気体分子や、真空容器を
形成する材料の金属分子間に入り込んでいる気体分子
や、真空容器の外部から該真空容器を形成する材料の金
属分子間を経て内部へ透過する気体分子が、放出ガスと
して真空容器から放出される。2. Description of the Related Art When decompressing the inside of a vacuum container to a vacuum state by decompressing means such as a pump, in addition to gas molecules existing in the space surrounded by the inner wall of the vacuum container, Gas molecules adsorbed on the wall surface, gas molecules entering between metal molecules of the material forming the vacuum container, and permeating from the outside of the vacuum container to the inside through the metal molecules of the material forming the vacuum container Gas molecules are released from the vacuum vessel as a release gas.
【０００３】この真空容器からの放出ガス量を的確に把
握することは、真空容器の性能を評価する上で重要であ
る。Accurately grasping the amount of gas released from the vacuum container is important for evaluating the performance of the vacuum container.
【０００４】従来、真空容器からの放出ガス量を計測す
る手段として、オリフィス法とよばれる計測法が実施さ
れている。Conventionally, a measuring method called an orifice method has been carried out as a means for measuring the amount of gas released from a vacuum container.
【０００５】以下、オリフィス法の概略を図６により説
明する。The outline of the orifice method will be described below with reference to FIG.
【０００６】１は放出ガス量を計測すべき真空容器本
体、２は減圧手段（ポンプ）であり、真空容器本体１と
減圧手段２とは、中間部にオリフィス３を有する管路４
を介して連通している。Reference numeral 1 is a vacuum container body for measuring the amount of released gas, 2 is a depressurizing means (pump), and the vacuum container body 1 and the depressurizing means 2 have a conduit 4 having an orifice 3 in an intermediate portion.
Through the.
【０００７】この管路４には、管路４のオリフィス３よ
りも真空容器本体１側の部分の圧力（真空度）を検出す
る第１の圧力検出手段（第１の真空計）５と、管路４の
オリフィス３よりも減圧手段２側の部分の圧力を検出す
る第２の圧力検出手段（第２の真空計）６とが設けられ
ている。A first pressure detecting means (first vacuum gauge) 5 for detecting the pressure (vacuum degree) of the portion of the conduit 4 on the vacuum container body 1 side of the orifice 3 of the conduit 4, Second pressure detecting means (second vacuum gauge) 6 for detecting the pressure of the portion of the conduit 4 closer to the pressure reducing means 2 than the orifice 3 is provided.
【０００８】上記の両圧力検出手段５，６としては、計
測範囲が１０-8〜１０-2Ｐａ程度である電離真空計が用
いられている。An ionization vacuum gauge having a measuring range of about 10 -8 to 10 -2 Pa is used as both the pressure detecting means 5 and 6.
【０００９】真空容器本体１の放出ガス量を計測する際
には、減圧手段２により真空容器本体１の内部をある程
度まで減圧した状態において、第１の圧力検出手段５に
より計測される管路４のオリフィス３よりも真空容器本
体１側の部分の圧力（真空度）Ｐ1と、第２の圧力検出
手段６により計測される管路４のオリフィス３よりも減
圧手段２側の部分の圧力（真空度）Ｐ2とを計測する。When the amount of gas released from the vacuum container body 1 is measured, the pipe line 4 measured by the first pressure detecting means 5 in a state where the inside of the vacuum container body 1 is depressurized to some extent by the depressurizing means 2. the pressure (degree of vacuum) P 1 portion of the vacuum container body 1 side from the orifice 3, the pressure of the second pressure reducing means 2-side portion of the orifice 3 of the conduit 4 which is measured by the pressure detecting means 6 ( The degree of vacuum) P 2 is measured.
【００１０】このようにして管路４のオリフィス３の両
側の圧力（真空度）を計測すると、該圧力と予め求めて
おいたオリフィス３のコンダクタンス（図６において、
管路４を流れる放出ガスがオリフィス３を通過する際に
放出ガスが受ける排気抵抗の逆数）とによって、下記の
式（１）の関係から真空容器本体１の放出ガス量を求め
ることができる。When the pressure (vacuum degree) on both sides of the orifice 3 of the conduit 4 is measured in this manner, the pressure and the conductance of the orifice 3 previously obtained (in FIG. 6,
The amount of the released gas of the vacuum container body 1 can be obtained from the relationship of the following formula (1) by using the released gas flowing through the conduit 4 and the exhaust resistance of the released gas when passing through the orifice 3.
【００１１】[0011]
【数１】Ｑ＝Ｃ（Ｐ1 −Ｐ2 ）・・・・・・・（１） ここで、Ｑ ：放出ガス量 Ｃ ：コンダクタンス Ｐ1 ：第１の圧力検出手段５により計測される圧力（真
空度） Ｐ2 ：第２の圧力検出手段６により計測される圧力（真
空度）[Equation 1] Q = C (P 1 −P 2 ) ... (1) where, Q: amount of released gas C: conductance P 1 : pressure measured by the first pressure detecting means 5. (Degree of vacuum) P 2 : Pressure (degree of vacuum) measured by the second pressure detecting means 6.
【００１２】[0012]
【発明が解決しようとする課題】しかしながら、前述の
オリフィス法では、真空容器本体１から放出されるガス
量は予想がつき難く、放出ガス量に対してオリフィス３
のコンダクタンスが適切な値に設定されていない（小さ
すぎる）と、管路４のオリフィス３の真空容器本体１側
と減圧手段２側との圧力差が大きくなり、両圧力検出手
段５，６の計測誤差が異なってしまい、正しい放出ガス
量を把握できなくなることがある。However, in the above-mentioned orifice method, the amount of gas released from the vacuum container body 1 is difficult to predict, and the orifice 3 is compared with the amount of released gas.
If the conductance of is not set to an appropriate value (too small), the pressure difference between the vacuum container body 1 side of the orifice 3 of the conduit 4 and the pressure reducing means 2 side becomes large, and the pressure detecting means 5 and 6 of both pressure detecting means 5 and 6 The measurement error may be different and the correct amount of released gas may not be grasped.
【００１３】このようにオリフィス３のコンダクタンス
が適切でない場合には、該オリフィス３をコンダクタン
スの異なる他のものと交換する必要があるが、オリフィ
ス３の交換にあたっては、真空容器本体１及び管路４な
どを大気圧開放しなければならず、真空容器本体１の放
出ガス量を効率よく求めることができないという問題が
あった。When the conductance of the orifice 3 is not appropriate as described above, it is necessary to replace the orifice 3 with another one having a different conductance. When replacing the orifice 3, the vacuum container body 1 and the conduit 4 are replaced. However, there is a problem that the amount of gas released from the vacuum container body 1 cannot be efficiently obtained.
【００１４】本発明は、前述の実情に鑑み、コンダクタ
ンスを容易に変更することができる可変オリフィスを提
供することを目的としてなしたものである。The present invention has been made in view of the above circumstances, and an object thereof is to provide a variable orifice whose conductance can be easily changed.
【００１５】[0015]
【課題を解決するための手段】上記の目的を達成するた
め、本発明の可変オリフィスにおいては、管路の内部に
設けられ且つ略中央部に管路の径方向へ延びる第１のス
リットを形成した第１の固定板と、該第１の固定板の一
端面に接するように管路の内部に設けられ且つ略中央部
に前記の第１のスリットと略直交する方向へ延びる第２
のスリットを形成した第２の固定板と、該第２の固定板
の反第１の固定板側の端面を前記の第１のスリットに沿
って摺動し得るように設けた可動板と、該可動板を移動
させる移動手段とを備えた構成としている。In order to achieve the above object, in the variable orifice of the present invention, a first slit is provided inside the conduit and is formed substantially at the center of the first slit extending in the radial direction of the conduit. A first fixing plate, and a second fixing plate provided inside the conduit so as to contact one end face of the first fixing plate and extending in a direction substantially orthogonal to the first slit at a substantially central portion.
A second fixed plate having a slit formed therein, and a movable plate provided so that an end surface of the second fixed plate on the side opposite to the first fixed plate can slide along the first slit. And a moving means for moving the movable plate.
【００１６】また、上述した構成に替えて、管路の内部
に設けられ且つ略中央部に所定の大きさの角孔を有する
固定板と、該固定板の端面を前記の角孔の一方の対辺方
向に沿って摺動し得るように設けた可動板と、該可動板
を移動させる移動手段とを備えた構成としてもよい。Further, in place of the above-mentioned constitution, a fixing plate provided inside the pipe line and having a square hole of a predetermined size in a substantially central portion, and an end surface of the fixing plate is provided with one of the square holes. It may be configured to include a movable plate provided so as to be slidable along the opposite direction, and a moving means for moving the movable plate.
【００１７】[0017]
【作用】第１の固定板と第２の固定板とを設けた可変オ
リフィスでは、移動手段によって可動板を移動させる
と、第１のスリットと第２のスリットとが重複した部分
の見かけの開口面積が変化し、コンダクタンスが調整さ
れる。In the variable orifice provided with the first fixed plate and the second fixed plate, when the movable plate is moved by the moving means, the apparent opening of the portion where the first slit and the second slit overlap each other. The area changes and the conductance is adjusted.
【００１８】また、角孔を有する固定板を設けた可変オ
リフィスでは、移動手段によって可動板を移動させる
と、角孔の見かけの開口面積が変化し、コンダクタンス
が調整される。Further, in the variable orifice provided with the fixed plate having the square hole, when the movable plate is moved by the moving means, the apparent opening area of the square hole is changed and the conductance is adjusted.
【００１９】[0019]
【実施例】以下、本発明の実施例を図面を参照しつつ説
明する。Embodiments of the present invention will be described below with reference to the drawings.
【００２０】図１及び図２は本発明の可変オリフィスの
第１の実施例を示すものである。FIGS. 1 and 2 show a first embodiment of the variable orifice of the present invention.
【００２１】本実施例では、管路４の内部の略中央部
に、所定の幅を有し且つ管路４の径方向へ延びる第１の
スリット７を形成する第１の固定板８を設け、管路４の
内部の略中央部に、所定の幅を有し且つ前記の第１のス
リット７と略直交する管路４の径方向へ延びる第２のス
リット９を形成する第２の固定板１０を、前記の第１の
固定板８の減圧手段側の端面に接するように設けてい
る。In this embodiment, a first fixing plate 8 having a predetermined width and forming a first slit 7 extending in the radial direction of the conduit 4 is provided in the approximate center of the inside of the conduit 4. A second fixing member that forms a second slit 9 having a predetermined width and extending in the radial direction of the conduit 4 that is substantially orthogonal to the first slit 7 in a substantially central portion inside the conduit 4. The plate 10 is provided so as to be in contact with the end surface of the first fixing plate 8 on the pressure reducing means side.
【００２２】また、前記の第２の固定板１０の反第１の
固定板側の端面に沿って、前記の第１のスリット７の延
設方向に平行する方向へ摺動し得る一対の可動板１１，
１１を、管路４の中心に対して略対称する位置に配置
し、該各可動板１１，１１を管路４の中心に対して手動
によって近接離隔させ得る直線導入機１２，１２を管路
４の外部に設け、該直線導入機１２，１２の各スピンド
ル１３の先端を前記の可動板１１，１１にそれぞれ連結
し、可動板１１，１１と第１のスリット７と第２のスリ
ット９とによって矩形形状のオリフィス１８を形成させ
ている。A pair of movable members which can slide along the end surface of the second fixed plate 10 opposite to the first fixed plate 10 in a direction parallel to the extending direction of the first slit 7. Board 11,
11 are arranged at positions substantially symmetrical with respect to the center of the pipeline 4, and the linear introduction machines 12, 12 capable of manually moving the movable plates 11, 11 closer to and separated from the center of the pipeline 4 are provided. 4, the tip ends of the spindles 13 of the straight line introducing machines 12, 12 are connected to the movable plates 11, 11, respectively, and the movable plates 11, 11 and the first slit 7 and the second slit 9 are connected. To form a rectangular orifice 18.
【００２３】前記の直線導入機１２は、真空中に取り付
けた機器の直線運動の導入に用いられ、図３に示すよう
に、本体１４内に設けられたベローズ１５によって真空
側と大気側とを完全に遮断し圧力が１０-8Ｐａ以下の真
空領域まで使用可能なものであり、本体１４の軸心に沿
って延び本体１４の先端側へ突出するスピンドル１３
と、本体１４の後端部の軸心に螺合し且つその先端部が
前記のスピンドル１３の後端部と回転方向フリーの状態
で連結されたねじ軸１６を有し本体１４の後部に回動自
在に外嵌されたシンブル１７とにより形成され、前記の
シンブル１７と本体１４の外面に刻み込まれているスケ
ールとによってスピンドル１３の伸縮範囲を読み取り得
るようになっている。The straight line introducing machine 12 is used for introducing a linear motion of a device mounted in a vacuum, and as shown in FIG. 3, a bellows 15 provided in the main body 14 separates the vacuum side and the atmosphere side. A spindle 13 which is completely cut off and can be used up to a vacuum region where the pressure is 10 -8 Pa or less and which extends along the axis of the main body 14 and projects toward the tip side of the main body 14.
Has a screw shaft 16 which is screwed onto the shaft center of the rear end of the main body 14 and whose front end is connected to the rear end of the spindle 13 in a rotationally free state. It is formed by a thimble 17 that is movably fitted to the outside, and the range of expansion and contraction of the spindle 13 can be read by the thimble 17 and a scale engraved on the outer surface of the main body 14.
【００２４】次に作動について説明する。Next, the operation will be described.
【００２５】各直線導入機１２，１２のそれぞれのシン
ブル１７を手動によって回動しスピンドル１３を伸縮さ
せて一対の可動板１１，１１をそれぞれ各個別に移動し
管路４の中心に対して略対称に位置させて、第１のスリ
ット７の長手方向における前記の可動板１１，１１の間
隔を適宜設定することにより、矩形形状のオリフィス１
８の一方の対辺の間隔ｂが可動板１１によって決定され
る。The respective thimbles 17 of the straight line introducing machines 12, 12 are manually rotated to extend and retract the spindle 13 to move the pair of movable plates 11, 11 individually, and to move the pair of movable plates 11, 11 substantially to the center of the conduit 4. By arranging symmetrically and appropriately setting the interval between the movable plates 11, 11 in the longitudinal direction of the first slit 7, the rectangular orifice 1 is formed.
The distance b between the opposite sides of 8 is determined by the movable plate 11.
【００２６】なお、オリフィス１８の他方の対辺の間隔
ａは、第１のスリット７の幅によって予め決定されるの
で変化はない。The distance a between the opposite sides of the orifice 18 does not change because it is predetermined by the width of the first slit 7.
【００２７】而して、この矩形形状のオリフィス１８の
コンダクタンスＣは、下記の式（２）の関係から求める
ことができるので、要求されるコンダクタンスＣの値か
ら前記の可動板１１，１１を近接させて、あるいは離隔
させることによって設定し得るオリフィス１８の一方の
対辺の間隔ｂを予め逆算しておけば、この実施例の可変
オリフィスを先に述べたオリフィス法による真空容器本
体１（図６参照）からの放出ガス量検出に適用する際
に、放出ガス量に対して適切なコンダクタンスＣの値を
有するオリフィス１８を容易に設定し得る。Since the conductance C of the rectangular orifice 18 can be obtained from the relationship of the following equation (2), the movable plates 11, 11 are brought close to each other from the required conductance C value. If the distance b on one of the opposite sides of the orifice 18 that can be set by separating or separating is calculated in advance, the variable orifice of this embodiment is used as the vacuum container body 1 (see FIG. 6) by the orifice method described above. When applied to the detection of the amount of released gas from (1), the orifice 18 having an appropriate value of the conductance C with respect to the amount of released gas can be easily set.
【００２８】[0028]
【数２】 Ｃ＝３０９Ｋａ2 ｂ2 ／（ａ＋ｂ）Ｌ・・・・・・・（２） ここで、Ｃ ：コンダクタンス Ｋ ：矩形形状のオリフィス１８の補正係数（下表によ
る） ｂ ：オリフィス１８の一方の対辺の間隔 ａ ：オリフィス１８の他方の対辺の間隔 Ｌ ：オリフィス１８の長さ（厚さ）## EQU2 ## C = 309 Ka 2 b 2 /(a+b)L...(2) where C: conductance K: correction coefficient of rectangular orifice 18 (according to the table below) b: orifice 18 Interval of one opposite side a: Interval of the other opposite side of the orifice 18 L: Length (thickness) of the orifice 18
【００２９】[0029]
【表１】 [Table 1]
【００３０】本実施例においては可動板１１を移動させ
ることによって、両スリット７，９の重複した部分の開
口部分の見かけの開口面積、すなわち、オリフィス１８
の開口面積が変化し得るように形成しているので、式
（２）の関係から求め得る各種のコンダクタンスＣのオ
リフィス１８を設定することが可能となり、この実施例
における可変オリフィスを先に述べたオリフィス法によ
る真空容器本体１（図６参照）からの放出ガス量検出に
適用した場合には、真空容器本体１の放出ガス量を効率
よく容易に求めることができる。In the present embodiment, by moving the movable plate 11, the apparent opening area of the opening of the overlapping portion of both slits 7 and 9, that is, the orifice 18 is formed.
Since it is formed so that the opening area of can be changed, it becomes possible to set the orifices 18 of various conductances C that can be obtained from the relationship of the equation (2), and the variable orifice in this embodiment is described above. When applied to the detection of the amount of gas released from the vacuum container body 1 (see FIG. 6) by the orifice method, the amount of gas released from the vacuum container body 1 can be efficiently and easily obtained.
【００３１】図４及び図５は本発明の可変オリフィスの
第２の実施例を示すものである。FIGS. 4 and 5 show a second embodiment of the variable orifice of the present invention.
【００３２】本実施例では、管路４の内部の略中央部に
所定の大きさの角孔１９を有する固定板２０を設け、前
記の固定板２０の一方の端面側に沿って前記の角孔１９
の上下方向へ摺動し得る一対の可動板１１，１１を、管
路４の中心に対して略対称する位置に配置し、該各可動
板１１，１１を管路４の中心に対して手動によって近接
離隔させ得る直線導入機１２，１２を管路４の外部に設
け、該直線導入機１２，１２の各スピンドル１３の先端
を前記の可動板１１，１１にそれぞれ連結し、可動板１
１，１１と角孔１９とによって矩形形状のオリフィス２
１を形成させている。In this embodiment, a fixing plate 20 having a square hole 19 of a predetermined size is provided in the substantially central portion of the inside of the conduit 4, and the above-mentioned corner is formed along one end face side of the fixing plate 20. Hole 19
A pair of movable plates 11, 11 which can slide in the vertical direction of the pipe are arranged at positions substantially symmetrical with respect to the center of the pipe line 4, and the movable plates 11, 11 are manually arranged with respect to the center of the pipe line 4. The linear guides 12, 12 that can be moved closer to and separated from each other are provided outside the pipe line 4, and the tip ends of the spindles 13 of the linear guides 12, 12 are connected to the movable plates 11, 11 respectively.
The rectangular orifice 2 is formed by the reference numerals 1, 11 and the square hole 19.
1 is formed.
【００３３】次に作動について説明する。Next, the operation will be described.
【００３４】各直線導入機１２，１２のそれぞれのシン
ブル１７を手動によって回動しスピンドル１３を伸縮さ
せて一対の可動板１１，１１をそれぞれ各個別に移動し
管路４の中心に対して略対称に位置させて、角孔１９の
上下方向における前記の可動板１１，１１の間隔を適宜
設定することにより、矩形形状のオリフィス２１の一方
の対辺の間隔ｂが可動板１１によって決定される。The respective thimbles 17 of the straight line introducing machines 12, 12 are manually rotated to extend and retract the spindle 13 to move the pair of movable plates 11, 11 individually, and to move the movable plate 11, 11 substantially to the center of the pipe line 4. By arranging symmetrically and appropriately setting the interval between the movable plates 11, 11 in the vertical direction of the square hole 19, the interval b between the opposite sides of the rectangular orifice 21 is determined by the movable plate 11.
【００３５】なお、オリフィス２１の他方の対辺の間隔
ａは、角孔１９の形状によって予め決定されるので変化
はない。The distance a between the opposite sides of the orifice 21 does not change because it is predetermined by the shape of the square hole 19.
【００３６】而して、この矩形形状のオリフィス２１の
コンダクタンスＣは、前記の式（２）の関係から求める
ことができるので、要求されるコンダクタンスＣの値か
ら前記の可動板１１，１１を近接させて、あるいは離隔
させることによって設定し得るオリフィス２１の一方の
対辺の間隔ｂを予め逆算しておけば、この実施例の可変
オリフィスを先に述べたオリフィス法による真空容器本
体１（図６参照）からの放出ガス量検出に適用する際
に、放出ガス量に対して適切なコンダクタンスＣの値を
有するオリフィス２１を容易に設定し得ることは、前記
の本発明の第１の実施例における可変オリフィスと変わ
らない。Since the conductance C of the rectangular orifice 21 can be obtained from the relationship of the above equation (2), the movable plates 11, 11 are brought close to each other from the required conductance C value. If the distance b between the opposite sides of the orifice 21 that can be set by moving or separating them is calculated in advance, the variable orifice of this embodiment is used as the vacuum container main body 1 by the orifice method described above (see FIG. 6). ), It is possible to easily set the orifice 21 having an appropriate value of the conductance C with respect to the amount of released gas. Same as an orifice.
【００３７】本実施例においては、可動板１１を移動さ
せることによって、角孔１９の見かけの開口面積、すな
わち、オリフィス２１の開口面積が変化し得るように形
成しているので、式（２）の関係から求め得る各種のコ
ンダクタンスＣのオリフィス２１を設定することが可能
となり、この実施例における可変オリフィスを先に述べ
たオリフィス法による真空容器本体１（図６参照）から
の放出ガス量検出に適用した場合には、真空容器本体１
の放出ガス量を効率よく容易に求めることができる。In the present embodiment, the movable plate 11 is moved so that the apparent opening area of the square hole 19, that is, the opening area of the orifice 21 can be changed. It becomes possible to set the orifices 21 of various conductances C that can be obtained from the relationship of the above, and the variable orifice in this embodiment is used for detecting the amount of gas released from the vacuum container body 1 (see FIG. 6) by the orifice method described above. When applied, the vacuum container body 1
The amount of released gas can be efficiently and easily obtained.
【００３８】なお、本発明は前述の実施例にのみ限定さ
れるものではなく、本発明の要旨を逸脱しない範囲内に
おいて種々変更を加え得ることは勿論である。The present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.
【００３９】[0039]
【発明の効果】本発明の請求項１に記載した可変オリフ
ィスにおいては、可動板を移動させることによって第
１、第２の両スリットの重複した開口部分の見かけの開
口面積が変化するので、また、本発明の請求項２に記載
した可変オリフィスにおいては、可動板を移動させるこ
とによって角孔の見かけの開口面積が変化するので、そ
のいずれをオリフィス法による真空容器本体からの放出
ガス量検出に適用した場合には、放出ガス量に対して適
切な値のコンダクタンスを容易に得ることができ、従っ
て、真空容器本体の放出ガス量を容易且つ効率よく求め
ることができる。In the variable orifice according to the first aspect of the present invention, the apparent opening area of the overlapping opening portions of the first and second slits is changed by moving the movable plate. In the variable orifice according to claim 2 of the present invention, since the apparent opening area of the square hole is changed by moving the movable plate, whichever is used for detecting the amount of gas released from the vacuum container body by the orifice method. When applied, it is possible to easily obtain an appropriate value of conductance with respect to the amount of released gas, and thus it is possible to easily and efficiently obtain the amount of released gas of the vacuum container body.
【図１】本発明の可変オリフィスの第１の実施例の概略
を表す断面図である。FIG. 1 is a cross-sectional view schematically showing a first embodiment of a variable orifice according to the present invention.
【図２】図１のＩＩ−ＩＩ矢視図である。FIG. 2 is a view taken along the line II-II of FIG.
【図３】図１に関連する直線導入機の概略を表す断面図
である。FIG. 3 is a cross-sectional view showing an outline of a straight line introducing machine related to FIG.
【図４】本発明の可変オリフィスの第２の実施例の概略
を表す断面図である。FIG. 4 is a cross-sectional view schematically showing a second embodiment of the variable orifice of the present invention.
【図５】図４のＶ−Ｖ矢視図である。5 is a view taken along the line VV of FIG.
【図６】従来のオリフィス法の一例の概略を表す断面図
である。FIG. 6 is a sectional view schematically showing an example of a conventional orifice method.
４ 管路 ７ 第１のスリット ８ 第１の固定板 ９ 第２のスリット １０ 第２の固定板 １１ 可動板 １２ 直線導入機（移動手段） １９ 角孔 ２０ 固定板 4 Pipeline 7 1st slit 8 1st fixed plate 9 2nd slit 10 2nd fixed plate 11 Movable plate 12 Straight line introduction machine (moving means) 19 Square hole 20 Fixed plate
Claims (2)
路の径方向へ延びる第１のスリットを形成した第１の固
定板と、該第１の固定板の一端面に接するように管路の
内部に設けられ且つ略中央部に前記の第１のスリットと
略直交する方向へ延びる第２のスリットを形成した第２
の固定板と、該第２の固定板の反第１の固定板側の端面
を前記の第１のスリットに沿って摺動し得るように設け
た可動板と、該可動板を移動させる移動手段とを備えて
なることを特徴とする可変オリフィス。1. A first fixing plate provided inside a pipe and having a first slit extending substantially in the center thereof in the radial direction of the pipe, and a first fixing plate contacting one end surface of the first fixing plate. A second slit which is provided inside the pipe and has a second slit extending in a direction substantially orthogonal to the first slit at a substantially central portion.
Fixed plate, a movable plate provided so that the end surface of the second fixed plate on the side opposite to the first fixed plate can slide along the first slit, and a movement for moving the movable plate. And a variable orifice.
定の大きさの角孔を有する固定板と、該固定板の端面を
前記の角孔の一方の対辺方向に沿って摺動し得るように
設けた可動板と、該可動板を移動させる移動手段とを備
えてなることを特徴とする可変オリフィス。2. A fixing plate which is provided inside a pipe line and has a square hole of a predetermined size in a substantially central portion, and an end face of the fixing plate slides along one opposite side direction of the square hole. A variable orifice comprising a movable plate provided so as to be movable, and a moving means for moving the movable plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27515494A JPH08136306A (en) | 1994-11-09 | 1994-11-09 | Variable orifice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27515494A JPH08136306A (en) | 1994-11-09 | 1994-11-09 | Variable orifice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08136306A true JPH08136306A (en) | 1996-05-31 |
Family
ID=17551432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27515494A Pending JPH08136306A (en) | 1994-11-09 | 1994-11-09 | Variable orifice |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08136306A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006004674A2 (en) * | 2004-06-25 | 2006-01-12 | Rivatek Incorporated | Software correction method and apparatus for a variable orifice flow meter |
| US7082842B2 (en) | 2004-06-25 | 2006-08-01 | Rivatek Incorporated | Software correction method and apparatus for a variable orifice flow meter |
| US7131451B2 (en) | 2003-09-04 | 2006-11-07 | Rivatek Incorporated | Apparatus for controlling and metering fluid flow |
| WO2009052284A1 (en) * | 2007-10-19 | 2009-04-23 | Rivatek, Inc. | Apparatus for controlling and metering fluid flow |
| US7530278B2 (en) | 2006-11-02 | 2009-05-12 | Rivatek, Inc. | Fluid flow blender and methods |
-
1994
- 1994-11-09 JP JP27515494A patent/JPH08136306A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7131451B2 (en) | 2003-09-04 | 2006-11-07 | Rivatek Incorporated | Apparatus for controlling and metering fluid flow |
| US7422028B2 (en) | 2003-09-04 | 2008-09-09 | Rivatek, Inc. | Apparatus for controlling and metering fluid flow |
| WO2006004674A2 (en) * | 2004-06-25 | 2006-01-12 | Rivatek Incorporated | Software correction method and apparatus for a variable orifice flow meter |
| WO2006004674A3 (en) * | 2004-06-25 | 2006-06-08 | Rivatek Inc | Software correction method and apparatus for a variable orifice flow meter |
| US7082842B2 (en) | 2004-06-25 | 2006-08-01 | Rivatek Incorporated | Software correction method and apparatus for a variable orifice flow meter |
| US7096744B2 (en) | 2004-06-25 | 2006-08-29 | Rivatek Incorporated | Software correction method and apparatus for a variable orifice flow meter |
| US7302863B2 (en) | 2004-06-25 | 2007-12-04 | Rivatek Incorporated | Software correction method and apparatus for a variable orifice flow meter |
| US7530278B2 (en) | 2006-11-02 | 2009-05-12 | Rivatek, Inc. | Fluid flow blender and methods |
| WO2009052284A1 (en) * | 2007-10-19 | 2009-04-23 | Rivatek, Inc. | Apparatus for controlling and metering fluid flow |
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