JP2865888B2 - マルチターボ型真空ポンプ - Google Patents

マルチターボ型真空ポンプ

Info

Publication number
JP2865888B2
JP2865888B2 JP3854491A JP3854491A JP2865888B2 JP 2865888 B2 JP2865888 B2 JP 2865888B2 JP 3854491 A JP3854491 A JP 3854491A JP 3854491 A JP3854491 A JP 3854491A JP 2865888 B2 JP2865888 B2 JP 2865888B2
Authority
JP
Japan
Prior art keywords
turbo
sub
rotor
vacuum pump
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3854491A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04276197A (ja
Inventor
哲也 阿部
義夫 村上
貴 新井
晴繁 大澤
聰 秦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP3854491A priority Critical patent/JP2865888B2/ja
Priority to DE19924206972 priority patent/DE4206972A1/de
Publication of JPH04276197A publication Critical patent/JPH04276197A/ja
Application granted granted Critical
Publication of JP2865888B2 publication Critical patent/JP2865888B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP3854491A 1991-03-05 1991-03-05 マルチターボ型真空ポンプ Expired - Fee Related JP2865888B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3854491A JP2865888B2 (ja) 1991-03-05 1991-03-05 マルチターボ型真空ポンプ
DE19924206972 DE4206972A1 (de) 1991-03-05 1992-03-05 Mehrturbinen-vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3854491A JP2865888B2 (ja) 1991-03-05 1991-03-05 マルチターボ型真空ポンプ

Publications (2)

Publication Number Publication Date
JPH04276197A JPH04276197A (ja) 1992-10-01
JP2865888B2 true JP2865888B2 (ja) 1999-03-08

Family

ID=12528229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3854491A Expired - Fee Related JP2865888B2 (ja) 1991-03-05 1991-03-05 マルチターボ型真空ポンプ

Country Status (2)

Country Link
JP (1) JP2865888B2 (enExample)
DE (1) DE4206972A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29715035U1 (de) * 1997-08-22 1997-10-30 Leybold Vakuum GmbH, 50968 Köln Reibungsvakuumpumpe
DE10149366A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe
DE10354204B4 (de) * 2003-11-20 2016-03-10 Leybold Vakuum Gmbh Molekularpumpe
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
CN111637069A (zh) * 2020-07-07 2020-09-08 中国空气动力研究与发展中心超高速空气动力研究所 一种多入口高速离心真空泵组

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ

Also Published As

Publication number Publication date
JPH04276197A (ja) 1992-10-01
DE4206972C2 (enExample) 1993-08-12
DE4206972A1 (de) 1992-09-10

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